Wire-feeding-free mechanism used after wire cutting-off and wire welding

By using a wire-free wire-feeding mechanism during the cutting of the silicon wafer, the welded broken wire is wound on the tensioning groove wheel and using elastic parts to provide tensioning force, the problem of silicon wafer lobes and color difference during the wire-feeding process is solved, and simplified operation and improved efficiency are achieved.

CN223115570UActive Publication Date: 2025-07-18NINGXIA HUANOU NEW ENERGY TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202422253145.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-13
Publication Date
2025-07-18
Estimated Expiration
2034-09-13

AI Technical Summary

Technical Problem

During the cutting process of silicon wafers, the wire feeding process of welding and extending out of the cutting groove wheel after the steel wire breaks can easily lead to lobes and color difference after the silicon wafer is fleece. The existing technology has the problems of concentrated wear of steel wires and poor cutting force.

Method used

A wire-cut wire-free wire-feeding mechanism is adopted, including a tensioning groove wheel and a support member. The welded broken wire is wound on the tensioning groove wheel through a swing arm, and the elastic member provides tensioning force to avoid the wire-feeding process.

Benefits of technology

It effectively avoids the occurrence of line marks during the wire feeding process, reduces the risk of lobes after the silicon wafer is fleece, simplifies operation, improves work efficiency, and reduces the chromatic aberration on the surface of the silicon wafer.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides a mechanism for avoiding wire feeding after wire cutting and wire welding, which comprises a tensioning grooved pulley and a supporting piece, a swinging arm is arranged on the supporting piece, the tensioning grooved pulley is arranged at one end of the swinging arm far away from the supporting piece, and a welded broken wire can be wound on the tensioning grooved pulley. And the welded broken wire can be tensioned by swinging the swinging arm. The wire feeding device has the advantages that the wire feeding process after steel wire welding is avoided, wire marks generated in the wire feeding process are reduced, the wafer cracking risk after silicon wafer texturing is effectively reduced, the structure is simple, operation is convenient and fast, the processing time after broken wire welding is effectively shortened, work efficiency is improved, and the color difference of the surface of a silicon wafer is effectively reduced.
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Description

Technical Field

[0001] The utility model belongs to the technical field of wire cutting, in particular to a wire feeding-free mechanism after wire cutting and wire welding. Background Art

[0002] During the slicing process of silicon wafers, the steel wire is prone to breakage. After using a wire bonder to weld the broken steel wire, the steel wire will extend out of the cutting grooved pulley for a certain length. Usually, the steel wire extending out of the cutting grooved pulley after welding is fed into the wire mesh by a handwheel, and then the slicing continues. During the wire feeding process, the ingot remains stationary, and the same position of the ingot is continuously worn by the fed steel wire, resulting in stress concentration. Wire marks will appear on the silicon wafer, which easily causes the silicon wafer to crack after texturing. Moreover, due to the small tension of the fed steel wire, the cutting force is poor, and color difference is easily generated on the surface of the silicon wafer. Summary of the Utility Model

[0003] To solve the above technical problems, the utility model provides a wire feeding-free mechanism after wire cutting and wire welding, which effectively solves the technical problems that the silicon wafer is prone to crack after texturing and color difference is generated on the surface of the silicon wafer during the wire feeding process, and overcomes the deficiencies of the prior art.

[0004] The technical solution adopted by the utility model is: a wire feeding-free mechanism after wire cutting and wire welding, including a tensioning grooved pulley and a support member. A swing arm is provided on the support member. The tensioning grooved pulley is provided at one end of the swing arm far away from the support member. The broken wire after welding can be wound around the tensioning grooved pulley, and swinging the swing arm can tension the broken wire after welding.

[0005] Further, an elastic member is provided at the end of the swing arm where the tensioning grooved pulley is provided. One end of the elastic member is connected to the swing arm, and the other end is connected to the support member.

[0006] Further, a groove is provided at the relative position of the swing arm and the support member, and the end of the elastic member is arranged in the groove.

[0007] Further, a connecting shaft is provided at the end of the swing arm where the tensioning grooved pulley is provided, and the tensioning grooved pulley is provided on the connecting shaft.

[0008] Further, a bearing is provided at the end of the swing arm where the tensioning grooved pulley is provided, and the bearing is connected to the connecting shaft.

[0009] Further, a fixing member is provided at the end of the support member where the swing arm is not provided, and a clamping groove is provided on the fixing member.

[0010] Further, the fixing member includes a first fixing member and a second fixing member which are oppositely arranged. A clamping groove is provided at the relative position of the first fixing member and the second fixing member. The first fixing member is arranged on the supporting member. One end of the second fixing member is rotatably connected to the first fixing member, and the other end is detachably connected to the first fixing member.

