Supporting mechanism for annealing device

Abstract

The utility model discloses a supporting mechanism for an annealing device, which comprises a plurality of supporting structures which are arranged in a tray and protrude out of the bottom wall of the tray, and the supporting structures are used for supporting products to be annealed to the bottom wall of the tray in a point contact or surface contact manner, an airflow channel is formed between the bottom wall of the tray and the product to be annealed; the supporting structure comprises suspended arms in a suspended state, and the suspended arms are located in the airflow channel and spaced from the contact surface of the to-be-annealed product and the supporting structure; and the suspension arm exchanges heat with airflow in the airflow channel to prevent heat from being transferred to the contact surface. According to the supporting mechanism, the suspended arm is arranged in the airflow channel, the heat dissipation area of the supporting structure is increased through the suspended arm, the suspended arm can exchange heat with airflow in the airflow channel, heat conducted to a product to be annealed by the supporting structure is reduced, it is guaranteed that all areas of the product to be annealed are evenly heated, and the heat dissipation efficiency is improved. And the qualified rate and the production efficiency of annealed products are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of perovskite crystallization, in particular to a support mechanism for an annealing device. Background Art

[0002] In the related art, the support mechanism adopted in the traditional annealing device is a single-column structure. A substrate is arranged on the support mechanism. The heat on the heating source / heating plate will be directly transmitted to the substrate to be annealed (the substrate coated with perovskite material) at the top through the support mechanism, which will cause the contact position between the support mechanism and the substrate to overheat due to local heat accumulation, and then the crystallization difference of the perovskite film surface will occur, reducing the production qualification rate and production efficiency of perovskite. Summary of the Utility Model

[0003] The utility model aims to at least solve one of the technical problems existing in the prior art. For this reason, an object of the utility model is to provide a support mechanism for an annealing device. According to the support mechanism of the utility model, by arranging the suspension arm in the air flow channel, the suspension arm increases the heat dissipation area of the support structure. The suspension arm can exchange heat with the air flow in the air flow channel, reducing the heat conducted by the support structure to the product to be annealed, ensuring that the areas of the product to be annealed are evenly heated, and improving the qualification rate and production efficiency of the annealed product.

[0004] The support mechanism for an annealing device according to the utility model includes: a tray, a heating cavity is formed in the tray; a support structure, a plurality of the support structures are arranged in the tray and protrude from the bottom wall of the tray. The support structure is used for supporting the product to be annealed in a point-contact or surface-contact manner at a distance from the bottom wall of the tray, and an air flow channel is formed between the bottom wall of the tray and the product to be annealed; the support structure includes a suspension arm in a suspended state, the suspension arm is located in the air flow channel and is spaced from the contact surface between the product to be annealed and the support structure; the suspension arm exchanges heat with the air flow in the air flow channel to prevent heat from being transmitted to the contact surface.

[0005] According to the support mechanism of the utility model, by arranging a plurality of support structures in the tray to space the product to be annealed from the bottom wall of the tray, it effectively prevents the product to be annealed from directly contacting the heat source and causing cracking and wear. The suspension arm is arranged in the air flow channel, and the suspension arm can exchange heat with the air flow in the air flow channel, reducing the heat conducted by the support structure to the product to be annealed, ensuring that the areas of the product to be annealed are evenly heated, and improving the qualification rate and production efficiency of the annealed product.

[0006] According to some embodiments of the present utility model, the support structure includes: a support column, the bottom end of the support column is arranged on the bottom wall of the tray; a support crossbar, a support crossbar is arranged at the top end of the support column, the support crossbar is arranged horizontally, and the support crossbar forms a cantilever; a top support member, the top support member is arranged on the support crossbar, and a support fulcrum for supporting the product to be annealed is formed at the top end of the top support member.

[0007] According to some embodiments of the present utility model, the support crossbar and the support column are detachably arranged, and an assembly gap is formed at the disassembly position between the support crossbar and the support column, and the assembly gap forms a heat blocking channel.

[0008] According to some embodiments of the present utility model, the support mechanism further includes: a heat dissipation member, the heat dissipation member protrudes from the outer wall surface of the support column and is adapted to exchange heat with the air flow in the air flow channel.

[0009] According to some embodiments of the present utility model, the heat dissipation members are configured in plurality and are arranged at intervals along the extending direction of the support column.

[0010] According to some embodiments of the present utility model, the heat dissipation member is configured as a disc-shaped heat dissipation fin.

[0011] According to some embodiments of the present utility model, it further includes: a heat insulation layer, the heat insulation layer is arranged in the assembly gap to prevent the support column from conducting heat to the support crossbar.

