Linear furnace tube temperature control device
Through the combination of program-controlled variable frequency power supply and controller, the precise control of the furnace tube temperature is achieved, the problems of temperature fluctuations and short life of the resistive wire are solved, and the stability of temperature control and the service life of the resistive wire are improved.
Patent Information
- Application Number
- CN202422334427.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-24
- Publication Date
- 2025-07-25
- Estimated Expiration
- 2034-09-24
AI Technical Summary
In the prior art, the furnace tube temperature control is not accurate enough, overshoot and sawtoothing are prone to occur, and the resistance wire life is short.
The heating power of the resistor wire is controlled by a program-controlled variable frequency power supply, and the power of the resistor wire is gradually reduced by the controller when it approaches the preset temperature, and the precise temperature control is achieved by combining the temperature sensor and D/A analog-to-digital converter, analog output module, RS485 communication board and other components.
It improves the accuracy of furnace tube temperature control, reduces temperature fluctuations, and extends the service life of resistive wires.
Smart Images
Figure CN223155414U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductors, and particularly relates to a linear furnace tube temperature control device. Background Art
[0002] With the increasingly advanced furnace tube processes in semiconductors and photovoltaics, and the ever-increasing requirements, the temperature control accuracy of furnace tubes is getting higher and higher, and new technologies are needed to achieve the control of linear furnace tube temperature. The current method for controlling the furnace tube temperature is to use the way of relay + resistance wire. Each time, the resistance wire is driven at the maximum power. The temperature control accuracy of the system is poor, and overshoot is likely to occur, that is, the temperature will exceed the preset temperature, and then the resistance wire is turned off to cool it down, and the temperature curve is likely to show sawteeth. At the same time, since the resistance wire uses the maximum power each time, the service life of the resistance wire is reduced.
[0003] The above problems need to be solved urgently at present. Summary of the Utility Model
[0004] The purpose of the utility model is to overcome the problems of sawtooth phenomenon in the internal heating temperature curve of the furnace tube and the reduction of the service life of the resistance wire existing in the prior art.
[0005] The utility model provides a linear furnace tube temperature control device, which comprises: a controller, at least one programmable frequency conversion power supply and at least one furnace tube. A resistance wire and a temperature sensor are arranged inside the furnace tube; the controller is electrically connected with the at least one programmable frequency conversion power supply and is used for simultaneously controlling the output power of the at least one programmable frequency conversion power supply; the programmable frequency conversion power supply is electrically connected with the resistance wire and is used for heating the resistance wire at different powers; the temperature sensor is electrically connected with the controller and is used for transmitting the temperature inside the furnace tube to the controller.
[0006] Further, the device further comprises a D / A analog-to-digital converter. The output end of the temperature sensor is electrically connected with the input end of the D / A analog-to-digital converter, and the output end of the D / A analog-to-digital converter is electrically connected with the input end of the controller, and is used for converting the digital signal transmitted by the temperature sensor into an analog signal and transmitting it to the controller.
[0007] Further, the device further comprises an analog output module. The input end of the analog output module is electrically connected with the output end of the controller, and the output end of the analog output module is electrically connected with the at least one programmable frequency conversion power supply, and is used for converting the digital signal processed by the controller into an analog signal.
[0008] Further, the device comprises an RS485 communication board. The RS485 communication board is arranged at the output end of the controller and is electrically connected with the input end of the at least one programmable frequency conversion power supply.
[0009] Further, the model of the RS485 communication board is FX2N-485BD.
[0010] Further, the device further includes a display panel, and the display panel is electrically connected to the controller.
[0011] Further, the at least one programmable frequency conversion power supply is uniquely and correspondingly connected to the at least one furnace tube.
[0012] Further, the model of the controller is FX2N-32MR.
[0013] Further, the device further includes an alarm lamp, and the alarm lamp is electrically connected to the controller and is used for giving a prompt through the alarm lamp when the temperature in the furnace tube reaches a preset temperature.
[0014] Further, the controller is one of a PLC controller, a single-chip microcomputer, a DSP, or a comparator.
