Radio frequency electrode coupling structure, chamber electrode and coating equipment

Abstract

The utility model relates to a radio frequency electrode coupling structure, chamber electrode and coating equipment, including external current subassembly, elastic connecting piece, chamber and chamber door, said chamber with chamber door carries out movable connection, chamber is equipped with external connecting subassembly, chamber door is equipped with elastic connecting piece, the setting position of external connecting subassembly is adapted to elastic connecting piece, the elastic connecting piece is equipped with elastic connecting piece. Opening and closing between the cavity door and the cavity are used for controlling connection and disconnection between the elastic connecting piece and an external current assembly. According to the utility model, through the opening and closing process of the cavity door on the cavity, the elastic connecting pieces for installing the cavity door and the cavity respectively are disconnected from and connected with an external current assembly, and the connection and disconnection process of radio frequency electrode coupling is simpler, the electrified electrode assembly is not directly contacted, and the safety risk is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of coating, in particular to a radio frequency electrode coupling structure, a chamber electrode and a coating device. Background Art

[0002] Atomic layer deposition technology forms a thin film by alternately introducing gaseous precursors into a reaction chamber in pulses and undergoing surface saturation chemical reactions on a deposition substrate. Through an atomic layer deposition coating device, substances can be deposited layer by layer on the surface of the substrate in the form of single atomic layers. Each coating is one atomic layer. According to the atomic characteristics, coating 10 times is approximately 1 nm. The unique process principle of atomic layer deposition enables its wide application in various industries.

[0003] In the existing coating devices, during the coupling process of the chamber electrode, a hard connection method is used to introduce the radio frequency power supply, and an external switch is set to control the electrode. However, the operation process of opening and disconnecting the electrode in this connection method is cumbersome. Summary of the Utility Model

[0004] The first aspect of the utility model aims to solve the problem that in the existing electrode coupling process, a hard connection method is used for connection, and an external switch is set to control the access and disconnection of the radio frequency power supply. Since the coupling structure is energized, the cumbersome operation process will increase the safety risk. A radio frequency electrode coupling structure is provided, which can synchronously turn on and off the radio frequency power supply through the opening and closing of the chamber door. The main idea is as follows:

[0005] A radio frequency electrode coupling structure includes an external current component, an elastic connecting piece, a chamber and a chamber door. The chamber is movably connected to the chamber door. An external connection component is provided on the chamber, and an elastic connecting piece is provided on the chamber door. The installation position of the external connection component is adapted to the elastic connecting piece. The opening and closing between the chamber door and the chamber are used to control the on-off of the elastic connecting piece and the external current component. In this solution, the external current component and the elastic connecting piece are respectively installed on the chamber and the chamber door. The chamber door is used to realize the closing and opening of the chamber. The chamber door is installed on the chamber in a movable connection manner. No wire is provided to connect the external current component and the elastic connecting piece. Through the process of the chamber door opening and closing on the chamber, the elastic connecting piece installed on the chamber door and the chamber is disconnected and connected to the external current component. When the chamber door is closed, the elastic connecting piece is connected to the external current component. When the chamber door is opened, the elastic connecting piece is disconnected from the external current component. Then, the connection and disconnection process of the radio frequency electrode coupling in this solution is simpler, without directly contacting the energized electrode component, reducing the safety risk.

[0006] Preferably, a support plate is provided on the end face in the opening direction of the chamber. A hinge support is provided on the support plate of the chamber. An installation hole 1 is opened on the support plate. The chamber is hinge-connected to the chamber door through the hinge support. The support plate is provided to install the hinge support so that the chamber door is installed on the chamber through a rotating shaft. The chamber door controls the opening and closing of the chamber by rotating on the chamber. A handle is provided on the chamber door to facilitate the opening and closing of the chamber door. When the chamber door fits against the support plate of the chamber, the chamber is closed. An installation hole 1 is opened on the support plate, and the installation hole 1 is used to install an external current component.

