Deposition gas preheating device

Abstract

The utility model relates to the technical field of chemical vapor deposition, in particular to a deposition gas preheating device which comprises a furnace body, a first preheating part and a second preheating part. The first preheating part and the second preheating part are both located in the furnace body, an air supply port is formed in the bottom wall of the furnace body in the first direction, a first air inlet is formed in the first preheating part in the first direction, the air supply port communicates with the first air inlet, a first through groove is formed in the first preheating part in a penetrating mode in the second direction, and the second direction is perpendicular to the first direction. The first preheating part is sleeved with the second preheating part, a first preheating gap is formed between the first preheating part and the second preheating part, and the first through groove communicates with the first preheating gap; a second preheating gap is formed between the second preheating piece and the inner wall of the furnace body, a second through groove is formed in the second preheating piece in the second direction in a penetrating mode, and the second through groove communicates with the first through groove and communicates with the second preheating gap. The device has the effect of preheating the gas in advance.

Description

Technical Field

[0001] The present application relates to the technical field of chemical vapor deposition, and particularly relates to a deposition gas preheating device. Background Art

[0002] Carbon-carbon composite materials use carbon fibers as the reinforcement and deposited carbon as the matrix material. They are a type of carbon fiber composite material with characteristics such as low density, high specific strength, high specific modulus, high thermal conductivity, low coefficient of thermal expansion, good fracture toughness, wear resistance, and ablation resistance. They have been used as a high-performance new material and are widely applied in many fields such as aerospace and photovoltaic heat fields.

[0003] Refer to Figure 1 , in the existing deposition furnace, the carbon-carbon material preform is mainly loaded into the deposition furnace according to a predetermined furnace loading method. The suitable preforms 01 are sleeved with each other and stacked vertically to the bottom of the furnace body 1. Air is blown to the preforms 01 through the air holes 11 at the bottom of the furnace body 1. Then, under high temperature and vacuum conditions, the matrix carbon is deposited on the surface of the carbon fibers to densify the product. Mainly, the column of materials is sleeved layer by layer and densified by isothermal and isobaric infiltration.

[0004] In view of the above related technologies, the speed at which the gas rushes upward when entering through the air holes 11 is very fast. If the gas rushes directly upward, the gas cannot be fully heated and the decomposition is incomplete, ultimately affecting the carbon fiber deposition effect. Therefore, there is an urgent need to provide a device that can preheat the gas in advance. Utility Model Content

[0005] In order to preheat the gas in advance, the present application provides a deposition gas preheating device.

[0006] A deposition gas preheating device provided by the present application adopts the following technical solutions:

[0007] A deposition gas preheating device, characterized in that it includes a furnace body, a first preheating member, and a second preheating member;

[0008] Both the first preheating member and the second preheating member are located inside the furnace body. The first preheating member is provided with an air inlet along a first direction, and a first through groove is penetrated along a second direction. The second direction is perpendicular to the first direction. The second preheating member is sleeved on the first preheating member. There is a first preheating gap between the first preheating member and the second preheating member, and the first through groove communicates with the first preheating gap;

[0009] There is a second preheating gap between the second preheating member and the inner wall of the furnace body. The second preheating member is penetrated with a second through groove along the second direction. The second through groove communicates with the first through groove and also communicates with the second preheating gap.

[0010] By adopting the above technical solution, the gas needs to react and deposit with the carbon fiber preform in the furnace body to finally obtain a carbon fiber product. The gas enters from the gas inlet. Since the gas flow rate is relatively fast, insufficient heating may occur, resulting in incomplete decomposition during the reaction with the preform and ultimately affecting the product effect. Therefore, by providing a first preheating member and a second preheating member, the gas enters the first preheating gap through the first through groove for heating, and the heated gas then enters the preform through the second preheating gap to react with the preform. In this application, by providing the first preheating member and the second preheating member, the gas can stagnate in the first preheating gap for a period of time, so that the gas can be heated sufficiently.

[0011] Optionally, the first through groove and the second through groove are arranged in an alternating manner.

[0012] By adopting the above technical solution, in order to make the gas stay in the first preheating gap as long as possible to ensure sufficient heating of the gas, the first through groove and the second through groove are arranged in an alternating manner to prevent the gas from directly passing through the first preheating gap and entering the second preheating gap through the first through groove.