[0015] The beneficial effects of the present utility model are as follows: The present utility model provides a linear furnace tube temperature control device, and the device includes: a controller, at least one programmable frequency conversion power supply, and at least one furnace tube. A resistance wire and a temperature sensor are arranged inside the furnace tube; the controller is electrically connected to the at least one programmable frequency conversion power supply and is used for simultaneously controlling the output power of the at least one programmable frequency conversion power supply; the programmable frequency conversion power supply is electrically connected to the resistance wire and is used for heating the resistance wire with different powers; the temperature sensor is electrically connected to the controller and is used for transmitting the temperature in the furnace tube to the controller. By operating in the mode of a programmable frequency conversion power supply, when rapid temperature change is required, the maximum power is used to drive the resistance wire. When the temperature approaches the preset temperature point, the controller controls the power of the programmable frequency conversion power supply to gradually decrease. In this way, the difference between the actual furnace tube temperature and the preset furnace tube temperature can be greatly reduced, and it is easier to accurately control the furnace tube temperature; at the same time, since the output power of the programmable frequency conversion power supply decreases when approaching the preset temperature, the heat generation of the resistance wire decreases, which is beneficial to extending the service life of the resistance wire. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] The following further describes the present utility model in conjunction with the drawings and embodiments.
[0017] Figure 1 is a schematic structural diagram of a linear furnace tube temperature control device provided by an embodiment of the present utility model.
[0018] Figure 2 is a connection circuit diagram of a controller and multiple programmable frequency conversion power supplies provided by an embodiment of the present utility model.
[0019] Figure 3It is a temperature curve graph of a heating method using the prior art provided by the embodiments of the present utility model.
[0020] Figure 4 It is a temperature curve graph of a heating method using the heating method of the present solution provided by the embodiments of the present utility model. Detailed implementation manners
[0021] Before discussing the exemplary embodiments in more detail, it should be mentioned that some exemplary embodiments are described as processes or methods depicted as flowcharts. Although the flowcharts describe the operations as sequential processes, many of the operations can be implemented in parallel, concurrently, or simultaneously. In addition, the order of the operations can be rearranged. The process can be terminated when its operations are completed, but it can also have additional steps not included in the drawings. The process can correspond to a method, function, procedure, subroutine, subprogram, etc.
[0022] It should be understood that although the terms "first", "second", etc. may be used herein to describe various units, these units should not be limited by these terms. These terms are only used to distinguish one unit from another. For example, without departing from the scope of the exemplary embodiments, the first unit can be called the second unit, and similarly, the second unit can be called the first unit. The term "and / or" used herein includes any and all combinations of one or more of the listed related items.
[0023] Now, the present utility model will be described in detail with reference to the accompanying drawings. This figure is a simplified schematic diagram, which only illustrates the basic structure of the present utility model in a schematic manner, so it only shows the components related to the present utility model.
[0024] Embodiment 1
[0025] For the convenience of subsequent understanding, the working principle is described herein: It operates in the mode of a programmed variable-frequency power supply. When rapid temperature change is required, the maximum power is used to drive the resistance wire. When the temperature approaches the preset temperature point, the power of the programmed variable-frequency power supply is gradually reduced by the controller. This can greatly reduce the difference between the actual furnace tube temperature and the preset furnace tube temperature, and it is easier to precisely control the furnace tube temperature. At the same time, since the output power of the programmed variable-frequency power supply decreases when approaching the preset temperature, the heat generation of the resistance wire is reduced, which is beneficial to extending the life of the resistance wire. And by controlling multiple programmed variable-frequency power supplies with one controller to control the heating temperature in multiple furnace tubes, the working efficiency can be effectively improved.
[0026] As Figure 1 shown, it is a schematic structural diagram of a linear furnace tube temperature control device provided by the present utility model.
[0027] As an example, the device includes: a controller 1, at least one programmable frequency conversion power supply 2, and at least one furnace tube 3. A heating wire 310 and a temperature sensor 320 are arranged inside the furnace tube; the controller 1 is electrically connected to the at least one programmable frequency conversion power supply 2 and is used to simultaneously control the output power of the at least one programmable frequency conversion power supply 2; the programmable frequency conversion power supply 2 is electrically connected to the heating wire 310 and is used to heat the heating wire 310 with different powers; the temperature sensor 320 is electrically connected to the controller 1 and is used to transmit the temperature inside the furnace tube to the controller.
