Airflow guiding structure of tail gas treatment device

Abstract

The utility model relates to the technical field of tail gas treatment, in particular to a guide airflow structure of a tail gas treatment device. The burner comprises a round pipe, a combustion cavity used for flame combustion is formed in the round pipe, an annular cavity is formed in the pipe wall of the round pipe, one or more first air inlets connected with the annular cavity are evenly formed in the outer wall of the round pipe in the circumferential direction of the round pipe, and air inlet pipes are connected to the first air inlets. A plurality of second air inlets are evenly distributed in the inner wall of the round pipe, so that the annular cavity is communicated with the combustion cavity, and the second air inlets and the first air inlets in the annular cavity are arranged in a staggered mode in the circumferential direction. The device solves the problem that gas is not guided in equipment.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas treatment, specifically to the guiding air flow structure of a tail gas processor. Background Art

[0002] The process tail gas generated in the semiconductor industry contains flammable, toxic, high greenhouse effect substances, etc. These harmful gases must be harmlessly treated before being discharged into the environment.

[0003] Currently, in the plasma tail gas treatment of semiconductor tail gas treatment, the gas is not guided inside the equipment after the waste gas enters the equipment, which will cause the phenomenon of uneven plasma flame. Summary of the Utility Model

[0004] The utility model provides a guiding air flow structure of a tail gas processor to solve the problems in related technologies. This device solves the problem that the gas is not guided inside the equipment.

[0005] To solve the above problems, the following technical solutions are provided:

[0006] The guiding air flow structure of the tail gas processor of the utility model includes a circular tube. A combustion chamber for flame combustion is formed inside the circular tube. An annular cavity is arranged inside the tube wall of the circular tube. Along the circumferential direction of the outer wall of the circular tube, there are arranged no less than one first air inlet connected to the annular cavity. An air inlet pipe is connected to the first air inlet. A plurality of second air inlets are evenly distributed on the inner wall of the circular tube, so that the annular cavity is communicated with the combustion chamber. The second air inlets and the first air inlets on the annular cavity are arranged in a circumferential dislocation manner.

[0007] In the above solution, through the setting composed of the annular cavity and the combustion chamber, the gas is simultaneously introduced from each air inlet pipe. After the gas enters the annular cavity, it forms a vortex around the outer side of the combustion chamber, and then enters the combustion chamber from the second air inlets on the combustion chamber, so that the eddy current structure is formed, enabling the air flow to converge. The formed vortex-shaped gas has the lowest influence on the flame, reducing the direct impact of the gas on the plasma flame, making the gas contact the high temperature more fully, so that the waste gas can better react with the high temperature generated by the flame, thereby achieving a better treatment effect on the waste gas, and solving the problem that the gas is not guided inside the equipment.

[0008] The circular tube includes an inner tube and an installation tube. The upper end of the installation tube is fixedly connected with a cover plate. The installation tube and the cover plate are sleeved on the inner tube. The installation tube and the inner tube are in a sliding fit. The area enclosed between the outer side wall of the inner tube and the inner side wall of the installation tube is the annular cavity.

[0009] In the above solution, through the sleeved setting, it is convenient for installation. Without fixing, the assembly of this structure can be completed.

[0010] The outer cross-section of the annular cavity is circular, and there are six intake pipes, and the six intake pipes are evenly arranged circumferentially along the outer side surface of the annular cavity.

[0011] In the above solution, through the six intake pipes, when the gas enters from each intake pipe simultaneously, the gas entering the annular cavity is convenient to form a vortex.

[0012] A bottom plate is arranged at the bottom of the circular pipe, and a flame hole is arranged at the center of the bottom plate.

[0013] In the above solution, through the setting of the flame hole, it is used for flame combustion.

[0014] Each of the intake pipes is an S-shaped elbow and extends in a direction away from the annular cavity.

[0015] In the above solution, through the setting of the intake pipes, it is used to connect with the tail gas gas source.

[0016] The central axis of the intake pipe is tangent to the inner wall of the annular cavity.

[0017] In the above solution, the central axis of the intake pipe is tangent to the inner wall of the annular cavity, which is convenient for the gas to form a vortex around the combustion chamber.

[0018] The inner cross-section of the installation pipe is circular, the first air inlet is circular, and the second air inlet is strip-shaped.

[0019] In the above solution, through the setting of the installation pipe, so that the air flow forms a vortex.

