Probe station

Abstract

The utility model discloses a probe station. The probe station comprises a translation assembly, a swing driving part, a probe arm and a probe, the swing driving part is connected with the translation assembly so as to reciprocate in the first direction, the second direction and the third direction which are perpendicular in pairs under the action of the translation assembly. One end of the probe arm is connected with the swing driving part so as to rotate around an axis parallel to the third direction under the action of the swing driving part; the probe is connected to one end, far away from the swing driving part, of the probe arm; according to the probe station, the translation assembly and the swing driving member drive the probe arm to drive the probe to move, so that the probe can test a plurality of products. As the probe arm can rotate under the action of the swing driving piece, compared with linear movement of the probe arm in the three-dimensional direction, rotation of the probe arm can effectively increase the movement range of the probe, so that the test range of the probe is increased, more products are tested, and the test efficiency is improved.

Description

Technical Field

[0001] This application belongs to the technical field of semiconductor testing, and particularly relates to a probe station. Background Art

[0002] The probe station is an indispensable device in semiconductor testing and can be used for wafer inspection, chip R & D, and failure analysis in the wafer manufacturing process. The probe station can be classified into manual, semi-automatic, and fully automatic types according to the operation mode. Its main components include a stage, optical elements, and probes, etc. The stage is used to carry the product to be tested, and the optical elements are used to magnify and observe the product to be tested, so as to accurately align the probe tip and place it on the measurement point of the product to be tested.

[0003] The existing probes usually move in three directions through a three-dimensional device to test multiple products and different measurement points on the stage. Since the stage is placed in a sealed cavity and the three-dimensional device is located outside the sealed cavity, the three-dimensional device is connected to the probe through a probe arm penetrating the inner wall of the sealed cavity. To ensure the sealing performance, the diameter of the hole on the inner wall of the sealed cavity through which the probe arm passes is limited, which limits the moving range of the probe and results in a small test range of the probe. Summary of the Utility Model

[0004] The technical problem to be solved by this application is that the existing probe has a small test range. To solve the above technical problem, a probe station capable of increasing the test range of the probe is provided.

[0005] The technical solution proposed by this application is as follows:

[0006] A probe station, comprising:

[0007] A translation assembly;

[0008] A swing driving member, connected to the translation assembly to reciprocate along a first direction, a second direction, and a third direction under the action of the translation assembly;

[0009] A probe arm, one end of which is connected to the swing driving member to rotate around an axis parallel to the third direction under the action of the swing driving member;

[0010] A probe, connected to the end of the probe arm far from the swing driving member;

[0011] Wherein, the first direction, the second direction, and the third direction are perpendicular to each other in pairs.

[0012] Further, the translation component includes a first driving member, a second driving member, and a third driving member connected in sequence. The first driving member drives the second driving member to reciprocate along the first direction, the second driving member drives the third driving member to reciprocate along the second direction, and the third driving member is connected to the swing driving member to drive the swing driving member to reciprocate along the third direction.

[0013] Further, the probe station further includes a base, a sealed chamber, and a stage. The sealed chamber and the translation component are both disposed on the base, and the translation component and the swing driving member are located outside the sealed chamber. The sealed chamber has a sealed cavity. One end of the probe arm away from the swing driving member extends into the sealed cavity, and the stage is disposed in the sealed cavity.

[0014] Further, the probe station further includes an input component and an output component. The input component and the output component are both connected to the sealed chamber and communicate with the sealed cavity. The input component is used to input a cooling medium into the sealed cavity, and the output component can discharge the medium in the sealed cavity;

[0015] The probe station further includes a temperature detector for detecting the temperature in the sealed cavity.

[0016] Further, the probe station further includes a pressure relief valve disposed on the sealed chamber and communicating with the sealed cavity.

