Drum-type photomask cleaning device

Abstract

The utility model discloses a drum type photomask cleaning device which comprises a cleaning tank, a transparent acrylic cover body and a photomask fixing frame, a photomask fixing cover is arranged on the top of the photomask fixing frame in a sliding mode, and a supporting frame is fixedly installed on the inner wall of the cleaning tank and located in the middle of the lower portion of the photomask fixing frame. The bottom of the cleaning tank is provided with a first flow guide pipe used for guiding flow of gas, the outer wall of the first flow guide pipe is provided with a plurality of first spray heads used for spraying out the gas at equal intervals, and the position, away from the first flow guide pipe, of the bottom of the cleaning tank is provided with a second flow guide pipe used for guiding flow of cleaning liquid. As the photomask fixing frame can be cleaned and dried along with the photomask body, the photomask fixing frame and the photomask body can be kept in a clean state all the time, the phenomenon of secondary pollution caused by the fact that the photomask body is directly held by a hand to be cleaned in the cleaning or drying process is avoided, gas can be blown to the photomask body from different directions, and the photomask body can be conveniently cleaned and dried. And water drops attached to the surface of the photomask body can be quickly removed.

Description

Technical Field

[0001] The utility model belongs to the technical field of cleaning machines, and particularly relates to a drum - type photomask cleaning device. Background Technique

[0002] A cleaning machine is a mechanical device used to remove stains and impurities on the surface of an object. It can use different methods and techniques to achieve the cleaning purpose, including but not limited to physical action, chemical treatment, and high - pressure water flow, etc. According to different application requirements and usage environments, there are various types of cleaning machines, such as industrial cleaning machines, medical cleaning machines, food cleaning machines, etc. These devices can not only improve the cleaning efficiency but also save energy and reduce the impact on the environment.

[0003] Currently, when cleaning a photomask, generally, the photomask is directly grabbed by hand for cleaning. However, each time after cleaning, the hand will also get wet. Therefore, during the process of drying the photomask, the solution remaining on the hand is likely to splash back onto the photomask, resulting in secondary pollution of the photomask. If gloves are replaced to implement the drying process, water marks are likely to appear due to natural drying. For this reason, a drum - type photomask cleaning device is provided. Content of the Utility Model

[0004] The purpose of the utility model is to provide a drum - type photomask cleaning device to solve the technical problems raised in the background technique.

[0005] To achieve the above - mentioned purpose, the specific technical solution of the utility model is as follows: A drum - type photomask cleaning device includes a cleaning tank, a transparent acrylic cover body, and a photomask fixing frame. The transparent acrylic cover body is detachably arranged in the middle of the top of the cleaning tank. The photomask fixing frame is arranged inside the cleaning tank and is used to support and fix the photomask body. The photomask fixing frame is designed in a U - shaped structure with an upward opening. A photomask fixing cover is slidably arranged on the top of the photomask fixing frame. A driving shaft is fixedly installed in the middle of the top of the photomask fixing cover. The top of the driving shaft penetrates through the transparent acrylic cover body and extends above the transparent acrylic cover body. The driving shaft is rotatably arranged with the transparent acrylic cover body. A support shaft for supporting the photomask fixing frame is fixedly installed in the middle of the bottom of the photomask fixing frame. A support frame is fixedly installed at the middle position below the photomask fixing frame on the inner wall of the cleaning tank. A first diversion pipe for gas diversion is installed at the bottom of the cleaning tank. A plurality of first nozzles for ejecting gas are installed at equal intervals on the outer wall of the first diversion pipe. A second diversion pipe for cleaning liquid diversion is installed at a position away from the first diversion pipe at the bottom of the cleaning tank. A plurality of second nozzles for ejecting the cleaning liquid are installed at equal intervals on the outer wall of the second diversion pipe.

[0006] Preferably, the photomask body is slidably disposed inside the photomask fixing frame. The top end of the inner wall of the photomask fixing cover is in contact with the top end of the photomask fixing frame, and the lower end surface of the photomask fixing cover is higher than the upper end surface of the photomask fixing frame.

