Temperature control system and atomic layer deposition equipment

Abstract

The utility model discloses a temperature control system and atomic layer deposition equipment, the temperature control system is applied to the atomic layer deposition equipment, the atomic layer deposition equipment comprises a reaction chamber, the temperature control system comprises: a heating part arranged at one side of the reaction chamber; the cooling part is arranged on the side, away from the reaction cavity, of the heating part, and at least one of the heating part and the cooling part is movably arranged; the adjusting part is connected with the heating part and / or the cooling part and used for adjusting the distance between the heating part and the cooling part; and the control unit is connected with the adjusting part and used for collecting the heating temperature of the heating part and controlling the adjusting part according to the heating temperature so as to adjust the distance between the heating part and the cooling part. According to the utility model, the heating temperature of the heating part is collected through the control unit, and then the adjusting part is adjusted according to the heating temperature, so that the distance between the heating part and the cooling part is adjusted, and accurate heating control of the atomic layer deposition equipment can be realized.

Description

Technical Field

[0001] The utility model relates to the technical field of atomic layer deposition, and particularly relates to a temperature control system and an atomic layer deposition device. Background Art

[0002] An atomic layer deposition device is an instrument used in the fields of mechanics, physics, and materials science. The heating system is the main part of the atomic layer deposition device, and the heating system has an important impact on the deposition process, which directly affects the stability of the device's film coating.

[0003] When the traditional heating system operates, its temperature cannot be accurately controlled. This easily leads to the situation that the heating system may work at high power for a long time, but still cannot reach the temperature required by the process, thereby affecting the overall process. Moreover, due to working at high power for a long time, it may directly cause damage to the heating system itself. In addition, when the heating system is installed, it is only fixed by bolting, and the bolting operation is completed manually. This leads to the situation where the installation accuracy is not uniform due to subjective manual installation, resulting in inconsistent actual heating capabilities of different heating systems, and thus inconsistent heating temperatures of different heating systems, which also makes it impossible to accurately control the overall process accuracy. Summary of the Utility Model

[0004] Embodiments of the utility model provide a temperature control system and an atomic layer deposition device, aiming to improve the heating control accuracy in the atomic layer deposition device.

[0005] Embodiments of the utility model provide a temperature control system, which is applied to an atomic layer deposition device. The atomic layer deposition device includes a reaction chamber arranged above the temperature control system. The temperature control system includes:

[0006] A heating part, arranged on one side of the reaction chamber;

[0007] A cooling part, arranged on the side of the heating part away from the reaction chamber, wherein at least one of the heating part and the cooling part is movably arranged;

[0008] An adjusting part, connected to the heating part and / or the cooling part, for adjusting the distance between the heating part and the cooling part;

[0009] A control unit, connected to the adjusting part, for collecting the heating temperature of the heating part and controlling the adjusting part according to the heating temperature to adjust the distance between the heating part and the cooling part.

[0010] Further, the adjusting part includes:

[0011] A driving component, connected to the control unit;

[0012] At least one adjusting member, one end of which is connected to the driving assembly and the other end is connected to the cooling part or the heating part; wherein, the driving assembly can drive the adjusting member to adjust the distance between the heating part and the cooling part.

[0013] Furthermore, the adjusting part further includes an elastic member disposed between the heating part and the cooling part.

[0014] Furthermore, the adjusting member is a lead screw, and the driving assembly includes:

[0015] A driving motor, connected to the control unit;

[0016] A driving wheel, connected to the driving motor through a transmission belt, for driving the lead screw to move up and down.

[0017] Furthermore, the adjusting part includes a dimension measuring member, the dimension measuring member is disposed on a side of the cooling part away from the reaction chamber, and one end of the dimension measuring member is connected to the cooling part or the heating part; wherein, the dimension measuring member can adjust the distance between the heating part and the cooling part.

[0018] Furthermore, there are at least 3 differential heads, and they are not on the same straight line.

