Material mover and transfer equipment for semiconductors

Abstract

The utility model relates to the technical field of single crystal production, and provides a dumper and transfer equipment for semiconductors, the dumper comprises a frame, a traction assembly, a supporting plate and a clamping jaw assembly, the frame is provided with a clamping space, and the bottom of the clamping space is provided with a bottom support; the traction assembly is movably connected to the frame, and an elastic piece is connected between the traction assembly and the frame; the supporting plate is connected to the end, close to the bottom support, of the traction assembly and has a movable interval with the bottom support. The clamping jaw assembly is fixedly connected to the traction assembly and extends towards the clamping space, the supporting plate is used for bearing materials, the supporting plate moves towards the bottom support under the pressure of the materials, so that the traction assembly pulls the clamping jaw assembly to clamp the materials, and when the materials are away from the supporting plate, the supporting plate moves away from the bottom support; the traction assembly drives the clamping jaw assembly to be opened under the elastic restoring force of the elastic piece. When a material is placed on the supporting plate, the clamping jaw assembly automatically clamps the material, and when the material is lifted, the clamping jaw assembly automatically loosens the material, and manual operation is not needed.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal production, in particular to a material transport vehicle and a transfer device for semiconductors. Background Art

[0002] At present, in the photovoltaic industry, the clamping, positioning and unlocking of the quartz cylinder for feeding the silicon crystal furnace on the material transport vehicle are all realized manually. Especially during the process of replacing the quartz cylinder on the material transport vehicle, it is necessary to manually untie the buckles of the upper and lower clamps that hold the quartz cylinder on the material transport vehicle, open the clamp rings, then place the quartz cylinder in the position, and after placing it, hold the opened clamp rings to clamp the quartz cylinder and close the buckles of the clamps so that the upper and lower two clamps surround and lock the quartz cylinder. And currently, the material transport vehicle is manually transported, and the fixing and unlocking of the quartz cylinder on the material transport vehicle both require manual operation, which is very inconvenient. Content of the Utility Model

[0003] The utility model aims to solve at least one of the technical problems existing in the related art. For this purpose, the utility model provides a material transport vehicle, aiming to realize the automatic clamping and loosening of materials.

[0004] The utility model also provides a transfer device for semiconductors.

[0005] The material transport vehicle according to the utility model includes:

[0006] A vehicle frame, the vehicle frame is provided with a clamp space, and a bottom support is arranged at the bottom of the clamp space;

[0007] A traction assembly, the traction assembly is movably connected to the vehicle frame, the traction assembly is provided with an elastic member, and the elastic member elastically abuts against the vehicle frame;

[0008] A tray, the tray is connected to one end of the traction assembly adjacent to the bottom support, and there is an active interval between the tray and the bottom support;

[0009] A claw assembly, the claw assembly is fixedly connected to the traction assembly and extends towards the clamp space. Wherein, the tray is used for supporting the material, the tray moves towards the bottom support under the pressure of the material, so that the traction assembly pulls the claw assembly to clamp the material. When the material moves away from the tray, the tray moves away from the bottom support, and the traction assembly drives the claw assembly to open under the elastic restoring force of the elastic member.

[0010] According to the material transport vehicle of the embodiment of the present utility model, by placing the material in the clamping space of the vehicle frame, the material is carried by the support plate, and the material is clamped and fixed by the claw assembly. When the material is placed on the support plate, the support plate moves towards the bottom support at the bottom of the clamping space under the action of pressure, thereby driving the traction assembly to move. When the traction assembly moves, it drives the claw assembly to act, so as to clamp the material placed in the clamping space. When the material is lifted, the pressure received by the support plate gradually disappears, and the traction assembly returns to the initial position under the elastic restoring force of the elastic member, that is, it drives the claw assembly to act, so as to loosen the material. In this way, when the material is placed on the support plate, the claw assembly automatically clamps the material, and as the material is lifted, the claw assembly automatically loosens the material, thereby realizing the automatic clamping and loosening of the material without manual operation.

[0011] According to an embodiment of the present utility model, the traction assembly includes:

[0012] A lifting rod, the lifting rod is movably connected to the vehicle frame, one end of the lifting rod is connected to the support plate, and the claw assembly is fixedly connected to the lifting rod;

[0013] The elastic member, one end of the elastic member abuts against the lifting rod, and the other end abuts against the vehicle frame.

[0014] According to an embodiment of the present utility model, the traction assembly further includes an adjusting nut, the adjusting nut is arranged on the lifting rod, the adjusting nut can move along the length direction of the lifting rod, the elastic member is a spring, the spring is sleeved on the lifting rod, one end of the spring abuts against the adjusting nut, and the other end abuts against the vehicle frame, and the adjusting nut is adapted to move on the lifting rod to adjust the compression amount of the spring.

[0015] According to an embodiment of the present utility model, the traction assembly includes two lifting rods and two elastic members, the two lifting rods are arranged in parallel, the two lifting rods are respectively arranged on both sides of the support plate, and the two lifting rods are connected to both sides of the claw assembly, and each elastic member is correspondingly arranged for one lifting rod.

[0016] According to an embodiment of the present utility model, the claw assembly includes:

[0017] A pressing block, the pressing block is fixedly connected to the traction assembly;

[0018] Two support plates, one support plate is rotatably connected to one side of the pressing block, and the other support plate is rotatably connected to the other side of the pressing block;

[0019] Two clamping jaws, one end of one of the clamping jaws is rotatably connected to one of the support plates, and one end of the other clamping jaw is rotatably connected to the other support plate. Wherein, when the pressing block presses down and lifts, the two clamping jaws are clamped and opened by the rotation of the support plates;

[0020] An installation substrate, the installation substrate connects the two clamping jaws to keep the two clamping jaws clamped and opened in the same plane.