[0007] Preferably, a transfer plate is fixedly arranged at the top end of the driving shaft, and a handle is rotatably installed at a position on the top end of the transfer plate away from the driving shaft.

[0008] Preferably, the bottom end of the support shaft penetrates through the support frame and extends below the support frame, and the support shaft is rotatably arranged with the support frame.

[0009] Preferably, a hole for discharging liquid is formed through the outer wall of the photomask fixing frame, and the photomask fixing frame is made of Teflon.

[0010] Preferably, at least three groups of the first diversion tubes are provided, and the three groups of the first diversion tubes are arranged at equal intervals in a semicircular shape. The first nozzle corresponds to the position of the photomask fixing frame, the second nozzle corresponds to the position of the photomask fixing frame, and both the first diversion tube and the second diversion tube are designed in an L-shaped structure.

[0011] The drum-type photomask cleaning device of the present invention has the following advantages:

[0012] Since the photomask fixing frame is cleaned and dried together with the photomask body, the two can always maintain a clean state, and during the cleaning or drying process, there will be no secondary pollution phenomenon like directly holding the photomask body by hand for cleaning as before. Moreover, the gas can blow the photomask body from different directions. On the one hand, it can quickly remove the water droplets attached to the surface of the photomask body, and on the other hand, it can reduce the possibility of water marks. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for the embodiments. It should be understood that the following drawings only show some embodiments of the present invention, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0014] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0015] Figure 2 It is a plan view of the overall structure of the present invention;

[0016] Figure 3 It is a side view of the partial structure of the present invention.

[0017] Description of marks in the figure: 1. Cleaning tank; 101. Support frame; 102. First diversion pipe; 103. Second diversion pipe; 104. First spray head; 105. Second spray head; 2. Transparent acrylic cover; 3. Reticle body; 4. Reticle fixing frame; 401. Reticle fixing cover; 402. Driving shaft; 403. Adapter plate; 404. Handle; 405. Support shaft. Detailed implementation manners

[0018] In the following text, only some exemplary embodiments are simply described. As those skilled in the art can recognize, the described embodiments can be modified in various different ways without departing from the spirit or scope of the embodiments of the present invention. Therefore, the drawings and the description are considered to be exemplary in nature rather than restrictive.

[0019] In the description of the embodiments of the present invention, it should be understood that the orientation or positional relationships indicated by the terms "length", "vertical", "horizontal", "top", "bottom", etc. are based on the orientation or positional relationships shown in the drawings. These are only for the convenience of describing the embodiments of the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the embodiments of the present invention.

[0020] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the embodiments of the present invention, "a plurality" means two or more unless otherwise specifically defined.

[0021] In the embodiments of the present invention, unless otherwise clearly specified and defined, the terms "installation", "connection", "connection", "fixation", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection, an electrical connection, or a communication connection; it can be directly connected, or indirectly connected through an intermediate medium, and can be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0022] The following disclosure provides many different embodiments or examples for implementing different structures of the embodiments of the present utility model. To simplify the disclosure of the embodiments of the present utility model, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the embodiments of the present utility model. In addition, the embodiments of the present utility model may repeat reference numerals and / or reference letters in different examples. This repetition is for the purpose of simplification and clarity and does not itself indicate the relationship between the various embodiments and / or settings discussed.

[0023] To better understand the purpose, structure and function of the present utility model, the following further describes in detail a drum-type photomask cleaning device of the present utility model with reference to the accompanying drawings.

[0024] As Figures 1-3 shown, a drum-type photomask cleaning device of the present utility model includes a cleaning tank 1, a transparent acrylic cover body 2 and a photomask fixing frame 4. The transparent acrylic cover body 2 is detachably arranged in the middle of the top of the cleaning tank 1. The photomask fixing frame 4 is arranged inside the cleaning tank 1 and is used to support and fix the photomask body 3. The photomask body 3 is slidably arranged inside the photomask fixing frame 4.

