Spectral absorption type gas concentration detection device

Abstract

The utility model provides a spectrum absorption type gas concentration detection device. The spectrum absorption type gas concentration detection device comprises a spectrum transmitting module, a spectrum receiving module and a gas chamber, the air chamber is provided with an incident end and an emergent end which are oppositely arranged, the incident end is connected with the spectrum emission module through a first quick connection assembly, and the emergent end is connected with the spectrum receiving module through a second quick connection assembly. When the air chamber of the device is polluted and needs to be shut down for maintenance, the first quick connection assembly and the second quick connection assembly can be disassembled to quickly disconnect the transmitting end and the spectrum transmitting module and the receiving end and the spectrum receiving module, so that the overall replacement of the air chamber is quickly realized; therefore, the problems of production delay and high overall replacement cost of the device caused by long-time shutdown and maintenance due to low replacement efficiency of the air chamber are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a spectral absorption type gas concentration detection device. Background Art

[0002] In the field of semiconductor manufacturing, semiconductor machines need to work around the clock to maximize production efficiency. With the passage of production process time, deposits of products will be formed on semiconductor machines, and thus a product film layer will accumulate on the inner wall of the chamber. These product film layers must be removed regularly to avoid affecting the quality of the process and further affecting the production efficiency of chip manufacturing.

[0003] The spectral absorption type gas concentration detection device is an analysis device that measures the gas concentration based on the absorption characteristics of gas to light with a specific wavelength, and plays a key role in detecting the concentration of cleaning gas in the chamber of a semiconductor machine. The chamber cleaning process will be accompanied by the generation of various corrosive gases. For example, titanium tetrafluoride, silicon tetrafluoride, tungsten hexafluoride or molybdenum hexafluoride, etc. The spectral absorption type gas concentration detection device can accurately detect the concentration of such gases and provide real-time feedback on the film layer removal situation during the cleaning process. When the gas concentration generated by the cleaning process drops to a preset value, the cleaning end point is reached, avoiding over-cleaning that may damage the inner wall of the machine chamber or incomplete cleaning that still affects the process.

[0004] In the existing spectral absorption gas concentration detection device, due to the long-term contact of the gas chamber with corrosive gases, deposits and corrosion will occur on the inner wall of the pipeline of the gas chamber and the surface of the optical lens group at the transmission window. Therefore, after the device is used for a period of time, it will hinder the effective propagation of the detection light or cause the gas adsorption phenomenon on the inner wall of the pipeline, resulting in inaccurate gas concentration detection.

[0005] There are two existing solutions. One is to replace the whole spectral absorption type gas concentration detection device, which has a high cost; the other is to disassemble the whole spectral absorption type gas concentration detection device and replace the gas chamber component separately. However, due to the structural limitations of the existing spectral absorption type gas concentration detection device, the disassembly process is complex and lengthy, and thus the gas chamber replacement efficiency is extremely low. Summary of the Utility Model

[0006] In view of the above-mentioned disadvantages of the prior art, the purpose of the present utility model is to provide a spectral absorption type gas concentration detection device, which is used to solve the problems of low gas chamber replacement efficiency and high overall replacement cost of the spectral absorption type gas concentration detection device in the prior art.

[0007] The present utility model provides a spectral absorption type gas concentration detection device, including: a spectral emission module, a spectral reception module and a gas chamber;

[0008] The gas chamber has an incident end and an exit end which are oppositely arranged. The incident end is connected to the spectral emission module through a first quick-connect component, and the exit end is connected to the spectral reception module through a second quick-connect component;

[0009] The first quick-connect component includes a first adapter plate and a second adapter plate. The first adapter plate is connected to the incident end, and the second adapter plate is connected to the spectral emission module; the first adapter plate and the second adapter plate are detachably connected;

[0010] The second quick-connect component includes a third adapter plate and a fourth adapter plate. The third adapter plate is connected to the exit end, and the fourth adapter plate is connected to the spectral reception module; the third adapter plate and the fourth adapter plate are detachably connected;

[0011] The spectral emission module is configured to emit detection light. After the detection light enters the gas chamber through the incident end and passes through the gas chamber, it is transmitted to the spectral reception module through the exit end.

[0012] In an embodiment of the present invention, the first quick-connect component further includes a first fastener. The first adapter plate and the second adapter plate are connected by a plurality of the first fasteners; the first fastener passes through the first adapter plate and is threadedly connected to the second adapter plate;

[0013] Or,

[0014] The first adapter plate has a first threaded portion, and the second adapter plate has a second threaded portion. The first threaded portion is threadedly connected to the second threaded portion;

[0015] Or,

[0016] The first quick-connect component further includes a first connection component; the first adapter plate has a first engagement port, and the second adapter plate has a second engagement port. After the first engagement port and the second engagement port are docked, they are fixedly connected through the first connection component.

[0017] In an embodiment of the present invention, the second quick-connect component further includes a second fastener; the third adapter plate and the fourth adapter plate are connected by a plurality of the second fasteners; the second fastener passes through the third adapter plate and is threadedly connected to the fourth adapter plate;

[0018] Or,

[0019] The third adapter plate has a third threaded portion, and the fourth adapter plate has a fourth threaded portion. The third threaded portion is threadedly connected to the fourth threaded portion;

[0020] Or,

[0021] The second quick-connect component further includes a second connection component; the third adapter plate has a third engagement port, the fourth adapter plate has a fourth engagement port, and after the third engagement port and the fourth engagement port are docked, they are fixedly connected through the second connection component.