[0012] According to some embodiments of the present utility model, the support column includes: a first column and a second column, one end of the first column and one end of the second column are respectively connected to the bottom wall of the tray, the heat dissipation members are respectively arranged on the first column and the second column, and the other end of the first column and the other end of the second column are respectively connected to the support crossbar.

[0013] According to some embodiments of the present utility model, positioning holes are arranged on the support crossbar, positioning protrusions matched with the positioning holes are arranged on the support column, and the positioning holes and the positioning protrusions are detachably connected.

[0014] According to some embodiments of the present utility model, the contact surface between the top support member and the product to be annealed is configured as a curved surface.

[0015] The additional aspects and advantages of the present utility model will be partially given in the following description, partially become obvious from the following description, or be understood through the practice of the present utility model. Description of the Drawings

[0016] The above and / or additional aspects and advantages of the present utility model will become apparent and be readily understood from the following description of embodiments in conjunction with the accompanying drawings, where:

[0017] Figure 1 is a front view of a support structure according to an embodiment of the present utility model;

[0018] Figure 2 is a three-dimensional schematic diagram of a support structure according to an embodiment of the present utility model;

[0019] Figure 3 is a top view of a support mechanism according to an embodiment of the present utility model.

[0020] Reference numerals:

[0021] 100, support mechanism;

[0022] 11, tray; 12, heat dissipation member; 13, support structure;

[0023] 21, first column; 22, second column; 23, support crossbar; 24, top support member; 25, heat insulation layer. Detailed description of the specific embodiment

[0024] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation of the present utility model.

[0025] In the related art, the support mechanism used in the traditional annealing device is a single-column structure. A substrate is provided on the support mechanism, and the heat on the heating source / heating plate will be directly transferred to the top substrate through the support mechanism, which will cause the contact position between the support mechanism and the substrate to overheat due to local heat accumulation, and then there will be crystallization differences on the perovskite film surface, reducing the production qualification rate and production efficiency of perovskite.

[0026] The following refers to Figures 1 - 3 Describe a support mechanism for an annealing device according to an embodiment of the present utility model.

[0027] The support mechanism 100 for an annealing device according to the present utility model includes: a tray 11 and a support structure 13. A heating cavity support structure 13 is formed within the tray 11. A plurality of support structures 13 are disposed within the tray 11 and protrude from the bottom wall of the tray 11. The support structure 13 is used to support the product to be annealed in a point-contact or surface-contact manner at a distance from the bottom wall of the tray 11, and an air flow channel is formed between the bottom wall of the tray 11 and the product to be annealed. The support structure 13 includes a suspended arm in a suspended state. The suspended arm is located within the air flow channel and is spaced from the contact surface between the product to be annealed and the support structure 13. The suspended arm exchanges heat with the air flow within the air flow channel to impede the transfer of heat to the contact surface.

[0028] In some specific embodiments, the support mechanism 100 is composed of a tray 11 and a support structure 13. A heating cavity for heating the product to be annealed is formed within the tray 11. The support structure 13 is configured as multiple and is respectively and spacedly disposed within the tray 11. The support structure 13 protrudes from the bottom wall of the tray 11. The product to be annealed is placed on the top of the support structure 13. The support structure 13 can space the product to be annealed from the bottom wall of the tray 11. The heat source provided at the bottom of the tray 11 will not directly contact the product to be annealed, effectively preventing the product to be annealed from directly contacting the heat source and resulting in cracking and abrasion. At the same time, the multiple support structures 13 can also form an air flow channel between the bottom wall of the tray 11 and the product to be annealed. A suspended arm in a suspended state is provided within the support structure 13. The suspended arm is located within the air flow channel. The suspended arm is spaced from the contact surface between the product to be annealed and the support structure 13. The suspended arm can exchange heat with the air flow within the air flow channel, reducing the heat conducted by the support structure 13 to the product to be annealed, ensuring uniform heating of all regions of the product to be annealed, and improving the qualification rate and production efficiency of the annealed product.

[0029] The support mechanism 100 according to the present utility model spaces the product to be annealed from the bottom wall of the tray 11 by providing a plurality of support structures 13 within the tray 11, effectively preventing the product to be annealed from directly contacting the heat source and resulting in cracking and abrasion. The suspended arm is disposed within the air flow channel, and the suspended arm can exchange heat with the air flow within the air flow channel, reducing the heat conducted by the support structure 13 to the product to be annealed, ensuring uniform heating of all regions of the product to be annealed, and improving the qualification rate and production efficiency of the annealed product.

