Online monitoring and protecting device for real-time movement of magnetron and magnetron sputtering equipment

Abstract

The utility model discloses a magnetron real-time motion on-line monitoring and protecting device and magnetron sputtering equipment. The magnetron real-time motion on-line monitoring and protecting device comprises a magnetron cavity, a magnetron shell, a magnetron shell and a control circuit, the magnetron is located in the magnetron cavity, and a laser reflection part is installed on the magnetron; the driving assembly is connected with the magnetron and used for driving the magnetron to move in the first direction; and the laser distance measuring device comprises a laser distance measuring device, and the laser distance measuring device is used for emitting laser to the laser reflecting part and receiving the laser reflected by the laser reflecting part so as to obtain distance information from the magnetron to the laser distance measuring device. According to the utility model, the motion state of the magnetron can be detected in real time when the motor operates normally, and whether the magnetron moves or not is determined, so that whether a fault occurs or not can be judged more directly, and the loss of process waste chips caused by the fact that an alarm is not given in time due to damage and failure of a coupler can be avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum thin film deposition, and particularly relates to a real-time motion on-line monitoring and protection device for a magnetron and a magnetron sputtering device. Background Art

[0002] The magnetron sputtering process is a common physical vapor deposition process. The magnetron sputtering process is often used for thin film deposition on semiconductor devices and electronic devices. The basic principle of magnetron sputtering thin film deposition is that argon gas is ionized in a thin film deposition chamber to form a plasma. Argon ions in the plasma fly towards a target under the action of an electric field and sputter atoms of the target. The sputtered target atoms will be deposited on a substrate to form a thin film. The confinement of magnetic fields on charged particles can increase the plasma density near the surface of the target, thereby increasing the sputtering rate of the target. In a planar target magnetron sputtering device, the magnetron is often driven to move axially back and forth by a motion mechanism on at least one axis. The rotation of a motor is transmitted to the rotation of a lead screw through a coupling, and a lead screw nut drives the magnetron to move axially. When the coupling or other transmission structures (such as key transmission) fail, although the motor is rotating (the encoder of the motor detects the rotation of the motor, but the system detects the information of the encoder, so the system considers it normal), the lead screw loses the transmission structure. At this time, the magnetron will lose its movement in this direction, resulting in non-uniformity of the thin film deposited on the process wafer and damage to the target (the target is not etched comprehensively, resulting in serious etching in some areas). Therefore, there is an urgent need for a device that can monitor the movement of the magnetron in real time to ensure timely alarm in case of a failure. Summary of the Utility Model

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. For this purpose, the utility model provides a real-time motion on-line monitoring and protection device for a magnetron, which can detect the motion state of the magnetron in real time.

[0004] The utility model also provides a magnetron sputtering device with the above real-time motion on-line monitoring and protection device for a magnetron.

[0005] According to a first aspect embodiment of the utility model, the real-time motion on-line monitoring and protection device for a magnetron includes:

[0006] A magnetron cavity;

[0007] A magnetron, located inside the magnetron cavity, and a laser reflection part is installed on the magnetron;

[0008] A driving component, connected to the magnetron, for driving the magnetron to move in a first direction;

[0009] The laser distance measuring device includes a laser rangefinder which is used to emit laser light towards the laser reflection part and receive the laser light reflected by the laser reflection part, so as to obtain the distance information from the magnetron to the laser rangefinder.

[0010] The magnetron real-time motion on-line monitoring and protection device according to the embodiment of the present invention has at least the following beneficial effects:

[0011] By adopting the above structural arrangement, it is possible to detect the motion state of the magnetron during the normal operation of the motor in real time, determine whether the magnetron is moving, so as to more directly judge whether a fault occurs, and avoid the loss of process waste caused by the failure of the coupling without timely alarm.

[0012] According to some embodiments of the present invention, the laser emission direction of the laser rangefinder is the first direction.

[0013] According to some embodiments of the present invention, the laser reflection part is formed with a reflection surface which is perpendicular to the first direction, and the reflection surface is used to reflect the laser light emitted by the laser rangefinder.

[0014] According to some embodiments of the present invention, the laser reflection part is installed on the magnetron in a position-adjustable manner along the second direction, and the second direction is perpendicular to the first direction.

