Valve terminal type vacuum equipment supporting hot plug

Abstract

The utility model discloses a valve terminal type vacuum device supporting hot plug, which comprises a control box, a base assembly and a plurality of vacuum device units, the base assembly comprises a plurality of bases, a base circuit board is arranged in each base, the base circuit board is electrically connected with a signal interface A, a signal interface B and a signal interface C, and the signal interface A, the signal interface B and the signal interface C are electrically connected with the control box. The signal interface B of the previous base is in plug-in fit with the signal interface A of the next base to form electrical connection, a unit circuit board is arranged in the vacuum equipment unit, the vacuum equipment unit is provided with a plug-in device, the plug-in device is provided with a signal interface D electrically connected with the unit circuit board, a plug-in port is arranged on the base, a signal interface C is arranged in the plug-in port, and the signal interface C is electrically connected with the unit circuit board. When the plugging device is in plugging cooperation with the plugging port, the signal interface D is in plugging cooperation with the signal interface C, so that mechanical connection and electrical connection are formed between the vacuum equipment units and the base, and hot plugging operation can be realized, that is, the single vacuum equipment unit is replaced or maintained under the condition that a power supply is not cut off.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum equipment, and particularly relates to a valve island type vacuum equipment supporting hot plugging. Background Art

[0002] The valve island type vacuum equipment is a vacuum system widely used in industrial production. The valve island type vacuum equipment adopts a unique valve island design, making the equipment more efficient and stable during operation. The valve island type vacuum equipment includes a control box, a base structure, and a plurality of vacuum equipment integrated on the base structure. These vacuum equipment can be vacuum generator units or vacuum pump units.

[0003] For example, a vacuum island disclosed in a Chinese patent application (publication number: CN118462875A) includes a plurality of vacuum generators arranged in a stack along a first direction A; the vacuum generator includes a manifold valve unit, a vacuum generation unit connected to the manifold valve unit, and a control valve unit; the manifold valve unit is provided with a manifold inlet, a first flow channel communicating with the manifold inlet, and a second flow channel; the vacuum generation unit is provided with a vacuum exhaust flow channel and a vacuum break flow channel. The vacuum exhaust flow channel has an air inlet end, a suction end, and an exhaust end, and the vacuum break flow channel is communicated with the second flow channel; the control valve unit is used to control the opening or closing of the vacuum generation flow channel of the vacuum generation unit or to control the opening or closing of the vacuum break flow channel on the manifold valve unit; however, for the above-mentioned vacuum island, when a vacuum generator fails or needs to be maintained and components need to be replaced routinely, usually, the operator must cut off the power to stop the operation of the equipment. This shutdown operation not only brings great inconvenience but also affects the operation of the entire production line. Once the equipment stops working, the operation efficiency of the entire system will decrease significantly, resulting in delays in the production schedule and an increase in production costs. Therefore, it is necessary to make improvements. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a valve island type vacuum equipment supporting hot plugging for the defects and deficiencies of the prior art, with a simple and reasonable structure, convenient operation, and no need to cut off the power when maintaining and replacing the vacuum equipment unit.

[0005] To achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A valve island type vacuum device supporting hot plugging shown by the utility model includes a control box, and further includes a base assembly electrically connected to the control box and a plurality of vacuum device units integrated on the base assembly. The base assembly includes a plurality of bases which are arranged in a transverse stack. A base circuit board is provided in each base. A signal interface A, a signal interface B, and a signal interface C are electrically connected to the base circuit board respectively. The signal interface B of the previous base is plugged and matched with the signal interface A of the next base to form an electrical connection. A unit circuit board is provided in the vacuum device unit. A plugging device is provided at the bottom of the vacuum device unit. A signal interface D electrically connected to the unit circuit board is provided on the plugging device. A plug interface is provided on the base, and the signal interface C is provided in the plug interface. When the plugging device is plugged and matched with the plug interface, the signal interface D is plugged and matched with the signal interface C so that a mechanical connection and an electrical connection are formed between the vacuum device unit and the base.

[0007] Further, the base assembly further includes a first mounting seat and a second mounting seat. The base is detachably arranged between the first mounting seat and the second mounting seat. A mounting seat circuit board is provided in the first mounting seat. A signal interface E and a signal interface F are electrically connected to the mounting seat circuit board. The signal interface E is plugged and matched with the signal interface A of its adjacent base to form an electrical connection.

[0008] Further, the control box is connected to the outside of the first mounting seat. A control box circuit board is provided in the control box. A signal interface G is electrically connected to the control box circuit board. The signal interface G is plugged and matched with the signal interface F to form an electrical connection.