[0030] According to some embodiments of the present utility model, the support structure 13 includes: a support column, a support crossbar 23, and a top support member 24. The bottom end of the support column is disposed on the bottom wall of the tray 11; a support crossbar 23 is provided at the top end of the support column. The support crossbar 23 is disposed horizontally, and the support crossbar 23 constitutes the suspended arm; the top support member 24 is disposed on the support crossbar 23, and a support fulcrum for supporting the product to be annealed is formed at the top end of the top support member 24.

[0031] In some specific embodiments, the support structure 13 is composed of a support column, a support cross bar 23 and a top support. One end of the support column is arranged on the bottom wall of the tray 11, and the other end of the support column is connected to the support cross bar 23. The support cross bar 23 extends in a direction intersecting the support column. The support cross bar 23 constitutes a cantilever arm. The top support member 24 is arranged on the side of the support cross bar 23 away from the support column. A support fulcrum for supporting the product to be annealed is formed at the top of the top support member 24. Through the point contact of the support fulcrum, the contact area between the support structure 13 and the product is reduced, and heat transfer is reduced. Since the support cross bar 23 carries away part of the heat through the airflow, the support cross bar 23 can hinder the heat from being transferred from the support column to the top support member 24, reducing the heat conducted from the support structure 13 to the product to be annealed, ensuring that the various areas of the product to be annealed are heated evenly, and improving the qualification rate and production efficiency of the annealed products.

[0032] According to some embodiments of the present invention, the support cross bar 23 and the support column are detachably arranged, and a detachable connection method is adopted between the support cross bar 23 and the support column, such as using bolt connection, snap connection or other connection methods for connection, so that the support cross bar 23 and the support column can be quickly disassembled and assembled without the need for tools, and an assembly gap is provided at the connection between the support cross bar 23 and the support column, and the assembly gap constitutes a heat blocking channel. The existence of the assembly gap makes it difficult for heat to be directly conducted to the support cross bar 23 through the support column, thereby increasing the thermal resistance between the support column and the support cross bar 23, and reducing the heat conducted from the support column to the support cross bar 23. At the same time, the setting of the assembly gap can also increase the contact area between the support column and the support cross bar 23 and the airflow in the airflow channel, further enhancing the heat dissipation effect of the support column and the support cross bar 23, and reducing the heat conducted to the annealed product by the support structure 13.

[0033] According to some embodiments of the present invention, the support mechanism 100 further includes a heat sink 12 , which is protruding from the outer wall of the support column and is suitable for performing heat exchange with the airflow in the airflow channel.

[0034] In some specific embodiments, a heat sink 12 is further provided on the support column. The heat sink 12 protrudes from the outer surface of the support column, thereby increasing the heat dissipation area of the support column. Since the heat sink 12 can exchange heat with the airflow in the airflow channel, it hinders the conduction of heat on the support column to the contact surface or contact point, further reducing the amount of heat conducted from the support structure 13 to the annealed product, ensuring uniform heating of various areas of the product to be annealed, improving the consistency of the annealing effect of the product to be annealed, and improving the product qualification rate and production efficiency.

[0035] According to some embodiments of the present utility model, the heat dissipation members 12 are configured to be multiple and arranged at intervals along the extending direction of the support column. The configuration of multiple heat dissipation members 12 can significantly increase the total surface area of contact between the support column and the air flow in the air flow channel. The heat on the support column can be conducted into the air flow channel faster, improving the heat dissipation efficiency and effect of the support column, thereby hindering the conduction of heat on the support column to the contact surface or contact point. The multiple heat dissipation members 12 are respectively arranged at intervals along the extending direction of the support column, so that the heat dissipation channels formed between the heat dissipation members are consistent with the air flow direction, ensuring that the heat at different height positions of the support column can be effectively dissipated, making the heat distribution on the support column more uniform, effectively preventing local overheating caused by uneven heat dissipation of the support column. The multiple heat dissipation members 12 not only play a role in improving the heat dissipation effect, but can also be used as reinforcing ribs, enhancing the overall structural strength of the support column and reducing the risk of deformation of the support column caused by high temperature.

[0036] In addition, the heat dissipation members arranged at intervals can form multiple gas flow channels on the outer periphery of the support column, promoting the formation of a circulating flow of air around the support column, further improving the heat dissipation efficiency and effect of the support column.

