Mixed gas concentration detection device and system and semiconductor process equipment

Abstract

The utility model relates to a mixed gas concentration detection device, a mixed gas concentration detection system and semiconductor process equipment. The mixed gas concentration detection device comprises a mixed gas input unit, a concentration analysis unit, a condensation unit and a detection unit, the system has the advantages that the mixed gas input unit is communicated with the concentration analysis unit, and the TCS concentration is detected by adopting the mass spectrometer with higher precision and lower delay, so that the precision and the effect of TCS concentration detection are improved; the mixed gas input unit is communicated with the condensation unit, the mixed gas is condensed and weighed to obtain the weight of the condensed liquid and the total flow of the condensed gas, and the TCS concentration is calculated according to the weight of the condensed liquid and the total flow of the condensed gas, so that a result detected by the mass spectrometry detection element is verified; and the reliability of detection results is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of bubbling equipment, in particular to a mixed gas concentration detection device, a system and a semiconductor process equipment. Background Art

[0002] TCS bubblers are widely used in silicon carbide epitaxial equipment and silicon epitaxial equipment in the semiconductor industry. In such equipment, TCS (trichlorosilane) is an important raw material, and its concentration is an important parameter for the epitaxial process. This patent is for detecting the concentration of TCS in the TCS mixed with H2 output by the bubbler to ensure that the bubbler can be adapted to various epitaxial machines.

[0003] Currently, the general process for detecting the concentration of TCS bubblers in semiconductor factories is as follows: After the TCS bubbler is bubbled with H2 under controlled pressure and flow, it outputs a mixed gas of TCS and H2. After passing through a pressure control module and a flow control module at the epitaxial machine end, it is transported to a concentration sensor to detect its TCS concentration; in addition, the concentration sensor used in this detection process is generally an optical sensor.

[0004] However, currently, the concentration sensor is generally an optical sensor, which has problems such as high detection delay and low accuracy; in addition, there is no process for verifying the concentration sensor in the existing TCS bubbler concentration detection process, and the accuracy of the detection structure provided by the corresponding concentration sensor cannot be confirmed.

[0005] Currently, there is no effective solution to the problems of high detection delay, low accuracy, and inability to verify the detection results in the related art. Summary of the Utility Model

[0006] The purpose of the utility model is to provide a mixed gas concentration detection device, a system and a semiconductor process equipment for the deficiencies in the prior art, so as to solve the problems of high detection delay, low accuracy, and inability to verify the detection results in the related art.

[0007] To achieve the above purpose, the technical solution adopted by the utility model is:

[0008] In the first aspect, the utility model provides a mixed gas concentration detection device, including:

[0009] A mixed gas input unit, which is connected to the mixing device and is used to obtain and transport the mixed gas generated by the mixing device;

[0010] A concentration analysis unit, which is respectively connected to the mixed gas input unit and the processing device, and is used to perform mass spectrometry analysis on the mixed gas to obtain the first concentration information of the mixed gas;

[0011] a condensing unit, the condensing unit being in communication with the mixed gas input unit and the processing device, respectively, and being configured to condense the mixed gas to obtain condensed gas and condensed liquid;

[0012] A detection unit is provided in the condensation unit, and is used to measure the condensed gas and the condensed liquid and calculate the second concentration information of the mixed gas to verify the first concentration information.

[0013] In some embodiments, further comprising:

[0014] A first purge unit is connected to the condensing unit and is used to purge the pipeline of the condensing unit.

[0015] In a second aspect, the present invention further provides a mixed gas concentration detection system, comprising:

[0016] The mixed gas concentration detection device as described in the first aspect;

[0017] a mixing device, the mixing device being in communication with the mixed gas concentration detection device and being configured to deliver the mixed gas to the mixed gas concentration detection device;

[0018] A processing device is connected to the mixed gas concentration detection device and the mixing device, and is used to process the exhaust gas.

[0019] In some embodiments, the mixing device comprises:

[0020] a liquid input unit, the liquid input unit being connected to a liquid source and the mixed gas concentration detection device, respectively, and being used to deliver liquid to the mixed gas concentration detection device;

[0021] a carrier gas input unit, the carrier gas input unit being connected to a carrier gas source and the mixed gas concentration detection device, respectively, and being used to deliver carrier gas to the mixed gas concentration detection device;

[0022] a gas mixing unit, the gas mixing unit being connected to the liquid input unit, the carrier gas input unit and the mixed gas concentration detection device, respectively, for performing a bubbling reaction on the liquid TCS and generating a mixed gas;

[0023] A mixed gas output unit is connected to the gas mixing unit and the mixed gas concentration detection device respectively, and is used to deliver the mixed gas.

[0024] In some embodiments, the mixing device further comprises:

[0025] A second purging unit, which is respectively connected to a purging gas source, the liquid input unit, the carrier gas input unit, and the mixed gas output unit, and is used for purging the pipelines of the liquid input unit, the carrier gas input unit, and the mixed gas output unit;

[0026] A first vacuum unit, which is respectively connected to a power gas source, the second purging unit, and the gas mixing unit, and is used for vacuum processing the entire device.

[0027] In some embodiments thereof, the processing device includes:

[0028] A second vacuum unit, which is connected to the mixed gas concentration detection device and is used for vacuum processing the mixed gas concentration detection device;

[0029] A processing unit, which is connected to the mixed gas concentration detection device and the mixing unit, and is used for processing the exhaust gas discharged from the mixed gas concentration detection device and the gas mixing unit.

[0030] In a third aspect, the present invention further provides a semiconductor process system, including:

[0031] The mixed gas concentration detection device as described in the first aspect; or

[0032] The mixed gas concentration detection system as described in the second aspect.

[0033] By adopting the above technical solutions, compared with the prior art, the present invention has the following technical effects:

[0034] A mixed gas concentration detection device, system, and semiconductor process equipment of the present invention connect a mixed gas input unit to a concentration analysis unit, and use a mass spectrometer with higher precision and lower delay to detect the concentration of TCS, improving the precision and effect of TCS concentration detection; by connecting the mixed gas input unit to a condensation unit, obtaining the weight of the condensed liquid and the total flow rate of the condensed gas by condensing and weighing the mixed gas, and calculating the TCS concentration from the weight of the condensed liquid and the total flow rate of the condensed gas to verify the result detected by the mass spectrometry detection element, improving the reliability of the detection result. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 is a schematic framework diagram of a mixed gas concentration detection device according to an embodiment of the present invention;

[0036] Figure 2 is a schematic framework diagram of a mixed gas input unit, a concentration analysis unit, a condensation unit, and a detection unit according to an embodiment of the present invention;

[0037] Figure 3 is a schematic framework diagram of the first purging unit according to an embodiment of the present utility model;

[0038] Figure 4 is a schematic framework diagram of the mixing device according to an embodiment of the present utility model;

[0039] Figure 5 is a schematic framework diagram of the liquid input unit, loading input unit, gas mixing unit, mixed gas output unit, second purging unit and first vacuum unit according to an embodiment of the present utility model;

[0040] Figure 6 is a schematic framework diagram of the processing device according to an embodiment of the present utility model;

[0041] Figure 7 is a schematic framework diagram of the second vacuum unit and the processing unit according to an embodiment of the present utility model;

[0042] Figure 8 is a schematic diagram of a specific embodiment of the mixed gas concentration detection system according to an embodiment of the present utility model.