[0009] Further, the base assembly further includes a connecting piece which transversely penetrates through the first mounting seat, the base, and the second mounting seat to fixedly connect them.

[0010] Further, a first air port and a second air port are respectively provided on the base. A first confluence cavity communicated with the first air port and a second confluence cavity communicated with the second air port are provided in the base. The first confluence cavity and the second confluence cavity are arranged separately from each other. The first confluence cavities of all bases are corresponding in position and communicated with each other. The second confluence cavities of all bases are corresponding in position and communicated with each other. The first mounting seat and / or the second mounting seat are provided with a first ventilation port and a first gas channel. The first ventilation port is communicated with the first confluence cavity through the first gas channel. The first mounting seat and / or the second mounting seat are provided with a second air port and a second gas channel. The second air port is communicated with the second confluence cavity through the second gas channel.

[0011] Furthermore, a latch is slidingly provided in the base and engages with the plug-in device. The latch can slide between a first position and a second position relative to the base. When the latch is in the first position, the plug-in device engages with the latch, so that the vacuum equipment unit is fixedly connected to the base. When the latch is in the second position, the plug-in device and the latch are unlocked, so that the vacuum equipment unit and the base are released from the fixed connection.

[0012] Furthermore, the plug-in device includes a first plug part, a second plug part and a third plug part, the first plug part is arranged between the second plug part and the third plug part, the plug interface includes a first socket and a second socket, the first plug part is plugged into and matched with the first socket, the third plug part is plugged into and matched with the second socket, a limiting step is provided on the base for limiting the second plug part, a locking groove is provided on the bottom side of the first plug part along the sliding direction of the latch, a first locking mouth is provided on the latch for locking with the locking groove, the second plug part is provided with a locking buckle, the latch is provided with a second locking mouth for locking with the locking buckle, the bottom side wall of the third plug part is provided with a third locking mouth, and the latch is provided with a locking tongue for locking with the third locking mouth.

[0013] Furthermore, the vacuum equipment unit includes a main module, a valve assembly module and a pressure gauge module connected to the main module, the valve assembly module and the pressure gauge module are fixedly connected to the main module, the pressure gauge module is electrically connected to the valve assembly module, the valve assembly module includes a vacuum valve, a rupture valve, a vacuum pilot valve and a rupture pilot valve, the vacuum pilot valve is used to control the operation of the vacuum valve, and the rupture pilot valve is used to control the operation of the rupture valve.

[0014] Furthermore, the pressure gauge module is provided with the unit circuit board, the vacuum pilot valve and the air-breaking pilot valve are provided with an electromagnetic coil and a pin electrically connected to the electromagnetic coil, the unit circuit board is integrated with a socket corresponding to the pin, and the pin and the socket are plugged in and matched to form an electrical connection between the electromagnetic coil and the unit circuit board.

[0015] Furthermore, the valve assembly module is provided with a wedge-shaped positioning block, and the main body module is provided with a wedge-shaped positioning groove corresponding to the wedge-shaped positioning block.

[0016] The beneficial effects of the present utility model are as follows: For a valve island type vacuum device supporting hot plugging of the present utility model, during the operation of the device, hot plugging operations can be performed between the vacuum device unit and the base, that is, a single vacuum device unit can be replaced or maintained without cutting off the power supply, greatly improving the flexibility of the system and the operation convenience of the user, making the installation and maintenance of the device simpler and more efficient. When a new vacuum device unit needs to be inserted, it only needs to be directly inserted into the insertion interface on the corresponding base. Through the insertion cooperation between the insertion device and the insertion interface, the new vacuum device unit is fixedly connected to the base. In addition, through the insertion cooperation between signal interface D and signal interface C, the unit circuit board and the base circuit board are powered on, so that the new vacuum device unit operates. And when a certain vacuum device unit needs to be pulled out, it only needs to be pulled out from the corresponding base, and the unit circuit board is powered off from the base circuit board, ensuring the safety of the operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is the overall structural schematic diagram of the present utility model;

[0018] Figure 2 is the structural schematic diagram of the present utility model under the first cross-section;

[0019] Figure 3 is the structural schematic diagram of the present utility model under the second cross-section;

[0020] Figure 4 is the structural schematic diagram of the valve assembly;

[0021] Figure 5 is the structural schematic diagram of the base assembly;

[0022] Figure 6 is the exploded structural schematic diagram of the base structure;

[0023] Figure 7 is the cross-sectional structural schematic diagram of the base structure;

[0024] Figure 8 is the structural schematic diagram of the control box circuit board, the mounting base circuit board and the base circuit board;

[0025] Figure 9 is the structural schematic diagram of the vacuum device unit;