[0022] In an embodiment of the present invention, a transmission window is respectively provided at the incident end and the exit end, and an optical lens group is provided at each transmission window; a sealing portion is provided between the optical lens group and the transmission window.

[0023] In an embodiment of the present invention, the sealing portion includes:

[0024] A glue filling groove is opened on the end surfaces of the incident end and the exit end, and the glue filling groove is opened along the periphery of the optical lens group for filling sealant;

[0025] Or,

[0026] A sealing ring is provided between the optical lens group and the end surface of the incident end or the end surface of the exit end.

[0027] In an embodiment of the present invention, the opening of the glue filling groove faces the optical lens group, and the edge of the optical lens group extends to the opening of the glue filling groove;

[0028] One side of the glue filling groove opposite to the optical lens group cooperates to enclose a glue filling space;

[0029] One side wall of the glue filling groove opposite to the side edge of the optical lens group cooperates with the side edge of the optical lens group to form a glue injection port.

[0030] In an embodiment of the present invention, the sealing portion further includes an overflow glue groove, and the overflow glue groove is opened on the end surfaces of the incident end and the exit end and is located between the glue filling groove and the transmission window for accommodating excess sealant during the bonding process of the optical lens group to the incident end or the exit end.

[0031] In an embodiment of the present invention, the spectral absorption type gas concentration detection device further includes:

[0032] A collimating component is provided on the second adapter plate and is oppositely arranged with the incident end for converting the divergent light beam emitted by the spectral emission module into a parallel light beam;

[0033] A focusing component is provided on the fourth adapter plate and is oppositely arranged with the exit end for focusing the parallel light beam emitted by the exit end to be received by the spectral receiving module.

[0034] In an embodiment of the present invention, the collimating component includes a first lens group and a first limiting member;

[0035] On one side of the second adapter board opposite to the first adapter board, a first lens group mounting hole is provided. The first lens group is arranged in the first lens group mounting hole, and the first limiting member is threadedly connected to the first lens group mounting hole and abuts against the edge of the first lens group;

[0036] The focusing assembly includes a second lens group and a second limiting member;

[0037] On one side of the fourth adapter board opposite to the third adapter board, a second lens group mounting hole is provided. The second lens group is arranged in the second lens group mounting hole, and the second limiting member is threadedly connected to the second lens group mounting hole and abuts against the edge of the second lens group.

[0038] In one embodiment of the present utility model, an air inlet pipe and an air outlet pipe are provided on the side wall of the air chamber, and the air inlet pipe and the air outlet pipe are arranged at intervals along the axial direction of the air chamber;

[0039] The air chamber is communicated with the air path pipeline of the semiconductor device through the air inlet pipe and the air outlet pipe;

[0040] The corrosive gas generated by the semiconductor device flows along the air path pipeline, enters the air chamber through the air inlet pipe, and then is discharged into the air path pipeline through the air outlet pipe.

[0041] In one embodiment of the present utility model, the air inlet pipe and the air outlet pipe are connected to the air path pipeline through flanges;

[0042] The type of the flange is a CF flange, a KF flange or a VCR flange, and the air path pipeline is a tail exhaust pipeline.

[0043] In one embodiment of the present utility model, the pipe diameters of the air inlet pipe and the air outlet pipe both range from 8 mm to 100 mm.

[0044] The beneficial effects of the present utility model are as follows: By providing the first quick-connect component at the incident end of the air chamber and the second quick-connect component at the exit end of the air chamber in the present utility model. When the air chamber of the device is contaminated and needs to be shut down for maintenance, the connection between the emission end and the spectral emission module, and the connection between the receiving end and the spectral receiving module can be quickly disconnected by removing the first quick-connect component and the second quick-connect component, so as to quickly realize the overall replacement of the air chamber, thereby avoiding the problems of production delay caused by low air chamber replacement efficiency and long-term shutdown for maintenance, and high cost of overall replacement of the device. Description of the Drawings

[0045] Figure 1Schematic diagram of the first quick connection structure of the spectral absorption type gas concentration detection device according to the embodiment of the present utility model;

[0046] Figure 2 Schematic diagram of the second quick connection structure of the spectral absorption type gas concentration detection device according to the embodiment of the present utility model;

[0047] Figure 3 Schematic diagram of the third quick connection structure of the spectral absorption type gas concentration detection device according to the embodiment of the present utility model;

[0048] Figure 4 Exploded view of the third quick connection structure according to the embodiment of the present utility model;

[0049] Figure 5 Half-sectional view of the gas chamber according to the embodiment of the present utility model;

[0050] Figure 6 For Figure 5 Enlarged view of part A in

[0051] Figure 7 Exploded view of a sealing structure according to the embodiment of the present utility model;

[0052] Figure 8 Schematic diagram of another sealing structure according to the embodiment of the present utility model;

[0053] Figure 9 For Figure 8 Enlarged view of part B in

[0054] Figure 10 Half-sectional view of the overall structure of the spectral absorption type gas concentration detection device according to the embodiment of the present utility model;

[0055] Figure 11 Schematic diagram of the connection between the spectral absorption type gas concentration detection device and the semiconductor machine according to the embodiment of the present utility model.