[0020] Adopting the above solution, there are the following specific advantages:

[0021] 1. Since the guiding air flow structure of the tail gas processor of the present utility model includes a circular tube, a combustion chamber for flame combustion is formed inside the circular tube. A bottom plate is provided at the bottom of the circular tube, and a flame hole is provided at the center of the bottom plate. An installation tube is concentrically sleeved outside the circular tube, and an annular cavity is formed between the installation tube and the circular tube. A cover plate is hermetically connected to the upper end of the annular cavity. At least one air inlet pipe is provided on the outer side wall of the annular cavity, and the air inlet pipe communicates with the annular cavity. A plurality of second air inlets are evenly distributed on the outer peripheral surface of the combustion chamber, so that the annular cavity communicates with the combustion chamber. The second air inlets and the first air inlets on the annular cavity are arranged in a staggered manner. Through the arrangement of the annular cavity and the combustion chamber, gas is introduced from each air inlet pipe at the same time. After the gas enters the annular cavity, it forms a vortex around the outer side surface of the combustion chamber, and then enters the combustion chamber from the second air inlets on the combustion chamber, so that the eddy current structure is formed, enabling the air flow to converge. The influence of the vortex-shaped gas on the flame is minimized, the direct impact of the gas on the plasma flame is reduced, and the gas can contact the high temperature more fully, so that the waste gas can better react with the high temperature generated by the flame, achieving a better treatment effect on the waste gas. The annular cavity and the combustion chamber provided inside the device both have a guiding effect on the gas.

[0022] 2. The circular tube includes an inner tube and an installation tube. The installation tube and the cover plate are sleeved on the inner tube. The installation tube and the inner tube are in a sliding fit, which is convenient for installation. Without fixing, the assembly of this structure can be completed. The outer cross-section of the annular cavity is circular. There are six air inlet pipes, and the six air inlet pipes are evenly arranged circumferentially on the outer side surface of the annular cavity. When gas is introduced from each air inlet pipe at the same time, the gas entering the annular cavity is convenient to form a vortex. A bottom plate is provided at the bottom of the circular tube, and a flame hole is provided at the center of the bottom plate for flame combustion. The air inlet pipes are all S-shaped bent pipes for connecting with the tail gas gas source. The central axis of the air inlet pipe is tangent to the inner wall of the annular cavity, which is convenient for the gas to form a vortex around the combustion chamber. The inner wall cross-section of the installation tube is circular to facilitate the air flow to form a vortex shape. Description of the Drawings

[0023] Figure 1 It is a schematic structural diagram of the guiding air flow structure of the tail gas processor;

[0024] Figure 2 It is a top view of the guiding air flow structure of the tail gas processor;

[0025] Figure 3 It is a cross-sectional view of the guiding air flow structure of the tail gas processor;

[0026] Description of the reference numerals: 1. Circular tube; 101. Inner tube; 102. Installation tube; 2. Combustion chamber; 3. Annular cavity; 4. First air inlet; 5. Second air inlet; 6. Air inlet pipe; 7. Cover plate; 8. Bottom plate; 9. Flame hole. Detailed Embodiment

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0028] As Figures 1 to 3 shown, the guiding air flow structure of the tail gas processor of the present utility model includes a circular tube 1. A combustion chamber 2 for flame combustion is formed inside the circular tube 1. An annular cavity 3 is provided inside the tube wall of the circular tube 1. Along the circumferential direction of the outer wall of the circular tube 1, there are arranged no less than one first air inlet 4 connected to the annular cavity 3. An air inlet pipe 6 is connected to the first air inlet 4. A plurality of second air inlets 5 are evenly distributed on the inner wall of the circular tube 1, so that the annular cavity 3 communicates with the combustion chamber 2. The second air inlets 5 and the first air inlets 4 on the annular cavity 3 are arranged in a circumferential dislocation. The first air inlets 4 are circular, and the second air inlets 5 are strip-shaped. Through the setting of the annular cavity 3 and the combustion chamber 2, gases are simultaneously introduced from each air inlet pipe 6. After the gases enter the annular cavity 3, they form a vortex around the outer side surface of the combustion chamber 2, and then enter the combustion chamber 2 from the second air inlets 5 on the combustion chamber 2, so that the eddy current structure is formed, enabling the air flow to converge, forming a vortex-shaped gas with the lowest impact on the flame, reducing the direct impact of the gas on the plasma flame, making the gas come into more sufficient contact with the high temperature generated by the flame for reaction, thereby treating the waste gas.

