Exhaust device of dry etching machine

Abstract

The utility model relates to the technical field of exhaust devices, in particular to an exhaust device of a dry etching machine. An exhaust device of a dry etching machine comprises a box body, supporting legs are fixedly connected to the bottom of the box body, an exhaust pipe and a liquid inlet pipe are installed on the top of the box body in a communicating mode, an air inlet pipe is communicated to the bottom of the side face of the box body, a filtering mechanism is arranged in the middle of the air inlet pipe, and an air distribution cavity is fixedly installed in the box body. The air distribution cavity is communicated with the air inlet pipe, a plurality of air supply pipes are installed on one side of the air distribution cavity in a communicated mode, and a plurality of spray heads are communicated with the top faces of the air supply pipes. Reaction liquid and waste gas generated by the dry etching machine can be injected into the box body through the liquid inlet pipe and the gas inlet pipe, the waste gas can be harmlessly discharged after thorough reaction, the filtering mechanism arranged on the gas inlet pipe is used for intercepting particles and dust in the waste gas, and it is ensured that only gas enters the box body.

Description

Technical Field

[0001] The utility model relates to the technical field of exhaust devices, and particularly relates to an exhaust device for a dry etching machine. Background Art

[0002] Plasma etching uses a radio frequency power supply to generate highly reactive ions and electrons from reaction gases, physically bombard and chemically react with a silicon dioxide wafer to selectively remove some areas, and the etched material becomes a volatile gas; the tail gas generated by plasma etching contains unreacted gases, reaction intermediate products, reaction-generated substances, etc. Directly discharging it into the atmosphere will cause pollution, so a special exhaust device needs to be set up to treat the waste gas. However, most of the existing exhaust devices have a simple structure and can only simply treat the waste gas. The waste gas and the reaction liquid cannot be fully contacted, resulting in insufficient reaction of the pollutants in the waste gas and poor treatment effect. Summary of the Utility Model

[0003] The purpose of the utility model is to provide an exhaust device for a dry etching machine to solve the problem that the existing exhaust device can only simply treat the waste gas.

[0004] To solve the above technical problems, the utility model adopts the following technical solutions:

[0005] An exhaust device for a dry etching machine includes a box body. Support legs are fixedly connected to the bottom of the box body. An exhaust pipe and a liquid inlet pipe are connected and communicated at the top of the box body. An air inlet pipe is communicated at the bottom of the side of the box body. A filtering mechanism is arranged in the middle of the air inlet pipe. A gas distribution chamber is fixedly installed inside the box body. The gas distribution chamber is communicated with the air inlet pipe. A plurality of air delivery pipes are connected and communicated on one side of the gas distribution chamber. A plurality of spray heads are communicated on the top surface of the air delivery pipe.

[0006] A further technical solution is that the filtering mechanism includes a fixing block, a filter screen plate, a connecting plate and a limiting plate. The side surface of the fixing block is fixedly connected to the outer wall of the box body. An installation groove is provided on the top surface of the fixing block. The groove wall of the installation groove is communicated with the air inlet pipe on both sides. The filter screen plate is matched with the installation groove. The connecting plate closes the notch of the installation groove. The bottom surface of the connecting plate is fixedly connected to the top of the filter screen plate. A fixing hole is provided on the outer wall of the box body. One end of the bottom surface of the limiting plate contacts the top surface of the connecting plate, and the other end is inserted into the fixing hole and connected to the bottom of the fixing hole through a spring. A rubber sealing pad is arranged on the bottom surface of the connecting plate in contact with the fixing block, and the rubber sealing pad is in a compressed state.

[0007] A further technical solution is that a handle is fixedly connected to the top surface of the connecting plate.

[0008] A further technical solution is that an exhaust valve is arranged on the exhaust pipe.

[0009] A further technical solution is that stirring rods are arranged in parallel inside the box body. The stirring rods are rotatably connected to the inner wall of the box body. A driving motor is fixedly installed on the outer wall of the box body. The output shaft of the driving motor passes through the side wall of the box body and is fixedly connected to one end of the stirring rod.

[0010] A further technical solution is that a drain pipe is connected and installed at the bottom surface of the box body, and a drain valve is arranged on the drain pipe.

[0011] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0012] With the liquid inlet pipe and the gas inlet pipe provided by the present utility model, the reaction liquid and the waste gas generated by the dry etching machine can be injected into the box body. After the waste gas undergoes a complete reaction, it can be discharged harmlessly. The filtering mechanism arranged on the gas inlet pipe is used to intercept particles and dust in the waste gas, ensuring that only gas enters the inside of the box body, and the cleaning work of the filter mesh plate is very convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is a perspective view of the present utility model;

[0014] Figure 2 is a sectional view of the present utility model;

[0015] Figure 3 is a schematic structural view of the filtering mechanism in the present utility model;

[0016] Figure 4 is a top view of the gas supply pipe in the present utility model.

