Weight control mechanism and evaporation device

Abstract

The utility model discloses a weight control mechanism and an evaporation device, and relates to the technical field of evaporation, the weight control mechanism provided by the utility model comprises: a lever having a first end and a second end opposite to each other, the first end of the lever being used for supporting a crucible; the supporting seat is hinged to the lever, and the hinged point of the supporting seat and the lever is located between the first end and the second end of the lever; the monitoring mechanism comprises a first microswitch and a second microswitch which are oppositely arranged up and down, the second end of the lever is located between the first microswitch and the second microswitch, and the second end of the lever is used for triggering the first microswitch or / and the second microswitch. The weight control mechanism provided by the utility model adopts a lever structure to replace a weighing sensor in the prior art to monitor and control the weight, is integrally simple, has better high-temperature resistance, is not easy to damage after long-time operation, is high in reliability, and reduces the occurrence of the problem of inaccurate measurement result.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation coating, in particular to a weight control mechanism and an evaporation coating device. Background Art

[0002] In the manufacturing process of solar cells, a technical route using an evaporation coating process (which can be methods such as thermal evaporation coating, electron beam evaporation coating, induction evaporation, etc.) is adopted. The production of solar cells has relatively high requirements for the continuity of the process. Therefore, a continuous feeding method for the crucible is required to ensure the continuity of equipment production, and during this evaporation coating process, real-time monitoring of the residual materials in the crucible is needed to control the feeding speed. Thus, it is necessary to control the weight of the crucible and the residual materials in the crucible. However, the temperature of the crucible is relatively high during the evaporation coating process, and the heat insulation performance in the prior art is insufficient, resulting in low working reliability of the sensors used in the control system.

[0003] Therefore, during the evaporation coating process, how to improve the reliability of weight control of the crucible and the residual materials in the crucible is a technical problem that those skilled in the art need to solve currently. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a weight control mechanism and an evaporation coating device. The weight control mechanism provided by the utility model is used to improve the reliability of weight control of the crucible and the residual materials in the crucible.

[0005] To achieve the above purpose, the utility model provides the following technical solutions:

[0006] A weight control mechanism, comprising:

[0007] A lever, the lever has opposite first and second ends, and the first end of the lever is used to support the crucible;

[0008] A support seat, the support seat is hinged to the lever, and the hinge point of the support seat and the lever is located between the first end and the second end of the lever;

[0009] A monitoring mechanism, including a first microswitch and a second microswitch arranged oppositely up and down. The second end of the lever is located between the first microswitch and the second microswitch, and the second end of the lever is used to trigger the first microswitch or trigger the second microswitch.

[0010] Under the above technical solution, during the evaporation deposition process, as the material in the crucible continuously evaporates, the weight of the material in the crucible gradually decreases. When the weight of the material in the crucible is lower than the first preset value, the torque balance between the first end and the second end of the lever is broken, and the second end of the lever between the first microswitch and the second microswitch rotates around the hinge point until it touches the first microswitch. Then, the monitoring mechanism adds material to the crucible. As the material is continuously added, when the weight of the material in the crucible reaches the second preset value, the torque of the first end of the lever is greater than that of the second end, which pushes the second end of the lever to move until it touches the second microswitch, thereby triggering the monitoring mechanism again. At this time, the monitoring mechanism outputs a signal again to prompt to stop adding material to the crucible. The weight control mechanism provided by the present utility model replaces the direct weighing detection and control of weight using a weighing sensor in the prior art with a mechanical structure of a lever. Therefore, the weight control mechanism provided by the present utility model is overall simple, and the lever mechanism of the mechanical structure has better high-temperature resistance performance. Compared with the existing weighing sensor, it can operate for a long time without damage in a high-temperature environment, has high reliability, and reduces the occurrence of inaccurate measurement results.

[0011] Optionally, in the above weight control mechanism, the monitoring mechanism is further provided with a microswitch mounting rod, the microswitch mounting rod is provided with a mounting groove, the second end of the lever extends into the mounting groove, and the first microswitch and the second microswitch are respectively arranged on the lower inner wall and the upper inner wall of the mounting groove. In this way, during the up-and-down swing of the second end of the lever in the mounting groove, it can directly touch the second microswitch and the first microswitch on the upper and lower inner walls of the mounting groove, making the triggering structure have better simplicity and improving the reliability of the operation.

