Four-probe sheet resistance tester with adjusting assembly

Abstract

The utility model discloses a four-probe square resistance tester with an adjusting assembly, which comprises an operating device, the top of the operating device is provided with a placement base, the top of the placement base is fixedly connected with a detection table, the top of the placement base is provided with a limiting groove, the top of the operating device is provided with a protective cover, and the protective cover is fixedly connected with the detection table. The protective cover is matched with the limiting groove, and the two sides of the placing base are each fixedly connected with two symmetrical fixing blocks. The protective cover is buckled on the top of the placing base, the shifting block is pressed to enable the clamping blocks to move oppositely, at the moment, the spring is extruded and contracted, when the protective cover enters an inner cavity of the limiting groove, the shifting block is loosened, the spring pushes the two clamping blocks to deviate, the clamping blocks are clamped with the clamping groove, and the clamping blocks are clamped in the clamping groove. Therefore, the four-probe sheet resistance tester can be protected through the protection structure, the four-probe sheet resistance tester is prevented from being damaged by collision, and the service life of the four-probe sheet resistance tester is ensured.

Description

Technical Field

[0001] The utility model belongs to the technical field of four-probe sheet resistance testers, and particularly relates to a four-probe sheet resistance tester with an adjusting component. Background Art

[0002] A four-probe sheet resistance tester is used to measure the resistivity of semiconductor materials (mainly single-crystal silicon, single-crystal germanium, silicon wafers), as well as the sheet resistance of diffusion layers, epitaxial layers, ITO conductive foil films, and conductive rubber blocks. During measurement, the four metal probes are pressed on the surface of the silicon wafer through an adjusting component, and an external current flows through the contact points between the outer metal and the semiconductor surface into the semiconductor. By measuring the voltage between the inner probes, the resistance and resistivity can be calculated.

[0003] Currently, most four-probe sheet resistance testers are used to measure the resistance of semiconductor materials. After the measurement, most four-probe sheet resistance testers are directly placed on the desktop. The four-probe sheet resistance tester directly placed in the air may be damaged by collision, and at the same time, dust will accumulate on its surface, reducing its service life. Therefore, a four-probe sheet resistance tester with an adjusting component is needed, which can protect the four-probe sheet resistance tester through a protective structure, avoid damage to the four-probe sheet resistance tester caused by collision, and ensure the service life of the four-probe sheet resistance tester. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a four-probe sheet resistance tester with an adjusting component, which has the purpose of protecting the four-probe sheet resistance tester through a protective structure, avoiding damage to the four-probe sheet resistance tester caused by collision, and ensuring the service life of the four-probe sheet resistance tester, so as to solve the problems in the above background art.

[0005] The technical solution of the present utility model for solving the above technical problems is as follows: A four-probe sheet resistance tester with an adjustment component, which includes an operating device. A placement base is provided on the top of the operating device. A detection table is fixedly connected to the top of the placement base. A limiting groove is opened on the top of the placement base. A protective cover is provided on the top of the operating device. The protective cover is adapted to the limiting groove. Two symmetrical fixing blocks are fixedly connected to both sides of the placement base. A clamping groove is opened on the top of the fixing block. Two symmetrical fixing frames are fixedly connected to both sides of the protective cover. Two symmetrical clamping blocks are slidably connected to the inner cavity of the fixing frame. The bottom of the clamping block extends to the outside of the fixing frame and is engaged with the clamping groove. Two symmetrical sliding rods are fixedly connected to the inner cavity of the fixing frame. The sliding rods penetrate through the clamping blocks and are slidably connected to the clamping blocks. A spring is sleeved on the surface of the sliding rods. The two ends of the spring are respectively fixedly connected to the two clamping blocks. A dial block is fixedly connected to the side of the clamping block away from the protective cover. Two symmetrical openings are opened on the side of the fixing frame away from the protective cover. The dial block passes through the opening to the outside of the fixing frame.

[0006] Preferably, two handles are fixedly connected to both sides of the protective cover. The side of the handle away from the protective cover is cylindrical.

[0007] Preferably, a sliding rod is fixedly connected to the top of the detection table. An adjustment component is slidably connected to the surface of the sliding rod. A probe is fixedly connected to the inner cavity of the adjustment component.

[0008] Preferably, the protective cover is a transparent plastic cover. The clamping block is L-shaped. The spring is located between the two clamping blocks.

[0009] Preferably, the top and bottom of the dial block are both semi-circular. Anti-slip patterns are provided on the opposite sides of the two dial blocks.

