Clamping deposition device

Abstract

The utility model provides a clamping deposition device, including driving mechanism, upper support mechanism and lower support mechanism, driving mechanism includes driving piece and fixed piece, upper support mechanism includes upper bearing column, upper bearing column fixed connection on fixed seat, lower support mechanism includes lower bearing column and lower bearing column, lower bearing column fixed connection on driving piece, lower bearing column fixed connection on lower bearing column, lower bearing column fixed connection on driving piece, lower bearing column fixed connection on lower bearing column, lower bearing column fixed connection on driving piece, lower bearing column fixed connection on lower bearing column, lower bearing column fixed connection on lower bearing column. The lower bearing columns are fixedly connected to the lower loading piece, and the number of the upper bearing columns and the number of the lower bearing columns are not less than three; each upper bearing column and the corresponding lower bearing column are fixedly provided with supporting legs used for containing deposition products, and the driving parts are used for driving the lower bearing columns to move in a reciprocating mode, so that the supporting legs of the lower bearing columns move to the positions above or below the supporting legs of the upper bearing columns; the utility model relates to the field of coating deposition, in particular to a clamping deposition device which is used for solving the problems that deposition on the surface of a graphite base is incomplete, and deposition dead angles exist.

Description

Technical Field

[0001] The utility model relates to the field of coating deposition, in particular to a clamping deposition device. Background Art

[0002] The graphite base is a core component used in silicon epitaxy and silicon carbide epitaxy equipment in the semiconductor industry, which directly contacts the chip. The graphite base is vulnerable to atmosphere corrosion and then chipping, affecting the chip manufacturing process. Therefore, it is usually necessary to process the graphite base. For example, a SiC coating is prepared on the surface of the graphite base. The silicon carbide coating can improve the corrosion resistance and oxidation resistance of the graphite base. Usually, the graphite base is deposited with a coating by deposition, that is, the graphite base is placed on a tooling device to receive the deposition of SiC.

[0003] However, during the deposition process, deposition "blind spots" often occur at the contact points between the graphite base and the tooling, resulting in incomplete deposition of the silicon carbide coating at local parts of the graphite base. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a clamping deposition device, aiming to solve the problems of incomplete deposition on the surface of the graphite base and the existence of deposition dead angles.

[0005] To achieve the above purpose, the utility model adopts the following technical scheme:

[0006] A clamping deposition device, characterized in that it includes a driving mechanism, an upper support mechanism and a lower support mechanism. The driving mechanism includes a driving part and a fixing part. The upper support mechanism includes an upper bearing column, and the upper bearing column is fixedly connected to a fixed seat. The lower support mechanism includes a lower driving part and a lower bearing column. The lower driving part is fixedly connected to the driving part, and the lower bearing column is fixedly connected to the lower driving part. The number of the upper bearing columns and the lower bearing columns is set to be a plurality of not less than three; a support foot for placing a deposition product is fixedly arranged on each upper bearing column and each lower bearing column. The driving part is used to drive the lower bearing column to move reciprocally, so that the support foot of the lower bearing column moves above or below the support foot of the upper bearing column.

[0007] The beneficial effect is: when it is necessary to deposit on the graphite base, the lower supporting column is first driven by the driving member to drive the supporting foot to move above the supporting foot of the upper supporting column, and the graphite base is placed on the supporting foot of the lower supporting column to deposit. After all positions except the position where the graphite base contacts the supporting foot are covered by deposition, the supporting foot on the lower supporting column is driven by the driving member to slide to a position close to the supporting foot on the upper supporting column, and the graphite base is driven to the supporting foot of the upper supporting column. At this time, the lower supporting column continues to move, and the graphite base is separated from the supporting foot of the lower supporting column, and then supported by the supporting foot of the upper supporting column. At this time, the position where the graphite base contacts the supporting foot of the lower supporting column contacts silicon carbide and is covered by deposition, thereby achieving full deposition coverage of the graphite base.

[0008] A further technical solution of the present invention is that a connecting piece is provided on the fixing seat, one end of the connecting piece is fixedly connected to the fixing seat, and the other end is fixedly connected to the upper upload piece, and a receiving cavity is formed between the fixing seat and the upper upload piece; the downloading piece and the driving piece are arranged in the receiving cavity.

