Device for measuring ultraviolet transmittance of large-caliber quartz glass

Abstract

The utility model relates to a measuring device, in particular to a device for measuring the ultraviolet transmittance of large-caliber quartz glass. The measuring device comprises a base, a supporting plate is arranged on the base, clamping mechanisms are installed on the two sides of the supporting plate through guide rods respectively, and detection mechanisms are arranged on the guide rods on the outer sides of the clamping mechanisms. The measuring device can measure the ultraviolet transmittance of large-aperture quartz glass, and can continuously measure the ultraviolet transmittance of the light passing surface of the whole quartz glass sample to be measured; the ultraviolet transmittance of the quartz glass is obtained by detecting the light intensity ratio of the ultraviolet light before and after the ultraviolet light penetrates through the to-be-detected quartz glass sample, and the detection efficiency can be improved. A transmittance change dynamic distribution diagram on a detection surface can be drawn according to a detection result, transmittance change distribution on the whole sample detection surface can be visually observed, and impurity and structure defect distribution conditions of the sample can be indirectly evaluated. The problem that an existing double-beam ultraviolet spectrophotometer is inaccurate in measurement of large-size samples is solved.

Description

Technical Field

[0001] The utility model relates to a measuring device, in particular to a large-caliber quartz glass ultraviolet transmittance measuring device. Background Art

[0002] Quartz glass has comprehensive properties that other materials do not have, such as high purity, excellent optical properties, outstanding thermal stability and chemical stability, and flexible processing technology allows it to be customized into different thicknesses and shapes to meet a variety of application requirements. It is widely used in cutting-edge technology fields such as communications, microelectronics, precision optics, aerospace, etc. Quartz glass has excellent transmittance performance in the ultraviolet spectrum region and is an indispensable material in the current optical field, such as laser system primary mirrors and lithography system lenses.

[0003] The methods of synthesizing quartz glass are mainly divided into direct method and indirect method. The direct method (CVD method) is that the raw materials containing silicon components are hydrolyzed in a hydrogen-oxygen flame, and silicon dioxide is generated at high temperature and deposited on the base material, and gradually forms a quartz glass layer. The indirect method (SOOT method) refers to the hydrolysis of raw materials containing silicon components in a hydrogen-oxygen flame, forming loose bodies of silicon dioxide particles at low temperatures. These loose bodies are usually porous, and then the loose bodies are heated at high temperature for a second time to remove moisture to form quartz glass. Synthetic quartz glass has good ultraviolet transmittance due to the advantage of high raw material purity.

[0004] Quartz glass is composed of [SiO4]. Due to the limitations of raw material purity and melting process, there may be metal impurities or internal structural defects in the prepared quartz glass, which will lead to the absorption of ultraviolet light, which is manifested as a decrease in the transmittance of quartz glass in the ultraviolet spectrum region. Therefore, testing the ultraviolet transmittance of quartz glass is of great significance for evaluating the quality of high-purity quartz glass products and improving the preparation process of quartz glass.

[0005] The conventional method for measuring the UV transmittance of quartz glass is to use a double-beam UV spectrophotometer for measurement research. Due to the limitations of the double-beam UV spectrophotometer itself, it can only be used to measure samples with smaller diameters. At present, the requirements for product size are gradually increasing, and large-diameter quartz glass materials are increasingly needed. In addition, the double-beam UV spectrophotometer evaluates the UV transmittance of the sample by measuring the UV transmittance of a certain point on a small-sized sample, and cannot fully and accurately represent the UV transmittance of the entire light-transmitting surface. For evaluating the UV transmittance of large-sized samples, this evaluation method will cause large errors and cannot show the changes in the transmittance of the entire light-transmitting surface. Therefore, it is necessary to design a large-diameter quartz glass UV transmittance measurement device to solve the above problems. Summary of the invention

[0006] The object of the present utility model is to provide a large-diameter quartz glass ultraviolet transmittance measuring device that can detect large-diameter quartz glass and ensure accurate detection.

[0007] The technical solution of the present utility model is as follows:

[0008] A large-diameter quartz glass ultraviolet transmittance measuring device, which is composed of a base, a support plate, a clamping mechanism and a detection mechanism. It is characterized in that: a support plate is arranged on the base, and multiple guide rods are arranged in parallel on the base below the support plate. Clamping mechanisms are respectively arranged on the guide rods on both sides of the support plate, and a detection mechanism is arranged on the guide rods outside the clamping mechanisms.

