Boat flapping device

Abstract

The utility model relates to the technical field of silicon wafer production, and provides a boat beating device, which comprises a support frame, the boat beating assembly comprises a first driving part and a boat beating part which are arranged on the supporting frame, the boat beating part is arranged on the first driving part, and the first driving part is used for driving the boat beating part to beat the graphite boat; and the dustproof assembly comprises a winding roller and a second driving piece which are arranged on the supporting frame, an adsorption film is wound on the winding roller, and the second driving piece is used for driving the winding roller to lay the adsorption film between the boat beating piece and the graphite boat. By arranging the dustproof assembly with the winding roller, the winding roller can move along with the graphite boat to lay the adsorption film between the boat beating piece and the graphite boat in advance, in the beating process, the adsorption film can isolate the boat beating piece and the graphite boat, and dust on the boat beating assembly is prevented from falling into the graphite boat; and in the flapping process, the adsorption film can adsorb dust on the surface of the graphite boat, so that the dust entering the graphite boat is effectively reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer production, in particular to a boat slapper. Background Art

[0002] In the production and manufacturing of battery wafers, a lot of dust and particles are generated in many processes. For example, in the silicon wafer coating stage, after the graphite boat loads and unloads silicon wafers on the main machine table, a boat slapper is required to pat the graphite boat to ensure that the silicon wafers in the graphite boat are closely attached to the graphite boat. However, since dust accumulates after the boat slapper is used for a long time, during the process of patting and contacting the graphite boat, the dust on the boat slapper will fall into the graphite boat, causing silicon wafer contamination and affecting the coating effect. Summary of the Utility Model

[0003] Based on this, the present application provides a boat slapper that reduces dust pollution of the graphite boat.

[0004] In a first aspect, the present application provides a boat slapper, which includes:

[0005] A support frame;

[0006] A boat slapping assembly, including a first driving member and a boat slapping member disposed on the support frame, the boat slapping member is disposed on the first driving member, and the first driving member is used to drive the boat slapping member to pat the graphite boat;

[0007] A dust-proof assembly, including a winding roller and a second driving member disposed on the support frame, an adsorption film is wound on the winding roller, and the second driving member is used to drive the winding roller to lay the adsorption film between the boat slapping member and the graphite boat.

[0008] In some embodiments, the winding roller is detachably disposed on the support frame.

[0009] In some embodiments, the dust-proof assembly further includes a support member, the support members are respectively disposed at both ends of the winding roller for supporting the winding roller, and the support member is connected to the support frame.

[0010] In some embodiments, a fixing groove is provided on the support frame, a fixing block is provided on the support member, and the fixing block and the fixing groove are detachably connected by mutual fitting.

[0011] In some embodiments, the dust-proof assembly includes a positioning member, the positioning member is connected to the free end of the adsorption film, and the positioning member is used to position the free end of the adsorption film on the graphite boat.

[0012] In some embodiments, the positioning member includes a positioning film layer spliced with the free end of the adsorption film, and the thickness of the positioning film layer is greater than the thickness of the adsorption film.

[0013] In some embodiments, a plurality of protrusions are provided on the positioning member, and the protrusions are provided on a surface of the positioning member close to the graphite boat.

[0014] In some embodiments, the positioning member is detachably connected to the adsorption film.

[0015] In some embodiments, a fixing clip is provided on the positioning member, and the adsorption film can be fixed to the positioning member by clamping.

[0016] In some embodiments, the boat hitting device further includes a position sensor and a controller. The controller is electrically connected to the position sensor and the second driving member independently. The position sensor is used to detect the position information of the graphite boat and transmit the position information to the controller, and the controller controls the driving mode of the second driving member according to the position information.

[0017] Compared with the traditional technology, the utility model has at least the following beneficial effects:

[0018] In this application, by providing a dust-proof component with a winding roller, the winding roller can move along with the graphite boat to pre-lay the adsorption film between the boat hitting member and the graphite boat. During the hitting process, the adsorption film can isolate the boat hitting member and the graphite boat, preventing the dust on the boat hitting assembly from falling into the graphite boat. Moreover, the adsorption film has a certain function of adsorbing dust, and can adsorb the dust on the surface of the graphite boat onto the adsorption film during the hitting process. By regularly replacing or cleaning the adsorption film, the dust in the graphite boat can be effectively reduced, thereby avoiding the contamination of the silicon wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic structural diagram of a boat hitting device provided in an embodiment of the utility model;

[0020] Figure 2 It is a schematic structural diagram of a dust-proof component provided in an embodiment of the utility model;

[0021] Figure 3 It is a schematic structural diagram of a fixing member provided in an embodiment of the utility model;

[0022] Figure 4 It is a schematic structural diagram of a fixing groove provided in an embodiment of the utility model;

[0023] Figure 5 It is a schematic connection structure diagram of a positioning member and an adsorption film provided in an embodiment of the utility model.