[0017] Further, the sealed chamber includes a support platform, a fixed cover, and a sealing cover. The support platform is disposed on the base, the fixed cover is disposed on the support platform, and the sealing cover is disposed on the fixed cover. The support platform, the fixed cover, and the sealing cover enclose to form the sealed cavity;

[0018] The fixed cover is provided with a probe window communicating with the sealed cavity, and the probe arm extends into the sealed cavity through the probe window.

[0019] Further, the probe station further includes a connecting seat and a sealing member. The swing driving member is connected to the connecting seat, one end of the probe arm is connected to the connecting seat, both ends of the sealing member are hermetically connected to the fixed cover and the connecting seat respectively, and the sealing member has a sealing channel communicating with the probe window. One end of the probe arm connected to the connecting seat is located in the sealing channel.

[0020] Further, the sealing cover is provided with an observation window communicating with the sealed cavity, and the observation window corresponds to the stage;

[0021] The probe station further includes a lens hermetically connected to the observation window of the sealing cover.

[0022] Furthermore, the probe station further includes an adjustment bracket and a detection component. The adjustment bracket is disposed on the base, and the adjustment bracket is connected to the detection component to adjust the position of the detection component so that the detection component corresponds to the lens.

[0023] Furthermore, the probe station includes multiple groups of the translation components, multiple swing driving members, multiple probe arms, and multiple probes that are arranged in one-to-one correspondence.

[0024] With the above-mentioned probe station, the translation component and the swing driving member drive the probe arm to drive the probe to move, so that the probe can test multiple products. Since the probe arm can rotate under the action of the swing driving member, compared with the linear movement of the probe arm in three dimensions, the rotation of the probe arm can effectively increase the movement range of the probe, thereby increasing the test range of the probe, testing more products, and improving the test efficiency. Description of the Drawings

[0025] The drawings are used to provide a further understanding of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation to the present application.

[0026] Figure 1 It is a schematic structural diagram of a probe station provided by an embodiment of the present application;

[0027] Figure 2 It is Figure 1 a schematic structural diagram of another angle of the probe station shown;

[0028] Figure 3 It is Figure 1 a schematic structural diagram of yet another angle of the probe station shown;

[0029] Figure 4 It is Figure 1 a schematic structural diagram of a partial structure in the probe station shown.

[0030] Reference Signs Description:

[0031] 100, Probe station; 110, Translation assembly; 111, Swing drive; 120, Probe arm; 112, First drive; 113, Second drive; 114, Third drive; 131, Base; 132, Frame; 140, Sealed chamber; 141, Support platform; 142, Fixed cover; 143, Sealing cover; 115, Connecting seat; 116, Sealing element; 133, Test chamber; 151, Input assembly; 152, Output assembly; 153, Temperature controller; 154, Connecting rod; 155, Pressure relief valve; 144, Lens; 161, Detection element; 162, Fixed bracket; 163, First bracket; 164, Second bracket; 165, Third bracket. Detailed implementation

[0032] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0033] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present application.

[0034] To facilitate understanding of the technical solutions of the present application, the existing test methods of probe stations are described herein: Existing probe stations usually test multiple products at a time, and the multiple products are arranged at intervals. To enable the probes to test multiple products, the positions of the probes need to be adjusted. However, the existing probes have a small moving range, resulting in a small test range for the probes, and thus the number of products that the probes can test is small, affecting the test efficiency of the probe station.

[0035] To solve the above technical problems, the present application provides a probe station, which is used to test products, and the moving range of the probes of this probe station is larger than that of the prior art, thereby effectively increasing the test range, being able to test more products, and improving the test efficiency.

[0036] Such as Figure 1 And Figure 4As shown, in one embodiment, the probe station 100 includes a translation assembly 110, a swing drive 111, a probe arm 120, and a probe. The translation assembly 110 is connected to the swing drive 111 to drive the swing drive 111 to reciprocate in the first, second, and third directions that are perpendicular to each other. The swing drive 111 is connected to one end of the probe arm 120 to drive the probe arm 120 to rotate about an axis parallel to the third direction, so that the probe arm 120 can swing about this axis by controlling the rotation angle. The probe is connected to the end of the probe arm 120 away from the swing drive 111.