[0013] Optionally, a gas baffle is provided between the first preheating member and the second preheating member. One end of the gas baffle abuts against the groove wall of the second through groove of the second preheating member, and the other end of the gas baffle is provided with a first insertion groove for accommodating the first preheating member in the first direction. The first insertion groove is in plug-in fit with the first preheating member on the side of the first through groove close to the second through groove.

[0014] By adopting the above technical solution, in order to further increase the reaction time of the gas in the first preheating gap, a gas baffle is provided. The gas baffle is arranged between the first insertion groove and the second insertion groove, so that the gas can flow unidirectionally in the first preheating gap, that is, flow circumferentially around the second preheating member in the first preheating gap and then be discharged through the second through groove, further ensuring that the gas is heated for a longer time in the first preheating gap, so that the gas is heated sufficiently.

[0015] Optionally, the side of the gas baffle away from the first preheating member extends into the second preheating gap.

[0016] By adopting the above technical solution, since the second preheating member may be offset in position relative to the first preheating member during installation, one end of the gas baffle extends into the second preheating gap to ensure that the gas can always flow and be heated in the first preheating gap.

[0017] Optionally, it further includes a first flow guide member, which overlaps on the side of the second preheating member away from the first air inlet. The outer wall of the first flow guide member is attached to the inner wall of the furnace body. A plurality of first flow guide holes are formed in the part of the first flow guide member located in the second preheating gap along the first direction.

[0018] By adopting the above technical solution, in order to guide the gas in the second preheating gap, a first flow guide member is provided, so that the gas is discharged through the first flow guide holes on the first flow guide member. The gas further enters the preform and reacts with the preform.

[0019] Optionally, the first preheating member is provided with a second insertion groove along the first direction. The first insertion groove is in insertion fit with the second insertion groove, so that the side of the first preheating member close to the first flow guide member is flush with the side of the second preheating member close to the first flow guide member.

[0020] By adopting the above technical solution, in order to ensure the sealing performance between the first flow guide member and the first preheating member and prevent the gas from being directly discharged through the first flow guide holes, a second insertion groove is formed in the first preheating member, so that the first insertion groove is in insertion fit with the second insertion groove, ensuring that the sides of the first preheating member and the second preheating member close to the first flow guide member are flush, thereby ensuring the sealing performance between the first flow guide member and the first preheating member.

[0021] Optionally, it further includes a second flow guide member, which is arranged on the side of the first flow guide member away from the second preheating member. The outer peripheral wall of the second flow guide member is attached to the inner peripheral wall of the furnace body. There is a flow guide gap between the second flow guide member and the first flow guide member. A plurality of second flow guide holes are formed through the second flow guide member along the first direction.

[0022] By adopting the above technical solution, since the preforms are sleeved with each other, in order to enable the gas to fully react with both the inner and outer preforms, a second guide member is provided. The gas is discharged from the first flow guide holes through the flow guide gap and then from the second flow guide holes, ensuring the uniformity of gas discharge, so that the gas can fully react with the mutually sleeved preforms.

[0023] Optionally, a plurality of connecting members are arranged between the second flow guide member and the first flow guide member. The plurality of connecting members are spaced apart along the second direction. The second flow guide member overlaps on the connecting members.

[0024] By adopting the above technical solution, by providing the connecting members, the second flow guide member is supported by the connecting members.

[0025] In summary, the present application includes at least one of the following beneficial technical effects:

[0026] 1. The present application ensures that the gas can stagnate in the first preheating gap and be fully heated by providing the first preheating member and the second preheating member, so as to ensure that the heated gas can fully react with the preform, and further improve the quality of the prepared carbon fiber product.

[0027] 2. By providing the air baffle, the present application enables the gas to flow unidirectionally in the first preheating gap and flow around the circumference of the second preheating member for one week, increasing the stagnation time of the gas and making the gas heating uniform.