[0028] Preferably, the device further includes a D / A analog-to-digital converter 4. The output end of the temperature sensor 320 is electrically connected to the input end of the D / A analog-to-digital converter 4, and the output end of the D / A analog-to-digital converter 4 is electrically connected to the input end of the controller 1. It is used to convert the digital signal transmitted by the temperature sensor 320 into an analog signal and transmit it to the controller 1.
[0029] Preferably, the device further includes an analog output module 5. The input end of the analog output module 5 is electrically connected to the output end of the controller 1, and the output end of the analog output module 5 is electrically connected to the at least one programmable frequency conversion power supply 2. It is used to convert the digital signal processed by the controller 1 into an analog signal.
[0030] Preferably, the device may further include an RS485 communication board. The RS485 communication board is placed at the output end of the controller and is electrically connected to the input end of the at least one programmable frequency conversion power supply 2. By controlling the programmable frequency conversion power supply 2 in the RS485 communication mode, only one RS485 communication cable (containing 5 core wires) is needed to directly send various control and frequency modulation commands to the programmable frequency conversion power supply 2. The programmable frequency conversion power supply 2 can execute corresponding function controls according to the instructions sent by the controller through the RS485 communication cable.
[0031] Preferably, the model of the RS485 communication board is FX2N-485BD.
[0032] Preferably, the device further includes a display panel 6. The display panel is electrically connected to the controller 1. Through the display panel 6, the temperature data transmitted by the temperature sensor and the power data of the programmable frequency conversion power supply 2 can be viewed in real time, and relevant data preset in the controller 1, such as the preset temperature data, can also be changed through the display panel 6.
[0033] Preferably, the at least one programmable frequency conversion power supply 2 is uniquely and correspondingly connected to the at least one furnace tube 3. For example Figure 2As shown in the figure, the controller 1 can be connected to multiple programmable variable-frequency power supplies 2 simultaneously through an RS485 communication board. Each programmable variable-frequency power supply 2 controls the temperature inside a furnace tube. Specifically, each programmable variable-frequency power supply 2 is connected to a heating wire 310 inside a furnace tube, and the heating temperature of the heating wire 310 is controlled by the different powers output by the programmable variable-frequency power supply 2. That is to say, when rapid temperature change is required, such as when the temperature inside the furnace tube differs greatly from the preset temperature, the heating wire is driven with the maximum power. When the temperature approaches the preset temperature point, the power of the programmable variable-frequency power supply is gradually reduced by the controller. This can greatly reduce the difference between the actual furnace tube temperature and the preset furnace tube temperature, and it is easier to precisely control the furnace tube temperature. At the same time, since the output power of the programmable variable-frequency power supply decreases when approaching the preset temperature, the heat generation of the heating wire decreases, which is beneficial to extending the life of the heating wire. The heating method in the prior art: During use, first, the controller presets the temperature T1 at time t1, the temperature T2 at time t2, and the temperature T3 at time t3. The temperature sensor continuously detects the temperature inside the furnace tube. At the beginning, the temperature inside the furnace tube differs greatly from the preset temperature. At this time, the relay is continuously closed, and the heating wire is heated with the maximum power. When the temperature inside the furnace tube approaches the preset temperature, the controller drives the heating wire to generate heat by intermittently closing and disconnecting the relay, thereby achieving the purpose of overall reducing the heating power. In this scheme, during the heating process, it always works in the way of the maximum power of the heating wire each time. The temperature control is achieved by closing and disconnecting the relay to make the resistor in the working or non-working state. Based on this control method, the temperature curve will show a sawtooth effect, and the temperature control is not precise enough. At the same time, this method will cause the heating wire to be driven with the maximum power each time it generates heat, which will reduce the life of the heating wire. For example, if the power of the heating wire is 2000W, the heating wire runs at a power of 2000W each time it works. When approaching the preset temperature, temperature feedback control is achieved by continuously closing and disconnecting the relay. As Figure 3 As shown in FIG. -4, compared with the heating method of the furnace tube described in the prior art, the temperature curve of the heating method inside the furnace tube in this scheme does not include sawteeth, and the temperature control is relatively precise.
[0034] Preferably, the model of the controller is FX2N - 32MR.