[0007] Preferably, the external current component includes an N-type plug and an external radio frequency. The N-type plug is connected to the external radio frequency through a coaxial cable. A contact head is provided at the upper end of the N-type plug. A connecting plate is provided on the outer wall of the N-type plug. The N-type plug is arranged in the installation hole 1, and the end face of the chamber of the N-type plug is connected to the mounting plate of the N-type plug through a screw. The N-type plug is arranged in the installation hole 1, and the mounting plate on the N-type plug is firmly connected to the support plate of the chamber through a screw. The N-type plug is connected to the external radio frequency through a coaxial cable. A contact head is provided at the upper end of the N-type plug, and the setting direction of the contact head is the same as the opening direction of the chamber.

[0008] Preferably, an installation hole 2 is opened on the chamber door. A convex platform is provided on the inner wall of the installation hole 2. The elastic connecting piece is installed on the chamber door through an insulating component. The insulating component is installed in the installation hole 2, and the elastic connecting piece extends out of the connection surface of the chamber door and the chamber.

[0009] The second aspect of the present invention is to solve the technical problem that the abutment during the connection of the elastic connecting piece controlled by the opening and closing of the chamber door is prone to damage. Further, the elastic connecting piece includes an elastic electrode head and a conductive screw. The conductive screw is installed at the upper end of the elastic electrode head. A copper sheet is installed on the conductive screw. External threads are provided on the outer wall of the upper end of the elastic electrode head. The elastic electrode head abuts against the contact head of the N-type plug. The contact point of the elastic connecting piece used for connecting with the N-type plug is set as the elastic electrode head. When the chamber door and the chamber are closed, the elastic electrode head abuts against the contact head of the N-type plug. The elastic electrode head can effectively absorb the vibration and impact force generated between the chamber door and the chamber and between the elastic connecting piece and the N-type plug during the closing process of the chamber door, avoiding damage to the elastic electrode head and the N-type plug caused by vibration and impact force, and can extend the service life of the elastic electrode head and the N-type plug. Moreover, the elastic electrode head can also achieve a certain degree of adaptive adjustment during the connection with the contact head, and will not transfer the acting force completely to the conductive screw provided at the upper end of the elastic electrode head, improving the service life of the conductive screw.

[0010] The third aspect of the present utility model is to solve the technical problem that the poor insulation effect of the elastic connecting piece on the chamber door after being energized affects the coating effect. Further, the insulation assembly includes an upper insulation cover, a lower insulation cover and a ceramic ring. The upper insulation cover and the lower insulation cover are installed on the second mounting hole of the chamber door through screws. Conductive screws are provided on the upper insulation cover and the lower insulation cover. The ceramic ring is arranged on the convex platform in the second mounting hole. Threaded holes are formed in the inner wall of the ceramic ring. The ceramic ring is threadedly connected with the external thread of the elastic electrode head through the internal thread of the threaded hole. The conductive screws are arranged on the upper insulation cover and the lower insulation cover. The second mounting hole is opened on the chamber door. The conductive screws are installed and positioned through the upper insulation cover and the lower insulation cover, and the conductive screws extend into the inner cavity of the second mounting hole. The conductive screws are not in contact connection with the chamber door. The elastic electrode head is arranged on the ceramic ring. The ceramic ring is installed on the convex platform in the second mounting hole, so that the elastic electrode head arranged in the ceramic ring is not in contact connection with the chamber door. After the elastic connecting piece is connected to the external radio frequency current, under the action of the insulation assembly, the chamber door is not charged, ensuring that the reaction chamber is not charged and avoiding affecting the coating effect.

[0011] Preferably, the upper insulation cover is provided with a mounting groove, and the lower insulation cover is provided with a mounting hole. The lower insulation cover is provided with a conductive screw through the mounting hole. The upper end of the screw head of the conductive screw is embedded in the mounting groove of the upper insulation cover, and a copper sheet is arranged between the lower end of the screw head of the conductive screw and the lower insulation cover. The mounting groove opened on the upper insulation cover can eliminate the height difference caused by the screw head of the conductive screw, so that the copper sheet arranged between the upper insulation cover and the lower insulation cover can be insulated.

