Anti-sputtering device and laser micro-jet machining equipment

Abstract

The utility model discloses an anti-sputtering device and laser microjet processing equipment, the anti-sputtering device comprises a first annular piece, a second annular piece and a water absorbing material, the first annular piece and the second annular piece are fixedly connected in a detachable mode, and the water absorbing material is arranged between the first annular piece and the second annular piece; the upper surface of the first annular piece is fixed to the lower surface of the water-optical coupler, the water-optical coupler is fixed to the lower surface of the optical machining head, and the central axes of the first annular piece, the second annular piece and the water absorbing material are coaxial with laser emitted by the optical machining head; the center of the water absorbing material is provided with a central through hole larger than the diameter of the laser micro-jet. The anti-sputtering device disclosed by the utility model can be used for effectively preventing the water returning and sputtering conditions in the processing process, ensuring the processing quality and efficiency of micropores, and avoiding the abnormal conditions such as damage to other high-pressure nozzles caused by water returning.

Description

Technical Field

[0001] The utility model belongs to the technical field of microjet laser processing, and particularly relates to a splash-proof device and a laser microjet processing device. Background Art

[0002] The microjet laser processing technology is a precision processing technology that uses a water jet to guide a laser beam to cut and drill a workpiece to be processed. Due to the different refractive indices of water and air, when the laser beam irradiates the interface between water and air at a certain angle, if the incident angle of the laser beam is less than the total reflection critical angle, the laser will undergo total reflection and will not transmit, which confines the laser energy in the water beam all the time, enabling the laser to propagate along the direction of the water beam. The laser passes through the protective glass and enters the coupling water cavity after passing through the focusing lens. By adjusting the distance between the focusing lens and the nozzle, the laser focus is just at the center of the upper surface of the nozzle, and then it enters the stable water jet. Utilizing the difference in refractive indices between water and air, the laser undergoes total reflection in the water jet, similar to the propagation mode of a traditional glass optical fiber. During processing, the laser beam focused on the nozzle position is guided by the high-pressure water jet and transmitted to the workpiece surface to achieve processing.

[0003] Compared with the traditional laser technology, the microjet laser processing technology has the characteristics of no heat-affected zone, clean cutting process, no heat stress accumulation, etc., and has certain technical advantages for the processing of materials in the aerospace application category. In particular, the beam diameter of the microjet can be adjusted according to the selected nozzle specifications, and the jet diameter varies between 40 and 120 μm. According to nozzles with different aperture specifications, the cutting depth of the laser microjet will also change. Therefore, it has great advantages for the processing of holes with a large depth-diameter ratio and the cutting of materials with a large depth, such as the drilling and cutting of metal materials, composite materials, ceramic materials, etc.

[0004] When the microjet laser is performing microhole (such as 0.3 mm, 0.2 mm, 0.1 mm) processing, since the jet sprays out from the nozzle in a high-pressure state, during the microhole processing, the water at the bottom of the jet will splash around and to the upper part of the processing head, thereby affecting the stability of the upper part of the jet, resulting in poor conduction of the laser in the jet, weakened laser transmission ability, and affecting the processing quality and efficiency of the microholes. In addition, serious backwater and splashing also pose a risk of damaging the nozzle. Summary of the Utility Model

[0005] In order to solve the above problems existing in the prior art, the utility model provides a splash-proof device and a laser microjet processing device. The technical problems to be solved by the utility model are realized through the following technical solutions:

[0006] One aspect of the present utility model provides a splash-proof device for microjet laser processing of micropores, including a first annular member, a second annular member, and a water-absorbing material, wherein,

[0007] The first annular member and the second annular member are fixedly connected in a detachable manner, and the water-absorbing material is disposed between the first annular member and the second annular member;

[0008] The upper surface of the first annular member is fixed to the lower surface of the water-light coupler, the water-light coupler is fixed to the lower surface of the optical processing head, and the central axes of the first annular member, the second annular member, and the water-absorbing material are all coaxial with the laser emitted by the optical processing head;

[0009] A central through hole larger than the diameter of the laser microjet is provided at the center of the water-absorbing material.

[0010] In an embodiment of the present utility model, a plurality of magnet mounting holes are evenly provided on the upper surface of the first annular member, and a magnet is embedded in each magnet mounting hole, and the magnet is used for magnetic attraction with the lower surface of the water-light coupler.