[0009] The detection mechanism is composed of a detection slide seat, a lifting slide rod, a U-shaped arm, an ultraviolet light source, a transmitting probe, an optical fiber spectrometer and a receiving probe. Lifting slide rods are arranged in parallel on the detection slide seat, and a U-shaped arm is movably installed on the lifting slide rods. An ultraviolet light source is arranged on one side of the U-shaped arm, and a transmitting probe is arranged at the end of the U-shaped arm on one side of the ultraviolet light source. The transmitting probe is connected to the ultraviolet light source through an ultraviolet optical fiber; an optical fiber spectrometer is arranged on the other side of the U-shaped arm, and a receiving probe is arranged at the end of the U-shaped arm on one side of the optical fiber spectrometer. The receiving probe is connected to the optical fiber spectrometer through an ultraviolet optical fiber; the detection slide seat is slidably connected to the guide rod.

[0010] The clamping mechanism is composed of a support slide seat, a support slide rod and a clamping plate. Support slide rods are arranged in parallel on the support slide seat, and a clamping plate is movably installed on the support slide rods.

[0011] Between the support slide seat and the guide rod, between the detection slide seat and the guide rod, between the clamping plate and the support slide rod, and between the U-shaped arm and the lifting slide rod are respectively connected by dampers.

[0012] Between the support slide seat and the guide rod, between the detection slide seat and the guide rod, between the clamping plate and the support slide rod, and between the U-shaped arm and the lifting slide rod are respectively connected by locking bolts.

[0013] The support slide seat on one side of the detection mechanism is fixedly connected to the guide rod; translation electric cylinders are respectively arranged at both ends of the base. The piston rod of the translation electric cylinder on one side of the base is connected to the support slide seat, and the piston rod of the translation electric cylinder on the other side of the base is connected to the detection slide seat.

[0014] Lifting electric cylinders are respectively arranged on the support slide seat and the detection slide seat. The piston rod of the lifting electric cylinder on the support slide seat is fixedly connected to the clamping plate, and the piston rod of the lifting electric cylinder on the detection slide seat is fixedly connected to the U-shaped arm.

[0015] The beneficial effects of the present utility model are as follows:

[0016] This measuring device is easy to operate and has low requirements for the measurement environment. It can measure the ultraviolet transmittance of large-diameter quartz glass. By moving the U-shaped arm, it can continuously measure the ultraviolet transmittance of the entire light-passing surface of the quartz glass sample to be measured. By detecting the light intensity ratio of ultraviolet light before and after passing through the quartz glass sample to be measured, the ultraviolet transmittance of the quartz glass can be obtained without destructively sampling the sample, improving the detection efficiency. It can draw a dynamic distribution map of the transmittance change on the detection surface according to the detection results, intuitively observe the transmittance change distribution on the entire sample detection surface, and indirectly evaluate the impurity and structural defect distribution of the sample. It solves the problem that the existing double-beam ultraviolet spectrophotometer has inaccurate measurement of large-size samples. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic structural diagram of the present utility model;

[0018] Figure 2 is a top view schematic diagram of the present utility model;

[0019] Figure 3 is a front view schematic diagram of the present utility model;

[0020] Figure 4 is a schematic structural diagram of an improved type of the present utility model.

[0021] In the figure: 1, base; 2, support plate; 3, guide rod; 4, detection slide; 5, lifting slide rod; 6, U-shaped arm; 7, ultraviolet light source; 8, emission probe; 9, fiber optic spectrometer; 10, receiving probe; 11, ultraviolet optical fiber; 12, support slide; 13, support slide rod; 14, clamping plate; 15, translation electric cylinder; 16, lifting electric cylinder; 17, quartz glass sample to be measured. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] The measuring device for the ultraviolet transmittance of large-diameter quartz glass is composed of a base 1, a support plate 2, a clamping mechanism and a detection mechanism. It is characterized in that: a support plate 2 is arranged on the base 1, and multiple guide rods 3 are arranged in parallel on the base 1 below the support plate 2. Clamping mechanisms are respectively arranged on the guide rods 3 on both sides of the support plate 2 to clamp and fix the quartz glass sample to be measured (hereinafter referred to as the sample) placed on the support plate 2 through the clamping mechanism, so that the sample is not easily deflected and displaced during the detection process, ensuring the accuracy of the detection results. A detection mechanism is arranged on the guide rod 3 outside the clamping mechanism to detect the ultraviolet transmittance of the light-passing surface of the sample through the detection mechanism, evaluate the metal impurities or internal structural defects in the sample through the ultraviolet transmittance, and further evaluate the quality of high-purity quartz glass products. The guide rod 3 can guide and limit the clamping mechanism and the detection mechanism during the translation process of the clamping mechanism and the detection mechanism, avoid the offset of the clamping mechanism and the detection mechanism during translation, and ensure the accuracy of the detection results.

