Large-breadth probe card grinding table assembly

Abstract

The utility model discloses a large-breadth probe card grinding table assembly, which belongs to the technical field of probe card grinding tables and comprises a base. The first positioning mechanism is movably arranged on the base, the first positioning mechanism is suitable for driving the probe card to move in the length direction, the second positioning mechanism is rotatably arranged on the base, and the second positioning mechanism rotates to selectively abut against the top of the probe card; the grinding table is movably arranged on the base, and the grinding table moves to grind the probe card. According to the grinding table assembly designed by the utility model, the probe card is stably fixed in the grinding process, the probe card is prevented from deviating due to external force in the grinding process, the grinding quality of the probe card is improved, and the flatness and the precision of the probe card are ensured.

Description

Technical Field

[0001] The utility model belongs to the technical field of probe card grinding tables, and particularly relates to a large-format probe card grinding table assembly. Background Art

[0002] In related technologies, due to the flatness of the probe card, small-format probe cards are used in the market to detect wafers. In the prior art, the company invented a large-format probe card to be suitable for detecting wafers at one time, so as to improve the detection efficiency of wafers. However, the existing grinding table assembly has poor positioning and fixing effects on the large-format probe card, resulting in poor grinding effects of the large-format probe card and unable to ensure the flatness and precision of the large-format probe card. Content of the Utility Model

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. For this reason, an object of the utility model is to provide a large-format probe card grinding table assembly. The large-format probe card grinding table assembly designed according to the utility model realizes stable fixation of the probe card during the grinding process, avoids the probe card from shifting due to external forces during the grinding process, improves the grinding quality of the probe card, and ensures the flatness and precision of the probe card.

[0004] To achieve the above object, the utility model provides the following technical solutions:

[0005] The utility model provides a large-format probe card grinding table assembly, including: a base; a first positioning mechanism movably arranged on the top of the base, the first positioning mechanism being adapted to drive the probe card to move in the length direction and fix the probe card when the probe card moves to a preset position; a second positioning mechanism rotatably arranged on the top of the base, the second positioning mechanism rotating to selectively abut against the top of the probe card; a grinding table movably arranged on the top of the base, the grinding table moving to grind the probe card.

[0006] According to the large-format probe card grinding table assembly of the utility model, the first positioning mechanism moves to drive the probe card to move in the length direction and fix the probe card when the probe card moves to a preset position, and the second positioning mechanism rotates to cooperate with the top of the probe card to fix the probe card in the height direction. Thus, through the above settings, stable fixation of the probe card during the grinding process is realized, the probe card is prevented from shifting due to external forces during the grinding process, the grinding quality of the probe card is improved, and the flatness and precision of the probe card are ensured.

[0007] Further, the first positioning mechanism includes: a limiting rod. There are two limiting rods, and the two limiting rods are respectively movably connected to the base, and the two limiting rods can selectively move relative to the base in the length direction.

[0008] Further, the first positioning mechanism further includes: a positioning plate. There are two positioning plates, and the two positioning plates are respectively arranged on one side of the two limiting rods facing each other. One side of the two positioning plates facing each other is respectively adapted to abut against two side walls of the probe card in the length direction.

[0009] Further, a slide rail extending in the length direction is provided on the top of the base, and a slider is provided at the bottom of the limiting rod. The slider is movably received in the slide rail.

[0010] Further, the second positioning mechanism includes: a rotating plate. There are multiple rotating plates, and the multiple rotating plates are respectively rotatably connected to the base. One side of the rotating plate facing the base is configured as an abutting surface, and the rotating plate can selectively rotate to make the abutting surface abut against the top surface of the probe card.

[0011] Further, an installation space is provided in the base, and a movable hole communicating with the installation space is provided on the top of the base. At least part of the grinding table is received in the movable hole, and the grinding table can selectively move in the length direction, width direction, and / or height direction; wherein the grinding table moves in the length direction and / or width direction to grind the probes of the probe card.