[0011] In an embodiment of the present utility model, the inner ring and the outer ring of the first annular member are both in a cylindrical shape; the inner ring and the outer ring of the second annular member are both in a cylindrical shape, and the bottom of the inner ring of the second annular member includes an annular pressing plate extending inward in the radial direction.

[0012] In an embodiment of the present utility model, the water-absorbing material is disposed on the annular pressing plate, and the first annular member can be embedded in the inner ring of the second annular member to clamp the annular pressing plate between the first annular member and the second annular member.

[0013] In an embodiment of the present utility model, an external thread is provided on the outer ring of the first annular member, and an internal thread is provided on the inner ring of the second annular member, and the internal thread and the external thread can cooperate with each other so that the first annular member is assembled in the inner ring of the second annular member.

[0014] In an embodiment of the present utility model, the outer diameter of the outer ring of the second annular member is equal to the outer diameter of the water-light coupler.

[0015] In an embodiment of the present utility model, a plurality of drain holes are evenly provided on the outer surface of the outer ring of the second annular member, the drain holes communicate the outer ring and the inner ring of the second annular member, and the lower ends of the drain holes are flush with the upper surface of the annular pressing plate.

[0016] In an embodiment of the present utility model, the water-absorbing material is porous ceramic, cotton cloth or sponge.

[0017] In one embodiment of the present utility model, during the micro-hole machining process, the distance between the water-absorbing material and the workpiece surface is 10 - 20 mm.

[0018] Another aspect of the present utility model provides a laser micro-jet machining device, including an optical machining head, a water-light coupler, and the anti-sputtering device according to any one of the above embodiments. Among them,

[0019] The upper surface of the anti-sputtering device is fixed to the lower surface of the water-light coupler, the water-light coupler is fixed to the lower surface of the optical machining head, and the central axis of the anti-sputtering device is coaxial with the laser emitted by the optical machining head.

[0020] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0021] 1. During the micro-hole machining process of the laser micro-jet, due to the existence of the high-pressure jet, a water backflow phenomenon will occur, which affects the machining effect of the micro-hole. Seriously, it may even damage the high-pressure nozzle. The anti-sputtering device provided by the present utility model can effectively absorb the sputtered water during the machining process through the water-absorbing material, effectively improving the water backflow and sputtering conditions during the machining process. Moreover, it is convenient to install and disassemble, ensuring the machining quality and efficiency of the micro-hole, and also avoiding abnormal situations such as damage to other high-pressure nozzles caused by water backflow.

[0022] 2. The anti-sputtering device for the micro-jet laser machining of micro-holes of the present utility model can quickly adsorb the magnetic first annular part below the water-light coupler before the micro-hole machining, which is convenient for installation and disassembly, and the process is simple and fast; various types of water-absorbing materials that can be replaced are installed inside the anti-sputtering device, and the first annular part and the second annular part of the anti-sputtering device are connected by threads, which is convenient for replacing the water-absorbing material.

[0023] The following will further elaborate on the present utility model in detail with reference to the drawings and embodiments. Description of the Drawings

[0024] Figure 1 is an exploded schematic view of an anti-sputtering device for a laser micro-jet machining device provided by an embodiment of the present utility model;

[0025] Figure 2 is a schematic structural view of a micro-jet laser machining head provided by an embodiment of the present utility model;

[0026] Figure 3 is a schematic structural view of a first annular part provided by an embodiment of the present utility model;

[0027] Figure 4 is a schematic structural view of a second annular part provided by an embodiment of the present utility model.

[0028] Description of the Reference Numerals:

[0029] 1 - First annular member; 11 - Magnet mounting hole; 12 - External thread; 2 - Second annular member; 21 - Annular pressing plate; 22 - Internal thread; 23 - Drain hole; 3 - Water-absorbing material; 4 - Water-optical coupler; 5 - Optical machining head; 6 - Laser microjet; 7 - Workpiece; 71 - Micropore. Specific embodiments

[0030] In order to further elaborate on the technical means and effects adopted by the present utility model to achieve the intended utility model purpose, the following combines the accompanying drawings and specific embodiments to detail a spatter prevention device and a laser microjet processing device proposed according to the present utility model.

