Tail gas filtering device and vapor phase growth equipment

Abstract

The utility model provides a tail gas filtering device and vapor phase growth equipment, the tail gas filtering device is applied to the tail gas emission of vapor phase growth equipment, the tail gas filtering device comprises a shell and a condensation piece arranged in a condensation section, the shell comprises an inlet section and the condensation section, the inlet section is provided with a first end part and a second end part which are oppositely arranged along the radial direction of the shell, the first end is provided with an air inlet, the second end is connected with the condensation section, and the inner diameter of the inlet section is increased in the direction from the first end to the second end. The condensation piece is arranged in the condensation section and is hollow, and one end part and / or the side part far away from the second end part are / is communicated with the interior. And the blocking piece is arranged between the condensation piece and the inlet section. According to the tail gas filtering device, the gas flow direction is more dispersed through diameter expansion of the inlet section, and the problem that particles are blocked at the gas inlet due to rapid condensation and liquefaction of tail gas in the tail gas filtering device is avoided. By prolonging the condensation path, the tail gas is in full contact with the condensation piece, and the condensation efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to an exhaust gas filtering device and a vapor phase growth equipment. Background Art

[0002] In the process of using a vapor phase growth equipment, such as a Metal-organic Chemical Vapor Deposition (MOCVD) equipment, to deposit a semiconductor film on the surface of a substrate, in order to maintain the reaction pressure in the reaction chamber, exhaust gas control needs to be synchronized during the intake process to discharge unreacted source gases, purge gases, carrier gases, etc. Among them, organic compounds of group III and group II elements such as boron, gallium, and indium as one of the source gases, and hydrides of group V and group VI elements such as arsenic as another source gas react with each other to form particles that are not attached to the surface of the substrate. Some unreacted source gases, such as arsenic sources, are toxic and are not allowed to be directly discharged. The vapor phase growth equipment of the prior art usually sets a filter between the reaction chamber and the vacuum pump. The exhaust gas discharged from the reaction chamber first passes through the filter to condense the toxic gas into a liquid or solid state in the filter, and then filters out the particles to prevent blocking the vacuum pump, so as to ensure the long-term normal operation of the exhaust gas discharge system.

[0003] Due to the high process temperature of the vapor phase growth reaction, for example, the process temperature of epitaxially growing an InGaAsP semiconductor film in an MOCVD equipment is above 600 degrees Celsius, the temperature of the discharged exhaust gas can be as high as above 130 degrees Celsius. To ensure the normal operation and service life of the vacuum pump, a condenser is provided in the filter for the exhaust gas system of the MOCVD equipment in the prior art. The exhaust gas carrying particles enters the filter from the filter inlet and first passes through the condenser for cooling. On the one hand, it condenses the source gas that needs to be controlled for emission, and on the other hand, it cools the gas. However, due to the fast exhaust gas flow rate and the short distance between the condenser and the inlet, after the gas carrying particles enters, the rapid condensation of the source gas causes solid particles to accumulate at the inlet, resulting in blockage.

[0004] In view of this, it is necessary to provide a new type of exhaust gas filtering device to solve the above problems. Summary of the Utility Model

[0005] The purpose of the utility model is to provide an exhaust gas filtering device and a vapor phase growth equipment including the exhaust gas filtering device, to reduce or avoid the problem of particle blockage at the inlet caused by the rapid condensation and liquefaction of gases that are not suitable for direct emission in the exhaust gas filtering device, and to improve the efficiency of condensing gases that are not suitable for direct emission, effectively reducing the gas temperature.

[0006] The utility model provides an exhaust gas filtering device, which is applied to the exhaust gas discharge of a vapor growth device. The exhaust gas filtering device includes: a housing and a condensing member. The housing includes an inlet section and a condensing section. The inlet section has a first end and a second end that are oppositely arranged along the radial direction of the housing. The first end is provided with an air inlet, and the second end is connected to the condensing section. The inner diameter of the inlet section increases in the direction from the first end to the second end. The condensing member is arranged in the condensing section, is hollow inside, and one end and / or side away from the second end is / are communicated with the inside. A blocking member and a guiding channel with openings at both ends. The blocking member is arranged between the condensing member and the inlet section. One end of the guiding channel is located inside the condensing member and is communicated with the inside of the condensing member, and extends in the direction from the first end to the second end, so that after the exhaust gas enters from the air inlet, it enters the guiding channel through the condensing member.

