Temperature control marble abutment

Abstract

The utility model relates to the technical field of mask plate processing, and discloses a temperature control marble base station which comprises a marble base station, a plurality of flow guide pipes are arranged in an inner cavity of the marble base station, and the inlet end and the outlet end of each flow guide pipe both extend out of the marble base station and are communicated with a refrigerant generating and circulating device. Low-temperature water generated by the refrigerant generating and circulating device cools the marble base station through a flow guide pipe and flows back into the refrigerant generating and circulating device, and a temperature sensor is arranged in an inner cavity of the marble base station and used for monitoring the temperature of the marble base station. According to the utility model, fine temperature change control is carried out on the marble base station, so that marble deformation caused by temperature is reduced, and the error of measuring equipment and the detection False rate of AOI (Automatic Optic Inspection) are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of mask plate processing, in particular to a temperature-controlled marble base table. Background Technique

[0002] In the manufacturing of mask plates, various high-end mechanical and electronic devices are used, such as lithography machines, AOI (Automatic Optical Inspection Machines), and CD measuring devices. These high-end mechanical and electronic devices have extremely high requirements for accuracy, detection rate, and misdetection rate, which requires specific requirements for the selection of the base material of the equipment. Marble is a metamorphic rock formed by the original rocks in the earth's crust under the action of high temperature and high pressure within the earth's crust. The internal force of the earth's crust promotes the qualitative change of various original rocks. It has an extremely small linear expansion coefficient, the internal stress completely disappears, it does not deform, has good rigidity, high hardness, strong wear resistance, small temperature deformation, and will not be magnetized, and has a long service life, perfectly meeting the requirements of the base tables of measuring devices in the mask plate industry.

[0003] Although the temperature deformation of marble is small, this small deformation still poses a risk to our measuring devices with high-precision requirements. Therefore, we need to additionally use a set of temperature control technologies to stabilize the temperature of the marble base table during the operation of the equipment and keep it in an ideal state. The common temperature control designs are mostly air-cooled. The cold air generated by the compressor enters the equipment interior under the push of a fan or an air pump. Only by controlling the temperature of the cold air can the temperature inside the equipment be controlled. However, such designs have many problems in the temperature control of the marble base table, such as the inability to effectively control the temperature inside the marble and only staying on the surface of the marble. Content of the Utility Model

[0004] (1) Technical Problems to be Solved

[0005] In view of the deficiencies of the prior art, the utility model provides a temperature-controlled marble base table, which solves the problem that the existing temperature control measures for marble base tables are relatively simple and it is difficult to ensure the precise temperature control of marble base tables.

[0006] (2) Technical Solutions

[0007] To achieve the above purposes, the utility model is realized through the following technical solutions:

[0008] A temperature-controlled marble base table includes a marble base table. A number of flow guide pipes are arranged in the inner cavity of the marble base table. The inlet end and the outlet end of the flow guide pipes both extend out of the marble base table and are connected to a refrigerant generation and circulation device. The low-temperature water generated by the refrigerant generation and circulation device cools the marble base table through the flow guide pipes and then flows back into the refrigerant generation and circulation device. A temperature sensor is arranged in the inner cavity of the marble base table to monitor the temperature of the marble base table.

[0009] Preferably, the diversion pipe is made of copper pipe and is arranged in a serpentine shape around the inner cavity of the marble base, and the number and distribution density of the diversion pipes are determined according to the size of the marble base.

[0010] Preferably, the refrigerant production and circulation device includes a cooling tower. The outlet ends of the diversion pipes are all connected to the inlet end of the cooling tower. The outlet end of the cooling tower is connected to a liquid cooling water tank, and the liquid cooling water tank is connected to the inlet end of the diversion pipe through a pump.

[0011] Preferably, the water discharged from the outlet end of the diversion pipe flows into the cooling tower after being filtered by a filter.

[0012] Preferably, the temperature sensors are arranged at the inlet end of the filter and the outlet end of the pump.

[0013] (III) Beneficial effects

[0014] The present utility model has the following beneficial effects:

[0015] For this temperature-controlled marble base, through the refrigerant generation and circulation device provided, low-temperature water is generated and circulated in the diversion pipe to cool the marble base. By monitoring the temperature of the low-temperature water generated in the refrigerant generation and circulation device and cooperating with the monitoring of the temperature of the inner cavity of the marble base, the temperature of the marble base can be accurately regulated effectively, and the slight deformation of the marble caused by temperature can be better controlled. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the layout structure of the diversion pipe of the present utility model;

[0017] Figure 2 It is a system schematic diagram of the refrigerant production and circulation device of the present utility model.

