Tool for disassembling molecular pump

Abstract

The utility model discloses a tool for disassembling a molecular pump. The tool comprises a first pushing component, a second pushing component and a lever driving assembly. The first pushing component is detachably connected with a first shell of the molecular pump. And the second pushing part is detachably connected with a second shell of the molecular pump. The lever driving assembly is connected with the first pushing component and the second pushing component. The lever driving assembly is configured to be capable of being operated and driving the first pushing component to move relative to the second pushing component, and force the first pushing component to drive the first shell to be separated from the second shell bound by the second pushing component. The structural integrity of the molecular pump can be guaranteed, the sealing performance of the first shell and the second shell of the molecular pump when the first shell and the second shell are connected again is guaranteed, and the dismounting time and the labor intensity of operators can be reduced.

Description

Technical Field

[0001] The embodiments of the present utility model relate to the technical field of molecular pump disassembly. More specifically, the present utility model relates to a tool for disassembling a molecular pump. Background Art

[0002] During the process of disassembling a molecular pump, since a sealing ring is provided between the first housing and the second housing of the molecular pump to ensure its sealing performance during use, and the first housing and the second housing are in an interference fit state before disassembly. Therefore, it is relatively difficult to disassemble the first housing and the second housing of the molecular pump. Traditionally, this operation often relies on tools such as screwdrivers to be inserted between the first housing and the second housing to pry them apart, so as to separate the first housing and the second housing.

[0003] However, the above-mentioned method for disassembling a molecular pump has several significant problems and limitations: (1) The method of prying with a screwdriver often makes it difficult to precisely control the magnitude and direction of the force, easily causing scratches, dents or even cracks on the edges of the first housing and the second housing, thereby damaging the structural integrity of the joint position between the first housing and the second housing. As a result, when the first housing and the second housing are joined again, the sealing performance between them will be seriously affected, and it is also easy to cause accidental situations such as scratching the sealing ring; (2) The method of prying with a screwdriver usually requires a large amount of time and effort, especially when facing joints with a high degree of tightness. This not only prolongs the disassembly time of the operator but also increases the labor intensity of the operator. Summary of the Utility Model

[0004] In order to solve one or more of the above-mentioned technical problems, the present utility model provides a tool for disassembling a molecular pump, which can ensure the structural integrity of the molecular pump to ensure the sealing performance when the first housing and the second housing of the molecular pump are joined again, and can also reduce the disassembly time and labor intensity of the operator.

[0005] The embodiments of the present utility model provide a tool for disassembling a molecular pump, which includes:

[0006] A first pushing member, detachably connected to the first housing of the molecular pump;

[0007] A second pushing member, detachably connected to the second housing of the molecular pump;

[0008] A lever driving assembly, connected to the first pushing member and the second pushing member;

[0009] Among them, the lever driving assembly is configured to be operable to drive the first pushing member to move relative to the second pushing member, and to force the first pushing member to drive the first housing away from the second housing constrained by the second pushing member.

[0010] Further, the detachable connection between the first pushing member and the first housing is an abutting connection, and the detachable connection between the second pushing member and the second housing is also an abutting connection.

[0011] Further, the first housing includes a first housing body buckled on the second housing and a flange structure provided at an end of the first housing body away from the second housing. The first pushing member includes a first transmission rod axially provided outside the first housing body along the first housing body and connected to the lever driving assembly, and a first push block vertically provided on the top of the first transmission rod. The first transmission rod abuts against the surface of the flange structure close to the second housing through the first push block; and / or

[0012] The second housing includes a second housing body buckled on the first housing body, a housing support connected to an end of the second housing body away from the first housing, and an annular gap formed between the second housing body and the housing support. The second pushing member includes a second transmission rod axially provided outside the second housing body and connected to the lever driving assembly, and a second push block vertically provided at the bottom of the second transmission rod. The second transmission rod abuts against the housing support through the second push block inserted into the annular gap.

[0013] Further, the lever driving assembly includes an operating rod, which is rotatably provided at the middle of the second transmission rod through a fulcrum hinge, and includes a first end hinged to the bottom of the first transmission rod and a second end opposite to the first end and capable of being manipulated, wherein the distance between the first end and the fulcrum hinge is less than the distance between the second end and the fulcrum hinge.