[0007] The utility model also provides a vapor growth device, which includes a process chamber, a pumping device, and an exhaust gas filtering device as described in any of the above embodiments. The exhaust gas filtering device is arranged between the process chamber and the pumping device.

[0008] The beneficial effects of the exhaust gas filtering device and the vapor growth device provided by the utility model are both as follows: the diameter-expanding design that the inner diameter of the inlet section increases in the direction from the first end to the second end makes the flow space of the exhaust gas that is not suitable for direct discharge in the inlet section increase, the gas flow direction is more dispersed, and a pressure reduction gradient is provided between the first end and the second end, reducing or avoiding the problem of particle blockage at the air inlet caused by the rapid condensation and liquefaction of the exhaust gas that is not suitable for direct discharge in the exhaust gas filtering device. The condensing member is arranged in the condensing section, is hollow inside, and one end and / or side away from the second end is / are communicated with the inside. A blocking member and a guiding channel with openings at both ends. The blocking member is arranged between the condensing member and the inlet section. One end of the guiding channel is located inside the condensing member and is communicated with the inside of the condensing member, and extends in the direction from the first end to the second end, so that after the exhaust gas enters the condensing section from the air inlet, under the blocking of the blocking member, it flows from the periphery of the blocking member to the periphery of the condensing member, and enters the condensing member through the opening at one end and / or side of the condensing member away from the second end and then enters the guiding channel, extending the condensation path, making the exhaust gas that is not suitable for direct discharge fully contact with the condensing member, and improving the condensation efficiency.

[0009] Furthermore, the exhaust gas filtering device further includes a particle filtering section that is connected to the condensing section and is internally communicated. The other end of the guiding channel is communicated with the inside of the particle filtering section. Preferably, the condensing member includes a condensing coil.

[0010] Furthermore, the radial distance L between the first end portion and the end portion of the condensing member close to the inlet section is greater than or equal to 70 mm and less than or equal to 85 mm.

[0011] Furthermore, the ratio range of L1 to L2 is 1 to 1.5; where L1 is the radial distance between the first end portion and the second end portion, and L2 is the radial distance between the second end portion and the end portion of the condensing member close to the inlet section. The beneficial effect is that it avoids the inconvenience of processing and bending the condensing member due to too small a ratio of L1 to L2, and avoids the radial distance L exceeding 85 mm due to too large a ratio of L1 to L2.

[0012] Further, the inlet section includes a cylinder body located between the first end portion and the second end portion. The inner diameter of the cylinder body increases in the direction from the first end portion to the second end portion, and the included angle between the cylinder body and the housing in the radial direction ranges from 60° to 75°.

[0013] Further, the tail gas filtering device further includes a heating member wound around the outer wall of the cylinder body and covering at least part of the surface of the outer wall of the cylinder body. The beneficial effect is that the inlet section is heated by the heating member to avoid condensation of the gas at the inlet section.

[0014] Further, the tail gas filtering device further includes a gas guide pipe connected and communicated with the first end portion, and a ball valve provided on the gas guide pipe. The heating member is also wound around the gas guide pipe and the ball valve to cover at least part of the surface of the gas guide pipe and at least part of the surface of the ball valve. The beneficial effect is that by providing the heating member on the ball valve and the gas guide pipe, it is beneficial to improve the heating effect.

[0015] Furthermore, the tail gas filtering device further includes a gas guide pipe, a connecting end cover and a plurality of fasteners; the gas guide pipe is hermetically connected and internally communicated with the air inlet; the connecting end cover is sleeved on the gas guide pipe and contacts the inlet section; the plurality of fasteners are arranged around the gas guide pipe on the connecting end cover, and one end portion of each fastener extends into the inlet section and forms an integrated structure with the inner wall of the inlet section to strengthen the sealing connection relationship between the gas guide pipe and the air inlet. The beneficial effect is that the integrated design of the fasteners and the inner wall of the inlet section avoids loosening of the fasteners and the inlet section during use and prevents gas leakage. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a schematic diagram of the tail gas filtering device of the present invention.

[0017] Figure 2 is a schematic connection diagram of the inner wall surface of the cylinder body in the tail gas filtering device of the present invention being a conical surface and the gas guide pipe.

[0018] Figure 3 This is a schematic diagram of the inner wall surface of the cylinder in the tail gas filtering device of the present utility model being spherical.