[0037] With the above-described probe station 100, the translation assembly 110 and the swing drive 111 drive the probe arm 120 to drive the probe to move, so that the probe can test multiple products. Since the probe arm 120 can rotate under the action of the swing drive 111, compared with the linear movement of the probe arm 120 in three-dimensional directions, the rotation of the probe arm 120 can effectively increase the movement range of the probe, thereby realizing an increase in the test range of the probe, testing more products, and improving the test efficiency.

[0038] Please refer to Figure 2 as well. Further, the translation assembly 110 includes a first drive 112, a second drive 113, and a third drive 114 that are connected in sequence. The first drive 112 is disposed on the base 131 and is used to drive the second drive 113 to reciprocate in the first direction. The second drive 113 drives the third drive 114 to reciprocate in the second direction. The third drive 114 is connected to the swing drive 111 to drive the swing drive 111 to reciprocate in the third direction.

[0039] Specifically Figure 1 in the shown embodiment, the first drive 112, the second drive 113, and the third drive 114 are all electric cylinders. In other embodiments, the first drive 112, the second drive 113, and the third drive 114 can also be other mechanisms capable of linear drive. In addition, Figure 1 in the shown embodiment, the swing drive 111 is a motor.

[0040] Please refer to Figure 1 and Figure 2, in one embodiment, the probe station 100 further includes a base 131 and a frame 132 supporting the base 131, and the translation assembly 110 is disposed on the base 131. Further, the probe station 100 further includes a sealed chamber 140 and a stage. The sealed chamber 140 is disposed on the base 131 and has a sealed cavity. The translation assembly 110 and the swing driving member 111 are located outside the sealed chamber 140. The stage is disposed in the sealed cavity for carrying a product. One end of the probe arm 120 away from the swing driving member 111 extends into the sealed cavity to contact the product on the stage. Further still, the sealed chamber 140 is provided with a shielding interface electrically connected to the stage.

[0041] In one embodiment, the sealed chamber 140 includes a support platform 141, a fixed cover 142 and a sealing cover 143. The support platform 141 is disposed on the base 131, the fixed cover 142 is disposed on the support platform 141, and the sealing cover 143 is disposed on the fixed cover 142. The support platform 141, the fixed cover 142 and the sealing cover 143 enclose the above-mentioned sealed cavity.

[0042] Further, the fixed cover 142 is provided with a probe window communicating with the sealed cavity, and the probe arm 120 extends into the sealed cavity through the probe window. It can be understood that, in order to ensure the sealing performance, the size of the probe window usually needs to be limited. As Figure 1 shown, assuming that the second direction is the width direction of the probe window, if the probe arm 120 can only move linearly in three-dimensional directions, the test range of the probe arm 120 in the second direction cannot exceed the width of the probe window; if the probe arm 120 can rotate, at this time the test range of the probe arm 120 in the second direction can exceed the width of the probe window, thereby effectively increasing the test range.

[0043] Please also refer to Figure 4 , in practical applications, the probe station 100 further includes a connecting seat 115 and a seal 116. The swing driving member 111 is connected to the connecting seat 115 to drive the connecting seat 115 to rotate, and one end of the probe arm 120 is connected to the connecting seat 115. Two ends of the seal 116 are respectively hermetically connected to the fixed cover 142 and the connecting seat 115, and the seal 116 has a sealing channel communicating with the probe window. One end of the probe arm 120 connected to the connecting seat 115 is located in the sealing channel, thereby ensuring the sealing of the sealed cavity. It can be understood that, in order to avoid affecting the movement of the probe arm 120, the seal 116 should have telescopic performance. Optionally, the seal 116 is a bellows.

[0044] In one embodiment, the probe station 100 further includes a test chamber 133. The test chamber 133 is disposed in the sealed cavity. The stage is disposed in the test chamber 133. One end of the probe arm 120 away from the connecting seat 115 extends into the test chamber 133 so that the probe contacts the product on the stage.