[0026] Figure 10 is the structural schematic diagram when the vacuum device unit is separated from the base;

[0027] Figure 11 is the structural schematic diagram when the latch is in the first position;

[0028] Figure 12 is the structural schematic diagram when the latch is in the second position;

[0029] Figure 13 is a schematic structural view of the cover plate;

[0030] Figure 14 is a schematic structural view of the second plug head;

[0031] Figure 15 is a schematic structural view of the latch;

[0032] Figure 16 is a schematic structural view when the pressure gauge module is separated from the vacuum equipment unit;

[0033] Figure 17 is Figure 16 an enlarged structural view of location A in;

[0034] Figure 18 is a schematic structural view of the socket;

[0035] Figure 19 is a schematic structural view of the first mounting seat.

[0036] Figure 1 - Figure 19Middle: 1. Control box; 11. Control box circuit board; 111. Signal interface G; 2. Base assembly; 21. First mounting base; 211. Mounting base circuit board; 2111. Signal interface E; 2112. Signal interface F; 212. First vent; 2121. First gas channel; 213. Second vent; 22. Second mounting base; 23. Base; 231. Base circuit board; 2311. Signal interface A; 2312, signal interface B; 2313, signal interface C; 232, first socket; 233, limit step; 234, second socket; 235, latch; 2351, first locking port; 23511, large end; 23512, small end; 2352, second locking port; 2353, lock tongue; 2354, handle; 236, first air port; 2361, first confluence chamber; 237, second air port 2371, second confluence chamber; 24, connector; 241, first bolt; 242, second bolt; 243, pull rod; 25, cover; 251, first block; 252, second block; 3, vacuum equipment unit; 31, unit circuit board; 32, plug-in device; 321, first plug portion; 3211, lock slot; 322, second plug portion; 3221, locking buckle; 3222, avoidance port; 32 3. Third plug part; 3231. Signal interface D; 3232. Third locking port; 33. Main body module; 331. Wedge-shaped positioning groove; 332. Vacuum connector; 333. Throttle valve; 34. Valve assembly module; 341. Wedge-shaped positioning block; 342. Vacuum valve; 343. Breakaway valve; 344. Vacuum pilot valve; 345. Breakaway pilot valve; 346. Pin; 35. Pressure gauge module; 351. Socket. DETAILED DESCRIPTION

[0037] The present invention will be further described below with reference to the accompanying drawings.

[0038] like Figure 1 - Figure 19A valve island type vacuum device supporting hot plugging is shown, which includes a control box 1, a base assembly 2 electrically connected to the control box 1, and a plurality of vacuum device units 3 integrated on the base assembly 2. Specifically, the vacuum device units 3 can be vacuum generator units, vacuum pump units, etc. The base assembly 2 includes a plurality of bases 23, and the plurality of bases 23 are arranged in a horizontal stack. A base circuit board 231 is provided in the base 23. A signal interface A2311, a signal interface B2312, and a signal interface C2313 are electrically connected to the base circuit board 231 respectively. The signal interface B2312 of the previous base 23 is inserted and matched with the signal interface A2311 of the next base 23 to form an electrical connection. A unit circuit board 31 is provided in the vacuum device unit 3, and a plugging device 32 is provided at the bottom of the vacuum device unit 3. A signal interface D3231 electrically connected to the unit circuit board 31 is provided on the plugging device 32. An insertion port is provided on the base 23, and the signal interface C2313 is provided in the insertion port. When the plugging device 32 is inserted and matched with the insertion port, the signal interface D3231 is inserted and matched with the signal interface C2313, so that a mechanical connection and an electrical connection are formed between the vacuum device unit 3 and the base 23. The installation without wire harness is realized through the insertion and matching, and the installation is more convenient and fast, and the connection is firm and not easy to loosen. In addition, the vacuum device unit 3 can perform hot plugging operations with the base 23, that is, a single vacuum device unit 3 can be replaced or maintained without cutting off the power supply, which greatly improves the flexibility of the system and the operation convenience of the user, and makes the installation and maintenance of the device simpler and more efficient. Specifically, when a new vacuum device unit 3 needs to be inserted, it only needs to be directly inserted into the insertion port on the corresponding base 23. Through the insertion and matching of the plugging device 32 and the insertion port, the new vacuum device unit 3 is fixedly connected to the base 23. In addition, through the insertion and matching of the signal interface D3231 and the signal interface C2313, the unit circuit board 31 and the base circuit board 231 are powered on, so that the new vacuum device unit 3 operates. When a certain vacuum device unit 3 needs to be pulled out, it only needs to be pulled out from the corresponding base 23, and the unit circuit board 31 is powered off from the base circuit board 231, ensuring the safety of the operation.