[0015] According to some embodiments of the present invention, the laser reflection part is provided with a waist-shaped groove, the length direction of the waist-shaped groove is the second direction, the magnetron is provided with a threaded hole corresponding to the waist-shaped groove, and a fixing screw is passed through the waist-shaped groove and the threaded hole to fix the laser reflection part to the magnetron.

[0016] According to some embodiments of the present invention, the laser rangefinder is installed outside the magnetron cavity, the side wall of the magnetron cavity is provided with a through hole for the laser to pass through, and a sealing structure is provided between the laser rangefinder and the through hole.

[0017] According to some embodiments of the present invention, the sealing structure includes a sealing ring and a light-transmitting part. The sealing ring and the light-transmitting part are arranged in sequence along the direction away from the magnetron cavity and outwards. The sealing ring is clamped between the outer surface of the magnetron cavity and the light-transmitting part, and the light-transmitting part is configured to allow the laser to pass through.

[0018] According to some embodiments of the utility model, a mounting portion is detachably connected to the outside of the magnetron cavity, the mounting portion is used to install the laser rangefinder, the mounting portion is provided with a mounting hole, the mounting hole is used to accommodate the sealing ring and the light-transmitting portion, the inner wall of the mounting hole is provided with a flange, the flange abuts against one end of the light-transmitting portion facing away from the sealing ring.

[0019] According to some embodiments of the present invention, the light-transmitting portion is made of quartz glass.

[0020] The magnetron sputtering equipment according to the second embodiment of the utility model includes the magnetron real-time motion online monitoring and protection device of the first embodiment.

[0021] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0023] Figure 1 It is a structural schematic diagram of a magnetron real-time motion online monitoring and protection device according to an embodiment of the utility model;

[0024] Figure 2 yes Figure 1 The enlarged schematic diagram at A in the middle;

[0025] Figure 3 It is a schematic diagram of the installation structure of the laser reflection part of an embodiment of the utility model.

[0026] Figure Number:

[0027] The magnetron cavity 100, the through hole 101, the sealing ring 110, the light-transmitting portion 120, the mounting portion 130, the mounting hole 131, and the flange 132;

[0028] Magnetron 200, threaded hole 201, magnet 202, magnet mounting plate 203, laser reflection part 210, reflection surface 211, waist groove 212, fixing screw 220;

[0029] Driving assembly 300, motor 310, coupling 320, screw 330, screw nut 340, guide rail 350;

[0030] Laser rangefinder 400. DETAILED DESCRIPTION

[0031] Embodiments of the present utility model will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation of the present utility model.

[0032] In the description of the present utility model, it should be understood that with regard to the orientation description, such as up, down, etc., the orientation or positional relationship indicated is based on the orientation or positional relationship shown in the accompanying drawings. This is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of the present utility model.

[0033] In the description of the present utility model, "a plurality" refers to more than two. If there is a description of the first and the second, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or the sequence relationship of the indicated technical features.

[0034] In the description of the present utility model, unless otherwise clearly defined, words such as "set", "installed", "connected", etc. should be understood in a broad sense. Those skilled in the art can reasonably determine the specific meanings of the above words in the present utility model in combination with the specific content of the technical solution.

[0035] In a planar target magnetron sputtering system, the magnetron makes an axial reciprocating motion driven by a motion mechanism on at least one axis. The rotation of the motor is transmitted to the rotation of the lead screw through a coupling, and the lead screw nut drives the magnetron to make an axial motion. When the coupling or other transmission structures (such as key transmission) fail, although the motor is rotating (the encoder of the motor detects the rotation of the motor, but the system detects the information of the encoder, so the system considers it normal and will not determine a fault), the lead screw loses the transmission structure. At this time, the magnetron will lose the motion in this direction, resulting in non-uniform deposition of the thin film on the process wafer and damage to the target (the target is not etched comprehensively, resulting in serious etching in some areas).

[0036] For this reason, the present utility model proposes a real-time motion on-line monitoring and protection device for a magnetron and a magnetron sputtering device, which can effectively improve the above problems.

[0037] The following refers to Figures 1 to 3 , and describes a real-time motion on-line monitoring and protection device for a magnetron and a magnetron sputtering device according to an embodiment of the present utility model.