[0025] Specifically, the photomask fixing frame 4 is designed in a U-shaped structure and opens upward. A photomask fixing cover 401 is slidably arranged on the top of the photomask fixing frame 4. On the one hand, it is used to intercept the photomask body 3, and on the other hand, it is used to drive the photomask fixing frame 4. The inner wall top end of the photomask fixing cover 401 is in contact with the top end of the photomask fixing frame 4. The lower end face of the photomask fixing cover 401 is higher than the upper end face of the photomask fixing frame 4. A driving shaft 402 is fixedly installed in the middle of the top end of the photomask fixing cover 401. The top end of the driving shaft 402 penetrates through the transparent acrylic cover body 2 and extends above the transparent acrylic cover body 2. The driving shaft 402 is rotatably arranged with the transparent acrylic cover body 2. A transfer plate 403 is fixedly arranged at the top end of the driving shaft 402. A grip 404 is rotatably installed at a position far from the driving shaft 402 at the top end of the transfer plate 403 and is used to cooperate with the transfer plate 403 and the driving shaft 402 to drive the photomask fixing cover 401, so as to drive the photomask fixing frame 4. A support shaft 405 for supporting the photomask fixing frame 4 is fixedly installed in the middle of the bottom end of the photomask fixing frame 4. A support frame 101 is fixedly installed at the middle position below the photomask fixing frame 4 on the inner wall of the cleaning tank 1 and is used to support the support shaft 405. The bottom end of the support shaft 405 penetrates through the support frame 101 and extends below the support frame 101. The support shaft 405 is rotatably arranged with the support frame 101. A hole for discharging liquid is penetrated and opened on the outer wall of the photomask fixing frame 4. The material of the photomask fixing frame 4 is Teflon.

[0026] Furthermore, a first flow guide pipe 102 for guiding gas is installed at the bottom of the cleaning tank 1. There are at least three groups of the first flow guide pipes 102, and the three groups of first flow guide pipes 102 are arranged in a semi-circular shape at equal intervals. A plurality of first nozzles 104 for ejecting gas are installed at equal intervals on the outer wall of the first flow guide pipe 102. The first nozzles 104 correspond to the mask fixing frame 4 in position. A second flow guide pipe 103 for guiding the cleaning liquid is installed at the bottom of the cleaning tank 1 away from the first flow guide pipe 102. A plurality of second nozzles 105 for ejecting the cleaning liquid are installed at equal intervals on the outer wall of the second flow guide pipe 103. The second nozzles 105 correspond to the mask fixing frame 4 in position. Both the first flow guide pipe 102 and the second flow guide pipe 103 are designed in an L-shaped structure.

[0027] According to the above, the advantages of such a setting are as follows: Since the mask fixing frame 4 will be cleaned and dried together with the mask body 3, the two can always maintain a clean state, and during the cleaning or drying process, there will be no phenomenon of secondary pollution like directly holding the mask body 3 for cleaning as before. And the gas can blow the mask body 3 from different directions. On the one hand, it can quickly remove the water droplets attached to the surface of the mask body 3, and on the other hand, it can reduce the possibility of water marks.

[0028] The usage process of the present utility model:

[0029] First, place the mask body 3 to be cleaned in the mask fixing frame 4 inside the cleaning tank 1. Secondly, cover the mask fixing cover 401 on the top of the mask fixing frame 4. Immediately afterwards, cover the transparent acrylic cover body 2 on the top of the cleaning tank 1. At this time, the staff can rotate the mask fixing cover 401 through the handle 404, the adapter plate 403 and the drive shaft 402 to rotate the mask fixing frame 4 and the mask body 3. During this period, the staff can observe the cleaning condition inside the cleaning tank 1 through the transparent acrylic cover body 2;

[0030] Second, open the ACE manual valve. At this time, ACE will flow into the second flow guide pipe 103 and be ejected by the second nozzle 105. At this time, rotate the handle 404 to make ACE flush to any position of the mask body 3. After cleaning, close the ACE control valve;

[0031] Third, open the DIWater manual valve. At this time, DIWater will flow into the second flow guide pipe 103 and be ejected by the second nozzle 105. At this time, rotate the handle 404 to make DIWater flush to any position of the mask body 3. After cleaning, close the DIWater control valve;

[0032] IV. Open the N2 manual valve. At this time, N2 will flow into the first diversion pipe 102 and be ejected from the first nozzle 104. Then rotate the handle 404 to use N2 to dry the photomask body 3 and the photomask fixing frame 4. After drying, close the N2 control valve and take out the photomask body 3.