[0024] Among them, 100 - support frame; 110 - fixing groove; 200 - paddle boat assembly; 210 - paddle boat part; 300 - dust - proof assembly; 310 - winding roller; 320 - adsorption film; 330 - second driving part; 340 - positioning part; 341 - protrusion; 342 - fixing clamp; 350 - support part; 351 - fixing block; 400 - graphite boat. Detailed implementation manners

[0025] The following will, in combination with the accompanying drawings, embodiments and examples, further elaborate on the present utility model in detail. These embodiments and examples are only used to illustrate the present utility model and not to limit the scope of the present utility model. The purpose of providing these embodiments and examples is to make the understanding of the disclosed content of the present utility model more thorough and comprehensive. It should also be understood that the present utility model can be implemented in many different forms and is not limited to the embodiments and examples described herein. Those skilled in the art can make various changes or modifications without departing from the connotation of the present utility model, and the equivalent forms obtained also fall within the protection scope of the present utility model. In addition, in the following description, a large number of specific details are given to provide a more thorough understanding of the present utility model. It should be understood that the present utility model can be implemented without one or more of these details.

[0026] It should be understood that the orientation or positional relationship indicated by terms such as "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation to the present utility model.

[0027] In the description of the present utility model, unless otherwise clearly specified and defined, the terms "connected", "connected to", "fixed" and "set" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0028] In the present utility model, "optionally", "optional", "optional" mean that it can be either present or absent, that is, it refers to any one of the two parallel options of "present" or "absent". If "optional" appears in multiple places in a technical solution, without special instructions and without contradictions or mutual restrictions, each "optional" is independent of each other.

[0029] In the present utility model, among the technical features described in an open-ended manner, it includes a closed technical solution composed of the listed features, and also includes an open technical solution containing the listed features.

[0030] In the present utility model, terms such as "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or quantity, nor can they be understood as implicitly indicating the importance or quantity of the indicated technical features. Moreover, "first", "second", etc. only serve the purpose of non-exhaustive listing and description, and it should be understood that they do not constitute a closed limitation on quantity.

[0031] All the documents mentioned in the present utility model are cited as references in the present utility model, just as if each document is cited separately as a reference. Unless it conflicts with the utility model purpose and / or technical solution of the present utility model, otherwise, the cited documents involved in the present utility model are cited with their entire content and entire purpose. When the present utility model involves cited documents, the definitions of relevant technical features, terms, nouns, phrases, etc. in the cited documents are also cited together. When the present utility model involves cited documents, the examples and preferred methods of the relevant technical features cited can also be incorporated as references into the present utility model, but limited to the extent that the present utility model can be implemented. It should be understood that when the cited content conflicts with the description in the present utility model, the present utility model shall prevail or be corrected adaptively according to the description of the present utility model.

[0032] In the traditional technology, dust is likely to accumulate on the boat pusher after long-term operation. During the process of patting the graphite boat, the dust is likely to fall onto the silicon wafers on the graphite boat, thereby affecting the coating effect. However, frequently cleaning the boat pusher affects the production efficiency.

[0033] Based on this, in the first aspect of the present application, a boat pusher is provided, as Figure 1 shown. The boat pusher includes:

[0034] A support frame 100;

[0035] A boat pushing assembly 200, including a first driving member and a boat pushing member 210 disposed on the support frame 100. The boat pushing member 210 is disposed on the first driving member, and the first driving member is used to drive the boat pushing member 210 to pat the graphite boat 400;

[0036] A dust-proof assembly 300, as Figure 2 shown, including a winding roller 310 and a second driving member 330 disposed on the support frame 100. An adsorption film 320 is wound on the winding roller 310, and the second driving member 330 is used to drive the winding roller 310 to lay the adsorption film 320 between the boat pushing member 210 and the graphite boat 400.