[0038] For example, the real-time motion on-line monitoring and protection device for a magnetron according to an embodiment of the first aspect of the present utility model includes: a magnetron cavity 100, a magnetron 200, a driving assembly 300, and a laser ranging device.

[0039] The magnetron 200 is located inside the magnetron cavity 100, and a laser reflection part 210 is installed on the magnetron 200. The laser reflection part 210 is configured to be able to reflect laser light.

[0040] The driving assembly 300 is connected to the magnetron 200. The driving assembly 300 is used to drive the magnetron 200 to move in the first direction. Specifically, the driving assembly 300 includes a motor 310, a coupling 320, a lead screw 330, a lead screw nut 340, and a guide rail 350. Among them, the lead screw 330 and the guide rail 350 are both distributed in the first direction. The motor 310 is connected to the lead screw 330 through the coupling 320. The magnetron 200 is fixedly connected to the lead screw nut 340, and the magnetron 200 is slidably engaged with the guide rail 350. In this way, by driving the lead screw 330 to rotate by the motor 310, the magnetron 200 is driven to move in the first direction.

[0041] The laser ranging device includes a laser rangefinder 400. The laser rangefinder 400 is used to emit laser light to the laser reflection part 210 and receive the laser light reflected by the laser reflection part 210 to obtain the distance information from the magnetron 200 to the laser rangefinder 400. Whether the magnetron 200 is moving can be judged according to whether the distance from the magnetron 200 to the laser rangefinder 400 changes. Obviously, if the magnetron 200 is in motion, the distance from the magnetron 200 detected by the laser rangefinder 400 to the laser rangefinder 400 will change in real time. When the magnetron 200 stops moving due to the damage and failure of the coupling 320 or other transmission structures while the motor 310 is operating normally, the distance from the magnetron 200 detected by the laser rangefinder 400 to the laser rangefinder 400 will remain unchanged, and a fault can be determined at this time. The on-line monitoring and protection device for the real-time movement of the magnetron with the above structural arrangement can detect the movement state of the magnetron 200 in real time when the motor 310 is operating normally, determine whether the magnetron 200 is moving, so as to more directly judge whether a fault occurs, and can avoid the loss of process waste caused by the failure of the coupling 320 not being reported in time.

[0042] Refer to Figures 1 to 3As shown, in some embodiments of the present utility model, the laser emission direction of the laser rangefinder 400 is the first direction, that is, the laser emission direction of the laser rangefinder 400 is the same as the movement direction of the magnetron 200. Obviously, when the magnetron 200 moves in the first direction, the laser reflection part 210 will move along the first direction together with the magnetron 200. Therefore, the laser emission direction of the laser rangefinder 400 is set to the first direction, so as to ensure that when the magnetron 200 moves, the laser emitted by the laser rangefinder 400 can shine on the laser reflection part 210. Further, the laser reflection part 210 is formed with a reflection surface 211, and the reflection surface 211 is perpendicular to the first direction, that is, the normal direction of the reflection surface 211 is the first direction. The reflection surface 211 is used to reflect the laser emitted by the laser rangefinder 400. Since the reflection surface 211 is perpendicular to the first direction, the reflection surface 211 can reflect the laser back along the first direction and be received by the laser rangefinder 400. It can be imagined that the laser reflection part 210 can be made of a metal material. Among them, the reflection surface 211 is smoothed. Metal is a good laser reflection material. Especially when the metal surface is flat and smooth, it usually has a high reflectivity and is effective for visible light and near-infrared lasers.