[0014] Further, the operating rod includes a rod, a first connecting piece and a second connecting piece. The middle of the first connecting piece and the middle of the second connecting piece are hinged to both sides of the second transmission rod through the fulcrum hinge. One end of the first connecting part and one end of the second connecting piece are used as the first end of the operating rod and are hinged to the first transmission rod in a clamping form. The other end of the first connecting piece and the other end of the second connecting piece are fixed to one end of the rod, and force the other end of the rod to be the second end of the operating rod.

[0015] Further, the tool further includes a linkage member parallel to the operating rod, one end of the linkage member being hinged to the middle of the first transmission rod, and the other end thereof being hinged to the top of the second transmission rod.

[0016] Further, the distance between the two hinged parts of the linkage member is 0.05 - 0.15 times the maximum diameter of the molecular pump, and the distance from the first end to the fulcrum hinge is 0.05 - 0.15 times the maximum diameter of the molecular pump.

[0017] Further, the tool further includes a synchronizing rod and a first sub-tool and a second sub-tool that can be arranged to be centrosymmetric about the central axis of the molecular pump. The first sub-tool is composed of one first pushing member, one second pushing member, one operating rod and one linkage member. The second sub-tool is composed of another first pushing member, another second pushing member, another operating rod and another linkage member. One end of the synchronizing rod is fixedly connected to the second end of one operating rod, and the other end thereof is fixedly connected to the second end of another operating rod.

[0018] Further, the tool further includes a base having an avoidance space and fixedly carrying the first sub-tool and the second sub-tool, and the avoidance space is used to accommodate the molecular pump.

[0019] Further, the base is of a U-shaped structure, and the manufacturing material of the tool is a metal material.

[0020] The lever drive assembly can be operated by the user to drive the first pushing member and the second pushing member to generate relative movement. Since the first pushing member is detachably connected to the first housing of the molecular pump and the second pushing member is detachably connected to the second housing of the molecular pump, when the first pushing member and the second pushing member generate relative movement, the first housing and the second housing can move following the first pushing member and the second pushing member and separate from each other, thereby completing the disassembly of the first housing and the second housing of the molecular pump.

[0021] Through a tool for disassembling a molecular pump provided by this embodiment, it can replace the traditional screwdriver disassembly method to complete the disassembly of the molecular pump housing, and during the disassembly process, it does not need to be inserted between the first housing and the second housing like a screwdriver disassembly. It only needs to establish a detachable connection with the first housing and the second housing. This method not only does not damage the structural integrity and airtightness of the joint between the first housing and the second housing, but also uses a simpler operation method of the lever principle, thereby reducing the labor intensity and operation time of the user, and being beneficial to improving the disassembly quality and efficiency of the molecular pump. Description of the Drawings

[0022] By reading the following detailed description with reference to the accompanying drawings, the above and other objects, features, and advantages of the exemplary embodiments of the present utility model will become readily understandable. In the drawings, several embodiments of the present utility model are shown in an exemplary rather than restrictive manner, and the same or corresponding reference numerals represent the same or corresponding parts, wherein:

[0023] Figure 1 The structural schematic diagram of a molecular pump in the related art involved in the embodiment of the present utility model is shown;

[0024] Figure 2 The structural schematic diagram of a tool for disassembling a molecular pump provided by the embodiment of the present utility model is shown;

[0025] Figure 3 The structural schematic diagram when the tool provided by the embodiment of the present utility model disassembles the molecular pump involved in the embodiment of the present utility model is shown;

[0026] Figure 4 The side view when the tool provided by the embodiment of the present utility model disassembles the molecular pump involved in the embodiment of the present utility model is shown.

[0027] In the figure:

[0028] 1, First pushing member; 11, First transmission rod; 12, First pushing block;

[0029] 2, Second pushing member; 21, Second transmission rod; 22, Second pushing block;

[0030] 3, Lever driving assembly; 31, Operating rod; 311, Rod member; 312, First end; 313, Second end; 314, First connecting piece; 315, Second connecting piece;

[0031] 4, Linking member; 41, Third connecting piece; 42, Fourth connecting piece;

[0032] 5, Synchronous rod;

[0033] 6, Base;

[0034] 100, First housing; 101, First housing main body; 102, Flange structure; 1021, Connecting hole;

[0035] 200, Second housing; 201, Second housing main body; 202, Housing support; 203, Annular gap;

[0036] 300, Sealing ring. Detailed implementation manners

[0037] The technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present disclosure. Obviously, the described embodiments are some, but not all, embodiments of the present disclosure. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present disclosure without creative efforts shall fall within the protection scope of the present disclosure.

