Probe card finished product detection equipment

Abstract

The utility model relates to the technical field of probe cards, and discloses probe card finished product detection equipment, which comprises a main body, a clamping plate is slidably connected in the main body, a connecting pipe is fixedly mounted on the inner side of the clamping plate, a moving rod is movably sleeved in the connecting pipe, and one end, extending out of the connecting pipe, of the moving rod is movably connected with a positioning plate. Gaskets are fixedly installed on the outer sides of the positioning plates, first springs are fixedly connected between the clamping plates and the moving rods, sliding grooves are formed in the two sides of the inner wall of the connecting pipe, inner cavities of the sliding grooves are slidably connected with sliding blocks, and the sliding blocks are fixedly connected with the moving rods. According to the utility model, the clamping plate gets close to the middle, the positioning plate is extruded and swings and is fixed according to the model of the probe card along with the contact of the gasket with the probe card, the moving rod is stressed by the positioning plate, and the sliding blocks at the two sides of the moving rod contract towards the sliding grooves in the connecting pipe to extrude the spring I; and the probe cards with different sizes and models can be fixed by the ten connecting pipes arranged on the inner sides of the clamping plates.

Description

Technical Field

[0001] The utility model relates to the technical field of probe cards, and more specifically, the utility model relates to a finished product detection device for probe cards. Background Art

[0002] A probe card is a test interface, mainly used for testing bare chips. By connecting a tester and a chip to transmit signals, chip parameters are tested. The probes on the probe card are directly in contact with the pads or bumps on the chip to draw out the chip signals, and then cooperate with peripheral test instruments and software control to achieve the purpose of automatic measurement. The existing probe card detection equipment can only fix specific models and is not suitable for models of different sizes, thus affecting the smooth progress of detection. Content of the Utility Model

[0003] In order to overcome the deficiencies of the prior art, the utility model provides a finished product detection device for probe cards, which has the advantage of being able to place any probe card model.

[0004] To achieve the above object, the utility model provides the following technical solution: A finished product detection device for probe cards, including a main body. A clamping plate is slidably connected inside the main body. A connecting pipe is fixedly installed inside the clamping plate. A moving rod is movably sleeved inside the connecting pipe. One end of the moving rod extending out of the connecting pipe is movably connected with a positioning plate. A gasket is fixedly installed on the outer side of the positioning plate. A first spring is fixedly connected between the clamping plate and the moving rod. Two sides of the inner wall of the connecting pipe are provided with chutes. A slider is slidably connected inside the cavity of the chute. The slider is fixedly connected with the moving rod.

[0005] As a preferred technical solution of the utility model, a placement table is fixedly installed inside the main body. A placement rod is slidably connected in the middle of the placement table. An extrusion block is slidably connected inside the middle of the placement table. A second spring is in contact with the left side of the extrusion block. A first pull rope is fixedly connected to the right side of the extrusion block. The other end of the first pull rope is fixedly connected with a limiting rod. A third spring is in contact with the bottom end of the limiting rod. Clamping blocks are fixedly installed at the left and right ends of the clamping plate. A fourth spring is in contact with the side surface of the clamping block. A second pull rope is fixedly connected to the side of the clamping block away from the center of the main body. The other end of the second pull rope is fixedly connected with a first gear. A second gear is meshed with the upper surface of the first gear. A third gear is meshed with the side surface of the second gear. A tension plate is meshed with the upper surface of the third gear. A tension rod is fixedly installed on the top surface of the tension plate.

[0006] As a preferred technical solution of the utility model, the clamping plate is composed of a semi-circular ring and connecting rods at both ends. There are ten connecting pipes. The positioning plate is semi-circular and has a semi-circular step extending at the bottom.

[0007] As a preferred technical solution of the present utility model, the placement table is circular and is five millimeters higher than the gasket, and a part of the top end of the placement rod extends out on the top surface of the placement table.

[0008] As a preferred technical solution of the present utility model, the protruding side at the bottom end of the placement rod is semi-circular, and the end surface of the extrusion block in contact with the placement rod is [angle] degrees.

[0009] As a preferred technical solution of the present utility model, the top end of the limiting rod is an end surface of [angle] degrees, and there are protrusions on both sides at the bottom end of the limiting rod.

[0010] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0011] 1. In the present utility model, the clamping plates move closer to the middle. As the gasket comes into contact with the probe card, the positioning plate is squeezed and swings and is fixed according to the model of the probe card. The moving rod receives the force from the positioning plate, and the sliders on both sides of the moving rod contract into the sliding grooves in the connecting pipes to squeeze the first spring. The ten connecting pipes arranged on the inner sides of the clamping plates achieve the fixation of probe cards of different sizes and models.