[0019] Furthermore, the heating part is fixedly arranged, and the cooling part is movably arranged.

[0020] Furthermore, the heating part is movably arranged, and the cooling part is fixedly arranged.

[0021] The embodiment of the present utility model further provides an atomic layer deposition device, including the temperature control system described in any one of the above.

[0022] An embodiment of the present utility model provides a temperature control system and an atomic layer deposition device. The temperature control system is applied to the atomic layer deposition device, and the atomic layer deposition device includes a reaction chamber. The temperature control system includes: a heating part disposed on one side of the reaction chamber; a cooling part disposed on the side of the heating part away from the reaction chamber, wherein at least one of the heating part and the cooling part is movably arranged; an adjusting part connected to the heating part and / or the cooling part for adjusting the distance between the heating part and the cooling part; a control unit connected to the adjusting part for collecting the heating temperature and heating time of the heating part and controlling the adjusting part according to the heating temperature and heating time to adjust the distance between the heating part and the cooling part. The temperature control system described in the embodiment of the present utility model includes a heating part, a cooling part, and an adjusting part disposed between the heating part and the cooling part, and also includes a control unit. The control unit collects the heating temperature of the heating part and then adjusts the adjusting part according to the collected heating temperature, so that the adjusting distance of the adjusting part changes, thereby changing the distance between the heating part and the cooling part, and thus precise heating control of the atomic layer deposition device can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0024] Figure 1 It is a schematic structural diagram of a temperature control system provided by an embodiment of the present utility model;

[0025] Figure 2 It is a schematic structural diagram of an atomic layer deposition device provided by an embodiment of the present utility model;

[0026] Figure 3 It is another schematic structural diagram of a temperature control system provided by an embodiment of the present utility model;

[0027] Figure 4 It is a schematic flow diagram of a temperature control method provided by an embodiment of the present utility model;

[0028] Figure 5 It is a schematic sub - flow diagram of a temperature control method provided by an embodiment of the present utility model. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0029] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0030] It should be understood that when used in this specification and the appended claims, the terms "comprises" and "comprising" indicate the presence of the described features, wholes, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, wholes, steps, operations, elements, components, and / or their combinations.

[0031] It should also be understood that the terms used in this specification of the present utility model are only for the purpose of describing specific embodiments and are not intended to limit the present utility model. As used in this specification of the present utility model and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an", and "the" are intended to include the plural forms.

[0032] It should be further understood that the term "and / or" used in this specification of the present utility model and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0033] Please refer to the following Figures 1 to 3 , the embodiments of the present utility model provide a temperature control system 1, which is applied to an atomic layer deposition device. The atomic layer deposition device includes a reaction chamber 2. The temperature control system includes:

[0034] A heating part 11, which is arranged on one side of the reaction chamber 2;

[0035] A cooling part 12, which is arranged on the side of the heating part 11 away from the reaction chamber 2, wherein at least one of the heating part 11 and the cooling part 12 is movably arranged;

[0036] An adjusting part 13, which is connected to the heating part 11 and / or the cooling part 12 and is used to adjust the distance between the heating part 11 and the cooling part 12;

[0037] A control unit, which is connected to the adjusting part 13 and is used to collect the heating temperature of the heating part 11 and control the adjusting distance of the adjusting part 13 according to the heating temperature to adjust the distance between the heating part 11 and the cooling part 12.

[0038] The temperature control system 1 described in this embodiment includes a heating part 11, a cooling part 12, and an adjusting part 13 connected to the heating part 11 and / or the cooling part 12. Specifically, the reaction chamber 2 can be arranged above the temperature control system 1. In this way, the heating part 11 is arranged below the reaction chamber 2, and the cooling part 12 is arranged below the heating part 11. At the same time, the temperature control system 1 further includes a control unit. The heating temperature of the heating part 11 is collected through this control unit, and then the adjusting part 13 is adjusted according to the collected heating temperature, so that the adjusting distance of the adjusting part 13 changes, and thus the distance between the heating part 11 and the cooling part 12 changes. In this way, precise heating control of the atomic layer deposition equipment can be achieved.