[0023] The detection mechanism consists of a detection slide 4, a lifting slide rod 5, a U-shaped arm 6, an ultraviolet light source 7, a transmitting probe 8, an optical fiber spectrometer 9, and a receiving probe 10. The lifting slide rods 5 are arranged in parallel on the detection slide 4. The U-shaped arm 6 is movably installed on the lifting slide rods 5. An ultraviolet light source 7 (ATG1001 type light source) is provided on one side of the U-shaped arm 6. The ultraviolet light source 7 uses a deuterium lamp as the light source. The wavelength range of the deuterium lamp is generally 180 - 360 nm. The light source generated by the deuterium lamp has good stability and can maintain a continuous and stable brightness and wavelength range for a long time. The deuterium lamp can also output a continuous spectrum with high intensity and does not cause pollution to the environment compared with traditional mercury lamps. Its price is relatively low. A transmitting probe 8 (74UV type probe) (optical fiber collimating mirror) is provided at the end of the U-shaped arm 6 on one side of the ultraviolet light source 7. The transmitting probe 8 is connected to the ultraviolet light source 7 through an ultraviolet optical fiber 11. An optical fiber spectrometer 9 (ATP5020P type spectrometer) is provided on the other side of the U-shaped arm 6. A receiving probe 10 (74UV type probe) is provided at the end of the U-shaped arm 6 on one side of the optical fiber spectrometer 9. The receiving probe 10 is connected to the optical fiber spectrometer 9 through an ultraviolet optical fiber 11. The detection slide 4 is slidably connected to the guide rod 3 so that the detection slide 4 drives the lifting slide rods 5, the U-shaped arm 6, the transmitting probe 8, and the receiving probe 10 to move horizontally along the guide rod 3. The function of the U-shaped arm 6 is to keep the transmitting probe at a predetermined distance from the quartz glass sample to be measured through the U-shaped arm 6, ensure that the optical path emitted by the ultraviolet light source 7 from the transmitting probe perpendicularly passes through the light-transmitting surface of the sample to be measured, and at the same time keep the synchronous movement of the transmitting probe 8 and the receiving probe 10, so that the light energy emitted by the transmitting probe 8 can enter the receiving probe 10 and then be transmitted to the optical fiber spectrometer 9 for spectral analysis of the ultraviolet light passing through the sample. The function of the lifting slide rod 5 is to guide and limit the movement of the U-shaped arm 6 in the vertical direction through the lifting slide rod 5, so as to cooperate with the detection slide and enable the transmitting probe 8 and the receiving probe 10 to move on the entire light-transmitting surface of the sample, thereby comprehensively detecting the sample.

[0024] The clamping mechanism consists of a support slide 12, support slide rods 13, and a clamping plate 14. The support slide rods 13 are arranged in parallel on the support slide 12. The clamping plate 14 is movably installed on the support slide rods 13 to adjust the horizontal position of the clamping plate 14 by the movement of the support slide 12 on the guide rod 3, adjust the vertical position of the clamping plate 14 by the sliding of the clamping plate 14 on the support slide rods 13, and enable the clamping plate 14 to clamp and fix the sample through the adjustment of the horizontal and vertical positions of the clamping plate 14.

[0025] A damper (not shown in the figure) is respectively connected between the support sliding seat 12 and the guide rod 3, between the detection sliding seat 4 and the guide rod 3, between the clamping plate 14 and the support sliding rod 13, and between the U-shaped arm 6 and the lifting sliding rod 5, so as to limit the movement of the clamping plate 14, the support sliding seat 12, the detection sliding seat 4 and the U-shaped arm 6 through the damper, thereby controlling the positions of the clamping plate 14 and the U-shaped arm 6, enabling the clamping plate 14 to fix the sample, and enabling the U-shaped arm 6 to support the transmitting probe 8 and the receiving probe 10.

