Sealing and pressing structure

Abstract

The utility model discloses a sealing pressing structure, which belongs to the technical field of sealing tools, and comprises a first pressing block, a second pressing block and a third pressing block, a passing gap is formed between the first pressing block and the second pressing block, the second pressing block can linearly move along the passing gap, and the third pressing block can linearly move along the passing gap. The second pressing block makes contact with the first pressing block and the third pressing block on the two sides of the passing gap. The third pressing block is used for making contact with a to-be-pressed product. The first pressing block is fixedly mounted on the fixing plate; the third pressing block makes contact with the fixing plate, and the second pressing block moves in the passing gap to enable the third pressing block to press the product to be pressed. The second pressing block moves in the passing gap to enable the third pressing block to press the product to be pressed, a traditional structure for achieving the effect of pressing the product by screwing a bolt is replaced, and even if equipment works in a cold and hot circulation environment, the problems that a threaded hole is damaged and the threaded hole of the product is damaged due to screwing the bolt are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of sealing tooling, and specifically, to a sealing and pressing structure. Background Art

[0002] During PECVD, the temperature in the chamber is 300°C to 450°C or higher. Especially when using a large-area substrate, the diffuser will be deformed. To stabilize the diffuser, the backplane is thicker than the diffuser in cross-section, thus providing substantial static support.

[0003] Traditional sealing structures, such as Figure 1 shown, generally adopt an O-ring sealing structure. By using the bolt tightening method, the sealing surface is closely attached to the O-ring to achieve the sealing effect. However, the tightening of the bolt structure may cause damage or wear to the connection surfaces of the two connecting components.

[0004] In some CVD devices, the backplane is large and thick, and due to space limitations, the sealing pressure is also large. Traditional sealing structures are often not suitable and have poor sealing effects. In addition, the equipment operates in a hot and cold cycling environment, and the threaded holes of the product are easily damaged. Moreover, the product is damaged when the bolt is tightened on the backplane. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a sealing and pressing structure, which solves the problems in the prior art that the threaded holes of products such as the backplane are easily damaged and the sealing effect is poor due to the pressing method of tightening bolts.

[0006] To achieve the above purpose, the utility model provides a sealing and pressing structure, including a first pressing block, a second pressing block, and a third pressing block. A through gap is formed between the first pressing block and the second pressing block. The second pressing block can move linearly along the through gap, and the second pressing block is in contact with the first pressing block and the third pressing block on both sides of the through gap. The third pressing block is used to contact the product to be pressed. A fixing plate, the first pressing block is fixedly installed on the fixing plate. The third pressing block is in contact with the fixing plate, and the movement of the second pressing block in the through gap causes the third pressing block to press the product to be pressed.

[0007] Further, the through gap includes a wedge-shaped gap, and the diameter of the wedge-shaped gap gradually decreases in the moving direction of the second slider. The second pressing block includes an inclined surface that matches the wedge-shaped gap.

[0008] Further, the first pressing block includes a first inclined surface, and the third pressing block includes a third inclined surface. The first inclined surface and the third inclined surface are symmetrically arranged with respect to the second pressing block, and the first inclined surface and the third inclined surface form the wedge-shaped gap.

[0009] Further, the fixing plate is provided with a through hole, and the central axis of the through hole is on the same straight line as the central axis of the through gap.

[0010] Further, the second pressing block is provided with a connecting hole, the central axis of the connecting hole is on the same straight line as the central axis of the through hole, and the aperture of the connecting hole is smaller than the aperture of the through hole.

[0011] Further, the connecting hole is used to connect a power element, and the power element passes through the through hole to pull the second pressing block.

[0012] Further, an installation hole is formed on one side of the first pressing block facing the fixing plate, a through groove is provided at the position of the fixing plate corresponding to the installation hole, and the first pressing block and the fixing plate are fixedly installed through fasteners, the installation hole and the through groove.

[0013] Further, the third pressing block includes a pressing surface, a supporting surface and a limiting surface, the pressing surface and the supporting surface form a pressing angle, and the limiting surface contacts the fixing plate.

[0014] Further, the pressing angle is used to be clamped on two adjacent surfaces of the first product, and the bottom end of the fixing plate is used to abut against the end surface of the second product; the contact surface between the first product and the second product is a sealing surface, and there is a margin space between the fixing plate and the first product, and the margin space is located between the third pressing block and the sealing surface.

[0015] Further, the pressing angle is an acute angle, a right angle or an obtuse angle.