[0037] According to some embodiments of the present utility model, the heat dissipation member 12 is configured as a disc-shaped heat dissipation fin. The disc-shaped heat dissipation fin is sleeved on the support column. Compared with a flat or linear heat dissipation fin, the disc-shaped heat dissipation fin can provide a larger surface area, increasing the contact area between the heat dissipation fin and the surrounding air, thereby improving the heat exchange efficiency between the heat dissipation fin and the air, meaning that more heat can be conducted from the support column to the air flow in the air flow channel, thereby reducing the heat conducted by the support structure 13 to the product to be annealed, ensuring uniform heating of all regions of the product to be annealed, improving the consistency of the annealing effect of the product to be annealed, and improving the qualified rate and production efficiency of the annealed product.

[0038] In addition, the disc-shaped heat dissipation fin can better guide the surrounding air flow, promoting the flow of air between the heat dissipation fins. Good air flow distribution helps to improve the heat transfer efficiency between the heat dissipation fin and the air, enabling the heat to be dissipated from the support column faster.

[0039] According to some embodiments of the present utility model, the support mechanism 100 further includes: a heat insulation layer 25. The heat insulation layer 25 can be prefabricated into a specific shape to adapt to the size of the assembly gap. Then, when the support cross bar 23 is connected to the support column, the heat insulation layer 25 is embedded in the assembly gap, ensuring the installation accuracy of the heat insulation layer 25, filling the gap between the support column and the support cross bar 23, guaranteeing the connection stability between the support cross bar 23 and the support column. At the same time, the heat insulation layer 25 can also increase the thermal resistance between the support cross bar 23 and the support column to hinder the heat conduction from the support column to the support cross bar 23, thereby reducing the heat transferred from the support cross bar 23 to the top support member 24, ensuring uniform heating of all regions of the product to be annealed, and improving the qualification rate and production efficiency of the annealed product.

[0040] The heat insulation layer 25 can be configured as a ceramic layer. Ceramic materials have excellent high-temperature resistance and can maintain their structural integrity and physical properties unchanged at very high temperatures. At the same time, ceramic materials generally have a very low thermal conductivity, which means they can effectively prevent heat conduction. In the annealing device, the ceramic heat insulation layer 25 can reduce the heat transferred from the heating source or heating plate to the support cross bar 23 through the support column, ensuring uniform heating of all regions of the product to be annealed, and improving the qualification rate and production efficiency of the product.

[0041] The heat insulation layer 25 can also be configured as a foam silicone rubber layer. The foam silicone rubber has a lower density. Compared with ceramics or other heavy materials, it can significantly reduce the weight of the support structure 13. The foam silicone rubber has good flexibility and compressibility, which enables it to adapt to surfaces of different shapes, is easy to install and can fill the splicing gap, ensuring contact at all parts between the support column and the support cross bar 23, and avoiding local floating of the support structure.

[0042] In addition, the foam silicone rubber has good heat insulation performance because the internal bubble structure can reduce heat conduction, thereby effectively blocking the heat transfer from the support column to the support cross bar 23.

[0043] According to some embodiments of the present utility model, the support column includes: a first column 21 and a second column 22. One end of the first column 21 and one end of the second column 22 are respectively connected to the bottom wall of the tray 11, the heat dissipation members 12 are respectively arranged on the first column 21 and the second column 22, and the other end of the first column 21 and the other end of the second column 22 are respectively connected to the support cross bar 23.

[0044] In some specific embodiments, the support column is composed of a first column 21 and a second column 22. The first column 21 and the second column 22 are respectively arranged in the tray 11. One ends of the first column 21 and the second column 22 far from the bottom wall of the tray 11 are respectively detachably connected to the same support cross bar 23. The arrangement of the first column 21 and the second column 22 can, on the one hand, enhance the stability of the support structure 13 for supporting the product to be annealed, and on the other hand, increase the heat dissipation path of the support structure 13. The first column 21 and the second column 22 can simultaneously exchange heat with the air flow in the air flow channel, further enhancing the heat dissipation effect of the support structure 13. At the same time, the heat dissipation members 12 are respectively arranged on the first column 21 and the second column 22, thereby further increasing the heat dissipation area of the support column, reducing the heat transferred from the support structure 13 to the product to be annealed, ensuring that all regions of the product to be annealed are uniformly heated, and improving the qualified rate and production efficiency of the annealed product.

[0045] According to some embodiments of the present invention, positioning holes are provided on the support cross bar 23, and positioning protrusions matching the positioning holes are provided on the support column. The positioning holes and the positioning protrusions are detachably connected. Through the cooperation of the positioning holes and the positioning protrusions, precise positioning of the support cross bar 23 and the support column can be achieved, improving the connection stability between the support cross bar 23 and the support column. The design of the positioning holes and the positioning protrusions enables the support cross bar 23 and the support column to be easily disassembled and reassembled, improving the flexibility of the support structure 13. The detachable connection method makes maintenance simpler. When a certain component is damaged, it can be replaced individually without overall disassembly, reducing the maintenance cost.

