Chain type local coating equipment

Abstract

The utility model discloses chained local coating equipment which comprises a reaction bin and a transmission assembly, a feeding cavity, a buffer cavity, a process cavity and a discharging cavity are arranged in the reaction bin, and the chained local coating equipment further comprises an air supply pipeline which comprises two exhaust ends which are respectively communicated with the buffer cavity and the process cavity; the internal pressure of the buffer cavity and the internal pressure of the process cavity are kept consistent; the excitation unit is arranged in the process cavity; the first heating piece is arranged on the inner top surface of the process cavity; and the second heating piece is detachably arranged on the inner top surface of the buffer cavity. According to the utility model, through the arrangement of the buffer cavity, on one hand, the preheating of the battery piece is realized by means of the second heating piece in the buffer cavity, and on the other hand, the reaction gas is introduced into the buffer cavity and the process cavity by means of the gas supply pipeline, and the internal pressure of the buffer cavity and the process cavity is kept balanced, so that the battery piece is conveyed from the buffer cavity to the process cavity; and when passing through the excitation unit, the film coating reaction can be effectively carried out, so that the film coating efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cell manufacturing, and particularly relates to a chain-type local coating device. Background Art

[0002] In a chain-type transmission vacuum coating or etching process device, in order to improve the production rhythm, generally the device needs to be equipped with three chambers: a feeding chamber, a process chamber, and a discharging chamber. The feeding chamber and the discharging chamber are used to realize the docking of the material to be processed with the process chamber in a vacuum state, make full use of the process chamber, improve efficiency and save energy consumption.

[0003] Patent document CN108063107A discloses a high-production-capacity chain-type transmission vacuum etching and coating device on the publication date of May 22, 2018, which includes a loading chamber, a first buffer chamber, a process chamber, a second buffer chamber, and an unloading chamber arranged in sequence according to the process; the loading chamber, the process chamber, and the unloading chamber are respectively provided with a loading pump, a process pump, and an unloading pump through pump pipelines; the loading chamber and the unloading chamber are respectively provided with a carrier plate lifting mechanism. The carrier plate lifting mechanism of the loading chamber is used for the simultaneous entry and exit of two unprocessed carrier plates, and the carrier plate lifting mechanism of the unloading chamber is used for the simultaneous entry and exit of two processed carrier plates. The carrier plate is conveyed between the loading chamber, the first buffer chamber, the process chamber, the second buffer chamber, and the unloading chamber by chain rollers. Due to the adoption of the carrier plate lifting mechanism, two carrier plates can enter and exit the loading chamber and the unloading chamber at one time, so the production capacity of the device is greatly improved and the energy consumption is greatly reduced due to the reduction of the frequency of backfill gas.

[0004] In the prior art of the above patent, a chain-type coating method is adopted, which reduces the contact between the carrier plate and the atmosphere, thereby improving the process treatment effect of the battery chip. However, there are differences in the internal conditions of each vacuum cavity set, especially, there are differences in the temperature and gas concentration in the cavity before and after the battery chip enters the coating reaction. Therefore, it often causes the battery chip to need to stand still for a period of time after entering the reaction cavity before starting the excitation reaction. Therefore, a chain-type local coating device is urgently needed to solve the above problems. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a chain-type local coating device to solve the above deficiencies in the prior art.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] A chain-type local coating device includes a reaction chamber and a transmission component. Inside the reaction chamber, in the direction of the transmission component for conveying the battery wafers, a feeding chamber, a buffer chamber, a process chamber, and a discharging chamber are sequentially arranged. It further includes: a gas supply pipeline, which includes two exhaust ends, respectively communicated with the buffer chamber and the process chamber, for conveying reaction gases; the internal pressures of the buffer chamber and the process chamber are kept consistent; an excitation unit, which is arranged inside the process chamber; a first heating element, which is arranged on the top surface inside the process chamber; a second heating element, which is detachably arranged on the top surface inside the buffer chamber.

[0008] Preferably, a disassembly groove is arranged on the top surface of the buffer chamber. A flap is rotatably arranged inside the disassembly groove. A clamping component for connecting the second heating element is arranged on the flap. A limiting component for restricting itself to keep the disassembly groove closed is arranged on the flap.

