Heating assembly and coating equipment
By designing a detachable heating assembly and a linear heating wire structure, the problem of time-consuming, labor-intensive and easy breakage replacement of traditional heating wires is solved, which improves production efficiency and service life of heating wires and reduces waste.
Patent Information
- Application Number
- CN202422462609.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-11
- Publication Date
- 2025-07-22
- Estimated Expiration
- 2034-10-11
AI Technical Summary
Replacing traditional heating wires is time-consuming and labor-intensive, affecting production efficiency, and the heating wires are prone to breaking at high temperatures, which are costly and wasteful.
A heating assembly is designed in which the frame assembly is detachably connected to the process cavity and the conductor assembly is detachably connected, allowing the heating wire to be replaced as a whole, at least two straight-line heating wires are used to replace a single serpentine heating wire, and the temperature field is adjusted through the slider and chute structure.
It reduces the difficulty and time of replacing heating wire, reduces the risk of breaking heating wire, improves production efficiency and service life of heating wire, and reduces waste.
Smart Images
Figure CN223134576U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of semiconductor or photovoltaic material processing, and particularly relates to a heating component and a coating device. Background Art
[0002] At present, the photovoltaic industry is developing rapidly. Vacuum coating equipment plays an important role in the photovoltaic industry. The coating efficiency of vacuum coating equipment is one of the key factors affecting the production efficiency of solar cells.
[0003] In related technologies, a hot wire chemical vapor deposition (CVD) device is a commonly used coating device. In a hot wire CVD device, a single long heating wire is usually wound multiple times in a cavity and bent into a snake shape and fixed in a process chamber. The two ends of the heating wire are respectively connected to the positive electrode and the negative electrode. However, with this structure, an operator needs to lean half of his body into the process chamber and use a flashlight for illumination to manually wind the heating wire. The operation is very inconvenient and it takes a long time (such as usually 4 hours) to replace the heating wire, which is time-consuming and laborious and reduces the production efficiency. Summary of the Utility Model
[0004] To solve the above technical problems, the present application is proposed. An embodiment of the present application provides a heating component and a coating device.
[0005] In a first aspect, an embodiment of the present application provides a heating component applied to a process cavity, and the process cavity has a process chamber. The heating component includes: a frame component disposed in the process chamber and detachably connected to the process cavity; a first conductor component connected to the frame component; a heating wire electrically connected to the second end of the first conductor component, and the heating wire is configured to heat the process chamber; a second conductor component connected to the frame component and spaced from the first conductor component in the vertical direction, and the second conductor component is electrically connected to the heating wire; an electrode component at least partially located in the process chamber and electrically connected to a power supply device and configured to provide electric energy, and the electrode component is detachably connected to the first conductor component and / or the second conductor component; wherein, the power supply device, the electrode component, at least one first conductor component, at least one heating wire and at least one second conductor component form a closed loop.
[0006] In some embodiments, the process chamber has a first threaded portion, and the heating assembly further includes: a fixing plate, the frame assembly is detachably connected to the fixing plate, and the fixing plate has a first pin hole; wherein, the frame assembly includes: a first connecting plate, disposed in the process chamber and connected to the first conductor assembly, the first connecting plate has a second pin hole; a pin, the pin passes through the first pin hole and the second pin hole; at least one connecting rod, disposed in the process chamber, a first end of the connecting rod is connected to the first connecting plate; a second connecting plate, disposed in the process chamber, spaced apart from the first connecting plate in the vertical direction, connected to the second conductor assembly, and the second connecting plate is connected to a second end of the connecting rod, the second connecting plate has a first through hole; a first screwing member, the first screwing member passes through the first through hole and is screwed to the first threaded portion.
[0007] In some embodiments, the frame assembly further includes: an isolation plate, disposed between the fixing plate and the electrode assembly, configured to isolate the fixing plate and the electrode assembly, and the material of the isolation plate is an insulating material.
[0008] In some embodiments, each closed loop includes at least two heating wires arranged in sequence along a first direction, the first conductor assembly and the second conductor assembly are both arranged in one-to-one correspondence with the heating wires, and the frame assembly further includes: at least two first sliders, arranged in sequence along the first direction, at least two first sliders are slidably connected to the first connecting plate, at least two first sliders can slide along the first direction, and each first slider is connected to a first conductor assembly; at least two sliding assemblies, arranged in sequence along the first direction, at least two sliding assemblies are slidably connected to the second connecting plate, at least two sliding assemblies can slide along the first direction, and each sliding assembly is connected to a second conductor assembly.
[0009] In some embodiments, the frame assembly further includes: a first chute plate, extending along the first direction and connected to the first connecting plate; a second chute plate, extending along the first direction and connected to the first connecting plate, the first chute plate, the second chute plate and the first connecting plate form a first chute, the first chute extends along the first direction, and at least two first sliders are slidably connected to the first connecting plate through the first chute; and / or, the second connecting plate has a waist-shaped hole extending along the first direction, the sliding assembly has a second threaded portion, and the frame assembly further includes: a locking member, the locking member passes through the waist-shaped hole and is screwed to the second threaded portion.
[0010] In some embodiments, the first connecting plate is disposed above the second connecting plate, and each heating wire is vertically disposed; wherein, the sliding assembly includes: a sliding member, having a second threaded portion, the sliding member has a second chute extending in the vertical direction; a second slider, at least a part of the second slider extends into the second chute to be slidably connected to the sliding member, and each second slider is connected to a second conductor assembly; a weight assembly, connected to the second slider, configured to apply a downward pulling force to the second slider.
[0011] In some embodiments, the sliding assembly further includes: at least one first limiting member, each first limiting member is connected to the sliding member and at least partially located in the second chute, and the portion of each first limiting member located in the second chute is above the second slider and is configured to limit the highest position of the second slider in the vertical direction; at least one second limiting member, each second limiting member is connected to the sliding member and at least partially located in the second chute, and the portion of each second limiting member located in the second chute is below the second slider and is configured to limit the lowest position of the second slider in the vertical direction.