[0031] The foregoing and other technical contents, features, and effects of the present utility model can be clearly presented in the following detailed description of specific embodiments in conjunction with the accompanying drawings. Through the description of specific embodiments, a more in-depth and specific understanding of the technical means and effects adopted by the present utility model to achieve the intended purpose can be obtained. However, the accompanying drawings are only for reference and illustration purposes and are not used to limit the technical solution of the present utility model.

[0032] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including", or any other variant is intended to cover non-exclusive inclusion, so that an article or device including a series of elements not only includes those elements but also includes other elements not explicitly listed. Without further limitation, an element defined by the statement "including one..." does not exclude the existence of another identical element in the article or device including the said element.

[0033] Please refer to Figure 1 and Figure 2 , Figure 1 which is an exploded schematic view of a spatter prevention device for a laser microjet processing device provided by an embodiment of the present utility model; Figure 2It is a schematic structural diagram of a microjet laser processing head provided by an embodiment of the present invention. The anti-sputtering device of this embodiment includes a first annular member 1, a second annular member 2, and a water-absorbing material 3. Among them, the first annular member 1 and the second annular member 2 are fixedly connected in a detachable manner, and the water-absorbing material 3 is arranged between the first annular member 1 and the second annular member 2; the upper surface of the first annular member 1 is fixed to the lower surface of the water-light coupler 4, and the water-light coupler 4 is fixed below the optical processing head 5, and the central axes of the first annular member 1, the second annular member 2, and the water-absorbing material 3 are all coaxial with the laser emitted by the optical processing head 5; a central through hole (not shown in the drawing) larger than the diameter of the laser microjet 6 is provided in the center of the water-absorbing material 3, and during the processing, the laser microjet 6 generated by the optical processing head 5 and the water-light coupler 4 passes through this through hole and lands on the workpiece 7 to process the workpiece 7.

[0034] The interior of the water-light coupler 4 is equipped with a window glass and a high-pressure nozzle. A laser is provided inside the optical processing head 5. The laser emitted by the laser passes through the window glass and enters the water-light coupling water cavity. After refraction by the window glass and the water cavity, the laser focus is just at the center of the upper surface of the nozzle, and then enters the stable water jet. Utilizing the difference in refractive indices between water and air, total internal reflection of the laser occurs in the water jet to complete the transmission of the laser and form a laser microjet for workpiece processing. During the process of the optical processing head 5 machining the microhole 71 on the workpiece 7, the height of the water-light coupler 4 from the workpiece 7 is 8-10 mm. Since the laser microjet 6 is a high-pressure microjet, during the processing, upward water back-splash will occur in the microhole 71 at the workpiece processing position, resulting in the destruction of the jet state at the upper end position of the laser microjet 6 and affecting the conduction of the laser in the jet. The water-absorbing material in the anti-sputtering device of the present invention can fully absorb the sputtered water during the processing, without affecting the jet stability state at the central position of the microjet above the microhole 71, improving the stability of the laser microjet and ensuring the processing quality and processing efficiency.

[0035] Further, please refer to Figure 3 and Figure 4 , Figure 3 It is a schematic structural diagram of a first annular member provided by an embodiment of the present invention; Figure 4It is a schematic structural diagram of a second annular member provided by an embodiment of the present utility model. A plurality of magnet mounting holes 11 are evenly formed on the upper surface of the first annular member 1, and a magnet is embedded in each magnet mounting hole 11. The magnet is used for magnetic attraction with the lower surface of the water optical coupler 4. Preferably, six cylindrical magnet mounting holes 11 are evenly formed on the upper surface of the first annular member 1 in this embodiment for mounting cylindrical magnets. The outer surface of the water optical coupler 4 is a ferromagnetic metal, and the upper surface of the first annular member 1 can be matched with the water optical coupler 4 by magnetic attraction, which is convenient for assembly, disassembly and replacement. In other embodiments of the present utility model, the first annular member 1 can also be fixed to the lower surface of the water optical coupler 4 by other suitable means. Preferably, the outer diameter of the outer ring of the second annular member 2 is equal to the outer diameter of the water optical coupler 4 to ensure that the second annular member 2 and the water optical coupler 4 can be tightly fixed together.

[0036] In this embodiment, both the inner ring and the outer ring of the first annular member 1 are in a cylindrical shape; both the inner ring and the outer ring of the second annular member 2 are in a cylindrical shape, and the outer diameter of the outer ring of the first annular member 1 is slightly smaller than the inner diameter of the inner ring of the second annular member 2, so that the first annular member 1 can be assembled coaxially in the inner ring of the second annular member 2.