[0039] In a specific embodiment, when the control unit controls the adjusting distance of the adjusting part 13 according to the heating temperature to adjust the distance between the heating part 11 and the cooling part 12, specifically, the heating temperature can be first compared with a preset temperature threshold; when the heating temperature is equal to the preset temperature threshold, the adjusting distance of the adjusting part 13 is controlled to remain unchanged, that is, there is no need to adjust the distance between the heating part 11 and the cooling part 12; when the heating temperature is lower than the preset temperature threshold, the heating time is compared with a preset time threshold; here, it can be understood that the heating temperature will increase with the increase of the heating time. Therefore, when the heating temperature is lower than the preset temperature threshold, it is necessary to continue to confirm whether it is due to insufficient heating time. If the heating time does not reach the preset time threshold, the adjusting distance of the adjusting part 13 is controlled to remain unchanged; if the heating time reaches the preset time threshold, the adjusting distance of the adjusting part 13 is controlled to become longer, so that the distance between the heating part 11 and the cooling part 12 becomes larger.

[0040] In addition, it should be noted that during the heating process of the atomic layer deposition equipment, the heating temperature usually does not exceed the preset temperature threshold. However, if the heating temperature exceeds the preset temperature threshold in an extreme case, control can also be carried out based on the temperature control system 1 described above, that is, the control unit controls the length of the adjusting part 13 to shorten, so that the cooling part 12 is closer to the heating part 11, thereby improving the cooling effect of the cooling part 12 and reducing the heating temperature of the heating part 11. That is to say, in this embodiment, the control unit can control the adjusting distance of the adjusting part 13 to change the distance between the heating part 11 and the cooling part 12, so as to achieve the effect of heating up or cooling down.

[0041] In an actual application scenario, the corresponding relationship between the spacing between the heating part 11 and the cooling part 12 and the heating temperature can be confirmed through experimental verification, and then the adjusting part 13 can be adjusted according to the corresponding relationship. For example, when the spacing between the heating part 11 and the cooling part 12 is a1, the cooling temperature of the cooling part 12 for the heating part 11 is b1 (that is, when the spacing between the heating part 11 and the cooling part 12 is a1, the difference between the temperature generated by the heating part 11 itself and the temperature after the cooling part 12 cools the heating part 11 is b1). When the spacing between the heating part 11 and the cooling part 12 is a2, the cooling temperature of the cooling part 12 for the heating part 11 is b2, ……, when the spacing between the heating part 11 and the cooling part 12 is an, the cooling temperature of the cooling part 12 for the heating part 11 is bn. Among them, the spacings a1 to an increase in sequence, and the cooling temperatures b1 to bn decrease in sequence, that is, the smaller the spacing between the heating part 11 and the cooling part 12, the stronger the cooling effect of the cooling part 12. On the contrary, the larger the spacing between the heating part 11 and the cooling part 12, the weaker the cooling effect of the cooling part 12. Based on the above corresponding relationship, when the heating temperature collected by the control unit is lower than the preset temperature threshold, the temperature difference between the heating temperature and the preset temperature threshold is further obtained, and then the corresponding relationship is queried according to the temperature difference to obtain the corresponding spacing, so as to adjust the current spacing according to the queried spacing.

[0042] In another specific embodiment, the heating part 11 is a heating plate with a heating wire arranged inside, and the cooling part 12 is a cooling part 12 filled with a coolant inside. Of course, in other embodiments, other heating devices can also be used as the heating part 11, and other cooling devices can be used as the cooling part 12. For example, a heating rod can be used as the heating part 11, and a cooling fan can be used as the cooling part 12, etc.