[0012] 2. In the present utility model, the probe card is gently pressed on the placement rod in the middle of the placement table. The placement rod under the gentle pressure will press down the extrusion block. The extrusion block pulls the first pull rope. The first pull rope pulls the limiting rod downward. The limiting rod being pulled downward releases the clamping block. After the clamping block is released by the compressed fourth spring, it is pushed to move. The clamping block drives the clamping plates to move closer to the middle, realizing the automatic clamping of the probe card. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is a schematic structural diagram of the present utility model;

[0014] Figure 2 is a schematic diagram of the main body structure of the present utility model;

[0015] Figure 3 is a schematic semi-sectional view of the main body structure of the present utility model;

[0016] Figure 4 is a schematic diagram of the connection of the fourth spring in the structure of the present utility model;

[0017] Figure 5 is of the present utility Figure 2 enlarged view of part A;

[0018] Figure 6 is of the present utility Figure 3 enlarged view of part B;

[0019] Figure 7 is of the present utility Figure 4 enlarged view of part C;

[0020] Figure 8 This is a utility Figure 3 Enlarged view of part D of the present invention.

[0021] In the figure: 1, main body; 2, clamping plate; 3, connecting pipe; 4, first spring; 5, moving rod; 6, positioning plate; 7, gasket; 8, chute; 9, slider; 10, placing table; 11, placing rod; 12, extrusion block; 13, second spring; 14, first pull rope; 15, limiting rod; 16, third spring; 17, clamping block; 18, fourth spring; 19, second pull rope; 20, first gear; 21, second gear; 22, third gear; 23, tension plate; 24, tension rod; 25, microscope. Specific implementation mode

[0022] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0023] As Figures 1 to 8 shown, the present invention provides a probe card finished product detection device, including a main body 1. A clamping plate 2 is slidably connected inside the main body 1. A connecting pipe 3 is fixedly installed inside the clamping plate 2. A moving rod 5 is movably sleeved inside the connecting pipe 3. One end of the moving rod 5 extending out of the connecting pipe 3 is movably connected to a positioning plate 6. A gasket 7 is fixedly installed outside the positioning plate 6. A first spring 4 is fixedly connected between the clamping plate 2 and the moving rod 5. Chutes 8 are opened on both sides of the inner wall of the connecting pipe 3. A slider 9 is fitted inside the chute 8. Sliders 9 are fixedly installed on the left and right sides of the moving rod 5.

[0024] By moving the clamping plate 2 closer to the middle, as the gasket 7 contacts the probe card, the positioning plate 6 is squeezed and fixed according to the model of the probe card. The moving rod 5 is subjected to the force of the positioning plate 6, and the sliders 9 on both sides of the moving rod 5 contract and squeeze the first spring 4 into the chute 8 inside the connecting pipe 3.

[0025] Among them, a placement table 10 is fixedly installed inside the main body 1. A placement rod 11 is slidably connected to the middle of the placement table 10. The bottom end of the placement rod 11 contacts an extrusion block 12. A second spring 13 contacts the left side of the extrusion block 12. A first pull rope 14 is fixedly connected to the right side of the extrusion block 12. The other end of the first pull rope 14 is fixedly connected to a limiting rod 15. The bottom end of the limiting rod 15 contacts a third spring 16. Clamping blocks 17 are fixedly installed at both ends of the clamping plate 2. A fourth spring 18 contacts the side surface of the clamping block 17. A second pull rope 19 is fixedly connected to the side of the clamping block 17 away from the center of the main body 1. The other end of the second pull rope 19 is fixedly connected to a first gear 20. A second gear 21 meshes with the upper surface of the first gear 20. A third gear 22 meshes with the side surface of the second gear 21. A tension plate 23 meshes with the upper surface of the third gear 22. A tension rod 24 is fixedly installed on the top surface of the tension plate 23.

[0026] By gently pressing the placement rod 11 in the middle of the placement table 10 with the probe card, the pressed placement rod 11 will squeeze the extrusion block 12 downward. The extrusion block 12 pulls the first pull rope 14. The first pull rope 14 pulls the limiting rod 15 downward. The downward pulled limiting rod 15 releases the clamping block 17. The clamping block 17 is pushed toward the middle by the restricted fourth spring 18. The clamping block 17 drives the clamping plate 2 to move closer to the middle.

[0027] Among them, the clamping plate 2 is composed of a semi-circular ring and connecting rods at both ends. There are ten connecting pipes 3. The positioning plate 6 is semi-circular and has a semi-circular step extending at the bottom.

[0028] With the semi-circular shape of the clamping plate 2 and the ten connecting pipes 3, different models of probe cards can be clamped more stably. The semi-circular step at the bottom of the positioning plate 6 can prevent the probe card from falling off.

[0029] Among them, the placement table 10 is circular and is five millimeters higher than the gasket 7. The top end of the placement rod 11 extends out a part on the top surface of the placement table 10.

[0030] With the circular shape of the placement table 10, it is convenient to pick up the probe card. And being five millimeters higher than the gasket 7 can prevent the gasket 7 from not clamping the probe card.

[0031] Among them, the protruding side at the bottom end of the placement rod 11 is semi-circular. One end of the extrusion block 12 in contact with the placement rod 11 is at a 45-degree angle.

[0032] The semi-circular shape can make the downward pressure more smooth. And the 45-degree end of the extrusion block 12 can reduce the downward pressure.