[0019] Figure 4 This is a schematic diagram of the inner wall surface of the cylinder in the tail gas filtering device of the present utility model being an arc surface.

[0020] Figure 5 This is a schematic diagram of the connection between the inlet section of the tail gas filtering device of the present utility model being conical and the gas guide pipe.

[0021] Figure 6 This is a schematic diagram of the vapor deposition apparatus of the present utility model.

[0022] Explanation of reference numerals: 10, tail gas filtering device; 11, housing; 111, inlet section; 1111, first end; 1112, air inlet; 1113, second end; 1114, cylinder; 1115, fastener; 112, condensation section; 113, particle filtration section; 12, condensation member; 121, guiding channel; 122, outer coil section; 123, inner coil section; 13, heating member; 14, gas guide pipe; 15, ball valve; 16, connecting end cover; 17, gasket; 18, seal; 19, blocking member; 20, process chamber; 30, air extraction device. Detailed implementation manners

[0023] To make the objectives, technical solutions and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below. Apparently, the described embodiments are some but not all of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0024] An embodiment of the present utility model provides a tail gas filtering device, which is applied to the tail gas emission of a vapor deposition apparatus. Refer to Figure 1 and Figure 2 , the tail gas filtering device 10 includes: a housing 11 and a condensation member 12. The housing 11 includes an inlet section 111 and a condensation section 112. The inlet section 111 has a first end 1111 and a second end 1113 that are oppositely arranged along the radial direction of the housing 11. The first end 1111 is provided with an air inlet 1112. The second end 1113 is connected to the condensation section 112. The inner diameter of the inlet section 111 increases in the direction from the first end 1111 to the second end 1113.

[0025] In the exhaust gas discharged from the reaction chamber of the vapor growth apparatus, there are harmful gases (such as arsine, etc.) that are not suitable for direct discharge into the environment, and there are also entrained particles (such as those formed by the reaction between different source gases and not deposited on the substrate surface to form a film). In order to reduce or avoid the emission of harmful gases, as well as reduce the gas temperature and effectively intercept particles, in this embodiment, the inner diameter of the inlet section 111 increases in the direction from the first end 1111 to the second end 1113, so that the flow space of the gas in the inlet section 111 increases, the gas flow direction becomes more dispersed, and a pressure reduction gradient is provided between the first end 1111 and the second end 1113, providing sufficient time for the gas flow to disperse, and effectively reducing the risk of blockage caused by particle accumulation at the inlet due to rapid condensation of the particle-containing gas.

[0026] In one embodiment, referring to Figure 1 , the exhaust gas filtering device 10 further includes a particle filtering section 113 connected to and internally communicating with the condensation section 112 to intercept particles. A filter core for filtering particles is provided in the particle filtering section 113, and the filter core extends radially along the housing 11 and is radially opposite to the outlet of the guiding channel 121 along the housing 11. The filtering accuracy of the filter core can be flexibly adjusted according to the particle filtering requirements. For example, in some embodiments, the filtering accuracy is 10 μm.

[0027] In some embodiments, the guiding channel 121 communicates with the particle filtering section 113.

[0028] The exhaust gas containing particles and harmful gases first passes through the cooling of the condensing member 12, which can condense the harmful gases to reduce or prevent the emission to the external environment and effectively reduce the temperature of the exhaust gas, and then passes through the particle filtering section 113 to filter and intercept the particles, avoiding the adverse effects of particles or high-temperature gases on the pump. The type selection of the condensing member 12 is adapted to the type of harmful gas, which is a conventional technical means in this field. For example, for the arsenic source (such as arsine) used in the MOCVD process, the condensing member 12 can adopt an arsenic trap.

