Protection mechanism and detection device

Abstract

The utility model discloses a protection mechanism and a detection device. The protection mechanism comprises a shell and a protection assembly, the shell defines a containing cavity, the containing cavity is used for containing a sample, the shell comprises a first wall face and a second wall face which are oppositely arranged, the first wall face is provided with a detection hole, and the second wall face is provided with an avoiding hole; the protection assembly is located in the containing cavity and corresponds to the receding hole, the protection assembly comprises N protection parts which are arranged in a stacked mode, each protection part is provided with a through hole for the driving mechanism to penetrate through, and N is a positive integer larger than or equal to 2; wherein in the direction away from the second wall face, all the protection pieces are set to be the first-stage protection piece to the Nth-stage protection piece in sequence, the first-stage protection piece seals the avoiding hole, the other stages of protection pieces seal the through hole of the previous-stage protection piece, and the through hole of the Nth-stage protection piece is used for being connected with a driving mechanism. The protection mechanism can ensure that the movement of the driving mechanism is not affected on the premise that the containing cavity is closed.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor testing, and particularly to a protection mechanism and a detection device. Background Art

[0002] Detection equipment is often provided with a protective cover to protect and hide the internal components. The wafer stage is arranged in the protective cover and is driven by a driving mechanism to move on a horizontal plane so that the detection probe can detect the sample on the wafer stage. However, due to the need for the wafer stage to move on a horizontal plane, if the driving mechanism is arranged in the protective cover, the size of the protective cover body will be large. If the driving mechanism is arranged outside the protective cover, a large opening needs to be provided on the protective cover to avoid the movement of the driving mechanism, and the driving mechanism passes through the opening and is connected to the wafer stage in the protective cover. Dust and other sundries are likely to enter the protective cover from the opening, affecting the detection accuracy of the sample. Summary of the Utility Model

[0003] The utility model aims to at least solve one of the technical problems existing in the prior art. For this purpose, the utility model provides a protection mechanism that can ensure the enclosure of the accommodation cavity without affecting the movement of the driving mechanism.

[0004] The utility model also provides a detection device with the above protection mechanism.

[0005] According to the protection mechanism of the first aspect embodiment of the utility model, it includes:

[0006] A housing that defines an accommodation cavity for accommodating a sample. The housing includes a first wall surface and a second wall surface arranged opposite to each other. The first wall surface is provided with a detection hole, and the second wall surface is provided with an avoidance hole;

[0007] A protection component located in the accommodation cavity and corresponding to the avoidance hole. The protection component includes N stacked protection pieces, and each protection piece is provided with a through hole for the driving mechanism to pass through. N is a positive integer greater than or equal to 2;

[0008] Wherein, along the direction away from the second wall surface, each protection piece is set as the first-level protection piece to the N-level protection piece in sequence. The first-level protection piece closes the avoidance hole, and the remaining levels of protection pieces close the through holes of the previous-level protection piece. The through hole of the N-level protection piece is used to connect with the driving mechanism.

[0009] According to the protection mechanism of the embodiment of the utility model, it has at least the following beneficial effects:

[0010] On the one hand, the protection mechanism of the present application can facilitate the arrangement of the moving part of the driving mechanism outside the housing, reduce the overall volume of the protection mechanism, and also reduce the influence of the heat generated by the driving mechanism on the test results. On the other hand, the protection component can achieve following the driving mechanism while maintaining the seal of the accommodation cavity, thereby reducing the probability of dust entering the accommodation cavity and avoiding the influence of external environmental factors on the test results.

[0011] According to some embodiments of the present invention, the projection area of the latter-stage protection part on the second wall surface falls within the projection area of the former-stage protection part, and the projection area of the through hole of the former-stage protection part on the second wall surface falls within the projection area of the latter-stage protection part.

[0012] According to some embodiments of the present invention, a limiting part is convexly provided on the wall surface of each protection part away from the second wall surface, and the limiting part is used to limit the movement of the latter-stage protection part.

[0013] According to some embodiments of the present invention, the housing further defines an inlet and outlet for the sample to enter and exit the accommodation cavity, and the protection mechanism further includes a door panel connected to the housing, and the door panel has an open state for opening the inlet and outlet and a closed state for closing the inlet and outlet.

[0014] According to some embodiments of the present invention, the door panel is provided with a rotary clamping part, and the housing is provided with a cooperating part. When the door panel closes the inlet and outlet, the rotary clamping part is driven to rotate and is clamped with the cooperating part, so that the door panel is kept in the closed state.