[0016] Adopting the technical solution provided by the present utility model, compared with the existing well-known technologies, the following beneficial effects are achieved:

[0017] In a sealing and pressing structure of the present utility model, a through gap is formed between the first pressing block and the third pressing block, restricting the movement track of the second pressing block, and the second pressing block can move linearly in the through gap. The first pressing block is fixedly installed with the fixing plate, and when the second pressing block moves, the first pressing block remains in place and provides a supporting force to the second pressing block. The third pressing block contacts the fixing plate, and the fixing plate can restrict the third pressing block from deviating except in the direction of the product to be pressed. The movement of the second pressing block in the through gap makes the third pressing block press the product to be pressed, replacing the traditional structure of achieving the pressing effect of the product by tightening bolts. Even when the equipment works in a hot and cold cycling environment, there will be no problem of damage to the threaded holes, nor will there be a problem of damage to the threaded holes of the product caused by tightening bolts, and the sealing effect is better.

[0018] Obviously, the elements or features described in the above individual embodiments can be used alone or in combination in other embodiments. Description of the Drawings

[0019] In the accompanying drawings, the dimensions and proportions do not represent those of the actual product. The drawings are merely illustrative, and for the sake of clarity, certain non-essential elements or features are omitted.

[0020] Figure 1 is a schematic structural diagram of a pressing device for a sealing surface in the prior art;

[0021] Figure 2 is a schematic structural diagram of the working state of the sealing pressing structure in an embodiment of the present invention;

[0022] Figure 3 is a schematic structural diagram of a first pressing block in an embodiment of the present invention;

[0023] Figure 4 is a schematic structural diagram of a second pressing block in an embodiment of the present invention;

[0024] Figure 5 is a schematic structural diagram of a third pressing block in an embodiment of the present invention;

[0025] Description of Reference Numerals

[0026] 100, first pressing block; 110, first inclined surface; 120, mounting hole; 200, second pressing block; 210, connecting hole; 300, third pressing block; 310, third inclined surface; 320, pressing surface; 330, supporting surface; 340, limiting surface; 350, pressing angle; 400, fixing plate; 410, through hole; 420, through groove; 500, first product; 600, second product; 700, sealing surface; 800, passing gap; 900, remaining space. Detailed Embodiment

[0027] Next, the present invention will be described in detail with reference to the accompanying drawings. What is described here is only the preferred embodiment of the present invention, and those skilled in the art can think of other ways to implement the present invention based on the preferred embodiment, and such other ways also fall within the scope of the present invention.

[0028] Embodiment

[0029] Refer to Figures 2 - 5, this embodiment provides a sealing and pressing structure, including a first pressing block 100, a second pressing block 200, and a third pressing block 300. A through gap 800 is formed between the second pressing block 200 and the first pressing block 100. The through gap 800 can limit the movement trajectory of the second pressing block 200, and the second pressing block 200 can move linearly along the through gap 800. The second pressing block 200 is in contact with the first pressing block 100 and the third pressing block 300 on both sides of the through gap 800, and the second pressing block 200 can directly conduct force to the first pressing block 100 and the third pressing block 300. The third pressing block 300 is used to contact the product to be pressed, and the third pressing block 300 can conduct force to the product to be pressed. A fixing plate 400, the first pressing block 100 is fixedly installed on the fixing plate 400; the third pressing block 300 is in contact with the fixing plate 400, and the fixing plate 400 restricts the offset of the third pressing block 300 except in the direction of the product to be pressed. The movement of the second pressing block 200 in the through gap 800 causes the third pressing block 300 to press the product to be pressed. The first pressing block 100 is fixedly installed with the fixing plate 400. When the second pressing block 200 moves, the first pressing block 100 remains in place and provides a supporting force to the second pressing block 200. The third pressing block 300 is in contact with the fixing plate 400, and the fixing plate 400 can restrict the offset of the third pressing block 300 except in the direction of the product to be pressed. The movement of the second pressing block 200 in the through gap 800 causes the third pressing block 300 to press the product to be pressed, replacing the traditional structure of achieving the pressing effect by tightening bolts. Even when the equipment works in a hot and cold cycling environment, there will be no problem of damage to the threaded holes, nor will there be a problem of damage to the threaded holes of the product caused by tightening bolts, and the sealing effect is better.