[0037] In addition, the bottom of the inner ring of the second annular member 2 includes an annular pressing plate 21 extending radially inward. The lower surface of the annular pressing plate 21 is flush with the lower surface of the second annular member 2, and the annular pressing plate 21 has a uniform width along the circumference of the inner ring of the second annular member 2. The water-absorbing material 3 is a circular structure with a central through hole, and its diameter is approximately equal to the inner diameter of the second annular member 2. The diameter of the central through hole is larger than the diameter of the laser microjet 6. The water-absorbing material 3 is arranged on the annular pressing plate 21, and the first annular member 1 can be embedded in the inner ring of the second annular member 2 to clamp the annular pressing plate 21 between the first annular member 1 and the second annular member 2. Specifically, the annular pressing plate 21 is limited between the lower surface of the first annular member 1 and the annular pressing plate 21 at the bottom of the second annular member 2. The annular pressing plate 21 can lock the water-absorbing material 3 to prevent it from shaking. Preferably, the water-absorbing material 3 can be non-woven fabric, porous ceramic, cotton cloth or sponge.

[0038] Furthermore, an external thread 12 is provided on the outer ring of the first annular member 1, and an internal thread 22 is provided on the inner ring of the second annular member 2. The internal thread 22 and the external thread 12 can cooperate with each other, so that the first annular member 1 is assembled in the inner ring of the second annular member 2. In other embodiments of the present utility model, the first annular member 1 can also be fixedly connected to the second annular member 2 by other means, such as clamping or interference fit, etc.

[0039] Such as Figure 4As shown, a plurality of drain holes 23 are evenly arranged on the outer ring surface of the second annular member 2 of this embodiment. The drain holes 23 communicate the outer ring and the inner ring of the second annular member 2, and the lower ends of the drain holes 23 are flush with the upper surface of the annular pressing plate 21. During the processing, the distance between the water-absorbing material 3 and the surface of the workpiece 7 does not exceed 28 mm, preferably 10 - 20 mm.

[0040] Another embodiment of the present utility model provides a laser microjet processing device, which includes an optical processing head 5, a water-light coupler 4 and the above-mentioned anti-sputtering device. Among them, the upper surface of the anti-sputtering device is fixed to the lower surface of the water-light coupler 4, the water-light coupler 4 is fixed to the lower surface of the optical processing head, and the central axis of the anti-sputtering device is coaxial with the laser emitted by the optical processing head 5.

[0041] The working process of this laser microjet processing device is as follows:

[0042] First, place the water-absorbing material 3 on the annular pressing plate 21 of the second annular member 2. The external thread 12 and the internal thread 22 assemble the first annular member 1 and the second annular member 2 together. Then, fix and cooperate the assembled component with the water-light coupler 4 at the lower part of the optical processing head 5 by means of magnetic attraction. Subsequently, use the combined action of the optical processing head 5 and the water-light coupler 4 to generate a laser microjet 6. The laser microjet 6 passes through the inner rings of the first annular member 1 and the second annular member 2 and the central through hole of the water-absorbing material 3 to process the workpiece 7 to form a micro-hole 71.

[0043] During the process of micro-hole processing, the existence of the high-pressure jet will cause the high-pressure water to splash everywhere. Through the anti-sputtering device provided by the present utility model, the backwater and sputtering during the micro-hole processing are absorbed by the water-absorbing material 3 above the annular pressing plate 21 through the round hole in the middle of the annular pressing plate 21, and then discharged from the drain holes 23 at the bottom edge of the second annular member 2, avoiding the unstable jet of the laser microjet 6 caused by backwater and improving the processing efficiency and quality.

[0044] The anti-sputtering device provided by the present utility model absorbs the sputtered water during the processing, which can effectively improve the backwater and sputtering conditions during the processing. Moreover, it is convenient to install and disassemble, ensuring the processing quality and efficiency of the micro-holes, and also avoiding other abnormal situations such as damage to other high-pressure nozzles caused by backwater. The anti-sputtering device for microjet laser processing of micro-holes of the present utility model can quickly adsorb the magnetic first annular member below the water-light coupler before micro-hole processing, which is convenient for installation and disassembly, and the process is simple and fast; the anti-sputtering device is internally equipped with various types of replaceable water-absorbing materials, and the first annular member and the second annular member of the whole device are connected by threads, which is convenient for replacing the water-absorbing material.