[0009] A further technical solution of the present invention is that the upper support mechanism also includes an upper bearing column, which is fixedly connected to the fixing seat through an upper loading member. The upper loading member is located on the side of the lower loading member away from the fixing seat, and the extension direction of the upper bearing column is away from the lower loading member; a through hole is opened on the upper loading member for the lower bearing column to pass through.

[0010] A further technical solution of the present invention is that a bearing is provided inside the penetration hole.

[0011] A further technical solution of the present invention is that the driving member is configured as a cylinder, and the cylinder is used to drive the lower supporting column to slide back and forth.

[0012] A further technical solution of the present invention is that the support foot is in the shape of a circular ring, and the inner ring of the support foot is coaxially sleeved and fixed on the upper bearing column or the lower bearing column.

[0013] A further technical solution of the present invention is that the support legs are eccentrically arranged in a direction close to the center of the upper carrier.

[0014] The beneficial effect is: the driving member drives the movement of the lower supporting column, first supporting the graphite base through the supporting feet on the lower supporting column, and then supporting the graphite base alternately with the supporting feet on the upper supporting column, thereby achieving comprehensive deposition coverage of the graphite base and avoiding deposition dead corners on the graphite base. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0016] In the figure: 1 - driving mechanism, 11 - driving part, 12 - fixed seat, 2 - connecting part, 3 - upper support mechanism, 31 - upper loading part, 32 - upper bearing column, 4 - lower support mechanism, 41 - lower loading part, 42 - lower bearing column, 43 - sliding hole, 5 - support foot. Specific implementation mode

[0017] The following combines with the attached Figure 1 A further description is given of the specific implementation mode of the present utility model.

[0018] Such as Figure 1As shown, the utility model discloses a fully covered coating deposition device, including a driving mechanism 1, the driving mechanism 1 includes a fixed seat 12 and a driving member 11, one end of the driving member 11 is fixedly connected to the fixed seat 12, the fixed seat 12 is used to place the entire device, and the other end is connected to a lower support mechanism 4, the lower support mechanism 4 includes a download member 41 and a lower bearing column 42, the download member 41 is fixedly connected to the driving member 11, in this embodiment, the driving member 11 is configured as a cylinder, and the lower bearing column 42 is welded to a section of the download member 41 away from the cylinder. , the driving member 11 is used to drive the downloading member 41 to reciprocate along the length direction of the lower bearing column 42; the lower bearing column 42 is connected to the upper supporting mechanism 3, the upper supporting mechanism 3 includes an upper bearing column 32 and an upper loading member 31, the upper loading member 31 is arranged on the side of the downloading member 41 away from the driving member 11, and both sides of the upper loading member 31 are connected to the connecting member 7, the upper loading member 31 is welded to the driving member 11 through the connecting member 7, one end of the upper bearing column 32 is welded to the upper loading member 31, and the other end extends in the direction away from the downloading member 41; the upper loading member 31 is provided with a plurality of connecting members 7, and ... 1 is provided with a sliding hole 43 corresponding to the lower bearing column 42. The sliding hole 43 is provided between every two upper bearing columns 32. The lower bearing column 42 is passed through and slidably connected in the sliding hole 43 along its own length direction, so that the upper bearing column 32 and the lower bearing column 42 are staggered with each other; a bearing is provided in the sliding hole 43 to improve the smoothness of the sliding of the lower bearing column in the sliding hole 43; in this application, the number of upper bearing columns 32 is set to three, and the upper carrier 31 is set to be disc-shaped. The three upper bearing columns 32 are arranged along the upper carrier 31. The three upper supporting columns 32 are evenly spaced in the circumferential direction, and support legs 5 are welded on each of the three upper supporting columns 32. The support legs 5 on the three upper supporting columns 32 are located on the same horizontal plane, and the support legs 5 protrude from the upper supporting columns 32 in a direction close to the center of the upper carrier 31. In this embodiment, the number of lower supporting columns 42 is also three, and the three lower supporting columns 42 are evenly distributed on the lower carrier 41 along the circumferential direction of the lower carrier 41. The three lower supporting columns 42 are staggered with the three upper supporting columns 32. Support legs 5 are also provided on the three lower supporting columns 42.During use, the driving member 11 drives the downloading member 41 to slide along the length direction of its lower bearing column 42, thereby driving the supporting feet 5 on the lower bearing column 42 to move above the supporting feet 5 on the upper bearing column 32. When the graphite base needs to be sprayed, the graphite base is placed on the supporting feet 5 of the lower bearing column 42, and the SiC coating is sprayed on the graphite base. After the spraying is completed, the driving member 11 drives the lower bearing column 42 to move downward, so that the lower bearing column 42 slides on the uploading member 31, and the graphite base on the lower bearing column 42 moves in the direction close to the supporting feet 5 on the upper bearing column 32 until the graphite base abuts against the supporting feet 5 on the upper bearing column 32. Then the driving member 11 drives the downloading member 41 to continue to descend, so that the graphite base is separated from the supporting feet 5 on the lower bearing column 42 and is completely placed on the supporting feet 5 of the upper bearing column 32. Then the spraying of the SiC coating on the graphite base is continued, so that the position of the graphite base that was originally in contact with the supporting feet 5 of the lower bearing column 42 is sprayed with the SiC coating, realizing the dead-angle-free spraying of the graphite base, and avoiding the deposition "blind spots" that often occur due to contact at the contact points between the graphite base and the tooling, resulting in no silicon carbide coating at some parts of the graphite base.