[0015] According to some embodiments of the present invention, the protection mechanism further includes a detection box opening, and the detection box opening is arranged through the detection hole.

[0016] The detection device according to the second aspect embodiment of the present invention includes:

[0017] The protection mechanism as described in any one of the above embodiments;

[0018] A driving mechanism, which is arranged through the housing and the protection component and inserted into the accommodation cavity to drive the sample to move;

[0019] A detection mechanism, which is inserted into the accommodation cavity through the detection hole.

[0020] According to some embodiments of the present invention, the driving mechanism is connected to the through hole of the Nth-stage protection part.

[0021] According to some embodiments of the present utility model, the detection device further includes a slide stage, which is disposed in the accommodation cavity. The slide stage is used for carrying a sample. One end of the driving mechanism inserted into the accommodation cavity is connected to the slide stage, and can drive the slide stage to move so as to drive the sample to move.

[0022] According to some embodiments of the present utility model, the slide stage includes a carrier and a guide rail. The protection mechanism includes a door panel having an open state and a closed state. When the door panel is in the open state, the carrier can be driven to slide along the guide rail so that the carrier moves out of the accommodation cavity.

[0023] Additional aspects and advantages of the present utility model will be given in part in the following description, will become apparent in part from the following description, or will be understood through the practice of the present utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The following further describes the present utility model in conjunction with the drawings and embodiments, where:

[0025] Figure 1 is a schematic structural diagram of the protection mechanism according to an embodiment of the present utility model;

[0026] Figure 2 is an exploded schematic diagram of the protection mechanism according to an embodiment of the present utility model;

[0027] Figure 3 is Figure 1 an enlarged schematic diagram of area A in

[0028] REFERENCE SIGNS:

[0029] housing 100; accommodation cavity 101; first wall surface 110; detection hole 111; detection cartridge opening 112; second wall surface 120; avoidance hole 121; fitting 130; magnetic switch 140;

[0030] protection assembly 200; first-level protection member 210; second-level protection member 220; third-level protection member 230; fourth-level protection member 240; through hole 250; limiting portion 260;

[0031] door panel 300; rotation positioning member 310; hinge 320; DETAILED DESCRIPTION OF THE EMBODIMENTS

[0032] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions from beginning to end. The embodiments described below by referring to the drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation to the present utility model.

[0033] In the description of the present utility model, it should be understood that for the orientation description, such as the orientation or positional relationship indicated by up, down, front, back, left, right, etc., it is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

[0034] In the description of the present utility model, the meaning of several is more than one, the meaning of a plurality is more than two, greater than, less than, exceeding, etc. are understood as not including the present number, and above, below, within, etc. are understood as including the present number. If there is a description of first and second, it is only for the purpose of distinguishing technical features and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or the sequence relationship of the indicated technical features.

[0035] In the description of the present utility model, unless otherwise clearly defined, words such as setting, installing, connecting, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meaning of the above words in the present utility model in combination with the specific content of the technical solution.

[0036] In the description of the present utility model, the description with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples", etc. means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0037] The detection device is often provided with a protective cover to protect and conceal the internal components. The wafer stage is arranged in the protective cover and is driven by a driving mechanism to move on a horizontal plane, so that the detection probe can detect the sample on the wafer stage. However, due to the need for the wafer stage to move on a horizontal plane, if the driving mechanism is arranged in the protective cover, the volume of the protective cover will be relatively large. If the driving mechanism is arranged outside the protective cover, in order to avoid the movement of the driving mechanism, a relatively large opening needs to be provided on the protective cover, and the driving mechanism passes through the opening and is connected to the wafer stage in the protective cover. Dust and other sundries are likely to enter the protective cover from the opening, affecting the detection of the sample and the movement accuracy of the wafer stage.

[0038] To solve the above problems, the first aspect embodiment of the present application proposes a protection mechanism, as Figures 1 to 3As shown, the protection mechanism includes a housing 100 and a protection assembly 200 disposed in the housing 100. Specifically, the housing 100 defines a receiving chamber 101 inside, and the receiving chamber 101 is used to receive the sample. A slide stage may be disposed in the receiving chamber 101, and the sample is placed on the slide stage. The housing 100 includes a first wall 110 and a second wall 120 disposed opposite to each other. Figure 1 and Figure 2 As shown, the first wall surface 110 is the upper wall surface of the housing 100, and the second wall surface 120 is the lower wall surface of the housing 100. The first wall surface 110 is provided with a detection hole 111 connected to the accommodating cavity 101, so that a detection probe, a sampling probe or other detection mechanism can pass through the housing 100 and extend into the accommodating cavity 101 to perform sample detection or sample sampling. The second wall surface 120 is provided with an avoidance hole 121 connected to the accommodating cavity 101, and the avoidance hole 121 is used for a driving mechanism (not shown in the figure) to pass through.

