Clamp for repairing semiconductor electrostatic chuck

Abstract

The utility model relates to the technical field of electrostatic chuck repairing, and discloses a clamp for repairing a semiconductor electrostatic chuck, which comprises a workbench, a motor, a clamping plate, a disinfection component, a disinfection box, a sponge block and a liquid inlet. After feeding of the disinfectant is completed, a motor is started to drive a disc and a plurality of sets of electric push rods to rotate, clamping plates fixedly installed on the electric push rods make contact with sponge blocks in the electric push rods after entering the disinfection box, the sponge blocks can be attached to the front faces and the back faces of the clamping plates, and after the clamping plates are static for 30 seconds, the motor is started to rotate reversely; when the clamping plates rotate into the air drying box, a fan is started, and the formed air enters a connecting pipe through a mounting cylinder, so that the clamping plates are quickly air-dried and put into use, and the working efficiency can be effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of electrostatic chuck repair, in particular to a fixture for repairing semiconductor electrostatic chucks. Background Art

[0002] A semiconductor electrostatic chuck is a tool for assisting in the production of semiconductor parts. It can effectively fix semiconductor parts during the production process, prevent them from shifting during etching, and can effectively improve production efficiency.

[0003] After a semiconductor electrostatic chuck is damaged, an auxiliary fixture is needed to fix it for the convenience of staff maintenance. Before using this fixture, it needs to be disinfected and cleaned. Currently, most of them use manual disinfection methods. Although this method can achieve the disinfection effect, the efficiency is slow, which will affect the work efficiency. Summary of the Utility Model

[0004] In order to solve the problems in the background art, the utility model provides a fixture for repairing a semiconductor electrostatic chuck that can automatically disinfect and dry it.

[0005] In view of the problems in the prior art, the utility model provides a fixture for repairing a semiconductor electrostatic chuck, including a workbench. The motor is fixedly installed at the center position of the lower end of the workbench. The clamping plate is fixedly connected to the output shaft of the electric push rod. Multiple groups of disinfection components are fixedly installed on the upper end of the workbench. The multiple groups of disinfection components are distributed around the disk. The disinfection component includes a disinfection box, a sponge block, and a liquid inlet. The bottom of the disinfection box is fixedly connected to the upper end of the workbench. The sponge block is fixedly connected to the inner wall of the disinfection box. The lower end of the liquid inlet is fixedly connected to the upper end of the disinfection box.

[0006] Specifically, the electric push rod is fixedly installed in the installation groove opened inside the disk. The bottom of the disk is fixedly connected to the output shaft of the motor. The disk is rotatably connected to the workbench.

[0007] Specifically, multiple groups of air-drying components are fixedly installed on the workbench. The air-drying component includes a fan, a filter screen, an installation cylinder, a connecting pipe, and an air-drying box. The fan is installed in the installation hole opened on the workbench. A group of installation cylinders is fixedly connected to the upper part of the installation hole opened on the workbench. A filter screen is arranged at the connection between the installation cylinder and the workbench.

[0008] Specifically, the upper end of the installation cylinder is fixedly connected to one end of the connecting pipe. The other end of the connecting pipe is fixedly connected to the upper end of the air-drying box. The air-drying box is located on one side of the clamping plate, and its position is symmetrical to that of the disinfection box through the position of the clamping plate. Multiple groups of support feet are fixedly installed at the lower end of the workbench.

[0009] Advantages of the present utility model:

[0010] (1) For a fixture used for repairing a semiconductor electrostatic chuck of the present utility model, disinfectant liquid is poured into the disinfection box from the liquid inlet. The disinfectant liquid first contacts the sponge block and will be absorbed into it. After the feeding of the disinfectant liquid is completed, the motor is started, which will drive the disc and multiple groups of electric push rods to rotate. When the clamping plate fixedly installed on the electric push rod enters the disinfection box, it will contact the sponge block inside, and the sponge block will fit the front and back sides of the clamping plate. After standing still for thirty seconds, the motor starts to reverse. At this time, the clamping plate and the sponge block will form friction to achieve the disinfection effect. When the clamping plate rotates into the air-drying box, the fan is started, and the wind formed by it will enter the connecting pipe through the installation cylinder and finally enter the air-drying box to quickly air-dry the clamping plate. When put into use, it can effectively improve the work efficiency. Description of the drawings

[0011] The present utility model will be further described below with reference to the drawings and embodiments.

