Pressure sensor

Abstract

The utility model relates to the technical field of pressure sensors, and discloses a pressure sensor, which comprises a shell, a pressure sensor assembly is arranged in the shell, a measuring through hole is formed in the top of the shell, and the measuring through hole extends into the shell; the PFA cap is arranged at the top of the shell; the waterproof joint is arranged at the bottom of the shell; the cable penetrates through the waterproof joint and is communicated to the pressure sensor assembly in the shell; the pressure sensor assembly comprises a pressure component, a copper ring, a first circuit board and a second circuit board. The pressure component is arranged above the copper ring, the first circuit board is arranged below the copper ring, and the second circuit board is located below the first circuit board; and sealant is filled below the first circuit board and in the shell. And by filling the sealing joint, one side of the cable and one side of the waterproof joint can be sealed, chemical liquid medicine is further prevented from permeating into the sensor to corrode, and the service life of the pressure sensor is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of pressure sensors, and particularly relates to a pressure sensor. Background Art

[0002] Conventional pressure sensors can achieve measurements in most application scenarios. However, in the semiconductor field, the environment is often strong acid and strong alkali. The existing waterproof joints of pressure sensors are mainly used for cable routing. When facing strong acid and strong alkali, chemical liquids or air easily enter the interior of the pressure sensor through the waterproof joints, corroding the interior of the pressure sensor, resulting in low lifespan or inaccurate measurement accuracy. Content of the Utility Model

[0003] Based on the above, the purpose of the utility model is to provide a pressure sensor that can prevent pressure components from being corroded and extend the lifespan of the pressure sensor.

[0004] To achieve the above purpose, the utility model adopts the following technical solutions:

[0005] The utility model provides a pressure sensor, including:

[0006] A housing, inside which a pressure sensor assembly is arranged, and a measurement through-hole is opened at the top of the housing, and the measurement through-hole extends into the interior of the housing;

[0007] A PFA cap, arranged on the top of the housing;

[0008] A waterproof joint, arranged at the bottom of the housing;

[0009] A cable, passing through the waterproof joint and connecting to the pressure sensor assembly inside the housing;

[0010] The pressure sensor assembly includes a pressure component, a copper ring, a first circuit board, and a second circuit board;

[0011] The pressure component is arranged above the copper ring, the first circuit board is arranged below the copper ring, and the second circuit board is located below the first circuit board;

[0012] Sealant is filled inside the housing below the first circuit board.

[0013] Preferably, the housing includes a PTFE main housing and a PTFE outer housing. The PTFE main housing is located above the PTFE outer housing, and the PTFE main housing is threadedly connected to the PTFE outer housing;

[0014] The measurement through-hole is located inside the PTFE main housing.

[0015] Preferably, the PFA cap is threadedly connected to the PTFE main housing.

[0016] Preferably, the waterproof connector is threadedly connected to the PTFE housing.

[0017] Preferably, it further includes a PFA film, and the PFA film is placed on the top of the housing.

[0018] Preferably, a sealing ring is further provided between the PFA film and the measurement through hole.

[0019] The beneficial effects of the present utility model are as follows:

[0020] The present utility model provides a pressure sensor. By filling the sealing compound, it can seal one side of the cable and the waterproof connector, further preventing chemical liquid from penetrating into the sensor interior for corrosion, and extending the service life of the pressure sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following will briefly introduce the drawings required for the description of the embodiments of the present utility model. Obviously, the following-described drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to the content of the embodiments of the present utility model and these drawings.

[0022] Figure 1 It is a schematic structural diagram of a pressure sensor provided by an embodiment of the present utility model;

[0023] Figure 2 It is a schematic cross-sectional structural diagram of a pressure sensor provided by an embodiment of the present utility model;

[0024] Figure 3 It is an exploded structural diagram of a pressure sensor provided by an embodiment of the present utility model.

[0025] In the figure:

[0026] 1. Housing; 11. PTFE main housing; 111. Measurement through hole; 12. PTFE housing; 2. PFA cap; 3. Waterproof connector; 4. Cable; 5. Pressure sensor assembly; 51. Pressure component; 52. Copper ring; 53. First circuit board; 54. Second circuit board; 6. PFA film; 7. Sealing ring. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0027] To make the technical problems solved, the technical solutions adopted, and the technical effects achieved by the present utility model clearer, the technical solutions of the embodiments of the present utility model will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0028] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0029] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "over", and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "under", and "beneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0030] In the description of this embodiment, the orientation or positional relationships such as "above", "below", "left", "right", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for differentiation in description and have no special meanings.