[0043] Refer to Figure 1 and Figure 3As shown, in some embodiments of the present utility model, the laser reflection part 210 is mounted on the magnetron 200 in a position-adjustable manner along the second direction, and the second direction is perpendicular to the first direction. In this embodiment, both the first direction and the second direction are horizontal directions. It can be understood that by enabling the laser reflection part 210 to be position-adjustable along the second direction, the laser reflection part 210 has an adjustable space. When the size of the laser reflection part 210 is made relatively small, it can ensure that the laser emitted by the laser rangefinder 400 irradiates on the laser reflection part 210. In some specific embodiments, the laser reflection part 210 is provided with a waist-shaped groove 212, the length direction of the waist-shaped groove 212 is the second direction, and the magnetron 200 is correspondingly provided with a threaded hole 201 for the waist-shaped groove 212. A fixing screw 220 is passed through the waist-shaped groove 212 and the threaded hole 201 to fix the laser reflection part 210 to the magnetron 200. In this way, when it is necessary to adjust the position of the laser reflection part 210 along the second direction, the fixing screw 220 can be loosened first, then the laser reflection part 210 is moved to the corresponding position, and finally the fixing screw 220 is tightened again. The adjustment operation is very convenient; and with the above structural arrangement, it is also convenient to disassemble and assemble the laser reflection part 210. It can be imagined that in order to ensure that the reflection surface 211 is always perpendicular to the first direction and does not deflect, in this embodiment, two waist-shaped grooves 212 are provided at intervals along the first direction, and both of the two waist-shaped grooves 212 are correspondingly provided with threaded holes 201 and fixing screws 220. In addition, in order to save materials and facilitate processing and manufacturing, the laser reflection part 210 is arranged in a plate-like structure, and the magnetron 200 includes a magnet 202 and a magnet mounting plate 203. The laser reflection part 210 is arranged in an L shape and mounted on the magnet mounting plate 203.

[0044] Referring to Figure 1 and Figure 2 As shown, in some embodiments of the present utility model, the laser rangefinder 400 is mounted on the outside of the magnetron cavity 100, that is, an external laser rangefinder 400. In this way, it is convenient to disassemble, assemble and maintain the laser rangefinder 400; a through hole 101 is provided on the side wall of the magnetron cavity 100, and the through hole 101 is used for the laser emitted by the laser rangefinder 400 and the laser reflected by the laser reflection part 210 to pass through. A sealing structure is provided between the laser rangefinder 400 and the through hole 101, and the sealing structure is used to seal the inside of the magnetron cavity 100 to maintain the vacuum environment inside the magnetron cavity 100.

[0045] Referring to Figure 1 and Figure 2As shown, in some embodiments of the present invention, the sealing structure includes a sealing ring 110 and a light-transmitting portion 120, the sealing ring 110 and the light-transmitting portion 120 are both located on the outer side of the through hole 101, the sealing ring 110 and the light-transmitting portion 120 are sequentially arranged in a direction away from the magnetron cavity 100 toward the outside, the sealing ring 110 is sandwiched between the outer surface of the magnetron cavity 100 and the light-transmitting portion 120, the sealing ring 110 is an annular structure, and the inner ring diameter of the sealing ring 110 is larger than the aperture of the through hole 101, the light-transmitting portion 120 is configured to cover the through hole 101 along a first direction, and the light-transmitting portion 120 can allow laser to pass through, and the laser rangefinder 400 is located on the side of the light-transmitting portion 120 away from the sealing ring 110, so that the inside and outside of the magnetron cavity 100 can be separated by the sealing ring 110 and the light-transmitting portion 120. In some specific embodiments, the material of the light-transmitting portion 120 is quartz glass. Quartz glass has a high light transmittance and a low light absorption coefficient, and has a good laser light transmission effect.

[0046] Reference Figure 1 and Figure 2 As shown, in some embodiments of the utility model, the outer side of the magnetron cavity 100 is detachably connected with a mounting portion 130, the mounting portion 130 is used to mount the laser rangefinder 400, the mounting portion 130 is provided with a mounting hole 131, the mounting hole 131 is provided with openings at both ends along the first direction, the mounting hole 131 is used to accommodate the sealing ring 110 and the light-transmitting portion 120, so as to radially limit the sealing ring 110 and the light-transmitting portion 120, the inner wall of the mounting hole 131 is provided with a flange 132, the flange 132 abuts against one end of the light-transmitting portion 120 away from the sealing ring 110, so as to axially position the sealing ring 110 and the light-transmitting portion 120, the structure is simple and the disassembly, assembly and replacement of the sealing ring 110 and the light-transmitting portion 120 are convenient. It can be imagined that the mounting portion 130 can be fixed to the outer wall of the magnetron cavity 100 by screws.