[0038] Figure 1 shows a schematic structural diagram of a molecular pump in the related art involved in this embodiment. As Figure 1 shown, during the process of disassembling the molecular pump, since a sealing ring 300 is provided between the first housing 100 and the second housing 200 of the molecular pump to ensure its sealing performance during use, and the first housing 100 and the second housing 200 are in an interference fit state before disassembly. Therefore, it is relatively difficult to disassemble the first housing 100 and the second housing 200 of the molecular pump. Traditionally, this operation often relies on tools such as screwdrivers to be inserted between the first housing 100 and the second housing 200 to pry them, so as to separate the first housing 100 and the second housing 200.

[0039] However, this prying method will cause scratches, dents or even cracks on the edges of the first housing 100 and the second housing 200, thereby damaging the structural integrity of the positions where the first housing 100 and the second housing 200 are joined at the edges, and further affecting the sealing performance between the first housing 100 and the second housing 200 when they are joined again, and it is also easy to cause accidental situations such as scratches on the sealing ring 300. The method of prying with a screwdriver usually requires a lot of time and effort, especially when facing joints with a high degree of tightness. This not only prolongs the disassembly time of the operator, but also increases the labor intensity of the operator.

[0040] Figure 2 shows a schematic structural diagram of a tool for disassembling a molecular pump provided in this embodiment, Figure 3 shows a schematic structural diagram of the tool provided in this embodiment when disassembling the molecular pump involved in this embodiment. As Figure 2 and Figure 3 and in combination with Figure 1As shown in the figure, this embodiment provides a tool for disassembling a molecular pump, which includes a first pushing component 1, a second pushing component 2, and a lever driving assembly 3. The first pushing component 1 is detachably connected to the first housing 100 of the molecular pump. The second pushing component 2 is detachably connected to the second housing 200 of the molecular pump. The lever driving assembly 3 is connected to the first pushing component 1 and the second pushing component 2. Among them, the lever driving assembly 3 is configured to: be able to be operated and drive the first pushing component 1 and the second pushing component 2 to generate relative movement, so as to make the first housing 100 separate from the second housing 200 through the relative movement of the first pushing component 1 and the second pushing component 2.

[0041] The lever driving assembly 3 can be operated by the user to drive the first pushing component 1 and the second pushing component 2 to generate relative movement. Since the first pushing component 1 is detachably connected to the first housing 100 of the molecular pump and the second pushing component 2 is detachably connected to the second housing 200 of the molecular pump, when the first pushing component 1 and the second pushing component 2 generate relative movement, the first housing 100 and the second housing 200 can move with the first pushing component 1 and the second pushing component 2 and separate from each other, thereby completing the disassembly of the first housing 100 and the second housing 200 of the molecular pump.

[0042] Through the tool for disassembling a molecular pump provided in this embodiment, it can replace the traditional screwdriver disassembly method to complete the disassembly of the first housing 100 and the second housing 200 of the molecular pump, and during the disassembly process, it is not necessary to insert between the first housing 100 and the second housing 200 like the screwdriver disassembly. It only needs to establish a detachable connection with the first housing 100 and the second housing 200. This method not only does not damage the structural integrity and airtightness of the joint between the first housing 100 and the second housing 200, but also uses a simpler operation method of the lever principle, thereby reducing the labor intensity and operation time of the user, and being beneficial to improving the disassembly quality and efficiency of the molecular pump.

[0043] It should be noted that in this embodiment, the lever driving assembly 3 can be driven to move by the operator manually operating the lever driving assembly 3 and drive the first pushing component 1 and the second pushing component 2 to move.

[0044] In this embodiment, the detachable connection between the first pushing component 1 and the first housing 100 is abutting connection or tying connection, etc., to ensure that the first housing 100 moves approximately synchronously with the first pushing component 1. Considering the convenience of operation and the implementation cost, abutting connection is the optimal choice for the aforementioned detachable connection.

[0045] In this embodiment, the detachable connection between the second pushing member 2 and the second housing 200 is a butt joint or a lashing connection, etc., to ensure that the second housing 200 moves approximately synchronously with the second pushing member 2. Considering the convenience of operation and implementation cost, the butt joint is the optimal choice for the aforementioned detachable connection.