[0056] Reference numerals:

[0057] 1 - Spectral emission module; 2 - Spectral reception module; 3 - Gas chamber;

[0058] 31 - Inlet end; 311 - First adapter plate; 312 - Second adapter plate; 32 - Outlet end; 321 - Third adapter plate; 322 - Fourth adapter plate; 33 - Inlet pipe; 34 - Outlet pipe;

[0059] 41 - First fastener; 42 - Second fastener;

[0060] 51 - First threaded portion; 511 - Inlet hole; 53 - Third threaded portion; 531 - Fourth threaded portion; 54 - Second socket cavity;

[0061] 61 - First connection component; 611 - First fastening part; 6111 - First clamping groove; 612 - Second fastening part; 6121 - Second clamping groove; 613 - First locking component; 6131 - First locking piece; 6132 - Second locking piece; 617 - First sealing washer; 618 - First joining port; 619 - Second joining port;

[0062] 62 - Second connection component; 621 - Third fastening part; 6211 - Third clamping groove; 622 - Fourth fastening part; 6221 - Fourth clamping groove; 623 - Second locking component; 6231 - Third locking piece; 6232 - Fourth locking piece; 627 - Second sealing washer; 628 - Third joining port; 629 - Fourth joining port;

[0063] 7 - Transmission window; 71 - Optical lens; 711 - First gluing part; 712 - Second gluing part; 72 - Glue injection groove; 721 - Glue injection port; 722 - Inner side wall; 723 - Outer side wall; 724 - Groove bottom; 725 - Excess glue groove; 73 - Fitting washer; 731 - Fitting washer body; 732 - First fitting flange; 733 - Second fitting flange; 74 - Sealing ring;

[0064] 81 - First lens group; 811 - First lens group mounting hole; 812 - First limiting part; 82 - Second lens group; 821 - Second lens group mounting hole; 822 - Second limiting part;

[0065] 9 - Gas pipeline; 91 - First branch pipe; 92 - Second branch pipe. Detailed implementation mode

[0066] To make the objectives, technical solutions and advantages of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below in conjunction with the drawings of the present utility model. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present utility model. Unless otherwise defined, the technical terms or scientific terms used herein shall have the ordinary meanings understood by those of ordinary skill in the field to which the present utility model belongs. The words such as "including" used herein mean that the elements or objects appearing before this word cover the elements or objects listed after this word and their equivalents, without excluding other elements or objects. The "connection" described herein may be a direct connection or an indirect connection, that is, a connection through an intermediate object, unless otherwise specified.

[0067] Please refer to Figure 1 , the present utility model provides a spectral absorption type gas concentration detection device, including: a spectral emission module 1, a spectral reception module 2 and a gas chamber 3.

[0068] The gas chamber 3 has an incident end 31 and an exit end 32 which are oppositely arranged. The incident end 31 is connected to the spectral emission module 1 through a first quick-connect component, and the exit end 32 is connected to the spectral reception module 2 through a second quick-connect component. Specifically, in this embodiment, the gas chamber 3 is a tubular gas chamber, specifically a tubular gas chamber with a circular cross-section.

[0069] The first quick-connect component includes a first adapter plate 311 and a second adapter plate 312. The first adapter plate 311 is bolted to the incident end 31, and the second adapter plate 312 is connected to the spectral emission module 1. The first adapter plate 311 and the second adapter plate 312 are detachably connected. Specifically, the first adapter plate 311 and the second adapter plate 312 are bolted together. The second quick-connect component includes a third adapter plate 321 and a fourth adapter plate 322. The third adapter plate 321 is bolted to the exit end 32, and the fourth adapter plate 322 is connected to the spectral reception module 2. The third adapter plate 321 and the fourth adapter plate 322 are detachably connected. Specifically, the third adapter plate 321 and the fourth adapter plate 322 are bolted together.

[0070] The spectral emission module 1 is configured to emit detection light. After the detection light enters the gas chamber 3 through the incident end 31 and passes through the gas chamber 3, it is transmitted to the spectral reception module 2 by the exit end 32. The detection light can be ultraviolet light, near-infrared light or infrared light, and can be specifically selected according to the type of gas to be detected and the detection requirements.

[0071] In this embodiment, by providing a first quick-connect component at the incident end 31 of the gas chamber 3 and a second quick-connect component at the exit end 32 of the gas chamber 3, when the gas chamber 3 cannot be used continuously due to contamination and needs to be shut down for maintenance, the connection between the emission end and the spectral emission module 1, and the connection between the reception end and the spectral reception module 2 can be quickly disconnected by removing the first quick-connect component and the second quick-connect component, so as to quickly replace the entire gas chamber 3, avoiding production delays caused by low gas chamber replacement efficiency and long-term shutdown for maintenance.

