Tank cover mechanism and liquid medicine tank device

Abstract

The utility model discloses a tank cover mechanism and a liquid medicine tank device, and relates to the technical field of semiconductor cleaning and etching, and the tank cover mechanism comprises a sealing box, a cover plate, a rotating shaft, a transmission assembly and a driver; a sealing cavity is formed in the sealing box; the rotating shaft is rotationally installed in the sealing box and located outside the sealing cavity. The cover plate is fixedly connected with the rotating shaft; the driver is installed in the sealing cavity, and the driving end of the driver extends out of one side face of the sealing box. The driving end is connected with one end of the rotating shaft through a transmission assembly and used for driving the rotating shaft to rotate. The driver is mounted in the sealing cavity of the sealing box, so that the driver is prevented from being directly exposed in an operation environment and is prevented from being influenced by corrosive substances generated by volatilization of liquid medicine, damage caused by corrosion is reduced, the service life of the driver is effectively prolonged, and the maintenance cost is reduced.

Description

Technical Field

[0001] This application relates to the technical field of semiconductor cleaning and etching, and particularly to a tank cover mechanism and a chemical solution tank device. Background Art

[0002] In the field of semiconductor manufacturing, cleaning and wet etching are two crucial process steps. The cleaning process is responsible for removing impurities and particles on the surface of the wafer, while wet etching selectively removes specific materials on the surface of the wafer through chemical reactions. These two steps are crucial for ensuring the purity and precise manufacturing dimensions of the wafer. To achieve high efficiency and quality in these processes, the design of the chemical solution tank in a semiconductor cleaning machine must ensure sufficient and uniform contact between the chemical solution and the wafer surface.

[0003] Traditional chemical solution tank designs usually include a tank cover, whose main purpose is to reduce heat loss and chemical solution volatilization in the tank. For example, Chinese Patent Application No. CN118053795A discloses a scientific research type wet etching fully automated system and machine platform, which includes a switch cover device. This device uses a pneumatic telescopic cylinder as a switch driver to control the flipping of the etching end cover to achieve automated operation. However, this design has a significant defect: the switch driver is directly exposed to the working environment and is easily affected by corrosive substances generated by chemical solution volatilization, resulting in damage and shortened service life.

[0004] Therefore, while existing chemical solution tank designs improve cleaning and etching efficiency, they also face challenges in terms of durability and maintenance costs. To overcome these challenges, a new chemical solution tank design is urgently needed. Utility Model Content

[0005] In view of this, the purpose of this application is to provide a tank cover mechanism and a chemical solution tank device that can effectively isolate the corrosive environment, protect the driver, and at the same time maintain the sealing performance of the chemical solution tank and the convenience of operation.

[0006] To achieve the above technical purpose, this application provides a tank cover mechanism, including a sealed box, a cover plate, a rotating shaft, a transmission component, and a driver;

[0007] A sealed cavity is provided inside the sealed box;

[0008] The rotating shaft is rotatably installed on the sealed box and is located outside the sealed cavity;

[0009] The cover plate is fixedly connected to the rotating shaft;

[0010] The driver is installed inside the sealed cavity, and its driving end extends out of one side of the sealed box;

[0011] The driving end is connected to one end of the rotating shaft through the transmission assembly and is used to drive the rotating shaft to rotate.

[0012] Further, it further includes a protective cover;

[0013] The protective cover is installed on one side of the sealing box and forms a cover for the transmission assembly.

[0014] Further, the sealing box includes a box body and a sealing plate;

[0015] A chamber is provided inside the box body;

[0016] An installation opening communicating with the chamber is provided on the box body;

[0017] The sealing plate is detachably installed on the installation opening and is used to close the installation opening so that the chamber forms the sealed cavity.

[0018] Further, an annular step is provided around the installation opening;

[0019] The sealing plate is installed on the annular step.

[0020] Further, two support plates are provided on the sealing box extending from its front face to the back face direction;

[0021] The two support plates are arranged in parallel at intervals in the direction from one side face of the sealing box to the other side face;

[0022] Both ends of the rotating shaft are respectively rotatably connected to the two support plates through bearings and are located on the side of the back face of the sealing box away from the front face;

[0023] One end of the rotating shaft penetrates through the support plate towards one side face direction of the sealing box for connecting the transmission assembly;

[0024] An avoidance inclined surface for avoiding the rotation of the cover plate is provided on the back face of the sealing box.