[0011] Further, a connecting ring is provided at one end of the first fixing member, and the relative end of the second fixing member is rotatably connected to the connecting ring.

[0012] Further, a fastener is provided at the other end of the first fixing member, and the relative end of the second fixing member is detachably connected to the fastener.

[0013] Further, a plurality of grooves are provided on the tensioning sheave, and the broken wire can be wound around the grooves.

[0014] The advantages and positive effects of the present utility model are as follows: By adopting the above technical solution, the wire feeding process after the steel wire is welded is avoided, the wire marks generated during the wire feeding process are reduced, the risk of wafer cracking after texturing is effectively reduced, the structure is simple, the operation is convenient, the processing time after the broken wire is welded is effectively shortened, the work efficiency is improved, and the color difference on the wafer surface is effectively reduced. Description of the Drawings

[0015] Figure 1 is the overall structure diagram of a wire cutting and wire welding post-wire-feeding-free mechanism according to an embodiment of the present utility model.

[0016] Figure 2 is the exploded view of a wire cutting and wire welding post-wire-feeding-free mechanism according to an embodiment of the present utility model.

[0017] Figure 3 is the exploded view of a wire cutting and wire welding post-wire-feeding-free mechanism from another perspective according to an embodiment of the present utility model.

[0018] Figure 4 is the state without using the wire-feeding-free mechanism after the broken wire is welded.

[0019] Figure 5 is the usage schematic diagram of a wire cutting and wire welding post-wire-feeding-free mechanism according to an embodiment of the present utility model.

[0020] In the figure:

[0021] 1. Tensioning sheave; 2. Supporting member; 3. Swing arm

[0022] 4. Elastic member; 5. Groove; 6. Fixed column

[0023] 7. Connecting shaft; 8. Bearing; 9. First fixing member

[0024] 10. Second fixing member 11. Engagement groove 12. Connection ring

[0025] 13. Fastening member 14. Fastening nut Detailed implementation manners

[0026] An embodiment of the present utility model provides a wire feeding-free mechanism after wire cutting and welding. The embodiments of the present utility model will be described below with reference to the accompanying drawings.

[0027] In the description of the embodiments of the present utility model, it should be understood that the orientation or positional relationship indicated by terms such as "top", "bottom", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present utility model. In the description of the present utility model, it should be noted that unless otherwise clearly specified and limited, the terms "arranged", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood through specific situations.

[0028] As Figure 1 shown, a wire feeding-free mechanism after wire cutting and welding in an embodiment of the present utility model includes a tensioning sheave 1 and a support member 2. A swing arm 3 is arranged on the support member 2, and a tensioning sheave 1 is arranged at one end of the swing arm 3 away from the support member 2. A plurality of grooves are formed on the tensioning sheave 1 for arranging steel wires. A section of the steel wire of the broken wire after welding extending out of the cutting sheave can be wound around the tensioning sheave 1, and the broken wire after welding can be tensioned by swinging the swing arm 3, and subsequent cutting can be carried out without wire feeding.

[0029] Specifically, an elastic member 4 is arranged at the end of the swing arm 3 where the tensioning sheave 1 is located. One end of the elastic member 4 is connected to the swing arm 3, and the other end is connected to the support member 2. In this embodiment, an opening groove is arranged at one end of the support member 2, and one end of the swing arm 3 is rotatably connected to the opening groove of the support member 2, and the other end is provided with a tensioning sheave 1. An elastic member 4 is arranged at the end of the swing arm 3 where the tensioning sheave 1 is located, specifically a spring. The spring is arranged at the relative position of the swing arm 3 and the support member 2, one end is connected to the swing arm 3, and the other end is connected to the support member 2. The broken wire after welding is wound around the tensioning sheave 1, and the swing arm 3 is rotated to make the swing arm 3 at a suitable angle, which can not only make the broken wire after welding completely wound around the tensioning sheave 1, but also make the steel wire tensioned. At this time, the elastic member 4 is in a stretched state.

[0030] Specifically, as Figure 2As shown in the figure, in order to facilitate the installation of the elastic member 4, a groove 5 is provided at the relative position between the swing arm 3 and the support member 2, and the end of the elastic member 4 is arranged in the groove 5. A fixing post 6 is arranged in the groove 5, and the end of the elastic member 4 is hooked on the fixing post 6. In this embodiment, a rectangular groove 5 is formed on the relative side of the swing arm 3 and the support member 2, and a fixing post 6 is fixed in the rectangular groove 5. Hooks are integrally arranged at both ends of the elastic member 4, and the hooks are hooked on the fixing post 6.