[0021] According to an embodiment of the present invention, flexible buffer structures are provided on one side of each of the two clamping jaws facing each other.

[0022] According to an embodiment of the present invention, the material transport vehicle includes at least two sets of the clamping jaw assemblies, and the at least two sets of clamping jaw assemblies are arranged at intervals along the extending direction of the traction assembly.

[0023] According to an embodiment of the present invention, the vehicle frame includes:

[0024] An installation frame, the installation frame is provided with an installation space;

[0025] A flipping frame, the flipping frame is installed in the installation space and connected to the installation frame. A bottom support is provided on one side of the flipping frame, and the side of the flipping frame where the bottom support is provided is a clamping space. The traction assembly is arranged on the side of the flipping frame facing away from the clamping space, and the traction assembly is movably connected to the flipping frame. An elastic member is connected between the traction assembly and the flipping frame.

[0026] According to an embodiment of the present invention, a plurality of casters are provided at the bottom of the installation frame. Define one side of the installation frame as the front side and the other side as the rear side. The caster located on the front side is a fixed caster, and the caster located on the rear side is a swivel caster.

[0027] The semiconductor transfer device according to the second aspect embodiment of the present invention includes:

[0028] The above-mentioned material transport vehicle;

[0029] A quartz tube, arranged on the material transport vehicle;

[0030] A hook device, the hook device includes a hook body, a movable block and a connecting member. The hook body forms a receiving cavity with an opening. The movable block is movably arranged in the receiving cavity to at least partially open or at least partially close the opening; the connecting member is used to be installed on the quartz tube, and the connecting member is adapted to move towards the hook body to push the movable block to move and open the opening, and switch the connecting member to the hooked state; in the hooked state, the connecting member at least partially enters the receiving cavity, and the movable block is adapted to abut to lock the connecting member.

[0031] Additional aspects and advantages of the present utility model will be given in part in the following description, become apparent in part from the following description, or be understood through the practice of the present utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or in the related art, the following will briefly introduce the drawings required for use in the description of the embodiments or the related art. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0033] Figure 1 is a schematic structural view of the material transport vehicle provided by the embodiment of the present utility model;

[0034] Figure 2 is a schematic structural view of the vehicle frame provided by the embodiment of the present utility model;

[0035] Figure 3 is a schematic structural view of the tipping frame in the vehicle frame provided by the embodiment of the present utility model;

[0036] Figure 4 is an exploded view of the tipping frame in the vehicle frame provided by the embodiment of the present utility model;

[0037] Figure 5 is a schematic structural view of the jaw assembly provided by the embodiment of the present utility model;

[0038] Figure 6 is a side view of the jaw assembly provided by the embodiment of the present utility model;

[0039] Figure 7 is an exploded view of the jaw assembly provided by the embodiment of the present utility model;

[0040] Figure 8 is a front view of the material transport vehicle in the first process of placing materials provided by the embodiment of the present utility model;

[0041] Figure 9 is Figure 8 a cross-sectional view at A;

[0042] Figure 10 is a side view of the material transport vehicle in the first process of placing materials provided by the embodiment of the present utility model;

[0043] Figure 11 is a front view of the material transport vehicle in the second process of placing materials provided by the embodiment of the present utility model;

[0044] Figure 12 is Figure 11 a cross-sectional view at B;

[0045] Figure 13 It is a side view of the second process of placing materials on the material transport vehicle provided by the embodiment of the present utility model;

[0046] Figure 14 It is a front view of the process of the material transport vehicle lifting materials provided by the embodiment of the present utility model;

[0047] Figure 15 is Figure 14 A sectional view at position C;

[0048] Figure 16 It is a side view of the process of the material transport vehicle lifting materials provided by the embodiment of the present utility model;

[0049] Figure 17 It is a schematic structural diagram of a quartz tube and a hook device provided by the embodiment of the present utility model;

[0050] Figure 18 It is a schematic structural diagram of the hook device provided by the embodiment of the present utility model;

[0051] Figure 19 It is a partial schematic structural diagram of the hook device provided by the embodiment of the present utility model.

[0052] Reference numerals:

[0053] 1, vehicle frame; 11, casters; 12, chassis; 15, mounting frame; 151, vertical square tube; 152, push-pull handle; 153, horizontal square tube; 2, tipping frame; 211, bottom support; 213, first guiding fixing plate; 214, first welding plate; 216, second guiding fixing plate; 22, pallet; 23, lifting rod; 26, claw assembly; 261, pressing block; 262, pin shaft; 263, support plate; 264, spherical plain bearing; 265, shaft circlip; 266, connecting shaft; 267, step screw; 268, claw; 269, mounting substrate; 27, elastic member; 28, adjusting nut; 4, quartz tube; 100, hook body; 110, opening; 130, elastic member; 200, movable block; 220, rotating member; 300, connecting member. Detailed implementation manners

[0054] The following further describes in detail the implementation manners of the present utility model in conjunction with the drawings and embodiments. The following embodiments are used to illustrate the present utility model, but cannot be used to limit the scope of the present utility model.

[0055] In the description of the embodiments of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation on the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0056] In the description of the embodiments of the present utility model, it should be noted that unless otherwise clearly defined and limited, the terms "connected" and "connected to" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific situations.