[0012] A chamber electrode includes a chamber electrode coupling structure, and further includes an introducing electrode and an electrode plate. The upper end of the introducing electrode is connected to the elastic connecting piece through a copper sheet, the lower end of the introducing electrode is connected to the electrode plate, the introducing electrode is installed at the middle position of the chamber door, and the electrode plate is arranged on the lower end face of the chamber door.

[0013] Preferably, the electrode plate is arranged in the inner cavity of the chamber, a sealing member is arranged at the installation position of the introducing electrode and the chamber door, and an insulating plate is arranged between the electrode plate and the chamber door.

[0014] A coating device includes a chamber electrode.

[0015] The beneficial effects of the present utility model are as follows:

[0016] During the process of opening and closing the chamber door on the chamber, the elastic connecting piece installed on the chamber door and the chamber is disconnected and connected to the external current assembly. When the chamber door is closed, the elastic connecting piece is connected to the external current assembly. When the chamber door is opened, the elastic connecting piece is disconnected from the external current assembly. Then the connection and disconnection process of the radio frequency electrode coupling in this solution is simpler, without directly contacting the energized electrode assembly, reducing the safety risk. Description of the Drawings

[0017] Figure 1 This is a schematic structural diagram when the present utility model is opened.

[0018] Figure 2 This is a schematic structural diagram when the radio frequency electrode of the present utility model is disconnected.

[0019] Figure 3 This is a schematic structural diagram when the present utility model is closed.

[0020] Figure 4 This is a schematic structural diagram when the radio frequency electrode of the present utility model is coupled.

[0021] Figure 5 This is a schematic structural diagram of the present utility model.

[0022] Reference numerals include: 1. External current assembly; 11. N-type plug; 12. Contact head; 13. Connection plate; 2. Elastic connecting member; 21. Elastic electrode head; 22. Conductive screw; 3. Insulating assembly; 31. Upper insulating cover; 32. Lower insulating cover; 33. Ceramic ring; 4. Chamber; 41. Support plate; 42. Hinge support; 43. First mounting hole; 5. Chamber door; 51. Second mounting hole; 52. Convex platform; 6. Copper sheet; 7. Introducing electrode; 8. Electrode plate. Detailed implementation manners

[0023] In order to make the objectives, technical solutions and advantages of the embodiments clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. When the following description refers to the accompanying drawings, unless otherwise indicated, the same numerals in different drawings represent the same or similar elements. The implementation manners described in the following exemplary embodiments do not represent all implementation manners consistent with the present disclosure. On the contrary, they are merely examples of devices and methods consistent with some aspects of the present disclosure as detailed in the appended claims.

[0024] In the present disclosure, unless otherwise stated, the orientation terms such as "inside, outside" are defined according to the self-profile of the corresponding components. The terms such as "first, second" used in the present disclosure are used to distinguish one element from another and do not have sequentiality and importance.

[0025] Embodiment 1:

[0026] Basically as shown in the attached Figure 1 to the attached Figure 4As shown in the figure, a radio frequency electrode coupling structure according to this embodiment includes an external current component 1, an elastic connecting member 2, a chamber 4, and a chamber door 5. The chamber 4 is movably connected to the chamber door 5. The external connecting component 1 is provided on the chamber 4, and the elastic connecting member 2 is provided on the chamber door 5. The installation position of the external connecting component 1 is adapted to the elastic connecting member 2. The opening and closing between the chamber door 5 and the chamber 4 are used to control the on-off of the elastic connecting member 2 and the external current component 1.

[0027] In this embodiment, the external current component 1 and the elastic connecting member 2 are respectively installed on the chamber 4 and the chamber door 5. The chamber door 5 is used to close and open the chamber 4. Figure 1 Figure 5 is a state diagram of the chamber door 5 opened on the chamber 4. Figure 3 Figure 7 is a state diagram of the chamber door 5 closed on the chamber 5. The chamber door 5 is installed on the chamber 5 in a movable connection manner. As Figure 2 shown, no wire is provided for connection between the external current component 1 and the elastic connecting member 2; through the process of opening and closing the chamber door 5 on the chamber 4, the elastic connecting member 2 installed on the chamber door 5 and the chamber 4 is disconnected and connected to the external current component 1.

