Automatic locking and connecting mechanism for furnace barrel
By designing the furnace cylinder automatic locking connection mechanism, the rotating cylinder assembly and locking cylinder are used to achieve automatic connection and separation between the sub-chamber and the isolation valve, the problem of inefficient manual operation in the prior art is solved and the production and maintenance efficiency is improved.
Patent Information
- Application Number
- CN202422407139.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-30
- Publication Date
- 2025-08-01
- Estimated Expiration
- 2034-09-30
AI Technical Summary
The existing straight-pull crystal growth furnace requires manual disassembly and assemble bolts during operation, resulting in low production efficiency and the risk of mechanical injuries.
An automatic locking connection mechanism for furnace barrels is designed, including a growth furnace sub-chamber connection pipe, chuck and isolation valve flange. The rotating cylinder assembly realizes automatic disconnection and sealing connection between the sub-chamber and isolation valve, combining the locking cylinder and the sealing ring to improve the degree of operation automation.
The automatic connection and separation between the secondary chamber and the isolation valve is realized, which improves production and maintenance efficiency and reduces the risk of manual operation.
Smart Images
Figure CN223176248U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of crystal rod production, in particular to an automatic locking connection mechanism for a furnace drum. Background Art
[0002] Multi-crystal / single-crystal silicon is an important raw material for the semiconductor and photovoltaic industries. Currently, the market generally uses a vertical pulling crystal growth furnace to produce multi-crystal / single-crystal silicon. During the production process, the crystal growth furnace used contains an isolation valve and a sub-chamber in its structure. When removing the rod or re-adding materials, the sub-chamber is disconnected from the isolation valve. During crystal pulling production, the sub-chamber is sealed with the isolation valve. During the process of disassembling and assembling the hot field, the sub-chamber needs to be lifted and rotated together with the isolation valve and the furnace cover.
[0003] When operating the above steps in an existing Czochralski crystal growth furnace, manual disassembly and assembly of the mounting bolts is required, resulting in low production efficiency. In addition, there is a risk of mechanical injury during the disassembly and assembly process. Utility Model Content
[0004] The utility model provides an automatic locking connection mechanism for a furnace drum in order to solve the problems of the prior art.
[0005] The purpose of the utility model can be achieved through the following technical solutions: a furnace drum automatic locking connection mechanism, comprising: a growth furnace auxiliary chamber connecting pipe, a chuck and an isolation valve flange, a mounting groove is provided on the outer side of the chuck, a mounting hole is provided at one end of the mounting groove, a step screw is fixedly provided on the isolation valve flange, the step screw can be inserted into the mounting hole and slidably provided in the mounting groove, a rotating cylinder assembly is provided between the growth furnace auxiliary chamber connecting pipe and the chuck, the rotating cylinder assembly comprises an upper mounting seat fixedly provided on the side wall of the long furnace auxiliary chamber connecting pipe, a lower mounting seat fixedly provided on the upper end of the chuck and a rotating cylinder rotatably provided between the upper mounting seat and the lower mounting seat.
[0006] As a further improvement, the upper mounting seat includes an upper fixed seat fixedly arranged on the side wall of the long furnace auxiliary chamber connecting pipe and a rotating mounting plate rotatably arranged on the upper fixed seat, and a lower rotating rod is fixedly arranged on the upper end of the lower mounting seat, and the end of the rotating cylinder is fixedly connected to the rotating mounting plate and the end of its piston rod is rotatably arranged on the lower rotating rod.
[0007] As a further improvement, a locking cylinder is fixedly provided on the side wall of the growth furnace auxiliary chamber connecting pipe, a locking hole is provided on the chuck, and the locking hole and the piston rod of the locking cylinder are correspondingly provided.
[0008] As a further improvement, a sealing ring is provided on the inner side of the isolation valve flange.
[0009] For further improvement, the diameter of the upper end of the stepped screw is a, the diameter of the lower end is b, and the width of the installation groove is c, satisfying the quantitative relationship: a > c > b.