[0012] In some embodiments, the number of electrode assemblies in each closed loop is two. Among them, each electrode assembly includes: an electrode head assembly, the first end of the electrode head assembly is electrically connected to the power supply device, and the second end of the electrode head assembly is located in the process chamber; a pressing nut, the pressing nut is screwed to the second end of the electrode head assembly; a fixing ring, the fixing ring is sleeved on the second end of the electrode head assembly and is located above the pressing nut. Among them, the first conductor assembly includes: a first connection block, which is connected to the frame assembly and electrically connected to the heating wire; a first conductor, the first end of the first conductor is wound around the second end of the electrode head assembly, and the first end of the first conductor is pressed between the pressing nut and the fixing ring by the pressing nut, and the second end of the first conductor is electrically connected to the first connection block; and / or, the second conductor assembly includes: a second connection block, which is spaced from the first connection block in the vertical direction and is connected to the frame assembly, the second connection block has a third mounting hole extending in the vertical direction and at least one third set screw hole extending in the horizontal direction, the third set screw hole communicates with the third mounting hole, and the heating wire extends into the third mounting hole; at least one third set screw, each third set screw extends into a third set screw hole and abuts against the heating wire.
[0013] In some embodiments, the two electrode assemblies in each closed loop are respectively connected to the first conductor assembly or the second conductor assembly.
[0014] In a second aspect, an embodiment of the present application provides a coating device configured to coat a sheet material. The coating device includes: a process cavity having a process chamber; the heating assembly according to any one of the first aspects above, at least partially disposed in the process chamber and configured to heat the process chamber.
[0015] In the heating component and the coating device provided by the embodiments of the present application, since the frame component is detachably connected to the process chamber, and the first end of the first conductor component is detachably connected to the electrode component, when replacing the heating wire, the frame component can be separated from the process chamber, and the first conductor component and / or the second conductor component can be separated from the electrode component, so that the frame component and the first conductor component, the heating wire and the second conductor component mounted on the frame component can be taken out as a whole. Then, the frame component for replacement and the first conductor component, the heating wire and the second conductor component mounted on the frame component for replacement are placed in the process chamber as a whole, and the frame component for replacement is connected to the process chamber, and the first conductor component and / or the second conductor component on the frame component for replacement is connected to the electrode component, realizing the replacement of the heating wire. There is no need for the operator to hold a flashlight and wind the heating wire sideways into the process chamber, reducing the difficulty and time for replacing the heating wire and improving the production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] By describing the embodiments of the present application in more detail in conjunction with the drawings, the above and other objects, features, and advantages of the present application will become more obvious. The drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation to the present application. In the drawings, the same reference numerals generally represent the same components or steps.
[0017] Figure 1 The following shows a schematic structural diagram of a heating component provided by an exemplary embodiment of the present application.
[0018] Figure 2 The following shows an exemplary embodiment of the present application Figure 1 A partial enlarged view of area A.
[0019] Figure 3 The following shows an exemplary embodiment of the present application Figure 1 A partial enlarged view of area B.
[0020] Figure 4 The following shows an exemplary embodiment of the present application Figure 1 A partial enlarged view of area C.
[0021] Figure 5 The following shows a schematic structural diagram of an electrode head component, a pressing nut, and a fixing ring provided by an exemplary embodiment of the present application.
[0022] Figure 6 The following shows a schematic structural diagram of a heating component provided by another exemplary embodiment of the present application.
[0023] Figure 7 The following shows an exemplary embodiment of the present applicationFigure 6 Partial enlarged view of the middle region D.
[0024] Figure 8 The figure shows a schematic structural diagram of a coating device provided by an exemplary embodiment of the present application.
[0025] Reference numerals:
[0026] 100, heating assembly; 101, frame assembly; 1011, first connecting plate; 10111, second vertical part; 10112, second horizontal part; 1012, connecting rod; 1013, second connecting plate; 10131, waist-shaped hole; 10132, third vertical part; 10133, third horizontal part; 1014, first slider; 1015, sliding assembly; 10151, sliding part; 101511, second chute; 10152, second slider; 10153, counterweight assembly; 101531, counterweight bracket; 101532, counterweight block; 101533, first limit nut; 101534, second limit nut; 10154, first limiting part; 10155, second limiting part; 1016, first chute plate; 1017, second chute plate; 1018, locking part; 102, electrode assembly; 1021, electrode head assembly; 10211, electrode head; 10212, electrode rod; 1022, pressing nut; 1023, fixing ring; 103, first conductor assembly; 1031, first connecting block; 1032, first conductor; 1033, first set screw; 1034, second set screw; 104, heating wire; 105, second conductor assembly; 1051, second connecting block; 1052, third set screw; 1053, fourth set screw; 106, second conductor; 107, fixing plate; 1071, first vertical part; 1072, first horizontal part; 108, isolation plate; 200, coating device; 201, process chamber. Detailed implementation manners
[0027] Next, the technical solutions in the embodiments of the present application will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.
[0028] Exemplary device
[0029] Figure 1 The figure shows a schematic structural diagram of a heating assembly provided by an exemplary embodiment of the present application. Figure 2 Shown is an exemplary embodiment of the present application Figure 1 Partial enlarged view of the middle region A. Figure 3As shown in the following is a partial enlarged view of region B provided by an exemplary embodiment of the present application. Figure 1 in the figure.
[0030] As Figures 1 to 3 shown, an embodiment of the present application provides a heating assembly 100, which is applied to a process chamber, and the process chamber has a process cavity. The heating assembly 100 includes: a frame assembly 101, an electrode assembly 102, a first conductor assembly 103, a heating wire 104, and a second conductor assembly 105. The frame assembly 101 is disposed in the process cavity and is detachably connected to the process chamber. The first conductor assembly 103 is connected to the frame assembly 101. The heating wire 104 is electrically connected to the second end of the first conductor assembly 103, and the heating wire 104 is configured to heat the process cavity. The second conductor assembly 105 is connected to the frame assembly 101, is spaced from the first conductor assembly 103 in the vertical direction, and the second conductor assembly 105 is electrically connected to the heating wire 104. The electrode assembly 102 is at least partially located in the process cavity and is electrically connected to a power supply device, and is configured to provide electrical energy. The electrode assembly 102 is detachably connected to the first conductor assembly 103 and / or the second conductor assembly 105.