[0057] In the embodiments of the present utility model, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0058] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0059] Please refer to Figures 1 to 4, the transporter according to the present utility model includes a vehicle frame 1, a traction assembly, a pallet 22 and a claw assembly 26. The vehicle frame 1 is provided with a clamping space, and a bottom support 211 is provided at the bottom of the clamping space; the traction assembly is movably connected to the vehicle frame 1, and the traction assembly is provided with an elastic member 27, and the elastic member 27 is elastically abutted against the vehicle frame 1; the pallet 22 is connected to one end of the traction assembly adjacent to the bottom support 211, and there is an active interval between the pallet 22 and the bottom support 211; the claw assembly 26 is fixedly connected to the traction assembly and extends towards the clamping space. Among them, the pallet 22 is used to support the material, and the pallet 22 moves towards the bottom support 211 under the pressure of the material, so that the traction assembly pulls the claw assembly 26 to clamp the material. When the material moves away from the pallet 22, the pallet 22 moves away from the bottom support 211, and the traction assembly drives the claw assembly 26 to open under the elastic restoring force of the elastic member 27.

[0060] For the transporter according to the embodiment of the present utility model, by placing the material in the clamping space of the vehicle frame 1, the pallet 22 bears the material, and the claw assembly 26 clamps and fixes the material. When the material is placed on the pallet 22, the pallet 22 moves towards the bottom support 211 at the bottom of the clamping space under the action of pressure, thereby driving the traction assembly to move. When the traction assembly moves, it drives the claw assembly 26 to act, thereby clamping the material placed in the clamping space. When the material is lifted, the pressure received by the pallet 22 gradually disappears, and the traction assembly returns to the initial position under the elastic restoring force of the elastic member 27, that is, it drives the claw assembly 26 to act, thereby loosening the material. In this way, when the material is placed on the pallet 22, the claw assembly 26 automatically clamps the material, and as the material is lifted, the claw assembly 26 automatically loosens the material, thereby realizing the automatic clamping and loosening of the material without manual operation.

[0061] It should be noted that the present utility model can realize automatic positioning and clamping when the quartz tube 4 is placed, and automatic release of clamping when lifted, without manual operation. At the same time, as an automatic transportation using an AGV (Automated Guided Vehicle), the present utility model can realize the automation of the entire silicon crystal loading and transportation. In the actual operation process, by controlling the lifting of the quartz tube 4, the clamping and release of the clamping function of the cylinder can be realized, and then the automatic clamping and release operation of the quartz tube 4 can be realized. At the same time, a lifting AGV can be used to transport the entire transporter. The application scope of the present utility model is not limited to the automatic loading and unloading of the quartz tube 4 in the photovoltaic industry, but can also be applied to the automatic loading and unloading process of other cylindrical materials.

[0062] As Figure 3 and Figure 4 shown, according to an embodiment of the present utility model, the traction assembly includes a lifting rod 23 and an elastic member 27. The lifting rod 23 is movably connected to the vehicle frame 1. One end of the lifting rod 23 is connected to the pallet 22, and the claw assembly 26 is fixedly connected to the lifting rod 23; one end of the elastic member 27 abuts against the lifting rod 23, and the other end abuts against the vehicle frame 1.

[0063] Understandably, an L-shaped bracket is provided on the vehicle frame 1. A bottom support 211 is provided at the bottom of the L-shaped bracket for supporting the pallet 22. The bottom support 211 is in the shape of a bucket, and the material is stopped and limited by the enclosing plate on the side of the bottom support 211 to improve the stability of placing the material. Specifically, two vertical square tubes and four horizontal square tubes are welded into the main frame structure of the L-shaped bracket, and a first guiding and fixing plate 213 is connected at a position adjacent to the bottom support 211 at the bottom. At the same time, a second guiding and fixing plate 216 is connected in the middle of the L-shaped bracket, and a first welding plate 214 for installing the claw assembly 26 is also connected to the L-shaped bracket. Guide holes are provided on both the first guiding plate and the second guiding plate. In this way, the lifting rod 23 passes through the first guiding plate and the second guiding plate movably, so that the lifting rod 23 can move relative to the vehicle frame 1, and specifically can move along the connection line direction of the first guiding plate and the second guiding plate. Since one end of the lifting rod 23 is connected to the pallet 22 and the lifting rod 23 is connected to the claw assembly 26, when the pallet 22 moves, it will drive the lifting rod 23 to move, thereby driving the claw assembly 26 to act.

[0064] Exemplarily, the pallet 22 is fixedly connected to the lower part of the lifting rod 23 through upper and lower nuts. The lifting rod 23 passes through the first guiding and fixing plate 213, the claw assembly 26, and the second guiding and fixing plate 216 from bottom to top, and both are locked with upper and lower nuts with the claw assembly 26. At the same time, one end of the elastic member 27 abuts against the lifting rod 23, and the other end abuts against the vehicle frame 1. At this time, under the elastic force of the elastic member 27, the elastic force of the elastic member 27 reaches a balance with the gravity of the pallet 22 and other components connected to the lifting rod 23, so that there is a certain gap between the pallet 22 and the bottom support 211. At this time, if the pallet 22 drives the lifting rod 23 to move downward, the claw assembly 26 will be driven to perform a clamping action, and when the pallet 22 drives the lifting rod 23 to move upward, the claw assembly 26 will be driven to perform a spreading action. In this way, it is convenient to realize the automatic clamping and loosening of the claw assembly 26 without manual operation. The elastic member 27 can be a spring, a spring sheet or other structures made of soft rubber materials, which is not limited here.