[0028] 3. By providing the first flow guiding member and the second flow guiding member, the present application enables the gas to be discharged from the second flow guiding hole, so that the heated gas can fully react with the preform. Moreover, the installation of the first preheating member, the second preheating member, the first flow guiding member and the second flow guiding member is convenient, and any structure can be replaced according to the product size. Description of the Drawings

[0029] Figure 1 is a schematic diagram of the related structure in the background art of the present application;

[0030] Figure 2 is a schematic diagram of the overall structure of a deposition gas preheating device of the present application;

[0031] Figure 3 is a schematic diagram of the structures of the first preheating member and the second preheating member of the present application;

[0032] Figure 4 is a schematic diagram of the connection between the air baffle and the first preheating member and the second preheating member of the present application;

[0033] Figure 5 is a schematic diagram of the structure of the first flow guiding member of the present application;

[0034] Figure 6 is a schematic diagram of the structure of the second flow guiding member of the present application;

[0035] Figure 7 is a schematic diagram of the connection between the connecting member and the first flow guiding member and the second flow guiding member of the present application.

[0036] Description of the Reference Numerals: 01, preform; 1, furnace body; 11, gas supply port; 2, first preheating member; 21, first air inlet; 22, first through groove; 23, first preheating gap; 24, second insertion groove; 3, second preheating member; 31, second through groove; 32, second preheating gap; 4, air baffle; 41, first insertion groove; 5, first flow guiding member; 51, first flow guiding hole; 52, flow guiding gap; 6, second flow guiding member; 61, second flow guiding hole; 7, connecting member. Detailed Embodiments

[0037] The following further elaborates on the present application in conjunction with the attached Figure 1-7 drawings for a more detailed description.

[0038] This embodiment of the present application discloses a deposition gas preheating device. Refer to Figure 2 , the deposition gas preheating device includes a furnace body 1, a first preheating member 2 and a second preheating member 3. Both the first preheating member 2 and the second preheating member 3 are located inside the furnace body 1. The furnace body 1 supports the first preheating member 2 and the second preheating member 3. The furnace body 1 is provided with a gas supply port 11 along a first direction. The first preheating member 2 is provided with a first air inlet 21 along the first direction. The gas supply port 11 is communicated with the first air inlet 21. The preform 01 is stacked above the first preheating member 2. The gas enters the first air inlet 21 from the gas supply port 11, and the first preheating member 2 and the second preheating member 3 preheat the gas. The preheated gas further enters the preform 01 for reaction.

[0039] Refer to Figure 2 and Figure 3 , the first preheating member 2 is provided with a first through groove 22 penetrating along a second direction. The second direction is perpendicular to the first direction, and the second direction is the circumferential direction of the first preheating member 2. The second preheating member 3 is sleeved on the first preheating member 2. There is a first preheating gap 23 between the first preheating member 2 and the second preheating member 3. The first through groove 22 is communicated with the first preheating gap 23; there is a second preheating gap 32 between the second preheating member 3 and the inner wall of the furnace body 1. The second preheating member 3 is provided with a second through groove 31 penetrating along the second direction. The second through groove 31 is communicated with the first through groove 22 and is also communicated with the second preheating gap 32. The gas enters the first preheating gap 23 from the second air inlet hole, extending the residence time of the gas, so that the gas is fully heated in the furnace body 1.

[0040] Refer to Figure 3 , in some embodiments, the shapes of the first preheating member 2 and the second preheating member 3 may be the same or different. In order to improve the uniformity of gas flow, in this embodiment, the shapes of the first preheating member 2 and the second preheating member 3 are the same. In some embodiments, the cross-section of the first preheating member 2 may be rectangular, circular, or any shape. In this embodiment, both the first preheating member 2 and the second preheating member 3 are in the shape of a circular ring.

[0041] Refer to Figure 3 , in order to make the residence time of the gas in the first preheating gap 23 as long as possible to ensure that the gas is fully heated, the first through groove 22 and the second through groove 31 are arranged in an interleaved manner to prevent the gas from directly passing through the first through groove 22 from the first preheating gap 23 and entering the second preheating gap 32.

[0042] Refer to Figure 4, in order to further increase the reaction time of the gas in the first preheating gap 23, a gas baffle 4 is provided between the first preheating member 2 and the second preheating member 3. The gas baffle 4 is arranged on the side where the first through groove 22 and the second through groove 31 are close to each other. One end of the gas baffle 4 abuts against the groove wall of the second through groove 31 of the second preheating member 3. The other end of the gas baffle 4 is provided with a first insertion groove 41 for accommodating the first preheating member 2 along the first direction. The first insertion groove 41 is in plug-in fit with the first preheating member 2 on the side of the first through groove 22 close to the second through groove 31. By providing the gas baffle 4, the gas is made to flow unidirectionally into the first preheating gap 23, flow in the circumferential direction of the second preheating gap 32, and finally enter the second preheating gap 32 through the second through groove 31.