[0045] Please refer to Figure 3 and Figure 4 In one embodiment, the probe station 100 further includes an input component 151 and an output component 152. Both the input component 151 and the output component 152 are connected to the sealing chamber 140 and communicate with the sealed cavity. The input component 151 is used to input a cooling medium into the sealed cavity, and the cooling medium can be selected from liquid nitrogen or liquid helium; the output component 152 can discharge the medium in the sealed cavity. In this way, the amount of the cooling medium in the sealed cavity can be controlled by the input component 151 and the output component 152, so as to adjust the temperature in the sealed cavity. Further, both the input component 151 and the output component 152 are connected to the bottom of the support table 141.

[0046] Please refer to Figure 2 and Figure 4 In one embodiment, the probe station 100 further includes a temperature detector for detecting the temperature in the sealed cavity. The input component 151 and the output component 152 control the amount of the cooling medium in the sealed cavity according to the detection result of the temperature detector. In practical applications, the probe station 100 further includes a temperature controller 153 and a connecting rod 154. The temperature controller 153 is connected to the sealing chamber 140 through the connecting rod 154, and the temperature controller 153 can control the input component 151 and the output component 152 to act according to the detection result of the temperature detector, so as to precisely control the temperature in the sealed cavity.

[0047] In one embodiment, the probe station 100 further includes a pressure relief valve 155. The pressure relief valve 155 is arranged on the sealing chamber 140 and communicates with the sealed cavity, and is used for relieving pressure when the pressure in the sealed cavity is too high.

[0048] In one embodiment, the sealing cover 143 is provided with an observation window communicating with the sealed cavity, and the observation window corresponds to the carrier table. Further, the probe station 100 further includes a lens 144. The lens 144 is hermetically connected to the observation window of the sealing cover 143 to observe the product on the carrier table while ensuring the sealing of the sealed cavity.

[0049] Please refer to Figure 1 and Figure 2 In one embodiment, the probe station 100 further includes an adjustment bracket and a detection member 161. The adjustment bracket is arranged on the base 131, and the adjustment bracket is connected to the detection member 161 to adjust the position of the detection member 161 so that the detection member 161 can correspond to the lens 144, thereby observing the product on the carrier table through the detection member 161. Optionally, the detection member 161 is a camera.

[0050] Further, the adjustment bracket includes a fixed bracket 162, a first bracket 163, a second bracket 164, and a third bracket 165. The fixed bracket 162 is fixed to the base 131 and is located on one side of the sealed chamber 140. The first bracket 163 is rotatably arranged on the fixed bracket 162 around an axis parallel to the third direction. The second bracket 164 is connected to the first bracket 163 and can adjust its position relative to the first bracket 163 in a fourth direction perpendicular to the third direction. The third bracket 165 is connected to the second bracket 164 and can adjust its position relative to the second bracket 164 in the third direction. The detection member 161 is arranged on the third bracket 165.

[0051] In one embodiment, the probe station 100 includes multiple groups of translation components 110 arranged in one-to-one correspondence, multiple swing driving members 111, multiple probe arms 120, and multiple probes to further improve the test efficiency. It can be understood that for different translation components 110, their first direction and second direction are also different, and the third direction is the vertical direction, so the directions are not marked in the figure.

[0052] To facilitate the understanding of the technical solution of the present application, the test process of the probe station 100 in the above embodiment is described herein:

[0053] First, place the product to be tested on the stage in the test chamber 133, and then seal the sealing cover 143 to the fixed cover 142 to form a sealed chamber. Next, input liquid nitrogen or liquid helium into the sealed chamber through the input component 151 until the temperature in the sealed chamber reaches the preset temperature. After the temperature is appropriate, adjust the position of the detection member 161 so that the detection member 161 moves above the lens 144.