[0025] Further, a fixing protrusion is provided on the rotating shaft;

[0026] The fixing protrusion is arranged along the axial direction of the rotating shaft and its top surface is a plane;

[0027] The cover plate is fixedly connected to the top surface of the fixing protrusion.

[0028] Further, an annular groove is provided on the bottom surface of the cover plate;

[0029] A sealing ring is provided in the annular groove.

[0030] Further, the driver is a reversible rotary motor.

[0031] Further, the transmission assembly is one of a gear assembly, a pulley assembly, a sprocket assembly, and a connecting rod assembly.

[0032] Further, the transmission assembly includes a driving gear and a driven gear;

[0033] The driving gear is fixed on the driving end and is driven by the driving end to rotate;

[0034] The driven gear is fixed at one end of the rotating shaft and meshes with the driving gear.

[0035] Further, the transmission assembly further includes a transmission gear;

[0036] The transmission gear is rotatably installed on one side surface of the sealed box and is located between the driving gear and the driven gear, and meshes with the driving gear and the driven gear respectively.

[0037] The present application also discloses a liquid medicine tank device, including a liquid medicine tank body and the above-mentioned tank cover mechanism;

[0038] The tank cover mechanism is installed on one side of the liquid medicine tank body, and its cover plate is used to control the opening and closing of the opening at the top of the liquid medicine tank body.

[0039] It can be seen from the above technical solutions that the tank cover mechanism designed in the present application has the following beneficial effects:

[0040] 1. The driver is installed in the sealed cavity of the sealed box, avoiding the direct exposure of the driver to the working environment, protecting it from the corrosive substances generated by the volatilization of the liquid medicine, reducing the damage caused by corrosion, effectively extending the service life of the driver, and thus reducing the maintenance cost.

[0041] 2. The tank cover mechanism adopts a (modular) independent design. During installation, only the box body needs to be fitted to the liquid medicine tank for installation, and the opening and closing control of the opening of the liquid medicine tank by the cover plate can be easily achieved. This design concept greatly reduces the complexity of installation, without the need for cumbersome calibration and the step-by-step installation of multiple components, making the installation process more convenient and efficient.

[0042] 3. It provides a relatively enclosed environment for the driver, and can also effectively reduce the leakage of mechanical vibration and noise generated during the operation of the driver, making the entire tank cover mechanism quieter during operation and providing a more comfortable working environment for the operator. Description of the Drawings

[0043] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0044] Figure 1 The first three-dimensional view of a slot cover mechanism provided in the present application;

[0045] Figure 2 The second three-dimensional view of a slot cover mechanism provided in the present application;

[0046] Figure 3 The three-dimensional view of a slot cover mechanism without a sealing plate provided in the present application;

[0047] Figure 4 The cross-sectional view of a slot cover mechanism provided in the present application;

[0048] In the figure: 1, sealing box; 10, sealing cavity; 11, box body; 111, mounting opening; 112, annular step; 12, sealing plate; 13, support plate; 14, bearing; 2, driver; 3, rotating shaft; 31, fixed protrusion; 4, cover plate; 41, annular groove; 5, transmission component; 51, driving gear; 52, driven gear; 53, transfer gear. Detailed implementation manners

[0049] The following will clearly and completely describe the technical solutions of the embodiments of the present application with reference to the drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope protected by the embodiments of the present application.

[0050] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the embodiments of the present application. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0051] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "linkage" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0052] The embodiments of the present application disclose a trough cover mechanism and a liquid medicine trough device.

[0053] Please refer to Figure 1 and Figure 3 One embodiment of a trough cover mechanism provided in the embodiments of the present application includes:

[0054] A sealed box 1, a cover plate 4, a rotating shaft 3, a transmission assembly 5, and a driver 2.

[0055] A sealed cavity 10 is provided inside the sealed box 1.

[0056] The rotating shaft 3 is rotatably installed on the sealed box 1 and is located outside the sealed cavity 10; the cover plate 4 is fixedly connected to the rotating shaft 3; the driver 2 is installed inside the sealed cavity 10, and its driving end extends out of one side of the sealed box 1; the driving end is connected to one end of the rotating shaft 3 through the transmission assembly 5, and is used to drive the rotating shaft 3 to rotate, and then drive the cover plate 4 to perform a flipping motion to realize the opening and closing control.