[0039] Preferably, in this embodiment, a latch 235 that is slidably provided in the base 23 and is engaged with the plugging device 32 is provided. The latch 235 can slide between a first position and a second position relative to the base 23. When the latch 235 is in the first position, refer to Figure 11 ., the plugging device 32 is engaged with the latch 235, so that the vacuum device unit 3 is fixedly connected to the base 23, and the connection relationship is firm and reliable, so that the vacuum device unit 3 is not easily separated from the base 23. When the latch 235 is in the second position, refer to Figure 12, the plugging device 32 unlocks the latch 235, so that the vacuum device unit 3 is disengaged from the base 23. At this time, the vacuum device unit 3 can be pulled out from the base 23. Preferably, a handle 2354 is provided at the front end of the latch 235, and the handle 2354 extends outside the base 23. By providing the handle 2354, the user can more conveniently pull the latch 235 to slide the latch 235 between the first position and the second position.

[0040] Preferably, in this embodiment, refer to Figure 10 , the plugging device 32 includes a first plug head 321, a second plug head 322 and a third plug head 323. The first plug head 321 is disposed between the second plug head 322 and the third plug head 323. The plug interface includes a first socket 232 and a second socket 234. The first plug head 321 is in plugging fit with the first socket 232, and the third plug head 323 is in plugging fit with the second socket 234. Preferably, in this embodiment, a signal interface C2313 is provided in the second socket 234, a signal interface D3231 is provided on the third plug head 323, and a limiting step 233 for limiting and cooperating with the second plug head 322 is provided on the base 23. A locking groove 3211 is provided on the bottom side of the first plug head 321 along the sliding direction of the latch 235. Preferably, two locking grooves 3211 are provided and are respectively located on both sides of the bottom of the first plug head 321. A first locking port 2351 for locking and cooperating with the locking groove 3211 is provided on the latch 235. Specifically, the first locking port 2351 includes a large opening end 23511 for the locking groove 3211 to enter and a small opening end 23512 for locking and cooperating with the locking groove 3211. The large opening end 23511 is communicated with the small opening end 23512. When the latch 235 is in the first position, the locking groove 3211 is in locking cooperation with the small opening end 23512. When the latch 235 is in the second position, the locking groove 3211 disengages from the small opening end 23512 and enters the large opening end 23511, and the locking groove 3211 is unlocked from the first locking port 2351.

[0041] Preferably, the second plug head 322 is provided with a locking buckle 3221, and the latch 235 is provided with a second locking opening 2352 that is lockingly engaged with the locking buckle 3221. A relief opening 3222 for the latch 235 to pass through is provided at the bottom of the second plug head 322. When the latch 235 is in the first position, the locking buckle 3221 is lockingly engaged with the second locking opening 2352. When the latch 235 is in the second position, the locking buckle 3221 is disengaged from the second locking opening 2352 to unlock. Preferably, two locking buckles 3221 are provided. Both of the two locking buckles 3221 extend forward relative to the second plug head 322. A gap for the deformation of the locking buckle 3221 is formed between the two locking buckles 3221. Protrusions are provided on the opposite surfaces of the two locking buckles 3221. The protrusions are provided with a guiding inclined surface and a locking inclined surface that respectively correspond to and cooperate with the second locking opening 2352. The setting of the gap reserves a deformation space for the deformation of the locking buckle 3221. When the locking buckle 3221 is inserted into the second locking opening 2352 (i.e., when the latch 235 is in the first position), the two locking buckles 3221 approach each other, so that the protrusions can enter the second locking opening 2352. After entering the second locking opening 2352, the locking buckle 3221 resumes its original shape under its own elastic force to achieve the locking function. The setting of the guiding inclined surface facilitates the locking buckle 3221 to drive the protrusion to insert into the second locking opening 2352. The setting of the locking inclined surface is used for locking and cooperating with the second locking opening 2352. In a further embodiment, the inclination angle of the locking inclined surface is larger than the inclination angle of the guiding inclined surface, so that the locking inclined surface can achieve locking cooperation with the second locking opening 2352, so that the latch 235 is kept in a state of locking cooperation with the locking buckle 3221.

[0042] Preferably, a third locking opening 3232 is provided on the bottom side wall of the third plug head 323, and the latch 235 is provided with a locking tongue 2353 that is lockingly engaged with the third locking opening 3232. When the latch 235 is in the first position, the locking tongue 2353 is lockingly engaged with the third locking opening 3232. When the latch 235 is in the second position, the locking tongue 2353 is disengaged from the third locking opening 3232 to unlock.