[0012] Further, the length of the grinding table is s, satisfying: s = 310 mm, and the width of the grinding table is w, satisfying: w = 310 mm; wherein the movable distance of the grinding table in the length direction is L1, satisfying: L1 ≤ 15 mm, and the movable distance of the grinding table in the width direction is L2, satisfying: L2 ≤ 15 mm.

[0013] Further, it further includes: a detection device. The detection device is movably connected to the base, and the detection device is adapted to detect the distance between the top surface of the grinding table and the probe card.

[0014] Other advantages, objectives, and features of the present utility model will be described in the subsequent specification, and to some extent, they are obvious to those skilled in the art, or those skilled in the art can obtain teachings from the practice of the present utility model. The objectives and other advantages of the present utility model can be achieved and obtained through the following specification. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to make the objectives, technical solutions, and beneficial effects of the present utility model clearer, the present utility model provides the following drawings for illustration:

[0016] Figure 1 It is a schematic structural diagram of the grinding table assembly of the present utility model;

[0017] Figure 2 It is a schematic diagram of the cooperation between the grinding table and the base of the present utility model;

[0018] Figure 3 It is a schematic diagram of the detection device of the present utility model.

[0019] The labels in the drawings are as follows:

[0020] 1. Grinding table assembly;

[0021] 10. Base; 11. Slide rail; 12. Movable hole;

[0022] 21. Limit rod; 31. Rotating plate;

[0023] 40. Grinding table;

[0024] 50. Detection device; 51. Bottom plate; 52. First connecting plate; 53. Second connecting plate; 54. Third connecting plate; 55. CCD sensor. Detailed implementation manners

[0025] To make the objectives, technical solutions and advantages of the present utility model clearer and more understandable, the present utility model will be further described in detail below in conjunction with the embodiments and the drawings. The illustrative embodiments and descriptions thereof of the present utility model are only used to explain the present utility model and are not intended to limit the present utility model.

[0026] In the following description, a large number of specific details are set forth in order to provide a thorough understanding of the present utility model. However, it will be apparent to those of ordinary skill in the art that: It is not necessary to employ these specific details to practice the present utility model. In other instances, well-known structures, circuits, materials or methods have not been specifically described in order to avoid obscuring the present utility model.

[0027] Throughout the specification, the reference to "one embodiment", "embodiment", "one example" or "example" means that the specific features, structures or characteristics described in connection with that embodiment or example are included in at least one embodiment of the present utility model. Thus, the phrases "one embodiment", "embodiment", "one example" or "example" appearing throughout the specification do not necessarily all refer to the same embodiment or example. Additionally, the specific features, structures or characteristics may be combined in any suitable combination and / or sub-combination in one or more embodiments or examples. Further, those of ordinary skill in the art should understand that the diagrams provided herein are for illustrative purposes only and are not necessarily drawn to scale. The term "and / or" used herein includes any and all combinations of one or more of the associated listed items.

[0028] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "front", "rear", "left", "right", "upper", "lower", "vertical", "horizontal", "high", "low", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the protection scope of the present utility model.

[0029] Embodiment 1:

[0030] As Figures 1-3 shown, the present utility model provides a large-format probe card grinding table assembly 1, including: a base 10, a first positioning mechanism, a second positioning mechanism, and a grinding table 40. The first positioning mechanism is movably arranged on the top of the base 10. The first positioning mechanism is adapted to drive the probe card to move in the length direction and fix the probe card when the probe card moves to a preset position. The second positioning mechanism is rotatably arranged on the top of the base 10. The second positioning mechanism rotates to selectively abut against the top of the probe card. The grinding table 40 is movably arranged on the top of the base 10. The grinding table 40 moves to grind the probe card.

[0031] It should be noted that the grinding table assembly 1 of the present application is adapted to grind the probes on a large-size format probe card. The large-size format probe card can detect a wafer at one time. The large-size format probe card detects the wafer at one time to improve the detection efficiency of the wafer, thereby improving the production efficiency of the wafer.