[0009] Preferably, the clamping component includes a first connecting part fixedly arranged on the flap and a second connecting part elastically hinged. An insertion sleeve is arranged on the first connecting part. A clamping groove is arranged on the second connecting part. The second heating element is set as a heating lamp tube. One end of the heating lamp tube is inserted into the insertion sleeve, and the other end is embedded into the clamping groove.

[0010] Preferably, the inner side of the second connecting part is connected with the flap through a first elastic member. The second connecting part can rotate outward. When the flap keeps the disassembly groove closed, the outer side of the second connecting part fits with the inner wall of the buffer chamber.

[0011] Preferably, the limiting component includes a limiting member slidably arranged at one end of the flap far from its rotation axis. A limiting groove matching the limiting member is arranged on the inner wall of the disassembly groove. A handle slidably penetrating the flap is fixedly arranged on the limiting member.

[0012] Preferably, a contact head for supplying power to the second heating element is slidably arranged on the flap. The movement of the contact head is linked with the movement of the limiting member. A contact groove is arranged on the top surface of the buffer chamber.

[0013] Preferably, a sliding groove is arranged inside the flap. A slider is elastically slidably connected with the sliding groove through a second elastic member. The slider is connected with the contact head through a connecting member slidably penetrating the flap.

[0014] Preferably, a linkage groove is arranged inside the flap. A gear is rotatably arranged inside the linkage groove. The limiting member is connected with the gear through a first rack. The slider is meshed with the gear through a second rack. The first rack and the second rack are arranged oppositely.

[0015] In the above technical solution, the beneficial effect of the present utility model is:

[0016] By providing a buffer chamber, the chain - type local coating equipment pre - heats the battery wafers with the help of a second heating element in the buffer chamber on one hand. The interior of the process chamber is heated by a first heating element and kept at a constant temperature. On the other hand, reaction gases are introduced into the buffer chamber and the process chamber through a gas supply pipeline, and the pressure balance between the buffer chamber and the interior of the process chamber is maintained. Thus, when the battery wafers are transported from the buffer chamber to the process chamber and immediately pass through the excitation unit after entering the process chamber, an effective coating reaction can be carried out, improving the coating efficiency and coating quality.

[0017] It should be understood that the foregoing general description and the following detailed description are merely exemplary and explanatory, and are not intended to limit the present disclosure.

[0018] This application document provides an overview of various implementations or examples of the technology described in the present disclosure, and does not represent a full disclosure of the entire scope of the disclosed technology or all features. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments recorded in the present utility model. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings.

[0020] Figure 1 It is a front - view sectional structure schematic diagram provided by an embodiment of the present utility model;

[0021] Figure 2 Provided by an embodiment of the present utility model Figure 1 The enlarged structure schematic diagram of part A in

[0022] Figure 3 It is a side - view sectional structure schematic diagram of the buffer chamber provided by an embodiment of the present utility model;

[0023] Figure 4 Provided by an embodiment of the present utility model Figure 3 The enlarged structure schematic diagram of part B in

[0024] Figure 5 It is a top - view sectional structure schematic diagram of the flap provided by an embodiment of the present utility model.

[0025] Explanation of the reference numerals:

[0026] 1. Reaction chamber; 2. Feed chamber; 3. Buffer chamber; 4. Process chamber; 5. Discharge chamber; 6. Gas supply pipeline; 7. Excitation unit; 8. First heating element; 9. Second heating element; 10. Demounting groove; 11. Flap; 12. First connecting part; 13. Second connecting part; 14. Socket; 15. Card slot; 16. First elastic element; 17. Limiting part; 18. Limiting groove; 19. Handle; 20. Contact head; 21. Contact groove; 22. Slide groove; 23. Second elastic element; 24. Slide block; 25. Connecting part; 26. Linkage groove; 27. Gear; 28. First rack; 29. Second rack. Detailed implementation manners

[0027] To make the objectives, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present disclosure. Obviously, the described embodiments are some but not all of the embodiments of the present disclosure. All other embodiments obtained by those of ordinary skill in the art based on the described embodiments of the present disclosure without creative efforts shall fall within the scope of protection of the present disclosure.