[0037] In this application, a dust-proof component 300 with a winding roller 310 is provided. The winding roller 310 can move along with the graphite boat 400 to pre-lay the adsorption film 320 between the boat-slapping member 210 and the graphite boat 400. During the slapping process, the adsorption film 320 can isolate the boat-slapping member 210 and the graphite boat 400, preventing the dust on the boat-slapping assembly 200 from falling into the graphite boat 400. Moreover, the adsorption film 320 has a certain function of adsorbing dust and can adsorb the dust on the surface of the graphite boat 400 onto the adsorption film 320 during the slapping process. By regularly replacing or cleaning the adsorption film 320, the dust in the graphite boat 400 can be effectively reduced, thereby avoiding silicon wafer contamination.

[0038] It can be understood that the adsorption film 320 can achieve the adsorption of dust, for example, it can be electrostatic adsorption or adhesive adsorption, etc. Optionally, the adsorption film 320 includes a rubber film. Further optionally, an adhesion layer is provided on the surface of the adsorption film 320 close to the graphite boat 400 to adsorb dust using the adhesion layer. It should be noted that in this application, the adhesion layer can achieve the purpose of adsorbing dust, and it is not necessary to completely adhere the adsorption film 320 to the graphite boat 400. For example, the adsorption film 320 can be spaced from the graphite boat 400 or partially adsorbed on the graphite boat 400 to avoid the adsorption film 320 being difficult to wind up and detach from the graphite boat 400.

[0039] In some embodiments, the first driving member includes a vibrator or a telescopic cylinder. It can be understood that the first driving member can drive the boat-slapping member 210 to slap the graphite boat 400.

[0040] In some embodiments, the second driving member 330 includes a motor. It can be understood that the second driving member 330 can drive the winding roller 310 to rotate to achieve the winding and unwinding operations. For example, a single motor can be used to achieve the winding and unwinding operations; alternatively, different motors can be independently selected for the winding operation and the unwinding operation respectively.

[0041] In some embodiments, the winding roller 310 is detachably arranged on the support frame 100. In this application, the winding roller 310 is detachably arranged on the support frame 100. When the adsorption film 320 needs to be cleaned, the winding roller 310 can be directly disassembled and replaced, effectively ensuring the dust-proof effect of the graphite boat 400 and improving the cleaning efficiency.

[0042] In some embodiments, the dust-proof component 300 further includes a support member 350. The support member 350 is respectively arranged at both ends of the winding roller 310 to support the winding roller 310, and the support member 350 is connected to the support frame 100. In this application, the winding roller 310 is supported by the support member 350 to ensure a certain distance between the winding roller 310 and the boat-slapping assembly 200, so that the adsorption film 320 can be laid on the graphite boat 400 before slapping.

[0043] In some embodiments, such as Figure 3 and Figure 4 shown, a fixing groove 110 is provided on the support frame 100, and a fixing block 351 is provided on the support member 350. The fixing block 351 and the fixing groove 110 are detachably connected by mutual fitting. In this application, the support member 350 is detachably arranged on the support frame 100. When replacing the winding roller 310, the support member 350 can be removed to facilitate the removal of the winding roller 310, thereby improving the disassembly and replacement efficiency of the winding roller 310.

[0044] In some embodiments, the dust-proof assembly 300 includes a positioning member 340. The positioning member 340 is connected to the free end of the adsorption film 320, and the positioning member 340 is used to position the free end of the adsorption film 320 on the graphite boat 400. It can be understood that the free end of the adsorption film 320 located on the winding roller 310 in this application refers to the end of the adsorption film 320 that can be freely wound and unwound, that is, the end far from the winding roller 310. Opposite to it is the fixed end of the adsorption film 320 located on the winding roller 310. The fixed end refers to the end wound and fixed on the winding roller 310, and the fixed end does not change during the winding and unwinding process.

[0045] In this application, the positioning member 340 is provided at the free end of the adsorption film 320, which can accurately position and lay the adsorption film 320 on the graphite boat 400, avoiding deviation during laying under the influence of the external environment and affecting the dust isolation and prevention effect of the adsorption film 320.