[0046] Figure 4 The side view of the tool provided in this embodiment for disassembling the molecular pump involved in this embodiment is shown. As Figure 4 and in combination with Figures 1-3 shown, the first housing 100 includes a first housing body 101 buckled on the second housing 200 and a flange structure 102 provided at the end of the first housing body 101 away from the second housing 200. The first pushing member 1 includes a first transmission rod 11 arranged axially outside the first housing body 101 and connected to the lever driving assembly 3, and a first push block 12 vertically arranged on the top of the first transmission rod 11. When the lever driving assembly 3 is operated and driven, the lever driving assembly 3 drives the first transmission rod 11 to move substantially along the axial direction of the first housing body 101. And since the first transmission rod 11 abuts against the surface of the flange structure 102 close to the second housing 200 through the first push block 12, the first transmission rod 11 can drive the first housing 100 to separate from the second housing 200 through the first push block 12.

[0047] Specifically, the second housing 200 includes a second housing body 102 buckled on the first housing body 101, a housing support 202 connected to the end of the second housing body 102 away from the first housing 100, and an annular gap formed between the second housing body 102 and the housing support 202. The second pushing member 2 includes a second transmission rod 21 arranged axially outside the second housing body 102 and connected to the lever driving assembly 3, and a second push block 22 vertically arranged on the bottom of the second transmission rod 21. The second transmission rod 21 abuts against the housing support 202 through the second push block 22 inserted into the annular gap. When the lever driving assembly 3 is operated and driven, the second transmission rod 21 restrains the second housing 200 through the second push block 22 to prevent the second housing 200 from moving together with the first housing 100 when the first housing 100 separates from it, so as to ensure that the two can be disassembled smoothly.

[0048] Preferably, a kidney-shaped hole is provided on the first push block 12, and the first push block 12 and the first transmission rod 11 are connected by bolts to adjust the first push block 12 to be closer to or farther away from the first housing 100, so that this tool can be adapted to more different types of molecular pumps.

[0049] Preferably, the lever driving assembly 3 includes an operating lever 31 which is rotatably arranged on the middle part of the second transmission rod 21 through a fulcrum hinge, and includes a first end 312 hinged to the bottom of the first transmission rod 11 and a second end 313 opposite to the first end 312 and capable of being manipulated. The operator holds the second end 313 of the operating lever 31 and twists the operating lever 21, causing the operating lever 21 to rotate relative to the second transmission rod 21 and driving the first transmission rod 11 to gradually move away from the housing support 202 along the axial direction of the first housing 100, thereby promoting the separation of the first housing from the second housing. Among them, the distance between the first end 312 and the fulcrum hinge forms the resistance arm of the operating lever 31, and the distance between the second end 313 and the fulcrum hinge forms the power arm of the operating lever 31. According to the lever principle, the distance between the first end 312 and the fulcrum hinge is set to be less than the distance between the second end 313 and the fulcrum hinge, so that the operating lever 31 can be driven by a smaller driving force when being operated, enabling the first housing 100 to be separated from the second housing 200, thus achieving the purpose of saving effort.

[0050] Specifically, the operating lever 31 includes a rod member 311, a first connecting piece 314 and a second connecting piece 315. The middle parts of the first connecting piece 314 and the second connecting piece 315 are hinged to both sides of the second transmission rod 21 through a fulcrum hinge. One end of the first connecting part and one end of the second connecting piece 315 serve as the first end 312 of the operating lever 31 and are hinged to the first transmission rod 11 in a clamping form. The other end of the first connecting piece 314 and the other end of the second connecting piece 315 are fixed to one end of the rod member 311, and the other end of the rod member 311 is forced to serve as the second end 313 of the operating lever 31, thereby realizing the formation of the corresponding first end 312 and second end 313, and further realizing the formation of the lever structure of the lever driving assembly 3.

[0051] Preferably, the tool further includes a linkage member 4 parallel to the operating lever 31. One end of the linkage member 4 is hinged to the middle part of the first transmission rod 11, and the other end is hinged to the top of the second transmission rod 21 to limit the axial direction of the first transmission rod 11 of the first pusher to always be in the vertical direction position, so that the upper surface of the first push block 12 connected to the first transmission rod 11 can fully abut against the lower surface of the flange structure 102 provided at the end of the first housing body 101 away from the second housing 200, enabling the thrust formed by the first transmission rod 11 to be fully applied to the flange structure 102, thereby improving the force conversion efficiency of the lever driving assembly 3 and allowing the lever driving assembly 3 to be driven by a smaller force when being operated.