[0043] The reference numerals therein are: 100, mixed gas concentration detection device; 110, mixed gas input unit; 111, first mixed gas input pipeline element; 112, second mixed gas input pipeline element; 113, third mixed gas input pipeline element; 120, concentration analysis unit; 121, fourth mixed gas input pipeline element; 122, first mixed gas output pipeline element; 123, mass spectrometry detection element; 130, condensation unit; 131, fifth mixed gas input pipeline element; 132, condensation element; 133, condensed gas output pipeline element; 134, condensed liquid output pipeline element; 135, storage element; 140, detection unit; 141, gas content detection element; 142, liquid weight detection element; 150, first purging unit; 151, first purging gas input pipeline element; 152, second purging gas input pipeline element; 153, first purging gas output pipeline element; 154, third purging gas input pipeline element; 155, second purging gas output pipeline element; 156, fourth purging gas input pipeline element; 157, third purging gas output pipeline element;

[0044] 200, Mixing device; 210, Liquid input unit; 211, Liquid input element; 220, Carrier gas input unit; 221, Carrier gas input element; 230, Gas mixing unit; 231, Gas mixing element; 240, Mixed gas output unit; 241, Second mixed gas output pipeline element; 250, Second purging unit; 251, Fifth purging gas input pipeline element; 252, Sixth purging gas input pipeline element; 253, Seventh purging gas input pipeline element; 254, Eighth purging gas input pipeline element; 255, Fourth purging gas output pipeline element; 260, First vacuum unit; 261, First vacuum pump element; 262, First vacuum pipeline element; 263, Second vacuum pipeline element; 264, Third vacuum pipeline element;

[0045] 300, Processing device; 310, Second vacuum unit; 311, Second vacuum pump element; 312, Fourth vacuum pipeline element; 313, Fifth vacuum pipeline element; 314, Sixth vacuum pipeline element; 320, Processing unit; 321, Processing element. Detailed implementation manners

[0046] In order to make the objectives, technical solutions and advantages of the present application clearer and more understandable, the present application will be described and explained below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application. Based on the embodiments provided in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope of protection of the present application.

[0047] Obviously, the accompanying drawings in the following description are only some examples or embodiments of the present application. For those of ordinary skill in the art, without making creative efforts, the present application can also be applied to other similar scenarios based on these drawings. In addition, it can also be understood that although the efforts made in this development process may be complex and lengthy, for those of ordinary skill in the art related to the content disclosed in the present application, some design, manufacturing or production changes based on the technical content disclosed in the present application are only conventional technical means and should not be understood as the content disclosed in the present application being insufficient.

[0048] When "embodiment" is mentioned in the present application, it means that the specific features, structures or characteristics described in combination with the embodiment can be included in at least one embodiment of the present application. The appearance of this phrase in various positions in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those of ordinary skill in the art explicitly and implicitly understand that the embodiments described in the present application can be combined with other embodiments without conflict.

[0049] Example 1

[0050] This embodiment relates to a mixed gas concentration detection device in the present utility model.

[0051] A schematic embodiment of the present utility model, as Figure 1 shown, a mixed gas concentration detection device 100 for detecting the TCS concentration includes a mixed gas input unit 110, a concentration analysis unit 120, a condensation unit 130, and a detection unit 140. Among them, the mixed gas input unit 110 is connected to the mixing device 200 and is used to acquire and transport the mixed gas generated by the mixing device 200; the concentration analysis unit 120 is respectively connected to the mixed gas input unit 110 and the processing device 300, and is used to perform mass spectrometry analysis on the mixed gas to obtain the first concentration information of the mixed gas; the condensation unit 130 is respectively connected to the mixed gas input unit 110 and the processing device 300, and is used to condense the mixed gas to obtain condensed gas and condensed liquid; the detection unit 140 is arranged in the condensation unit 130 and is used to measure the condensed gas and the condensed liquid and calculate the second concentration information of the mixed gas to verify the first concentration information.

[0052] As Figure 2 shown, the mixed gas input unit 110 includes a first mixed gas input pipeline element 111, a second mixed gas input pipeline element 112, and a third mixed gas input pipeline element 113. Among them, the first mixed gas input pipeline element 111 is connected to the mixing device 200 and is used to acquire and transport the mixed gas transported by the mixing device 200; the second mixed gas input pipeline element 112 is connected to the first mixed gas input pipeline element 111 and the concentration analysis unit 120, and is used to transport the mixed gas to the concentration analysis unit 120; the third mixed gas input pipeline element 113 is connected to the first mixed gas input pipeline element 111 and the condensation unit 130, and is used to transport the mixed gas to the condensation unit 130.

[0053] Specifically, the first end of the first mixed gas input pipeline element 111 is connected to the mixing device 200, and the second end of the first mixed gas input pipeline element 111 is connected in parallel with the second mixed gas input pipeline element 112 and the third mixed gas input pipeline element 113.

[0054] In some of these embodiments, the first mixed gas input pipeline element 111 includes, but is not limited to, a stainless steel pipe.

[0055] Specifically, the first end of the second mixed gas input pipeline element 112 is connected to the second end of the first mixed gas input pipeline element 111, and the second end of the second mixed gas input pipeline element 112 is connected to the concentration analysis unit 120.

[0056] In some of these embodiments, the second mixed gas input pipeline element 112 includes, but is not limited to, a stainless steel pipe.

[0057] Specifically, the first end of the third mixed gas input pipeline element 113 communicates with the second end of the first mixed gas input pipeline element 111, and the second mixed gas input pipeline element 112 and the third mixed gas input pipeline element 113 are arranged in parallel, and the second end of the third mixed gas input pipeline element 113 communicates with the condensation unit 130.

[0058] In some of these embodiments, the third mixed gas input pipeline element 113 includes, but is not limited to, a stainless steel pipe.

[0059] Furthermore, the mixed gas input unit 110 further includes a first switching element, a second switching element, a first pressure control element, a first flow control element, and a first pressure detection element. Among them, the first switching element is arranged on the second mixed gas input pipeline element 112 for controlling the flow of the second gas output element; the second switching element is arranged on the third mixed gas input pipeline element 113 for controlling the flow of the third mixed gas input pipeline element 113; the first pressure control element is arranged on the first mixed gas input pipeline element 111 for adjusting the gas pressure inside the first mixed gas input pipeline element 111; the first flow control element is arranged on the first mixed gas input pipeline element 111 for regulating the gas flow inside the first mixed gas input pipeline element 111; the first pressure detection element communicates with the first mixed gas input pipeline element 111 for real-time monitoring of the pressure inside the first mixed gas input pipeline element 111.

[0060] In some of these embodiments, the first switching element includes, but is not limited to, a diaphragm valve. For example, a first pneumatic diaphragm valve.

[0061] In some of these embodiments, the second switching element includes, but is not limited to, a diaphragm valve. For example, a second pneumatic diaphragm valve.

[0062] In some of these embodiments, the first pressure control element includes, but is not limited to, a PC pressure controller.

[0063] It should be noted that the first flow control element is located downstream of the first pressure control element.

[0064] In some of these embodiments, the first flow control element includes, but is not limited to, a flow meter.

[0065] It should be noted that the first pressure detection element is located downstream of the first pressure control element and upstream of the first flow control element.

[0066] In some of these embodiments, the first pressure detection element includes, but is not limited to, a pressure sensor.

[0067] As Figure 2 shown, the concentration analysis unit 120 includes a fourth mixed gas input pipeline element 121, a first mixed gas output pipeline element 122, and a mass spectrometry detection element 123. Among them, the fourth mixed gas input pipeline element 121 is connected to the mixed gas input unit 110 for acquiring and transporting the mixed gas; the first mixed gas output pipeline element 122 is connected to the fourth mixed gas input pipeline element 121 and the processing device 300 for transporting the waste gas; the mass spectrometry detection element 123 is respectively connected to the fourth mixed gas input pipeline element 121 and the processing device 300 for performing mass spectrometry analysis on the mixed gas to obtain the first concentration information of the mixed gas.

[0068] Specifically, the first end of the fourth mixed gas input pipeline element 121 is connected to the second end of the second mixed gas input pipeline element 112, and the second end of the fourth mixed gas input pipeline element 121 is connected to the mass spectrometry detection element 123.

[0069] In some of these embodiments, the fourth mixed gas input pipeline element 121 includes, but is not limited to, a stainless steel pipe.

[0070] Specifically, the first end of the first mixed gas output pipeline element 122 is connected to the fourth mixed gas input pipeline element 121, and the second end of the first mixed gas output pipeline element 122 is connected to the processing device 300.

[0071] In some of these embodiments, the first mixed gas output pipeline element 122 includes, but is not limited to, a stainless steel pipe.

[0072] In some of these embodiments, the mass spectrometry detection element 123 includes, but is not limited to, a mass spectrometer.