[0057] The trough cover mechanism designed in the present application has the following beneficial effects:

[0058] 1. Embedding the driver 2 into the sealed cavity 10 of the sealed box 1 avoids the direct exposure of the driver 2 to the working environment, protects it from the corrosive substances generated by the volatilization of the liquid medicine, reduces the damage caused by corrosion, effectively extends the service life of the driver 2, and thus reduces the maintenance cost.

[0059] 2. The trough cover mechanism adopts a (modular) independent design. When installing, only the box body 11 needs to be fitted to the liquid medicine trough for installation, and it can easily realize the opening and closing control of the opening of the liquid medicine trough by the cover plate 4. This design concept greatly reduces the complexity of installation, eliminates the need for cumbersome calibration and the step-by-step installation of multiple components, and makes the installation process more convenient and efficient.

[0060] 3. Providing a relatively enclosed environment for the driver 2 can also effectively reduce the leakage of mechanical vibration and noise generated when the driver 2 operates, making the entire trough cover mechanism quieter during operation and providing a more comfortable working environment for the operator.

[0061] The above is the first embodiment of a slot cover mechanism provided by the embodiments of the present application. The following is the second embodiment of a slot cover mechanism provided by the embodiments of the present application. For details, please refer to Figures 1 to 4 .

[0062] Based on the solution of the above first embodiment:

[0063] Furthermore, it further includes a protective cover; the protective cover is installed on one side of the sealing box 1 to cover the transmission component 5.

[0064] The setting of this protective cover can effectively protect the transmission component 5 from interference and damage from the external environment. For example, it can prevent the liquid medicine from splashing onto the transmission component 5 and avoid the failure of the transmission component 5 due to corrosion or pollution. At the same time, the protective cover can also play a role in dust prevention and debris prevention, keeping the transmission component 5 clean and in good operating condition. In addition, the design of the protective cover can also improve the safety performance of the entire slot cover mechanism, preventing personnel from accidentally contacting the transmission component 5 during operation and causing potential safety hazards.

[0065] Furthermore, for the design of the sealing box 1, it includes a box body 11 and a sealing plate 12; a cavity is provided inside the box body 11; an installation opening 111 communicating with the cavity is provided on the box body 11; the sealing plate 12 is detachably installed on the installation opening 111 for closing the installation opening 111 so that the cavity forms a sealed cavity 10.

[0066] The design of this sealing plate 12 not only facilitates the inspection and maintenance of the inside of the sealing box 1, but also ensures the sealing performance of the sealed cavity 10, preventing the liquid medicine from volatilizing or external impurities from entering the sealed cavity 10 and causing damage to the driver 2 or other components. By simply disassembling the sealing plate 12, the inspection, replacement, or repair of the internal components of the sealing box 1 can be realized, greatly improving the maintainability and service life of the equipment.

[0067] Furthermore, an annular step 112 is provided around the installation opening 111; the sealing plate 12 is installed on the annular step 112, and a sealing layer (such as a rubber layer) can be provided between the annular step 112 and the sealing plate 12 to increase the connection sealing performance.

[0068] The design of the annular step 112 further enhances the connection sealing performance between the sealing plate 12 and the box body 11, ensures the tightness of the sealed cavity 10, and at the same time provides a more stable support for the installation of the sealing plate 12, improving the stability and reliability of the entire slot cover mechanism.

[0069] Furthermore, two support plates 13 are arranged on the sealing box 1 extending from the front to the back of itself; the two support plates 13 are arranged in parallel at intervals in the direction from one side to the other side of the sealing box 1; both ends of the rotating shaft 3 are rotatably connected to the two support plates 13 through bearings 14 respectively, and are located on the side of the back of the sealing box 1 far from the front; the support plates 13 provide support for the installation of the rotating shaft 3, making the installation of the rotating shaft 3 more stable and reliable. In addition, by extending the support plates 13 in the direction from one side to the other side of the sealing box 1 and making the rotating shaft 3 located on the back side of the sealing box 1, a certain space can be reserved for the flipping of the cover plate 4. At the same time, a certain groove space is formed between the support plates 13 and the back of the sealing box 1, which is convenient for cooperation with the liquid medicine tank, so as to be mounted on the liquid medicine tank.