[0012] Figure 1 is a schematic diagram of the overall structure of the present utility model;

[0013] Figure 2 is Figure 1 the left view of the overall structure;

[0014] Figure 3 is the bottom view of the overall structure of the present utility model;

[0015] Figure 4 is Figure 2 the enlarged view at A in;

[0016] Figure 5 is Figure 3 the enlarged view at B in.

[0017] In the figure: 1, workbench; 110, support feet; 111, motor; 112, disc; 113, electric push rod; 114, clamping plate; 2, disinfection component; 210, disinfection box; 211, sponge block; 212, liquid inlet; 3, air-drying component; 310, fan; 311, filter screen; 312, installation cylinder; 313, connecting pipe; 314, air-drying box. Specific embodiments

[0018] In order to make the technical methods, creative features, achieved purposes and effects realized by the present utility model easy to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0019] As Figures 1-5As shown in the figure, in view of the problems in the prior art, the present utility model provides a fixture for repairing a semiconductor electrostatic chuck, including a workbench 1. The motor 111 is fixedly installed at the center position of the lower end of the workbench 1. The clamping plate 114 is fixedly connected to the output shaft of the electric push rod 113. A plurality of disinfection components 2 are fixedly installed on the upper end of the workbench 1. The plurality of disinfection components 2 are distributed around the disc 112. The disinfection component 2 includes a disinfection box 210, a sponge block 211 and a liquid inlet 212. The bottom of the disinfection box 210 is fixedly connected to the upper end of the workbench 1. The sponge block 211 is fixedly connected to the inner wall of the disinfection box 210. The lower end of the liquid inlet 212 is fixedly connected to the upper end of the disinfection box 210.

[0020] Preferably, the electric push rod 113 is fixedly installed in the installation groove opened inside the disc 112. The bottom of the disc 112 is fixedly connected to the output shaft of the motor 111. The disc 112 and the workbench 1 are rotatably connected. A plurality of air drying components 3 are fixedly installed on the workbench 1. The air drying component 3 includes a fan 310, a filter screen 311, an installation cylinder 312, a connecting pipe 313 and an air drying box 314. The fan 310 is installed in the installation hole opened on the workbench 1. A group of installation cylinders 312 are fixedly connected to the upper part of the installation hole opened on the workbench 1. A group of filter screens 311 are arranged at the connection part between the installation cylinder 312 and the workbench 1. One end of the connecting pipe 313 is fixedly connected to the upper end of the installation cylinder 312. The other end of the connecting pipe 313 is fixedly connected to the upper end of the air drying box 314. The air drying box 314 is located on one side of the clamping plate 114, and its position is symmetrical to that of the disinfection box 210 through the position of the clamping plate 114.

[0021] (1) In the present utility model, first, the disinfectant liquid is poured into the disinfection box 210 from the liquid inlet 212. The disinfectant liquid first contacts the sponge block 211 and will be absorbed into it. After the feeding of the disinfectant liquid is completed, the motor 111 is started, which will drive the disc 112 and a plurality of electric push rods 113 to rotate. When the clamping plate 114 fixedly installed on the electric push rod 113 enters the disinfection box 210, it will contact the sponge block 211 inside. The sponge block 211 will fit the front and back sides of the clamping plate 114. After standing for thirty seconds, the motor 111 starts to reverse. At this time, the clamping plate 114 will form friction with the sponge block 211 to achieve the disinfection effect. When the clamping plate 114 rotates into the air drying box 314, the fan 310 is started. The wind formed by it will enter the connecting pipe 313 through the installation cylinder 312 and finally enter the air drying box 314 to quickly dry the clamping plate 114. When put into use, it can effectively improve the work efficiency.

[0022] After disinfection is completed in this utility model, the damaged suction cup is placed on the disc 112, and then the electric push rod 113 is started to contract. The clamping plate 114 will move along with it, and then the suction cup is fixed on the disc 112 to facilitate repair by the staff.