[0073] It should be noted that the gas flow rate that can pass through the mass spectrometry detection element 123 is limited. When the flow rate of the mixed gas transported by the fourth mixed gas input pipeline element 121 is too high, the first mixed gas output pipeline element 122 can play a role of bypass drainage.

[0074] Furthermore, the concentration analysis unit 120 further includes a third switch element and a first one-way element. Among them, the third switch element is arranged on the fourth mixed gas input pipeline element 121 for controlling the flow of the fourth mixed gas input pipeline element 121; the first one-way element is arranged on the first mixed gas output pipeline element 122 for preventing the gas in the first mixed gas output pipeline element 122 from flowing back.

[0075] In some of these embodiments, the third switching element includes, but is not limited to, a diaphragm valve. For example, a third pneumatic diaphragm valve.

[0076] In some of these embodiments, the first one-way element includes, but is not limited to, a check valve. For example, a first check valve.

[0077] As Figure 2 As shown, the condensation unit 130 includes a fifth mixed gas input pipeline element 131, a condensation element 132, a condensed gas output pipeline element 133, a condensed liquid output pipeline element 134, and a storage element 135. Among them, the fifth mixed gas input pipeline element 131 is connected to the mixed gas input unit 110 for acquiring and transporting the mixed gas; the condensation element 132 is connected to the fifth mixed gas input pipeline element 131 for condensing the mixed gas to obtain condensed gas and condensed liquid; the condensed gas output pipeline element 133 is connected to the condensation element 132 and the processing device 300 for transporting the condensed gas; the condensed liquid output pipeline element 134 is connected to the condensation element 132 for transporting the condensed liquid; the storage element 135 is connected to the condensed liquid output pipeline element 134 for storing the condensed liquid.

[0078] Specifically, the first end of the fifth mixed gas input pipeline element 131 is connected to the second end of the third mixed gas input pipeline element 113, and the second end of the fifth mixed gas input pipeline element 131 is connected to the intake end of the condensation element 132.

[0079] In some of these embodiments, the fifth mixed gas input pipeline element 131 includes, but is not limited to, a stainless steel pipe.

[0080] Specifically, the condensation element 132 includes a condensation tank, a refrigerator, a first coolant pipeline element, and a second coolant pipeline element. Among them, the condensation tank is connected to the third mixed gas input pipeline element 113, the processing device 300, and the storage element 135 through the fifth mixed gas input pipeline element 131, the condensed gas output pipeline element 133, and the condensed liquid output pipeline element 134 respectively for condensing the mixed gas to obtain condensed gas and condensed liquid; the first end of the first coolant pipeline element is connected to the condensation tank, and the second end of the first coolant pipeline element is connected to the refrigerator; the first end of the second coolant pipeline element is connected to the refrigerator, and the second end of the second coolant pipeline element is connected to the condensation tank; the refrigerator can transport coolant to the condensation tank and cool the coolant after heat exchange to realize the recycling of the coolant.

[0081] More specifically, the condensation tank further includes an air inlet, an air outlet, a liquid drain port, a first cooling port, and a second cooling port. Among them, the air inlet is opened at the top of the condensation tank and is used to communicate with the second end of the fifth mixed gas input pipeline element 131; the air outlet is opened at the top of the condensation tank and is used to communicate with the condensation gas output pipeline element 133; the liquid drain port is opened at the bottom of the condensation tank and is used to communicate with the condensation liquid output pipeline element 134; the first cooling port is opened on the side wall of the condensation tank and is used to communicate with the first coolant pipeline element; the second cooling port is opened on the side wall of the condensation tank and is used to communicate with the second coolant pipeline element.

[0082] It should be noted that the temperature inside the condensation tank is -15°C to -5°C; preferably, the temperature inside the condensation tank is -10°C.

[0083] In some of these embodiments, the condensation tank includes, but is not limited to, a stainless steel tank.

[0084] In some of these embodiments, the refrigerator includes, but is not limited to, a chiller.

[0085] In some of these embodiments, the first coolant pipeline element includes, but is not limited to, a stainless steel pipe.

[0086] In some of these embodiments, the second coolant pipeline element includes, but is not limited to, a stainless steel pipe.

[0087] Specifically, the first end of the condensation gas output pipeline element 133 is communicated with the air outlet of the condensation tank, and the second end of the condensation gas output pipeline element 133 is communicated with the processing device 300.

[0088] In some of these embodiments, the condensation gas output pipeline element 133 includes, but is not limited to, a stainless steel pipe.

[0089] Specifically, the first end of the condensation liquid output pipeline element 134 is communicated with the liquid drain port of the condensation tank, and the second end of the condensation liquid output pipeline element 134 is communicated with the storage element 135.

[0090] In some of these embodiments, the condensation liquid output pipeline element 134 includes, but is not limited to, a stainless steel pipe.

[0091] Specifically, the storage element 135 is communicated with the condensation liquid output pipeline element 134 and is used to collect the condensation liquid generated in the condensation element 132.

[0092] In some of these embodiments, the storage element 135 includes, but is not limited to, a receiving bottle.

[0093] Furthermore, the condensation unit 130 further includes a fourth switching element, a fifth switching element, a second one-way element, a sixth switching element, a seventh switching element, and a second pressure detection element. Among them, the fourth switching element is disposed at the intake end of the condensation element 132 for controlling the flow between the fifth mixed gas input pipeline element 131 and the condensation element 132; the fifth switching element is disposed at the outlet end of the condensation element 132 for controlling the flow between the condensation gas output pipeline element 133 and the condensation element 132; the second one-way element is disposed in the condensation gas output pipeline element 133 for preventing the gas in the condensation gas output pipeline element 133 from flowing backward; the sixth switching element is disposed at the liquid discharge end of the condensation element 132 for controlling the flow between the condensation element 132 and the condensation liquid output pipeline element 134; the seventh switching element is disposed in the condensation liquid output pipeline element 134 for controlling the flow of the condensation liquid output pipeline element 134; the second pressure detection element is disposed in the condensation gas output pipeline element 133 for real-time monitoring of the pressure inside the condensation gas output pipeline element 133.

[0094] In some of these embodiments, the fourth switching element includes, but is not limited to, a diaphragm valve. For example, a fourth pneumatic diaphragm valve.

[0095] In some of these embodiments, the fifth switching element includes, but is not limited to, a diaphragm valve. For example, a fifth pneumatic diaphragm valve.

[0096] It should be noted that the second one-way element is located downstream of the fifth switching element.

[0097] In some of these embodiments, the second one-way element includes, but is not limited to, a one-way valve. For example, a second one-way valve.

[0098] In some of these embodiments, the sixth switching element includes, but is not limited to, a diaphragm valve. For example, a first manual diaphragm valve.

[0099] In some of these embodiments, the seventh switching element includes, but is not limited to, a diaphragm valve. For example, a second manual diaphragm valve.

[0100] It should be noted that the second pressure detection element is located downstream of the second one-way element.

[0101] In some of these embodiments, the second pressure detection element includes, but is not limited to, a pressure sensor.

[0102] As Figure 2 shown, the detection unit 140 includes a gas content detection element 141 and a liquid weight detection element 142. Among them, the gas content detection element 141 is disposed at the outlet end of the condensation unit 130 for detecting the content of the condensation gas; the liquid weight detection element 142 is disposed at the liquid storage end of the condensation unit 130 for detecting the weight of the condensation liquid.

[0103] Specifically, the gas content detection element 141 is disposed in the condensed gas output pipeline element 133 for detecting the total gas flow rate flowing through the condensed gas output pipeline element 133.

[0104] In some embodiments thereof, the gas content detection element 141 includes, but is not limited to, a flow meter.

[0105] Specifically, the liquid weight detection element 142 is disposed at the bottom of the storage element 135 for detecting the weight of the storage element 135, so as to detect the weight of the condensed liquid inside the storage element 135.

[0106] In some embodiments thereof, the liquid weight detection element 142 includes, but is not limited to, an electronic balance.