[0045] In several embodiments provided by the present utility model, it should be understood that the devices and methods disclosed in the present utility model can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of the modules is only a logical function division. In actual implementation, there may be other division methods. For example, multiple modules or components can be combined or integrated into another system, or some features can be ignored or not executed.

[0046] In addition, each functional module in various embodiments of the present utility model can be integrated in a processing module, or each module can exist physically alone, or two or more modules can be integrated in one module. The above-mentioned integrated modules can be implemented in the form of hardware, or in the form of a combination of hardware and software functional modules.

[0047] The above content is a further detailed description of the present utility model in combination with specific preferred implementation manners. It cannot be determined that the specific implementation of the present utility model is only limited to these descriptions. For those of ordinary skill in the technical field to which the present utility model belongs, without departing from the concept of the present utility model, several simple deductions or substitutions can still be made, and all should be regarded as belonging to the protection scope of the present utility model.

Claims

1. A splash-proof device, characterized in that, It includes a first annular member (1), a second annular member (2) and a water-absorbing material (3), wherein, the first annular member (1) is fixedly connected to the second annular member (2) in a detachable manner, and the water-absorbing material (3) is disposed between the first annular member (1) and the second annular member (2); the upper surface of the first annular member (1) is fixed to the lower surface of a water-optical coupler (4), the water-optical coupler (4) is fixed to the lower surface of an optical machining head (5), and the central axes of the first annular member (1), the second annular member (2) and the water-absorbing material (3) are all coaxial with the laser emitted by the optical machining head (5); a central through hole larger than the diameter of the laser microjet is formed in the center of the water-absorbing material (3).

2. The anti-sputtering device according to claim 1, characterized in that, A plurality of magnet mounting holes (11) are evenly formed in the upper surface of the first annular member (1), and a magnet is embedded in each magnet mounting hole (11), and the magnet is used for magnetic attraction with the lower surface of the water-optical coupler (4).

3. The anti-sputtering device according to claim 1, wherein The inner ring and the outer ring of the first annular member (1) are both in a cylindrical shape; the inner ring and the outer ring of the second annular member (2) are both in a cylindrical shape, and the bottom of the inner ring of the second annular member (2) includes an annular pressing plate (21) extending radially inward.

4. The anti-sputtering device according to claim 3, characterized in that, The water-absorbing material (3) is disposed on the annular pressing plate (21), and the first annular member (1) can be embedded in the inner ring of the second annular member (2) to clamp the annular pressing plate (21) between the first annular member (1) and the second annular member (2).

5. The anti-sputtering device according to claim 1, characterized in that, An external thread (12) is provided on the outer ring of the first annular member (1), and an internal thread (22) is provided on the inner ring of the second annular member (2), and the internal thread (22) can cooperate with the external thread (12) so that the first annular member (1) is assembled in the inner ring of the second annular member (2).

6. The anti-sputtering device according to claim 1, characterized in that, The outer diameter of the outer ring of the second annular member (2) is equal to the outer diameter of the water-optical coupler (4).

7. The anti-sputtering device according to claim 4, characterized in that, A plurality of drain holes (23) are evenly provided on the outer surface of the outer ring of the second annular member (2), the drain holes (23) communicate the outer ring and the inner ring of the second annular member (2), and the lower ends of the drain holes (23) are flush with the upper surface of the annular pressing plate (21).

8. The anti-sputtering device according to claim 1, characterized in that, The water-absorbing material (3) is a porous ceramic, a cotton cloth or a sponge.

9. The anti-sputtering device according to claim 1, characterized in that, During the micro-hole machining process, the distance between the water-absorbing material (3) and the workpiece surface is 10 - 20 mm.

10. A laser microjet processing device, characterized in that, It includes an optical machining head (5), a water-optical coupler (4) and a splash-proof device according to any one of claims 1 to 9, wherein, the upper surface of the splash-proof device is fixed to the lower surface of the water-optical coupler (4), the water-optical coupler (4) is fixed to the lower surface of the optical machining head (5), and the central axis of the splash-proof device is coaxial with the laser emitted by the optical machining head (5).

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