[0054] Next, drive the probe arm 120 to drive the probe to move through the translation component 110 and the swing driving member 111, so that the probe performs multi-directional tests on multiple products. During the test, the product can be viewed through the detection member 161, and the temperature in the sealed chamber can also be adjusted by the temperature controller 153 in cooperation with the input component 151 and the output component 152, and the pressure in the sealed chamber can be adjusted by the pressure relief valve 155. After the test is completed, discharge the cooling medium in the sealed chamber through the output component 152, and open the sealing cover 143 after the temperature recovers, and then take out the product.

[0055] It should be noted that in order to facilitate the disassembly and assembly of the sealing cover 143, a handle or other structures can be provided on the top of the sealing cover 143.

[0056] Although the embodiments of the present application have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present application. The scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A probe station, characterized in that, Comprising: A translation component; A swing driving member, connected to the translation component, and reciprocatingly moving along a first direction, a second direction, and a third direction under the action of the translation component; A probe arm, one end of which is connected to the swing driving member, and rotates around an axis parallel to the third direction under the action of the swing driving member; A probe, connected to the end of the probe arm far from the swing driving member; Wherein, the first direction, the second direction, and the third direction are perpendicular to each other in pairs.

2. The probe station according to claim 1, characterized in that, The translation component includes a first driving member, a second driving member, and a third driving member connected in sequence. The first driving member drives the second driving member to reciprocatingly move along the first direction, the second driving member drives the third driving member to reciprocatingly move along the second direction, and the third driving member is connected to the swing driving member to drive the swing driving member to reciprocatingly move along the third direction.

3. The probe station according to claim 1, wherein The probe stage further includes a base, a sealed chamber, and a stage. The sealed chamber and the translation component are both disposed on the base, and the translation component and the swing driving member are located outside the sealed chamber. The sealed chamber has a sealed cavity. The end of the probe arm far from the swing driving member extends into the sealed cavity, and the stage is disposed in the sealed cavity.

4. The probe station according to claim 3, wherein The probe stage further includes an input component and an output component. The input component and the output component are both connected to the sealed chamber and communicate with the sealed cavity. The input component is used to input a cooling medium into the sealed cavity, and the output component can discharge the medium in the sealed cavity; The probe stage further includes a temperature detector, which is used to detect the temperature in the sealed cavity.

5. The probe station according to claim 4, wherein The probe stage further includes a pressure relief valve, which is disposed on the sealed chamber and communicates with the sealed cavity.

6. The probe station according to claim 3, wherein, The sealed chamber includes a support platform, a fixed cover, and a sealing cover. The support platform is disposed on the base, the fixed cover is disposed on the support platform, and the sealing cover is disposed on the fixed cover. The support platform, the fixed cover, and the sealing cover enclose to form the sealed cavity; The fixed cover is provided with a probe window communicating with the sealed cavity, and the probe arm extends into the sealed cavity through the probe window.

7. The probe station according to claim 6, characterized in that, The probe stage further includes a connecting seat and a sealing member. The swing driving member is connected to the connecting seat, one end of the probe arm is connected to the connecting seat, both ends of the sealing member are hermetically connected to the fixed cover and the connecting seat respectively, and the sealing member has a sealing channel communicating with the probe window. The end of the probe arm connected to the connecting seat is located in the sealing channel.

8. The probe station according to claim 6, characterized in that, The sealing cover is provided with an observation window communicating with the sealed cavity, and the observation window corresponds to the stage; The probe stage further includes a lens, which is hermetically connected to the observation window of the sealing cover.

9. The probe station according to claim 8, characterized in that, The probe stage further includes an adjustment bracket and a detection member. The adjustment bracket is disposed on the base, and the adjustment bracket is connected to the detection member to adjust the position of the detection member so that the detection member corresponds to the lens.

10. The probe station according to claim 1, wherein The probe station includes multiple groups of the translation components, multiple swing driving members, multiple probe arms, and multiple probes that are arranged in one-to-one correspondence.

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