[0018] In the figure: 1, marble base; 2, diversion pipe; 3, temperature sensor; 4, filter; 5, cooling tower; 6, liquid cooling water tank; 7, pump. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model.

[0020] Please refer to Figure 1, the present utility model provides a technical solution: a temperature-controlled marble base, which includes a marble base 1. Inside the marble base 1, there are several flow guide pipes 2. The inlet end and the outlet end of the flow guide pipes 2 both extend out of the marble base 1 and are connected to a refrigerant generation and circulation device. The low-temperature water generated by the refrigerant generation and circulation device cools the marble base 1 via the flow guide pipes 2 and then returns to the refrigerant generation and circulation device. Inside the marble base 1, a temperature sensor 3 is arranged to monitor the temperature of the marble base 1.

[0021] In the present utility model, through the set refrigerant generation and circulation device, low-temperature water is generated and circulates inside the flow guide pipes 2 to cool the marble base 1. By monitoring the temperature of the low-temperature water generated in the refrigerant generation and circulation device and simultaneously monitoring the temperature inside the marble base 1, it effectively ensures the precise control of the temperature of the marble base 1 and better controls the slight deformation of the marble caused by temperature.

[0022] Refer to Figure 1 As shown, in this embodiment, the flow guide pipes 2 are made of copper pipes and are arranged in a serpentine shape inside the marble base 1. The number and distribution density of the flow guide pipes 2 are determined according to the size of the marble base 1. By reasonably controlling the number and distribution density of the flow guide pipes 2 arranged, the temperature of the entire marble base 1 can be efficiently and precisely regulated; by using copper pipes and arranging the flow guide pipes 2 in a serpentine shape, the heat conduction efficiency can be improved, and then the temperature of the marble base 1 can be quickly adjusted.

[0023] Refer to Figure 2 As shown, in this embodiment, the refrigerant production and circulation device includes a cooling tower 5. The outlet ends of the flow guide pipes 2 are all connected to the inlet end of the cooling tower 5. The outlet end of the cooling tower 5 is connected to a liquid cooling water tank 6. The liquid cooling water tank 6 is connected to the inlet end of the flow guide pipes 2 through a pump 7. By setting the cooling tower 5 and the liquid cooling water tank 6, the water flowing back through the flow guide pipes 2 is cooled, and then the cooled water is circulated again through the pump 7 into the flow guide pipes 2 to regulate the temperature of the marble base 1.

[0024] Refer to Figure 2 As shown, in this embodiment, the water discharged from the outlet end of the flow guide pipes 2 flows into the cooling tower 5 after being filtered by a filter 4. By setting the filter 4, the water flowing back through the flow guide pipes 2 can be filtered to prevent various impurities from being contained in the backflow water, which may affect subsequent use.

[0025] Refer to Figure 2As shown, in this embodiment, temperature sensors 3 are arranged at the water inlet end of the filter 4 and the water outlet end of the pump 7. By means of the arranged temperature sensors 3, the temperature of the liquid flowing back and circulating into the diversion pipe 2 can be monitored, effectively monitoring the temperature of the water flowing back and circulating, and realizing precise temperature control of the marble base 1.

[0026] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device. Without further limitation. An element defined by the statement "comprising a..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the element.

[0027] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A temperature-controlled marble base, characterized in that, It includes a marble base. A number of diversion tubes are arranged in the inner cavity of the marble base. The inlet end and the outlet end of the diversion tube both extend out of the marble base and are connected to a refrigerant generation and circulation device. The low-temperature water generated by the refrigerant generation and circulation device cools the marble base via the diversion tube and then flows back into the refrigerant generation and circulation device. A temperature sensor is arranged in the inner cavity of the marble base to monitor the temperature of the marble base.

2. The temperature-controlled marble base according to claim 1, characterized in that: The diversion tube is made of copper pipe and is arranged in a serpentine shape in the inner cavity of the marble base. The number and distribution density of the diversion tubes are determined according to the size of the marble base.

3. A temperature-controlled marble base according to claim 1, characterized in that: The refrigerant generation and circulation device includes a cooling tower. The outlet ends of the diversion tubes are all connected to the water inlet end of the cooling tower. The water outlet end of the cooling tower is connected to a liquid cooling water tank. The liquid cooling water tank is connected to the inlet end of the diversion tube through a pump.

4. The temperature-controlled marble base according to claim 3, wherein: The water discharged from the outlet end of the diversion tube flows into the cooling tower after being filtered by a filter.

5. A temperature-controlled marble base according to claim 4, characterized in that: The temperature sensors are arranged at the water inlet end of the filter and the water outlet end of the pump.

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