[0031] Wherein, the power supply device, the electrode assembly 102, at least one first conductor assembly 103, at least one heating wire 104, and at least one second conductor assembly 105 form a closed loop. There may be one or more closed loops in the heating assembly 100. Here, a closed loop can be formed by electrically connecting between two first conductor assemblies 103 and / or electrically connecting two second conductor assemblies 105.
[0032] Exemplarily, in each closed loop, the number of the first conductor assembly 103, the heating wire 104, and the second conductor assembly 105 is one. The first conductor assembly 103 is electrically connected to the electrode assembly 102, and the second conductor assembly 105 is electrically connected to the electrode assembly 102. That is, the first conductor assembly 103 and the second conductor assembly 105 connected to both ends of each heating wire are respectively electrically connected to the electrode assembly 102. For each heating wire 104, the current is transmitted through the following closed loop in sequence: the power supply device, the electrode assembly 102, the first conductor assembly 103, the heating wire 104, the second conductor assembly 105, the electrode assembly 102, and the power supply device.
[0033] Exemplarily, in each closed loop, the number of the first conductor assemblies 103, the heating wires 104, and the second conductor assemblies 105 is two. Among them, the two first conductor assemblies 103 are electrically connected to the electrode assembly 102, and the two second conductor assemblies 105 are electrically connected to each other. That is, for every two heating wires 104, the current is transmitted through the following closed loop in sequence: the power supply device, the electrode assembly 102, the first conductor assembly 103 corresponding to the first heating wire 104, the first heating wire 104, the second conductor assembly 105 corresponding to the first heating wire 104, the second conductor assembly 105 corresponding to the second heating wire 104, the second heating wire 104, the first conductor assembly 103 corresponding to the second heating wire 104, the electrode assembly 102, and the power supply device.
[0034] Exemplarily, in each closed loop, the number of the first conductor assemblies 103, the heating wires 104, and the second conductor assemblies 105 is an even number greater than two. All the first conductor assemblies 103 are arranged in sequence along the first direction, all the heating wires 104 are arranged in sequence along the first direction, and all the second conductor assemblies 105 are arranged in sequence along the first direction. Among them, the first first conductor assembly 103 and the last first conductor assembly 103 are respectively electrically connected to the electrode assembly 102. The first conductor assemblies 103 that are not electrically connected to the electrode assembly 102 are grouped in twos along the first direction in sequence, forming at least one group of first conductor assemblies 103. The two first conductor assemblies 103 in each group of first conductor assemblies 103 are electrically connected. All the second conductor assemblies 105 are grouped in twos along the first direction in sequence, forming at least one group of second conductor assemblies 105. The two second conductor assemblies 105 in each group of second conductor assemblies 105 are electrically connected. That is, for every four heating wires 104, the current is transmitted through the following closed loop in sequence: the power supply device, the electrode assembly 102, the first conductor assembly 103 corresponding to the first heating wire 104, the first heating wire 104, the second conductor assembly 105 corresponding to the first heating wire 104, the second conductor assembly 105 corresponding to the second heating wire 104, the second heating wire 104, the first conductor assembly 103 corresponding to the second heating wire 104, the first conductor assembly 103 corresponding to the third heating wire 104, the third heating wire 104, the second conductor assembly 105 corresponding to the third heating wire 104, the second conductor assembly 105 corresponding to the fourth heating wire 104, the fourth heating wire 104, the first conductor assembly 103 corresponding to the fourth heating wire 104, the electrode assembly 102, and the power supply device.
[0035] The above several structures for forming a closed loop are only examples, and the embodiments of the present application do not limit the structure for forming a closed loop.
[0036] In some embodiments, two electrode assemblies 102 in each closed loop are respectively connected to the first conductor assembly 103 or the second conductor assembly 105, that is, the two electrode assemblies 102 are arranged on the same side, which can reduce the space occupation.
[0037] Exemplarily, the electrode assembly 102 is arranged on the top of the process chamber and partially extends out of the process chamber. The frame assembly 101 is arranged below the electrode assembly 102. The frame assembly 101 has a rectangular frame structure. The first conductor assembly 103 is connected to the upper part of the frame assembly 101, and the second conductor assembly 105 is connected to the lower part of the frame assembly 101. Both ends of each heating wire 104 are respectively connected to the corresponding first conductor assembly 103 and the corresponding second conductor assembly 105.
[0038] Exemplarily, the heating assembly 100 further includes a third conductor. The first conductor assemblies 103 can be electrically connected through the third conductor. The third conductor is exemplarily a wire or a flexible wire, and the third conductor can be flexibly replaced so that the length of the third conductor can meet the movement requirements of the first slider 1014 in the following text.
[0039] Exemplarily, the heating assembly 100 further includes a second conductor 106. The second conductor assemblies 105 can be electrically connected through the second conductor 106. The second conductor 106 is exemplarily a wire or a flexible wire, and the second conductor 106 can be flexibly replaced so that the length of the second conductor 106 can meet the movement requirements of the second slider 10152 in the following text.
[0040] In the above embodiments, first, since the frame assembly 101 is detachably connected to the process chamber body, and the first end of the first conductor assembly 103 is detachably connected to the electrode assembly 102, when replacing the heating wire 104, the frame assembly 101 can be separated from the process chamber body, and the first conductor assembly 103 and / or the second conductor assembly 105 can be separated from the electrode assembly 102, so as to take out the frame assembly 101 and the first conductor assembly 103, the heating wire 104 and the second conductor assembly 105 installed on the frame assembly 101 as a whole. Then, the frame assembly 101 for replacement and the first conductor assembly 103, the heating wire 104 and the second conductor assembly 105 installed on the frame assembly 101 for replacement are placed in the process chamber as a whole, and the frame assembly 101 for replacement is connected to the process chamber body, and the first conductor assembly 103 and / or the second conductor assembly 105 on the frame assembly 101 for replacement are connected to the electrode assembly 102, so as to realize the replacement of the heating wire 104. There is no need for the operator to hold a flashlight and lean sideways into the process chamber to wind the heating wire 104, which reduces the replacement difficulty and replacement time (such as 10 minutes) of the heating wire 104 and improves the production efficiency.