[0107] The usage method of this embodiment is as follows:

[0108] (I) Gas analysis

[0109] Turn on the first pressure control element and the first flow control element to adjust the pressure and flow rate of the mixed gas conveyed in the first mixed gas input pipeline element 111, so as to ensure the stability of the mixed gas in the first mixed gas input pipeline element 111;

[0110] Turn on the first switch element and the third switch element, and convey the mixed gas to the mass spectrometry detection element 123 through the first mixed gas input pipeline element 111, the second mixed gas input pipeline element 112, and the fourth mixed gas input pipeline element 121. The mass spectrometry detection element 123 can detect the mixed gas, so as to obtain the concentration of TCS gas in the mixed gas and obtain the first concentration information;

[0111] (II) Condensation

[0112] Turn on the second switch element and the fourth switch element, so that the first mixed gas input pipeline element 111, the fifth mixed gas input pipeline element 131, and the condensation element 132 are interconnected, so that the mixed gas flows into the condensation element 132, and the condensation element 132 condenses the mixed gas to obtain condensed liquid and condensed gas;

[0113] (III) Collection of condensed liquid

[0114] Turn on the sixth switch element and the seventh switch element, so that the condensation element 132, the condensed liquid output pipeline element 134, and the storage element 135 are interconnected, so that the condensed liquid flows into the interior of the storage element 135;

[0115] (IV) Measurement of condensed gas

[0116] Turn on the fifth switching element to connect the condensation element 132 with the condensed gas output pipeline element 133. The gas content detection element 141 can detect the condensed gas flowing through the condensed gas output pipeline element 133, so as to obtain the total flow rate of the condensed gas.

[0117] (V) Condensed liquid measurement

[0118] The staff separates the storage element 135 from the condensed liquid output pipeline element 134 and places the storage element 135 on the liquid weight detection element 142 to obtain the weight of the condensed liquid inside the storage element 135.

[0119] (VI) Verification

[0120] Calculate the second concentration information through the total flow rate of the condensed gas and the weight of the condensed liquid. By comparing the second concentration information with the first concentration information, it is judged whether the result detected by the mass spectrometry detection element 123 is consistent with the actual situation.

[0121] The advantages of this embodiment are as follows: by connecting the mixed gas input unit with the concentration analysis unit and using a mass spectrometer with higher precision and lower delay to detect the TCS concentration, the precision and effect of the TCS concentration detection are improved; by connecting the mixed gas input unit with the condensation unit, the weight of the condensed liquid and the total flow rate of the condensed gas are obtained by condensing and weighing the mixed gas, and the TCS concentration is calculated through the weight of the condensed liquid and the total flow rate of the condensed gas to verify the result detected by the concentration analysis unit, thereby improving the reliability of the detection result.

[0122] Embodiment 2

[0123] This embodiment is a variant embodiment of Embodiment 1.

[0124] As Figure 3 shown, the mixed gas concentration detection device 100 further includes a first purging unit 150. Among them, the first purging unit 150 is respectively connected to the condensation unit 130 and the processing device, and is used to purge the pipeline of the condensation unit 130.

[0125] As Figure 3As shown, the first purge unit 150 includes a first purge gas input pipeline element 151, a second purge gas input pipeline element 152, a first purge gas output pipeline element 153, a third purge gas input pipeline element 154, a second purge gas output pipeline element 155, a fourth purge gas input pipeline element 156 and a third purge gas output pipeline element 157. The first purge gas input pipeline element 151 is connected to the purge gas source for obtaining and delivering purge gas; the second purge gas input pipeline element 152 is respectively connected to the first purge gas input pipeline element 151 and the air intake structure of the condensing unit 130 for delivering purge gas; the first purge gas output pipeline element 153 is respectively connected to the air intake structure of the condensing unit 130 and the processing device 300 for delivering exhaust gas; the third purge gas input pipeline element 154 is respectively connected to the first purge gas input pipeline element 151, the second purge gas output pipeline element 155 and the fourth purge gas input pipeline element 156 and the third purge gas output pipeline element 157. The exhaust structure of the condensing unit 130 is connected for conveying purge gas; the second purge gas output pipeline element 155 is respectively connected with the exhaust structure of the condensing unit 130 and the processing device 300 for conveying waste gas; the fourth purge gas input pipeline element 156 is respectively connected with the first purge gas input pipeline element 151 and the drainage structure of the condensing unit 130 for conveying purge gas; the third purge gas output pipeline element 157 is respectively connected with the drainage structure of the condensing unit 130 and the processing device 300 for conveying waste gas.

[0126] It should be noted that the purge gas is high-purity argon.

[0127] Specifically, a first end of the first purge gas input pipeline element 151 is connected to the purge gas source, and a second end of the first purge gas input pipeline element 151 is connected to the second purge gas input pipeline element 152, the third purge gas input pipeline element 154 and the fourth purge gas input pipeline element 156 respectively.

[0128] In some embodiments, the first purge gas input pipeline element 151 includes but is not limited to a stainless steel pipe.

[0129] Specifically, the first end of the second purge gas input pipeline element 152 is connected to the second end of the first purge gas input pipeline element 151, the second end of the second purge gas input pipeline element 152 is connected to the fifth mixed gas input pipeline element 131, and the connection point between the second purge gas input pipeline element 152 and the fifth mixed gas input pipeline element 131 is located upstream of the fourth switching element.

[0130] In some embodiments, the second purge gas input pipeline component 152 includes, but is not limited to, a stainless steel pipe.

[0131] Specifically, the first end of the first purge gas output pipeline element 153 communicates with the fifth mixed gas input pipeline element 131, and the connection between the first purge gas output pipeline element 153 and the fifth mixed gas input pipeline element 131 is upstream of the fourth switching element. The second end of the first purge gas output pipeline element 153 communicates with the processing device 300.

[0132] In some of these embodiments, the first purge gas output pipeline element 153 includes, but is not limited to, a stainless steel pipe.

[0133] Specifically, the first end of the third purge gas input pipeline element 154 communicates with the second end of the first purge gas input pipeline element 151. The second end of the third purge gas input pipeline element 154 communicates with the condensate gas output pipeline element 133, and the connection between the third purge gas input pipeline element 154 and the condensate gas output pipeline element 133 is downstream of the fifth switching element.

[0134] In some of these embodiments, the third purge gas input pipeline element 154 includes, but is not limited to, a stainless steel pipe.

[0135] Specifically, the first end of the second purge gas output pipeline element 155 communicates with the condensate gas output pipeline element 133, and the connection between the second purge gas output pipeline element 155 and the condensate gas output pipeline element 133 is downstream of the fifth switching element. The second end of the second purge gas output pipeline element 155 communicates with the processing device 300.

[0136] In some of these embodiments, the second purge gas output pipeline element 155 includes, but is not limited to, a stainless steel pipe.

[0137] Specifically, the first end of the fourth purge gas input pipeline element 156 communicates with the second end of the first purge gas input pipeline element 151. The second end of the fourth purge gas input pipeline element 156 communicates with the condensate liquid output pipeline element 134, and the connection between the fourth purge gas input pipeline element 156 and the condensate liquid output pipeline element 134 is between the sixth switching element and the seventh switching element.

[0138] In some of these embodiments, the fourth purge gas input pipeline element 156 includes, but is not limited to, a stainless steel pipe.

[0139] Specifically, the first end of the third purge gas output pipeline element 157 communicates with the condensate liquid output pipeline element 134, and the connection between the third purge gas output pipeline element 157 and the condensate liquid output pipeline element 134 is between the sixth switching element and the seventh switching element. The second end of the third purge gas output pipeline element 157 communicates with the processing device 300.

[0140] In some of these embodiments, the third purge gas output line element 157 includes, but is not limited to, a stainless steel pipe.

