Turnover mechanism of ultrasonic stripping machine

Abstract

The utility model provides a turnover mechanism of an ultrasonic stripping machine. The turnover mechanism comprises a bearing structure used for bearing an iron ring jig and two rotary driving structures which are clamped at the two ends of the bearing structure respectively and used for driving the bearing structure to turn over. The bearing structure comprises a bearing plate, a gas circuit arranged in the bearing plate and a plurality of silica gel suction cups arranged on the bearing plate and used for adsorbing the UV film from the back face of the iron ring jig. All the silica gel suction cups are communicated with the air path, and an air suction opening of the air path extends to the surface of the bearing plate. The UV film on the iron ring jig is adsorbed through a negative pressure adsorption structure composed of the silica gel suction cup and the air path, the UV film is prevented from being sucked up when frame waste materials are sucked away in the edge removing process, and the edge removing effect is ensured.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor chip processing equipment technology, specifically to a flipping mechanism for an ultrasonic stripper. Background Technology

[0002] In semiconductor chip manufacturing, before chip dicing, the wafer is adhered to a metal ring fixture using UV adhesive to facilitate subsequent edge trimming and stripping processes. The structure of the metal ring fixture is as follows: Figure 1 As shown, it includes an iron ring and a UV film disposed on the inner cavity of the iron ring. The chip product to be processed is adhered to the UV film. In utility model patent application number CN202322365754.4, the applicant proposed an integrated ultrasonic stripping machine. During the edge removal process, the iron ring fixture with the chip product adhered to it is fixed on the flipping module of the ultrasonic stripping machine. The edge removal unit cuts off the edge of the chip product. Simultaneously, the suction mechanism composed of components such as the air extraction pipe and the air shroud on the edge removal unit sucks away the cut edge waste. After the edge is removed, the flipping module flips the iron ring fixture to facilitate subsequent stripping from the back of the iron ring fixture. However, the applicant found that the suction mechanism easily lifts the UV film simultaneously during the removal of edge waste, which may cause relative displacement between the chip product and the cutting tool, affecting the edge removal effect. Utility Model Content

[0003] To solve the above-mentioned technical problems, this utility model designs a flipping mechanism for an ultrasonic stripper, which can fix the UV film on the iron ring fixture, prevent the UV film from being sucked up when the edge waste is sucked away, and ensure the edge removal effect.

[0004] This utility model is achieved through the following technical solution: the flipping mechanism of the ultrasonic dematerializer includes a bearing structure for bearing the iron ring fixture, and two rotary drive structures respectively clamped at both ends of the bearing structure for driving the bearing structure to flip.

[0005] The supporting structure includes a supporting plate, an air passage disposed inside the supporting plate, and a plurality of silicone suction cups disposed on the supporting plate for adsorbing UV film from the back of the iron ring fixture; all the silicone suction cups are in communication with the air passage, and the air intake of the air passage extends to the surface of the supporting plate.

[0006] In one embodiment, the upper surface of the support plate is provided with a support ring for supporting the iron ring fixture, and the silicone suction cup is located in the central cavity of the support ring; when the iron ring fixture is clamped on the support structure, the central cavity of the support ring is opposite to the position of the UV film on the iron ring fixture.

[0007] In one embodiment, a number of adsorption plates are provided in the central cavity of the support ring, and the silicone suction cups are arranged in an array on the upper surface of all the adsorption plates. Each adsorption plate is provided with an air passage inside.

[0008] In one embodiment, the support plate is provided with a connector, which is connected to the air intake of the air passage.

[0009] In one embodiment, clamping portions are provided at opposite ends of the support plate, and the two rotary drive structures clamp the two clamping portions respectively.

[0010] The rotary drive structure includes a rotary motor and pneumatic grippers mounted on the shaft of the rotary motor via a connecting plate; the support plate is clamped between the upper and lower grippers of the pneumatic grippers.