[0047] The magnetron sputtering equipment of the second embodiment of the utility model includes the magnetron real-time motion online monitoring and protection device of the first embodiment. By adopting the above-mentioned magnetron real-time motion online monitoring and protection device, the movement state of the magnetron 200 when the motor is running normally can be detected in real time to determine whether the magnetron 200 is moving, so as to more directly judge whether a fault occurs, and avoid the loss of process waste caused by the failure of the coupling to give an alarm in time.

[0048] It should be noted that since the magnetron sputtering equipment can adopt all the technical solutions of the magnetron real-time motion online monitoring and protection device of the above-mentioned first aspect embodiment, it at least has all the beneficial effects brought by the technical solutions of the above-mentioned first aspect embodiment. These additional beneficial effects will not be repeated here.

[0049] It can be understood that other components and operations of the magnetron sputtering device according to the embodiments of the present invention are known to those of ordinary skill in the art, and will not be described in detail herein.

[0050] In the description of this specification, the descriptions referring to terms such as "one embodiment", "some embodiments", "examples", "specific examples", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine the different embodiments or examples described in this specification.

[0051] The embodiments of the present invention have been described in detail above with reference to the drawings, but the present invention is not limited to the above embodiments. Various changes can be made without departing from the spirit of the present invention within the scope of knowledge possessed by those of ordinary skill in the art.

Claims

1. A real-time motion online monitoring and protection device for a magnetron, characterized in that, include: Magnetron cavity; A magnetron is located inside the magnetron cavity, and a laser reflection part is installed on the magnetron; A driving assembly, connected to the magnetron, and used to drive the magnetron to move along a first direction; The laser distance measuring device comprises a laser distance measuring device, wherein the laser distance measuring device is used for emitting laser light to the laser reflecting part and receiving the laser light reflected by the laser reflecting part to obtain the distance information from the magnetron to the laser distance measuring device.

2. The real-time motion on-line monitoring and protection device for a magnetron according to claim 1, characterized in that: The laser emitting direction of the laser rangefinder is the first direction.

3. The magnetron real-time motion on-line monitoring and protection device according to claim 2, characterized in that: The laser reflection part is formed with a reflection surface, the reflection surface is perpendicular to the first direction, and the reflection surface is used to reflect the laser emitted by the laser rangefinder.

4. The real-time motion on-line monitoring and protection device for a magnetron according to claim 3, characterized in that: The laser reflection part is installed on the magnetron so that its position can be adjusted along a second direction, and the second direction is perpendicular to the first direction.

5. The real-time motion on-line monitoring and protection device for a magnetron according to claim 4, characterized in that: The laser reflecting part is provided with a waist-shaped groove, the length direction of the waist-shaped groove is the second direction, the magnetron is provided with a threaded hole corresponding to the waist-shaped groove, and a fixing screw is passed between the waist-shaped groove and the threaded hole to fix the laser reflecting part to the magnetron.

6. The real-time motion on-line monitoring and protection device for a magnetron according to claim 1, characterized in that: The laser rangefinder is installed on the outside of the magnetron cavity. The side wall of the magnetron cavity is provided with a through hole, and the through hole is used for laser to pass through. A sealing structure is provided between the laser rangefinder and the through hole.

7. The real-time motion on-line monitoring and protection device for a magnetron according to claim 6, characterized in that: The sealing structure includes a sealing ring and a light-transmitting portion, wherein the sealing ring and the light-transmitting portion are sequentially arranged in a direction away from the magnetron cavity toward the outside, the sealing ring is sandwiched between the outer surface of the magnetron cavity and the light-transmitting portion, and the light-transmitting portion is configured to allow laser light to pass through.

8. The real-time motion online monitoring and protection device for a magnetron according to claim 7, characterized in that: The outer side of the magnetron cavity is detachably connected with a mounting portion, the mounting portion is used to mount the laser rangefinder, the mounting portion is provided with a mounting hole, the mounting hole is used to accommodate the sealing ring and the light-transmitting portion, the inner wall of the mounting hole is provided with a flange, the flange abuts against one end of the light-transmitting portion away from the sealing ring.

9. The real-time motion on-line monitoring and protection device for a magnetron according to claim 7, characterized in that: The material of the light-transmitting portion is quartz glass.

10. A magnetron sputtering device, characterized in that, The invention comprises the magnetron real-time motion online monitoring and protection device as claimed in any one of claims 1 to 9.

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