[0141] Furthermore, the first purge unit 150 further includes an eighth switching element, a third one-way element, a fourth one-way element, a ninth switching element, a tenth switching element, a fifth one-way element, a sixth one-way element, an eleventh switching element, a twelfth switching element, a seventh one-way element, an eighth one-way element, a thirteenth switching element, and a third pressure detection element. Among them, the eighth switching element is disposed on the second purge gas input line element 152 for controlling the flow of the second purge gas input line element 152; the third one-way element is disposed on the second purge gas input line element 152 for preventing the gas in the second purge gas input line element 152 from flowing backward; the fourth one-way element is disposed on the first purge gas output line element 153 for preventing the gas in the first purge gas output line element 153 from flowing backward; the ninth switching element is disposed on the first purge gas output line element 153 for controlling the flow of the first purge gas output line element 153; the tenth switching element is disposed on the third purge gas input line element 154 for controlling the flow of the third purge gas input line element 154; the fifth one-way element is disposed on the third purge gas input line element 154 for preventing the gas in the third purge gas input line element 154 from flowing backward; the sixth one-way element is disposed on the second purge gas output line element 155 for preventing the reverse flow of the second purge gas output line element 155; the eleventh switching element is disposed on the second purge gas output line element 155 for controlling the flow of the second purge gas output line element 155; the twelfth switching element is disposed on the fourth purge gas input line element 156 for controlling the flow of the fourth purge gas input line element 156; the seventh one-way element is disposed on the fourth purge gas input line element 156 for preventing the gas in the fourth purge gas input line element 156 from flowing backward; the eighth one-way element is disposed on the third purge gas output line element 157 for preventing the gas in the third purge gas output line element 157 from flowing backward; the thirteenth switching element is disposed on the third purge gas output line element 157 for controlling the flow of the fourteenth conveying element; the third pressure detection element is communicated with the first purge gas input line element 151 for real-time monitoring of the pressure inside the first purge gas input line element 151.

[0142] In some of these embodiments, the eighth switching element includes, but is not limited to, a diaphragm valve. For example, the eighth pneumatic diaphragm valve.

[0143] It should be noted that the third one-way element is located downstream of the eighth switching element.

[0144] In some of these embodiments, the third one-way element includes, but is not limited to, a one-way valve. For example, the third one-way valve.

[0145] In some of these embodiments, the fourth one-way element includes, but is not limited to, a one-way valve, for example, the fourth one-way valve.

[0146] It should be noted that the ninth switching element is located downstream of the fourth one-way element.

[0147] In some of these embodiments, the ninth switching element includes, but is not limited to, a diaphragm valve, for example, the ninth pneumatic diaphragm valve.

[0148] In some of these embodiments, the tenth switching element includes, but is not limited to, a diaphragm valve, for example, the tenth pneumatic diaphragm valve.

[0149] It should be noted that the fifth one-way element is located downstream of the tenth switching element.

[0150] In some of these embodiments, the fifth one-way element includes, but is not limited to, a one-way valve, for example, the fifth one-way valve.

[0151] In some of these embodiments, the sixth one-way element includes, but is not limited to, a one-way valve, for example, the sixth one-way valve.

[0152] It should be noted that the eleventh switching element is located downstream of the sixth one-way element.

[0153] In some of these embodiments, the eleventh switching element includes, but is not limited to, a diaphragm valve, for example, the eleventh pneumatic diaphragm valve.

[0154] In some of these embodiments, the twelfth switching element includes, but is not limited to, a diaphragm valve, for example, the twelfth pneumatic diaphragm valve.

[0155] It should be noted that the seventh one-way element is located downstream of the twelfth switching element.

[0156] In some of these embodiments, the seventh one-way element includes, but is not limited to, a one-way valve, for example, the seventh one-way valve.

[0157] In some of these embodiments, the eighth one-way element includes, but is not limited to, a one-way valve, for example, the eighth one-way valve.

[0158] It should be noted that the thirteenth switching element is located downstream of the eighth one-way element.

[0159] In some of these embodiments, the thirteenth switching element includes, but is not limited to, a diaphragm valve, for example, the thirteenth pneumatic diaphragm valve.

[0160] In some of these embodiments, the third pressure detection element includes, but is not limited to, a pressure sensor.

[0161] The usage method of this embodiment is as follows:

[0162] (1) Gas analysis

[0163] Turn on the first pressure control element and the first flow control element to adjust the pressure and flow rate of the mixed gas transported in the first mixed gas input pipeline element 111, so as to ensure the stability of the mixed gas in the first mixed gas input pipeline element 111;

[0164] Turn on the first switch element and the third switch element, and transport the mixed gas to the mass spectrometry detection element 123 through the first mixed gas input pipeline element 111, the second mixed gas input pipeline element 112, and the fourth mixed gas input pipeline element 121. The mass spectrometry detection element 123 can detect the mixed gas, so as to obtain the concentration of TCS gas in the mixed gas and obtain the first concentration information;

[0165] (2) Condensation

[0166] Turn on the second switch element and the fourth switch element to make the first mixed gas input pipeline element 111, the fifth mixed gas input pipeline element 131, and the condensation element 132 communicate with each other, so that the mixed gas flows into the condensation element 132. The condensation element 132 condenses the mixed gas to obtain condensed liquid and condensed gas;

[0167] (3) Collection of condensed liquid

[0168] Turn on the sixth switch element and the seventh switch element to make the condensation element 132, the condensed liquid output pipeline element 134, and the storage element 135 communicate with each other, so that the condensed liquid flows into the interior of the storage element 135;

[0169] (4) Measurement of condensed gas

[0170] Turn on the fifth switch element to make the condensation element 132 communicate with the condensed gas output pipeline element 133. The gas content detection element 141 can detect the condensed gas flowing through the condensed gas output pipeline element 133, so as to obtain the total flow rate of the condensed gas;

[0171] (5) Purge

[0172] Turn on the twelfth switch element and the thirteenth switch element to make the first purge gas input pipeline element 151, the fourth purge gas input pipeline element 156, the condensed liquid output pipeline element 134, the third purge gas output pipeline element 157, and the processing device 300 communicate with each other, so as to purge the condensed liquid output pipeline element 134;

[0173] (6) Measurement of condensed liquid

[0174] The staff separates the storage component 135 from the condensate liquid output pipeline component 134, and places the storage component 135 on the liquid weight detection component 142, so as to obtain the weight of the condensate liquid inside the storage component 135;

[0175] (VII) Verification

[0176] The second concentration information is calculated through the total flow rate of the condensate gas and the weight of the condensate liquid. By comparing the second concentration information with the first concentration information, it is determined whether the result detected by the mass spectrometry detection component 123 is consistent with the actual situation.

[0177] The advantages of this embodiment are the same as those of Embodiment 1 and will not be elaborated here.

[0178] Embodiment 3

[0179] This embodiment relates to a mixed gas concentration detection system in the invention.

[0180] As Figure 4 shown, a mixed gas concentration detection system for detecting the TCS concentration includes the mixed gas concentration detection device 100, the mixing device 200, and the processing device 300 as described in Embodiments 1 to 2. Among them, the mixing device 200 is connected to the mixed gas concentration detection device 100 and is used to transport the mixed gas to the mixed gas concentration detection device 100; the processing device 300 is connected to the mixed gas concentration detection device 100 and the mixing device 200 and is used to process the tail gas.

[0181] As Figure 5 shown, the mixing device 200 includes a liquid input unit 210, a carrier gas input unit 220, a gas mixing unit 230, and a mixed gas output unit 240. Among them, the liquid input unit 210 is respectively connected to the liquid source and the mixed gas concentration detection device 100 and is used to transport the liquid to the mixed gas concentration detection device 100; the carrier gas input unit 220 is respectively connected to the carrier gas source and the mixed gas concentration detection device 100 and is used to transport the carrier gas to the mixed gas concentration detection device 100; the gas mixing unit 230 is respectively connected to the liquid input unit 210, the carrier gas input unit 220, and the mixed gas concentration detection device 100 and is used to perform a bubbling reaction on the liquid TCS and generate a mixed gas; the mixed gas output unit 240 is respectively connected to the gas mixing unit 230 and the mixed gas concentration detection device 100 and is used to transport the mixed gas.

[0182] As Figure 5 shown, the liquid input unit 210 includes a liquid input component 211. Among them, the liquid input component 211 is respectively connected to the liquid source and the gas mixing unit 230 and is used to transport the liquid to the gas mixing unit 230.

[0183] Specifically, the first end of the liquid input element 211 is in communication with the liquid source, and the second end of the liquid input element 211 is in communication with the gas mixing unit 230.

[0184] In some embodiments thereof, the liquid input element 211 includes, but is not limited to, a stainless steel tube.