[0072] Furthermore, the first adapter plate 311, the second adapter plate 312, the third adapter plate 321 and the fourth adapter plate 322 are all heat-insulating plates, which are processed from materials with high heat-insulating performance, and the heat-insulating material is polyether ether ketone (peek). The first adapter plate 311 and the second adapter plate 312 form a double-layer heat-insulating component at the emission end, and the third adapter plate 321 and the fourth adapter plate 322 form a double-layer heat-insulating component at the exit end 32. Using double-sided heat insulation can effectively block the heat transfer between the gas chamber 3 and the spectral emission module 1 and the spectral reception module 2, and further avoid the temperature of the gas chamber 3 affecting the normal operation of the spectral emission module 1 and the spectral reception module 2.

[0073] Please refer to Figure 1, in this embodiment, the first quick-connect component further includes a first fastener 41. The first adapter plate 311 and the second adapter plate 312 are connected by four first fasteners 41. The first fastener 41 passes through the first adapter plate 311 and is threadedly connected to the second adapter plate 312. Further, in this embodiment, the first fastener 41 is a bolt, the first adapter plate 311 is a square plate, and each position near the four corners of the square plate is provided with a first through hole for the bolt to pass through. At the position corresponding to the first through hole on the second adapter plate 312, a first threaded blind hole is provided. When connecting, the threaded end of the bolt passes through the first through hole, and then the bolt is rotated so that the threaded end of the bolt is threadedly connected to the first threaded blind hole. In this embodiment, the bolt connection structure is simple, the design and processing cost is low, and the bolt is easy to obtain as a standard part, which is a low-cost and high-efficiency connection method. In addition, in this embodiment, the penetration connection method of the bolt makes the end part of the bolt that is convenient to disassemble remain outside, which is convenient for the disassembly and assembly of the bolt.

[0074] Please refer to Figure 2 , in some embodiments, the first adapter plate 311 has a first threaded portion 51, and the second adapter plate 312 has a second threaded portion (not shown). The first threaded portion 51 is threadedly connected to the second threaded portion. Specifically, the first threaded portion 51 is provided on the surface of the first adapter plate 311 opposite to the second adapter plate 312 and is coaxially arranged with the tubular air chamber. The first threaded portion 51 is an external thread. The second adapter plate 312 has a first socket cavity (not shown), the second threaded portion is an internal thread, and is provided on the inner surface of the first socket cavity. Further, an incident hole 511 is provided at the center of the first threaded portion 51. The incident hole 511 extends along the central axis of the threaded portion and penetrates through the first adapter plate 311 to form a channel for detecting light.

[0075] In this embodiment, through the direct threaded connection method, it is not only convenient for installation and disassembly, but also can ensure the coaxiality of the spectral emission module 1 and the tubular air chamber by the coaxial characteristic of the first threaded portion 51 and the second threaded portion during installation.

[0076] Please refer to Figure 3 , in some other embodiments, the first quick-connect component further includes a first connection component 61. The first adapter plate 311 has a first engagement port 618, and the second adapter plate 312 has a second engagement port 619. After the first engagement port 618 and the second engagement port 619 are docked, they are fixedly connected by the first connection component 61. Further, the first engagement port 618 has a first engagement surface extending radially, and the second engagement port 619 has a second engagement surface extending radially. After the first engagement surface and the second engagement surface are engaged with each other, a first engagement portion is formed.

[0077] Please refer to Figure 4, the first connection component 61 includes a first fastening member 611, a second fastening member 612, and a first locking component 613. The first fastening member 611 has a first clamping groove 6111, and the second fastening member 612 has a second clamping groove 6121. The first clamping groove 6111 and the second clamping groove 6121 are joined together to form a clamping groove structure for accommodating the first joint portion, and the locking of the first locking component 613 can effectively restrict the separation of the first joint surface and the second joint surface, thereby ensuring the connection reliability between the first joint port 618 and the second joint port 619.

[0078] Specifically, the first locking component 613 includes a first locking member 6131 and a second locking member 6132. The first locking member 6131 is disposed on the first fastening member 611 and is detachably connected to the second fastening member 612. The second locking member 6132 is disposed on the second fastening member 612 and is detachably connected to the first fastening member 611.

[0079] In this embodiment, both the first locking member 6131 and the second locking member 6132 can be locking nuts. The first fastening member 611 and the second fastening member 612 are provided with threaded holes corresponding to the first locking member 6131 and the second locking member 6132, and the detachable connection between the first fastening member 611 and the second fastening member 612 is achieved by means of threaded cooperation.

[0080] Furthermore, a first sealing washer 617 is provided between the first joint port 618 and the second joint port 619. Both sides of the first sealing washer 617 cooperate with the first joint port 618 and the second joint port 619 to achieve a sealing effect. The first sealing washer 617 is made of rubber. In this embodiment, the use of a clamp connection structure is more rapid and efficient compared to a threaded connection structure and a bolt connection structure.