[0065] Of course, in other embodiments, the lifting rod 23 can also be a structure such as a steel wire rope or a chain, as long as it can move relative to the vehicle frame 1 and drive the claw assembly 26 to act, which is not limited here.

[0066] As Figure 3 shown, according to an embodiment of the present invention, the traction assembly further includes an adjusting nut 28. The adjusting nut 28 is provided on the lifting rod 23. The adjusting nut 28 can move along the length direction of the lifting rod 23. The elastic member 27 is a spring. The spring is sleeved on the lifting rod 23. One end of the spring abuts against the adjusting nut 28, and the other end abuts against the vehicle frame 1. The adjusting nut 28 is adapted to move on the lifting rod 23 to adjust the compression amount of the spring.

[0067] Exemplarily, the adjusting nut 28 is sleeved on the lifting rod 23, and there is a telescopic space for installing the spring between the adjusting nut 28 and the vehicle frame 1. Specifically, the spring abuts against the adjusting nut 28 and the second guiding fixed plate 216 on the vehicle frame 1 respectively. Thus, by adjusting the adjusting nut 28 downward, the spring is compressed. When the elastic force of the compressed spring is equal to the gravity of the tray 22, the lifting rod 23, the adjusting nut 28 and the spreading force of the two claw assemblies 26, the elastic force of the spring reaches an equilibrium with the gravity of the parts connected to the lifting rod 23. It can be understood that if the adjusting nut 28 is further adjusted downward to further compress the spring, under the action of the increasing elastic force, the lifting rod 23 and the tray 22 will move upward, and at the same time, the claws of the claw assembly 26 will spread further. That is to say, by adjusting the position of the adjusting nut 28 to control the compression amount of the spring, the spreading size of the claw assembly 26 can be adjusted, so as to adapt to clamping quartz cylinders 4 or other materials of different sizes, improving the adaptability of the skip.

[0068] According to an embodiment of the present invention, the traction assembly includes two lifting rods 23 and two elastic members 27. The two lifting rods 23 are arranged in parallel, the two lifting rods 23 are respectively arranged on both sides of the tray 22, and the two lifting rods 23 are connected to both sides of the claw assembly 26. Each elastic member 27 is arranged corresponding to one lifting rod 23. It can be understood that arranging two lifting rods 23 and two elastic members 27 is beneficial to improving the connection stability and facilitating the clamping and fixing of the material. At the same time, arranging two lifting rods 23 and two elastic members 27 is convenient for the connection of the claw assembly 26, and the two lifting rods 23 are connected to the claw assembly 26, which can better lift the claw assembly 26 to act and keep the forces on both sides of the claw assembly 26 uniform.

[0069] As Figures 5 to 7 shown, according to an embodiment of the present invention, the claw assembly 26 includes a pressing block 261, two supporting plates 263, two claws 268 and a mounting substrate 269. The pressing block 261 is fixedly connected to the traction assembly; one supporting plate 263 is rotatably connected to one side of the pressing block 261, and the other supporting plate 263 is rotatably connected to the other side of the pressing block 261; one end of one claw 268 is rotatably connected to one supporting plate 263, and one end of the other claw 268 is rotatably connected to the other supporting plate 263. Among them, when the pressing block 261 is pressed down and lifted, the two claws 268 are clamped and spread by the rotation of the supporting plates 263; the mounting substrate 269 connects the two claws 268 to keep the two claws 268 in the same plane for clamping and spreading.

[0070] Exemplarily, the jaw assembly 26 includes a mounting substrate 269, two jaws 268, a stepped screw 267 screwed onto the mounting substrate 269 for the two jaws 268 to rotate around, and a connecting shaft 266 connected to the threaded hole at the tail end of the jaw 268. The other end of the connecting shaft 266 is inserted into the bearing hole of the spherical plain bearing 264. The support plate is connected to the spherical plain bearing 264 through the threaded hole at the tail end, and the two support plates 263 are connected to the pressure block 261 through a pin shaft 262 and a shaft retaining ring 265. The two stepped screws 267 are the pivot shafts for the jaws 268 to open and clamp. When the pressure block 261 is pressed down and lifted, the two jaws 268 are clamped and opened through the pin shaft 262 and the support plates 263. Thus, since the pressure block 261 is fixedly connected to the traction assembly, when the traction assembly moves, it drives the pressure block 261 to move, causing the pressure block 261 to be pressed down or lifted, thereby realizing the clamping and opening of the two jaws 268 to clamp or release the quartz tube 4, with a simple structure.

[0071] According to an embodiment of the present invention, flexible buffer structures are provided on the opposite sides of the two jaws 268. The flexible buffer structure can be a rubber sleeve, a silica gel sleeve, or other soft rubber materials. Specifically, a urethane rubber with a buffering effect is installed on the inner side of the clamping of the jaw 268, which is used to contact the tube wall when clamping the quartz tube 4 to prevent scratching the tube wall.

[0072] As Figure 3 shown, according to an embodiment of the present invention, the transport vehicle includes at least two groups of jaw assemblies 26, and the at least two groups of jaw assemblies 26 are arranged at intervals along the extension direction of the traction assembly. The at least two groups of jaw assemblies 26 are provided to be arranged at intervals in the height direction of the quartz tube 4, so as to ensure the stability of clamping the quartz tube 4 and reduce the risk of the quartz tube 4 falling off.