[0043] In other embodiments, the vacuum device unit 3 may be provided with only the third plug head 323. Correspondingly, only the second socket 234 that is plug-fitted with the third plug head 323 may be provided on the base 23. Of course, the vacuum device unit 3 may also be provided with only the third plug head 323 and the first plug head 321. Correspondingly, only the second socket 234 that is plug-fitted with the third plug head 323 and the first socket 232 that is plug-fitted with the first plug head 321 may be provided on the base 23. Similarly, the user can flexibly choose whether to provide the first plug head 321, the second plug head 322, and the third plug head 323 on the vacuum device unit 3 according to their own needs, and correspondingly provide the first socket 234 that is correspondingly fitted with the first plug head 321, the limiting step 233 that is correspondingly fitted with the second plug head 322, and the second socket 234 that is correspondingly fitted with the third plug head 323 on the base 23.

[0044] Preferably, in this embodiment, the base structure also serves as a busbar seat for gas busbar. Refer to Figure 7 , the base 23 is respectively provided with a first air port 236 and a second air port 237. A first busbar cavity 2361 connected to the first air port 236 and a second busbar cavity 2371 connected to the second air port 237 are provided inside the base 23. The first busbar cavity 2361 and the second busbar cavity 2371 are arranged separately from each other. The positions of the first busbar cavities 2361 of all bases 23 correspond to each other and are connected to each other. The positions of the second busbar cavities 2371 of all bases 23 correspond to each other and are connected to each other. The number of bases 23 is at least in one-to-one correspondence with the number of vacuum device units 3. When the number of bases 23 is the same as the number of vacuum device units 3, each vacuum device unit 3 is respectively installed on the corresponding base 23. When the number of bases 23 is more than the number of vacuum device units 3, according to the needs of the working scenario, each vacuum device unit 3 can be reasonably installed on the corresponding base 23. At this time, the remaining bases 23 can be disabled (that is, the first air port 236 and the second air port 237 on the corresponding base 23 are blocked), or used for user expansion.

[0045] Preferably, refer to Figure 1 , a cover plate 25 is further provided on the base 23. A first blocking block 251 and a second blocking block 252 are provided on the lower end surface of the cover plate 25. The first blocking block 251 is used to block the first air port 236, and the second blocking block 252 is used to block the second air port 237. Preferably, sealing rings are sleeved on the outer walls of the first blocking block 251 and the second blocking block 252. When the base 23 needs to be disabled, the cover plate 25 is installed on this base 23 to block the first air port 236 and the second air port 237 on this base 23. When this base 23 needs to be enabled, the cover plate 25 on this base 23 is removed. Preferably, the plugging device 32 is provided at the lower end of the cover plate 25.

[0046] Preferably, in this embodiment, the base assembly 2 further includes a first mounting seat 21 and a second mounting seat 22. The base 23 is detachably disposed between the first mounting seat 21 and the second mounting seat 22. Users can flexibly expand or reduce the number of bases 23 according to actual needs, with high flexibility. It should be noted that the number of bases 23 is at least in one-to-one correspondence with the number of vacuum device units 3. Preferably, in this embodiment, the base assembly 2 further includes a connecting member 24. The connecting member 24 horizontally penetrates the first mounting seat 21, the base 23, and the second mounting seat 22 to fixedly connect them. Specifically, the connecting member 24 includes a first bolt 241, a second bolt 242, and a pull rod 243 disposed between the first bolt 241 and the second bolt 242. The first bolt 241 horizontally extends into the first mounting seat 21 and is fixedly connected to the first mounting seat 21, ensuring the stability of the connection between the first bolt 241 and the first mounting seat 21. The second bolt 242 horizontally extends into the second mounting seat 22 and is fixedly connected to the second mounting seat 22, ensuring the stability of the connection between the second bolt 242 and the second mounting seat 22. The pull rod 243 horizontally penetrates the base 23 and both ends of the pull rod 243 are fixedly connected to the first bolt 241 and the second bolt 242 respectively, effectively connecting the first mounting seat 21, the base 23, and the second mounting seat 22 tightly together to form a stable connection structure.

[0047] The first mounting seat 21 is provided with a mounting seat circuit board 211. A signal interface E2111 and a signal interface F2112 are electrically connected to the mounting seat circuit board 211. The signal interface E2111 is in plug-in fit with the signal interface A2311 of its adjacent base 23 to form an electrical connection. When the device is running, the mounting seat circuit board 211 and its adjacent base circuit board 231 are powered on to ensure the effective transmission of signals.