[0081] In some embodiments, please refer to Figure 1 , the second quick-connect component further includes a second fastener 42. The third adapter plate 321 and the fourth adapter plate 322 are connected by four second fasteners 42. The second fastener 42 passes through the third adapter plate 321 and is threadedly connected to the fourth adapter plate 322. Further, in this embodiment, the second fastener 42 is a bolt, the third adapter plate 321 is a square plate, and second through holes for the bolt to pass through are provided at positions near the four corners of the square plate. Second threaded blind holes are provided at positions corresponding to the second through holes on the fourth adapter plate 322. When connecting, the threaded end of the bolt is passed through the second through hole, and then the bolt is rotated so that the threaded end of the bolt is threadedly connected to the second threaded blind hole. In this embodiment, the bolt connection structure is simple, the design and processing cost is low, and the bolt is easy to obtain as a standard part, which is a low-cost and high-efficiency connection method; in addition, in this embodiment, the penetration connection method of the bolt makes the end part of the bolt that is convenient for disassembly remain outside, facilitating the disassembly and assembly of the bolt.

[0082] Please refer to Figure 2 In some embodiments, the third adapter plate 321 has a third threaded portion 53, and the fourth adapter plate 322 has a fourth threaded portion 531. The third threaded portion 53 is threadedly connected to the fourth threaded portion 531. Further, the third threaded portion 53 is disposed on a surface of the third adapter plate 321 opposite to the fourth adapter plate 322 and is coaxially disposed with the tubular air chamber. The third threaded portion 53 is an external thread. The fourth adapter plate 322 has a second socket cavity 54, and the fourth threaded portion 531 is an internal thread and is disposed on the inner surface of the second socket cavity 54. Further still, an emission hole (not shown) is provided at the center of the third threaded portion 53. The emission hole extends along the central axis of the threaded portion and penetrates through the third adapter plate 321 to form a channel for the detection light.

[0083] In this embodiment, the method of directly connecting by threads is not only convenient for installation and disassembly, but also can ensure the coaxiality of the spectral emission module 1 and the tubular air chamber by the coaxial characteristic of the third threaded portion 53 and the fourth threaded portion 531 during installation.

[0084] Please refer to Figure 3 In other embodiments, the second quick-connecting component further includes a second connecting component 62. The third adapter plate 321 has a third engaging port 628, and the fourth adapter plate 322 has a fourth engaging port 629. After the third engaging port 628 and the fourth engaging port 629 are docked, they are fixedly connected by the second connecting component 62. Further, the third engaging port 628 has a radially extending third engaging surface, and the fourth engaging port 629 has a radially extending fourth engaging surface. The third engaging surface and the fourth engaging surface form a second engaging portion after being engaged with each other.

[0085] Please refer to Figure 4 The second connecting component 62 includes a third fastening member 621, a fourth fastening member 622, and a second locking component 623. The third fastening member 621 has a third engaging groove 6211, and the fourth fastening member 622 has a fourth engaging groove 6221. The third engaging groove 6211 and the fourth engaging groove 6221 are joined together to form a slot structure for accommodating the second engaging portion, and the locking of the second locking component 623 can effectively restrict the separation of the third engaging surface and the fourth engaging surface, thereby ensuring the connection reliability of the third engaging port 628 and the fourth engaging port 629.

[0086] Specifically, the second locking component 623 includes a third locking member 6231 and a fourth locking member 6232. The third locking member 6231 is disposed on the third fastening member 621 and can be detachably connected to the fourth fastening member 622. The fourth locking member 6232 is disposed on the fourth fastening member 622 and can be detachably connected to the third fastening member 621.

[0087] In this embodiment, the third locking member 6231 and the fourth locking member 6232 can also be locking nuts, and the third fastening member 621 and the fourth fastening member 622 are provided with threaded holes corresponding to the third locking member 6231 and the fourth locking member 6232, so that the third fastening member 621 and the fourth fastening member 622 can be detachably connected through threaded cooperation.

[0088] Furthermore, a second sealing gasket 627 is disposed between the third and fourth connection ports 628 and 629. The second sealing gasket 627 engages with the third and fourth connection ports 628 and 629 on both sides to provide a seal. The second sealing gasket 627 is made of rubber. In this embodiment, the clamp connection structure is faster and more efficient than threaded and bolted connections.

[0089] In some embodiments, the first quick-connect assembly and the second quick-connect assembly used by the transmitter and the receiver have the same structure, such as Figure 1 , Figure 2 and Figure 3 shown. Figure 1 In the embodiment, the first quick-connect assembly and the second quick-connect assembly both adopt the bolt connection structure of the aforementioned embodiment; Figure 2 In the embodiment, the first quick-connect assembly and the second quick-connect assembly both adopt the threaded connection structure of the aforementioned embodiment; Figure 3 In the embodiment, the first quick-connect assembly and the second quick-connect assembly both adopt the clamp connection structure of the aforementioned embodiment;

[0090] In some embodiments, the first quick-connect assembly at the transmitter and the second quick-connect assembly at the receiver have different structures:

[0091] For example, the first quick-connect assembly at the transmitting end adopts a bolt connection structure, and the second quick-connect assembly at the receiving end adopts a threaded connection structure; conversely, the first quick-connect assembly at the transmitting end adopts a threaded connection structure, and the second quick-connect assembly at the receiving end adopts a bolt connection structure.

[0092] For example, the first quick-connect assembly at the transmitting end adopts a bolt connection structure, and the second quick-connect assembly at the receiving end adopts a clamp connection structure; conversely, the first quick-connect assembly at the transmitting end adopts a clamp connection structure, and the second quick-connect assembly at the receiving end adopts a bolt connection structure.

