Conveying device
By setting a temperature sensor and heating element in the transmission device, and using the controller to control the heating element, the gentle transfer of the photocapsule between different temperature equipment is achieved, the problem of deformation of the photocapsule due to temperature difference is solved, and the integrity of the photocapsule pattern is ensured.
Patent Information
- Application Number
- CN202421936543.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-09
- Publication Date
- 2025-07-22
- Estimated Expiration
- 2034-08-09
AI Technical Summary
When the photocoat is transferred between equipment with different temperatures, the graphics are prone to deformation due to temperature differences.
A transmission device is designed, including a closed chamber, a temperature sensor and a heating member. The switch and heating power of the heating member are controlled by the controller to achieve adjustable heating and cooling, and avoid quenching or sudden heat when the photocoat is transferred between different temperature equipment.
Effectively avoid deformation of the mask pattern due to temperature difference, ensure stable temperature changes when the mask is transferred between different temperature equipment, and protect the integrity of the mask pattern.
Smart Images
Figure CN223140020U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor manufacturing technology, and particularly to a transfer device. Background Art
[0002] During the production process, the photomask needs to be transferred to different devices, and there are differences in the process temperatures of these devices. If the photomask is directly transferred from a high-temperature environment to a low-temperature environment, the pattern on the photomask may be deformed. For example, when the photomask after high-temperature cleaning is cooled to room temperature, due to the large temperature difference and the difference in the thermal expansion rates between the glass substrate of the photomask and the metal material on its surface, the deformations of the substrate and the metal material are inconsistent, thereby causing the pattern formed by the metal material to be deformed.
[0003] Therefore, a transfer device that can controllably heat up and cool down the photomask is needed to avoid deformation of the pattern on the photomask while transferring the photomask between devices at different temperatures. Summary of the Utility Model
[0004] The purpose of this application is to provide a transfer device that can controllably heat up and cool down the photomask to avoid deformation of the pattern on the photomask while transferring the photomask between devices at different temperatures.
[0005] An embodiment of this application provides a transfer device for transporting a photomask, including: a closed chamber for placing the photomask, at least one temperature sensor is arranged inside the chamber for obtaining the temperature of the chamber and sending a temperature signal; a heating element located inside the chamber for adjusting the temperature of the chamber; a controller electrically connected to the heating element and the temperature sensor for receiving the temperature signal and controlling the switch and heating power of the heating element.
[0006] In some embodiments, the chamber is a double-layer hollow structure.
[0007] In some embodiments, the chamber includes: a base, the base is a double-layer hollow structure for placing the photomask; a cover body, which matches the base and forms a closed chamber together with the base, the cover body has a double-layer structure and is vacuum inside.
[0008] In some embodiments, the material of the cover body is a transparent material.
[0009] In some embodiments, in the heating mode, the controller is configured to control the heating element to turn on when the temperature of the chamber is less than a first set temperature, and control the heating element to turn off when the temperature of the chamber is greater than a second set temperature, where the first preset temperature < the second preset temperature.
[0010] In some embodiments, in the heating mode, the controller is configured to control the heating element to heat the chamber at a first heating power when the temperature of the chamber is less than a third set temperature, and to control the heating element to heat the chamber at a second heating power when the temperature of the chamber is greater than or equal to the third set temperature, wherein the first preset temperature < the third preset temperature < the second preset temperature, and the first heating power > the second heating power.
[0011] In some embodiments, in the cooling mode, the controller is configured to control the heating element to heat the chamber at a third power when the temperature of the chamber is greater than a fourth preset temperature, and to control the heating element to turn off when the temperature of the chamber is less than or equal to the fourth preset temperature.
[0012] In some embodiments, the base is provided with a plurality of support columns for supporting the photomask, and a limiting portion is provided at a first end of the support column to hold the photomask.
[0013] In some embodiments, the heating element is located between the plurality of support columns, and the thickness of the heating element is less than the height of the support column.
[0014] The beneficial effects of the transfer device provided by the embodiments of the present application include but are not limited to the following:
[0015] The transfer device provided by the embodiments of the present application is provided with a heating element and a temperature sensor in the chamber for placing the photomask. The temperature sensor can sense the temperature in the chamber and send a temperature signal to the controller. After obtaining the temperature signal, the controller can adjust the on / off and heating power of the heating element, so that the temperature of the chamber rises or falls at a gentle rate, avoiding large deformations of the patterns on the photomask due to sudden cooling or sudden heating when the photomask is transferred between process equipment at different temperatures.