[0073] Please refer to Figures 1 to 3 , according to an embodiment of the present invention, the vehicle frame 1 includes a mounting frame 15 and a flipping frame 2. The mounting frame 15 is provided with a mounting space; the flipping frame 2 is installed in the mounting space and connected to the mounting frame 15. A bottom support 211 is provided on one side of the flipping frame 2, and the side of the flipping frame 2 where the bottom support 211 is provided is a clamp space. The traction assembly is arranged on the side of the flipping frame 2 facing away from the clamp space, and the traction assembly is movably connected to the flipping frame 2. An elastic member 27 is connected between the traction assembly and the flipping frame 2.

[0074] It can be understood that the mounting frame 15 includes a chassis 12 and a C-shaped square tube frame on the chassis 12. The chassis 12 is a widened load-bearing chassis to improve the load-bearing capacity. The spacing between multiple legs at the bottom of the chassis 12 is increased to allow the lifting AGV to enter and exit smoothly from the bottom. The frame is welded by multiple vertical square tubes 151 and multiple horizontal square tubes 153. At the intersection of the two vertical square tubes 151 and one horizontal square tube 153 at the rear side, a steel pipe bent into a C shape is welded as a handle for manually pushing and pulling the material cart. Optionally, at least one side of the mounting frame 15 is provided with a push-pull handle 152, which is convenient for manual grasping to push the material cart.

[0075] In one embodiment, the flipping frame 2 is an L-shaped frame with a bucket-shaped bottom support 211. Specifically, it can be welded into a main frame structure by two vertical square tubes and four horizontal square tubes. One side of the flipping frame 2 serves as a clamping space for placing and clamping the quartz tube 4. On the other side of the flipping frame 2, a traction component can be installed to reasonably utilize the installation space and prevent the traction component from hindering the placement of the quartz tube 4.

[0076] As Figure 2 shown, according to an embodiment of the present invention, a plurality of casters 11 are provided at the bottom of the mounting frame 15. Define one side of the mounting frame 15 as the front side and the other side as the rear side. The caster 11 located on the front side is a fixed caster, and the caster 11 located on the rear side is a swivel caster. It can be understood that casters 11 are provided at all four corners of the bottom of the mounting frame 15. The four casters 11 are divided into two fixed casters and two swivel casters. The fixed casters are arranged on the front side of the mounting frame 15, and the swivel casters are arranged on the rear side of the material cart chassis. In this way, when pushing the material cart at the rear side of the mounting frame 15, this setting facilitates the steering movement of the material cart when the AGV is not used.

[0077] The following combines Figures 8 to 16 to introduce the material transportation process of an embodiment of the material transportation vehicle of the present invention:

[0078] When the flipping frame 2 is vertical, as Figures 8 to 10 shown, when a certain specification of quartz tube 4 is just placed in the material transportation vehicle, when the bottom of the quartz tube 4 contacts the support plate 22 (at this time, there is no pressure), the distance between the support plate 22 and the bucket-shaped bottom support 211 for load-bearing at the bottom of the L-shaped frame is h. At this time, the support plate 22 and the two claw assemblies 26 are in a state of force balance with their own gravity under the action of the adjusting nut 28 and the compression spring. At this time, the claw 268 is in an open state and does not contact the wall of the quartz tube 4.

[0079] When the quartz tube 4 continues to move downward and presses the support plate 22 to move downward, at this time, the support plate 22 will press the pressing block 261 of the claw assembly 26 through the lifting rod 23, thereby causing the claw 268 to clamp the wall of the quartz tube 4. At the same time, the adjusting nut 28 moves downward along with the lifting rod 23, and continues to compress the compression spring.

[0080] When the quartz tube 4 descends to the bottom (i.e. the support plate 22 is in contact with the bucket-shaped bottom support 211), the state is as follows: Figures 11 to 13 As shown, at this time, the nuts on the upper and lower surfaces of the pressure block 261 of the clamping jaw assembly 26 are adjusted so that the clamping jaws clamp the wall of the quartz tube 4 and clamp it. At this point, the debugging of the material transport vehicle is completed. Once the quartz tube 4 is subsequently placed on the support plate 22 of the material vehicle, the support plate 22 will be automatically pressed to fit with the bottom support 211, and the clamping jaws automatically clamp the wall of the quartz tube 4 to complete the automatic clamping and positioning of the quartz tube 4.

[0081] like Figure 14 As shown, at this time, the material cart completes the automatic clamping and positioning of the quartz tube 4. In this state, the material cart can safely carry the quartz tube 4 for transportation. During transportation, the worker can move the material cart by pushing and pulling the handle 152, or use a lifting AGV to enter between the two casters 11 at the bottom of the material cart, lift the material cart, and lift the casters 11 off the ground. After that, the material cart will be completely transported by the AGV.

[0082] When the material transport vehicle arrives at the designated location, it is necessary to perform material picking operations, such as Figure 15 and Figure 16 As shown, when the quartz tube 4 needs to be lifted, the lifting rod 23 of the quartz tube 4 is directly lifted. When the quartz tube 4 is lifted, the spring will drive the lifting rod 23 to rise through the adjusting nut 28, thereby driving the pressure block 261 of the claw assembly 26 to rise, and further through the pin shaft 262, the support plate 263, and the joint bearing 264, the tail end of the claw 268 is pulled together to make the front end of the claw 268 open, automatically releasing the clamping lock on the quartz tube 4. At this time, the automatic unlocking function of the clamping of the quartz tube 4 is completed, and the quartz tube 4 can be directly lifted away.

[0083] The utility model is not only applicable to the field of automatic positioning, clamping and automatic unlocking of quartz tubes 4 in the photovoltaic industry, but also applicable to all other occasions where the weight of a heavy object is required to be used to position, fix and automatically unlock the heavy object.