[0052] Specifically, the linkage member 4 includes a third connecting piece 41 and a fourth connecting piece 42 that are both arranged in parallel with the operating rod 31. One end of the third connecting piece 41 is hinged to the middle of the first transmission rod 11, and the other end is hinged to the top of the second transmission rod 21. One end of the fourth connecting piece 42 is hinged to the middle of the first transmission rod 11, and the other end is hinged to the top of the second transmission rod 21 to achieve the limiting effect of the linkage member 4.

[0053] Specifically, the distance between the two hinged parts of the linkage member 4 is 0.05 - 0.15 times the maximum diameter of the molecular pump, and the distance from the first end 312 to the fulcrum hinge is 0.05 - 0.15 times the maximum diameter of the molecular pump. To ensure that the first push block 12 of the first pushing member 1 can smoothly abut against the flange structure 102 on the premise of achieving the labor-saving effect of the lever driving assembly 3.

[0054] Preferably, the tool further includes a synchronizing rod 5 and a first sub-tool and a second sub-tool that can be arranged to be centrosymmetric about the central axis of the molecular pump. The first sub-tool is composed of a first pushing member 1, a second pushing member 2, an operating rod 31, and a linkage member 4. The second sub-tool is composed of another first pushing member 1, another second pushing member 2, another operating rod 31, and another linkage member 4. One end of the synchronizing rod 5 is fixedly connected to the second end 313 of one operating rod 31, and the other end is fixedly connected to the second end 313 of another operating rod 31. The synchronizing rod 5 synchronously drives the two operating rods 31 to move, so that the two first pushing members 1 can simultaneously abut against the flange structure 102, thereby enabling the two first pushing members 1 to simultaneously push the first housing 100 from both sides of the molecular pump, and then separating the first housing 100 from the second housing 200 at one time by pushing the first housing 100 from both sides of the molecular pump.

[0055] In this embodiment, the synchronizing rod 5 and the rod 311 of the operating rod 31 are integrated. In other embodiments, the synchronizing rod 5 and the rod 311 of the operating rod 31 can also be fixedly connected or other connection methods, and this embodiment does not make specific limitations on this.

[0056] Furthermore, the tool further includes a base 6 that has an avoidance space and fixedly supports the first sub-tool and the second sub-tool. The avoidance space is used to accommodate the molecular pump to avoid the molecular pump on the basis of providing support for the first sub-tool and the second sub-tool, and prevent the tool from rubbing against the surface of the molecular pump during use.

[0057] Preferably, the base 6 is a U-shaped structure to form an avoidance space for the molecular pump. The manufacturing material of the tool is a metal material, and the tool is made of the metal material with high properties to improve the rigidity of the tool.

[0058] The usage process of the tool provided in this embodiment is as follows: Stand the molecular pump upright on the ground, and keep the first housing 100 higher than the second housing 200. Insert the second push blocks 22 of the two second pushing components 2 into the annular gap 203; Slowly push the synchronization rod 5 and force the two rods 311 to move. The first transmission rod 11 moves in the vertical direction and forces the first push block 12 to abut against the flange structure 102; Continue to push the synchronization rod 5, the first housing 100 is gradually separated from the second housing 200 under the push of the first push block 12, while the second housing 200 does not move under the action of the second pushing component 2, thereby completing the disassembly of the first housing 100 and the second housing 200 of the molecular pump.

[0059] In the above description of this application, unless otherwise clearly defined and limited, terms such as "fixed", "installed", "connected" or "coupled" should be understood in a broad sense. For example, regarding the term "connected", it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, or it can be the communication inside two elements or the interaction relationship between two elements. Therefore, unless otherwise clearly defined in this application, those skilled in the art can understand the specific meanings of the above terms in this utility model according to specific circumstances.

[0060] According to the above description of this application, those skilled in the art can also understand the following terms used. For example, terms indicating orientation or positional relationship such as "upper", "lower", "vertical", "top", "bottom" or "inner" are based on the orientation or positional relationship shown in the drawings of this application. It is only for the purpose of facilitating the description of the solution of this utility model and simplifying the description, rather than explicitly or implicitly indicating that the device or element involved must have the specific orientation, be constructed and operate in the specific orientation. Therefore, the above terms of orientation or positional relationship cannot be understood or interpreted as a limitation to the solution of this utility model.