[0043] In one embodiment, the adjusting part 13 includes:

[0044] A driving component 131, connected to the control unit;

[0045] At least one adjusting member 132, one end of which is connected to the driving component 131, and the other end is connected to the cooling part 12 or the heating part 11; wherein, the driving component 131 can drive the adjusting member 132 to adjust the spacing between the heating part 11 and the cooling part 12.

[0046] In this embodiment, combined with Figure 1, the adjusting part 13 specifically includes a driving component 131 and an adjusting member 132, that is, the driving component 131 drives the adjusting member 132 to adjust the distance between the heating part 11 and the cooling part 12. Specifically, the driving component 131 includes: a driving motor 1311, connected to the control unit; a driving wheel 1312, connected to the driving motor 1311 through a transmission belt 1313, and used to drive the adjusting member 132 to move up and down. For example, a synchronous pulley is used as the driving wheel 1312 and is connected to the driving motor 1311 through the transmission belt 1313. In this way, when the driving motor 1311 works, the driving wheel 1312 is driven to move through the transmission belt 1313, and then the adjusting member 132 is driven to move. Further, the adjusting member 132 is a lead screw. By using a lead screw as the adjusting member 132, the rotary motion can be converted into a linear motion to realize the adjustment of the distance between the heating part 11 and the cooling part 12.

[0047] In addition, the adjusting part 13 further includes an elastic member 133 disposed between the heating part 11 and the cooling part 12. By providing the elastic member 133 between the heating part 11 and the cooling part 12, it is possible to avoid hard collisions between the heating part 11 and the cooling part 12 during the process of adjusting the distance between the heating part 11 and the cooling part 12 by the adjusting member 132. Specifically, a disc spring is used as the elastic member 133. The so-called disc spring is a disc-shaped spring, which is conical in shape and can be used alone or in series or parallel. It bears static or dynamic loads acting axially at the upper inner edge and the lower outer edge, and deforms after being compressed until it is flattened to store energy in the form of live load.

[0048] In another embodiment, the adjusting part 13 includes a dimension measuring member 134. The dimension measuring member 134 is disposed on the side of the cooling part 12 away from the reaction chamber 2, and one end of the dimension measuring member 134 is connected to the cooling part 12 or the heating part 11; wherein, the dimension measuring member 134 can adjust the distance between the heating part 11 and the cooling part 12.

[0049] In this embodiment, combined with Figure 3 , using the dimension measuring member 134 as the adjusting part 13, in this way, when adjusting the distance between the heating part 11 and the cooling part 12, the accuracy of the distance adjustment can be further improved depending on the accuracy of the dimension measuring member 134, thereby further improving the heating control effect.

[0050] Specifically, the dimension measuring member 134 is a differential head. By adjusting the differential head, the temperature of the temperature control system 1 can be precisely adjusted to ensure the process requirements.

[0051] In addition, it should be noted that at least three differential heads are provided in this embodiment and they are not on the same straight line. In this way, when using differential heads, the effect of convenient installation can also be achieved. That is, when connecting the cooling part 12 and the heating part 11 through the differential head, no additional tools such as torque wrenches are required, and the differential head can be directly adjusted to achieve installation and fixation, with convenient operation and high installation efficiency. In the actual application scenario, the temperature control system 1 is fixed to the bottom of the reaction chamber 2 by bolts. By adjusting the differential heads in three directions (i.e., three non-collinear points can determine a plane), not only can the distance between the heating plate and the water-cooled plate be adjusted, and the adjustment accuracy can reach 0.01 mm, but also the precise assembly of the temperature control system 1 can be achieved. Preferably, after the adjustment is in place, rotate the locking knob on the differential head to prevent the differential head from moving, and then tighten the bolts to achieve fixed installation.

[0052] In one embodiment, the heating part 11 is fixedly arranged, and the cooling part 12 is movably arranged.

[0053] Based on the above description of the adjusting member 132 and the dimension measuring member 134, when the heating part 11 is fixedly arranged, the adjusting member 132 or the dimension measuring member 134 is connected to the cooling part 12 to drive the cooling part 12 to approach or move away from the heating part 11, so as to achieve the purpose of adjusting the distance between the heating part 11 and the cooling part 12.