[0017] Reference numerals: 1 - box body, 2 - support leg, 3 - exhaust pipe, 4 - liquid inlet pipe, 5 - gas inlet pipe, 6 - filtering mechanism, 601 - fixing block, 602 - filter mesh plate, 603 - connecting plate, 604 - limiting plate, 605 - spring, 606 - installation groove, 607 - fixing hole, 608 - handle, 7 - gas distribution chamber, 8 - gas supply pipe, 9 - spray head, 10 - stirring rod, 11 - driving motor, 12 - drain pipe, 13 - drain valve, 14 - exhaust valve. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0018] In order to make the objectives, technical solutions and advantages of the present utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0019] Figures 1 to 4 is an embodiment of the present utility model.

[0020] Embodiment 1

[0021] A dry etching machine exhaust device includes a box body 1. Support legs 2 are fixedly connected to the bottom of the box body 1. An exhaust pipe 3 and a liquid inlet pipe 4 are connected and installed at the top of the box body 1. An air inlet pipe 5 is connected to the bottom of the side of the box body 1. A filtering mechanism 6 is arranged in the middle of the air inlet pipe 5. A gas distribution chamber 7 is fixedly installed inside the box body 1. The gas distribution chamber 7 is connected to the air inlet pipe 5. A plurality of air supply pipes 8 are connected and installed on one side of the gas distribution chamber 7. A plurality of spray nozzles 9 are connected to the top surface of the air supply pipe 8. After injecting the reaction liquid into the box body 1 through the liquid inlet pipe 4, waste gas is injected into the box body 1 through the air inlet pipe 5. The filtering mechanism 6 arranged on the air inlet pipe 5 can intercept particles and dust in the waste gas, ensuring that only gas enters the inside of the box body 1. After the waste gas enters the box body 1, it can fully react with the reaction liquid. After the waste gas has undergone a complete reaction and no longer contains pollutants, it is discharged into the atmosphere through the exhaust pipe 3, enabling the waste gas generated by the dry etching machine to be harmlessly discharged.

[0022] Example 2

[0023] Based on Example 1, the filtering mechanism 6 includes a fixing block 601, a filter mesh plate 602, a connecting plate 603, and a limiting plate 604. The side surface of the fixing block 601 is fixedly connected to the outer wall of the box body 1. An installation groove 606 is provided on the top surface of the fixing block 601. The groove wall of the installation groove 606 is connected to the air inlet pipe 5 on both sides. The filter mesh plate 602 cooperates with the installation groove 606. The connecting plate 603 closes the notch of the installation groove 606. The bottom surface of the connecting plate 603 is fixedly connected to the top of the filter mesh plate 602. A fixing hole 607 is provided on the outer wall of the box body 1. One end of the bottom surface of the limiting plate 604 contacts the top surface of the connecting plate 603, and the other end is inserted into the fixing hole 607 and then connected to the bottom of the fixing hole 607 through a spring 605. A rubber sealing pad is provided on the bottom surface of the connecting plate 603 in contact with the fixing block 601, and the rubber sealing pad is in a compressed state. After pushing the limiting plate 604 into the fixing hole 607 so that there is no longer any restriction on the top of the connecting plate 603, the connecting plate 603 can be controlled to take out the filter mesh plate 602 from the installation groove 606 for cleaning. When the filter mesh plate 602 is installed in the installation groove 606, the limiting plate 604 can stably play a role in restricting the filter mesh plate 602.

[0024] Example 3

[0025] Based on Example 2, a handle 608 is fixedly connected to the top surface of the connecting plate 603. When cleaning the filter mesh plate 602, it is convenient for the staff to control and apply force to the connecting plate 603.

[0026] Example 4

[0027] On the basis of Embodiment 3, an exhaust valve 14 is provided on the exhaust pipe 3. After the waste gas in the box body 1 has undergone a complete reaction, the harmless gas can be discharged only after the exhaust valve 14 is opened.

[0028] Embodiment 5

[0029] On the basis of Embodiment 4, stirring rods 10 are arranged in parallel inside the box body 1. The stirring rods 10 are rotatably connected to the inner wall of the box body 1. A driving motor 11 is fixedly installed on the outer wall of the box body 1. The output shaft of the driving motor 11 passes through the side wall of the box body 1 and is fixedly connected to one end of the stirring rod 10. The rotation of the stirring rod 10 in the box body 1 can enhance the contact between the waste gas and the reaction liquid and improve the efficiency of treating the waste gas.

[0030] Embodiment 6

[0031] On the basis of Embodiment 5, a drain pipe 12 is connected and installed at the bottom surface of the box body 1, and a drain valve 13 is provided on the drain pipe 12. After the waste gas in the box body 1 has been treated, the drain valve 13 can be opened to discharge the waste reaction liquid through the drain pipe 12.