[0023] Working principle: First, pour the disinfectant liquid into the disinfection box 210 from the liquid inlet 212. The disinfectant liquid first contacts the sponge block 211 and will be absorbed into it. After the feeding of the disinfectant liquid is completed, start the motor 111, which will drive the disc 112 and multiple electric push rods 113 to rotate. When the clamping plate 114 fixedly installed on the electric push rod 113 enters the disinfection box 210, it will contact the sponge block 211 inside. The sponge block 211 will fit the front and back of the clamping plate 114. After standing still for 30 seconds, the motor 111 starts to reverse. At this time, the clamping plate 114 will form friction with the sponge block 211 to achieve the disinfection effect. When the clamping plate 114 rotates into the air-drying box 314, the fan 310 is started. The wind formed by it will enter the connecting pipe 313 through the installation cylinder 312 and finally enter the air-drying box 314 to quickly air-dry the clamping plate 114. Put it into use, which can effectively improve work efficiency. Then place the damaged suction cup on the disc 112, and then start the electric push rod 113 to contract. The clamping plate 114 will move along with it, and then the suction cup is fixed on the disc 112 to facilitate repair by the staff.

[0024] The above shows and describes the basic principles, main features and advantages of the present utility model. Those skilled in the art of this industry should understand that the present utility model is not limited by the above embodiments. The above embodiments and the descriptions in the specification only illustrate the principles of the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will have various changes and improvements, and these changes and improvements all fall within the scope of protection required by the present utility model. The scope of protection required by the present utility model.

Claims

1. A fixture for repairing a semiconductor electrostatic chuck, characterized in that: It includes a workbench (1); A motor (111), and the motor (111) is fixedly installed at the center position of the lower end of the workbench (1); A clamping plate (114), and the clamping plate (114) is fixedly connected to the output shaft of the electric push rod (113); A disinfection component (2), multiple groups of the disinfection components (2) are fixedly installed on the upper end of the workbench (1), and multiple groups of the disinfection components (2) are distributed around the disc (112). The disinfection component (2) includes a disinfection box (210), a sponge block (211), and a liquid inlet (212); A disinfection box (210), and the bottom of the disinfection box (210) is fixedly connected to the upper end of the workbench (1); A sponge block (211), and the sponge block (211) is fixedly connected to the inner wall of the disinfection box (210); A liquid inlet (212), and the lower end of the liquid inlet (212) is fixedly connected to the upper end of the disinfection box (210).

2. The fixture for repairing a semiconductor electrostatic chuck according to claim 1, characterized in that: The electric push rod (113) is fixedly installed in an installation groove formed inside the disc (112). The bottom of the disc (112) is fixedly connected to the output shaft of the motor (111), and the disc (112) is rotatably connected to the workbench (1).

3. The fixture for repairing a semiconductor electrostatic chuck according to claim 2, wherein: Multiple groups of air-drying components (3) are fixedly installed on the workbench (1). The air-drying component (3) includes a fan (310), a filter screen (311), an installation cylinder (312), a connecting pipe (313), and an air-drying box (314). The fan (310) is installed in an installation hole formed on the workbench (1).

4. A fixture for repairing a semiconductor electrostatic chuck according to claim 3, characterized in that: A group of installation cylinders (312) are fixedly connected above the installation hole formed on the workbench (1), and a group of filter screens (311) are arranged at the connection between the installation cylinder (312) and the workbench (1).

5. A fixture for repairing a semiconductor electrostatic chuck according to claim 4, characterized in that: The upper end of the installation cylinder (312) is fixedly connected to one end of the connecting pipe (313), the other end of the connecting pipe (313) is fixedly connected to the upper end of the air-drying box (314), and the air-drying box (314) is located on one side of the clamping plate (114), and its position is symmetrical to that of the disinfection box (210) through the position of the clamping plate (114).

6. The fixture for repairing a semiconductor electrostatic chuck according to claim 5, characterized in that: Multiple groups of support feet (110) are fixedly installed at the lower end of the workbench (1).

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