[0010] Compared with the prior art, the utility model has the following beneficial effects: When taking out the rod or re-feeding the material, the utility model can realize the automatic disconnection of the secondary chamber and the isolation valve, and then realize the automatic sealing connection of the secondary chamber and the isolation valve during crystal pulling production. When disassembling and assembling the thermal field and other technological processes, it is necessary to lift and rotate the secondary chamber together with the isolation valve and the furnace cover. The structure is simple, the operation is convenient, the degree of automation is high, and the production and maintenance efficiency are greatly improved. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] Figure 1 It is a schematic structural diagram of the utility model when locked;
[0012] Figure 2 It is a schematic structural diagram of the utility model when the lock is released;
[0013] Figure 3 It is a schematic diagram of the mechanism of the utility model when separated;
[0014] Figure 4 It is a schematic diagram of the mechanism when disassembling and assembling the growth furnace;
[0015] Figure 5 It is a schematic structural diagram of the growth furnace when feeding or taking out the rod.
[0016] In the figure, 1. connecting pipe of the secondary chamber of the growth furnace; 2. chuck; 21. installation groove; 211. installation hole; 22. locking hole; 3. isolation valve flange; 31. stepped screw; 32. sealing ring; 4. rotary cylinder assembly; 41. upper mounting seat; 411. upper fixing seat; 412. rotating mounting plate; 42. lower mounting seat; 421. lower rotating rod; 43. rotary cylinder; 5. locking cylinder. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0017] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.
[0018] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0019] The following combines the embodiments and the attached Figures 1 to 5 to further elaborate on the technical solutions of the present utility model.
[0020] Embodiment 1
[0021] An automatic locking connection mechanism for a furnace barrel includes: a growth furnace secondary chamber connection pipe 1, a chuck 2, and an isolation valve flange 3. An installation groove 21 is provided through the outside of the chuck 2. One end of the installation groove 21 is provided with an installation hole 211. A stepped screw 31 is fixedly provided on the isolation valve flange 3. The stepped screw 31 can be inserted into the installation hole 211 and slidably arranged in the installation groove 21. A rotary cylinder assembly 4 is arranged between the growth furnace secondary chamber connection pipe 1 and the chuck 2. The rotary cylinder assembly 4 includes an upper mounting seat 41 fixedly provided on the side wall of the long furnace secondary chamber connection pipe 1, a lower mounting seat 42 fixedly provided on the upper end of the chuck 2, and a rotary cylinder 43 rotatably arranged between the upper mounting seat 41 and the lower mounting seat 42.
[0022] As Figures 1 to 5 shown, the present utility model includes a growth furnace secondary chamber connection pipe 1, a chuck 2, and an isolation valve flange 3. An installation groove 21 is provided through the outside of the chuck 2, and an installation hole 211 is provided at one end for fixing the isolation valve flange 3. A stepped screw 31 is fixedly provided on the isolation valve flange 3. The screw can be inserted into the installation hole 211 and slide in the installation groove 21 to achieve the locking and loosening of the chuck. A rotary cylinder assembly 4 is arranged between the growth furnace secondary chamber connection pipe 1 and the chuck 2, including an upper mounting seat 41, a lower mounting seat 42, and a rotary cylinder 43. The automatic locking and release of the chuck under the growth furnace secondary chamber connection pipe 1 are realized by the rotation of the rotary cylinder 43.
[0023] When taking out the rod or recharging in the present utility model, the automatic disconnection between the secondary chamber and the isolation valve can be realized. During crystal pulling production, the automatic sealing connection between the secondary chamber and the isolation valve can be further realized. When disassembling and assembling the thermal field and other technological processes, the secondary chamber needs to lift and rotate together with the isolation valve and the furnace cover. The structure is simple, the operation is convenient, and the degree of automation is high, greatly improving the production and maintenance efficiency.
[0024] As a further preferred embodiment, the upper mounting seat 41 includes an upper fixing seat 411 fixedly arranged on the side wall of the connecting pipe 1 of the long furnace secondary chamber and a rotating mounting plate 412 rotatably arranged on the upper fixing seat 411. The upper end of the lower mounting seat 42 is fixedly provided with a lower rotating rod 421. The end of the rotating cylinder 43 is fixedly connected to the rotating mounting plate 412, and the end of its piston rod is rotatably arranged on the lower rotating rod 421.