[0032] In some embodiments, the base 10 is the basic structure of the entire grinding table assembly 1, which is used to support all other components and maintain the stability of the system. The first positioning mechanism is movably arranged on the top of the base 10. The first positioning mechanism can move relative to the base 10 and drive the probe card to move in the length direction. That is, through the action of the first positioning mechanism, the probe card can be moved along its length direction to a predetermined position. And when the probe card reaches the correct position, the first positioning mechanism can lock the probe card to prevent the probe card from moving during the grinding process.

[0033] The second positioning mechanism is rotatably arranged on the top of the base 10. The second positioning mechanism can contact the top of the probe card through a rotational movement to further limit the movement of the probe card (limit the movement of the probe card in the height direction), increase the fixing stability of the probe card. The grinding table 40 is movably arranged on the top of the base 10. By moving the grinding table 40, different areas of the probe card can be ground to make the probe card reach the required flatness and precision.

[0034] It can be understood that by using the first positioning mechanism and the second positioning mechanism in combination, the probe card can be accurately positioned at the required position, ensuring the accuracy of the grinding operation. The first positioning mechanism fixes the probe card in the length direction, while the second positioning mechanism provides a pressing force from the top, which can prevent the probe card from shifting due to external forces during the grinding process.

[0035] Through the precise and stable positioning mechanism, the adjustment time of the probe card during the grinding process is reduced, and the production efficiency of the probe card is improved. At the same time, the accurate positioning and stable fixing mechanism contribute to improving the grinding quality, ensuring that the contact points of the probe card reach the required flatness and accuracy, thus guaranteeing the quality of the final product.

[0036] According to the large-format probe card grinding table assembly 1 of the present utility model, its first positioning mechanism moves to drive the probe card to move in the length direction, and fixes the probe card when the probe card moves to a preset position, and its second positioning mechanism rotates to cooperate with the top of the probe card to fix the probe card in the height direction. Thus, through the above settings, the probe card is stably fixed during the grinding process, avoiding the probe card from shifting due to external forces during the grinding process, improving the grinding quality of the probe card, and ensuring the flatness and accuracy of the probe card.

[0037] Embodiment 2:

[0038] Based on Embodiment 1, the first positioning mechanism of this embodiment includes: limiting rods 21. There are two limiting rods 21, and the two limiting rods 21 are respectively movably connected to the base 10, and the two limiting rods 21 can selectively move relative to the base 10 in the length direction.

[0039] In some embodiments, there are two limiting rods 21. The two limiting rods 21 are respectively movably connected to the base 10, and the two limiting rods 21 can move in the length direction of the probe card to adapt to probe cards of different sizes and fix the probe card at an appropriate position.

[0040] It can be understood that when the probe card to be ground is placed on the base 10, the two limiting rods 21 can move along the length direction of the probe card manually or automatically until the two limiting rods 21 respectively contact the two ends of the probe card, thereby ensuring the correct position of the probe card in the length direction.

[0041] By respectively adjusting the positions of the two limiting rods 21 to fix the probe card to the preset position, when the probe card is placed at the preset position, the limiting rods 21 can be locked in this position, thereby realizing the position fixing of the probe card in the length direction to prevent the probe card from moving during the grinding process. At the same time, due to the moving ability of the limiting rods 21, the grinding table assembly 1 can adapt to probe cards of different sizes, increasing the versatility of the grinding table assembly 1.

[0042] Thus, the use of the limit rod 21 ensures the precise position positioning of the probe card in the length direction, and the fixing function of the limit rod 21 provides the stability of the probe card during the grinding process, preventing unnecessary movement, thereby ensuring the grinding quality of the probe card.

[0043] According to some embodiments of the present invention, the first positioning mechanism further includes: positioning plates, there are two positioning plates, and the two positioning plates are respectively arranged on one side of the two limit rods 21 facing each other, and one side of the two positioning plates facing each other is respectively adapted to abut against the two side walls of the probe card in the length direction.