[0026] A locking bolt (not shown in the figure) is respectively connected between the support sliding seat 12 and the guide rod 3, between the detection sliding seat 4 and the guide rod 3, between the clamping plate 14 and the support sliding rod 13, and between the U-shaped arm 6 and the lifting sliding rod 5, so as to lock the positions of the clamping plate 14, the support sliding seat 12, the detection sliding seat 4 and the U-shaped arm 6 through the locking bolt, thereby controlling the positions of the clamping plate 14 and the U-shaped arm 6, enabling the clamping plate 14 to fix the sample, and enabling the U-shaped arm 6 to support the transmitting probe 8 and the receiving probe 10.

[0027] As an improvement, the support sliding seat 12 on one side of the detection mechanism is fixedly connected to the guide rod 3; translation electric cylinders 15 are respectively arranged at both ends of the base 1, the piston rod of the translation electric cylinder 15 on one side of the base 1 is connected to the support sliding seat 12, and the piston rod of the translation electric cylinder 15 on the other side of the base 1 is connected to the detection sliding seat 4. The function of the translation electric cylinder 15 is to push the support sliding seat 12 on one side of the support plate 2 to move through the translation electric cylinder 15, and then cooperate with the support sliding seat 12 fixed on the other side of the support plate 2, so that the clamping plate 14 can clamp and fix the sample; by pushing the detection sliding seat 4 to translate through the translation electric cylinder 15, and then pushing the transmitting probe 8 and the receiving probe 10 to translate, so that the transmitting probe 8 and the receiving probe 10 can perform horizontal movement on the sample.

[0028] Lifting electric cylinders 16 are respectively arranged on the support sliding seat 12 and the detection sliding seat 4, the piston rod of the lifting electric cylinder 16 on the support sliding seat 12 is fixedly connected to the clamping plate 14, and the piston rod of the lifting electric cylinder 16 on the detection sliding seat 4 is fixedly connected to the U-shaped arm 6. The function of the lifting electric cylinder 16 is to push the clamping plate 14 to lift through the lifting electric cylinder 16, so that the height of the clamping plate 14 can match the diameter of the sample, thereby ensuring that the clamping plate 14 can clamp and fix the sample; by pushing the U-shaped arm 6 to lift through the lifting electric cylinder 16, and then pushing the transmitting probe 8 and the receiving probe 10 to lift, and through the cooperation of the lifting electric cylinder 16 and the translation electric cylinder 15, the transmitting probe 8 and the receiving probe 10 can perform arbitrary horizontal and vertical movement on the sample, so as to detect the entire light-transmitting surface of the sample.

[0029] When the large-aperture quartz glass ultraviolet transmittance measuring device detects the light-transmitting surface of the sample, it measures by sampling points. The emission probe 8 emits the ultraviolet light generated by the ultraviolet light source 7 towards the light-transmitting surface of the sample. The receiving probe 10 of the sample receives the light passing through the sample and is connected to the fiber optic spectrometer 9 with an ultraviolet optical fiber to analyze the intensity of the light beam in different wavelength bands after passing through the sample, and obtain the transmittance of the large-aperture sample. The specific measurement steps are as follows:

[0030] Turn off the ultraviolet light source 7, do not place a sample on the support plate 2, and turn on the fiber optic spectrometer to collect the background spectrum;

[0031] Turn on the ultraviolet light source 7, align the emission probe 8 with the receiving probe 10, and collect the reference spectrum again;

[0032] Before the test, measure the diameter of the sample first, adjust the position of the clamping plate 14 so that it can stably clamp the sample, then place the sample on the support plate 2, and push the clamping plate 14 to clamp and fix the sample;

[0033] Align the emission probe 8 with the light-transmitting surface of the sample, adjust the tilt angle of the deflected light-transmitting surface of the sample so that the light-transmitting surface is perpendicular to the optical path, and collect the transmittance spectrum;

[0034] Collect the sample at multiple locations by moving the emission probe 8 and the receiving probe 10. Move the probe once for each sampling point collected, and repeat this operation to achieve the overall scanning detection of the light-transmitting surface.

[0035] Draw a three-dimensional transmittance value distribution map at different wavelengths based on the collected data. In the order of the wavelength changing from large to small, make the drawn distribution map into a dynamic transmittance change diagram in the entire ultraviolet wavelength range.