[0093] For another example, the first quick-connect assembly at the transmitting end adopts a threaded connection structure, and the second quick-connect assembly at the receiving end adopts a clamp connection structure; conversely, the first quick-connect assembly at the transmitting end adopts a clamp connection structure, and the second quick-connect assembly at the receiving end adopts a threaded connection structure.

[0094] The specific structures of the above-mentioned bolt connection structure, threaded connection structure and clamp connection structure have been described in detail above and will not be repeated here.

[0095] See alsoFigure 5 , in some embodiments, the incident end 31 and the exit end 32 are respectively provided with a transmission window 7, and an optical lens group is provided at each transmission window 7; a sealing portion is provided between the optical lens group and the transmission window 7. Further, the optical lens group includes an optical lens 71, and the optical lens 71 is a highly transmissive flat mirror. The optical lens 71 is used to block the projection windows of the incident end 31 and the exit end 32, and at the same time facilitate the detection light to pass through and enter the gas chamber 3. The sealing portion is beneficial to improving the sealing performance between the optical lens 71 and the transmission window 7 to prevent the gas to be detected from leaking.

[0096] Please refer to Figure 6 , in some embodiments, the sealing portion includes a potting groove 72, the potting groove 72 is opened on the end faces of the incident end 31 and the exit end 32, and the potting groove 72 is opened along the periphery of the optical lens 71 for filling sealant. Further, the opening of the potting groove 72 faces the optical lens 71, and the edge of the optical lens 71 extends to the opening of the potting groove 72; the side of the potting groove 72 opposite to the optical lens 71 cooperates to enclose a potting space; the potting space is used to accommodate the sealant. The side wall of the potting groove 72 opposite to the side edge of the optical lens group cooperates with the side edge of the optical lens group to form a glue injection port 721.

[0097] The optical lens 71 has a gluing portion, and the gluing portion and the sealant are bonded to each other. The gluing portion includes a first gluing portion 711 and a second gluing portion 712. A first gluing portion 711 is formed on the side edge of the optical lens 71 opposite to the opening of the potting groove 72, and a second gluing portion 712 is formed on the side of the optical lens 71.

[0098] The potting groove 72 includes an inner side wall 722, an outer side wall 723 and a groove bottom 724. The outer side wall 723 is perpendicular to the groove bottom 724, and the included angle between the inner side wall 722 and the groove bottom 724 is an obtuse angle to increase the area of the first gluing portion 711, thereby increasing the contact area between the optical lens 71 and the sealant in the sealing groove and improving the sealing effect.

[0099] Please refer to Figure 6 , in some embodiments, the sealing portion further includes an overflow groove 725, the overflow groove 725 is opened on the end faces of the incident end 31 and the exit end 32, and is located between the potting groove 72 and the transmission window 7 for accommodating the excess sealant during the bonding process of the optical lens 71 and the incident end 31 or the exit end 32, and preventing the sealant from entering the gas chamber 3 and causing pollution.

[0100] Please refer to Figure 7 , in some embodiments, the sealing portion includes a sealing ring 74, which is arranged between the optical lens 71 and the end face of the incident end 31 or the exit end 32. Further, a sealing groove for installing the sealing ring 74 is opened on the end face of the incident end 31 or the exit end 32, and the sealing ring 74 is embedded in the sealing groove.

[0101] Please refer to Figure 8 and Figure 9 In some embodiments, the sealing portion includes a fitting washer 73 disposed between the transmissive window 7 and the optical lens 71. The fitting washer 73 includes an integrally formed fitting washer 73 body, a first fitting flange 732, and a second fitting flange 733. The first fitting flange 732 is disposed along the edge of the central hole of the fitting washer 73 body, and the second fitting flange 733 is disposed along the outer edge of the fitting washer 73 body. The first fitting flange 732 is fitted into the transmissive window 7, and the second fitting flange 733 defines a mounting groove for mounting the optical lens 71, and the optical lens 71 is fitted into the mounting groove. The arrangement of the first fitting flange 732 and the second fitting flange 733 effectively improves the sealing performance and structural compactness among the transmissive window 7, the fitting washer 73, and the optical lens 71.

[0102] In this embodiment, the fitting washer 73 is made of Kovar alloy, and the fitting washer 73 is fixedly connected to the optical lens 71 and the transmissive window 7 by vacuum brazing. Kovar alloy is an iron-nickel-cobalt constant-expansion sealing alloy, which has a linear expansion coefficient similar to that of borosilicate hard glass at 20°C - 450°C, ensuring that the joints with materials such as hard glass or ceramics will not crack or loosen due to excessive expansion differences during temperature changes, thereby improving the reliability and stability of the sealed components.

[0103] Please refer to FIG. 10. In some embodiments, the spectral absorption type gas concentration detection device further includes a collimating assembly and a focusing assembly. The collimating assembly is disposed on the second adapter plate 312, opposite to the incident end 31, and is used to convert the divergent light beam emitted by the spectral emission module 1 into a parallel light beam; the focusing assembly is disposed on the fourth adapter plate 322, opposite to the exit end 32, and is used to focus the parallel light beam emitted by the exit end 32 to be received by the spectral receiving module 2. In this embodiment, by introducing a collimation system composed of a collimating assembly and a focusing assembly, the divergent light beam of the incident light is converted into a highly parallel light beam (divergence angle < ±0.5°), greatly reducing the sensitivity of the optical path alignment to the installation position deviation of the gas chamber 3, and controlling the energy loss within ±5%.