[0028] As Figure 4 shown, when the chamber door 5 is closed, the elastic connecting member 2 is connected to the external current component 1; as Figure 2 shown, when the chamber door 5 is opened, the elastic connecting member 2 is disconnected from the external current component 1; then the connection and disconnection process of the radio frequency electrode coupling in this solution is simpler, without directly contacting the energized electrode component, reducing the safety risk.

[0029] A support plate 41 is provided on the end face of the chamber 4 in the opening direction. A hinge support 42 is provided on the support plate 41 of the chamber 4. An installation hole 43 is opened on the support plate 41. The chamber 4 is hinge-connected to the chamber door 5 through the hinge support 42. A handle is provided on the chamber door 5. The support plate 41 is provided to install the hinge support 42 so that the chamber door 5 is installed on the chamber 4 through a rotating shaft. The chamber door 5 controls the opening and closing of the chamber 4 by rotating on the chamber 4. A handle is provided on the chamber door 5 to facilitate opening and closing of the chamber door 5; when the chamber door 5 fits with the support plate 41 of the chamber 4, the chamber 4 is closed. An installation hole 43 is opened on the support plate 41. The installation hole 43 is used to install the external current component 1.

[0030] The external current component 1 includes an N-type plug 11 and an external radio frequency. The N-type plug 11 is connected to the external radio frequency through a coaxial cable. A contact head 12 is provided at the upper end of the N-type plug 1. A connecting plate 13 is provided on the outer wall of the N-type plug 11. The end face of the chamber 4 in which the N-type plug 11 is arranged in the first mounting hole 43 is connected to the mounting plate 13 of the N-type plug 11 by screws. The N-type plug 11 is arranged in the first mounting hole 43, and the mounting plate 13 on the N-type plug 11 is firmly connected to the support plate 41 of the chamber 4 by screws. The N-type plug 11 is connected to the external radio frequency through a coaxial cable. A contact head 12 is provided at the upper end of the N-type plug 11, and the setting direction of the contact head 12 is the same as the opening direction of the chamber 4.

[0031] The chamber door 5 is provided with a second mounting hole 51. A convex platform 52 is provided on the inner wall of the second mounting hole 51. The elastic connecting member 2 is installed on the chamber door 5 through the insulating component 3. The insulating component 3 is installed in the second mounting hole 51, and the elastic connecting member 2 extends out of the chamber door 5 to the connection surface that cooperates with the chamber 4.

[0032] Embodiment 2:

[0033] As Figure 2 and Figure 4 shown, the elastic connecting member 2 of this embodiment includes an elastic electrode head 21 and a conductive screw 22. The conductive screw 22 is installed at the upper end of the elastic electrode head 21. A copper sheet 6 is installed on the conductive screw 22. External threads are provided on the outer wall of the upper end portion of the elastic electrode head 21, and the elastic electrode head 21 abuts against the contact head 12 of the N-type plug 11.

[0034] The contact point of the elastic connecting member 2 used for connecting with the N-type plug 11 is set as the elastic electrode head 21. When the chamber door 5 and the chamber 4 are closed, the elastic electrode head 21 abuts against the contact head 12 of the N-type plug 11. The elastic electrode head 21 can effectively absorb the vibrations and impact forces generated between the chamber door 5 and the chamber 4 and between the elastic connecting member 2 and the N-type plug 11 during the closing process of the chamber door 5, avoiding damage to the elastic electrode head 21 and the N-type plug 11 caused by vibrations and impact forces, and being able to extend the service life of the elastic electrode head 21 and the N-type plug 11; and the elastic electrode head 21 can also achieve a certain degree of adaptive adjustment during the connection process with the contact head 12, and will not completely transfer the acting force to the conductive screw 22 provided at the upper end of the elastic electrode head 21, improving the service life of the conductive screw 22. This embodiment solves the technical problem that the contact during the connection of the elastic connecting member coupling for the opening and closing control of the chamber door is prone to damage.