[0019] Embodiment 2

[0020] The difference between this embodiment and Embodiment 1 is that in this embodiment, the uploading disk is arranged in a circular ring shape. When the lower bearing column slides, it passes through the inner ring of the uploading disk, and the upper bearing columns are evenly distributed on the uploading disk in the circumferential direction, and the rest are the same as those in Embodiment 1.

[0021] Embodiment 3

[0022] The difference between this embodiment and Embodiment 1 is that the supporting feet are arranged in a circular ring shape and are eccentrically arranged along the position close to the center of the uploading member. This makes the bearing effect of the supporting feet on the graphite base more stable and the deposition effect on the graphite base better, and the rest are the same as those in Embodiment 1.

Claims

1. A clamping deposition device, characterized in that It includes a driving mechanism, an upper supporting mechanism and a lower supporting mechanism, the driving mechanism includes a driving member and a fixing member, the upper supporting mechanism includes an upper bearing column, the upper bearing column is fixedly connected to the fixing seat, the lower supporting mechanism includes a downloading member and a lower bearing column, the downloading member is fixedly connected to the driving member, the lower bearing column is fixedly connected to the downloading member, and the number of upper bearing columns and lower bearing columns is set to be no less than three; each upper bearing column and lower bearing column is fixedly provided with a supporting foot for placing deposited products, and the driving member is used to drive the lower bearing column to move back and forth, so that the supporting foot of the lower bearing column moves above or below the supporting foot of the upper bearing column.

2. The clamping deposition device according to claim 1, characterized in that, The fixing seat is provided with a connecting piece, one end of the connecting piece is fixedly connected to the fixing seat, and the other end is fixedly connected to the upper loading piece, and a receiving cavity is formed between the fixing seat and the upper loading piece; The download component and the driving component are arranged in the accommodating cavity.

3. The clamping deposition device according to claim 1, wherein, The upper support mechanism further includes an upper bearing column, which is fixedly connected to the fixing seat via an upper loading member. The upper loading member is located on a side of the lower loading member away from the fixing seat, and the extension direction of the upper bearing column is away from the lower loading member. The upper loading piece is provided with a penetration hole for the lower bearing column to penetrate.

4. The clamping deposition device according to claim 3, characterized in that, The upper bearing columns are evenly spaced and distributed on the upper carrier, and the through holes are opened between every two upper bearing columns.

5. The clamping deposition device according to claim 4, wherein A bearing is arranged inside the penetration hole.

6. The clamping deposition device according to claim 2, characterized in that, The upper carrier is in a circular ring structure, and the lower bearing columns are all arranged in the inner ring of the upper carrier.

7. The clamping deposition device according to claim 3, characterized in that, The supporting foot is in the shape of a circular ring, and the inner ring of the supporting foot is coaxially sleeved and fixed on the upper bearing column or the lower bearing column.

8. The clamping deposition device according to claim 7, wherein The supporting legs are eccentrically arranged in a direction close to the center of the upper carrier.

Images