[0104] Please refer to FIG. 10. Further, the collimating assembly includes a first lens group 81 and a first limiting member 812; a first lens group 81 mounting hole is formed on the surface of the second adapter plate 312 opposite to the first adapter plate 311. The first lens group 81 is disposed in the first lens group 81 mounting hole, and the first limiting member 812 is threadedly connected to the first lens group 81 mounting hole and abuts against the edge of the first lens group 81 to limit the first lens group 81.

[0105] The focusing component includes a second lens group 82 and a second limiting member 822; on the side of the fourth adapter plate 322 opposite to the third adapter plate 321, a second lens mounting hole is provided, the second lens group 82 is disposed in the second lens mounting hole, and the second limiting member 822 is threadedly connected to the second lens mounting hole and abuts against the edge of the second lens.

[0106] In this embodiment, both the first lens group 81 and the second lens group 82 adopt aspherical lenses. Specifically, the first lens group 81 includes a first convex aspherical lens, and the second lens includes a second convex aspherical lens. The surface curvature of the convex aspherical lens varies non-uniformly at different positions. Compared with the traditional spherical convex lens (the surface is a part of a sphere with a constant curvature), it has a stronger ability to correct aberration. Through curvature optimization, the aspherical lens can greatly reduce the refraction deviation of marginal rays and improve the light convergence degree.

[0107] In some embodiments, the first lens group 81 includes multiple first spherical convex lenses, and the second lens group 82 includes multiple second spherical convex lenses.

[0108] Please refer to Figure 11 , in some embodiments, the side wall of the air chamber 3 is provided with an intake pipe 33 and an exhaust pipe 34, and the intake pipe 33 and the exhaust pipe 34 are arranged at intervals along the axial direction of the air chamber 3; the air chamber 3 is communicated with the gas pipeline 9 of the semiconductor device through the intake pipe 33 and the exhaust pipe 34, and the gas pipeline 9 is a tail exhaust pipeline in some specific embodiments of the present application. The corrosive gas generated by the semiconductor device flows along the gas pipeline 9, enters the air chamber 3 through the intake pipe 33, and then is discharged into the gas pipeline through the exhaust pipe 34. Specifically, the gas pipeline 9 has a first branch pipe 91 and a second branch pipe 92, the intake pipe 33 is communicated with the first branch pipe 91, and the exhaust pipe 34 is communicated with the second branch pipe 92.

[0109] Please refer to Figure 11 , in some embodiments, the intake pipe 33 and the exhaust pipe 34 are connected to the gas pipeline 9 through flanges. Among them, the types of flanges are CF flange (Conflat Flang), KF flange (ISO-KF), or VCR flange (VacuumCoupling Radius Seal). The CF flange is a flange connection used in ultra-high vacuum, which is a metal static seal and can withstand high-temperature baking. ISO-KF is a quick-release flange applied in a vacuum system. It consists of the following components: two symmetrically distributed KF flanges, an O-Ring, a centering bracket, and a clamp. Without using other tools, as long as the wing nut is simply turned by hand, the connection can be loosened or tightened. CF flange, ISO-KF, and VCR are all products in the prior art and are well-known to those skilled in the art, so they will not be elaborated here.

[0110] In some embodiments, the pipe diameters of the intake pipe 33 and the outlet pipe 34 both range from 8 mm to 100 mm. The pipe diameters of the intake pipe 33 and the outlet pipe 34 are 8 mm, 25 mm or 100 mm in some specific embodiments of the present application to meet the dimensional requirements of the semiconductor device for pipe installation.

[0111] In summary, in the present utility model, the first quick-connect component is provided at the incident end of the air chamber, and the second quick-connect component is provided at the exit end of the air chamber. When the air chamber of the device is deposited or corroded and needs to be shut down for maintenance, the connection between the emission end and the spectral emission module, and the connection between the receiving end and the spectral receiving module can be quickly disconnected by removing the first quick-connect component and the second quick-connect component, so as to quickly replace the entire air chamber, thereby avoiding the problems of production delay caused by long-term shutdown for maintenance due to low air chamber replacement efficiency and high cost of overall replacement of the device.

[0112] As described above, the above is only the specific implementation manner of the embodiments of the present application, but the protection scope of the embodiments of the present application is not limited thereto. Any changes or substitutions within the technical scope disclosed in the embodiments of the present application should be covered by the protection scope of the embodiments of the present application. Therefore, the protection scope of the embodiments of the present application shall be subject to the protection scope of the claims.