[0035] Preferably, the device further includes an alarm lamp, and the alarm lamp is electrically connected to the controller and is used to give a prompt through the alarm lamp when the temperature inside the furnace tube reaches the preset temperature.
[0036] Preferably, the controller is one of a PLC controller, a single-chip microcomputer, a DSP, or a comparator.
[0037] The above embodiments operate in the manner of a programmed variable-frequency power supply. When rapid temperature change is required, the maximum power is used to drive the heating wire. When the temperature approaches the preset temperature point, the power of the programmed variable-frequency power supply is gradually reduced through the controller. This can greatly reduce the difference between the actual furnace tube temperature and the preset furnace tube temperature, making it easier to precisely control the furnace tube temperature. At the same time, since the output power of the programmed variable-frequency power supply decreases when approaching the preset temperature, the heat generation of the heating wire is reduced, which is beneficial to extending the life of the heating wire.
[0038] The above are only embodiments of the present invention. Specific structures and common knowledge such as characteristics that are well known in the art are not described in detail here. Those of ordinary skill in the art know all the common general technical knowledge in the technical field to which the utility model belongs before the filing date or the priority date, can know all the prior art in this field, and have the ability to apply conventional experimental means before this date. Those of ordinary skill in the art can, under the inspiration given in this application, combine their own abilities to complete and implement this solution. Some typical well-known structures or well-known methods should not become obstacles for those of ordinary skill in the art to implement this application. It should be noted that for those skilled in the art, without departing from the structure of the present invention, several deformations and improvements can still be made, and these should also be regarded as the protection scope of the present invention, and these will not affect the implementation effect of the present invention and the practicality of the patent. The protection scope required by this application should be based on the content of its claims, and the specific implementation manners described in the specification can be used to explain the content of the claims.
Claims
1. A linear furnace tube temperature control device, characterized in that, The device includes: a controller, at least one programmed variable-frequency power supply, and at least one furnace tube, wherein a resistance wire and a temperature sensor are arranged inside the furnace tube; The controller is electrically connected to the at least one programmed variable-frequency power supply and is used to simultaneously control the output power of the at least one programmed variable-frequency power supply; The programmed variable-frequency power supply is electrically connected to the resistance wire and is used to heat the resistance wire with different powers; The temperature sensor is electrically connected to the controller and is used to transmit the temperature inside the furnace tube to the controller.
2. The linear furnace tube temperature control device according to claim 1, characterized in that, The device further includes a D / A analog-to-digital converter. The output end of the temperature sensor is electrically connected to the input end of the D / A analog-to-digital converter, and the output end of the D / A analog-to-digital converter is electrically connected to the input end of the controller, and is used to convert the digital signal transmitted by the temperature sensor into an analog signal and transmit it to the controller.
3. The linear furnace tube temperature control device according to claim 1, characterized in that The device further includes an analog output module. The input end of the analog output module is electrically connected to the output end of the controller, and the output end of the analog output module is electrically connected to the at least one programmed variable-frequency power supply, and is used to convert the digital signal processed by the controller into an analog signal.
4. The linear furnace tube temperature control device according to claim 1, characterized in that, The device includes an RS485 communication board, which is arranged at the output end of the controller and is electrically connected to the input end of the at least one programmed variable-frequency power supply.
5. The linear furnace tube temperature control device according to claim 4, characterized in that The model of the RS485 communication board is FX2N-485BD.
6. The linear furnace tube temperature control device according to claim 1, wherein The device further includes a display panel, and the display panel is electrically connected to the controller.
7. The linear furnace tube temperature control device according to claim 1, characterized in that, The at least one programmed variable-frequency power supply is uniquely corresponding and connected to the at least one furnace tube.
8. The linear furnace tube temperature control device according to claim 1, wherein The model of the controller is FX2N-32MR.
9. The linear furnace tube temperature control device according to claim 1, characterized in that, The device further includes an alarm lamp, and the alarm lamp is electrically connected to the controller and is used to give a prompt through the alarm lamp when the temperature inside the furnace tube reaches the preset temperature.
10. The linear furnace tube temperature control device according to claim 1, characterized in that, The controller is one of a PLC controller, a single-chip microcomputer, a DSP, or a comparator.