[0039] The driving mechanism often includes a moving part and an adapter. The moving part is often large in size, so the moving part is arranged outside the protective mechanism. Since the moving part has a large heat dissipation, arranging the moving part outside the protective mechanism can also avoid the influence of the heating of the moving part on the detection result. The moving part can move in the X direction and the Y direction. The adapter is inserted into the avoidance hole 121 and is connected to the moving part and the slide stage respectively, so that the movement of the moving part can drive the slide stage to move, so that the detection probe can be aligned with different positions of the sample for detection.

[0040] It is understandable that the adapter needs to move in the avoidance hole 121, so the diameter of the avoidance hole 121 is much larger than the outer diameter of the adapter. In order to prevent external dust and other debris from entering the accommodating cavity 101 to interfere with detection, the protective component 200 is set corresponding to the avoidance hole 121 to close the avoidance hole 121, while also ensuring that the adapter can move smoothly.

[0041] The protective assembly 200 is located in the accommodating cavity 101. The protective assembly 200 includes N stacked protective members, where N is a positive integer greater than or equal to 2, and can be 2, 3, or more. Figure 2 4 or more as shown. Each protective member is provided with a through hole 250 for the adapter of the driving mechanism to pass through. The adapter passes through each through hole 250 in sequence along the stacking direction and extends into the accommodating cavity 101. Along the direction away from the second wall 120, each protective member is set to be a first-level protective member 210 to an N-th-level protective member in sequence. The first-level protective member 210 closes the avoidance hole 121, and the remaining levels of protective members close the through hole 250 of the previous level protective member, and adjacent protective members can move relative to each other. The through hole 250 of the N-th level protective member is used to connect with the driving mechanism.

[0042] For ease of understanding, Figure 2 The embodiment shown is specifically described.Figure 2 As shown, N takes a value of 4. Thus, in the direction away from the second wall surface 120, the respective protective members are, in sequence, the first-level protective member 210, the second-level protective member 220, the third-level protective member 230, and the fourth-level protective member 240. As shown in the figure, the sizes of the first-level protective member 210 to the fourth-level protective member 240 gradually decrease, and the sizes of the through holes 250 thereon also gradually decrease. The first-level protective member 210 is fixedly connected to the second wall surface 120. When the driving mechanism moves, the fourth-level protective member 240 to the second-level protective member 220 are sequentially driven by the driving mechanism to move, and during the movement, they keep the avoidance hole 121 and the through holes 250 of each level closed, so as to ensure the sealing effect of the accommodation cavity 101 without interfering with the movement of the driving mechanism.

[0043] It should be noted that the shapes of the protective members at each level can be circular, square, or other shapes, and the shapes of the through holes on the protective members can also be circular, square, or other shapes. The shapes of the protective members and the through holes are not limited herein.

[0044] Specifically, the first-level protective member 210 closes the avoidance hole 121, the second-level protective member 220 closes the through hole 250 on the first-level protective member 210, the third-level protective member 230 closes the through hole 250 on the second-level protective member 220, and the fourth-level protective member 240 closes the through hole 250 on the third-level protective member 230. Thus, the accommodation cavity 101 can only communicate with the external environment through the through hole 250 on the fourth-level protective member 240. When the driving mechanism passes through the fourth protective member and is connected to the hole wall of the through hole 250 of the fourth protective member, the accommodation cavity 101 is in a relatively sealed state. Also, since the protective members at each level are stacked, relative movement can occur between them. Moreover, a limiting portion 260 is protrudingly provided on the wall surface of each level of the protective member away from the second wall surface 120, and the limiting portion 260 is provided at the edge of each level of the protective member to limit the movement range of the subsequent-level protective member, so as to prevent the movement range of the subsequent-level protective member from being too large and causing the through hole 250 of the previous-level protective member to be unshielded.

[0045] The through hole 250 of the fourth-level protective member 240 is connected to the driving mechanism. Thus, the fourth-level protective member 240 can move with the movement of the driving mechanism. When the driving mechanism drives the fourth-level protective member 240 to move until it abuts against the limiting portion 260 of the third-level protective member 230, the third-level protective member 230 and the fourth-level protective member 240 move synchronously. When the driving mechanism drives the third-level protective member 230 to move until it abuts against the limiting portion 260 of the second-level protective member 220, the second-level protective member 220, the third-level protective member 230, and the fourth-level protective member 240 move synchronously. The maximum movement range of the driving mechanism is defined by the limiting portion 260 on the first-level protective member 210.