[0029] The circular tube 1 includes an inner tube 101 and an installation tube 102. A cover plate 7 is fixedly connected to the upper end of the installation tube 102. The installation tube 102 and the cover plate 7 are sleeved on the inner tube 101. The installation tube 102 is in sliding fit with the inner tube 101. The area enclosed between the outer side wall of the inner tube 101 and the inner side wall of the installation tube 102 is the annular cavity 3, which is convenient for installation. Without fixing, the assembly of this structure can be completed.

[0030] The outer cross-section of the installation tube 102 is circular. There are six air inlet pipes 6, and the six air inlet pipes 6 are evenly arranged along the circumferential direction of the outer side surface of the annular cavity 3. The central axis of the air inlet pipe 6 is tangent to the inner wall of the annular cavity 3, which is convenient for the gas to form a vortex around the combustion chamber 2, and the tail gas air flow entering the combustion chamber 2 from the second air inlets 5 on the combustion chamber 2 forms a vortex shape.

[0031] A bottom plate 8 is provided at the bottom of the circular tube 1, and a flame hole 9 is provided at the center of the bottom plate 8.

[0032] The air inlet pipes 6 are all S-shaped bent pipes, extending in the direction away from the annular cavity 3 for connecting to the tail gas gas source.

[0033] During operation, the exhaust gas simultaneously enters through six intake pipes 6. The exhaust gas enters the annular cavity 3 along the tangential direction of the inner wall of the annular cavity 3. The exhaust gas entering the annular cavity 3 forms a vortex around the outer side of the combustion chamber 2. Then the exhaust gas enters the combustion chamber 2 through the second intake port 5 on the combustion chamber 2. The shape of the exhaust gas flow presents a vortex shape, enabling the formation of a vortex structure so that the exhaust gas converges. The influence of the vortex-shaped gas on the flame is minimized, effectively reducing the direct impact of the gas on the plasma flame. The exhaust gas makes full contact with the high temperature generated by the flame, thereby enabling the exhaust gas to react better to achieve the exhaust gas treatment effect.

[0034] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present invention. In the description of the present invention, unless otherwise specified and limited, it should be noted that the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a mechanical connection or an electrical connection, or it can be the internal communication of two elements. It can be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to specific circumstances.

[0035] The above is only the preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. The guiding air flow structure of the tail gas processor, characterized in that It includes a circular tube (1), a combustion chamber (2) for flame combustion is formed inside the circular tube (1), an annular cavity (3) is arranged in the tube wall of the circular tube (1), and not less than one first air inlet (4) connected to the annular cavity (3) is arranged circumferentially along the outer wall of the circular tube (1). An air inlet pipe (6) is connected to the first air inlet (4). A plurality of second air inlets (5) are evenly distributed on the inner wall of the circular tube (1), so that the annular cavity (3) communicates with the combustion chamber (2). The second air inlets (5) and the first air inlets (4) on the annular cavity (3) are arranged in a circumferential dislocation manner.

2. The guiding air flow structure of the tail gas processor according to claim 1, characterized in that, The circular tube (1) contains an inner tube (101) and a mounting tube (102). A cover plate (7) is fixedly connected to the upper end of the mounting tube (102). The mounting tube (102) and the cover plate (7) are sleeved on the inner tube (101). The mounting tube (102) and the inner tube (101) are in sliding fit. The region enclosed by the outer side wall of the inner tube (101) and the inner side wall of the mounting tube (102) is the annular cavity (3).

3. The guiding air flow structure of the tail gas processor according to claim 2, characterized in that, The outer cross-section of the mounting tube (102) is circular. There are six air inlet pipes (6), and the six air inlet pipes (6) are evenly arranged circumferentially along the outer side surface of the annular cavity (3).

4. The guiding air flow structure of the tail gas processor according to claim 1, characterized in that, A bottom plate (8) is arranged at the bottom of the circular tube (1), and a flame hole (9) is arranged at the center of the bottom plate (8).

5. The guiding air flow structure of the tail gas processor according to claim 1, characterized in that, The air inlet pipes (6) are all S-shaped bent pipes and extend along the direction away from the annular cavity (3).

6. The guiding air flow structure of the exhaust gas processor according to claim 1, characterized in that, The central axis of the air inlet pipe (6) is tangent to the inner wall of the annular cavity (3).

7. The guiding air flow structure of the tail gas processor according to claim 2, characterized in that, The inner wall cross-section of the mounting tube (102) is circular, the first air inlet (4) is circular, and the second air inlet (5) is strip-shaped.

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