[0029] In some embodiments, referring to Figure 1, the condensation member 12 is disposed within the condensation section 112. The interior of the condensation member 12 is hollow, and one end and / or side of the condensation member 12 remote from the second end portion 1113 is in communication with the interior. A blocking member 19 and a guiding channel 121 with openings at both ends. The blocking member 19 is disposed between the condensation member 12 and the inlet section 111. One end of the guiding channel 121 is located within the condensation member 12 and is in communication with the interior of the condensation member 12, and extends in the direction from the first end portion 1111 towards the second end portion 1113, such that after the tail gas enters from the air inlet 1112, it enters the guiding channel 121 through the condensation member 12. Preferably, the blocking member 19 is disposed at one end of the condensation member 12 near the second end portion 1113; alternatively, the blocking member 19 is suspended within the condensation section 112 to close the opening at one end of the condensation member 12 near the second end portion 1113. The specific setting manner of the blocking member 19 is not limited herein, as long as it can block between the condensation member 12 and the inlet section 111. Under the blocking of the blocking member 19, the tail gas flows from the periphery of the blocking member 19 to between the condensation member 12 and the housing 11, flows along the outer side of the condensation member 12, and flows into the interior of the condensation member 12 through the opening at one end and / or side of the condensation member 12 remote from the second end portion 1113, and then enters the guiding channel 121 for further condensation, extending the condensation path of the tail gas passing through the condensation member 12, enabling it to contact the condensation member 12 more fully, improving the condensation efficiency, and more fully condensing the harmful gases in the tail gas to reduce or prevent the emission of harmful gases to the external environment and effectively reduce the temperature of the tail gas.

[0030] In one embodiment, the interior of the condensation member 12 is hollow and the bottom is hollowed out and in communication with the interior of the condensation member 12. The guiding channel 121 is in communication with the interior. After the tail gas enters the condensation section 112, it flows from between the housing 11 and the condensation member 12 to the bottom of the condensation member 12, and enters the interior of the condensation member 12 through the opening at the bottom of the condensation member 12 and then enters the guiding channel 121.

[0031] In one embodiment, as Figure 1 shown, the interior of the condensation member 12 is hollow and the side is hollowed out and in communication with the interior of the condensation member 12. After the tail gas enters the condensation section 112, it flows from between the housing 11 and the condensation member 12, and enters the interior of the condensation member 12 from the side of the condensation member 12 and then enters the guiding channel 121.

[0032] In one embodiment, the interior of the condensation member 12 is hollow and both the bottom and the side are hollowed out and in communication with the interior of the condensation member 12. After the tail gas enters the condensation section 112, during the process of flowing from between the housing 11 and the condensation member 12 to the bottom of the condensation member 12 and entering the interior of the condensation member 12, it also enters the interior of the condensation member 12 from the side of the condensation member 12 and then enters the guiding channel 121.

[0033] In a specific embodiment, as Figure 1As shown, the condensing member 12 includes a condensing coil, which is coiled into a cylindrical shape. Preferably, the condensing coil includes an outer coil section 122 in a cylindrical shape and an inner coil section 123 in a cylindrical shape located inside the outer coil section 122. There is a gap between the outer coil section 122 and the inner coil section 123, and the inner coil section 123 is internally communicated with the particle filtration section 113. After the tail gas enters the condensing section 112, it flows from between the housing 11 and the outer coil section 122 to one end of the outer coil section 122 away from the second end 1113, enters the outer coil section 122 through the opening at one end of the outer coil section 122 away from the second end 1113, then flows along the gap between the outer coil section 122 and the inner coil section 123, and flows into the inner coil section 123 through the opening at one end of the inner coil section 123 close to the second end 1113, and finally flows into the particle filtration section 113. The nested arrangement of the outer coil section 122 and the inner coil section 123 forms a tortuous flow path to extend the condensation path and improve the condensation efficiency.

[0034] In some embodiments, lockable rollers are provided at the bottom of the condensing section 112 to facilitate movement.

[0035] In one embodiment, referring to Figure 1 and Figure 2 , the radial distance L between the first end 1111 and the end of the condensing member 12 close to the inlet section 111 is greater than or equal to 70 mm and less than or equal to 85 mm. In this embodiment, by controlling the radial distance L between the first end 1111 and the end of the condensing member 12 close to the inlet section 111 to be greater than or equal to 70 mm, the gas needs to flow through a certain distance after entering the inlet section 111 to reach the condensing section 112, so as to ensure that the gas has sufficient flow space for dispersion; by setting the radial distance L within 85 mm, it is possible to avoid occupying too much space in the gas-phase growth equipment due to the large volume of the inlet section 111, which affects the space utilization rate in the equipment, and it is also possible to avoid consuming more materials to manufacture the inlet section 111, which increases the manufacturing cost, and it is also possible to avoid increasing the working pressure of the air extraction device 30 due to the large volume of the inlet section 111.