[0012] Optionally, in the above weight control mechanism, it further includes a feeding mechanism, the feeding mechanism is both controlled and connected to the first microswitch and the second microswitch. When the first microswitch is triggered, the feeding mechanism replenishes the material to the crucible assembly. When the second microswitch is triggered, the feeding mechanism stops adding material to the crucible. In this way, by transmitting the corresponding signal to the feeding mechanism, and then the feeding mechanism implements adding material to the crucible or stopping adding material, not only the automation ability in the whole process is improved, but also the accuracy of whether the material is added is improved.

[0013] Optionally, in the above weight control mechanism, it further includes a counterweight, the counterweight is placed between the second end of the lever and the hinge point to adjust the torque of the second end of the lever. In this way, by setting the counterweight, the torque of the second end of the lever can be adjusted timely, so as to meet more monitoring situations of the weight of the crucible material and improve the applicability of the weight control mechanism provided in this embodiment.

[0014] Optionally, in the above weight control mechanism, the counterweight is detachably connected to the lever. In this way, the counterweight and the lever can be detachably connected by means such as bolt connection, plug connection or snap connection. When the amount of evaporated material in the crucible is different, the counterweight can be removed and adjusted or replaced in time to improve the applicability of the device.

[0015] Optionally, in the above weight control mechanism, it further includes a crucible support rod. The crucible support rod is connected to the first end of the lever. The first end of the lever supports the crucible through the crucible support rod, and the crucible support rod extends in the vertical direction. In this way, the crucible can be separated from the lever mechanism through the crucible support rod, further reducing the influence of the high temperature of the crucible on the lever mechanism and improving the reliability of the operation of the lever mechanism.

[0016] Optionally, in the above weight control mechanism, the crucible support rod is a heat-insulating rod with a split combination or integral structure. In this way, the heat of the crucible is blocked from being transferred to the lever through the heat-insulating rod, further reducing the influence of high temperature on the lever mechanism and the monitoring mechanism, and further improving the reliability and accuracy of the operation of the entire mechanism. The split combination structure of the heat-insulating rod can select rods of different heat-insulating materials, and the heat conduction coefficients of at least two heat-insulating rods are different. In this way, compared with the overall one-piece heat-insulating rod, the heat-insulating rod group formed by multiple heat-insulating rods can slow down and reduce the heat conduction. The heat-insulating rod group can select a combination of heat-insulating rods with various heat conduction coefficients, expanding the selection range of heat-insulating rod materials, which can not only meet the heat-insulating requirements, but also effectively weaken the possible influence on processing and installation for materials with a certain heat conduction coefficient.

[0017] Optionally, in the above weight control mechanism, a protective cover is further provided. The lever mechanism and the monitoring mechanism are covered in the inner cavity of the protective cover, and the protective cover is provided with a through hole. The first end of the lever is connected to the crucible through the through hole. In this way, the protective ability of the lever mechanism and the monitoring mechanism is further improved through the protective cover, reducing the adverse effects of high temperature, electromagnetic or thermal radiation on electrical components, and improving the reliability of the operation of each component.

[0018] A vapor deposition device includes a crucible and the weight control mechanism as described in any one of the above.

[0019] The vapor deposition device provided by the present utility model has all the technical effects of the above weight control mechanism due to having the above weight control mechanism, and will not be elaborated herein. Description of the Drawings

[0020] The accompanying drawings described herein are used to provide a further understanding of the present utility model and constitute a part of the present utility model. The schematic embodiments of the present utility model and their descriptions are used to explain the present utility model and shall not constitute an improper limitation to the present utility model. In the drawings:

[0021] Figure 1 is a schematic structural diagram of the weight control mechanism disclosed in the embodiment of the present utility model;

[0022] Figure 2 is a schematic structural diagram of the protective cover disclosed in the embodiment of the present utility model.

[0023] Reference numerals:

[0024] 100 is a lever; 200 is a support base; 300 is a counterweight; 400 is a crucible support rod; 500 is a microswitch mounting rod, 510 is a first microswitch, 520 is a second microswitch; 600 is a protective cover; 700 is an equipment base; 800 is a heating electron gun; 900 is a crucible. Detailed implementation manners

[0025] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0026] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0027] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, the meaning of "a plurality" is two or more unless otherwise specifically defined. The meaning of "several" is one or more unless otherwise specifically defined.

[0028] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation to the present utility model.

[0029] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be a direct connection or an indirect connection through an intermediate medium, and it may be the communication inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0030] The core of the present utility model lies in providing a weight control mechanism, which can improve the reliability of weight control of the crucible and the materials in the crucible during the evaporation process.

[0031] Another core of the present utility model lies in providing an evaporation device having the above weight control mechanism.