[0084] Please refer to Figure 1 and Figure 17 The embodiment of the second aspect of the utility model provides a semiconductor transfer device, including a material transport vehicle of any of the above embodiments; a quartz tube 4, which is arranged on the material transport vehicle; and a hook device, at least part of which is installed on the quartz tube 4.

[0085] The hook device includes a hook body 100, a movable block 200 and a connecting member 300. The hook body 100 forms a receiving cavity with an opening 110. The movable block 200 is movably arranged in the receiving cavity to at least partially open or at least partially close the opening 110. The connecting member 300 is used to be installed on the quartz cylinder 4. The connecting member 300 is adapted to move towards the hook body 100 to push the movable block 200 to move and open the opening 110, and switch the connecting member 300 to the hooked state. In the hooked state, the connecting member 300 at least partially enters the receiving cavity, and the movable block 200 is adapted to abut against and lock the connecting member 300.

[0086] It can be understood that in this embodiment, the hook body 100 is connected to the cable of the lifting equipment and moves with the movement of the cable to realize the horizontal movement and the lifting movement in the vertical direction of the hook body 100. The connecting member 300 is installed on the quartz cylinder 4. The hook body 100 can be hooked with the connecting member 300 during the movement process, so that the quartz cylinder 4 can be lifted and transported.

[0087] In an optional embodiment, the connecting member 300 is fixedly installed or detachably installed on the quartz cylinder 4. The lifting equipment controls the hook body 100 to move above the connecting member 300, aligns the connecting member 300 with the opening 110 of the receiving cavity, and then the lifting equipment can control the hook body 100 to move downward, so that the connecting member 300 can push the movable block 200 to move and open the opening 110. The connecting member 300 can enter the receiving cavity through the opening 110. After the connecting member 300 enters the receiving cavity, the movable block 200 can reset, so that the movable member abuts against and locks the connecting member 300 to realize automatic hooking. At this time, when the lifting equipment controls the hook body 100 to move upward, the connecting member 300 and the quartz cylinder 4 can be lifted to realize the transportation of the quartz cylinder 4. In this process, manual hooking is not required, which improves the hoisting and transportation efficiency.

[0088] In this embodiment, the receiving cavity of the hook body 100 has an opening 110. The receiving cavity can better accommodate and fix the connecting member 300. Through the opening 110 of the receiving cavity, the connecting member 300 can accurately align with and enter the receiving cavity, and then be locked under the action of the movable block 200, thus realizing the process of automatic hooking. This design not only improves the accuracy of hooking, but also increases the stability and safety during the operation process. The hook body 100 has an opening 110 of the receiving cavity, so that the connecting member 300 can smoothly enter and be locked, avoiding instability or detachment during the operation process, and effectively reducing the accidental risk.

[0089] According to an embodiment of the present invention, with reference to Figures 17 - 19 as shown, the movable block 200 is slidably arranged on the hook body 100, or the movable block 200 is rotatably arranged on the hook body 100.

[0090] It can be understood that in an alternative embodiment, the movable block 200 is rotatably arranged on the hook body 100, and the hook body 100 can open or close the opening 110 during rotation to facilitate the end of the connecting member 300 to enter and exit the accommodating cavity.

[0091] In the initial state, the hook body 100 is separated from the connecting member 300, and the connecting member 300 is arranged outside the accommodating cavity. When the hook body 100 moves towards the connecting member 300, the connecting member 300 pushes the movable block 200 to rotate to open the opening 110. At this time, the hook body 100 can continue to move downward, so that the connecting member 300 enters the accommodating cavity from the opening 110. After the connecting member 300 enters the accommodating cavity to a certain extent, the movable member can automatically fall back under the action of gravity to close the opening 110. At this time, when the lifting device controls the hook body 100 to move upward, the connecting member 300 can abut against the movable block 200 to achieve locking.

[0092] In another alternative embodiment, the movable block 200 is slidably arranged on the hook body 100. In the initial state, the hook body 100 is separated from the connecting member 300, and the connecting member 300 is arranged outside the accommodating cavity. When the hook body 100 moves towards the connecting member 300, the connecting member 300 pushes the movable block 200 to slide to open the opening 110. At this time, the hook body 100 can continue to move downward, so that the connecting member 300 enters the accommodating cavity from the opening 110 to realize the hooking of the connecting member 300. Through the sliding arrangement of the movable block 200, the connecting member 300 can smoothly enter the accommodating cavity to complete the hooking process.

[0093] According to an embodiment of the present invention, referring to Figure Figure 18 and Figure 19 as shown, the hook body 100 is provided with a guiding groove 120, and the movable block 200 is adapted to slide along the guiding groove 120.

[0094] It can be understood that in this embodiment, by providing the guiding groove 120 on the hook body 100, through the setting of the guiding groove 120, the movable block 200 can be effectively guided to slide along a specific path, ensuring the stability and accuracy of the connecting member 300 during the hooking process. The movable block 200 sliding along the guiding groove 120 can provide a more precise movement trajectory, ensuring that the connecting member 300 can smoothly enter the accommodating cavity and be locked, avoiding unnecessary swinging or deviation. This design can effectively increase the success rate of hooking, reduce the friction force during the sliding process of the movable block 200, and improve the reliability and stability of the entire automatic hooking device at the same time.