[0061] In addition, the terms "first" or "second" etc. used in this application to refer to numbers or ordinals are only for descriptive purposes, and cannot be understood as explicitly or implicitly indicating relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this application, "a plurality" means at least two, such as two, three or more, etc., unless otherwise clearly and specifically defined.

[0062] Although multiple embodiments of the present utility model have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Those skilled in the art can conceive of many changes, alterations, and alternative ways without departing from the spirit and scope of the present utility model. It should be understood that various alternative solutions to the embodiments of the present utility model described herein may be adopted in the practice of the present utility model. The appended claims are intended to define the scope of protection of the present utility model and thus cover equivalents or alternatives within the scope of these claims.

Claims

1. A tool for disassembling a molecular pump, characterized in that, Comprising: A first driving component, detachably connected to the first housing of the molecular pump; A second driving component, detachably connected to the second housing of the molecular pump; A lever driving assembly, connected to the first driving component and the second driving component; Wherein, the lever driving assembly is configured to: be operable to drive the first driving component to move relative to the second driving component, and force the first driving component to drive the first housing to disengage from the second housing constrained by the second driving component.

2. The tool according to claim 1, characterized in that, The detachable connection between the first driving component and the first housing is abutting connection, and the detachable connection between the second driving component and the second housing is also abutting connection.

3. The tool according to claim 2, characterized in that The first housing includes a first housing body buckled on the second housing and a flange structure provided at an end of the first housing body away from the second housing. The first driving component includes a first transmission rod axially provided outside the first housing body along the first housing body and connected to the lever driving assembly, and a first push block vertically provided on the top of the first transmission rod. The first transmission rod abuts against the surface of the flange structure close to the second housing through the first push block; and / or The second housing includes a second housing body buckled on the first housing body, a housing support connected to an end of the second housing body away from the first housing, and an annular gap formed between the second housing body and the housing support. The second driving component includes a second transmission rod axially provided outside the second housing body and connected to the lever driving assembly, and a second push block vertically provided on the bottom of the second transmission rod. The second transmission rod abuts against the housing support through the second push block inserted into the annular gap.

4. The tool according to claim 3, characterized in that, The lever driving assembly includes an operating rod, which is rotatably provided at the middle of the second transmission rod through a fulcrum hinge, and includes a first end hinged to the bottom of the first transmission rod and a second end opposite to the first end and capable of being manipulated. Wherein, the distance from the first end to the fulcrum hinge is less than the distance from the second end to the fulcrum hinge.

5. The tool according to claim 4, characterized in that, The operating rod includes a rod member, a first connecting piece and a second connecting piece. The middle of the first connecting piece and the middle of the second connecting piece are hinged to both sides of the second transmission rod through the fulcrum hinge. One end of the first connecting piece and one end of the second connecting piece are used as the first end of the operating rod and are hinged to the first transmission rod in a clamping form. The other end of the first connecting piece and the other end of the second connecting piece are fixed to one end of the rod member, and force the other end of the rod member to be the second end of the operating rod.

6. The tool according to claim 4, characterized in that, The tool further includes a linkage component parallel to the operating rod. One end of the linkage component is hinged to the middle of the first transmission rod, and the other end is hinged to the top of the second transmission rod.

7. The tool according to claim 6, characterized in that, The distance between the two hinged parts of the linkage component is 0.05 - 0.15 times the maximum diameter of the molecular pump, and the distance from the first end to the fulcrum hinge is 0.05 - 0.15 times the maximum diameter of the molecular pump.

8. The tool according to claim 6, characterized in that, The tool further includes a synchronous rod and a first sub-tool and a second sub-tool that can be arranged to be centrosymmetric about the central axis of the molecular pump. The first sub-tool is composed of one of the first pushing components, one of the second pushing components, one of the operating rods, and one of the linkage components. The second sub-tool is composed of another first pushing component, another second pushing component, another operating rod, and another linkage component. One end of the synchronous rod is fixedly connected to the second end of one of the operating rods, and the other end is fixedly connected to the second end of the other operating rod.

9. The tool according to claim 8, characterized in that, The tool further includes a base that has an avoidance space and fixedly supports the first sub-tool and the second sub-tool. The avoidance space is used to accommodate the molecular pump.

10. The tool according to claim 9, characterized in that, The base is of a U-shaped structure, and the manufacturing material of the tool is a metal material.

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