[0046] According to some embodiments of the present invention, the contact surface between the top support member 24 and the product to be annealed is configured as a curved surface, which can, while ensuring stable support of the product to be annealed by the support member, reduce the contact point or contact surface area between the top support member 24 and the product to be annealed, thereby reducing the heat transferred from the support structure 13 to the product to be annealed, ensuring that all regions of the product to be annealed are uniformly heated, and improving the qualified rate and production efficiency of the annealed product.

[0047] According to some embodiments of the present invention, the curved surface of the top support member 24 is an arc spherical surface, so that a point contact is formed between the top support member 24 and the product to be annealed, thereby reducing heat transfer.

[0048] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", 5 "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0049] In the description of the present utility model, the "first feature" and "second feature" may include one or more of such features. In the description of the present utility model, the meaning of "a plurality" is two or more.

[0050] In the description of the present utility model, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through additional features therebetween.

[0051] In the description of the present utility model, the first feature being "above", "over" and "on" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the horizontal height of the first feature is higher than that of the second feature.

[0052] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples", etc. means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model.

[0053] In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples.

[0054] Although the embodiments of the present utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present utility model, and the scope of the present utility model is defined by the claims and their equivalents.

Claims

1. A support mechanism for an annealing device, characterized in that, Comprising: A tray (11) having a heating cavity formed therein; A support structure (13), with a plurality of the support structures (13) disposed within the tray (11) and protruding from the bottom wall of the tray (11), the support structure (13) being used to support the product to be annealed in a point-contact or surface-contact manner at a distance from the bottom wall of the tray (11), and an air flow channel being formed between the bottom wall of the tray (11) and the product to be annealed; The support structure (13) includes a suspended arm in a suspended state, the suspended arm being located within the air flow channel and at a distance from the contact surface between the product to be annealed and the support structure (13); the suspended arm exchanges heat with the air flow within the air flow channel to impede the transfer of heat to the contact surface.

2. The support mechanism for the annealing device according to claim 1, characterized in that, The support structure (13) includes: a support column, the bottom end of the support column being disposed on the bottom wall of the tray (11); A support crossbar (23), the top end of the support column being provided with the support crossbar (23), the support crossbar (23) being disposed horizontally, and the support crossbar (23) constituting the suspended arm; A top support member (24), the top support member (24) being disposed on the support crossbar (23), and the top end of the top support member (24) forming a support fulcrum for supporting the product to be annealed.

3. The support mechanism for the annealing device according to claim 2, characterized in that, The support crossbar (23) and the support column are detachably disposed; a fitting gap is formed at the detachment location between the support crossbar (23) and the support column, and the fitting gap constitutes a heat blocking channel.

4. The support mechanism for the annealing device according to claim 2, characterized in that, Further comprising: A heat dissipation member (12), the heat dissipation member (12) protruding from the outer wall surface of the support column and being adapted to exchange heat with the air flow within the air flow channel.

5. The support mechanism for the annealing device according to claim 4, wherein, The heat dissipation members (12) are configured in multiple numbers and are arranged at intervals along the extending direction of the support column.

6. The support mechanism for the annealing device according to claim 5, characterized in that, The heat dissipation member (12) is configured as a disc-shaped heat dissipation fin.

7. The support mechanism for the annealing device according to claim 3, wherein Further comprising: A heat insulation layer (25), the heat insulation layer (25) being disposed within the fitting gap to impede the conduction of heat from the support column to the support crossbar (23).

8. The support mechanism for an annealing device according to claim 4, characterized in that, The support column includes: A first column (21) and a second column (22), one end of the first column (21) and one end of the second column (22) being respectively connected to the bottom wall of the tray (11), the heat dissipation members (12) being respectively disposed on the first column (21) and the second column (22), and the other end of the first column (21) and the other end of the second column (22) being respectively connected to the support crossbar (23).

9. The support mechanism for the annealing device according to claim 2, characterized in that, The support crossbar (23) is provided with positioning holes, and the support column is provided with positioning protrusions that cooperate with the positioning holes, and the positioning holes and the positioning protrusions are detachably connected.

10. The support mechanism for the annealing device according to claim 2, characterized in that, The contact surface between the top support member (24) and the product to be annealed is configured as a curved surface.

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