Claims

1. A spectral absorption type gas concentration detection device, characterized in that, Comprising: A spectral emission module, a spectral reception module and a gas chamber; The gas chamber has an incident end and an exit end which are oppositely arranged. The incident end is connected to the spectral emission module through a first quick-connection component, and the exit end is connected to the spectral reception module through a second quick-connection component; The first quick-connection component includes a first adapter plate and a second adapter plate. The first adapter plate is connected to the incident end, and the second adapter plate is connected to the spectral emission module; the first adapter plate and the second adapter plate are detachably connected; The second quick-connection component includes a third adapter plate and a fourth adapter plate. The third adapter plate is connected to the exit end, and the fourth adapter plate is connected to the spectral reception module; the third adapter plate and the fourth adapter plate are detachably connected; The spectral emission module is configured to emit detection light. After the detection light enters the gas chamber through the incident end and passes through the gas chamber, it is transmitted to the spectral reception module by the exit end.

2. The spectral absorption type gas concentration detection device according to claim 1, characterized in that: The first quick-connection component further includes a first fastener. The first adapter plate and the second adapter plate are connected by a plurality of the first fasteners; the first fastener passes through the first adapter plate and is threadedly connected to the second adapter plate; Or, The first adapter plate has a first threaded portion, and the second adapter plate has a second threaded portion. The first threaded portion is threadedly connected to the second threaded portion; Or, The first quick-connection component further includes a first connection component; the first adapter plate has a first engagement port, the second adapter plate has a second engagement port, and after the first engagement port and the second engagement port are docked, they are fixedly connected through the first connection component.

3. The spectral absorption type gas concentration detection device according to claim 2, characterized in that: The second quick-connection component further includes a second fastener. The third adapter plate and the fourth adapter plate are connected by a plurality of the second fasteners; the second fastener passes through the third adapter plate and is threadedly connected to the fourth adapter plate; Or, The third adapter plate has a third threaded portion, and the fourth adapter plate has a fourth threaded portion. The third threaded portion is threadedly connected to the fourth threaded portion; Or, The second quick-connection component further includes a second connection component; the third adapter plate has a third engagement port, the fourth adapter plate has a fourth engagement port, and after the third engagement port and the fourth engagement port are docked, they are fixedly connected through the second connection component.

4. The spectral absorption type gas concentration detection device according to claim 1, characterized in that: Transmission windows are respectively provided at the incident end and the exit end, and an optical lens group is provided at each transmission window; a sealing portion is provided between the optical lens group and the transmission window.

5. The spectral absorption type gas concentration detection device according to claim 4, characterized in that: The sealing portion includes: A glue injection groove, which is opened on the end faces of the incident end and the exit end, and the glue injection groove is opened along the periphery of the optical lens group for filling sealing glue; Or A sealing ring, which is arranged between the optical lens group and the end face of the incident end or the end face of the exit end.

6. The spectral absorption type gas concentration detection device according to claim 5, wherein: The opening of the potting groove faces the optical lens group, and the edge of the optical lens group extends to the opening of the potting groove; One side of the potting groove opposite to the optical lens group cooperates to enclose a potting space; One side wall of the potting groove opposite to the side edge of the optical lens group and the side edge of the optical lens group cooperate to form a glue injection port.

7. The spectral absorption type gas concentration detection device according to claim 5, characterized in that: The sealing part further includes an overflow groove, which is opened on the end surfaces of the incident end and the exit end and is located between the potting groove and the transmission window, and is used to accommodate excess sealing glue during the bonding process of the optical lens group with the incident end or the exit end.

8. The spectral absorption type gas concentration detection device according to claim 1, characterized in that: It further includes: A collimating component, arranged on the second adapter plate and opposite to the incident end, for converting the divergent light beam emitted by the spectral emission module into a parallel light beam; A focusing component, arranged on the fourth adapter plate and opposite to the exit end, for focusing the parallel light beam emitted by the exit end so as to be received by the spectral receiving module.

9. The spectral absorption type gas concentration detection device according to claim 8, wherein: The collimating component includes a first lens group and a first limiting member; A first lens group mounting hole is opened on the surface of the second adapter plate opposite to the first adapter plate, the first lens group is arranged in the first lens group mounting hole, and the first limiting member is threadedly connected to the first lens group mounting hole and abuts against the edge of the first lens group; The focusing component includes a second lens group and a second limiting member; A second lens group mounting hole is opened on the surface of the fourth adapter plate opposite to the third adapter plate, the second lens group is arranged in the second lens group mounting hole, and the second limiting member is threadedly connected to the second lens group mounting hole and abuts against the edge of the second lens group.

10. The spectral absorption type gas concentration detection device according to claim 1, wherein: The side wall of the gas chamber is provided with an inlet pipe and an outlet pipe, and the inlet pipe and the outlet pipe are arranged at intervals along the axial direction of the gas chamber; The gas chamber is communicated with the gas pipeline of the semiconductor device through the inlet pipe and the outlet pipe; The corrosive gas generated by the semiconductor device flows along the gas pipeline, enters the gas chamber through the inlet pipe, and then is discharged into the gas pipeline through the outlet pipe.

11. The spectral absorption type gas concentration detection device according to claim 10, characterized in that: The inlet pipe and the outlet pipe are connected to the gas pipeline through a flange, the type of the flange is a CF flange, a KF flange or a VCR flange, and the gas pipeline is a tail exhaust pipeline.

12. The spectral absorption type gas concentration detection device according to claim 10, wherein: The pipe diameters of the inlet pipe and the outlet pipe both range from 8 mm to 100 mm.

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