Wafer sorting equipment

Abstract

The utility model discloses wafer sorting equipment which comprises a carrying mechanism, a detection and identification mechanism, a transfer mechanism and a storage structure used for storing wafers, and the carrying mechanism, the detection and identification mechanism, the transfer mechanism and the storage structure are all installed on a sorting table. The detection and recognition mechanism comprises a left-right driving mechanism for driving the camera to move left and right and a front-back adjusting mechanism for driving the camera to move front and back; the storage structure comprises two layers of jig boxes, each layer of jig box comprises a plurality of material boxes and a carrying seat, slots matched with the wafers are formed in the inner walls of the material boxes, the material boxes are mounted on the carrying seats, and the carrying seats are mounted on the sorting table. According to the utility model, after the wafers are placed to the transfer mechanism through the carrying mechanism, the wafers are detected and identified through the detection and identification mechanism, so that the automation degree of sorting is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer sorting, and particularly relates to a wafer sorting device. Background Art

[0002] From the perspective of both technology and economic development, the importance of semiconductors is extremely great. The core units of most electronic products, such as computers, mobile phones or digital recorders, are extremely closely related to semiconductors. With the continuous increase in the popularity of semiconductor chips, there is also a large and faster demand for semiconductor equipment, and semiconductor manufacturers require faster equipment delivery times.

[0003] In the existing detection and sorting process, the bin is placed in the area to be detected, and multiple empty bins are placed on the other side of the detection area for placing the wafers after detection. The detection personnel are in the middle. The wafers to be detected are placed on the detection equipment by a vacuum pen, and the wafers after detection are moved to the corresponding bins by the vacuum pen according to the output results of the detection equipment, which seriously affects the sorting efficiency of the wafers. And due to the operation problems of the detection personnel during the detection, there are often problems such as accidental dropping and damage of the wafers and misclassification. Summary of the Utility Model

[0004] The main technical problem to be solved by the utility model is to provide a wafer sorting device. After the wafers are placed on the transfer mechanism by the handling mechanism, the detection and recognition mechanism is used to detect and recognize the wafers, which improves the degree of automation of sorting.

[0005] To solve the above technical problem, a technical solution adopted by the utility model is: a wafer sorting device, including a handling mechanism, a detection and recognition mechanism, a transfer mechanism and a storage structure for storing wafers. The handling mechanism, the detection and recognition mechanism, the transfer mechanism and the storage structure are all installed on the sorting table. After the wafers are placed on the transfer mechanism by the handling mechanism, the detection and recognition mechanism is used to detect and recognize the wafers, which improves the degree of automation of sorting;

[0006] The detection and recognition mechanism includes a camera, a left-right driving mechanism for driving the camera to move left and right, and a front-back adjusting mechanism for driving the camera to move back and forth;

[0007] The transfer mechanism is arranged below the camera. The transfer mechanism includes a turntable and a rotation driving motor for driving the turntable to rotate. The wafers are placed on the turntable. The turntable is connected to the output shaft of the rotation driving motor. The rotation driving motor is fixed in a transfer box. The transfer box is fixed on the sorting table. The transfer box is provided with a sensor for detecting the notch of the wafer. After the wafers are placed on the turntable, the position of the notch is recognized by the sensor, and then the rotation driving motor is used to drive the turntable to rotate to rotate the wafers;

[0008] The storage structure includes two layers of fixture boxes. Each layer of fixture box includes a number of material boxes and carriers. The inner wall of the material box is provided with slots matching the wafers. The material box is installed on the carrier, and the carrier is installed on the sorting table.

[0009] Further, the material box is a first material box, a second material box or a third material box. The first material box is used for storing 4-inch wafers, the second material box is used for storing 6-inch wafers, and the third material box is used for storing 8-inch wafers, so that wafers of different sizes can be stored.

[0010] Further, the handling mechanism includes two manipulators and a lifting drive cylinder for driving the manipulators to lift up and down. The design of the two manipulators ensures the efficiency of material picking and feeding.