[0036] This measuring device has simple operation and low requirements for the measuring environment; it can measure the ultraviolet transmittance of large-aperture quartz glass, and can continuously measure the ultraviolet transmittance of the entire light-transmitting surface of the quartz glass sample to be measured by moving the U-shaped arm 6; by detecting the light intensity ratio of the ultraviolet light before and after passing through the quartz glass sample to be measured, the ultraviolet transmittance of the quartz glass is obtained, without sampling the sample destructively, improving the detection efficiency. It can draw a dynamic distribution map of the transmittance change on the detection surface according to the detection results, can visually observe the transmittance change distribution on the entire detection surface of the sample, and can indirectly evaluate the impurity and structural defect distribution of the sample. It solves the problem that the existing double-beam ultraviolet spectrophotometer measures large-size samples inaccurately.

Claims

1. A large-aperture quartz glass ultraviolet transmittance measuring device, which is composed of a base (1), a support plate (2), a clamping mechanism and a detection mechanism, and is characterized in that: A support plate (2) is provided on a base (1). A plurality of guide rods (3) are arranged in parallel on the base (1) below the support plate (2). Clamping mechanisms are respectively arranged on the guide rods (3) on both sides of the support plate (2), and a detection mechanism is arranged on the guide rod (3) outside the clamping mechanism; The described detection mechanism is composed of a detection slide base (4), a lifting slide rod (5), a U-shaped arm (6), an ultraviolet light source (7), a transmitting probe (8), an optical fiber spectrometer (9) and a receiving probe (10). The lifting slide rods (5) are arranged in parallel on the detection slide base (4). A U-shaped arm (6) is movably installed on the lifting slide rod (5). An ultraviolet light source (7) is arranged on one side of the U-shaped arm (6). A transmitting probe (8) is arranged at the end of the U-shaped arm (6) on one side of the ultraviolet light source (7). The transmitting probe (8) is connected to the ultraviolet light source (7) through an ultraviolet optical fiber (11); An optical fiber spectrometer (9) is arranged on the other side of the U-shaped arm (6). A receiving probe (10) is arranged at the end of the U-shaped arm (6) on one side of the optical fiber spectrometer (9). The receiving probe (10) is connected to the optical fiber spectrometer (9) through an ultraviolet optical fiber (11); The described detection slide base (4) is slidably connected to the guide rod (3).

2. The large-aperture quartz glass ultraviolet transmittance measuring device according to claim 1, wherein: The described clamping mechanism is composed of a support slide base (12), a support slide rod (13) and a clamping plate (14). The support slide rods (13) are arranged in parallel on the support slide base (12). A clamping plate (14) is movably installed on the support slide rod (13).

3. A large-aperture quartz glass ultraviolet transmittance measuring device according to claim 2, characterized in that: Between the support slide base (12) and the guide rod (3), between the detection slide base (4) and the guide rod (3), between the clamping plate (14) and the support slide rod (13), and between the U-shaped arm (6) and the lifting slide rod (5) are respectively connected through dampers.

4. A large-aperture quartz glass ultraviolet transmittance measuring device according to claim 2, characterized in that: Between the support slide base (12) and the guide rod (3), between the detection slide base (4) and the guide rod (3), between the clamping plate (14) and the support slide rod (13), and between the U-shaped arm (6) and the lifting slide rod (5) are respectively connected through locking bolts.

5. A large-aperture quartz glass ultraviolet transmittance measuring device according to claim 2, characterized in that: The support slide base (12) on one side of the detection mechanism is fixedly connected to the guide rod (3); Translation electric cylinders (15) are respectively arranged at both ends of the base (1). The piston rod of the translation electric cylinder (15) on one side of the base (1) is connected to the support slide base (12), and the piston rod of the translation electric cylinder (15) on the other side of the base (1) is connected to the detection slide base (4).

6. The large-aperture quartz glass ultraviolet transmittance measuring device according to claim 5, characterized in that: Lifting electric cylinders (16) are respectively arranged on the support slide base (12) and the detection slide base (4). The piston rod of the lifting electric cylinder (16) on the support slide base (12) is fixedly connected to the clamping plate (14), and the piston rod of the lifting electric cylinder (16) on the detection slide base (4) is fixedly connected to the U-shaped arm (6).

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