[0025] Specifically, during actual use, when locking is required, the piston rod of the rotating cylinder 43 retracts, driving the chuck 2 to rotate clockwise, so that the stepped screw 31 on the isolation valve flange 3 moves into the mounting groove 21 to achieve locking. As Figure 1 shown, when processes such as thermal field disassembly and assembly are required, in this state, when the secondary chamber lifting action is performed, the isolation valve and the furnace cover can be directly lifted together, as Figure 4 shown, thus facilitating relevant process operations; as Figure 3 and 5 shown, when detachment is required, the piston rod of the rotating cylinder 43 extends, driving the chuck 2 to move counterclockwise, so that the stepped screw 31 on the isolation valve flange 3 moves to the mounting hole 211, and the locking between the connecting pipe 1 of the growth furnace secondary chamber and the isolation valve flange can be released. The structure is simple, the operation is convenient, the degree of automation is high, and the production and maintenance efficiency are greatly improved.
[0026] As a further preferred embodiment, a locking cylinder 5 is fixedly arranged on the side wall of the connecting pipe 1 of the growth furnace secondary chamber. A locking hole ၂၂ is arranged on the chuck ၂. The locking hole ၂၂ and the piston rod of the locking cylinder 5 are correspondingly arranged.
[0027] Specifically, when locking, the piston rod of the locking cylinder 5 is inserted into the locking hole 22 arranged on the chuck 2 to prevent the chuck 2 from rotating due to a failure or misoperation of the rotating cylinder 43.
[0028] As a further preferred embodiment, a sealing ring 32 is arranged inside the isolation valve flange 3 to improve the seal between the secondary chamber and the isolation valve through the sealing ring 32.
[0029] As a further preferred embodiment, the diameter of the upper end of the stepped screw 31 is a, the diameter of the lower end is b, and the width of the mounting groove 21 is c, satisfying the quantitative relationship: a > c > b.
[0030] The preferred specific embodiments of the present utility model have been described in detail above. It should be understood that those of ordinary skill in the art can make many modifications and variations based on the concept of the present utility model without creative efforts. Therefore, all technical solutions that can be obtained by those skilled in the art in this technical field based on the concept of the present utility model through logical analysis, reasoning, or limited experiments on the basis of the prior art shall fall within the protection scope determined by the claims.
Claims
1. An automatic locking connection mechanism for a furnace barrel, characterized in that, Including: A growth furnace auxiliary chamber connecting pipe (1), a chuck (2), and an isolation valve flange (3). An installation groove (21) is provided through the outside of the chuck (2). An installation hole (211) is provided at one end of the installation groove (21). A stepped screw (31) is fixedly provided on the isolation valve flange (3). The stepped screw (31) can be inserted into the installation hole (211) and slidably arranged in the installation groove (21). A rotary cylinder assembly (4) is arranged between the growth furnace auxiliary chamber connecting pipe (1) and the chuck (2). The rotary cylinder assembly (4) includes an upper mounting seat (41) fixedly provided on the side wall of the long furnace auxiliary chamber connecting pipe (1), a lower mounting seat (42) fixedly provided on the upper end of the chuck (2), and a rotary cylinder (43) rotatably arranged between the upper mounting seat (41) and the lower mounting seat (42).
2. The automatic locking connection mechanism of a furnace barrel according to claim 1, characterized in that, The upper mounting seat (41) includes an upper fixed seat (411) fixedly provided on the side wall of the long furnace auxiliary chamber connecting pipe (1) and a rotating mounting plate (412) rotatably arranged on the upper fixed seat (411). A lower rotating rod (421) is fixedly provided at the upper end of the lower mounting seat (42). The end of the rotary cylinder (43) is fixedly connected to the rotating mounting plate (412), and the end of its piston rod is rotatably arranged on the lower rotating rod (421).
3. The automatic locking connection mechanism for a furnace barrel according to claim 1, wherein, A locking cylinder (5) is fixedly provided on the side wall of the growth furnace auxiliary chamber connecting pipe (1). A locking hole (22) is provided on the chuck (2). The locking hole (22) corresponds to the piston rod of the locking cylinder (5).
4. The automatic locking connection mechanism for a furnace barrel according to claim 1, characterized in that, A sealing ring (32) is arranged inside the isolation valve flange (3).
5. The automatic locking connection mechanism for a furnace barrel according to claim 1, characterized in that The diameter of the upper end of the stepped screw (31) is a, the diameter of the lower end is b, and the width of the installation groove (21) is c, satisfying the quantitative relationship: a > c > b.