[0046] In some embodiments, the positioning member 340 includes a positioning film layer spliced with the free end of the adsorption film 320, and the thickness of the positioning film layer is greater than the thickness of the adsorption film 320. It can be understood that the positioning film layer can be made of the same material as the adsorption film 320 or different materials, and can be reasonably selected according to actual needs. For example, the positioning film layer is made of the same material as the adsorption film 320, that is, a positioning film layer with a larger thickness is prepared during the preparation process. Optionally, a fillet transition is formed between the positioning film layer and the adsorption film 320. In this application, a positioning film layer with a larger thickness is provided at the free end of the adsorption film 320. The positioning film layer can have a better fitting effect with the graphite boat 400 under the action of gravity, and further can fix the free end of the adsorption film 320 on the graphite boat 400. Then, with the movement of the graphite boat 400 and the unwinding drive of the second driving member 330, the adsorption film 320 is accurately laid between the graphite boat 400 and the paddle member 210.

[0047] In some embodiments, a plurality of protrusions 341 are provided on the positioning member 340, and the protrusions 341 are disposed on a surface of the positioning member 340 close to the graphite boat 400. In this application, a plurality of protrusions 341 are provided on the positioning member 340, and the structure of the protrusions 341 can improve the friction force with the graphite boat 400, and can be anchored with the grooves on the graphite boat 400, reducing the relative sliding between the adsorption film 320 and the graphite boat 400 during the unwinding process of the adsorption film 320, and improving the stability of the laying of the adsorption film 320.

[0048] In some embodiments, the protrusion 341 is an arc-shaped protrusion 341. In this application, the shape of the protrusion 341 is set to be arc-shaped to avoid affecting the winding when the adsorption film 320 is wound due to the engagement between the protrusion 341 and the groove of the graphite boat 400. It can be understood that when the winding roller 310 unwinds, the unwinding speed of the adsorption film 320 is the same as the moving speed of the graphite boat 400. Therefore, the positioning member 340 has a certain fixing effect, and the adsorption film 320 can be prevented from being disturbed under the influence of the external environment. Further, when the adsorption film 320 is wound, since the winding direction is opposite to the moving direction of the graphite boat 400, and the fixing effect of the positioning member 340 is weak, the adsorption film 320 can be wound back under the winding drive of the second driving member 330.

[0049] In some embodiments, the positioning member 340 is detachably connected to the adsorption film 320. In this application, the positioning member 340 is detachably connected to the adsorption film 320. Since the thickness of the positioning member 340 is greater than that of the adsorption film 320 or other materials are used, the positioning member 340 is convenient to clean. After the winding roller 310 is disassembled, only the part of the adsorption film 320 needs to be replaced.

[0050] In some embodiments, a fixing clip 342 is provided on the positioning member 340, and the fixing clip 342 can fix the adsorption film 320 on the positioning member 340 by clamping.

[0051] In some embodiments, a fixing clip 342 is provided on the adsorption film 320 in the fixing area. The fixing clip 342 is clamped between the adsorption film 320 in the fixing area and the adsorption film 320 in the adsorption area, and the fixing clip 342 is detachably connected to the adsorption film 320 in the fixing area and the adsorption film 320 in the adsorption area.

[0052] In some embodiments, a magnet is provided inside the positioning member 340. In this application, a magnet is inserted into the positioning member 340, and the magnetic force of the magnet can be used to further improve the positioning and fixing effect between the positioning member 340 and the graphite boat 400.

[0053] In some embodiments, the boat slapper further includes a position sensor and a controller. The controller is electrically connected to the position sensor and the second driving member 330 independently. The position sensor is configured to detect the position information of the graphite boat 400 and transmit the position information to the controller. The controller controls the driving mode of the second driving member 330 according to the position information. Specifically, when the position sensor detects that the graphite boat 400 moves to the position of the boat slapper, the controller controls the second driving member 330 to drive the winding roller 310 to unwind; when the position sensor detects that the graphite boat 400 leaves the position of the boat slapper, the controller controls the second driving member 330 to drive the winding roller 310 to wind up.