[0095] According to an embodiment of the present invention, referring to Figure 18 and Figure 19As shown, the hook device further includes an elastic member 130. The elastic member 130 connects the movable block 200 and the hook body 100. During the process of the connecting member 300 switching to the hook state, the elastic member 130 is adapted to push the movable block 200 to slide, so that the movable block 200 abuts against and locks the connecting member 300.

[0096] It can be understood that in an alternative embodiment, one end of the elastic member 130 is connected to the movable block 200, and the other end is connected to the inner wall of the hook body 100. When the hook body 100 moves downward, the connecting member 300 pushes the movable block 200 to slide and open the opening 110. At this time, the elastic member 130 is compressed. After the connecting member 300 enters the receiving cavity to a certain extent, the elastic member 130 pushes the movable block 200 to slide back to its original position, so that the movable block 200 abuts against the connecting member 300 to achieve locking.

[0097] The elastic member 130 can provide a pre-tightening force and can always maintain a certain tension during the hooking process to ensure that the contact between the connecting member 300 and the movable block 200 is always tight and stable. The presence of the elastic member 130 can provide additional force and flexibility to help the movable block 200 better adapt to the shape and position changes of the connecting member 300 during the hooking process. When the connecting member 300 switches to the hook state, the elastic member 130 can effectively push the movable block 200 to slide, ensuring that the movable block 200 can accurately abut against and lock the connecting member 300, thereby completing the hooking operation. This design not only improves the accuracy and stability of the hooking, but also reduces the workload of the operator.

[0098] According to an embodiment of the present invention, a rotating member 220 is rotatably provided on the movable block 200. The connecting member 300 is adapted to move towards the hook body 100 to move between the hook state and the unhook state. In the hook state, the rotating member 220 abuts against the connecting member 300; in the unhook state, the rotating member 220 is separated from the connecting member 300, and the connecting member 300 is adapted to move relative to the hook body 100 to push the rotating member 220 to drive the movable block 210 to slide and open the opening 110, separating the connecting member 300 from the hook body 100.

[0099] It can be understood that in this embodiment, this design enables the hook device to have an automatic unhooking function, greatly improving the operation efficiency and safety. When an unhooking operation is required, the connecting member 300 and the hook body 100 can move relative to each other, pushing the rotating member 220 to rotate and driving the movable block 200 to slide to open the opening 110, thereby realizing the rapid detachment of the connecting member 300 from the hook body 100 and conveniently and quickly completing the loading and unloading operation.

[0100] According to an embodiment of the present invention, refer to Figure 18 and Figure 19As shown, at least one of the contact parts between the movable block 200 and the connecting member 300 is provided with an inclined surface, and the inclined surface is used for guiding during the process of the connecting member 300 and the hook body 100 moving towards each other.

[0101] It can be understood that in this embodiment, at least one of the contact parts of the movable block 200 and the connecting member 300 is provided with an inclined surface, and it is used for guiding during the process of the connecting member 300 and the hook body 100 moving towards each other. By providing an inclined surface at the contact part, it can guide the correct alignment of the connecting member 300 and the hook body 100 when they move towards each other, so that the connecting member 300 can push the movable block 200 to slide. The guiding function of the inclined surface can help eliminate problems such as friction, jamming or incorrect installation caused by inaccurate alignment. It can guide the connecting member 300 and the movable block 200 to correctly align and cooperate with each other during the movement process, thus ensuring the smooth progress of the hook operation.

[0102] The shape and angle of the inclined surface can be designed according to actual needs to ensure that the connecting member 300 can accurately enter the accommodation cavity of the movable block 200 or the hook body 100 and complete the locking smoothly. This embodiment does not make specific limitations on this.

[0103] In an alternative embodiment, the movable block 200 is provided with an inclined surface for guiding. In another alternative embodiment, the connecting member 300 is provided with an inclined surface for guiding. In another alternative embodiment, both the movable block 200 and the connecting member 300 are provided with inclined surfaces for guiding, which can be designed according to specific requirements and actual application scenarios. This embodiment does not make specific limitations on this.

[0104] It can be understood that in this embodiment, the transfer equipment for semiconductors includes a quartz cylinder 4, a hook device and the above-mentioned material transport vehicle. The quartz cylinder 4 is a material container for secondary charging of a crystal pulling furnace, usually made of high-purity quartz material. It is used to protect semiconductor materials and provide good sealing and protection during the transfer process. The inside of the quartz cylinder 4 usually has a shape and size suitable for placing semiconductor materials. The material transport vehicle is a carrier for carrying and transporting semiconductor materials. It is usually made of strong metal materials and has sufficient strength and stability.

[0105] In an alternative embodiment, the material transport vehicle is transported by an AGV (Automated Guided Vehicle), which is equipped with an electric control system and can realize the automatic transportation of the quartz cylinder 4. An AGV is an unmanned vehicle that can autonomously drive in places such as factories and warehouses. It can sense the surrounding environment through various sensors such as lasers, ultrasonic waves, and vision, so as to perform route planning and obstacle avoidance and realize automated transportation tasks.

[0106] In an alternative embodiment, a transport vehicle corresponds to transporting one quartz cylinder 4. This design is simple and direct, ensuring that each quartz cylinder 4 can be fully fixed and protected during transportation, reducing the possibility of interference between the quartz cylinders 4, and at the same time, it is easier to control the stability and safety of transportation. In another alternative embodiment, a transport vehicle can be designed to be able to load multiple quartz cylinders 4 simultaneously to improve the transportation efficiency. This design is applicable to scenarios where batch transportation is required, which can reduce the number of loading and unloading operations and improve production efficiency. Different embodiments can be selected according to actual production requirements and process flows, and specific limitations are not made in this embodiment.