[0032] Such as Figure 1As shown in the figure, an embodiment of the present utility model discloses a weight control mechanism, which includes a lever mechanism and a monitoring mechanism. Among them, the lever mechanism is provided with a lever 100 and a support base 200. The crucible 900 for holding materials is connected to the first end of the lever 100, and the support base 200 is hinged to the lever 100. Moreover, the hinge point between the support base 200 and the lever 100 is located between the first end and the second end of the lever 100, so that the first end and the second end of the lever 100 can swing around the hinge point between the support base 200 and the lever 100. The monitoring mechanism is matched with the second end of the lever 100, that is, the second end of the lever 100 is located between the first microswitch and the second microswitch of the monitoring mechanism. Before the start of the evaporation coating process, the first end and the second end of the lever 100 maintain a balanced state, and the first microswitch 510 and the second microswitch 520 are not triggered. As the evaporation coating process continues, the materials in the crucible 900 are continuously consumed, and the total weight of the crucible 900 and the materials continuously decreases. When the weight of the materials in the crucible 900 is lower than the first preset value, the moment balance at both ends of the lever 100 will be broken. The moment at the second end of the lever 100 is greater than the moment at the first end of the lever 100. The second end of the lever 100 rotates and sinks around the joint point until the second end of the lever 100 touches the first microswitch. The monitoring mechanism outputs a signal to add materials to the crucible 900. As the materials in the crucible 900 are continuously added, when the weight of the materials in the crucible 900 reaches the second preset value, and the second preset value is greater than the first preset value, the first end of the lever 100 presses the second end of the lever 100 to rotate and rise around the joint point again. When it touches the second microswitch, the monitoring mechanism outputs a signal to stop adding materials. This process repeats in a cycle, so that the weight of the materials in the crucible 900 can be better controlled by the weight control mechanism provided in this embodiment. During the entire evaporation coating process, the weight of the materials in the crucible 900 can always be controlled within the preset range, enabling the crucible 900 to supply materials continuously, better controlling the feeding speed, and then ensuring the continuity of the process production, meeting the requirements of the solar cell manufacturing for the continuity of the production process rhythm.

[0033] As Figure 1As shown, the monitoring mechanism is also provided with a microswitch mounting rod 500. One end of the microswitch mounting rod 500 is fixed on the equipment base 700. The other end of the microswitch mounting rod 500 is provided with a mounting groove. A first microswitch 510 is mounted on the lower inner wall of the mounting groove, and a second microswitch 520 is correspondingly mounted on the upper inner wall of the mounting groove. Both the first microswitch 510 and the second microswitch 520 are mounted and fixed by bolt connection to facilitate the implementation of the replacement work during later maintenance. The second end of the lever 100 extends into the mounting groove and is located between the first microswitch 510 and the second microswitch 520. When the lever 100 is in a balanced state, neither the first microswitch 510 nor the second microswitch 520 touches the second end of the lever 100. When the weight of the material in the crucible 900 reaches the first preset value or the second preset value, the balance of the lever 100 is broken. Correspondingly, the second end of the lever 100 swings up and down in the mounting groove and touches the first microswitch 510 or the second microswitch 520.

[0034] Meanwhile, the weight control mechanism provided in this embodiment is also provided with a feeding mechanism. When the first microswitch 510 is triggered, the first microswitch 510 transmits an electrical signal to the feeding mechanism, and the feeding mechanism supplements the material into the crucible 900. When the second microswitch 520 is triggered, the second microswitch 520 outputs a signal to the feeding mechanism, so that the feeding mechanism stops adding material to the crucible 900. The feeding mechanism further enhances the automation ability of the weight control mechanism provided in this embodiment, and the control system is responsible for adding or stopping the material in a timely manner, improving the accuracy of controlling each link of the entire operation process.

[0035] In addition, the weight control mechanism provided in this embodiment is also provided with a counterweight 300. The counterweight 300 is placed between the second end of the lever 100 and the hinge point. The weight of the second end of the lever 100 can be adjusted by the counterweight 300. Furthermore, when different control ranges of the material in the crucible 900 are required in different production processes and different feeding rates are needed, the appropriate counterweight 300 can be placed to adjust the second end of the lever 100 in a timely manner, thus greatly improving the applicability of the weight control mechanism provided in this embodiment. In a specific embodiment, the counterweight 300 is mounted on the lever 100 by bolt connection, plug-in connection or snap connection, so that the counterweight 300 and the lever 100 are detachably connected, facilitating the timely disassembly and replacement of the counterweight 300 under different working requirements.