[0054] Exemplarily, a method for slapping the boat slapper with the above boat slapper is provided, including the following steps:

[0055] The position sensor detects the position of the graphite boat 400. When the graphite boat 400 moves to the area of the boat slapper, the controller controls the second driving member 330 to drive the winding roller 310 to unwind. The positioning member 340 contacts the graphite boat 400 in advance and is fixed on the graphite boat 400. As the graphite boat 400 moves, the adsorption film 320 is laid on the graphite boat 400. At the same time, the boat slapping assembly 200 is activated to slap the graphite boat 400 with the adsorption film 320 laid thereon. At this time, the adsorption film 320 can improve the adsorption effect of the adsorption film 320 and the dust on the graphite boat 400 under the slapping action, and can adsorb the dust falling from the boat slapping assembly 200 onto the adsorption film 320;

[0056] When the graphite boat 400 leaves the area of the boat slapper, the controller controls the second driving member 330 to drive the winding roller 310 to wind up. The adsorption film 320 is wound up, and is ready to slap the next graphite boat 400;

[0057] After running for a period of time, when the dust on the adsorption film 320 on the winding roller 310 accumulates more, the winding roller 310 is disassembled and replaced. For the disassembled winding roller 310, the adsorption film 320 on the winding roller 310 is replaced and then used again.

[0058] In summary, in the present application, by providing the dust-proof assembly 300 with the winding roller 310, the winding roller 310 can lay the adsorption film 320 in advance between the boat slapping member 210 and the graphite boat 400 as the graphite boat 400 moves. During the slapping process, the adsorption film 320 can isolate the boat slapping member 210 and the graphite boat 400, avoiding the dust on the boat slapping assembly 200 from falling into the graphite boat 400. Moreover, the adsorption film 320 has a certain function of adsorbing dust and can adsorb the dust on the surface of the graphite boat 400 onto the adsorption film 320 during the slapping process. By regularly replacing or cleaning the adsorption film 320, the dust in the graphite boat 400 can be effectively reduced, thereby avoiding the contamination of the silicon wafers.

[0059] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.

[0060] The above embodiments only express several implementation manners of the present utility model, and the description thereof is relatively specific and detailed. However, it should not be construed as a limitation on the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several deformations and improvements can still be made, and these all belong to the protection scope of the present utility model. Therefore, the protection scope of the utility model patent shall be subject to the appended claims.

Claims

1. A boat patting device, characterized in that, The boat-patting device includes: A support frame (100); A boat-patting component (200), including a first driving member and a boat-patting member (210) arranged on the support frame (100), the boat-patting member (210) is arranged on the first driving member, and the first driving member is used to drive the boat-patting member (210) to pat the graphite boat (400); A dust-proof component (300), including a winding roller (310) and a second driving member (330) arranged on the support frame (100), an adsorption film (320) is wound on the winding roller (310), and the second driving member (330) is used to drive the winding roller (310) to lay the adsorption film (320) between the boat-patting member (210) and the graphite boat (400).

2. The paddle boat according to claim 1, characterized in that, The winding roller (310) is detachably arranged on the support frame (100).

3. The paddle boat according to claim 1, wherein The dust-proof component (300) further includes a support member (350), the support member (350) is respectively arranged at both ends of the winding roller (310) for supporting the winding roller (310), and the support member (350) is connected to the support frame (100).

4. The paddle boat according to claim 3, characterized in that, A fixing groove (110) is arranged on the support frame (100), a fixing block (351) is arranged on the support member (350), and the fixing block (351) and the fixing groove (110) are detachably connected by mutual fitting.

5. The oar-beating device according to any one of claims 1-4, characterized in that, The dust-proof component (300) includes a positioning member (340), the positioning member (340) is connected to the free end of the adsorption film (320), and the positioning member (340) is used to position the free end of the adsorption film (320) on the graphite boat (400).

6. The oar hitting device according to claim 5, characterized in that, The positioning member (340) includes a positioning film layer spliced with the free end of the adsorption film (320), and the thickness of the positioning film layer is greater than the thickness of the adsorption film (320).

7. The oar slapping device according to claim 5, characterized in that, A plurality of protrusions (341) are arranged on the positioning member (340), and the protrusions (341) are arranged on the surface of the positioning member (340) close to the graphite boat (400).

8. The paddle boat according to claim 5, characterized in that, The positioning member (340) is detachably connected to the adsorption film (320).

9. The paddle boat according to claim 5, characterized in that, A fixing clip (342) is arranged on the positioning member (340), and the fixing clip (342) can fix the adsorption film (320) on the positioning member (340) by clamping.

10. The paddle boat as claimed in any one of claims 1-4, characterized in that, The boat-patting device further includes a position sensor and a controller. The controller is electrically connected to the position sensor and the second driving member (330) independently. The position sensor is used to detect the position information of the graphite boat (400) and transmit the position information to the controller, and the controller controls the driving mode of the second driving member (330) according to the position information.

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