[0016] In addition, the base of the transfer device is a hollow structure, and the cover is a vacuum double-layer structure, which can reduce the heat exchange efficiency between the chamber and the outside world. Thus, when the photomask is transferred from a high-temperature device to the transfer device, the temperature of the chamber can decrease at a gentle speed, avoiding deformation of the patterns on the photomask due to sudden cooling. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] The following drawings detail the exemplary embodiments disclosed in the present application. Wherein the same reference numerals represent similar structures in several views of the drawings. Those of ordinary skill in the art will understand that these embodiments are non-limiting, exemplary embodiments, and the drawings are only for the purpose of illustration and description, and are not intended to limit the scope of the present application. Embodiments in other ways may also achieve the inventive intent in the present application. It should be understood that the drawings are not drawn to scale.
[0018] Wherein:
[0019] Figure 1 is a schematic structural diagram of a transfer device according to some embodiments of the present application; and
[0020] Figure 2 is a schematic structural diagram of a base according to some embodiments of the present application. Detailed implementation manners
[0021] The following description provides specific application scenarios and requirements of the present application, aiming to enable those skilled in the art to manufacture and use the content of the present application. For those skilled in the art, various local modifications to the disclosed embodiments are obvious, and the general principles defined here can be applied to other embodiments and applications without departing from the spirit and scope of the present application. Therefore, the present application is not limited to the disclosed embodiments, but has the widest scope consistent with the claims.
[0022] The present application provides a transfer device for transporting a photomask, including: a closed chamber for placing the photomask, at least one temperature sensor is arranged inside the chamber for acquiring the temperature of the chamber and sending a temperature signal; a heating element located inside the chamber for adjusting the temperature of the chamber; a controller electrically connected to the heating element and the temperature sensor for receiving the temperature signal and controlling the on / off and heating power of the heating element.
[0023] For the transfer device provided by the present application, a heating element and a temperature sensor are arranged in the chamber for placing the photomask. The temperature sensor can sense the temperature inside the chamber and send a temperature signal to the controller. After acquiring the temperature signal, the controller can control the on / off and heating power of the heating element, so that the temperature of the chamber rises or falls at a gentle rate, avoiding large deformations of the patterns on the photomask due to sudden cooling or heating when the photomask is transferred between process equipment at different temperatures.
[0024] The transfer device provided by the present application will be described in detail below in combination with embodiments and drawings.
[0025] Referring to Figure 1 , an embodiment of the present application provides a transfer device. The transfer device includes a closed chamber for placing a photomask. At least one temperature sensor 300 is arranged inside the chamber, and a heating element 400 is further arranged inside the chamber for adjusting the temperature of the chamber.
[0026] In some embodiments, the chamber is a hollow structure.
[0027] In some embodiments, the chamber includes a base 100 and a cover 200, and the cover 200 and the base 100 together form a closed chamber.
[0028] In some embodiments, the base 100 has a hollow structure, which reduces the thermal conductivity of the base 100, thereby reducing the heat exchange efficiency between the chamber and the outside world. When the photomask is transferred from a high-temperature device to the transfer device, the temperature of the chamber can decrease at a moderate rate, avoiding deformation of the pattern on the photomask due to sudden cooling.
[0029] Reference Figure 2 , in some embodiments, the base 100 is provided with a plurality of support columns 101 for supporting the photomask, and the spacing between the support columns 101 matches the photomask. In some embodiments, the number of the support columns 101 is 4, and the 4 support columns 101 are respectively used for clamping the four sides of the photomask.
[0030] In some embodiments, a limiting portion 101a is provided at the first end of the support column 101 to hold the photomask, avoiding circumferential deviation of the photomask during transportation.
[0031] In some embodiments, the second end of the support column 101 is fixedly connected to the base 100.
[0032] In some embodiments, the support column 101 and the base 100 are integrally formed.
[0033] In some embodiments, the heating element 400 is located between the plurality of support columns 101, and the thickness of the heating element 400 is less than the height of the support column 101, that is, the heating element 400 is located between the base 100 and the photomask. When the heating element 400 heats the chamber, it can preferentially heat the photomask, thereby reducing the cooling rate of the photomask when the photomask is transferred from a high-temperature device to the chamber.
[0034] In some embodiments, the heating element 400 includes an electric resistance wire.
[0035] In some embodiments, the cover 200 has a double-layer structure and is internally vacuum, thereby reducing the heat exchange efficiency between the chamber and the outside world. When the photomask is transferred from a high-temperature device to the transfer device, the temperature of the chamber can decrease at a moderate rate, avoiding deformation of the pattern on the photomask due to sudden cooling.