[0048] Preferably, in this embodiment, the control box 1 is connected to the outside of the first mounting seat 21. The control box 1 is provided with a control box circuit board 11. A signal interface G111 is electrically connected to the control box circuit board 11. The signal interface G111 is in plug-in fit with the signal interface F2112 to form an electrical connection. When the device is running, the control box circuit board 11 and the mounting seat circuit board 211 are powered on to ensure the effective transmission of signals.

[0049] Preferably, in this embodiment, the first mounting seat 21 and the second mounting seat 22 are both provided with a first ventilation port 212 and a first gas passage 2121. The first ventilation port 212 is connected to the first confluence chamber 2361 through the first gas passage 2121. The first ventilation port 212 serves as a positive pressure air inlet to receive positive pressure gas. The provision of the first ventilation port 212 and the first gas passage 2121 on both the first mounting seat 21 and the second mounting seat 22 can meet the requirement of dual-end gas supply and improve work efficiency. Of course, in other embodiments, the first ventilation port 212 and the first gas passage 2121 can also be provided only on the first mounting seat 21, or only on the second mounting seat 22.

[0050] Preferably, in this embodiment, the first mounting seat 21 and the second mounting seat 22 are both provided with a second ventilation port 213 and a second gas passage. The second ventilation port 213 is connected to the second confluence chamber 2371 through the second gas passage. When the vacuum device unit 3 is a vacuum generator unit, the second ventilation port 213 is used for exhaust. When the vacuum device unit 3 is a vacuum pump unit, the second ventilation port 213 serves as a negative pressure air inlet to receive negative pressure gas. The provision of the second ventilation port 213 and the second gas passage on both the first mounting seat 21 and the second mounting seat 22 can improve work efficiency. Of course, in other embodiments, the second ventilation port 213 and the second gas passage can also be provided only on the first mounting seat 21, or only on the second mounting seat 22.

[0051] Preferably, in this embodiment, the vacuum device unit 3 includes a main body module 33, a valve assembly module 34 and a pressure gauge module 35 connected to the main body module 33. The valve assembly module 34 and the pressure gauge module 35 are fixedly connected to the main body module 33. The pressure gauge module 35 is electrically connected to the valve assembly module 34. A vacuum connector 332 is provided on the main body module 33. The vacuum device unit 3 can be a vacuum generator unit, a vacuum pump unit, etc. The main difference between the vacuum generator unit and the vacuum pump unit lies in the different main body modules 33. A negative pressure generating mechanism is provided in the main body module 33 of the vacuum generator unit. The negative pressure generating mechanism is used for vacuum pumping. No negative pressure generating mechanism is provided in the main body module 33 of the vacuum pump unit. Specifically, the negative pressure generating mechanism includes a nozzle and an ejector tube. The nozzle is provided at the air inlet end of the ejector tube. An ejector channel corresponding to the nozzle is provided in the ejector tube. An air suction port communicating with the ejector channel is provided on the side wall of the air inlet end of the ejector tube. Gas generates negative pressure through the ejector channel and sucks air through the air suction port. The valve assembly module 34 includes a vacuum valve 342, a vent valve 343, a vacuum pilot valve 344 and a vent pilot valve 345. The positive pressure gas in the first confluence chamber 2361 is communicated with the vacuum pilot valve 344 and the vent pilot valve 345. The vacuum pilot valve 344 is used to control the operation of the vacuum valve 342. The vent pilot valve 345 is used to control the operation of the vent valve 343. When the vacuum valve 342 operates, the negative pressure gas is communicated with the vacuum connector 332. When the vent valve 343 operates, the positive pressure gas is communicated with the vacuum connector 332 for venting.

[0052] Specifically, when the vacuum device unit 3 is a vacuum generator unit, the positive pressure gas in the first confluence chamber 2361 enters the vacuum generator unit. When the vacuum valve 342 operates, the positive pressure gas generates negative pressure through vacuum pumping by the negative pressure generating mechanism, and then the negative pressure gas is communicated with the vacuum connector 332. When the vent valve 343 operates, the positive pressure gas is communicated with the vacuum connector 332 for venting. The excess gas in the vacuum generator unit is then discharged from the second vent port 213 through the second confluence chamber 2371.

[0053] When the vacuum device unit 3 is a vacuum pump unit, the negative pressure gas in the second confluence chamber 2371 enters the vacuum pump unit and is communicated with the vacuum valve 342. The positive pressure gas in the first confluence chamber 2361 enters the vacuum pump unit and is communicated with the vent valve 343. When the vacuum valve 342 operates, the negative pressure gas is communicated with the vacuum connector 332. When the vent valve 343 operates, the positive pressure gas is communicated with the vacuum connector 332 for venting.