[0031] Specifically, one end of the swing arm 3 where the tension pulley 1 is provided is provided with a connecting shaft 7, and the tension pulley 1 is arranged on the connecting shaft 7. In this embodiment, the connecting shaft 7 is arranged perpendicular to the swing arm 3, and the tension pulley 1 is fixedly connected to the connecting shaft 7.

[0032] Specifically, one end of the swing arm 3 where the tension pulley 1 is provided is provided with a bearing 8, and the bearing 8 is connected to the connecting shaft 7. In this embodiment, the outer ring of the bearing 8 is fixed to the swing arm 3, the inner ring of the bearing 8 can rotate, and the connecting shaft 7 is installed in the inner ring of the bearing 8. The connecting shaft 7 is rotatably connected to the swing arm 3 through the bearing 8.

[0033] Specifically, in order to facilitate the fixation of the entire device, a fixing member is provided at one end of the support member 2 where the swing arm 3 is not provided, and a clamping groove 11 is arranged on the fixing member. In this embodiment, two clamping grooves 11 are arranged on the fixing member, which are adapted to the cleaning nozzle of the cutting pulley. The cleaning nozzle is arranged on both sides of the cutting pulley, which is a prior art and not shown in the figure. The clamping groove 11 is arranged as an arc-shaped groove, which is adapted to the cleaning nozzle, and the fixing member can be clamped with the cleaning nozzle, so as to fix the entire device on the cleaning nozzle.

[0034] Specifically, as Figure 3 shown, the fixing member includes a first fixing member 9 and a second fixing member 10 which are arranged oppositely, and a clamping groove 11 is arranged at the relative position between the first fixing member 9 and the second fixing member 10. The first fixing member 9 is arranged on the support member 2, one end of the second fixing member 10 is rotatably connected to the first fixing member 9, and the other end is detachably connected to the first fixing member 9. In this embodiment, the first fixing member 9 and the second fixing member 10 are rectangular blocks arranged oppositely. The first fixing member 9 is fixedly connected to one end of the support member 2 away from the swing arm 3 through a fixing bolt. One end of the second fixing member 10 is rotatably connected to the first fixing member 9, and the other end is detachable from the first fixing member 9. The second fixing member 10 can be opened and closed relative to the first fixing member 9, so that it can be conveniently clamped on the cleaning nozzle. A semi-circular arc-shaped groove is formed at the relative position between the first fixing member 9 and the second fixing member 10, which is adapted to the cleaning nozzle. When the first fixing member 9 and the second fixing member 10 are closed, the oppositely arranged arc-shaped grooves can just be clamped with the cleaning nozzle.

[0035] Specifically, one end of the first fixing member 9 is provided with a connecting ring 12, and the opposite end of the second fixing member 10 is rotatably connected to the connecting ring 12. In this embodiment, the connecting ring 12 includes an integrally provided connecting portion and sleeve portions located at both ends of the connecting portion. A U-shaped groove is formed at the bottom of the first fixing member 9. One sleeve portion of the connecting ring 12 is placed in the U-shaped groove and is rotatably connected to the U-shaped groove by a hinge shaft. Opposite ends at the bottom of the second fixing member 10 are also provided with U-shaped grooves, and a hinge shaft is installed in the U-shaped grooves to rotatably connect to the sleeve portions at the other end of the connecting ring 12.

[0036] Specifically, the other end of the first fixing member 9 is provided with a fastening member 13, and the opposite end of the second fixing member 10 is detachably connected to the fastening member 13. In this embodiment, the fastening member 13 includes an integrally provided fastening portion and a connecting sleeve located at one end of the fastening portion. The fastening portion and the connecting sleeve are perpendicularly arranged. A U-shaped groove is formed at the top of the first fixing member 9. The connecting sleeve is placed in the U-shaped groove and is rotatably connected by a hinge shaft. Opposite ends at the top of the second fixing member 10 are also provided with U-shaped grooves. The fastening portion can be placed in the U-shaped groove at the top of the second fixing member 10 and extend out of the U-shaped groove. The extending end is provided with a thread, and a fastening nut 14 is used to fasten the fastening portion to the top of the second fixing member 10, thereby fastening the first fixing member 9 and the second fixing member 10.