[0044] In some embodiments, the two positioning plates are respectively arranged on one side of the two limit rods 21 facing each other, and the two positioning plates can be in contact with the two side walls of the probe card in the length direction to ensure the precise position of the probe card in the length direction. When the probe card is placed on the base 10, the two positioning plates can be in contact with the two side walls of the probe card through the moving ability of the limit rod 21 to ensure the correct position of the probe card in the length direction.

[0045] It can be understood that the contact between the positioning plate and the side wall of the probe card provides additional positioning accuracy, ensuring the precise position of the probe card in the length direction, and the positioning plate and the limit rod 21 act together, which can not only fix the position of the probe card, but also reduce the vibration and movement of the probe card during the grinding process, improving the stability and accuracy of the probe card grinding. At the same time, the design of the positioning plate enables the grinding table assembly 1 to adapt to probe cards of different sizes, increasing the flexibility and application range of the grinding table assembly 1.

[0046] According to some embodiments of the present invention, a slide rail 11 extending in the length direction is provided on the top of the base 10, and a slider is provided at the bottom of the limit rod 21, and the slider is movably received in the slide rail 11. It can be understood that the inner peripheral wall of the slide rail 11 can restrict the outer peripheral wall of the slider, so that the slider can stably move along the extension direction of the slide rail 11, and further the limit rod 21 can stably move along the length direction.

[0047] Thus, the design of the slide rail 11 and the slider ensures the smoothness of the limit rod 21 during the movement, avoiding the jamming or uneven movement of the limit rod 21, improving the positioning accuracy, and the position of the limit rod 21 can be accurately adjusted through the slide rail 11 and the slider, thereby ensuring the precise position of the probe card in the length direction. At the same time, the cooperation of the slide rail 11 and the slider makes the limit rod 21 more stable when fixing the probe card, reducing the risk of movement of the probe card during the grinding process.

[0048] Embodiment Three:

[0049] Based on Embodiment 1, in this embodiment, the second positioning mechanism includes: a rotating plate 31. A plurality of rotating plates 31 are configured, and the plurality of rotating plates 31 are respectively rotatably connected to the base 10. One side of the rotating plate 31 facing the base 10 is configured as a stopping surface, and the rotating plate 31 can be selectively rotated to make the stopping surface abut against the top surface of the probe card.

[0050] In some embodiments, the second positioning mechanism is composed of a plurality of rotating plates 31. The plurality of rotating plates 31 are respectively rotatably connected to the base 10. One side of each rotating plate 31 facing the base 10 is configured as a stopping surface, and the stopping surface can contact the top surface of the probe card.

[0051] It can be understood that each rotating plate 31 is rotatably connected to the base 10, and the rotating plate 31 can be rotated manually or automatically to make the stopping surface contact the top surface of the probe card. When the rotating plate 31 rotates in place, the stopping surface will contact the top surface of the probe card, thereby providing a fixing effect on the probe card in the height direction and preventing the probe card from moving in the height direction during the grinding process.

[0052] Thus, through the abutting effect of the second positioning mechanism, the stability of the probe card in the height direction is enhanced, ensuring that the probe card does not move unnecessarily during the grinding process. The design of the plurality of rotating plates 31 allows the device to be appropriately adjusted according to the thickness and shape of different probe cards, increasing the flexibility of the grinding table assembly 1. At the same time, the contact between the stopping surface and the top surface of the probe card provides additional fixing points, which helps to achieve precise fixing of the probe card, thereby improving the grinding quality and efficiency of the probe card.

[0053] Embodiment 4:

[0054] Based on Embodiment 1, in this embodiment, an installation space is provided inside the base 10, and a movable hole 12 communicating with the installation space is provided at the top of the base 10. At least part of the grinding table 40 is received in the movable hole 12, and the grinding table 40 can be selectively moved in the length direction, width direction, and / or height direction; wherein the grinding table 40 moves in the length direction and / or width direction to grind the probes of the probe card.