[0054] Preferably, in this embodiment, a third gas channel is provided between the vent valve 343 and the vacuum connector 332. A throttle valve 333 is provided on the vacuum device unit 3. The throttle valve 333 extends into the third gas channel to adjust the flow rate of the vented gas.

[0055] Preferably, in this embodiment, the unit circuit board 31 is provided in the pressure gauge module 35. Refer to Figure 16 - Figure 18 , an electromagnetic coil and a pin 346 electrically connected to the electromagnetic coil are provided in the vacuum pilot valve 344 and the air-breaking pilot valve 345. A socket 351 corresponding to and cooperating with the pin 346 is integrated on the unit circuit board 31. The pin 346 and the socket 351 are plugged and cooperated to electrically connect the electromagnetic coil with the unit circuit board 31. This design does not require the use of complex wire harness connections during the installation process, thus simplifying the entire installation process and shortening the time required for installation. Through this wire harness-free connection method, not only the installation convenience is improved, but also the connection stability and reliability are significantly enhanced.

[0056] Specifically, the traditional wire harness connection method requires connecting multiple wire harnesses to the electromagnetic coil and the unit circuit board 31 respectively, which is not only time-consuming and laborious, but also prone to connection errors or poor contacts. With the wire harness-free connection method adopted, the user only needs to align the pin 346 with the socket 351 and insert it gently to complete the connection, without the need for complex wiring operations. In addition, due to reasons such as bending, pulling or vibration of the wire harness in the traditional wire harness connection method, it is easy to cause problems such as poor contact or wire breakage, thus affecting the normal operation of the device. The pin 346 and the socket 351 are closely cooperated, and the connection relationship is stable, which can effectively avoid the risks brought by poor contact or wire breakage and ensure the reliable operation of the device. When inspection and maintenance are required, the maintenance personnel can quickly disassemble and reconnect the device, improving the maintenance efficiency and shortening the maintenance time.

[0057] The pressure gauge module 35 is provided with a pressure sensor, and the pressure sensor is electrically connected to the unit circuit board 31. The detection end of the pressure sensor extends into the main body module 33 to detect the pressure in the main body module 33 and ensure that it works within a reasonable pressure range.

[0058] Preferably, in this embodiment, a wedge-shaped positioning block 341 is provided on the valve assembly module 34, and a wedge-shaped positioning groove 331 corresponding to and cooperating with the wedge-shaped positioning block 341 is provided on the main body module 33, which is convenient for quickly and accurately positioning during the assembly process, thereby improving the production efficiency and assembly quality. Through the cooperation of the wedge-shaped positioning block 341 and the wedge-shaped positioning groove 331, the valve assembly module 34 can be effectively prevented from shifting or loosening during use, ensuring the stable operation of the device.

[0059] The above is only a preferred embodiment of the present invention. Therefore, all equivalent changes or modifications made according to the structure, features and principles described in the scope of the patent application of the present invention are included in the scope of the patent application of the present invention.

Claims

1. A valve island type vacuum device supporting hot plugging, comprising a control box (1), characterized in that: It further includes a base assembly (2) electrically connected to the control box (1) and several vacuum device units (3) integrated on the base assembly (2). The base assembly (2) includes several bases (23) arranged in a horizontal stack. A base circuit board (231) is provided in the base (23). A signal interface A (2311), a signal interface B (2312), and a signal interface C (2313) are electrically connected to the base circuit board (231) respectively. The signal interface B (2312) of the previous base (23) is inserted and mated with the signal interface A (2311) of the next base (23) to form an electrical connection. A unit circuit board (31) is provided in the vacuum device unit (3). A plugging device (32) is provided at the bottom of the vacuum device unit (3). A signal interface D (3231) electrically connected to the unit circuit board (31) is provided on the plugging device (32). A plug interface is provided on the base (23), and the signal interface C (2313) is provided in the plug interface. When the plugging device (32) is inserted and mated with the plug interface, the signal interface D (3231) is inserted and mated with the signal interface C (2313) so that a mechanical connection and an electrical connection are formed between the vacuum device unit (3) and the base (23).

2. The valve island type vacuum device supporting hot plugging according to claim 1, characterized in that: The base assembly (2) further includes a first mounting seat (21) and a second mounting seat (22). The base (23) is detachably arranged between the first mounting seat (21) and the second mounting seat (22). A mounting seat circuit board (211) is provided in the first mounting seat (21). A signal interface E (2111) and a signal interface F (2112) are electrically connected to the mounting seat circuit board (211). The signal interface E (2111) is inserted and mated with the signal interface A (2311) of its adjacent base (23) to form an electrical connection.