[0028] Please refer to Figures 1-5 , a chain-type local coating device provided by an embodiment of the present utility model includes a reaction chamber 1 and a transmission assembly. An inlet chamber 2, a buffer chamber 3, a process chamber 4 and a discharge chamber 5 are sequentially arranged in the reaction chamber 1 along the direction of conveying the battery wafers by the transmission assembly. It further includes: a gas supply pipeline 6, which includes two exhaust ends respectively communicated with the buffer chamber 3 and the process chamber 4 for conveying reaction gases; the internal pressures of the buffer chamber 3 and the process chamber 4 are kept the same; an excitation unit 7, which is arranged in the process chamber 4; a first heating element 8, which is arranged on the inner top surface of the process chamber 4; a second heating element 9, which is detachably arranged on the inner top surface of the buffer chamber 3.

[0029] Specifically, the reaction chamber 1 is a closed structure, with only openings provided between the cavities. Electric control valves can be provided between the cavities to control the opening and closing of the openings. The electric control valves block the openings to make each cavity independently sealed. Position sensors for detecting the position of the battery wafers are integrated in each cavity. The transmission assembly is adapted to the position sensors. When the battery wafers reach the designated positions in each cavity, the corresponding part of the transmission assembly inside each cavity stops transporting the battery wafers. The transmission assembly includes a plurality of equally spaced rollers and is controlled by a servo system to operate. A vacuum pump is provided outside the reaction chamber 1. The vacuum pump is connected to each cavity through an external pipeline to control the vacuum pumping operation of each cavity. A nitrogen pump is also provided outside the reaction chamber 1. The nitrogen pump is connected to each cavity through another external pipeline to control the nitrogen filling operation of each cavity. The first heating element 8 is preferably a heating resistance wire, which is distributed in an S shape on the inner top surface of the process cavity 4. The second heating element 9 can preferably be an infrared lamp tube. The infrared lamp tube preheats the battery wafers in the buffer cavity 3 to make the temperature of the battery wafers reach 180 - 400 °C. The second heating element 9 is preferably multiple, equally spaced along the transmission direction of the battery wafers, and is arranged on the side close to the process cavity 4. The gas supply pipeline 6 is provided with another exhaust end connected to the inside of the buffer cavity 3. The excitation unit 7 is preferably 1 - 6. The distance between the lower edge of the excitation unit 7 and the battery wafers passing below it is set to 1 mm, meeting the requirements of the coating reaction. A plurality of excitation units 7 are distributed in the width direction in the process cavity 4. When the front end of the battery wafers transported by the conveying assembly passes below the excitation unit 7, the excitation unit 7 is powered on to excite the reaction gas between it and the battery wafers to achieve local coating.

[0030] Compared with the prior art, a chain - type local coating device proposed in an embodiment of the present invention, by providing the buffer cavity 3, on the one hand, realizes pre - heating of the battery wafers with the help of the second heating element 9 in the buffer cavity 3, and the inside of the process cavity 4 is heated and kept at a constant temperature by the first heating element 8. On the other hand, the reaction gas is introduced into the buffer cavity 3 and the process cavity 4 through the gas supply pipeline 6, and the internal pressures of the buffer cavity 3 and the process cavity 4 are kept balanced. Then, when the battery wafers are transported from the buffer cavity 3 to the process cavity 4 and can immediately pass through the excitation unit 7 after entering the process cavity 4, an effective coating reaction can be carried out, improving the coating efficiency and coating quality.

[0031] As a preferred technical solution of this embodiment, a disassembly groove 10 is provided on the top surface of the buffer chamber 3. A flap 11 is rotatably arranged in the disassembly groove 10. A clamping component for connecting the second heating element 9 is arranged on the flap 11, and a limiting component for restricting the flap 11 to keep the disassembly groove 10 closed is arranged on the flap 11. Specifically, the upper side of the disassembly groove 10 communicates with the outside of the reaction chamber 1, and the lower side communicates with the buffer chamber 3; the rotation axis of the flap 11 is parallel to the axial direction of the roller of the transmission component; a sealing layer is preferably arranged on the inner wall of the disassembly groove 10. When the flap 11 closes the disassembly groove 10, it can press the sealing layer to ensure sealing; the clamping component facilitates the disassembly and installation of the second heating element 9, that is, it facilitates the replacement of the second heating element 9; the limiting component keeps the flap 11 in the state of closing the disassembly groove 10. When the limiting component cancels the limit of the flap 11, the flap 11 can rotate upward to open the disassembly groove 10 and take out the second heating element 9 from the buffer chamber 3.