[0036] In a specific embodiment, referring to Figure 1 and Figure 2 , the ratio range of L1 to L2 is 1 to 1.5, where L1 is the radial distance between the first end 1111 and the second end 1113, and L2 is the radial distance between the second end 1113 and the end of the condensing member 12 close to the inlet section 111. Since the inlet section 111 is a variable-diameter slope design, the condensing pipe of the condensing member 12 needs to be as Figure 1It is shown that it obliquely passes through the inlet section 111 and then extends into the condensation section 112 for winding. If the ratio of L1 to L2 is too small, the radial distance between the cylindrical body 1114 and the end face of the condensation member 12 close to the first end 1111 is short, resulting in a small installation space for the condensation pipe section of the condensation member 12 entering the inlet section 111 from the cylindrical body 1114. The condensation pipe section obliquely extends into the condensation section 112 and needs to be bent and wound after extending a short distance. Such processing operation is difficult, and improper operation is likely to cause damage to the condensation pipe section and the inlet section, affecting the assembly performance. If the ratio of L1 to L2 is too large, the inlet section 111 is too long, increasing the cost and floor area.

[0037] In another specific embodiment, referring to Figure 1 and Figure 2 , the inlet section 111 includes a cylindrical body 1114 between the first end 1111 and the second end 1113. The inner diameter of the cylindrical body 1114 increases in the direction from the first end 1111 to the second end 1113, and the included angle between it and the radial direction of the housing 11 ranges from 60° to 75°. In some cases, to avoid the source gas whose emission needs to be controlled in the tail gas from condensing in the pipeline before entering the tail gas filtering device 10 and affecting the exhaust, a heating member 13, such as a heating tape, needs to be provided on the exhaust pipeline to control the temperature, and a heating member 13 is also provided on the surface of the inlet section 111 of the tail gas filtering device. In this embodiment, by reasonably setting the range of the included angle α between the inner diameter of the cylindrical body 1114 and the radial direction of the housing 11, the problem that the heating member 13 is not easy to wind around the side surface of the cylindrical body 1114 and the fitting effect is poor due to too large an included angle α (i.e., the slope of the side surface of the cylindrical body 1114 is too steep) can be avoided. It can also avoid the problem that the effect of gas diffusion and pressure gradient reduction is affected due to too small an included angle α (i.e., the side surface of the cylindrical body 1114 is too close to the condensation section 112), resulting in the particles in the particulate gas being prone to accumulate at one end of the condensation member 12 close to the inlet section 111 after condensation and sedimentation.

[0038] In some embodiments, the inner wall surface of the cylindrical body 1114 is in the shape of a conical surface, a spherical surface or an arc surface, etc. The shape of the inlet section 111 is not limited herein, as long as it is ensured that the inner diameter of the inlet section 111 shows an increasing trend along the gas flow direction, as Figure 2 shown, the inner wall surface of the cylindrical body 1114 is a conical surface, as Figure 3 shown, the inner wall surface of the cylindrical body 1114 is an arc surface, as Figure 4 shown, a part of the inner wall surface of the cylindrical body 1114 is an arc surface, as Figure 5 shown, the inlet section 111 is in a conical shape, that is, both the inner wall surface and the outer wall surface of the cylindrical body 1114 are conical surfaces.

[0039] In one embodiment, referring to Figure 1, the tail gas filtering device 10 further includes a heating element 13 wound around the outer wall of the cylinder body 1114 and covering at least part of the surface of the outer wall of the cylinder body 1114. The inlet section 111 is heated by the heating element 13 to prevent the gas from condensing in the inlet section 111 and blocking the air inlet 1112.

[0040] In another embodiment, referring to Figure 1 and Figure 2 , the tail gas filtering device 10 further includes a gas guide pipe 14 connected and communicated with the first end portion 1111 and a ball valve 15 provided on the gas guide pipe 14. The heating element 13 is also wound around the gas guide pipe 14 and the ball valve 15 to cover at least part of the surface of the gas guide pipe 14 and at least part of the surface of the ball valve 15. In this embodiment, the heating element 13 is also wound around the gas guide pipe 14 and the ball valve 15 to heat the gas guide pipe 14 and the ball valve 15, reducing or preventing the source gas from condensing. The ball valve 15 is selected because its spherical surface structure is easier to wind the heating element 13 around, making the heating element 13 fit better with the ball valve 15 and ensuring the heating effect.