[0036] Such as Figure 1As shown, the lever mechanism is further provided with a crucible support rod 400, and the crucible 900 is connected to the first end of the lever 100 through the crucible support rod 400. The crucible support rod 400 extends vertically upward to keep the crucible 900 away from the lever mechanism. Therefore, during the heating of the material in the crucible 900 by the heating electron gun 800, the adverse effects of the generated high temperature on the lever mechanism can be minimized, the reliability of the mechanical structure of the lever mechanism can be improved, and the good operation of the lever mechanism can be ensured.

[0037] In another specific embodiment, the crucible support rod is a heat-insulating rod with a split-combined or integral structure. In this way, the heat of the crucible is blocked from being transferred to the lever by the heat-insulating rod, further reducing the influence of high temperature on the lever mechanism and the monitoring mechanism, and further improving the reliability and accuracy of the operation of the entire mechanism. The split-combined structure of the heat-insulating rod can select rods made of different heat-insulating materials, and at least two heat-insulating rods have different thermal conductivities. In this way, compared with the overall one-piece heat-insulating rod, the heat-insulating rod group formed by multiple heat-insulating rods can slow down and reduce the heat conduction. The heat-insulating rod group can select a combination of heat-insulating rods with various thermal conductivities, expanding the selection range of heat-insulating rod materials, which can not only meet the heat-insulating requirements, but also effectively weaken the possible influence on processing and installation for materials with a certain thermal conductivity. In some possible implementation manners, adjacent heat-insulating rods can be connected by threads, plugging, riveting, abutting, or connected by threaded connectors.

[0038] As Figure 2 shown, the weight control mechanism provided in this embodiment is further provided with a protective cover 600. The protective cover 600 covers the lever mechanism and the monitoring mechanism. The protective cover 600 not only protects the lever mechanism and the monitoring mechanism, avoiding interference of external sundries on the components, but also further reduces the adverse effects and interference of high temperature on the lever mechanism, as well as electromagnetic and radiation on the monitoring mechanism, improving the ability of the weight control mechanism provided in the embodiment to adapt to high-temperature environments and the reliability of operation. The first end of the lever 100 extends out through a through hole opened in the protective cover 600 and is connected to the crucible.

[0039] The embodiment of the present utility model also discloses an evaporation device, including a weight control mechanism. Since this evaporation device has the above-mentioned weight control mechanism, it has all the technical effects of the above-mentioned weight control mechanism, which will not be elaborated herein.

[0040] In the description of the above embodiments, specific features, structures, materials, or characteristics can be combined in a suitable manner in any one or more embodiments or examples.

[0041] The above are only specific embodiments of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model can easily think of changes or substitutions, which should all be covered within the protection scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims described above.

Claims

1. A weight control mechanism, characterized in that, Comprising: A lever having opposite first and second ends, with the first end of the lever for supporting a crucible; A support base hinged to the lever, and the hinge point between the support base and the lever being located between the first end and the second end of the lever; A monitoring mechanism including a first microswitch and a second microswitch disposed opposite to each other vertically. The second end of the lever is located between the first microswitch and the second microswitch, and the second end of the lever is used to trigger the first microswitch or the second microswitch.

2. The weight control mechanism according to claim 1, wherein, The monitoring mechanism further includes a microswitch mounting rod having a mounting groove. The second end of the lever extends into the mounting groove, and the first microswitch and the second microswitch are respectively arranged on the lower inner wall and the upper inner wall of the mounting groove.

3. The weight control mechanism according to claim 1, characterized in that, It further includes a feeding mechanism, which is controllably connected to both the first microswitch and the second microswitch. When the first microswitch is triggered, the feeding mechanism replenishes materials into the crucible; when the second microswitch is triggered, the feeding mechanism stops adding materials to the crucible.

4. The weight control mechanism according to claim 1, characterized in that, It further includes a counterweight, which is placed between the second end of the lever and the hinge point to adjust the moment of the second end of the lever.

5. The weight control mechanism according to claim 4, characterized in that, The counterweight is detachably connected to the lever.

6. The weight control mechanism according to claim 1, characterized in that, It further includes a crucible support rod connected to the first end of the lever. The first end of the lever supports the crucible through the crucible support rod, and the crucible support rod extends in the vertical direction.

7. The weight control mechanism according to claim 6, wherein The crucible support rod is a heat-insulating rod with a split combination or integral structure.

8. The weight control mechanism according to claim 1, characterized in that, A protective cover is further provided. The lever and the monitoring mechanism are covered in the inner cavity of the protective cover, and the protective cover is provided with a through hole. The first end of the lever is connected to the crucible through the through hole.

9. An evaporation device, characterized in that, Comprising a crucible and a weight control mechanism according to any one of claims 1 - 8.

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