[0011] Compared with the prior art, the embodiments of this application have the following beneficial effects: The present invention uses a negative pressure adsorption structure composed of a silicone suction cup and an air path to adsorb the UV film on the iron ring fixture, preventing the UV film from being sucked up when the edge waste is sucked away during the edge removal process, thus ensuring the edge removal effect. Attached Figure Description

[0012] The accompanying drawings, which are provided to further illustrate this application and constitute a part of this application, illustrate exemplary embodiments of this application and are used to explain this application, but do not constitute a limitation thereof. In the drawings, the same reference numerals denote the same components.

[0013] Figure 1 This is a structural diagram of an iron ring fixture.

[0014] Figure 2 This is a structural diagram of the flipping mechanism of this utility model.

[0015] Figure 3 This is a structural diagram of the rotary drive structure of this utility model.

[0016] Figure 4 This is a structural diagram of the load-bearing structure of this utility model.

[0017] Figure 5 This is a front view of the load-bearing structure of this utility model.

[0018] Figure 6 for Figure 5 Sectional view at point BB.

[0019] Figure 7 for Figure 5 Sectional view at point AA.

[0020] The reference numerals in the above figures are as follows: 100-rotary drive structure, 110-rotary motor, 120-pneumatic gripper finger, 130-connecting plate, 140-upper gripper finger, 150-lower gripper finger, 200-bearing structure, 210-bearing plate, 220-supporting ring, 230-clamping part, 240-silicone suction cup, 250-adsorption plate, 260-connector, 270-air passage, 300-iron ring fixture. Detailed Implementation

[0021] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0022] It should be noted that if the terms "first," "second," etc., are used in the specification, claims, and accompanying drawings of this application, they are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this application described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0023] In this application, when terms such as "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," and "longitudinal" are used, they indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are mainly for better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0024] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0025] Furthermore, in this application, the terms "installation," "setup," "equipped with," "connection," "linking," and "socketing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0026] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0027] Example

[0028] like Figure 2 As shown, this embodiment discloses a flipping mechanism for an ultrasonic dematerializer, which includes a support structure 200 and two rotary drive structures 100. The support structure 200 supports an iron ring fixture 300, and the two rotary drive structures 100 are respectively clamped at opposite ends of the support structure 200, driving the support structure 200 to flip.

[0029] like Figure 3 As shown, the rotary drive structure 100 includes a rotary motor 110 and a pneumatic gripper 120 mounted on the shaft of the rotary motor 110 via a connecting plate 130; the two ends of the bearing structure 200 are respectively fixed to the lower gripper 150 of the pneumatic gripper 120 of the two rotary drive structures 100 by bolts.

[0030] In use, the iron ring fixture 300 with the chip product attached is placed on the support structure 200 by the robotic arm or conveyor rail on the ultrasonic dematerializer. Then, the upper clamping finger 140 of the pneumatic clamping finger 120 is lowered to clamp the iron ring fixture 300 on the support structure 200. The edge cutting mechanism of the ultrasonic dematerializer cuts the edge of the chip product on the iron ring fixture 300. After the edge cutting process is completed, the rotary motors 110 of the two rotary drive structures 100 rotate synchronously to flip the support structure 200.

[0031] like Figure 4 , 5As shown, the supporting structure 200 includes a supporting plate 210, an air passage 270 disposed inside the supporting plate 210, and a plurality of silicone suction cups 240 disposed on the supporting plate 210 and communicating with the air passage 270. A connector 260 is provided on the supporting plate 210, and the connector 260 communicates with the air intake of the air passage 270. In use, the connector 260 is connected to an external negative pressure adsorption device. When the negative pressure adsorption device is activated, the silicone suction cups 240 adsorb the UV film from the back of the iron ring fixture 300, preventing the edge-cutting mechanism from sucking up the UV film when adsorbing edge waste, thus improving the edge-cutting effect.

[0032] In the specific setup, the connector 260 is connected to the negative pressure adsorption device by a flexible hose, so it will not affect the flipping of the load-bearing structure 200.

[0033] like Figure 4 As shown, the bearing plate 210 has clamping parts 230 at its two opposite ends, and the bearing plate 210 is mounted on the lower clamping finger 150 of the pneumatic clamping finger 120 through the clamping parts 230.