[0070] One end of the rotating shaft 3 penetrates through the support plate 13 in the direction of one side of the sealing box 1, and extends the one end of the rotating shaft 3 to the same side position as the driving end, which is convenient for connecting the transmission assembly 5. This design makes the overall structure more compact and the layout of the transmission assembly 5 more convenient.

[0071] An avoidance inclined surface for avoiding the rotation of the cover plate 4 is provided on the back of the sealing box 1. The design of this avoidance inclined surface enables the cover plate 4 to smoothly avoid the back of the sealing box 1 during the flipping process, avoiding noise and wear caused by collision or friction. At the same time, it also ensures that the cover plate 4 can accurately rotate to the predetermined position, realizing reliable opening and closing control of the opening of the liquid medicine tank. In addition, the setting of the avoidance inclined surface also optimizes the overall structure of the tank cover mechanism, making it more compact and reasonable, and improving the space utilization rate.

[0072] Furthermore, fixing protrusions 31 are provided on the rotating shaft 3; the fixing protrusions 31 are arranged along the axial direction of the rotating shaft 3, and the top surface is a plane; the cover plate 4 is fixedly connected to the top surface of the fixing protrusions 31.

[0073] The design of the fixing protrusions 31 not only enhances the connection strength between the cover plate 4 and the rotating shaft 3, making the cover plate 4 more stable during the flipping process, but also provides a more convenient way for the installation of the cover plate 4 (realizing the installation and fixation between planes). By simply fixedly connecting the cover plate 4 to the top surface of the fixing protrusions 31, the installation of the cover plate 4 can be realized, greatly improving the installation efficiency and convenience.

[0074] Furthermore, an annular groove 41 is provided on the bottom surface of the cover plate 4; a sealing ring (not shown in the figure) is provided in the annular groove 41.

[0075] The setting of the sealing ring further enhances the sealing performance between the cover plate 4 and the opening of the liquid medicine tank, effectively preventing the volatilization of the liquid medicine or the entry of external impurities into the liquid medicine tank through the gap, and ensuring the cleanliness and safety of the liquid medicine tank. At the same time, the sealing ring also plays a role in buffering and shock absorption, reducing the impact and wear of the cover plate 4 on the opening of the liquid medicine tank during the flipping process, and extending the service life of the equipment.

[0076] Further, the driver 2 is a rotatable motor that can rotate forward and backward, specifically, it can be a rotary cylinder, a stepper motor, a DC motor, a servo motor, etc.

[0077] These drivers 2 have the advantages of compact structure, large driving force, high control precision, etc., and can meet the requirements of different application scenarios. By controlling the forward and reverse rotation of the driver 2, the opening and closing of the cover plate 4 can be conveniently realized, and the operation is simple and reliable.

[0078] Further, the transmission component 5 is one of a gear component, a belt pulley component, a sprocket component, and a connecting rod component.

[0079] Further, taking the transmission component 5 as a gear component as an example, specifically, it includes a driving gear 51 and a driven gear 52; the driving gear 51 is fixed on the driving end and rotates under the drive of the driving end; the driven gear 52 is fixed at one end of the rotating shaft 3 and meshes with the driving gear 51.

[0080] Gear transmission has the advantages of simple structure, high transmission efficiency, stable operation, etc., and can effectively transmit the power of the driver 2 to the rotating shaft 3 to realize the flipping movement of the cover plate 4. At the same time, the meshing transmission of the gears also ensures the rotation accuracy and stability of the rotating shaft 3, enabling the cover plate 4 to accurately rotate to the predetermined position and realizing reliable opening and closing control of the opening of the liquid medicine tank.

[0081] Further, the transmission component 5 further includes a transmission gear 53; the transmission gear 53 is rotatably installed on one side of the sealing box 1 and is located between the driving gear 51 and the driven gear 52, and meshes with the driving gear 51 and the driven gear 52 respectively. The design of the transmission gear 53 can avoid making the driving gear 51 and the driven gear 52 too large, making the entire transmission component 5 more compact, reducing the space occupation, and at the same time reducing the manufacturing cost. Through the meshing transmission of the transmission gear 53, the rotation accuracy and stability of the rotating shaft 3 can be further ensured, and the overall performance of the tank cover mechanism is improved.