[0185] Furthermore, the liquid input unit 210 further includes a fourteenth switching element. Wherein, the fourteenth switching element is disposed on the liquid input element 211 for controlling the flow of the liquid input element 211.

[0186] In some embodiments thereof, the fourteenth switching element includes, but is not limited to, a diaphragm valve, for example, a third manual diaphragm valve, a fourteenth pneumatic diaphragm valve.

[0187] It should be noted that the fourteenth pneumatic diaphragm valve is located downstream of the third manual diaphragm valve.

[0188] As Figure 5 shown, the carrier gas input unit 220 includes a carrier gas input element 221. Wherein, the carrier gas input element 221 is respectively in communication with the carrier gas source and the gas mixing unit 230 for delivering the carrier gas to the gas mixing unit 230.

[0189] It should be noted that the carrier gas is H2.

[0190] Specifically, the first end of the carrier gas input element 221 is in communication with the carrier gas source, and the second end of the carrier gas input element 221 is in communication with the gas mixing unit 230.

[0191] In some embodiments thereof, the carrier gas input element 221 includes, but is not limited to, a stainless steel tube.

[0192] Furthermore, the carrier gas input unit 220 further includes a fifteenth switching element, a ninth one-way element, a second pressure control element, a second flow control element, and a fourth pressure detection element. Wherein, the fifteenth switching element is disposed on the carrier gas input element 221 for controlling the flow of the carrier gas input element 221; the ninth one-way element is disposed on the carrier gas input element 221 for preventing the gas inside the carrier gas input element 221 from flowing backward; the second pressure control element is disposed on the carrier gas input element 221 for adjusting the pressure inside the carrier gas input element 221; the second flow control element is disposed on the carrier gas input element 221 for adjusting the flow rate inside the carrier gas input element 221; the fourth pressure detection element is in communication with the carrier gas input element 221 for real-time monitoring of the pressure inside the carrier gas input element 221.

[0193] In some embodiments thereof, the fifteenth switching element includes, but is not limited to, a diaphragm valve, for example, a fourth manual diaphragm valve, a fifteenth pneumatic diaphragm valve. Wherein, the fifteenth pneumatic diaphragm valve is located downstream of the fourth manual diaphragm valve.

[0194] It should be noted that the ninth one-way element is located downstream of the second manual diaphragm valve and upstream of the fifteenth pneumatic diaphragm valve.

[0195] In some of these embodiments, the ninth one-way element includes, but is not limited to, a one-way valve, for example, the ninth one-way valve.

[0196] It should be noted that the second pressure control element is located downstream of the second manual diaphragm valve and upstream of the ninth one-way element.

[0197] In some of these embodiments, the second pressure control element includes, but is not limited to, a PC pressure regulator.

[0198] It should be noted that the second flow control element is located downstream of the second pressure control element and upstream of the ninth one-way element.

[0199] In some of these embodiments, the second flow control element includes, but is not limited to, a flow meter.

[0200] In some of these embodiments, the fourth pressure detection element includes, but is not limited to, a pressure sensor.

[0201] It should be noted that the fourth pressure detection element is located downstream of the second pressure control element and upstream of the second flow control element.

[0202] As Figure 5 shown, the gas mixing unit 230 includes a gas mixing element 231. Among them, the gas mixing element 231 is respectively connected to the liquid input unit 210, the carrier gas input unit 220, the mixed gas concentration detection device 100, and the waste liquid treatment device 300, and is used for carrying out a bubbling reaction on liquid TCS to generate a mixed gas.

[0203] Specifically, the gas mixing element 231 is respectively connected to the liquid input element 211, the carrier gas input element 221, the mixed gas output unit 240, and the first vacuum unit 260, and is used for bubbling the liquid TCS transported into the gas mixing element 231 to generate a mixed gas of gaseous TCS and H2.

[0204] More specifically, the gas mixing element 231 further includes a liquid replenishment inlet, a carrier gas inlet, a mixed gas outlet, a waste liquid outlet, a cooling inlet, and a cooling outlet. Among them, the liquid replenishment inlet is opened at the top of the gas mixing element 231 and communicates with the second end of the liquid input element 211; the carrier gas inlet is opened at the top of the gas mixing element 231 and communicates with the second end of the carrier gas input element 221; the mixed gas outlet is opened at the top of the gas mixing element 231 and communicates with the mixed gas output unit 240; the waste liquid outlet is opened at the bottom wall of the side wall of the gas mixing element 231 and communicates with the waste liquid treatment device 300; the cooling inlet is opened on the side wall of the gas mixing element 231 and communicates with the chiller through a pipeline; the cooling outlet is opened on the side wall of the gas mixing element 231 and communicates with the chiller through a pipeline.

[0205] It should be noted that the cooling inlet and the cooling outlet can circulate the coolant between the gas mixing element 231 and the chiller, so as to maintain the stability inside the gas mixing element 231.

[0206] It should be noted that the volume of the gas mixing element 231 is 20L to 30L; preferably, the volume of the gas mixing element 231 is 25L.

[0207] It should be noted that during actual operation, the liquid TCS inside the gas mixing element 231 is between 16L and 23L; preferably, the liquid TCS inside the gas mixing element 231 is between 19L and 20L.

[0208] In some of these embodiments, the gas mixing element 231 includes, but is not limited to, a bubbling tank.

[0209] Furthermore, the gas mixing unit 230 further includes a sixteenth switching element, a liquid level monitoring element, and a temperature monitoring element. Among them, the sixteenth switching element is disposed on the gas mixing element 231 and is used to control the flow between the gas mixing element 231 and the liquid input unit 210, the carrier gas input unit 220, the mixed gas output unit 240, and the waste liquid treatment device 300; the liquid level monitoring element is disposed inside the gas mixing element 231 and is used to monitor the liquid level height inside the gas mixing element 231 in real time; the temperature monitoring element is disposed inside the gas mixing element 231 and is used to monitor the liquid temperature inside the gas mixing element 231 in real time.

[0210] In some of these embodiments, the sixteenth switching element includes, but is not limited to, diaphragm valves, for example, the fifth manual diaphragm valve, the sixth manual diaphragm valve, the seventh manual diaphragm valve, and the eighth manual diaphragm valve. Among them, the fifth manual diaphragm valve is disposed at the liquid replenishing inlet of the gas mixing element 231 for controlling the flow between the gas mixing element 231 and the liquid input element 211; the sixth manual diaphragm valve is disposed at the carrier gas inlet of the gas mixing element 231 for controlling the flow between the gas mixing element 231 and the carrier gas input element 221; the seventh manual diaphragm valve is disposed at the gas mixing outlet of the gas mixing element 231 for controlling the flow between the gas mixing element 231 and the mixed gas output unit 240; the eighth manual diaphragm valve is disposed at the waste liquid outlet of the mixed gas for controlling the flow between the gas mixing element 231 and the waste liquid treatment device 300.

[0211] In some of these embodiments, the liquid level monitoring element includes, but is not limited to, a liquid level sensor.

[0212] In some of these embodiments, the temperature monitoring element includes, but is not limited to, a temperature sensor.

[0213] As Figure 5 shown, the mixed gas output unit 240 includes a second mixed gas output pipeline element 241. Among them, the second mixed gas output pipeline element 241 is respectively connected to the gas mixing unit 230 and the mixed gas concentration detection device 100 for transporting the mixed gas.

[0214] Specifically, the first end of the second mixed gas output pipeline element 241 is connected to the gas mixing outlet of the gas mixing element 231, and the second end of the second mixed gas output pipeline element 241 is connected to the first end of the first mixed gas input pipeline element 111.

[0215] In some of these embodiments, the second mixed gas output pipeline element 241 includes, but is not limited to, a stainless steel pipe.

[0216] Furthermore, the mixed gas output unit 240 further includes a seventeenth switching element and a fifth pressure detection element. Among them, the seventeenth switching element is disposed on the second mixed gas output pipeline element 241 for controlling the flow of the second mixed gas output pipeline element 241; the fifth pressure detection element is connected to the second mixed gas output pipeline element 241 for real-time monitoring of the pressure inside the second mixed gas output pipeline element 241.