[0011] Further, the manipulator includes a material picking arm, a first rotating arm, a second rotating arm and a third connecting arm. The material picking arm is rotatably connected to the first rotating arm, the first rotating arm is rotatably connected to the second rotating arm, the second rotating arm is rotatably connected to the third connecting arm, the third connecting arm is rotatably connected to the lifting seat, the lifting seat is fixed to the output shaft of the lifting drive cylinder, and the lifting drive cylinder is fixed to the sorting table.

[0012] Further, the left and right drive mechanism includes a translation seat and a translation drive motor for driving the translation seat to move left and right. The translation seat is connected to the output shaft of the translation drive motor, and the translation drive motor is installed on the sorting table.

[0013] Further, the front and back adjustment mechanism includes a bolt. The camera is fixed to the mounting plate. The translation seat is provided with a guide groove, and the bolt passes through the guide groove and is connected to the mounting plate.

[0014] Further, the two layers of fixture boxes are annularly distributed on the outer periphery of the handling mechanism.

[0015] Further, a fan filter unit is installed above the sorting table, which has the effect of filtering the air and preventing particles such as dust from falling onto the wafers.

[0016] The beneficial effects of the present utility model at least include the following points:

[0017] The present utility model includes a handling mechanism, a detection and identification mechanism, a transfer mechanism and a storage structure for storing wafers. After the wafers are placed on the transfer mechanism by the handling mechanism, the detection and identification mechanism is used to detect and identify the wafers, which improves the degree of automation of sorting;

[0018] The detection and recognition mechanism of the present utility model includes a camera, a left-right driving mechanism for driving the camera to move left and right, and a front-back adjustment mechanism for driving the camera to move back and forth, thereby facilitating the adjustment of the position of the camera and ensuring the imaging effect. It is worth noting that the transfer mechanism includes a turntable and a rotation driving motor for driving the turntable to rotate. The wafer is placed on the turntable, and the turntable is connected to the output shaft of the rotation driving motor. The rotation driving motor is fixed to the transfer box, and a sensor for detecting the notch of the wafer is installed on the transfer box. After the wafer is placed on the turntable, the position of the notch is identified by the sensor, and then the turntable is driven by the rotation driving motor to rotate the wafer;

[0019] The cartridge of the present utility model is the first cartridge, the second cartridge or the third cartridge. The first cartridge is used to store 4-inch wafers, the second cartridge is used to store 6-inch wafers, and the third cartridge is used to store 8-inch wafers, enabling the storage of wafers of different sizes;

[0020] The handling mechanism of the present utility model includes two manipulators and a lifting driving cylinder for driving the manipulators to move up and down. The design of the two manipulators ensures the efficiency of material picking and feeding;

[0021] A fan filter unit is installed above the sorting table of the present utility model to filter the air and prevent dust and other particles from falling onto the wafer. Description of the Drawings

[0022] Figure 1 is a schematic structural diagram of the wafer sorting equipment of the present utility model;

[0023] Figure 2 is of the present utility model Figure 1 enlarged view of part A;

[0024] Figure 3 is a schematic structural diagram of the transfer mechanism of the present utility model;

[0025] Figure 4 is a schematic structural diagram of the handling mechanism of the present utility model;

[0026] Figure 5 is a schematic diagram of the wafer of the present utility model;

[0027] Figure 6 is a schematic structural diagram of the first cartridge of the present utility model;

[0028] Figure 7 is a schematic structural diagram of the second cartridge of the present utility model;

[0029] Figure 8 is a schematic structural diagram of the third cartridge of the present utility model;

[0030] Figure 9 is a schematic structural diagram of the present utility model;

[0031] The reference numerals of each part in the drawings are as follows:

[0032] 1. Handling mechanism; 11. Lifting drive cylinder; 12. Material taking arm; 13. First rotating arm; 14. Second rotating arm; 15. Third connecting arm; 16. Lifting seat; 2. Detection and identification mechanism; 21. Camera; 22. Translation seat; 221. Guide groove; 23. Translation drive motor; 25. Mounting plate; 3. Transfer mechanism; 31. Turntable; 33. Transfer box; 34. Sensor; 4. Wafer; 41. Notch; 5. Storage structure; 511. First material box; 512. Second material box; 513. Third material box; 52. Carrier; 53. Slot; 6. Sorting table; 7. Fan filter unit. Detailed implementation manners

[0033] The following elaborates on the preferred embodiments of the present utility model in conjunction with the drawings, so that the advantages and features of the present utility model can be more easily understood by those skilled in the art, thereby making the protection scope of the present utility model more clearly defined.