[0041] Second, a single long heating wire is used in the traditional heating component and wound multiple times in the process chamber, making the long heating wire snake-shaped. The heating wire will become thinner and longer under the action of high temperature. The heating wire bent in this structure is prone to breakage. In the present application, at least two heating wires 104 can be used to replace the single long heating wire in the traditional heating component, and the heating wires 104 do not need to be wound. Both ends of each heating wire 104 are respectively connected to the corresponding first conductor component 103 and second conductor component 105. Each heating wire 104 can be arranged in a straight line state, reducing the risk of breakage of the heating wire 104 and improving the service life of the heating wire 104. Exemplarily, the first conductor component 103 is connected to the upper part of the frame component 101, and the second conductor component 105 is connected to the lower part of the frame component 101. Both ends of each heating wire 104 are respectively connected to the corresponding first conductor component 103 and the corresponding second conductor component 105, so that each heating wire 104 can be arranged in a vertical state.
[0042] Third, since a single long heating wire is used in the traditional heating component, if the long heating wire breaks, the entire long heating wire cannot be used. As a vulnerable part, the heating wire has a high cost and is very wasteful. In the embodiments of the present application, if at least two heating wires 104 are used to heat the process chamber and the heating wires 104 can be arranged in a straight line state, heating wires 104 with shorter lengths can be selected. After the frame component 101 is disassembled, only at least one damaged shorter heating wire 104 can be replaced, and the remaining intact heating wires 104 are retained, reducing the waste of the heating wires 104.
[0043] Figure 4 Shown is a Figure 1 partial enlarged view of region C provided by an exemplary embodiment of the present application.
[0044] In some embodiments, the process cavity 101 has a first threaded portion. For example, the process cavity can have a first threaded hole, and the first threaded portion can be the thread in the first threaded hole. As Figure 1 shown, the heating component 100 further includes a fixing plate 107. The frame component 101 is detachably connected to the fixing plate 107, and the fixing plate 107 has a first pin hole. As Figure 1 and Figure 4As shown, the frame component 101 includes: a first connecting plate 1011, a plug pin, at least one connecting rod 1012, a second connecting plate 1013, and a first screwing member. The first connecting plate 1011 is disposed in the process chamber and is connected to the first conductor component 103. The first connecting plate 1011 has a second pin hole. The plug pin passes through the first pin hole and the second pin hole. At least one connecting rod 1012 is disposed in the process chamber, and the first end of the connecting rod 1012 is connected to the first connecting plate 1011. The second connecting plate 1013 is disposed in the process chamber, is spaced apart from the first connecting plate 1011 in the vertical direction, is connected to the second conductor component 105, and the second connecting plate 1013 is connected to the second end of the connecting rod 1012. The second connecting plate 1013 has a first through hole. The first screwing member passes through the first through hole and is screwed to the first threaded portion. The first screwing member is exemplarily a screw or a bolt.
[0045] Exemplarily, as Figure 1 As shown, the first connecting plate 1011 is disposed above the second connecting plate 1013. The first connecting plate 1011 and the second connecting plate 1013 both extend in the horizontal direction, and the first connecting plate 1011 and the second connecting plate 1013 are oppositely disposed. The number of the connecting rods 1012 is two. The two ends of one connecting rod 1012 are respectively connected to the first end of the first connecting plate 1011 and the first end of the second connecting plate 1013. The two ends of the other connecting rod 1012 are respectively connected to the second end of the first connecting plate 1011 and the second end of the second connecting plate 1013, so that the frame component 101 forms a rectangular frame. The length of the connecting rod 1012 can be exemplarily substantially the same as the length of the heating wire 104. When cutting the heating wire 104, the cutting can be performed based on the length of the connecting rod 1012.
[0046] Exemplarily, as Figure 4 As shown, the fixing plate 107 has a first vertical portion 1071 and a first horizontal portion 1072 which are connected to each other. The first vertical portion 1071 is vertically disposed, and the first horizontal portion 1072 is horizontally disposed. The first vertical portion 1071 is connected to the process cavity. The first horizontal portion 1072 has a first pin hole. The first connecting plate 1011 has a second vertical portion 10111 and a second horizontal portion 10112 which are connected to each other. The second vertical portion 10111 is vertically disposed, and the second horizontal portion 10112 is horizontally disposed. The second horizontal portion 10112 has a second pin hole. The second horizontal portion 10112 is disposed above the first horizontal portion 1072. The plug pin can pass through the second pin hole and then the first pin hole from top to bottom.
[0047] Exemplarily, as Figure 1As shown, the second connecting plate 1013 includes a third vertical portion 10132 and a third horizontal portion 10133 that are connected to each other. The third vertical portion 10132 is vertically arranged, the third horizontal portion 10133 is horizontally arranged, the third vertical portion 10132 is located above the third horizontal portion 10133. The connecting rod 1012 is connected to the third vertical portion 10132, and the third horizontal portion 10133 has a first through hole.
[0048] In the above embodiment, the frame assembly 101 and the fixing plate 107 are detachably connected by a pin, and the frame assembly 101 and the process cavity are detachably connected by a first screwing member. With this structure, when disassembling the frame assembly 101, removing the pin and loosening the first screwing member can separate the frame assembly 101 from the fixing plate 107 and the process cavity 101. When installing the frame assembly 101, inserting the pin and tightening the first screwing member can fix the frame assembly 101 to the fixing plate 107 and the process cavity 101. The disassembly and installation of the frame assembly 101 are very convenient.