[0037] Usage method: After the broken wire welding is completed, a section of steel wire extends out, as Figure 4 shown. During use, loosen the fastening nut 14, take out the fastening portion of the fastening member 13 from the U-shaped groove at the top of the second fixing member 10, place the first fixing member 9 and the second fixing member 10 on both sides of the cutting grooved wheel cleaning spray pipe to clamp the cleaning spray pipe, then place the fastening portion of the fastening member 13 in the U-shaped groove at the top of the second fixing member 10, and tighten the fastening nut 14 at the end to fix the first fixing member 9 and the second fixing member 10 at the position relative to the broken wire on the cleaning spray pipe. Manually wind a section of the steel wire extending out after the broken wire welding around the groove of the tensioning grooved wheel 1, and pull the swing arm 3 to make the elastic member 4 in a stretched state ready to retract, as Figure 5 shown, ensuring that the extended steel wire is completely arranged on the tensioning grooved wheel 1 and making the steel wire have a certain tension, avoiding abnormalities such as wire jumping due to loosening during subsequent cutting, and subsequent cutting can be carried out without wire feeding.

[0038] Specifically, a plurality of grooves are formed on the tensioning grooved wheel, and the broken wire can be wound around the grooves. The grooves are equally spaced along the axial direction of the tensioning grooved wheel. That is, the broken wire is wound along the axial direction of the tensioning grooved wheel and has a certain width axially compared with an ordinary tensioning wheel. When the broken wire is relatively long, it can reduce the eccentric wear of the steel wire at both ends of the tensioning grooved wheel caused by inclination.

[0039] The advantages and positive effects of the present utility model are:

[0040] 1. It avoids the wire feeding process after the steel wire welding, reduces the wire marks generated during the wire feeding process, and effectively reduces the risk of wafer cracking after texturing;

[0041] 2. It has a simple structure and convenient operation, effectively shortens the processing time after wire breakage welding, and improves work efficiency;

[0042] 3. The wire feeding process will generate low-tension regions with a long distance at both ends of the wire break position, commonly known as "soft wires". Due to the low tension in this region, the cutting force of the steel wire is poor, resulting in color difference on the wafer surface. In the solution of this application, by setting elastic components, the steel wire after welding can have a certain tension, which can reduce the proportion of color difference generated by the "soft wires".

[0043] The above has described the embodiments of the present invention in detail, but the content described is only the preferred embodiments of the present invention and cannot be considered as used to limit the scope of implementation of the present invention. All equivalent changes and improvements made according to the scope of the present invention application shall still fall within the scope covered by the patent of the present invention.

Claims

1. A wire feeding-free mechanism after wire cutting and wire welding, characterized in that: It includes a tensioning sheave and a support member. A swing arm is provided on the support member. The tensioning sheave is provided at one end of the swing arm away from the support member. The broken wire after welding can be wound around the tensioning sheave, and swinging the swing arm can tension the broken wire after welding.

2. The wire feeding-free mechanism after wire cutting and wire welding according to claim 1, characterized in that: An elastic member is provided at the end of the swing arm where the tensioning sheave is provided. One end of the elastic member is connected to the swing arm, and the other end is connected to the support member.

3. The wire feeding-free mechanism after wire cutting and wire welding according to claim 2, wherein: A groove is provided at the relative position of the swing arm and the support member, and the end of the elastic member is arranged in the groove.

4. A wire feeding-free mechanism after wire cutting and wire welding according to any one of claims 1-3, characterized in that: A connecting shaft is provided at the end of the swing arm where the tensioning sheave is provided, and the tensioning sheave is provided on the connecting shaft.

5. The wire feeding-free mechanism after wire cutting and wire welding according to claim 4, characterized in that: A bearing is provided at the end of the swing arm where the tensioning sheave is provided, and the bearing is connected to the connecting shaft.

6. A wire feeding-free mechanism after wire cutting and wire welding according to any one of claims 1-3 and 5, characterized in that: A fixing member is provided at one end of the support member where the swing arm is not provided, and a clamping groove is provided on the fixing member.

7. A wire feeding-free mechanism after wire cutting and wire welding according to claim 6, characterized in that: The fixing member includes a first fixing member and a second fixing member arranged oppositely. The clamping groove is provided at the relative position of the first fixing member and the second fixing member. The first fixing member is arranged on the support member. One end of the second fixing member is rotatably connected to the first fixing member, and the other end is detachably connected to the first fixing member.

8. A wire feeding-free mechanism after wire cutting and wire welding according to claim 7, characterized in that: A connecting ring is provided at one end of the first fixing member, and the relative end of the second fixing member is rotatably connected to the connecting ring.

9. A wire feeding-free mechanism after wire cutting and wire welding according to claim 8, characterized in that: Another end of the first fixing member is provided with a fastener, and the relative end of the second fixing member is detachably connected to the fastener.

10. A wire feeding-free mechanism after wire cutting and wire welding according to any one of claims 1-3, 5, and 7-9, characterized in that: A plurality of grooves are provided on the tensioning sheave, and the broken wire can be wound around the grooves.