[0030] In this embodiment, as Figure 2 and Figure 4 shown, the through gap 800 includes a wedge-shaped gap, and the caliber of the wedge-shaped gap gradually decreases in the moving direction of the second pressing block 200. The second pressing block 200 includes an inclined surface that matches the wedge-shaped gap. Among them, the upper and lower surfaces of the second pressing block 200 are both inclined surfaces. When the second pressing block 200 moves in the Figure 2 right side direction shown, the caliber of the through gap 800 passed by the second pressing block 200 gradually decreases, while the opening degrees of the upper and lower inclined surfaces on the left side of the second pressing block 200 gradually increase, which will squeeze the third pressing block 300, so that the third pressing block 300 applies pressure to the product to be pressed, improving the sealing performance of the product.

[0031] Specifically, in some embodiments of the present application, as Figure 2 , Figure 3 and Figure 5As shown in the figure, the first pressing block 100 includes a first inclined surface 110, and the third pressing block 300 includes a third inclined surface 310. The first inclined surface 110 and the third inclined surface 310 are symmetrically arranged with respect to the second pressing block 200, and the first inclined surface 110 and the third inclined surface 310 form a wedge-shaped gap. By forming the wedge-shaped gap with the first inclined surface 110 and the third inclined surface 310, the inclined surface of the second pressing block 200 passes through the wedge-shaped gap, and the volume change before and after the second pressing block 200 generates pressure on the third pressing block 300. It can be understood that when there is only the first inclined surface 110 or the third inclined surface 310, the second pressing block 200 can be provided with only one corresponding inclined surface, and the effect of pressing the third pressing block 300 can also be achieved.

[0032] It can be understood that the movement of the second pressing block 200 requires the drive of an external force, and the drive of the external force needs to be realized through structural design. In some embodiments of the present application, as Figure 2 shown, the fixing plate 400 is provided with a through hole 410. The central axis of the through hole 410 is on the same straight line as the central axis of the passing gap 800, corresponding to the movement track of the linear movement of the second pressing block 200, reducing the assembly difficulty. The second pressing block 200 is provided with a connecting hole 210. The central axis of the connecting hole 210 is on the same straight line as the central axis of the through hole 410, and the aperture of the connecting hole 210 is smaller than the aperture of the through hole 410. The connecting hole 210 is used to connect the power element, and the power element passes through the through hole 410 to pull the second pressing block 200. The central axes of the connecting hole 210 and the through hole 410 are on the same straight line, which can simplify the structure of the power element, and a linear power element can be used. Specifically, threads can be provided in the connecting hole 210, and then a screw rod is connected through the power unit. The screw rod is threadedly connected to the connecting hole 210, and the power unit drives the screw rod to pull to the right, thereby providing a pulling force on the second pressing block 200.

[0033] In some embodiments of the present application, as Figure 2 and Figure 3 shown, an installation hole 120 is provided on the side of the first pressing block 100 facing the fixing plate 400. A through groove 420 is provided at the position of the fixing plate 400 corresponding to the installation hole 120. The first pressing block 100 and the fixing plate 400 are fixedly installed through fasteners, the installation hole 120 and the through groove 420. The through groove 420 facilitates the connection between the fastener and the installation hole 120, reducing the assembly difficulty. A threaded structure can be provided in the installation hole 120, and the fastener can correspondingly adopt a bolt structure. It can be understood that in some embodiments, the first pressing block 100 and the fixing plate 400 can be an integral structure, and the first pressing block 100 and the fixing plate 400 can be processed and formed together, so as to improve the structural strength of the first pressing block 100 and the fixing plate 400.

[0034] In practical applications, there are usually a first product 500 and a second product 600. There is a sealing surface 700 at the contact surface between the first product 500 and the second product 600. When it is necessary to enhance the sealing of the sealing surface 700, the sealing and pressing structure of the present application can be used.

[0035] In some embodiments of the present application, as Figure 5 shown, the third pressing block 300 includes a pressing surface 320, a supporting surface 330 and a limiting surface 340. The pressing surface 320 and the supporting surface 330 form a pressing angle 350, and the limiting surface 340 is in contact with the fixing plate 400. Specifically, the pressing angle 350 is used to engage with two adjacent surfaces of the first product 500, and the pressing angle 350 can increase the contact stability between the third pressing block 300 and the first product 500. The bottom end of the fixing plate 400 is used to abut against the end surface of the second product 600. The contact surface between the first product 500 and the second product 600 is the sealing surface 700. There is a margin space 900 between the fixing plate 400 and the first product 500, and the margin space 900 is located between the third pressing block 300 and the sealing surface 700. The margin space 900 allows the third pressing block 300 to have an offset margin when pressing the first product 500 under force, and will not cause the sealing surface 700 to directly contact the third pressing block 300 and offset part of the pressure, resulting in a reduction in the pressing effect and a weakening of the sealing performance.