[0055] In some embodiments, the base 10 includes a top plate and a surrounding plate. The surrounding plate is disposed around at least part of the outer periphery of the top plate. The top plate and the surrounding plate jointly define the installation space. A movable hole 12 penetrating in the height direction is provided on the top plate, and the movable hole 12 is communicated with the installation space.

[0056] It can be understood that when grinding the probe card, first align the part of the probe card to be ground with the grinding table 40. At this time, the grinding table 40 moves in the length direction and / or width direction to grind the probe card. It should be noted that the grinding table 40 moves in the height direction to adjust the grinding intensity of the probe card.

[0057] Thus, the multi-directional movement ability of the grinding table 40 enables the device to adapt to probe cards of various sizes, increasing the flexibility of the grinding table assembly 1. Moreover, through precise movement in the length and width directions, high-precision grinding of the probes can be achieved, ensuring the performance of the probe card.

[0058] In some embodiments, a first motor, a second motor, a third motor, a first moving plate, a second moving plate, and a third moving plate are further provided in the installation space. The first motor is configured as a reciprocating motor, and the output end of the first motor is connected to the first moving plate. When the first motor operates, it can drive the first moving plate to move in the height direction. A second motor is provided on the first moving plate, and the second moving plate is movably provided on the first moving plate. When the second motor operates, it can drive the second moving plate to reciprocate in the length direction. A third motor is provided on the second moving plate, and the third moving plate is movably provided on the second moving plate. When the third motor operates, it can drive the third moving plate to reciprocate in the width direction. The grinding table 40 is provided on the top of the third moving plate.

[0059] According to some embodiments of the present invention, the length of the grinding table 40 is s, satisfying: s = 310 mm, and the width of the grinding table 40 is w, satisfying: w = 310 mm; wherein the movable distance of the grinding table 40 in the length direction is L1, satisfying: L1 ≤ 15 mm, and the movable distance of the grinding table 40 in the width direction is L2, satisfying: L2 ≤ 15 mm.

[0060] In some embodiments, the length of the grinding table 40 is 310 mm, and the width of the grinding table 40 is also 310 mm. Thus, through the above settings, the size of the grinding table 40 can be made larger than that of the traditional probe card grinding table, avoiding multi-region grinding of the probe card, reducing the regional grinding error existing in multi-region grinding, and thereby improving the precision of grinding the probe card.

[0061] It can be understood that the grinding table 40 moves in the length direction and / or the width direction to grind the probe card, and the smaller the moving distance of the grinding table 40 during grinding, the better the grinding effect of the grinding table 40. Thus, by setting the maximum movable distance of the grinding table 40 in the length direction to 15 mm and the maximum movable distance of the grinding table 40 in the width direction to 15 mm as well, the grinding effect of the grinding table 40 on the probe card is better, and the precision of grinding the probe card is improved.

[0062] According to some embodiments of the present invention, the grinding table assembly 1 further includes: a detection device 50, which is movably connected to the base 10, and the detection device 50 is adapted to detect the distance between the top surface of the grinding table 40 and the probe card.

[0063] It can be understood that the detection device 50 moves to an appropriate position to accurately measure the distance between the top surface of the grinding table 40 and the probe card. During the grinding process, the detection device 50 can monitor the change in the distance between the grinding table 40 and the probe card in real time to ensure precision control during the grinding process. At the same time, based on the detected distance information, the operator or the automated control system can adjust the position of the grinding table 40 or other grinding parameters to ensure that the desired grinding effect is achieved on the probe card.

[0064] Thus, by monitoring the distance between the grinding table 40 and the probe card in real time, high precision during the grinding process can be ensured. The use of the detection device 50 helps to maintain consistency during the grinding process, ensuring that the same quality standard can be achieved for each grinding. At the same time, the accurate measurement of the distance helps with quality control to ensure that the ground probe card meets the specification requirements. Of course, through automated monitoring and adjustment, the time of manual intervention can be reduced, and the production efficiency of the probe card can be improved.