[0217] In some of these embodiments, the seventeenth switching element includes, but is not limited to, diaphragm valves, for example, the ninth manual diaphragm valve and the sixteenth pneumatic diaphragm valve. Among them, the sixteenth pneumatic diaphragm valve is located downstream of the ninth manual diaphragm valve.

[0218] It should be noted that the fifth pressure detection element is located downstream of the sixteenth pneumatic diaphragm valve and upstream of the ninth manual diaphragm valve.

[0219] In some of these embodiments, the fifth pressure detection element includes, but is not limited to, a pressure sensor.

[0220] As Figure 6 shown, the processing device 300 includes a second vacuum unit 310 and a processing unit 320. Among them, the second vacuum unit 310 is connected to the mixed gas concentration detection device 100 and is used to perform vacuum processing on the mixed gas concentration detection device 100; the processing unit 320 is connected to the mixed gas concentration detection device 100 and the mixing device 200 and is used to process the waste gas discharged from the mixed gas concentration detection device 100 and the gas mixing unit 230.

[0221] As Figure 7 shown, the second vacuum unit 310 includes a second vacuum pump element 311, a fourth vacuum pipeline element 312, a fifth vacuum pipeline element 313, and a sixth vacuum pipeline element 314. Among them, the second vacuum pump element 311 is connected to the mixed gas concentration detection device 100 and is used to form a vacuum negative pressure at the end of the mixed gas concentration detection device 100; the fourth vacuum pipeline element 312 is respectively connected to the concentration analysis unit 120 of the mixed gas concentration detection device 100 and the second vacuum pump element 311 and is used to transport waste gas; the fifth vacuum pipeline element 313 is respectively connected to the condensation unit 130 of the mixed gas concentration detection device 100 and the fourth vacuum pipeline element 312 and is used to transport waste gas; the sixth vacuum pipeline element 314 is respectively connected to the second vacuum pump element 311 and the processing unit 320 and is used to transport waste gas.

[0222] Specifically, the second vacuum pump element 311 is respectively connected to the mixed gas concentration detection device 100 and the processing unit 320 through the fourth vacuum pipeline element 312 and the sixth vacuum pipeline element 314 and is used to form a vacuum negative pressure at the end of the fourth vacuum pipeline element 312.

[0223] In some of these embodiments, the second vacuum pump element 311 includes, but is not limited to, a vacuum pump.

[0224] Specifically, the first end of the fourth vacuum pipeline element 312 is connected to the mass spectrometry detection element 123, and the second end of the fourth vacuum pipeline element 312 is connected to the second vacuum pump element 311.

[0225] In some of these embodiments, the fourth vacuum pipeline element 312 includes, but is not limited to, a stainless steel pipe.

[0226] Specifically, the first end of the fifth vacuum pipeline element 313 is respectively communicated with the first purge gas output pipeline element 153, the second purge gas output pipeline element 155, and the third purge gas output pipeline element 157. The second end of the fifth vacuum pipeline element 313 is communicated with the fourth vacuum pipeline element 312, and the connection between the fifth vacuum pipeline element 313 and the fourth vacuum pipeline element 312 is located upstream of the second vacuum pump element 311.

[0227] In some embodiments thereof, the fifth vacuum pipeline element 313 includes, but is not limited to, a stainless steel pipe.

[0228] Specifically, the first end of the sixth vacuum pipeline element 314 is communicated with the second vacuum pump element 311, and the second end of the sixth vacuum pipeline element 314 is communicated with the processing unit 320.

[0229] In some embodiments thereof, the sixth vacuum pipeline element 314 includes, but is not limited to, a stainless steel pipe.

[0230] As Figure 7 shown, the processing unit 320 includes a processing element 321. Among them, the processing element 321 is respectively communicated with the mixed gas concentration detection device 100 and the gas mixing unit 230, and is used for processing the exhaust gas discharged from the mixed gas concentration detection device 100 and the gas mixing unit 230.

[0231] Specifically, the processing element 321 is respectively communicated with the condensed gas output pipeline element 133 and the sixth vacuum pipeline element 314, and is used for collecting and processing the exhaust gas.

[0232] In some embodiments thereof, the processing element 321 includes, but is not limited to, a scrubber.

[0233] It should be noted that, on the basis of Embodiment 1 to Embodiment 2, the usage method of this embodiment further includes:

[0234] (I) Liquid supply

[0235] Turn on the fourteenth switch element and the sixteenth switch element, so that the liquid source is communicated with the gas mixing element 231 through the liquid input element 211, and liquid TCS can be transported to the gas mixing element 231.

[0236] (II) Carrier gas supply

[0237] Turn on the fifteenth switch element and the sixteenth switch element, so that the carrier gas source is communicated with the gas mixing element 231 through the carrier gas input element 221, and the carrier gas can be transported to the gas mixing element 231.

[0238] Turn on the second pressure control element and the second flow control element to adjust the pressure and flow rate of the carrier gas transported into the carrier gas input element 221;

[0239] (III) Mixed gas transportation

[0240] Turn on the seventeenth switching element and the sixteenth switching element, so that the gas mixing element 231 is connected to the first mixed gas input pipeline element 111 through the second mixed gas output pipeline element 241.

[0241] Among them, (I) to (III) of this embodiment are before (I) to (VI) of Embodiment 1 and (I) to (VII) of Embodiment 2. That is, (I) to (VI) of Embodiment 1 are numbered (IV) to (IX) in this embodiment, and (I) to (VII) of Embodiment 2 are numbered (IV) to (X) in this embodiment.

[0242] The advantages of this embodiment are that by combining the mixing device with the mixed gas concentration detection device, the mixing device can perform a bubbling reaction on liquid TCS to generate a mixed gas, and the mixed gas concentration detection device can detect the TCS concentration in the mixed gas; furthermore, by connecting the treatment device to the mixing device and the mixed gas concentration detection device, the waste gas generated by the mixing device and the mixed gas concentration detection device can be treated.

[0243] Embodiment 4

[0244] This embodiment is a variant embodiment of Embodiment 3.

[0245] As Figure 5 shown, the mixing device 200 further includes a second purging unit 250 and a first vacuum unit 260. Among them, the second purging unit 250 is respectively connected to the purging gas source, the liquid input unit 210, the carrier gas input unit 220, and the mixed gas output unit 240, and is used to purge the pipelines of the liquid input unit 210, the carrier gas input unit 220, and the mixed gas output unit 240; the first vacuum unit 260 is respectively connected to the power gas source, the second purging unit 250, and the gas mixing unit 230, and is used to perform vacuum treatment on the overall device.

[0246] As Figure 5As shown, the second purging unit 250 includes a fifth purging gas input pipeline element 251, a sixth purging gas input pipeline element 252, a seventh purging gas input pipeline element 253, an eighth purging gas input pipeline element 254, and a fourth purging gas output pipeline element 255. Among them, the fifth purging gas input pipeline element 251 is communicated with a purging gas source and is used for transporting purging gas; the sixth purging gas input pipeline element 252 is respectively communicated with the fifth purging gas input pipeline element 251 and the liquid input unit 210 and is used for transporting purging gas; the seventh purging gas input pipeline element 253 is respectively communicated with the fifth purging gas input pipeline element 251 and the carrier gas input unit 220 and is used for transporting purging gas; the eighth purging gas input pipeline element 254 is respectively communicated with the fifth purging gas input pipeline element 251 and the mixed gas output unit 240 and is used for transporting purging gas; the fourth purging gas output pipeline element 255 is respectively communicated with the fifth purging gas input pipeline element 251 and the first vacuum unit 260 and is used for transporting purging gas.

[0247] It should be noted that the purging gas is high-purity argon gas.

[0248] Specifically, the first end of the fifth purging gas input pipeline element 251 is communicated with the purging gas source, and the second end of the fifth purging gas input pipeline element 251 is communicated with the sixth purging gas input pipeline element 252, the seventh purging gas input pipeline element 253, the eighth purging gas input pipeline element 254, and the fourth purging gas output pipeline element 255.

[0249] In some of these embodiments, the fifth purging gas input pipeline element 251 includes, but is not limited to, a stainless steel pipe.