[0054] In another embodiment, the heating part 11 is movably arranged, and the cooling part 12 is fixedly arranged.

[0055] Based on the above description of the adjusting member 132 and the dimension measuring member 134, when the cooling part 12 is fixedly arranged, the adjusting member 132 or the dimension measuring member 134 is connected to the heating part 11 to drive the heating part 11 to approach or move away from the cooling part 12, so as to achieve the purpose of adjusting the distance between the heating part 11 and the cooling part 12.

[0056] In yet another embodiment, both the heating part 11 and the cooling part 12 are movably arranged. When both the heating part 11 and the cooling part 12 are movably arranged, adjusting members 132 or dimension measuring members 134 can be respectively provided for the heating part 11 and the cooling part 12. In this way, the cooling part 12 can be driven to approach or move away from the heating part 11 by the adjusting members 132 or the dimension measuring members 134, and the heating part 11 can also be driven to approach or move away from the cooling part 12 by the adjusting members 132 or the dimension measuring members 134. Thus, the purpose of adjusting the distance between the heating part 11 and the cooling part 12 can also be achieved. For example, when it is necessary to increase the distance between the heating part 11 and the cooling part 12, on the one hand, the heating part 11 can be driven to move away from the cooling part 12 by the adjusting members 132 or the dimension measuring members 134, and on the other hand, the cooling part 12 can be driven to move away from the heating part 11 by the adjusting members 132 or the dimension measuring members 134.

[0057] As Figure 4 shown, an embodiment of the present invention also provides a temperature control method, which is applied to the temperature control system 1 described in any one of the above. The method includes: steps S101 to S102.

[0058] Step S101, collect the heating temperature of the heating part 11;

[0059] Step S102, control the adjustment distance of the adjustment part 13 according to the heating temperature to adjust the distance between the heating part 11 and the cooling part 12.

[0060] In this embodiment, by collecting the heating temperature of the heating part 11 and then adjusting the adjustment distance of the adjustment part 13 according to the collected heating temperature, the distance between the heating part 11 and the cooling part 12 is changed, so that precise heating control of the atomic layer deposition equipment can be realized.

[0061] In an actual application scenario, the implementation subject of the temperature control method provided in this embodiment can be the control unit in the temperature control system 1, or other servers or control terminals.

[0062] As Figure 5 shown, in one embodiment, the step S102 includes: steps S201 to S205.

[0063] Step S201, compare the heating temperature with a preset temperature threshold;

[0064] Step S202, when the heating temperature is equal to the preset temperature threshold, control the adjustment distance of the adjustment part 13 to remain unchanged;

[0065] Step S203: When the heating temperature is lower than the preset temperature threshold, compare the heating time with the preset time threshold.

[0066] Step S204: If the heating time does not reach the preset time threshold, control the adjustment distance of the adjustment part 13 to remain unchanged.

[0067] Step S205: If the heating time reaches the preset time threshold, control the adjustment distance of the adjustment part 13 to become longer, so as to increase the distance between the heating part 11 and the cooling part 12.

[0068] In this embodiment, when adjusting the distance between the heating part 11 and the cooling part 12 according to the heating temperature and the heating time, first compare the collected heating temperature with the preset temperature threshold. When the heating temperature is equal to the preset temperature threshold, there is no need to adjust the adjustment distance of the adjustment part 13, that is, keep the current distance between the heating part 11 and the cooling part 12 unchanged; when the heating temperature does not reach the preset temperature threshold, further judge and compare in combination with the heating time. Specifically, if the heating time does not reach the preset time threshold, it indicates that the low heating temperature at this time is due to insufficient heating time, so the current distance between the heating part 11 and the cooling part 12 is still kept unchanged; if the heating time reaches the preset time threshold, it indicates that the low heating temperature at this time is not caused by insufficient heating time, so at this time, by controlling the adjustment distance of the adjustment part 13, the distance between the heating part 11 and the cooling part 12 is increased to reduce the cooling effect of the cooling part 12, so as to achieve the purpose of enhancing the heating effect of the heating part 11.