[0036] In some embodiments, the material of the cover 200 is a transparent material, facilitating observation of whether the graphic surface of the internal photomask is upward or downward.
[0037] The temperature sensor 300 is used to obtain the temperature of the chamber and send a temperature signal. In some embodiments, the temperature sensor 300 is disposed on the inner wall of the cover 200. Optionally, the temperature sensor 300 is disposed on the top of the cover 200.
[0038] In some embodiments, the number of the temperature sensors 300 is plural, and the plural temperature sensors 300 are distributed in an array. The average value of the temperatures obtained by the plural temperature sensors 300 is taken as the temperature of the chamber. Optionally, the number of the temperature sensors 300 is 2, 3 or 4.
[0039] The transfer device provided by the present application further includes a controller 500. The controller 500 is electrically connected to the heating element 400 and the temperature sensor 300, and is configured to receive the temperature signal and control the switch and heating power of the heating element 400.
[0040] In some embodiments, the controller 500 includes a central processing unit.
[0041] In some embodiments, according to the transfer requirement, the transfer device can turn on a heating mode or a cooling mode to heat or cool the chamber.
[0042] In some embodiments, in the heating mode, the controller 500 is configured to control the heating element 400 to turn on when the temperature of the chamber is less than a first set temperature, and control the heating element 400 to turn off when the temperature of the chamber is greater than a second set temperature, where the first preset temperature < the second preset temperature.
[0043] In some embodiments, in the heating mode, the controller 500 is configured to control the heating element 400 to heat the chamber at a first heating power when the temperature of the chamber is less than a third set temperature, and control the heating element 400 to heat the chamber at a second heating power when the temperature of the chamber is greater than or equal to the third set temperature, where the first preset temperature < the third preset temperature < the second preset temperature, and the first heating power > the second heating power. The first heating power being greater than the second heating power can quickly heat the chamber when the chamber is at a lower temperature, improve the heating rate of the chamber, and slowly heat the chamber when the temperature of the chamber is greater than or equal to the third preset temperature to avoid the temperature of the chamber exceeding the second preset temperature.
[0044] In some embodiments, in the cooling mode, the controller 500 is configured to control the heating element 400 to heat the chamber at a third power when the temperature of the chamber is greater than a fourth preset temperature, and to control the heating element 400 to turn off when the temperature of the chamber is less than or equal to the fourth preset temperature. It should be noted that when the heating element 400 heats the chamber at the third power, the heat absorbed by the chamber per unit time is lower than the heat dissipated to the outside, and the chamber is in a slow cooling state to prevent the pattern on the photomask from deforming due to sudden cooling.
[0045] In some embodiments, when it is necessary to transfer the photomask from a low-temperature device to a high-temperature device, after the operator places the photomask on the base 100 and covers the cover 200, according to actual needs, the first preset temperature, the second preset temperature, and the third preset temperature are set on the controller 500. The transfer device enters the heating mode. When the temperature of the cavity is greater than or equal to the third preset temperature, the photomask is removed from the transfer device.
[0046] In some embodiments, when it is necessary to transfer the photomask from a high-temperature device to a low-temperature device, before the photomask is placed in the chamber, according to actual needs, the first preset temperature, the second preset temperature, the third preset temperature, and the fourth preset temperature are set on the controller 500. The transfer device enters the heating mode. When the temperature of the cavity is greater than or equal to the third preset temperature, the cavity is opened, and the photomask is transferred into the cavity. The transfer device enters the cooling mode. The controller 500 controls the heating element 400 to heat the chamber at a third power. When the temperature of the chamber drops to the fourth preset temperature, the controller 500 controls the heating element 400 to turn off. When the temperature of the chamber drops to the temperature of the low-temperature device, the photomask is transferred from the transfer device to the low-temperature device.
[0047] The beneficial effects of the transfer device provided by the embodiments of the present application include, but are not limited to, the following:
[0048] The transfer device provided by the embodiments of the present application is provided with a heating element and a temperature sensor in the chamber for placing the photomask. The temperature sensor can sense the temperature in the chamber and send a temperature signal to the controller. After obtaining the temperature signal, the controller can adjust the on / off and heating power of the heating element, so that the temperature of the chamber rises or falls at a gentle rate, avoiding large deformation of the pattern on the photomask due to sudden cooling or sudden heating when the photomask is transferred between process devices at different temperatures.
[0049] In addition, the base of the transfer device is of a hollow structure, and the cover body is of a vacuum double-layer structure, which can reduce the heat exchange efficiency between the chamber and the outside world. Thus, when the photomask is transferred from the high-temperature equipment to the transfer device, the temperature of the chamber can decrease at a gentle speed, avoiding deformation of the patterns located on the photomask due to sudden cooling.