3. The valve island type vacuum device supporting hot plugging according to claim 2, characterized in that: The control box (1) is connected to the outside of the first mounting seat (21). A control box circuit board (11) is provided in the control box (1). A signal interface G (111) is electrically connected to the control box circuit board (11). The signal interface G (111) is inserted and mated with the signal interface F (2112) to form an electrical connection.

4. A valve island type vacuum device supporting hot plugging according to claim 2, characterized in that: The base assembly (2) further includes a connecting member (24). The connecting member (24) horizontally penetrates through the first mounting seat (21), the base (23), and the second mounting seat (22) to fixedly connect them.

5. The valve island type vacuum device supporting hot plugging according to claim 2, characterized in that: The base (23) is respectively provided with a first air port (236) and a second air port (237). A first confluence chamber (2361) communicating with the first air port (236) and a second confluence chamber (2371) communicating with the second air port (237) are arranged in the base (23). The first confluence chamber (2361) and the second confluence chamber (2371) are arranged separately from each other. The positions of the first confluence chambers (2361) of all the bases (23) correspond to each other and are interconnected. The positions of the second confluence chambers (2371) of all the bases (23) correspond to each other and are interconnected. The first mounting seat (21) and / or the second mounting seat (22) are provided with a first ventilation port (212) and a first gas passage (2121). The first ventilation port (212) is connected to the first confluence chamber (2361) through the first gas passage (2121). The first mounting seat (21) and / or the second mounting seat (22) are provided with a second ventilation port (213) and a second gas passage. The second ventilation port (213) is connected to the second confluence chamber (2371) through the second gas passage.

6. The valve island type vacuum device supporting hot plugging according to claim 1, characterized in that: A latch (235) that is in snap-fit with the plugging device (32) is slidably arranged in the base (23). The latch (235) can slide relative to the base (23) between a first position and a second position. When the latch (235) is in the first position, the plugging device (32) is in snap-fit with the latch (235), so that the vacuum device unit (3) is fixedly connected to the base (23). When the latch (235) is in the second position, the plugging device (32) is unlocked from the latch (235), so that the fixed connection between the vacuum device unit (3) and the base (23) is released.

7. The valve island type vacuum device supporting hot plug according to claim 6, characterized in that: The plugging device (32) includes a first plug head (321), a second plug head (322) and a third plug head (323). The first plug head (321) is arranged between the second plug head (322) and the third plug head (323). The plugging interface includes a first socket (232) and a second socket (234). The first plug head (321) is in plugging fit with the first socket (232), and the third plug head (323) is in plugging fit with the second socket (234). A limiting step (233) for limiting cooperation with the second plug head (322) is arranged on the base (23). A locking groove (3211) arranged along the sliding direction of the latch (235) is provided on the bottom side of the first plug head (321). A first locking port (2351) for locking cooperation with the locking groove (3211) is arranged on the latch (235). A locking buckle (3221) is arranged on the second plug head (322). A second locking port (2352) for locking cooperation with the locking buckle (3221) is arranged on the latch (235). A third locking port (3232) is arranged on the bottom side wall of the third plug head (323). A locking tongue (2353) for locking cooperation with the third locking port (3232) is arranged on the latch (235).

8. A valve island type vacuum device supporting hot plugging according to claim 1, characterized in that: The vacuum equipment unit (3) includes a main body module (33), a valve assembly module (34) connected to the main body module (33), and a pressure gauge module (35). The valve assembly module (34) and the pressure gauge module (35) are fixedly connected to the main body module (33). The pressure gauge module (35) is electrically connected to the valve assembly module (34). The valve assembly module (34) includes a vacuum valve (342), a vent valve (343), a vacuum pilot valve (344), and a vent pilot valve (345). The vacuum pilot valve (344) is used to control the operation of the vacuum valve (342), and the vent pilot valve (345) is used to control the operation of the vent valve (343).

9. The valve island type vacuum device supporting hot plugging according to claim 8, characterized in that: The unit circuit board (31) is provided in the pressure gauge module (35). The vacuum pilot valve (344) and the vent pilot valve (345) are provided with electromagnetic coils and pins (346) electrically connected to the electromagnetic coils. A socket (351) corresponding to and mating with the pins (346) is integrated on the unit circuit board (31). The pins (346) and the socket (351) are plugged and mated to electrically connect the electromagnetic coils to the unit circuit board (31).

10. A valve island type vacuum device supporting hot plugging according to claim 8, characterized in that: A wedge-shaped positioning block (341) is provided on the valve assembly module (34), and a wedge-shaped positioning groove (331) corresponding to and mating with the wedge-shaped positioning block (341) is provided on the main body module (33).

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