[0031] Such as Figures 1 to 3As shown in the figure, the present utility model provides a pressure sensor, which includes: a housing 1, inside which a pressure sensor assembly 5 is arranged, and a measurement through-hole 111 is opened at the top thereof, and the measurement through-hole 111 extends to the inside of the housing 1; a PFA cap 2, arranged on the top of the housing 1; a waterproof connector 3, arranged on the bottom of the housing 1; a cable 4, passing through the waterproof connector 3 and communicating with the pressure sensor assembly 5 inside the housing 1; the pressure sensor assembly 5 includes a pressure component 51, a copper ring 52, a first circuit board 53 and a second circuit board 54; the pressure component 51 is arranged above the copper ring 52, the first circuit board 53 is arranged below the copper ring 52, and the second circuit board 54 is located below the first circuit board 53; sealant is filled inside the housing 1 below the first circuit board 53.

[0032] The present utility model provides a pressure sensor, which can seal one side of the cable 4 and the waterproof connector 3 by filling the sealant, further prevent chemical liquid from penetrating into the inside of the sensor for corrosion, and extend the service life of the pressure sensor.

[0033] In some embodiments, as Figure 2 and 3 shown, the housing 1 includes a PTFE main housing 11 and a PTFE outer housing 12, the PTFE main housing 11 is located above the PTFE outer housing 12, and the PTFE main housing 11 is threadedly connected to the PTFE outer housing 12; the measurement through-hole 111 is located inside the PTFE main housing 11. Specifically, PTFE has good chemical corrosion resistance. An external thread is provided on the inner wall of the top of the PTFE main housing 11, and an internal thread is provided on the outer wall of the bottom of the PTFE outer housing 12. The threaded connection between the PTFE main housing 11 and the PTFE outer housing 12 can achieve rapid disassembly and assembly, facilitating the installation, maintenance, replacement, etc. of internal components.

[0034] In some embodiments, as Figure 2 and 3 shown, the PFA cap 2 is threadedly connected to the PTFE main housing 11. Specifically, an internal thread is provided on the inner wall of the bottom of the PFA cap 2, and an external thread is provided on the outer wall of the top of the PTFE main housing 11. The threaded connection between the PFA cap 2 and the PTFE main housing 11 is mainly used to fix the object to be measured in contact.

[0035] In some embodiments, as Figure 2 and 3As shown, the waterproof connector 3 is threadedly connected to the PTFE housing 12. Specifically, an external thread is provided on the outer wall of the top of the waterproof connector 3, and an internal thread is provided on the inner wall of the bottom of the PTFE housing 12. The threaded connection between the waterproof connector 3 and the PTFE housing 12 enables quick fixation of the cable 4.

[0036] In some embodiments, as Figure 2 and 3 shown, it further includes a PFA film 6, and the PFA film 6 is placed on the top of the housing 1. During measurement, the contact object to be measured penetrates through the measurement through-hole 111, and the PFA film 6 is used to separate between the pressure sensor assembly 5 and the contact object to be measured. The PFA film 6 has good resistance to strong acids and strong alkalis, can perfectly protect the sensor assembly, extend the service life of the sensor, and at the same time, due to the thin film, it does not affect the measurement accuracy and ensures the measurement accuracy.

[0037] In some embodiments, as Figure 2 and 3 shown, for further sealing to prevent chemical liquid from penetrating into the interior of the housing 1, a sealing ring 7 is further provided between the PFA film 6 and the measurement through-hole 111.

[0038] Note that the above is only the preferred embodiment of the present invention and the applied technical principle. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein. Various obvious changes, re-adjustments, and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Without departing from the concept of the present invention, more other equivalent embodiments can be included, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A pressure sensor, characterized in that, Comprising: A housing, inside which a pressure sensor assembly is provided, and a measurement through-hole is opened at the top thereof, and the measurement through-hole extends into the housing; A PFA cap, provided at the top of the housing; A waterproof connector, provided at the bottom of the housing; A cable, passing through the waterproof connector and communicating with the pressure sensor assembly inside the housing; The pressure sensor assembly includes a pressure component, a copper ring, a first circuit board and a second circuit board; The pressure component is provided above the copper ring, the first circuit board is provided below the copper ring, and the second circuit board is located below the first circuit board; Sealant is filled inside the housing below the first circuit board.

2. The pressure sensor according to claim 1, characterized in that The housing includes a PTFE main housing and a PTFE outer housing, the PTFE main housing is located above the PTFE outer housing, and the PTFE main housing is threadedly connected to the PTFE outer housing; The measurement through-hole is located inside the PTFE main housing.

3. A pressure sensor according to claim 2, characterized in that, The PFA cap is threadedly connected to the PTFE main housing.

4. A pressure sensor according to claim 2, wherein, The waterproof connector is threadedly connected to the PTFE outer housing.

5. A pressure sensor according to claim 1, characterized in that, It further includes a PFA film, and the PFA film is placed on the top of the housing.

6. A pressure sensor according to claim 5, characterized in that, A sealing ring is further provided between the PFA film and the measurement through-hole.

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