[0049] Figure 5 The figure shows a schematic structural diagram of an electrode head assembly, a pressing nut, and a fixing ring provided by an exemplary embodiment of the present application. Figure 6 The figure shows a schematic structural diagram of a heating assembly provided by another exemplary embodiment of the present application. Figure 7 The figure shows what is provided by an exemplary embodiment of the present application Figure 6 A partial enlarged view of region D in
[0050] In some embodiments, such as Figure 1 , Figure 2 , Figure 3 , Figure 5 and Figure 7As shown, there are two electrode assemblies 102 in each closed loop. Each electrode assembly 102 includes: an electrode head assembly 1021, a pressing nut 1022, and a fixing ring 1023. The first end of the electrode head assembly 1021 is electrically connected to the power supply device, and the second end of the electrode head assembly 1021 is located inside the process chamber. The pressing nut 1022 is screwed to the second end of the electrode head assembly 1021. The fixing ring 1023 is sleeved on the second end of the electrode head assembly 1021 and is located above the pressing nut 1022. The first conductor assembly 103 includes: a first connection block 1031 and a first conductor 1032. The first connection block 1031 is connected to the frame assembly 101 and is electrically connected to the heating wire 104. The first end of the first conductor 1032 is wound around the second end of the electrode head assembly 1021, and the first end of the first conductor 1032 is pressed by the pressing nut 1022 between the pressing nut 1022 and the fixing ring 1023. The second end of the first conductor 1032 is electrically connected to the first connection block 1031. And / or, the second conductor assembly 105 includes: a second connection block 1051 and at least one third set screw 1052. The second connection block 1051 is spaced from the first connection block 1031 in the vertical direction and is connected to the frame assembly 101. The second connection block 1051 has a third mounting hole extending in the vertical direction and at least one third set screw hole extending in the horizontal direction. The third set screw hole communicates with the third mounting hole, and the heating wire 104 extends into the third mounting hole. Each third set screw 1052 extends into a third set screw hole and abuts against the heating wire 104 to fasten the heating wire 104.
[0051] Exemplarily, the electrode head assembly 1021 may include an electrode head 10211 and an electrode rod 10212 that are connected to each other. The electrode head 10211 extends out of the process chamber, and the electrode rod 10212 is located inside the process chamber. The fixing ring 1023 may be located on the electrode rod 10212. The electrode rod 10212 has a thread, and the pressing nut 1022 may be screwed onto the electrode rod 10212. The first end of the first conductor 1032 is wound around the electrode rod 10212. The second connection block 1051 may be connected to the second slider 10152 by screws or bolts. The material of the first connection block 1031 is a conductive material. The material of the second connection block 1051 is a conductive material. The first conductor 1032 is exemplarily a wire or a flexible wire, and the first conductor 1032 can be flexibly replaced so that the length of the first conductor 1032 can meet the movement requirements of the first slider 1014 hereinafter. The third set screw 1052 may be located on at least one side of the heating wire 104, that is, the third set screw 1052 can tighten the heating wire 104 from at least one side.
[0052] In the above embodiments, the first end of the first conductor 1032 is pressed tightly between the pressing nut 1022 and the fixing ring 1023 by the pressing nut 1022. With this structure, the first end of the first conductor 1032 can be quickly detached from the electrode head assembly 1021, and the first end of the first conductor 1032 can be quickly installed on the electrode head assembly 1021, improving the replacement efficiency of the heating wire 104.
[0053] In some embodiments, the top of the first connection block 1031 has a first mounting hole extending in the vertical direction, the bottom of the first connection block 1031 has a second mounting hole extending in the vertical direction, the middle part between the top and the bottom of the first connection block 1031 has at least one first set screw hole extending in the horizontal direction, the middle part of the first connection block 1031 also has at least one second set screw hole extending in the horizontal direction, the first set screw hole communicates with the first mounting hole, the second set screw hole communicates with the second mounting hole, the second end of the first conductor 1032 extends into the first mounting hole, the heating wire 104 extends into the second mounting hole, the first conductor assembly 103 further includes at least one first set screw 1033 and at least one second set screw 1034, each first set screw 1033 extends into a first set screw hole and is configured to abut against the second end of the first conductor 1032 so as to fasten the second end of the first conductor 1032, each second set screw 1034 extends into a second set screw hole and is configured to abut against the heating wire 104 so as to fasten the heating wire 104. Wherein, the first set screw 1033 can be located on at least one side of the first conductor 1032, that is, the first set screw 1033 can tighten the first conductor 1032 from at least one side; the second set screw 1034 can be located on at least one side of the heating wire 104, that is, the second set screw 1034 can tighten the heating wire 104 from at least one side.
[0054] In some embodiments, as Figure 2 and Figure 3 shown, each closed loop includes at least two heating wires 104 arranged in sequence in the first direction, the first conductor assembly 103 and the second conductor assembly 105 are both arranged in one-to-one correspondence with the heating wires 104, and the frame assembly 101 further includes: at least two first sliders 1014 and at least two sliding assemblies 1015. At least two first sliders 1014 are arranged in the first direction (such as Figure 1They are arranged in sequence in the X direction (in the figure), at least two first sliders 1014 are slidably connected to the first connecting plate 1011, at least two first sliders 1014 can slide along the first direction, and each first slider 1014 is connected to a first conductor assembly 103. For example, the first slider 1014 and the first conductor assembly 103 can be connected by screws or bolts. At least two sliding assemblies 1015 are arranged in sequence along the first direction, at least two sliding assemblies 1015 are slidably connected to the second connecting plate 1013, at least two sliding assemblies 1015 can slide along the first direction, and each sliding assembly 1015 is connected to a second conductor assembly 105.
[0055] The position of the traditional heating wire is fixed. The heating wire is wound in a serpentine shape in the process chamber, and the distance between adjacent vertical segments in the heating wire does not change, so that the temperature field is fixed. However, during the battery film coating process, different processes require different temperatures, and the traditional heating component cannot meet the heating requirements of different processes. Moreover, for a long serpentine-wound heating wire, according to the principle of thermal radiation, the temperature in the middle area of the heating wire is higher, and the temperature in the two side areas is lower. The temperature field distribution is uneven and cannot be adjusted, which will affect the process effect of the battery chip.