[0032] Working principle: During use, first connect the intake pipe 5 to the exhaust port of the dry etching machine, then inject the reaction liquid into the box body 1 through the liquid inlet pipe 4. At the same time, power on and start the driving motor 11 and the nozzle 9. The nozzle 9 evenly sprays the waste gas to prevent gas accumulation. Under the action of the driving motor 11, the stirring rod 10 rotates to completely disperse the gas sprayed by the nozzle 9, so that the waste gas can fully contact the reaction liquid for a complete reaction. After the waste gas reaction is completed, open the exhaust valve 14 and the drain valve 13, so that the harmless gas can be discharged through the exhaust pipe 3, and the waste reaction liquid is discharged through the drain pipe 12. The filter mesh plate 602 provided on the intake pipe 5 can intercept the particles and dust in the waste gas to ensure that only gas enters the inside of the box body 1. When the exhaust device needs to clean the filter mesh plate 602 after being used for a long time, push the limiting plate 604 into the fixing hole 607 so that there is no longer a restriction on the top of the connecting plate 603, and then the connecting plate 603 can be controlled to take out the filter mesh plate 602 from the installation groove 606 for cleaning. After the cleaning work is completed, insert the filter mesh plate 602 back into the installation groove 606, apply a downward force to the connecting plate 603 to compress the rubber gasket until the limiting plate 604 extends out again under the action of the spring 605 to restrict the top of the connecting plate 603, so that the filter mesh plate 602 can be stably installed in the installation groove 606.

[0033] Although the present invention has been described herein with reference to a number of illustrative embodiments of the present invention, it should be understood that those skilled in the art can design many other modifications and implementations that will fall within the scope of the principles and spirit disclosed in this application. More specifically, within the scope of the drawings and claims disclosed in this application, various variations and improvements can be made to the components and / or layout of the subject combination layout. In addition to the variations and improvements made to the components and / or layout, other uses will also be apparent to those skilled in the art.

Claims

1. A dry etching machine exhaust device, characterized in that: It includes a box body (1), on the bottom of the box body (1), support legs (2) are fixedly connected. On the top of the box body (1), an exhaust pipe (3) and a liquid inlet pipe (4) are connected and installed in a communicating manner. At the bottom of the side of the box body (1), an air inlet pipe (5) is connected and communicated. In the middle of the air inlet pipe (5), a filtering mechanism (6) is arranged. Inside the box body (1), a gas distribution chamber (7) is fixedly installed. The gas distribution chamber (7) is communicated with the air inlet pipe (5). On one side of the gas distribution chamber (7), a plurality of air delivery pipes (8) are connected and installed in a communicating manner. On the top surface of the air delivery pipe (8), a plurality of nozzles (9) are connected and communicated.

2. The exhaust device of a dry etching machine according to claim 1, characterized in that: The filtering mechanism (6) includes a fixing block (601), a filter screen plate (602), a connecting plate (603) and a limiting plate (604). The side surface of the fixing block (601) is fixedly connected to the outer wall of the box body (1). On the top surface of the fixing block (601), an installation groove (606) is provided. The groove wall of the installation groove (606) is communicated with the air inlet pipes (5) on both sides. The filter screen plate (602) is matched with the installation groove (606). The connecting plate (603) closes the notch of the installation groove (606). The bottom surface of the connecting plate (603) is fixedly connected to the top of the filter screen plate (602). On the outer wall of the box body (1), a fixing hole (607) is provided. One end of the bottom surface of the limiting plate (604) contacts the top surface of the connecting plate (603), and the other end is inserted into the fixing hole (607) and then connected to the bottom of the fixing hole (607) through a spring (605). On the bottom surface of the connecting plate (603) in contact with the fixing block (601), a rubber sealing pad is arranged, and the rubber sealing pad is in a compressed state.

3. The exhaust device of a dry etching machine according to claim 2, characterized in that: A handle (608) is fixedly connected to the top surface of the connecting plate (603).

4. The exhaust device of a dry etcher according to claim 1, characterized in that: An exhaust valve (14) is arranged on the exhaust pipe (3).

5. The exhaust device of a dry etching machine according to claim 1, characterized in that: Inside the box body (1), a stirring rod (10) is arranged in parallel. The stirring rod (10) is rotatably connected to the inner wall of the box body (1). On the outer wall of the box body (1), a driving motor (11) is fixedly installed. The output shaft of the driving motor (11) passes through the side wall of the box body (1) and is fixedly connected to one end of the stirring rod (10).

6. The exhaust device of a dry etching machine according to claim 1, wherein: On the bottom surface of the box body (1), a liquid discharge pipe (12) is connected and installed in a communicating manner. On the liquid discharge pipe (12), a liquid discharge valve (13) is arranged.

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