[0035] Embodiment 3:

[0036] Basically as Figure 2As shown in the figure, the insulation assembly 3 of this embodiment includes an upper insulation cover 31, a lower insulation cover 32, and a ceramic ring 33. The upper insulation cover 31 and the lower insulation cover 3 are installed on the second mounting hole 51 of the chamber door 5 by screws. Conductive screws 22 are provided on the upper insulation cover 31 and the lower insulation cover 3. The ceramic ring 33 is arranged on the convex platform 52 in the second mounting hole 51. Threaded holes are formed in the inner wall of the ceramic ring 33, and the ceramic ring 33 is threadedly connected to the external thread of the elastic electrode head 21 through the internal thread of the threaded hole.

[0037] The conductive screws 22 are arranged on the upper insulation cover 31 and the lower insulation cover 3. The second mounting hole 51 is formed on the chamber door 5. The conductive screws 22 are installed and positioned through the upper insulation cover 31 and the lower insulation cover 3, and the conductive screws 22 extend into the inner cavity of the second mounting hole 51. The conductive screws 22 are not in contact connection with the chamber door 5. The elastic electrode head 21 is arranged on the ceramic ring 33, and the ceramic ring 33 is installed on the convex platform 52 in the second mounting hole 51, so that the elastic electrode head 21 arranged in the ceramic ring 33 is not in contact connection with the chamber door 5. After the elastic connector 2 accesses the current of the external radio frequency, under the action of the insulation assembly 3, the chamber door 5 is not charged, ensuring that the reaction chamber is not charged and avoiding affecting the coating effect. This embodiment solves the technical problem that the poor insulation effect of the elastic connector on the chamber door after being energized affects the coating effect.

[0038] The upper insulation cover 31 is provided with a mounting groove, and the lower insulation cover 32 is provided with a mounting hole. The lower insulation cover 32 is provided with the conductive screw 22 through the mounting hole. The upper end of the screw head of the conductive screw 22 is embedded in the mounting groove of the upper insulation cover 31, and a copper sheet 6 is arranged between the lower end of the screw head of the conductive screw 22 and the lower insulation cover 32. The mounting groove formed in the upper insulation cover 31 can eliminate the height difference caused by the screw head of the conductive screw 22, so that the copper sheet 6 arranged between the upper insulation cover 31 and the lower insulation cover 32 can be insulated.

[0039] Embodiment 4:

[0040] As Figure 5 shown, a chamber electrode includes a chamber electrode coupling structure, which further includes an introducing electrode 7 and an electrode plate 8. The upper end of the introducing electrode 7 is connected to the elastic connector 2 through a copper sheet 6, the lower end of the introducing electrode 7 is connected to the electrode plate 8, the introducing electrode 7 is installed at the middle position of the chamber door 5, and the electrode plate 8 is arranged on the lower end surface of the chamber door 5.

[0041] The electrode plate 8 is arranged in the inner cavity of the chamber 4. A seal 9 is arranged at the installation position of the introducing electrode 7 and the chamber door 5. An insulating plate 10 is arranged between the electrode plate 8 and the chamber door 4. A housing is installed above the chamber door 5.

[0042] A coating device includes a chamber electrode.

[0043] The above are only the embodiments of the present utility model, and common general knowledge such as the specific structures and characteristics known in the solutions is not described in detail herein. It should be noted that for those skilled in the art, without departing from the structure of the present utility model, several deformations and improvements can be made, and these should also be regarded as the protection scope of the present utility model, and these will not affect the implementation effect of the present utility model and the practicality of the patent. The protection scope required by this application shall be subject to the content of its claims, and the specific implementation manners and the like recorded in the specification can be used to interpret the content of the claims.

Claims

1. A radio frequency electrode coupling structure, characterized in that: It includes an external current component (1), an elastic connecting piece (2), a chamber (4) and a chamber door (5). The chamber (4) is movably connected to the chamber door (5). The external connecting component (1) is arranged on the chamber (4), and the elastic connecting piece (2) is arranged on the chamber door (5). The setting position of the external connecting component (1) is adapted to the elastic connecting piece (2). The opening and closing between the chamber door (5) and the chamber (4) is used to control the on-off of the elastic connecting piece (2) and the external current component (1).