[0032] As a preferred technical solution of this embodiment, the clamping component includes a first connecting portion 12 fixedly arranged on the flap 11 and a second connecting portion 13 elastically hinged. An insertion sleeve 14 is arranged on the first connecting portion 12, a clamping groove 15 is arranged on the second connecting portion 13, the second heating element 9 is set as a heating lamp tube, one end of the heating lamp tube is inserted into the insertion sleeve 14, and the other end is embedded in the clamping groove 15. Specifically, the extending direction of the heating lamp tube is parallel to the axial direction of the rotation axis of the flap 11; the insertion sleeve 14 is used for the power connection end of the heating lamp tube to be plugged in for conduction; the clamping groove 15 is used for clamping the other end of the heating lamp tube; the rotation of the second connecting portion 13 forms a movement away from or close to the first connecting portion 12, thereby facilitating the disassembly and assembly of the heating lamp tube.

[0033] As a further preferred technical solution of this embodiment, the inner side of the second connecting portion 13 is connected to the flap 11 through a first elastic member 16. The second connecting portion 13 can rotate outward. When the flap 11 keeps the disassembly groove 10 closed, the outer side of the second connecting portion 13 fits with the inner wall of the buffer chamber 3. Specifically, the side of the second connecting portion 13 facing the first connecting portion 12 is the inner side, and the clamping groove 15 is arranged on the inner side of the second connecting portion 13. The other opposite side of the second connecting portion 13 is the outer side; the first elastic member 16 is preferably a spring. The first elastic member 16 keeps pulling the second connecting portion 13 close to the first connecting portion 12, thereby clamping and fixing the heating lamp tube between the first connecting portion 12 and the second connecting portion 13; when the flap 11 keeps the disassembly groove 10 closed, the second connecting portion 13 enters the buffer chamber 3 along with the heating lamp tube, and the outer side of the second connecting portion 13 fits with the inner wall of the buffer chamber 3. Thereby, it can limit the second connecting portion 13 from rotating away from the first connecting portion 12, ensuring the stable fixing state of the heating lamp tube and preventing problems such as loosening and dropping.

[0034] As a preferred technical solution of this embodiment, the limiting component includes a limiting member 17 slidably disposed at one end of the flap 11 away from its rotation axis. A limiting groove 18 matching the limiting member 17 is provided on the inner wall of the disassembly groove 10. A handle 19 slidably penetrating the flap 11 is fixedly provided on the limiting member 17. Specifically, one end of the limiting member 17 away from the rotation axis of the flap 11 can extend out of the end face of the flap 11. When the flap 11 keeps the disassembly groove 10 closed, the limiting member 17 and the limiting groove 18 are horizontally corresponding, and the limiting member 17 can slide to embed one end into the limiting groove 18 to keep the flap 11 in a state; the handle 19 is used for actively operating the limiting member 17.

[0035] In another embodiment proposed by the present utility model, a contact head 20 for supplying power to the second heating element 9 is slidably disposed on the flap 11. The movement of the contact head 20 is linked with the movement of the limiting member 17. A contact groove 21 is provided on the top surface of the buffer cavity 3. Specifically, the contact head 20 is electrically connected to the socket 14; the contact groove 21 is connected to the power supply provided by the servo system; the contact groove 21 is provided at the connection position between the buffer cavity 3 and the disassembly groove 10; the sliding direction of the contact head 20 is parallel to the movement direction of the limiting member 17. When the flap 11 closes the disassembly groove 10 and the limiting member 17 extends out and is embedded in the limiting groove 18, the contact head 20 is embedded in the contact groove 21 to conduct electricity, and when the limiting member 17 withdraws from the limiting groove 18, the contact head 20 leaves the contact groove 21 to cut off the power. Thus, it can be ensured that when the flap 11 is opened, the contact head 20 is not charged, that is, each second heating element 9 is not powered on, which can ensure the safety of subsequent operations.

[0036] As a preferred technical solution of this embodiment, a sliding groove 22 is provided in the flap 11. A slider 24 is elastically slidably connected in the sliding groove 22 through a second elastic member 23. The slider 24 is connected to the contact head 20 through a connecting member 25 slidably penetrating the flap 11. Specifically, the second elastic member 23 keeps pushing the slider 24. When the flap 11 is in the position of closing the disassembly groove 10, under the action of the second elastic member 23 keeping pushing the slider 24, the contact head 20 is driven by the connecting member 25 to keep a tendency of extending into the contact groove 21; under the linkage action of the limiting member 17 and the contact head 20, the limiting member 17 also has a tendency of keeping extending out of the flap 11.