[0041] In one embodiment, referring to Figure 5 , the tail gas filtering device 10 further includes a gas guide pipe 14, a connecting end cover 16 and a plurality of fasteners 1115. The gas guide pipe 14 is hermetically connected and internally communicated with the air inlet 1112. The connecting end cover 16 is sleeved on the gas guide pipe 14 and contacts the inlet section 111. The plurality of fasteners 1115 are arranged around the gas guide pipe 14 on the connecting end cover 16. One end of each fastener 1115 extends into the inlet section 111 and forms an integral structure with the inner wall of the inlet section 111 to strengthen the sealed connection relationship between the gas guide pipe 14 and the air inlet 1112. Specifically, the fasteners 1115 can be screws, bolts, etc. The one end of the fastener 1115 can be fixed to the inner wall of the inlet section 111 by means of groove seamless welding. The sealed cover of the connecting end cover 16 seals the connection between the gas guide pipe 14 and the air inlet 1112. Through the integrated design of the fasteners 1115 and the inner wall of the inlet section 111, the firmness of the connection between the fasteners 1115 and the inlet section 111 is enhanced, preventing loosening and deformation at the connection between the fasteners 1115 and the inlet section 111 during long-term use.

[0042] Further, referring to Figure 5 , an annular seal 18 is provided inside the connecting end cover 16. The seal 18 is located between the gas guide pipe 14 and the first end portion 1111 to seal the connection between the gas guide pipe 14 and the air inlet 1112. The seal 18 is concentrically arranged with the air inlet 1112. A double seal is formed by the seal 18 and the connecting end cover 16 to enhance the sealing effect of the connection between the gas guide pipe 14 and the air inlet 1112. Specifically, the seal 18 is an O-ring and can be made of other corrosion-resistant elastic materials such as fluororubber.

[0043] Further, referring to Figure 5 , a washer 17 is clamped between the connecting end cover 16 and the first end. The washer 17 is concentric with the air inlet 1112. By providing the washer 17, direct contact between the connecting end cover 16 and the first end portion 1111 is avoided, preventing wear at the connection between the connecting end cover 16 and the first end portion 1111 due to stress concentration. Specifically, the washer 17 is a ring / loop structure made of a steel ring or other metal material.

[0044] The technical effects of the exhaust gas filtering device of the present utility model will be explained below.

[0045] 1. Through the design of expanding the diameter of the inlet section 111, the space of the air intake area is effectively increased, making the gas flow more dispersed, avoiding the blockage of the air inlet 1112 caused by the accumulation of particles entrained by the harmful gas in the particulate-containing gas due to rapid condensation at one end of the condensing member 12 close to the inlet section 111, thereby extending the service life of the exhaust gas filtering device 10 and reducing the maintenance frequency and cost.

[0046] 2. The blocking member 19 is blocked between the condensing member 12 and the inlet section 111. Under the blocking of the blocking member 19, it flows from the periphery of the blocking member 19 to the periphery of the condensing member 12, and flows into the condensing member 12 through the opening at one end and / or side of the condensing member 12 away from the second end portion 1113 and then enters the guiding channel 121, extending the condensation path, enabling the exhaust gas to fully contact the condensing member 12, improving the condensation efficiency, achieving full condensation of the harmful gas in the exhaust gas, and effectively reducing the exhaust gas temperature.

[0047] 3. By reasonably setting the range of the radial distance L, it not only ensures sufficient air intake space but also avoids increasing the manufacturing cost, increasing the occupied volume, and increasing the working pressure of the air extraction device 30 due to an overly large radial distance L. By reasonably setting the ratio range of L1 to L2 to facilitate the processing and bending of the condensing member 12 and avoid an overly long radial distance L. By reasonably setting the value range of the angle α, it is convenient to wind the heating member 13 around the outer wall of the cylinder 1114 and also ensures sufficient air intake space to reduce or avoid blockage of particles at the air inlet 1112.

[0048] 4. By providing the heating member 13 on the outer wall of the cylinder 1114, the air guide pipe 14, and the ball valve 15, it is possible to reduce or avoid the influence of the source gas that needs to control emissions from condensing in the pipeline before entering the inlet section 111 on the exhaust.

[0049] 5. Through the integrated structure formed by the fastener 1115 and the inner wall of the inlet section 111, the sealing connection relationship between the air guide pipe 14 and the air inlet 1112 is strengthened, preventing gas leakage.