[0082] This application also discloses a liquid medicine tank device, including a liquid medicine tank body and a tank cover mechanism; the tank cover mechanism is installed on one side of the liquid medicine tank body, and its cover plate 4 is used to control the opening and closing of the opening at the top of the liquid medicine tank body.

[0083] The above has introduced in detail a slot cover mechanism and a liquid medicine tank device provided by the present application. For those of ordinary skill in the art, according to the idea of the embodiments of the present application, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to the present application.

Claims

1. A slot cover mechanism, characterized in that It includes a sealed box (1), a cover plate (4), a rotating shaft (3), a transmission component (5) and a driver (2); A sealed cavity (10) is provided inside the sealed box (1); The rotating shaft (3) is rotatably installed on the sealed box (1) and is located outside the sealed cavity (10); The cover plate (4) is fixedly connected to the rotating shaft (3); The driver (2) is installed inside the sealed cavity (10), and its driving end extends out of one side surface of the sealed box (1); The driving end is connected to one end of the rotating shaft (3) through the transmission component (5) to drive the rotating shaft (3) to rotate.

2. The slot cover mechanism according to claim 1, characterized in that, It further includes a protective cover; The protective cover is installed on one side surface of the sealed box (1) to cover the transmission component (5).

3. The slot cover mechanism according to claim 1, wherein The sealed box (1) includes a box body (11) and a sealing plate (12); A chamber is provided inside the box body (11); An installation opening (111) communicating with the chamber is provided on the box body (11); The sealing plate (12) is detachably installed on the installation opening (111) to close the installation opening (111) so that the chamber forms the sealed cavity (10).

4. The slot cover mechanism according to claim 3, wherein An annular step (112) is provided around the installation opening (111); The sealing plate (12) is installed on the annular step (112).

5. The slot cover mechanism according to claim 1, characterized in that Two support plates (13) are provided on the sealed box (1) extending from its front face to the back face; The two support plates (13) are arranged in parallel at intervals in the direction from one side surface of the sealed box (1) to the other side surface; Both ends of the rotating shaft (3) are rotatably connected to the two support plates (13) through bearings (14) and are located on the side of the back face of the sealed box (1) away from the front face; One end of the rotating shaft (3) penetrates through the support plate (13) in the direction of one side surface of the sealed box (1) for connecting the transmission component (5); An avoidance inclined surface for avoiding the rotation of the cover plate (4) is provided on the back face of the sealed box (1).

6. The slot cover mechanism according to claim 1, characterized in that A fixed protrusion (31) is provided on the rotating shaft (3); The fixed protrusion (31) is arranged along the axial direction of the rotating shaft (3) and its top surface is a plane; The cover plate (4) is fixedly connected to the top surface of the fixed protrusion (31).

7. The slot cover mechanism according to claim 1, characterized in that, An annular groove (41) is provided on the bottom surface of the cover plate (4); A sealing ring is provided in the annular groove (41).

8. The slot cover mechanism according to claim 1, characterized in that, The driver (2) is a rotatable motor that can rotate forward and backward.

9. The slot cover mechanism according to claim 1, wherein The transmission component (5) is one of a gear component, a belt pulley component, a sprocket component and a connecting rod component.

10. The slot cover mechanism according to claim 9, characterized in that, The transmission component (5) includes a driving gear (51) and a driven gear (52); The driving gear (51) is fixed on the driving end and is driven to rotate by the driving end; The driven gear (52) is fixed on one end of the rotating shaft (3) and meshes with the driving gear (51).

11. The slot cover mechanism according to claim 10, characterized in that, The transmission component (5) further includes a transmission gear (53); The transmission gear (53) is rotatably mounted on one side surface of the sealing box (1) and is located between the driving gear (51) and the driven gear (52), and is respectively meshed with the driving gear (51) and the driven gear (52).

12. Liquid medicine tank device, characterized in that, It includes a liquid medicine tank body and a tank cover mechanism as described in any one of claims 1 to 11; The tank cover mechanism is mounted on one side of the liquid medicine tank body, and its cover plate (4) is used to control the opening and closing of the opening at the top of the liquid medicine tank body.

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