[0034] In addition, such as Figure 4 As shown, the upper surface of the support plate 210 is provided with a support ring 220 for supporting the iron ring fixture 300, and the silicone suction cup 240 is located in the central cavity of the support ring 220. The shape of the support ring 220 matches the shape of the iron ring of the iron ring fixture 300. Therefore, when the iron ring fixture 300 is clamped on the support structure 200, the central cavity of the support ring 220 is opposite to the position of the UV film on the iron ring fixture 300, and the silicone suction cup 240 in the central cavity of the support ring 220 can adsorb the UV film from the back of the iron ring fixture 300.

[0035] As another implementation method, such as Figure 4 As shown, several adsorption plates 250 are arranged in the central cavity of the support ring 220. The silicone suction cups 240 are arrayed on the upper surface of all the adsorption plates 250, and each adsorption plate 250 has the aforementioned air passage 270 inside. During setup, as... Figure 6 , 7 As shown, the air path 270 can be composed of crisscrossing air channels, and the silicone suction cups 240 are connected to these air channels. In addition, each air path 270 in each adsorption plate 250 corresponds to a connector 260. By dividing these silicone suction cups 240 into multiple independent adsorption areas, the adsorption force on the entire support structure 200 is made more uniform, thereby improving the adsorption effect of the UV film.

[0036] In this embodiment, the UV film on the iron ring fixture 300 is adsorbed by the negative pressure adsorption structure composed of the silicone suction cup 240 and the air passage 270, which prevents the UV film from being sucked up when the edge cutting mechanism adsorbs edge waste, thereby improving the edge removal effect.

[0037] It should be noted that all features disclosed in this specification, or all steps in all methods or processes disclosed, may be combined in any way, except for mutually exclusive features and / or steps.

[0038] Furthermore, the specific embodiments described above are exemplary. Those skilled in the art can devise various solutions inspired by the disclosure of this utility model, and these solutions all fall within the scope of this utility model and its protection. Those skilled in the art should understand that this utility model specification and its drawings are illustrative and not intended to limit the scope of the claims. The scope of protection of this utility model is defined by the claims and their equivalents.

Claims

1. The flipping mechanism of an ultrasonic dewatering machine, characterized in that, It includes a support structure (200) for supporting the iron ring fixture (300), and two rotary drive structures (100) respectively clamped at both ends of the support structure (200) for driving the support structure (200) to rotate; The support structure (200) includes a support plate (210), an air passage (270) disposed inside the support plate (210), and a plurality of silicone suction cups (240) disposed on the support plate (210) for adsorbing UV film from the back of the iron ring fixture (300); all the silicone suction cups (240) are in communication with the air passage (270), and the air intake of the air passage (270) extends to the surface of the support plate (210).

2. The flipping mechanism of the ultrasonic dewatering machine according to claim 1, characterized in that, The upper surface of the support plate (210) is provided with a support ring (220) for supporting the iron ring fixture (300), and the silicone suction cup (240) is located in the central cavity of the support ring (220); when the iron ring fixture (300) is clamped on the support structure (200), the central cavity of the support ring (220) is opposite to the position of the UV film on the iron ring fixture (300).

3. The flipping mechanism of the ultrasonic dewatering machine according to claim 2, characterized in that, The central cavity of the support ring (220) is provided with several adsorption plates (250), and the silicone suction cups (240) are arranged in an array on the upper surface of all the adsorption plates (250). Each adsorption plate (250) is provided with an air passage (270).

4. The flipping mechanism of the ultrasonic dewatering machine according to claim 1, characterized in that, The support plate (210) is provided with a connector (260), which is connected to the air intake of the air passage (270).

5. The flipping mechanism of the ultrasonic dewatering machine according to claim 1, characterized in that, The bearing plate (210) has clamping parts (230) at its opposite ends, and the two rotary drive structures (100) clamp the two clamping parts (230) respectively.

6. The flipping mechanism of the ultrasonic dewatering machine according to claim 1, characterized in that, The rotary drive structure (100) includes a rotary motor (110) and a pneumatic gripper (120) mounted on the shaft of the rotary motor (110) via a connecting plate (130); the bearing plate (210) is held between the upper gripper (140) and the lower gripper (150) of the pneumatic gripper (120).

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