[0069] Here, during the heating process of the atomic layer deposition equipment, generally, the heating temperature will not be higher than the preset temperature threshold. And if in extreme cases, the heating temperature is higher than the preset temperature threshold, then it can also be controlled based on the temperature control system 1 described above, that is, the control unit controls the length of the adjustment part 13 to be shortened, so that the cooling part 12 is closer to the heating part 11, thereby improving the cooling effect of the cooling part 12 and reducing the heating temperature of the heating part 11. That is to say, this embodiment can control the adjustment distance of the adjustment part 13 through the control unit to change the distance between the heating part 11 and the cooling part 12, so as to achieve the effect of increasing or decreasing the temperature.

[0070] The embodiment of the present utility model also provides an atomic layer deposition equipment, including the temperature control system 1 described in any one of the above.

[0071] The various embodiments in the specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. For the same or similar parts among the embodiments, reference can be made to each other. For the system disclosed in the embodiments, since it corresponds to the method disclosed in the embodiments, the description is relatively simple. For the relevant parts, reference can be made to the description in the method section. It should be noted that for those of ordinary skill in the art in this technical field, without departing from the principle of this application, several improvements and modifications can be made to this application, and these improvements and modifications also fall within the protection scope of the claims of this application.

[0072] It should also be noted that in this specification, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variation thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "comprising an..." does not exclude the presence of another identical element in the process, method, article or device comprising the element.

Claims

1. A temperature control system is applied to an atomic layer deposition apparatus, and the atomic layer deposition apparatus includes a reaction chamber, characterized in that, The temperature control system includes: a heating part, arranged on one side of the reaction chamber; a cooling part, arranged on the side of the heating part away from the reaction chamber, wherein at least one of the heating part and the cooling part is movably arranged; an adjusting part, connected to the heating part and / or the cooling part, for adjusting the distance between the heating part and the cooling part; a control unit, connected to the adjusting part, for collecting the heating temperature of the heating part and controlling the adjusting part according to the heating temperature to adjust the distance between the heating part and the cooling part.

2. The temperature control system according to claim 1, wherein The adjusting part includes: a driving assembly, connected to the control unit; at least one adjusting member, one end of which is connected to the driving assembly and the other end is connected to the cooling part or the heating part; wherein the driving assembly can drive the adjusting member to adjust the distance between the heating part and the cooling part.

3. The temperature control system according to claim 2, wherein The adjusting part further includes an elastic member arranged between the heating part and the cooling part.

4. The temperature control system according to claim 2, wherein The adjusting member is a lead screw, and the driving assembly includes: a driving motor, connected to the control unit; a driving wheel, connected to the driving motor through a transmission belt, for driving the lead screw to move.

5. The temperature control system according to claim 1, characterized in that, The adjusting part includes a dimension measuring member, the dimension measuring member is arranged on the side of the cooling part away from the reaction chamber, and one end of the dimension measuring member is connected to the cooling part or the heating part; wherein the dimension measuring member can adjust the distance between the heating part and the cooling part.

6. The temperature control system according to claim 5, wherein, The dimension measuring member is a micrometer head.

7. The temperature control system according to claim 6, characterized in that, There are at least 3 micrometer heads, and they are not on the same straight line.

8. The temperature control system according to claim 2 or 5, characterized in that, The heating part is fixedly arranged, and the cooling part is movably arranged.

9. The temperature control system according to claim 2 or 5, characterized in that, The heating part is movably arranged, and the cooling part is fixedly arranged.

10. An atomic layer deposition apparatus, characterized in that, It includes the temperature control system according to any one of claims 1 to 7.

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