[0056] In the above embodiments, the first slider 1014 can drive the first conductor assembly 103 to slide along the first direction, so as to drive a part of the heating wire 104 (such as the part located at the upper end in the process chamber) to slide along the first direction. The sliding assembly 1015 can drive the second conductor assembly 105 to slide along the first direction, so as to drive another part of the heating wire 104 (such as the part located at the lower end in the process chamber) to slide along the first direction. Therefore, through this structure, the distance between the heating wires 104 can be adjusted, so that the temperature field of the heating component 100 can be flexibly adjusted to meet the heating requirements of different processes, and the uniformity of the temperature field can be improved, thereby improving the process effect.
[0057] In some embodiments, such as Figure 2 and Figure 4 shown, the frame assembly 101 further includes a first chute plate 1016 and a second chute plate 1017. The first chute plate 1016 extends along the first direction and is connected to the first connecting plate 1011. The second chute plate 1017 extends along the first direction and is connected to the first connecting plate 1011. The first chute plate 1016, the second chute plate 1017 and the first connecting plate 1011 form a first chute. The first chute extends along the first direction, and at least two first sliders 1014 are slidably connected to the first connecting plate 1011 through the first chute.
[0058] Specifically, the material of the first slider 1014 is exemplarily an insulating material (such as ceramic), which can insulate the first conductor assembly 103 from the first connecting plate 1011, the first chute plate 1016, and the second chute plate 1017. The size of the opening of the first chute in the vertical direction can be smaller than the size of the first accommodating space in the first chute in the vertical direction. The first slider 1014 can partially extend into the first chute, and the size of the part of the first slider 1014 extending into the first chute in the vertical direction can be smaller than the size of the opening of the first chute in the vertical direction, so as to prevent the first slider 1014 from disengaging from the opening of the first chute.
[0059] With this structure, the first slider 1014 can slide along the first chute to drive a part of the first conductor assembly 103 and the heating wire 104 to move in the first direction, thereby adjusting the positions of the first conductor assembly 103 and the heating wire 104.
[0060] In some embodiments, such as Figure 3 and Figure 7 as shown, the second connecting plate 1013 has a waist-shaped hole 10131 extending in the first direction. The sliding assembly 1015 has a second threaded portion. The frame assembly 101 further includes a locking member 1018. The locking member 1018 passes through the waist-shaped hole 10131 and is screwed to the second threaded portion. Among them, the sliding assembly 1015 exemplarily has a second threaded hole, and the second threaded portion is the thread in the second threaded hole. The locking member 1018 is exemplarily a screw or a bolt.
[0061] With this structure, the locking member 1018 can be loosened to enable the sliding assembly 1015 to slide along the extending direction of the waist-shaped hole 10131, so as to drive another part of the second conductor assembly 105 and the heating wire 104 to move in the first direction, thereby adjusting the positions of another part of the second conductor assembly 105 and the heating wire 104. Then, the locking member 1018 can be tightened to fix the sliding assembly 1015 to the second connecting plate 1013.
[0062] In summary, by adjusting the positions of the first slider 1014 and the sliding assembly 1015 simultaneously, the heating wire 104 can be moved.
[0063] In some embodiments, such as Figure 1 、 Figure 3 and Figure 7As shown, the first connecting plate 1011 is arranged above the second connecting plate 1013, and each heating wire 104 is arranged vertically. The sliding assembly 1015 includes a sliding member 10151, a second sliding block 10152 and a counterweight assembly 10153. The sliding member 10151 has a second threaded portion, and the sliding member 10151 has a second slide groove 101511 extending in the vertical direction. The second sliding block 10152 at least partially extends into the second slide groove 101511 to be slidably connected with the sliding member 10151, and each second sliding block 10152 is connected to a second conductor assembly 105, and the material of the second sliding block 10152 is an insulating material (such as ceramic), which can insulate the second conductor assembly 105 from the second connecting plate 1013. The counterweight assembly 10153 is connected to the second sliding block 10152 and is configured to apply a downward pulling force to the second sliding block 10152.
[0064] Specifically, Figure 7 As shown, the counterweight assembly 10153 may exemplarily include a counterweight bracket 101531 and a counterweight block 101532. The first end of the counterweight bracket 101531 is connected to the second slider 10152, and the counterweight block 101532 is connected to the second end of the counterweight bracket 101531. The counterweight assembly 10153 may also include a first limiting nut 101533 and a second limiting nut 101534. The bottom of the second slider 10152 has a third threaded portion, such as the bottom of the second slider 10152 has a third threaded hole extending in the vertical direction, and the third threaded portion is the thread of the third threaded hole. The first end and the second end of the counterweight bracket 101531 have threads, and the first end of the counterweight bracket 101531 is screwed to the third threaded portion. The first limiting nut 101533 is screwed to the first end of the counterweight bracket 101531, and the first limiting nut 101533 is located below the second slider 10152. The counterweight block 101532 has a second through hole, and the second end of the counterweight bracket 101531 passes through the second through hole. The second limiting nut 101534 is screwed to the second end of the counterweight bracket 101531, and the second limiting nut 101534 is located below the counterweight block 101532 to support the counterweight block 101532. In addition, the second slider 10152 can have a plurality of third threaded portions (i.e., a plurality of third threaded holes), such as in addition to the bottom of the second slider 10152, the top of the second slider 10152 can also have a third threaded portion, and the plurality of threaded portions can be screwed to the first ends of the plurality of counterweight brackets 101531, respectively, and the second end of each counterweight bracket 101531 can be connected to a counterweight block 101532, respectively.
[0065] Specifically, the size of the opening of the second sliding groove 101511 in the horizontal direction can be smaller than the size of the second accommodation space in the second sliding groove 101511 in the horizontal direction, and the size of the part of the second slider 10152 extending into the second sliding groove 101511 in the horizontal direction can be smaller than the size of the opening of the second sliding groove 101511 in the horizontal direction, so as to prevent the second slider 10152 from disengaging from the opening of the second sliding groove 101511.