[0033] It can be understood that the present utility model is described through some embodiments. Those skilled in the art know that without departing from the spirit and scope of the present utility model, various changes or equivalent replacements can be made to these features and embodiments. Additionally, under the teaching of the present utility model, these features and embodiments can be modified to adapt to specific situations and materials without departing from the spirit and scope of the present utility model. Therefore, the present utility model is not limited by the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application belong to the scope protected by the present utility model.

Claims

1. A drum-type photomask cleaning device, characterized in that: It includes a cleaning tank (1), a transparent acrylic cover (2) and a photomask fixing rack (4). The transparent acrylic cover (2) is detachably arranged in the middle of the top of the cleaning tank (1). The photomask fixing rack (4) is arranged inside the cleaning tank (1) and is used to support and fix the photomask body (3). The photomask fixing rack (4) is designed in a U-shaped structure with an upward opening. A photomask fixing cover (401) is slidably arranged on the top of the photomask fixing rack (4). A driving shaft (402) is fixedly installed in the middle of the top end of the photomask fixing cover (401). The top end of the driving shaft (402) penetrates through the transparent acrylic cover (2) and extends above the transparent acrylic cover (2). The driving shaft (402) is rotatably arranged with the transparent acrylic cover (2). A support shaft (405) for supporting the photomask fixing rack (4) is fixedly installed in the middle of the bottom end of the photomask fixing rack (4). A support frame (101) is fixedly installed at the middle position below the photomask fixing rack (4) on the inner wall of the cleaning tank (1). A first guide pipe (102) for gas diversion is installed at the bottom of the cleaning tank (1). A plurality of first nozzles (104) for ejecting gas are installed at equal intervals on the outer wall of the first guide pipe (102). A second guide pipe (103) for cleaning liquid diversion is installed at the position away from the first guide pipe (102) at the bottom of the cleaning tank (1). A plurality of second nozzles (105) for ejecting cleaning liquid are installed at equal intervals on the outer wall of the second guide pipe (103).

2. The drum - type photomask cleaning device according to claim 1, wherein: The photomask body (3) is slidably arranged inside the photomask fixing rack (4). The top end inner wall of the photomask fixing cover (401) is in contact with the top end of the photomask fixing rack (4). The lower end surface of the photomask fixing cover (401) is higher than the upper end surface of the photomask fixing rack (4).

3. The drum-type photomask cleaning device according to claim 1, characterized in that: A transfer plate (403) is fixedly arranged at the top end of the driving shaft (402). A handle (404) is rotatably installed at the position away from the driving shaft (402) at the top end of the transfer plate (403).

4. A drum-type photomask cleaning device according to claim 1, characterized in that: The bottom end of the support shaft (405) penetrates through the support frame (101) and extends below the support frame (101). The support shaft (405) is rotatably arranged with the support frame (101).

5. A drum-type photomask cleaning device according to claim 1, characterized in that: Holes for discharging liquid are penetrated and opened on the outer wall of the photomask fixing rack (4). The material of the photomask fixing rack (4) is Teflon.

6. The drum-type photomask cleaning device according to claim 1, wherein: At least three groups of the first guide pipes (102) are provided, and the three groups of the first guide pipes (102) are distributed at equal intervals in a semicircular shape. The first nozzles (104) correspond to the position of the photomask fixing rack (4). The second nozzles (105) correspond to the position of the photomask fixing rack (4). Both the first guide pipe (102) and the second guide pipe (103) are designed in an L-shaped structure.

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