[0037] As a preferred technical solution of this embodiment, a linkage groove 26 is provided inside the flap 11. A gear 27 is rotatably provided in the linkage groove 26. The limiting member 17 is connected to the gear 27 through a first rack 28. The slider 24 is engaged with the gear 27 through a second rack 29. The first rack 28 and the second rack 29 are arranged opposite to each other. Specifically, the limiting member 17 extends out of the flap 11, drives the gear 27 to rotate through the first rack 28, the gear 27 drives the slider 24 to move through the second rack 29, and the slider 24 drives the contact head 20 to approach the contact groove 21 through the connecting member 25. On the contrary, when the limiting member 17 retracts into the flap 11, the contact head 20 moves away from the contact groove 21.

[0038] Only some exemplary embodiments of the present invention have been described by way of illustration above. Without doubt, for those of ordinary skill in the art, various different ways can be used to modify the described embodiments without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A chain-type local coating device, comprising a reaction chamber (1) and a transmission component. An inlet chamber (2), a buffer chamber (3), a process chamber (4) and an outlet chamber (5) are sequentially arranged in the reaction chamber (1) along the direction of conveying the battery wafers by the transmission component. It is characterized in that, It further includes: A gas supply pipeline (6), which includes two exhaust ends, is respectively connected to the buffer chamber (3) and the process chamber (4) for transporting reaction gases; the internal pressures of the buffer chamber (3) and the process chamber (4) are kept consistent. An excitation unit (7), which is arranged in the process chamber (4). A first heating element (8), which is arranged on the inner top surface of the process chamber (4). A second heating element (9), which is detachably arranged on the inner top surface of the buffer chamber (3).

2. The chain-type local coating equipment according to claim 1, wherein, A disassembly groove (10) is arranged on the top surface of the buffer chamber (3), a flap (11) is rotatably arranged in the disassembly groove (10), a clamping component for connecting the second heating element (9) is arranged on the flap (11), and a limiting component for restricting the flap (11) to keep the disassembly groove (10) closed is arranged on the flap (11).

3. The chain-type local coating equipment according to claim 2, characterized in that, The clamping component includes a first connecting portion (12) fixedly arranged on the flap (11) and a second connecting portion (13) elastically hinged. An insertion sleeve (14) is arranged on the first connecting portion (12), a clamping groove (15) is arranged on the second connecting portion (13), the second heating element (9) is arranged as a heating lamp tube, one end of the heating lamp tube is inserted into the insertion sleeve (14), and the other end is embedded in the clamping groove (15).

4. The chain-type local coating equipment according to claim 3, wherein, The inner side of the second connecting portion (13) is connected to the flap (11) through a first elastic member (16), the second connecting portion (13) can rotate outward, and when the flap (11) keeps the disassembly groove (10) closed, the outer side of the second connecting portion (13) fits with the inner wall of the buffer chamber (3).

5. The chain-type local coating equipment according to claim 2, characterized in that, The limiting component includes a limiting member (17) slidably arranged at one end of the flap (11) away from its rotation axis, a limiting groove (18) matching the limiting member (17) is arranged on the inner wall of the disassembly groove (10), and a handle (19) fixedly arranged on the limiting member (17) and slidably penetrating the flap (11) is arranged.

6. The chain-type local coating equipment according to claim 5, characterized in that, A contact head (20) for supplying power to the second heating element (9) is slidably arranged on the flap (11), the movement of the contact head (20) is linked with the movement of the limiting member (17), and a contact groove (21) is arranged on the top surface of the buffer chamber (3).

7. The chain-type local coating equipment according to claim 6, characterized in that, A sliding groove (22) is arranged in the flap (11), a slider (24) is elastically slidably connected in the sliding groove (22) through a second elastic member (23), and the slider (24) is connected to the contact head (20) through a connecting member (25) slidably penetrating the flap (11).

8. The chain-type local coating equipment according to claim 7, characterized in that, A linkage groove (26) is arranged in the flap (11), a gear (27) is rotatably arranged in the linkage groove (26), the limiting member (17) is connected to the gear (27) through a first rack (28), the slider (24) is meshed with the gear (27) through a second rack (29), and the first rack (28) and the second rack (29) are arranged oppositely.

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