[0046] Alternatively, based on the above embodiments, a limiting portion 260 may also be provided on the second wall surface 120. The first-stage protection member 210 is movably connected to the second wall surface 120. The movement range of the first-stage protection member 210 is limited by the limiting portion 260 on the second wall surface 120. When the second-stage protection member 220 abuts against the limiting portion 260 of the first-stage protection member 210, it can drive the first-stage protection member 210 to move until the first-stage protection member 210 abuts against the limiting portion 260 on the second wall surface 120, so that the movement range of the driving mechanism is larger.

[0047] In other embodiments, the protection member may not be provided with the limiting portion 260, and each stage of protection member is driven by abutting against the driving mechanism through the through-hole wall. For example, when the driving mechanism drives the fourth-stage protection member 240 to move until it abuts against the through-hole wall of the through-hole 250 of the third-stage protection member 230, the driving mechanism directly drives the third-stage protection member 230 and the fourth-stage protection member 240 to move synchronously until the driving mechanism abuts against the through-hole wall of the through-hole 250 of the second-stage protection member 220 and drives the second-stage protection member 220 to move synchronously with the fourth-stage protection member 240. By reasonably designing the sizes of the respective protection members and the aperture of the through-hole 250, the follow-up effect can also be achieved and the accommodation cavity 101 can be kept closed.

[0048] Based on the above, on the one hand, the protection mechanism of the present application can facilitate the arrangement of the moving member of the driving mechanism outside the housing 100, reduce the overall volume of the protection mechanism, and also reduce the influence of the heat generated by the driving mechanism on the detection result; on the other hand, the protection component 200 can achieve follow-up with the driving mechanism while keeping the accommodation cavity 101 sealed, thereby reducing the probability of dust entering the accommodation cavity 101 and avoiding the influence of external environmental factors on the detection result.

[0049] In the embodiment as Figure 2 shown, the projection area of the subsequent-stage protection member on the second wall surface 120 falls within the projection area of the previous-stage protection member, and the projection area of the through-hole 250 of the previous-stage protection member on the second wall surface 120 falls within the projection area of the subsequent-stage protection member. That is, along the direction away from the second wall surface 120, the sizes of the respective protection members gradually decrease, and the apertures of the through-holes 250 of the respective protection members also gradually decrease. However, the size of the protection member cannot be smaller than the size of the through-hole 250 of the previous-stage protection member to avoid being unable to cover the through-hole 250 of the previous-stage protection member.

[0050] In some embodiments, each housing 100 further defines an inlet and outlet for samples to enter and exit the accommodation cavity 101. As Figure 1 shown, the inlet and outlet are opened on the side wall of the housing 100. It can be understood that the inlet and outlet can also be opened on the top wall or other positions of the housing 100. To keep the accommodation cavity 101 relatively sealed, the protection mechanism further includes a door panel 300 connected to the housing 100. In the embodiment asFigure 3 In the illustrated embodiment, the door panel 300 is rotatably connected to the housing 100 via a hinge 320. The door panel 300 has an open state and a closed state. In the open state, the door panel 300 is flush with the bottom wall of the housing 100 to open the inlet and outlet, facilitating the taking and placing of samples from the accommodation cavity 101. After the taking and placing are completed, the door panel 300 can be rotated upward by 90° to close the inlet and outlet, thereby switching from the open state to the closed state.

[0051] Further, the door panel 300 is provided with a rotation positioning member 310, and the housing 100 located at the edge of the inlet and outlet is provided with a mating member 130. One end of the rotation positioning member 310 is located outside the door panel 300 for easy operation by an operator, and the other end is located inside the door panel 300 for engaging with the mating member 130. When the door panel 300 closes the inlet and outlet, the operator can manually turn the rotation positioning member 310 to drive the rotation of the rotation positioning member 310, so as to engage with the mating member 130, and further keep the door panel 300 in the closed state. As Figure 3 shown, the housing 100 is further provided with a magnetic switch 140, and the magnetic switch 140 can adsorb the door panel 300 to initially fix the door panel 300 to the housing 100, and then turn the rotation positioning member 310 to connect the door panel 300 to the housing 100.

[0052] In some embodiments, the protection mechanism further includes a detection box opening 112, which is provided through the detection hole 111, and can provide positioning and protection for the detection probe, so as to prevent damage to the detection probe caused by collision with the housing 100.