[0066] In a traditional heating component, the heating wire is fixed in the process chamber and cannot be tensioned. After the heating wire generates heat, it becomes thinner and longer, thus bending and easily colliding with other structures in the process chamber, and then breaking. In the embodiment of the present application, when the heating wire 104 generates heat and becomes longer, the gravity of the weight component 10153 can drive the second slider 10152 to move downward along the second sliding groove 101511, and then drive the second conductor component 105 to move downward, thereby driving the lower end of the heating wire 104 to move downward, realizing the tensioning of the heating wire 104 and enabling the heating wire 104 to always maintain a vertical state.
[0067] In some embodiments, as Figure 3 and Figure 7 shown, the sliding component 1015 further includes at least one first limiting member 10154 and at least one second limiting member 10155. Each first limiting member 10154 is connected to the sliding member 10151 and is at least partially located in the second sliding groove 101511. The part of each first limiting member 10154 located in the second sliding groove 101511 is located above the second slider 10152 and is configured to limit the highest position of the second slider 10152 in the vertical direction. Each second limiting member 10155 is connected to the sliding member 10151 and is at least partially located in the second sliding groove 101511. The part of each second limiting member 10155 located in the second sliding groove 101511 is located below the second slider 10152 and is configured to limit the lowest position of the second slider 10152 in the vertical direction.
[0068] Exemplarily, the first limiting member 10154 can be a screw or a bolt. The sliding member 10151 has at least one fourth threaded portion, such as the sliding member 10151 has at least one fourth threaded hole extending in the horizontal direction, and the fourth threaded portion is the thread in the fourth threaded hole. The first limiting member 10154 is screwed to the fourth threaded portion.
[0069] Exemplarily, the second limiting member 10155 can be a screw or a bolt. The sliding member 10151 has at least one fifth threaded portion, such as the sliding member 10151 has at least one fifth threaded hole extending in the horizontal direction, and the fifth threaded portion is the thread in the fifth threaded hole. The second limiting member 10155 is screwed to the fifth threaded portion.
[0070] Exemplarily, two first limit members 10154 may be provided above the second slider 10152 for limiting. The two first limit members 10154 are symmetrically arranged with respect to the center line of the second chute 101511. Two second limit members 10155 may be provided below the second slider 10152 for limiting. The two second limit members 10155 are symmetrically arranged with respect to the center line of the second chute 101511.
[0071] With this structure, at least one first limit member 10154 can limit the highest position of the second slider 10152 in the vertical direction of movement, and at least one second limit member 10155 can limit the lowest position of the second slider 10152 in the vertical direction of movement, so as to prevent the second slider 10152 from moving too high or too low and disengaging from the second chute 101511.
[0072] In some embodiments, among every two second conductor assemblies 105, one side of each second connection block 1051 facing another second connection block 1051 has a fourth mounting hole. Both ends of the second conductor 106 extend into the fourth mounting holes of the two second connection blocks 1051 respectively, thereby conducting the two second connection blocks 1051. The bottom of the second connection block 1051 also has at least one fourth set screw hole. The second conductor assembly 105 further includes at least one fourth set screw 1053. Each fourth set screw 1053 extends into a fourth set screw hole and is configured to abut against the second conductor 106, thereby fastening the second conductor 106.
[0073] In some embodiments, the power supply device includes at least one power source. Among every two electrode head assemblies 1021, the first end of one electrode head assembly 1021 is electrically connected to the positive output terminal of one power source, and the first end of the other electrode head assembly 1021 is electrically connected to the negative output terminal of one power source, so that two heating wires 104 can be powered by one power source. With this structure, the heating temperature of every two heating wires 104 can be controlled respectively by controlling the output power of at least one power source respectively, so as to realize flexible regulation of the heating temperature.
[0074] In some embodiments, the heating assembly 100 may further include at least one temperature measuring device (such as an infrared thermometer). The at least one temperature measuring device can respectively detect the temperature of at least one temperature zone of the heating assembly 100. At least one heating wire 104 may be provided in each temperature zone. For the temperature of at least one temperature zone measured by the at least one temperature measuring device, if the temperature of a certain temperature zone is too high, the output power of the power source supplying power to the heating wire 104 of that temperature zone can be reduced to lower the temperature of that temperature zone. If the temperature of a certain temperature zone is too low, the output power of the power source supplying power to the heating wire 104 of that temperature zone can be increased to raise the temperature of that temperature zone.
[0075] In some embodiments, such as Figure 1 As shown, the frame component 101 further includes a separator plate 108. The separator plate 108 is disposed between the fixing plate 107 and the electrode component 102 and is configured to isolate the fixing plate 107 from the electrode component 102. The material of the separator plate 108 is an insulating material. Since the material of the fixing plate 107 is usually selected as a metal material, by providing the separator plate 108, it is possible to prevent the electrode component 102 from being affected by the fixing plate 107 and causing abnormal discharge. The material of the separator plate 108 can be, for example, a ceramic material.
[0076] Figure 8 The figure shows a schematic structural diagram of a coating device provided by an exemplary embodiment of the present application.
[0077] Based on the same concept, as Figure 8 As shown, the embodiment of the present application further provides a coating device 200. The coating device 200 is configured to coat a sheet material. The coating device 200 includes a process chamber 201 and the heating component 100 in the above embodiment. The process chamber 201 has a process cavity. The heating component 100 is at least partially disposed in the process chamber and is configured to heat the process chamber.
[0078] Among them, the coating device 200 is, for example, a chemical vapor deposition device, such as a hot filament chemical vapor deposition (HFCVD) device, which is also referred to as a catalytic chemical vapor deposition (CAT-CVD).
[0079] The basic principle of the present application has been described above in conjunction with specific embodiments. However, it should be noted that the advantages, advantages, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, advantages, effects, etc. are essential for each embodiment of the present application. In addition, the above-disclosed specific details are only for the purpose of illustration and facilitating understanding, rather than limitations. The above details do not limit the present application to necessarily adopt the above specific details to implement.
[0080] The block diagrams of the devices, apparatuses, equipment, and systems involved in the present application are only illustrative examples and are not intended to require or imply that the connection, arrangement, and configuration must be carried out in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "comprising", "including", "having", etc. are open-ended terms that mean "including but not limited to" and can be used interchangeably with each other. The words "or" and "and" used herein refer to the phrase "and / or" and can be used interchangeably with it, unless the context clearly indicates otherwise. The phrase "such as" used herein refers to the phrase "such as but not limited to" and can be used interchangeably with it.