[0107] In a specific embodiment, the operation process of the transfer equipment for semiconductors can be as follows: Manually unscrew the special raw crystal head for crystal pulling and install an automatic hook; The AGV transport vehicle transports the transport vehicle with a full quartz cylinder 4 to the loading docking interface; Automatically complete hanging the quartz cylinder 4, feeding, and unhooking; The AGV transports out the transport vehicle with an empty quartz cylinder 4 and transports in a new transport vehicle with a full quartz cylinder 4; Continue to automatically complete hanging the quartz cylinder 4, feeding, and unhooking; Until the feeding is completed; Manually unscrew the hook and install the special raw crystal head for crystal pulling to complete the entire feeding process.

[0108] It can be understood that since the transport vehicle in the transfer equipment for semiconductors has the beneficial effects of the above embodiments, the transfer equipment for semiconductors correspondingly has the beneficial effects of the above embodiments. The specific implementation manners can refer to the above embodiments, and details are not repeated in this application.

[0109] Finally, it should be noted that the above embodiments are only used to illustrate the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the embodiments, those of ordinary skill in the art should understand that various combinations, modifications, or equivalent replacements of the technical solutions of the present invention do not depart from the spirit and scope of the technical solutions of the present invention and should all be covered within the scope of the claims of the present invention.

Claims

1. A material transport vehicle, characterized in that, Comprising: A vehicle frame, which is provided with a clamp space, and a bottom support is provided at the bottom of the clamp space; A traction assembly, which is movably connected to the vehicle frame, the traction assembly is provided with an elastic member, and the elastic member is elastically abutted against the vehicle frame; A support plate, which is connected to one end of the traction assembly adjacent to the bottom support, and there is a movable interval between the support plate and the bottom support; A claw assembly, which is fixedly connected to the traction assembly and extends towards the clamp space. Wherein, the support plate is used to support materials, and the support plate moves towards the bottom support under the pressure of the materials, so that the traction assembly pulls the claw assembly to clamp the materials. When the materials are away from the support plate, the support plate moves away from the bottom support, and the traction assembly drives the claw assembly to open under the elastic restoring force of the elastic member.

2. The material transport vehicle according to claim 1, wherein The traction assembly includes: A lifting rod, which is movably connected to the vehicle frame, one end of the lifting rod is connected to the support plate, and the claw assembly is fixedly connected to the lifting rod; The elastic member, one end of the elastic member abuts against the lifting rod, and the other end abuts against the vehicle frame.

3. The material transport vehicle according to claim 2, characterized in that, The traction assembly further includes an adjusting nut, which is arranged on the lifting rod, the adjusting nut can move along the length direction of the lifting rod, the elastic member is a spring, the spring is sleeved on the lifting rod, one end of the spring abuts against the adjusting nut, and the other end abuts against the vehicle frame. The adjusting nut is adapted to move on the lifting rod to adjust the compression amount of the spring.

4. The material transport vehicle according to claim 2, characterized in that, The traction assembly includes two lifting rods and two elastic members. The two lifting rods are arranged in parallel, the two lifting rods are respectively arranged on both sides of the support plate, and the two lifting rods are connected to both sides of the claw assembly. Each elastic member is arranged corresponding to one lifting rod.

5. The material transport vehicle according to any one of claims 1 to 4, characterized in that, The claw assembly includes: A pressing block, which is fixedly connected to the traction assembly; Two support plates, one support plate is rotatably connected to one side of the pressing block, and the other support plate is rotatably connected to the other side of the pressing block; Two claws, one end of one claw is rotatably connected to one support plate, and one end of the other claw is rotatably connected to the other support plate. Wherein, when the pressing block moves down and up, the two claws are clamped and opened by the rotation of the support plates; An installation base plate, which connects the two claws to keep the two claws clamping and opening in the same plane.

6. The transporter according to claim 5, characterized in that Flexible buffer structures are provided on the opposite sides of the two claws.

7. The material transport vehicle according to any one of claims 1 to 4, characterized in that, The material transport vehicle includes at least two groups of the claw assemblies, and the at least two groups of claw assemblies are arranged at intervals along the extension direction of the traction assembly.

8. The material transport vehicle according to any one of claims 1 to 4, characterized in that, The vehicle frame includes: An installation frame, which is provided with an installation space; The turnover frame is installed in the installation space and connected to the installation rack. A bottom support is provided on one side of the turnover frame. The side of the turnover frame where the bottom support is provided is a clamp space. The traction assembly is arranged on the side of the turnover frame facing away from the clamp space. The traction assembly is movably connected to the turnover frame, and an elastic member is connected between the traction assembly and the turnover frame.

9. The material transport vehicle according to claim 8, wherein, A plurality of casters are provided at the bottom of the installation rack. Define one side of the installation rack as the front side and the other side as the rear side. The caster located on the front side is a fixed caster, and the caster located on the rear side is a swivel caster.

10. A transfer device for semiconductors, characterized in that, Comprising: The material transport vehicle according to any one of claims 1 to 9; A quartz tube, arranged on the material transport vehicle; A hook device, which includes a hook body, a movable block and a connecting member. The hook body forms a receiving cavity with an opening. The movable block is movably arranged in the receiving cavity to at least partially open or at least partially close the opening; the connecting member is used for installation to the quartz tube, and the connecting member is adapted to move towards the hook body to push the movable block to move and open the opening, switching the connecting member to the hooked state; in the hooked state, the connecting member at least partially enters the receiving cavity, and the movable block is adapted to abut to lock the connecting member.

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