[0043] Refer to Figure 2 and Figure 4 , in some embodiments, the first preheating member 2 and the second preheating member 3 can be coaxially arranged or non-coaxially arranged. When the first preheating member 2 and the second preheating member 3 are non-coaxially arranged, in order to enable the gas baffle 4 to still guide the flow of the gas, the side of the gas baffle 4 away from the first preheating member 2 extends into the second preheating gap 32 and does not contact the first preheating member 2. That is to say, the second preheating member 3 can be offset relative to the first preheating member 2.

[0044] Refer to Figure 4 , by providing the gas baffle 4, on the one hand, the direction of the gas entering the first preheating gap 23 can be guided, so that the gas enters the first preheating gap 23 unidirectionally, ensuring the retention and sufficient heating of the gas. On the other hand, the width of the gas baffle 4 can provide a space for the offset of the second preheating member 3. The offset of the second preheating member 3 means that the width of the first preheating gap 23 is different. Thus, the flow rate of the gas entering the first preheating gap 23 can be controlled and adjusted by adjusting the position of the second preheating member 3.

[0045] Refer to Figure 5 , after the gas enters the second preheating gap 32 from the first through groove 22, in order to make the gas enter the upper preform 01, the deposition gas preheating device further includes a first deflector 5. The first deflector 5 is lapped on the side of the second preheating member 3 away from the air inlet. The outer wall of the first deflector 5 is attached to the inner wall of the furnace body 1. A plurality of first deflector holes 51 are provided in the part of the first deflector 5 located in the second preheating gap 32 along the circumferential direction of the first deflector 5. The gas enters the first deflector holes 51 from the second preheating gap 32 and then flows towards the preform 01 side through the first deflector holes 51. In this embodiment, the first deflector 5 is in the shape of a circular plate.

[0046] Refer to Figure 4 and Figure 5, To ensure the sealing between the first preheating member 2 and the first flow guiding member 5 and prevent gas from directly flowing out of the first flow guiding hole 51, the first preheating member 2 is provided with a second insertion groove 24 along the first direction. The first insertion groove 41 and the second insertion groove 24 are in insertion fit, so that the side of the first preheating member 2 close to the first flow guiding member 5 is flush with the side of the second preheating member 3 close to the first flow guiding member 5, that is, the first preheating member 2 also supports the first flow guiding member 51.

[0047] Referring to Figure 5 and Figure 6 , since the preform 01 is loaded into the furnace by sleeving preforms 01 with appropriate sizes on each other, in order to enable the gas flowing out of the first flow guiding hole 51 to fully react with the mutually sleeved preforms 01, the deposition gas preheating device further includes a second flow guiding member 6. The second flow guiding member 6 is arranged on the side of the first flow guiding member 5 away from the second preheating member 3. The outer peripheral wall of the second flow guiding member 6 is attached to the inner peripheral wall of the furnace body 1. There is a flow guiding gap 52 between the second flow guiding member 6 and the first flow guiding member 5. The second flow guiding member 6 is provided with a plurality of second flow guiding holes 61 penetrating along the first direction. The plurality of second flow guiding holes 61 are spaced apart along the circumferential direction of the second flow guiding member 6, so that the gas enters the flow guiding gap 52 from the first flow guiding hole 51 and is discharged from the second flow guiding holes 61, thereby enabling the gas to fully react with the inner and outer preforms 01. In this embodiment, the second flow guiding member 6 is in the shape of a circular plate.

[0048] Referring to Figure 6 and Figure 7 , a plurality of connecting members 7 are provided between the second flow guiding member 6 and the first flow guiding member 5. The plurality of connecting members 7 are spaced apart along the second direction. The second flow guiding member 6 is lapped on the connecting members 7. The first preheating member 2, the second preheating member 3, the first flow guiding member 5 and the second flow guiding member 6 are all splicing structures, and any of the structures can be replaced according to the size of the preform 01 to achieve matching, and the installation is convenient.