[0065] In some embodiments, the detection device 50 includes: a bottom plate 51, a first connecting plate 52, a second connecting plate 53, a third connecting plate 54, and a CCD sensor 55. The bottom plate 51 is fixedly connected to the base 10. The first connecting plate 52 is movably connected to the bottom plate 51, and the first connecting plate 52 can selectively move relative to the bottom plate 51 in the length direction. The second connecting plate 53 is movably connected to the first connecting plate 52, and the second connecting plate 53 can selectively move relative to the first connecting plate 52 in the width direction. The third connecting plate 54 is movably connected to the second connecting plate 53, and the third connecting plate 54 can selectively move relative to the second connecting plate 53 in the height direction. The CCD sensor 55 is fixedly connected to the third connecting plate 54. It should be noted that the CCD sensor 55 can convert the optical signal into an electrical signal, that is, the CCD sensor 55 can detect the distance between the top surface of the grinding table 40 and the probe card.

[0066] Finally, it should be noted that the above preferred embodiments are only used to illustrate the technical solutions of the present invention and are not restrictive. Although the present invention has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made in form and details without departing from the scope defined by the claims of the present invention.

Claims

1. A large-format probe card grinding table assembly, characterized in that Comprising: A base (10); A first positioning mechanism, which is movably arranged on the top of the base (10), and is adapted to drive the probe card to move in the length direction and fix the probe card when the probe card moves to a preset position; A second positioning mechanism, which is rotatably arranged on the top of the base (10), and the second positioning mechanism rotates to selectively abut against the top of the probe card; A grinding table (40), which is movably arranged on the top of the base (10), and the grinding table (40) moves to grind the probe card.

2. The large-format probe card grinding table assembly according to claim 1, characterized in that The first positioning mechanism includes: Limit rods (21), there are two limit rods (21), the two limit rods (21) are respectively movably connected to the base (10), and the two limit rods (21) can selectively move relative to the base (10) in the length direction.

3. The large-format probe card grinding table assembly according to claim 2, wherein, The first positioning mechanism further includes: Positioning plates, there are two positioning plates, the two positioning plates are respectively arranged on the sides of the two limit rods (21) facing each other, and the sides of the two positioning plates facing each other are respectively adapted to abut against the two side walls of the probe card in the length direction.

4. The large-format probe card grinding table assembly according to claim 2, wherein, A slide rail (11) extending in the length direction is arranged on the top of the base (10), and a slider is arranged at the bottom of the limit rod (21), and the slider is movably received in the slide rail (11).

5. The large-format probe card grinding table assembly according to claim 1, characterized in that, The second positioning mechanism includes: Rotating plates (31), there are multiple rotating plates (31), the multiple rotating plates (31) are respectively rotatably connected to the base (10), the side of the rotating plate (31) facing the base (10) is configured as an abutting surface, and the rotating plate (31) can selectively rotate to make the abutting surface abut against the top surface of the probe card.

6. The large-format probe card grinding table assembly according to claim 1, wherein, An installation space is arranged in the base (10), a movable hole (12) communicating with the installation space is arranged on the top of the base (10), at least part of the grinding table (40) is received in the movable hole (12), and the grinding table (40) can selectively move in the length direction, width direction and / or height direction; wherein The grinding table (40) moves in the length direction and / or width direction to grind the probes of the probe card.

7. The large-format probe card grinding table assembly according to claim 6, wherein, The length of the grinding table (40) is s, satisfying: s = 310 mm, and the width of the grinding table (40) is w, satisfying: w = 310 mm; Wherein The movable distance of the grinding table (40) in the length direction is L1, satisfying: L1 ≤ 15 mm, and the movable distance of the grinding table (40) in the width direction is L2, satisfying: L2 ≤ 15 mm.

8. The large-format probe card grinding table assembly according to claim 6, wherein, Further comprising: A detection device (50), which is movably connected to the base (10), and the detection device (50) is adapted to detect the distance between the top surface of the grinding table (40) and the probe card.

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