[0081] It should also be noted that in the devices, equipment, and methods of the present application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be regarded as equivalent solutions of the present application.
[0082] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the broadest scope consistent with the principles and novel features disclosed herein.
[0083] The above description has been given for purposes of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions, and sub-combinations thereof.
Claims
1. A heating component, characterized in that, Applied to a process chamber, the process chamber having a process cavity; Wherein, the heating component includes: A frame component disposed in the process cavity and detachably connected to the process chamber; A first conductor component, the first conductor component being connected to the frame component; A heating wire, the heating wire being electrically connected to the second end of the first conductor component, the heating wire being configured to heat the process cavity; A second conductor component, connected to the frame component and spaced apart from the first conductor component in the vertical direction, the second conductor component being electrically connected to the heating wire; An electrode component, at least partially located in the process cavity and electrically connected to a power supply device, configured to provide electrical energy, the electrode component being detachably connected to the first conductor component and / or the second conductor component; Wherein, the power supply device, the electrode component, at least one of the first conductor components, at least one of the heating wires, and at least one of the second conductor components form a closed loop.
2. The heating component according to claim 1, characterized in that The process chamber has a first threaded portion, and the heating component further includes: A fixing plate, the frame component being detachably connected to the fixing plate, the fixing plate having a first pin hole; Wherein, the frame component includes: A first connecting plate disposed in the process cavity and connected to the first conductor component, the first connecting plate having a second pin hole; A pin, the pin passing through the first pin hole and the second pin hole; At least one connecting rod disposed in the process cavity, a first end of the connecting rod being connected to the first connecting plate; A second connecting plate disposed in the process cavity, spaced apart from the first connecting plate in the vertical direction, connected to the second conductor component, and the second connecting plate being connected to a second end of the connecting rod, the second connecting plate having a first through hole; A first screwing member, the first screwing member passing through the first through hole and screwing with the first threaded portion.
3. The heating assembly according to claim 2, wherein The frame component further includes: An isolation plate disposed between the fixing plate and the electrode component, configured to isolate the fixing plate and the electrode component, the material of the isolation plate being an insulating material.
4. The heating assembly according to claim 2, wherein Each of the closed loops includes at least two heating wires arranged in sequence along a first direction, the first conductor component and the second conductor component are each provided corresponding to the heating wires, and the frame component further includes: At least two first sliders arranged in sequence along the first direction, at least two of the first sliders being slidably connected to the first connecting plate, at least two of the first sliders being capable of sliding along the first direction, and each of the first sliders being connected to one of the first conductor components; At least two sliding components arranged in sequence along the first direction, at least two of the sliding components being slidably connected to the second connecting plate, at least two of the sliding components being capable of sliding along the first direction, and each of the sliding components being connected to one of the second conductor components.
5. The heating component according to claim 4, wherein The frame component further includes: A first chute plate extending along the first direction and connected to the first connecting plate; The second chute plate extends along the first direction and is connected to the first connecting plate. The first chute plate, the second chute plate and the first connecting plate form a first chute which extends along the first direction. At least two of the first sliders are slidably connected to the first connecting plate through the first chute; and / or, The second connecting plate has a waist-shaped hole extending along the first direction. The sliding assembly has a second threaded portion. The frame assembly further includes: A locking member that passes through the waist-shaped hole and is screwed to the second threaded portion.
6. The heating assembly according to claim 5, wherein The first connecting plate is disposed above the second connecting plate, and each heating wire is disposed vertically; Wherein, the sliding assembly includes: A sliding member having the second threaded portion, and the sliding member has a second chute extending in the vertical direction; A second slider that at least partially extends into the second chute to be slidably connected to the sliding member, and each second slider is connected to one of the second conductor assemblies; A weight assembly connected to the second slider and configured to apply a downward pulling force to the second slider.
7. The heating assembly according to claim 6, wherein The sliding assembly further includes: At least one first limiting member, each first limiting member is connected to the sliding member and at least partially located in the second chute. The portion of each first limiting member located in the second chute is located above the second slider and is configured to limit the highest position of the second slider in the vertical direction; At least one second limiting member, each first limiting member is connected to the sliding member and at least partially located in the second chute. The portion of each second limiting member located in the second chute is located below the second slider and is configured to limit the lowest position of the second slider in the vertical direction.
8. The heating assembly according to any one of claims 1-7, characterized in that, The number of the electrode assemblies in each closed loop is two. Wherein, each electrode assembly includes: An electrode head assembly, the first end of the electrode head assembly is electrically connected to the power supply device, and the second end of the electrode head assembly is located in the process chamber; A pressing nut that is screwed to the second end of the electrode head assembly; A fixing ring that is sleeved on the second end of the electrode head assembly and is located above the pressing nut; Wherein, the first conductor assembly includes: A first connecting block connected to the frame assembly and electrically connected to the heating wire; A first conductor, the first end of the first conductor is wound around the second end of the electrode head assembly, and the first end of the first conductor is pressed between the pressing nut and the fixing ring by the pressing nut. The second end of the first conductor is electrically connected to the first connecting block; and / or, the second conductor assembly includes: A second connecting block that is vertically spaced from the first connecting block and is connected to the frame assembly. The second connecting block has a third mounting hole extending in the vertical direction and at least one third set screw hole extending in the horizontal direction. The third set screw hole communicates with the third mounting hole, and the heating wire extends into the third mounting hole; At least one third set screw, each of the third set screws extends into one of the third set screw holes and abuts against the heating wire.
9. The heating assembly according to claim 8, characterized in that Two electrode components in each of the closed circuits are respectively connected to the first conductor component or the second conductor component.
10. A coating device, characterized in that, Configured to coat a sheet material, the coating device includes: A process cavity having a process chamber; The heating component according to any one of claims 1 to 9 above, at least partially disposed in the process chamber, configured to heat the process chamber.