[0034] Embodiment: A wafer sorting device, as Figure 1 shown, includes a handling mechanism 1, a detection and identification mechanism 2, a transfer mechanism 3, and a storage structure 5 for storing wafers 4. The handling mechanism 1, the detection and identification mechanism 2, the transfer mechanism 3, and the storage structure 5 are all installed on the sorting table 6;

[0035] As Figure 2 shown, the detection and identification mechanism 2 includes a camera 21, a left - right drive mechanism for driving the camera 21 to move left and right, and a front - rear adjustment mechanism for driving the camera 21 to move forward and backward. In this embodiment, the camera can identify the identification code on the surface of the wafer;

[0036] Below the camera 21 is provided with the transfer mechanism 3. As Figure 3 shown, the transfer mechanism 3 includes a turntable 31 and a rotation drive motor for driving the turntable 31 to rotate. The wafer 4 is placed on the turntable 31. The turntable 31 is connected to the output shaft of the rotation drive motor. The rotation drive motor is fixed to the transfer box 33, and the transfer box 33 is fixed to the sorting table 6. As Figure 4 shown, the transfer box 33 is equipped with a sensor 34 for detecting the notch 41 of the wafer 4. Specifically, in implementation, the sensor is a CCD sensor or an optical sensor;

[0037] The storage structure 5 includes two layers of fixture boxes. Each layer of fixture box includes a plurality of material boxes and carriers 52. The inner wall of the material box is provided with slots 53 matching the wafers 4. The material box is installed on the carrier 52, and the carrier 52 is installed on the sorting table 6;

[0038] In specific implementation, one of the two fixture boxes is the fixture box to be detected, and the other is an empty fixture box for placing the wafers after detection.

[0039] The cassette is the first cassette 511, the second cassette 512 or the third cassette 513. As Figure 6 shown, the first cassette 511 is used to store 4-inch wafers. As Figure 7 shown, the second cassette 512 is used to store 6-inch wafers. As Figure 8 shown, the third cassette 513 is used to store 8-inch wafers.

[0040] The handling mechanism 1 includes two manipulators and a lifting drive cylinder 11 for driving the manipulators to lift up and down.

[0041] As Figure 4 shown, the manipulator includes a wafer pickup arm 12, a first rotating arm 13, a second rotating arm 14 and a third connecting arm 15. The wafer pickup arm 12 is rotatably connected to the first rotating arm 13. The first rotating arm 13 is rotatably connected to the second rotating arm 14. The second rotating arm 14 is rotatably connected to the third connecting arm 15. The third connecting arm 15 is rotatably connected to a lifting seat 16. The lifting seat 16 is fixed to the output shaft of the lifting drive cylinder 11. The lifting drive cylinder 11 is fixed to the sorting table 6.

[0042] In this embodiment, the rotations between the wafer pickup arm, the first rotating arm, the second rotating arm, the third connecting arm and the lifting seat are driven by motors. For example, a rotating motor is installed on the lifting seat, and the output shaft of the rotating motor is connected to the third connecting arm. Since the manipulator is a prior art, it will not be elaborated here.

[0043] In specific implementation, both the wafer pickup arm and the turntable are provided with suction cups for adsorbing wafers.

[0044] The left and right drive mechanism includes a translation seat 22 and a translation drive motor 23 for driving the translation seat 22 to move left and right. The translation seat 22 is connected to the output shaft of the translation drive motor 23. The translation drive motor 23 is installed on the sorting table 6.

[0045] The front and back adjustment mechanism includes bolts. The camera 21 is fixed to a mounting plate 25. The translation seat 22 is provided with a guiding groove 221. The bolts pass through the guiding groove 221 and are connected to the mounting plate 25.