[0010] 1. The beneficial effect of the present utility model is that: by buckling the protective cover on the top of the placement base, pressing the dial block to make the clamping blocks move towards each other. At this time, the spring will be compressed and contracted. When the protective cover enters the inner cavity of the limiting groove, release the dial block to make the spring push the two clamping blocks away from each other, so that the clamping blocks are engaged with the clamping grooves, and the purpose of protecting the four-probe sheet resistance tester through the protection structure can be achieved, avoiding damage to the four-probe sheet resistance tester due to collision and ensuring the service life of the four-probe sheet resistance tester.

[0011] 2. Through the setting of the handle in the present utility model, when the user disassembles and installs the protective cover, the protective cover can be transferred through the handle, avoiding slipping when the user transfers the protective cover, and facilitating the user to transfer and disassemble the protective cover. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Among them:

[0013] Figure 1 A three-dimensional schematic diagram of an embodiment of the present utility model;

[0014] Figure 2 A three-dimensional exploded schematic diagram of an embodiment of the present utility model;

[0015] Figure 3 A front elevation sectional schematic diagram of an embodiment of the present utility model;

[0016] Figure 4 A three-dimensional exploded schematic diagram of the clamping structure of an embodiment of the present utility model.

[0017] In the drawings, the list of components represented by each reference numeral is as follows:

[0018] 1. Operating device, 2. Placing base, 3. Detection table, 4. Limiting groove, 5. Protective cover, 6. Fixed block, 7. Card slot, 8. Fixed frame, 9. Card block, 10. Slide bar, 11. Spring, 12. Dial block, 13. Opening, 14. Grip. Detailed implementation manners

[0019] Hereinafter, embodiments of the four-probe sheet resistance tester with an adjustment component of the present utility model will be described with reference to the drawings.

[0020] Embodiment 1:

[0021] Figures 1-4A four-probe sheet resistance tester with an adjustment component showing an embodiment of the present utility model, which includes an operating device 1. A placement base 2 is provided on the top of the operating device 1. A detection table 3 is fixedly connected to the top of the placement base 2. A slide bar is fixedly connected to the top of the detection table 3. An adjustment component is slidably connected to the surface of the slide bar. A probe is fixedly connected to the inner cavity of the adjustment component. A limiting groove 4 is opened on the top of the placement base 2. A protective cover 5 is provided on the top of the operating device 1. Both sides of the protective cover 5 are fixedly connected with a grip 14. The side of the grip 14 away from the protective cover 5 is cylindrical. Through the setting of the grip 14, when the user disassembles and installs the protective cover 5, the protective cover 5 can be transferred through the grip 14, avoiding slippage when the user transfers the protective cover 5 and facilitating the user to transfer, disassemble and install the protective cover 5. The protective cover 5 is adapted to the limiting groove 4. Two symmetric fixing blocks 6 are fixedly connected to both sides of the placement base 2. A clamping groove 7 is opened on the top of the fixing block 6. Two symmetric fixing frames 8 are fixedly connected to both sides of the protective cover 5. Two symmetric clamping blocks 9 are slidably connected to the inner cavity of the fixing frame 8. The bottom of the clamping block 9 extends to the outside of the fixing frame 8 and is engaged with the clamping groove 7. Two symmetric slide bars 10 are fixedly connected to the inner cavity of the fixing frame 8. The slide bars 10 penetrate through the clamping blocks 9 and are slidably connected with the clamping blocks 9. A spring 11 is sleeved on the surface of the slide bars 10. Both ends of the spring 11 are fixedly connected to the two clamping blocks 9 respectively. A dial block 12 is fixedly connected to the side of the clamping block 9 away from the protective cover 5. Two symmetric openings 13 are opened on the side of the fixing frame 8 away from the protective cover 5. The dial block 12 passes through the opening 13 to the outside of the fixing frame 8.

[0022] Embodiment Two:

[0023] Figures 1-4A four-probe sheet resistance tester with an adjustment component according to an embodiment of the present invention is shown. It includes an operating device 1. A placement base 2 is provided on the top of the operating device 1. A detection table 3 is fixedly connected to the top of the placement base 2. A limiting groove 4 is opened on the top of the placement base 2. A protective cover 5 is provided on the top of the operating device 1. The protective cover 5 is a transparent plastic cover. The clamping block 9 is L-shaped. The spring 11 is located between the two clamping blocks 9. The protective cover 5 is adapted to the limiting groove 4. Two symmetrical fixing blocks 6 are fixedly connected to both sides of the placement base 2. A clamping groove 7 is opened on the top of the fixing block 6. Two symmetrical fixing frames 8 are fixedly connected to both sides of the protective cover 5. Two symmetrical clamping blocks 9 are slidably connected to the inner cavity of the fixing frame 8. The bottom of the clamping block 9 extends to the outside of the fixing frame 8 and is engaged with the clamping groove 7. Two symmetrical sliding rods 10 are fixedly connected to the inner cavity of the fixing frame 8. The sliding rods 10 penetrate through the clamping blocks 9 and are slidably connected to the clamping blocks 9. A spring 11 is sleeved on the surface of the sliding rods 10. The two ends of the spring 11 are respectively fixedly connected to the two clamping blocks 9. A dial block 12 is fixedly connected to the side of the clamping block 9 away from the protective cover 5. The top and bottom of the dial block 12 are both semi-circular. Anti-slip patterns are provided on the opposite sides of the two dial blocks 12. Two symmetrical openings 13 are opened on the side of the fixing frame 8 away from the protective cover 5. The dial block 12 passes through the opening 13 to the outside of the fixing frame 8.