[0050] Referring to Figure 6, the present utility model further provides a vapor growth device, including a process chamber 20, a pumping device 30, and the tail gas filtering device 10 in any of the above embodiments. The tail gas filtering device 10 is disposed between the process chamber 20 and the pumping device 30. Specifically, the pumping device 30 is a suction pump, a vacuum pump, etc.

[0051] The following combines specific experimental data to illustrate the improved effect of the tail gas filtering device of the present utility model when applied to a vapor growth device.

[0052] When using the existing filter, the process chamber 20 of the machine tool is used 39 times and experiences 7 days. The air inlet 1112 of the filter usually becomes blocked, that is, currently, maintenance is usually required once every 7 days. After replacing with the tail gas filtering device 10 of the present application and adopting the same process parameters, the process chamber 20 of the machine tool is used 205 times and operates for 45 days without blockage. Therefore, the design scheme of the present utility model doubles the maintenance period and greatly reduces the number and cost of maintenance.

[0053] Although the embodiments of the present utility model have been described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are all within the scope and spirit of the present utility model described in the claims. Moreover, the present utility model described herein may have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical terms or scientific terms used herein should have the ordinary meaning understood by those of ordinary skill in the art to which the present utility model belongs. The words such as "including" used herein mean that the elements or objects appearing before this word cover the elements or objects listed after this word and their equivalents, without excluding other elements or objects.

Claims

1. An exhaust gas filtering device, characterized in that, Applied to the exhaust gas emission of a vapor deposition device, the exhaust gas filtering device includes: A housing, including an inlet section and a condensation section. The inlet section has a first end and a second end disposed opposite to each other in the radial direction of the housing. The first end is provided with an air inlet, the second end is connected to the condensation section, and the inner diameter of the inlet section increases in the direction from the first end to the second end; A condensation member, disposed inside the condensation section, hollow inside, and one end and / or side away from the second end is / are in communication with the inside; A blocking member and a guiding channel with openings at both ends. The blocking member is disposed between the condensation member and the inlet section. One end of the guiding channel is located inside the condensation member and is in communication with the inside of the condensation member, and extends in the direction from the first end to the second end, so that after the exhaust gas enters from the air inlet, it enters the guiding channel through the condensation member.

2. The exhaust gas filtering device according to claim 1, characterized in that, It further includes a particle filtering section connected to the condensation section and in internal communication. The other end of the guiding channel is in communication with the inside of the particle filtering section.

3. The exhaust gas filtering device according to claim 1, characterized in that, The condensation member includes a condensation coil.

4. The tail gas filtration device according to claim 1, characterized in that, The radial distance L between the first end and the end of the condensation member close to the inlet section is greater than or equal to 70 mm and less than or equal to 85 mm.

5. The tail gas filtering device according to claim 1 or 4, characterized in that The ratio range of L1 to L2 is 1 to 1.5; Wherein, L1 is the radial distance between the first end and the second end, and L2 is the radial distance between the second end and the end of the condensation member close to the inlet section.

6. The tail gas filtration device according to claim 1, characterized in that, The inlet section includes a cylinder body located between the first end and the second end. The inner diameter of the cylinder body increases in the direction from the first end to the second end, and the included angle between the cylinder body and the housing in the radial direction ranges from 60° to 75°.

7. The exhaust gas filtering device according to claim 6, characterized in that, It further includes a heating member wound around the outer wall of the cylinder body and covering at least part of the surface of the outer wall of the cylinder body.

8. The exhaust gas filtering device according to claim 7, characterized in that It further includes a gas guide pipe connected to and in communication with the first end and a ball valve disposed on the gas guide pipe. The heating member is also wound around the gas guide pipe and the ball valve to cover at least part of the surface of the gas guide pipe and at least part of the surface of the ball valve.

9. The exhaust gas filtering device according to claim 1, characterized in that It further includes a gas guide pipe, a connecting end cover and a plurality of fasteners; The gas guide pipe is hermetically connected to and in internal communication with the air inlet; The connecting end cover is sleeved on the gas guide pipe and contacts the inlet section; The plurality of fasteners are disposed around the gas guide pipe on the connecting end cover. One end of each fastener extends into the inlet section and forms an integral structure with the inner wall of the inlet section to strengthen the sealed connection relationship between the gas guide pipe and the air inlet.

10. A vapor growth apparatus, characterized in that, It includes a process chamber, an air extraction device and the exhaust gas filtering device according to any one of claims 1-9. The exhaust gas filtering device is disposed between the process chamber and the air extraction device.

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