[0036] Furthermore, the pressing angle 350 is an acute angle, a right angle or an obtuse angle. It can be understood that by changing the connection angle between the pressing surface 320 and the supporting surface 330, the third pressing block 300 can be correspondingly installed on the first product 500 with different angles, improving the adaptability of the third pressing block 300. It should be noted that in this embodiment, the pressing angle 350 is a right angle, which can fully contact the first product 500 while greatly increasing the contact area between the limiting surface 340 and the fixing plate 400, improving the installation stability.

[0037] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "front", "rear", "left", "right", "up", "down", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0038] In the description of the present utility model, it should be noted that unless otherwise clearly defined and limited, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0039] The protection scope of the present utility model is only defined by the claims. Benefiting from the teachings of the present utility model, those skilled in the art can easily recognize that alternative structures of the structures disclosed in the present utility model can be used as feasible alternative embodiments, and the embodiments disclosed in the present utility model can be combined to generate new embodiments, which also fall within the scope of the appended claims.

Claims

1. A sealing and pressing structure, characterized in that, including a first pressing block (100); a second pressing block (200); a third pressing block (300) which forms a through gap (800) with the first pressing block (100), the second pressing block (200) can linearly move along the through gap (800), and the second pressing block (200) contacts both the first pressing block (100) and the third pressing block (300) on both sides of the through gap (800); the third pressing block (300) is used to contact the product to be pressed; a fixing plate (400), the first pressing block (100) is fixedly installed on the fixing plate (400); the third pressing block (300) contacts the fixing plate (400), and the second pressing block (200) moves in the through gap (800) to press the product to be pressed by the third pressing block (300).

2. The sealed pressing structure according to claim 1, wherein The through gap (800) includes a wedge-shaped gap, the caliber of the wedge-shaped gap gradually shrinks in the moving direction of the second pressing block (200), and the second pressing block (200) includes an inclined surface matching the wedge-shaped gap.

3. The sealed pressing structure according to claim 2, wherein, The first pressing block (100) includes a first inclined surface (110), the third pressing block (300) includes a third inclined surface (310), the first inclined surface (110) and the third inclined surface (310) are symmetrically arranged with respect to the second pressing block (200), and the first inclined surface (110) and the third inclined surface (310) form the wedge-shaped gap.

4. A sealing and pressing structure according to claim 1, wherein The fixing plate (400) is provided with a through hole (410), and the central axis of the through hole (410) is on the same straight line as the central axis of the through gap (800).

5. A sealing and pressing structure according to claim 4, characterized in that, The second pressing block (200) is provided with a connecting hole (210), the central axis of the connecting hole (210) is on the same straight line as the central axis of the through hole (410), and the aperture of the connecting hole (210) is smaller than the aperture of the through hole (410).

6. A sealing and pressing structure according to claim 5, characterized in that, The connecting hole (210) is used to connect a power element, and the power element passes through the through hole (410) to pull the second pressing block (200).

7. A sealing and pressing structure according to claim 1, characterized in that, On one side of the first pressing block (100) facing the fixing plate (400), an installation hole (120) is provided, and at a position corresponding to the installation hole (120) on the fixing plate (400), a through groove (420) is provided. The first pressing block (100) and the fixing plate (400) are fixedly installed through fasteners, the installation hole (120) and the through groove (420).

8. A sealing and pressing structure according to claim 1, characterized in that, The third pressing block (300) includes a pressing surface (320), a supporting surface (330) and a limiting surface (340), the pressing surface (320) and the supporting surface (330) form a pressing angle (350), and the limiting surface (340) contacts the fixing plate (400).

9. A sealing and pressing structure according to claim 8, wherein, The pressing angle (350) is used to engage with two adjacent faces of the first product (500), and the bottom end of the fixing plate (400) is used to abut against the end face of the second product (600); the contact surface between the first product (500) and the second product (600) is a sealing surface (700), and there is a margin space (900) between the fixing plate (400) and the first product (500), and the margin space (900) is located between the third pressing block (300) and the sealing surface (700).

10. A sealing and pressing structure according to claim 8, characterized in that, The pressing angle (350) is an acute angle, a right angle or an obtuse angle.

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