[0024] Working principle: When the present invention is in use, after the user uses the four-probe sheet resistance tester, the protective cover 5 is buckled on the top of the placement base 2. Press the two symmetrical dial blocks 12 to make the two symmetrical clamping blocks 9 move towards each other, so that the spring 11 is compressed and contracts. When the protective cover 5 enters the inner cavity of the limiting groove 4, release the dial block 12 to make the spring 11 extend, push the two clamping blocks 9 away from each other, so that the clamping blocks 9 are engaged with the clamping grooves 7 to fix the protective cover 5, avoiding damage to the four-probe sheet resistance tester due to collision, ensuring the service life of the four-probe sheet resistance tester. When the user disassembles and installs the protective cover 5, the protective cover 5 can be transferred through the handle 14, avoiding slipping when the user transfers the protective cover 5, and facilitating the user to transfer, disassemble and install the protective cover 5.

[0025] In summary: For the four-probe sheet resistance tester with an adjustment component, by buckling the protective cover 5 on the top of the placement base 2 and pressing the dial block 12 to make the clamping block 9 move towards each other, at this time the spring 11 will be compressed and contract. When the protective cover 5 enters the inner cavity of the limiting groove 4, release the dial block 12 to make the spring 11 push the two clamping blocks 9 away from each other, so that the clamping blocks 9 are engaged with the clamping grooves 7, and the purpose of protecting the four-probe sheet resistance tester through the protection structure can be achieved, avoiding damage to the four-probe sheet resistance tester due to collision and ensuring the service life of the four-probe sheet resistance tester.

Claims

1. A four-probe sheet resistance tester with an adjustment component, characterized in that, Comprising an operating device (1): A placement base (2) is provided at the top of the operating device (1). A detection table (3) is fixedly connected to the top of the placement base (2). A limit groove (4) is formed in the top of the placement base (2). A protective cover (5) is provided at the top of the operating device (1). The protective cover (5) is adapted to the limit groove (4). Two symmetric fixing blocks (6) are fixedly connected to both sides of the placement base (2). A clamping groove (7) is formed in the top of the fixing block (6). Two symmetric fixing frames (8) are fixedly connected to both sides of the protective cover (5). Two symmetric clamping blocks (9) are slidably connected to the inner cavity of the fixing frame (8). The bottom of the clamping block (9) extends to the outside of the fixing frame (8) and is engaged with the clamping groove (7). Two symmetric sliding rods (10) are fixedly connected to the inner cavity of the fixing frame (8). The sliding rod (10) penetrates through the clamping block (9) and is slidably connected to the clamping block (9). A spring (11) is sleeved on the surface of the sliding rod (10). The two ends of the spring (11) are respectively fixedly connected to the two clamping blocks (9). A dial block (12) is fixedly connected to the side of the clamping block (9) away from the protective cover (5). Two symmetric openings (13) are formed in the side of the fixing frame (8) away from the protective cover (5). The dial block (12) passes through the opening (13) to the outside of the fixing frame (8).

2. The four-probe sheet resistance tester with an adjustment component according to claim 1, wherein Two grips (14) are fixedly connected to both sides of the protective cover (5). The side of the grip (14) away from the protective cover (5) is cylindrical.

3. The four-probe sheet resistance tester with an adjustment component according to claim 2, characterized in that, A sliding rod is fixedly connected to the top of the detection table (3). An adjusting assembly is slidably connected to the surface of the sliding rod. A probe is fixedly connected to the inner cavity of the adjusting assembly.

4. The four-probe sheet resistance tester with an adjustment component according to claim 3, wherein The protective cover (5) is a transparent plastic cover. The clamping block (9) is L-shaped. The spring (11) is located between the two clamping blocks (9).

5. A four-probe sheet resistance tester with an adjustment component according to claim 4, wherein The top and bottom of the dial block (12) are both semi-circular. Anti-slip patterns are provided on the sides of the two dial blocks (12) facing away from each other.

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