[0050] It should be noted that the beneficial effects that may be produced by different embodiments are different. In different embodiments, the beneficial effects that may be produced can be any one or several combinations of the above, or any other beneficial effects that may be obtained.
[0051] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only an example and does not constitute a limitation to this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements, and corrections to this application. Such modifications, improvements, and corrections are proposed in this specification, so such modifications, improvements, and corrections still belong to the spirit and scope of the exemplary embodiments of this application.
[0052] It should be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected to", and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection, an electrical connection; it can be a rotational connection, a sliding connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the internal communication of two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood in combination with specific situations.
[0053] In addition, when terms such as "first", "second", "third", etc. are used in the specification of this application to describe various features, these terms are only used to distinguish these features, and cannot be understood as indicating or implying the relevance, relative importance, or implicitly indicating the number of the indicated features.
[0054] In addition, the specification of this application describes the exemplary embodiments by referring to idealized exemplary cross-sectional views and / or plan views and / or three-dimensional views. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be construed as limited to the shapes of the regions shown here, but should include deviations in the shapes caused by, for example, manufacturing. Therefore, the regions shown in the figures are substantially schematic, and their shapes are not for showing the actual shape of the regions of the device nor for limiting the scope of the exemplary embodiments.
[0055] Meanwhile, this application uses specific terms to describe the embodiments of this specification. For example, "an embodiment", "one embodiment", and / or "some embodiments" mean a certain feature, structure, or characteristic related to at least one embodiment of this application. Therefore, it should be emphasized and noted that the "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more at different positions in this application does not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of this application can be appropriately combined.
[0056] Similarly, it should be noted that, in order to simplify the description of this application and thus help the understanding of one or more embodiments of the invention, in the previous description of the embodiments of this application, sometimes multiple features are grouped into one embodiment, drawing, or description thereof. However, this disclosure method does not mean that the features required by the subject matter of this application are more than those mentioned in the claims. In fact, the features of the embodiment are less than all the features of the single embodiment disclosed above.
[0057] Finally, it should be understood that the embodiments described in this application are only used to illustrate the principles of the embodiments of this application. Other variations may also fall within the scope of this application. Therefore, by way of example and not limitation, alternative configurations of the embodiments of this application can be considered to be in accordance with the teachings of this application. Accordingly, the embodiments of this application are not limited to the embodiments explicitly introduced and described in this application.
Claims
1. A transfer device for transporting a photomask, characterized in that, Comprising: A closed chamber for placing a photomask, at least one temperature sensor is arranged inside the chamber for acquiring the temperature of the chamber and sending a temperature signal; A heating element, located inside the chamber, for adjusting the temperature of the chamber; And A controller, electrically connected to the heating element and the temperature sensor, for receiving the temperature signal and controlling the switch and heating power of the heating element.
2. The transfer device according to claim 1, wherein The chamber is a double-layer hollow structure.
3. The conveying device according to claim 1 or 2, characterized in that, The chamber includes: a base, the base is a double-layer hollow structure for placing the photomask; A cover body, matching with the base, together with the base to form a closed chamber, the cover body has a double-layer structure and is vacuum inside.
4. The conveying device according to claim 3, characterized in that, The material of the cover body is a transparent material.
5. The conveying device according to claim 1, characterized in that In the heating mode, the controller is configured to control the heating element to turn on when the temperature of the chamber is less than a first set temperature, and control the heating element to turn off when the temperature of the chamber is greater than a second set temperature, wherein the first set temperature is less than the second set temperature.
6. The conveying device according to claim 5, characterized in that In the heating mode, the controller is configured to control the heating element to heat the chamber at a first heating power when the temperature of the chamber is less than a third set temperature, and control the heating element to heat the chamber at a second heating power when the temperature of the chamber is greater than or equal to the third set temperature, wherein the first set temperature is less than the third set temperature, the third set temperature is less than the second set temperature, and the first heating power is greater than the second heating power.
7. The transfer device according to claim 6, wherein In the cooling mode, the controller is configured to control the heating element to heat the chamber at a third power when the temperature of the chamber is greater than a fourth preset temperature, and control the heating element to turn off when the temperature of the chamber is less than or equal to the fourth preset temperature.
8. The conveying device according to claim 3, characterized in that The base is provided with a plurality of support columns for supporting the photomask, and a limiting portion is arranged at the first end of the support column to clamp the photomask.
9. The transfer device according to claim 8, characterized in that, The heating element is located between the plurality of support columns, and the thickness of the heating element is less than the height of the support column.