[0049] The implementation principle of a deposition gas preheating device according to an embodiment of the present application is as follows: Place the preheating device at the bottom of the furnace body 1, and stack the preforms 01 on top of the preheating device. The gas enters the first air inlet 21 from the first air inlet hole, and then enters the first preheating gap 23 through the first through groove 22 for heating. The gas stays in the first preheating gap 23 for an extended time, thereby achieving sufficient heating of the gas. Then, the gas enters the second preheating gap 32 through the second through groove 31, further passes through the first flow guiding hole 51 and the flow guiding gap 52, and is discharged from the second flow guiding hole 61, and finally enters the mutually sleeved preforms 01 to react with the preforms 01.

[0050] The above are all the preferred embodiments of the present application, and the protection scope of the present application is not limited accordingly. Therefore, all equivalent changes made according to the structure, shape, and principle of the present application should be covered within the protection scope of the present application.

Claims

1. A deposition gas preheating device, characterized in that: It includes a furnace body (1), a first preheating member (2) and a second preheating member (3); The first preheating member (2) and the second preheating member (3) are both located inside the furnace body (1). An air supply port (11) is provided on the bottom wall of the furnace body (1) along a first direction. The first preheating member (2) is provided with a first air inlet (21) along the first direction. The air supply port (11) is communicated with the first air inlet (21). The first preheating member (2) is provided with a first through slot (22) penetrating along a second direction, and the second direction is perpendicular to the first direction. The second preheating member (3) is sleeved on the first preheating member (2). A first preheating gap (23) is formed between the first preheating member (2) and the second preheating member (3). The first through slot (22) is communicated with the first preheating gap (23); A second preheating gap (32) is formed between the second preheating member (3) and the inner wall of the furnace body (1). The second preheating member (3) is provided with a second through slot (31) penetrating along the second direction. The second through slot (31) is communicated with the first through slot (22) and is also communicated with the second preheating gap (32).

2. The deposition gas preheating device according to claim 1, characterized in that: The first through slot (22) and the second through slot (31) are arranged staggeredly.

3. The deposition gas preheating device according to claim 2, characterized in that: A gas baffle plate (4) is provided between the first preheating member (2) and the second preheating member (3). One end of the gas baffle plate (4) abuts against the groove wall of the second through slot (31) of the second preheating member (3). The other end of the gas baffle plate (4) is provided with a first insertion slot (41) for accommodating the first preheating member (2) along the first direction. The first insertion slot (41) is in insertion fit with the first preheating member (2) on the side of the first through slot (22) close to the second through slot (31).

4. The deposition gas preheating device according to claim 3, wherein: The side of the gas baffle plate (4) away from the first preheating member (2) extends into the second preheating gap (32).

5. The deposition gas preheating device according to claim 3, wherein: It further includes a first flow guiding member (5). The first flow guiding member (5) is lapped on the side of the second preheating member (3) away from the first air inlet (21). The outer wall of the first flow guiding member (5) is fitted with the inner wall of the furnace body (1). A plurality of first flow guiding holes (51) are provided along the first direction in the part of the first flow guiding member (5) located in the second preheating gap (32).

6. The deposition gas preheating device according to claim 5, characterized in that: The first preheating member (2) is provided with a second insertion slot (24) along the first direction. The first insertion slot (41) is in insertion fit with the second insertion slot (24) so that the side of the first preheating member (2) close to the first flow guiding member (5) is flush with the side of the second preheating member (3) close to the first flow guiding member (5).

7. The deposition gas preheating device according to claim 5, characterized in that: It further includes a second flow guiding member (6). The second flow guiding member (6) is arranged on the side of the first flow guiding member (5) away from the second preheating member (3). The outer peripheral wall of the second flow guiding member (6) is fitted with the inner peripheral wall of the furnace body (1). A flow guiding gap (52) is formed between the second flow guiding member (6) and the first flow guiding member (5). A plurality of second flow guiding holes (61) are provided along the first direction through the second flow guiding member (6).

8. A deposition gas preheating device according to claim 7, characterized in that: A plurality of connecting members (7) are provided between the second flow guide member (6) and the first flow guide member (5), and the plurality of connecting members (7) are spaced apart along the second direction, and the second flow guide member (6) is lapped on the connecting members (7).

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