[0046] The two fixture boxes are annularly distributed on the outer periphery of the handling mechanism 1.

[0047] As Figure 9As shown, a fan filter unit 7 is installed above the sorting table 6. In this embodiment, the fan filter module includes a fan and a filter plate. Since this is prior art, no further elaboration will be provided.

[0048] During specific implementation, the translation drive motor, the camera, the rotation drive motor, the sensor, the manipulator, the lifting drive cylinder, and the fan filter unit are all electrically connected to the controller.

[0049] The working principle of the present utility model is as follows: The manipulator transports the wafers in the cassette to the turntable, identifies the position of the notch through the sensor, then uses the rotation drive motor to drive the turntable to rotate to adjust the angle of the wafers. After the camera takes pictures of the wafers, the manipulator is used to sort the wafers into the corresponding empty bins, improving the degree of automation of sorting.

[0050] The above are only embodiments of the present utility model, and do not limit the patent scope of the present utility model accordingly. Any equivalent structural transformation made by using the content of the specification and drawings of the present utility model, or directly or indirectly applied in other related technical fields, shall similarly be included within the patent protection scope of the present utility model.

Claims

1. A wafer sorting device, characterized in that: It includes a handling mechanism (1), a detection and identification mechanism (2), a transfer mechanism (3), and a storage structure (5) for storing wafers (4). The handling mechanism, the detection and identification mechanism, the transfer mechanism, and the storage structure are all installed on a sorting table (6). The detection and identification mechanism includes a camera (21), a left-right driving mechanism for driving the camera to move left and right, and a front-back adjustment mechanism for driving the camera to move forward and backward. Below the camera is provided with the transfer mechanism. The transfer mechanism includes a turntable (31) and a rotation driving motor for driving the turntable to rotate. The wafer is placed on the turntable. The turntable is connected to the output shaft of the rotation driving motor. The rotation driving motor is fixed to a transfer box (33). The transfer box is fixed to the sorting table. The transfer box is equipped with a sensor (34) for detecting the notch (41) of the wafer. The storage structure includes two layers of fixture boxes. Each layer of fixture box includes a plurality of material boxes and a carrier (52). The inner wall of the material box is provided with a slot (53) matching the wafer. The material box is installed on the carrier. The carrier is installed on the sorting table.

2. The wafer sorting device according to claim 1, wherein: The material box is a first material box (511), a second material box (512), or a third material box (513). The first material box is used for storing 4-inch wafers. The second material box is used for storing 6-inch wafers. The third material box is used for storing 8-inch wafers.

3. The wafer sorting device according to claim 1, wherein: The handling mechanism includes two manipulators and a lifting driving cylinder (11) for driving the manipulators to lift up and down.

4. The wafer sorting device according to claim 3, wherein: The manipulator includes a material-taking arm (12), a first rotating arm (13), a second rotating arm (14), and a third connecting arm (15). The material-taking arm is rotatably connected to the first rotating arm. The first rotating arm is rotatably connected to the second rotating arm. The second rotating arm is rotatably connected to the third connecting arm. The third connecting arm is rotatably connected to a lifting seat (16). The lifting seat is fixed to the output shaft of the lifting driving cylinder. The lifting driving cylinder is fixed to the sorting table.

5. The wafer sorting device according to claim 1, characterized in that: The left-right driving mechanism includes a translation seat (22) and a translation driving motor (23) for driving the translation seat to move left and right. The translation seat is connected to the output shaft of the translation driving motor. The translation driving motor is installed on the sorting table.

6. The wafer sorting device according to claim 5, wherein: The front-back adjustment mechanism includes a bolt. The camera is fixed to a mounting plate (25). The translation seat is provided with a guiding groove (221). The bolt passes through the guiding groove and is connected to the mounting plate.

7. The wafer sorting device according to claim 1, wherein: The two layers of fixture boxes are annularly distributed on the outer periphery of the handling mechanism.

8. The wafer sorting device according to claim 1, wherein: Above the sorting table, a fan filter unit (7) is installed.

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