2. The radio frequency electrode coupling structure according to claim 1, wherein: A support plate (41) is arranged on the end face in the opening direction of the chamber (4). A hinge support (42) is arranged on the support plate (41) of the chamber (4). A first mounting hole (43) is opened on the support plate (41). The chamber (4) is hingedly connected to the chamber door (5) through the hinge support (42).

3. A radio frequency electrode coupling structure according to claim 1, characterized in that: The external current component (1) includes an N-type plug (11) and an external radio frequency. The N-type plug (11) is connected to the external radio frequency through a coaxial cable. A contact head (12) is arranged at the upper end of the N-type plug (11). A connecting plate (13) is arranged on the outer wall of the N-type plug (11). The N-type plug (11) is arranged in the first mounting hole (43). The end face of the chamber (4) is connected to the connecting plate (13) of the N-type plug (11) by screws.

4. A radio frequency electrode coupling structure according to claim 1, characterized in that: The chamber door (5) is provided with a second mounting hole (51). A convex platform (52) is arranged on the inner wall of the second mounting hole (51). The elastic connecting piece (2) is installed on the chamber door (5) through an insulating component (3). The insulating component (3) is installed in the second mounting hole (51). The elastic connecting piece (2) extends out of the connecting surface of the chamber door (5) that cooperates with the chamber (4).

5. A radio frequency electrode coupling structure according to claim 1, characterized in that: The elastic connecting piece (2) includes an elastic electrode head (21) and a conductive screw (22). The conductive screw (22) is installed at the upper end of the elastic electrode head (21). A copper sheet (6) is installed on the conductive screw (22). External threads are arranged on the outer wall of the upper end portion of the elastic electrode head (21). The elastic electrode head (21) abuts against the contact head (12) of the N-type plug (11).

6. The radio frequency electrode coupling structure according to claim 4, characterized in that: The insulating component (3) includes an insulating upper cover (31), an insulating lower cover (32) and a ceramic ring (33). The insulating upper cover (31) and the insulating lower cover (32) are installed on the second mounting hole (51) of the chamber door (5) by screws. The insulating upper cover (31) and the insulating lower cover (32) are provided with conductive screws (22). The ceramic ring (33) is arranged on the convex platform (52) in the second mounting hole (51). Threaded holes are opened on the inner wall of the ceramic ring (33). The ceramic ring (33) is threadedly connected to the external threads of the elastic electrode head (21) through the internal threads of the threaded holes.

7. The radio frequency electrode coupling structure according to claim 6, characterized in that: The insulating upper cover (31) is provided with a mounting groove. A mounting hole is opened on the insulating lower cover (32). The insulating lower cover (32) is provided with a conductive screw (22) through the mounting hole. The upper end of the screw head of the conductive screw (22) is embedded in the mounting groove of the insulating upper cover (31). A copper sheet (6) is arranged between the lower end of the screw head of the conductive screw (22) and the insulating lower cover (32).

8. A chamber electrode, characterized in that: Comprising a radio frequency electrode coupling structure according to any one of claims 1-7, further comprising an introducing electrode (7) and an electrode plate (8), the upper end of the introducing electrode (7) is connected to the elastic connecting member (2) through a copper sheet (6), the lower end of the introducing electrode (7) is connected to the electrode plate (8), the introducing electrode (7) is installed at the middle position of the cavity door (5), and the electrode plate (8) is arranged on the lower end surface of the cavity door (5).

9. A chamber electrode according to claim 8, characterized in that: The electrode plate (8) is arranged in the inner cavity of the cavity (4), a sealing member (9) is arranged at the installation position of the introducing electrode (7) and the cavity door (5), and an insulating plate (10) is arranged between the electrode plate (8) and the cavity door (5).

10. A coating device, characterized in that: Comprising a cavity electrode according to any one of claims 8-9.

Images