[0053] In the second aspect of the embodiments of the present application, a detection device is proposed. The detection device includes a driving mechanism, a detection mechanism (not shown in the figure), and the protection mechanism mentioned in any of the above embodiments. The driving mechanism is provided through the housing 100 and the protection component 200 and inserted into the accommodation cavity 101 to drive the sample to move. The detection mechanism can be a detection probe, a sampling probe, etc., and can be inserted into the accommodation cavity 101 through the detection hole 111 to detect or sample the sample.

[0054] Further, the driving mechanism is connected to the through hole 250 of the Nth-level protection member, so as to close the through hole 250 of the Nth-level protection member and prevent dust from entering the accommodation cavity 101 through the through hole 250 of the Nth-level protection member.

[0055] In some embodiments, the detection device further includes a slide table, which is arranged in the accommodation cavity 101 for carrying samples. One end of the driving mechanism inserted into the accommodation cavity 101 is connected to the slide table, and can drive the slide table to move to drive the sample to move.

[0056] Further, the slide table further includes a carrier and a guide rail. The carrier is slidably connected to the guide rail, and the guide rail is perpendicular to the door panel 300. Thus, when the door panel 300 is in the open state, the carrier can be driven to slide along the guide rail, so that the carrier moves out of the accommodation cavity 101, facilitating the operator to pick up and place samples on the carrier. It can be understood that the driving force source of the carrier can be the operator, that is, after the operator opens the door panel 300, the carrier is pulled out; alternatively, a driving member can also be provided on the slide table, and the driving member can drive the carrier to slide along the guide rail to automatically extend the carrier.

[0057] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Various changes can be made within the scope of knowledge of those of ordinary skill in the art without departing from the purpose of the present invention. In addition, the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

Claims

1. Protection mechanism, characterized in that, Comprising: A housing that defines a receiving cavity for receiving a sample. The housing includes a first wall surface and a second wall surface disposed opposite to each other. The first wall surface is provided with a detection hole, and the second wall surface is provided with an avoidance hole. A protection assembly located in the receiving cavity and corresponding to the avoidance hole. The protection assembly includes N stacked protection members, and each protection member is provided with a through hole for a driving mechanism to pass through, where N is a positive integer greater than or equal to 2. Wherein, along the direction away from the second wall surface, each protection member is sequentially set as the first-level protection member to the Nth-level protection member. The first-level protection member closes the avoidance hole, and the remaining protection members at each level close the through hole of the previous-level protection member. The through hole of the Nth-level protection member is used to connect with the driving mechanism.

2. The protection mechanism according to claim 1, wherein The projection area of the subsequent protection member on the second wall surface falls within the projection area of the previous protection member, and the projection area of the through hole of the previous protection member on the second wall surface falls within the projection area of the subsequent protection member.

3. The protection mechanism according to claim 1, characterized in that, A limiting portion is protrudingly provided on the wall surface of each protection member away from the second wall surface, and the limiting portion is used to limit the movement of the subsequent protection member.

4. The protection mechanism according to claim 1, characterized in that, The housing further defines an inlet / outlet for the sample to enter and exit the receiving cavity. The protection mechanism further includes a door plate connected to the housing, and the door plate has an open state for opening the inlet / outlet and a closed state for closing the inlet / outlet.

5. The protection mechanism according to claim 4, wherein The door plate is provided with a rotary locking member, and the housing is provided with a mating member. When the door plate closes the inlet / outlet, the rotary locking member is driven to rotate and engage with the mating member to keep the door plate in the closed state.

6. The protection mechanism according to claim 1, characterized in that, The protection mechanism further includes a detection box opening, and the detection box opening is disposed through the detection hole.

7. Detection device, characterized in that, Comprising: The protection mechanism according to any one of claims 1 to 6; A driving mechanism that passes through the housing and the protection assembly and is inserted into the receiving cavity to drive the sample to move. A detection mechanism that is inserted into the receiving cavity through the detection hole.

8. The detection device according to claim 7, characterized in that, The driving mechanism is connected to the through hole of the Nth-level protection member.

9. The detection device according to claim 7, wherein The detection device further includes a slide table disposed in the receiving cavity. The slide table is used to carry a sample, and one end of the driving mechanism inserted into the receiving cavity is connected to the slide table, capable of driving the slide table to move to drive the sample to move.

10. The detection device according to claim 9, characterized in that, The slide table includes a carrier and a guide rail. The protection mechanism includes a door plate having an open state and a closed state. When the door plate is in the open state, the carrier is driven to be able to slide along the guide rail so that the carrier moves out of the receiving cavity.

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