[0033] Among them, the top end of the limiting rod 15 is a 45-degree end face. There are protrusions on both sides of the bottom end of the limiting rod 15.

[0034] The 45-degree end of the limiting rod 15 can reduce the downward pressure of the clamping block 17. And the protrusions of the limiting rod 15 can prevent it from being pushed out by the third spring 16.

[0035] The working principle and usage process of the present utility model are as follows: The probe card is placed on the placement table 10 and gently pressed. The placement rod 11 is pushed downward by the transmitted force to squeeze the extrusion block 12. The extrusion block 12 is pushed to move laterally to squeeze the second spring 13. While the extrusion block 12 moves, it pulls the first pull rope 14. The pulled first pull rope 14 simultaneously pulls the limit rod 15. The limit rod 15 is pulled downward to squeeze the third spring 16. The downward pulled limit rod 15 releases the clamping block 17. The clamping block 17 is pushed to move after being released by the compressed fourth spring 18. The clamping block 17 drives the clamping plate 2 to move closer to the middle. As the gasket 7 contacts the probe card, the positioning plate 6 will be squeezed and swing left and right to be fixed according to the model of the probe card. The moving rod 5 receives the force transmitted by the positioning plate 6 and contracts into the chute 8 in the connecting pipe 3 through the sliders 9 on both sides of the moving rod 5, squeezing the first spring 4 until it is completely fixed. Then, use the microscope 25 to observe and detect whether the finished probe card is qualified;

[0036] When taking it out, pull the pull rod 24 backward. The pull rod 24 transmits the force to the pull plate 23. The pull plate 23 drives the third gear 22 backward. The third gear 22 drives the second gear 21. The second gear 21 drives the first gear 20. The first gear 20 pulls the second pull rope 19 to wind together. The pulled second pull rope 19 drives the clamping block 17 backward. Until after squeezing the limit rod 15, the limit rod 15 will block the fourth spring 18 and will not continue to move forward. Subsequently, when taking it out, the second spring 13 that was squeezed by the placement rod 11 pushes the extrusion block 12 back. The extrusion block 12 pushes the placement rod 11 upward to restore it to its original state.

[0037] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or elements inherent to such process, method, article or device.

[0038] Although the embodiments of the present utility model have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A finished probe card detection device, comprising a main body (1), characterized in that: A clamping plate (2) is slidably connected inside the main body (1). A connecting pipe (3) is fixedly installed inside the clamping plate (2). A moving rod (5) is movably sleeved inside the connecting pipe (3). One end of the moving rod (5) extending out of the connecting pipe (3) is movably connected to a positioning plate (6). A gasket (7) is fixedly installed on the outer side of the positioning plate (6). A first spring (4) is fixedly connected between the clamping plate (2) and the moving rod (5). Two sides of the inner wall of the connecting pipe (3) are provided with chutes (8). A slider (9) is slidably connected inside the cavity of the chute (8). The slider (9) is fixedly connected to the moving rod (5).

2. The probe card finished product detection device according to claim 1, characterized in that: A placing table (10) is fixedly installed inside the main body (1). A placing rod (11) is slidably connected in the middle of the placing table (10). An extrusion block (12) is slidably connected inside the middle of the placing table (10). A second spring (13) is in contact with the left side of the extrusion block (12). A first pull rope (14) is fixedly connected to the right side of the extrusion block (12). The other end of the first pull rope (14) is fixedly connected to a limiting rod (15). A third spring (16) is in contact with the bottom end of the limiting rod (15). Clamping blocks (17) are fixedly installed at the left and right ends of the clamping plate (2). A fourth spring (18) is in contact with the side surface of the clamping block (17). A second pull rope (19) is fixedly connected to the side of the clamping block (17) away from the center of the main body (1). The other end of the second pull rope (19) is fixedly connected to a first gear (20). A second gear (21) is meshed with the upper surface of the first gear (20). A third gear (22) is meshed with the side surface of the second gear (21). A tension plate (23) is meshed with the upper surface of the third gear (22). A tension rod (24) is fixedly installed on the top surface of the tension plate (23).

3. The a finished probe card detection device according to claim 1, characterized in that: The clamping plate (2) is composed of a semi-circular ring and connecting rods at both ends. There are ten connecting pipes (3). The positioning plate (6) is semi-circular and has a semi-circular step extending at the bottom.

4. The probe card finished product detection device according to claim 2, wherein: The placing table (10) is circular and is five millimeters higher than the gasket (7). The top end of the placing rod (11) extends out a part on the top surface of the placing table (10).

5. The a finished probe card detection device according to claim 2, characterized in that: One side of the bottom end of the placing rod (11) protruding is semi-circular. One end of the extrusion block (12) in contact with the placing rod (11) is an end surface at 45 degrees.

6. The probe card finished product detection device according to claim 2, characterized in that: The top end of the limiting rod (15) is an end surface at 45 degrees. There are protrusions on both sides of the bottom end of the limiting rod (15).

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