[0250] Specifically, the first end of the sixth purging gas input pipeline element 252 is communicated with the second end of the fifth purging gas input pipeline element 251, the second end of the sixth purging gas input pipeline element 252 is communicated with the liquid input element 211, and the connection between the sixth purging gas input pipeline element 252 and the liquid input element 211 is located downstream of the fourteenth pneumatic diaphragm valve.

[0251] In some of these embodiments, the sixth purging gas input pipeline element 252 includes, but is not limited to, a stainless steel pipe.

[0252] Specifically, the first end of the seventh purging gas input pipeline element 253 is communicated with the second end of the fifth purging gas input pipeline element 251, the second end of the seventh purging gas input pipeline element 253 is communicated with the carrier gas input element 221, and the connection between the seventh purging gas input pipeline element 253 and the carrier gas input element 221 is located downstream of the fifteenth pneumatic diaphragm valve.

[0253] In some of these embodiments, the seventh purge gas input line element 253 includes, but is not limited to, a stainless steel pipe.

[0254] Specifically, the first end of the eighth purge gas input line element 254 communicates with the second end of the fifth purge gas input line element 251, the second end of the eighth purge gas input line element 254 communicates with the second mixed gas output line element 241, and the connection between the eighth purge gas input line element 254 and the second mixed gas output line element 241 is located upstream of the sixteenth pneumatic diaphragm valve.

[0255] In some of these embodiments, the eighth purge gas input line element 254 includes, but is not limited to, a stainless steel pipe.

[0256] Specifically, the first end of the fourth purge gas output line element 255 communicates with the second end of the fifth purge gas input line element 251, and the second end of the fourth purge gas output line element 255 communicates with the first vacuum unit 260.

[0257] In some of these embodiments, the fourth purge gas output line element 255 includes, but is not limited to, a stainless steel pipe.

[0258] Furthermore, the second purge unit 250 further includes an eighteenth switching element, a tenth one-way element, a nineteenth switching element, a twentieth switching element, a twenty-first switching element, a twenty-second switching element, and a sixth pressure detection element. Among them, the eighteenth switching element is disposed on the fifth purge gas input line element 251 for controlling the flow of the fifth purge gas input line element 251; the tenth one-way element is disposed on the fifth purge gas input line element 251 for preventing the gas inside the fifth purge gas input line element 251 from flowing backward; the nineteenth switching element is disposed on the sixth purge gas input line element 252 for controlling the flow of the sixth purge gas input line element 252; the twentieth switching element is disposed on the seventh purge gas input line element 253 for controlling the flow of the seventh purge gas input line element 253; the twenty-first switching element is disposed on the eighth purge gas input line element 254 for controlling the flow of the eighth purge gas input line element 254; the twenty-second switching element is disposed on the fourth purge gas output line element 255 for controlling the flow of the fourth purge gas output line element 255; the sixth pressure detection element communicates with the fifth purge gas input line element 251 for real-time monitoring of the pressure inside the fifth purge gas input line element 251.

[0259] In some of these embodiments, the eighteenth switching element includes, but is not limited to, a diaphragm valve. For example, the tenth manual diaphragm valve, the seventeenth pneumatic diaphragm valve.

[0260] It should be noted that the seventeenth pneumatic diaphragm valve is located downstream of the tenth manual diaphragm valve.

[0261] It should be noted that the tenth one-way element is located downstream of the eighth manual diaphragm valve and upstream of the seventeenth pneumatic diaphragm valve.

[0262] In some of these embodiments, the tenth one-way element includes, but is not limited to, a one-way valve, for example, the tenth one-way valve.

[0263] In some of these embodiments, the nineteenth switching element includes, but is not limited to, a diaphragm valve, for example, the eighteenth pneumatic diaphragm valve.

[0264] In some of these embodiments, the twentieth switching element includes, but is not limited to, a diaphragm valve, for example, the nineteenth pneumatic diaphragm valve.

[0265] In some of these embodiments, the twenty-first switching element includes, but is not limited to, a diaphragm valve, for example, the twentieth pneumatic diaphragm valve.

[0266] In some of these embodiments, the twenty-second switching element includes, but is not limited to, a diaphragm valve, for example, the twenty-first pneumatic diaphragm valve.

[0267] It should be noted that the connection point of the sixth pressure detection element and the fifth purge gas input pipeline element 251 is located downstream of the seventeenth pneumatic diaphragm valve.

[0268] In some of these embodiments, the sixth pressure detection element includes, but is not limited to, a pressure sensor.

[0269] As Figure 5 shown, the first vacuum unit 260 includes a first vacuum pump element 261, a first vacuum pipeline element 262, a second vacuum pipeline element 263, and a third vacuum pipeline element 264. Among them, the first vacuum pump element 261 is connected to the second purge unit 250 and is used to form a vacuum negative pressure at the end of the second purge unit 250; the first vacuum pipeline element 262 is respectively connected to the power gas source and the first vacuum pump element 261 and is used to transport the power gas; the second vacuum pipeline element 263 is respectively connected to the first vacuum pump element 261 and the processing unit 320 and is used to transport the waste gas; the third vacuum pipeline element 264 is respectively connected to the gas mixing unit 230 and the processing unit 320 and is used to transport the waste gas.

[0270] Specifically, the first vacuum pump element 261 is connected to the second end of the fourth purge gas output pipeline element 255 and is used to form a vacuum negative pressure at the second end of the fourth purge gas output pipeline element 255.

[0271] In some of these embodiments, the first vacuum pump element 261 includes, but is not limited to, a Venturi vacuum pump.

[0272] Specifically, the first end of the first vacuum pipeline element 262 is communicated with the power gas source, and the second end of the first vacuum pipeline element 262 is communicated with the first vacuum pump element 261.

[0273] In some of these embodiments, the first vacuum pipeline element 262 includes, but is not limited to, a stainless steel pipe.

[0274] Specifically, the first end of the second vacuum pipeline element 263 is communicated with the first vacuum pump element 261, and the second end of the second vacuum pipeline element 263 is communicated with the processing device 300.

[0275] In some of these embodiments, the second vacuum pipeline element 263 includes, but is not limited to, a stainless steel pipe.

[0276] Specifically, the first end of the third vacuum pipeline element 264 is communicated with the second vacuum pipeline element 263, and the second end of the third vacuum pipeline element 264 is communicated with the gas mixing element 231.

[0277] In some of these embodiments, the third vacuum pipeline element 264 includes, but is not limited to, a stainless steel pipe.

[0278] Furthermore, the first vacuum unit 260 further includes a pressure relief valve element and a seventh pressure detection element. Among them, the pressure relief valve element is arranged on the third vacuum pipeline element 264 for relieving pressure on the gas mixing unit 230; the seventh pressure detection element is communicated with the fourth purge gas output pipeline element 255 for real-time monitoring of the pressure inside the fourth purge gas output pipeline element 255.

[0279] It should be noted that in the case where the pressure inside the third vacuum pipeline element 264 exceeds 100 psi, the pressure relief valve element can relieve the pressure inside the gas mixing element 231.

[0280] In some of these embodiments, the pressure relief valve element includes, but is not limited to, a safety valve.

[0281] It should be noted that the connection point of the seventh pressure detection element and the fourth purge gas output pipeline element 255 is located downstream of the twenty-second switching element.

[0282] In some of these embodiments, the seventh pressure detection element includes, but is not limited to, a pressure sensor.

[0283] Based on Embodiment 3, the usage method of this embodiment further includes:

[0284] (I) Purge

[0285] In the case where subsequent verification of the TCS concentration is required, the entire device needs to be purged, that is, the eighteenth switching element, the nineteenth switching element, the twentieth switching element, the twenty-first switching element, and the twenty-second switching element are turned on. The purge gas flows through the fifth purge gas input pipeline element 251, the sixth purge gas input pipeline element 252, the seventh purge gas input pipeline element 253, the eighth purge gas input pipeline element 254, and the fourth purge gas output pipeline element 255 to the liquid input element 211, the carrier gas input element 221, and the second mixed gas output pipeline element 241, thereby purging the entire pipeline and improving the cleanliness of the entire pipeline. Among them, (1) of this embodiment is before (1)-(9) or (1)-(10) of Embodiment 3. That is, (1)-(9) of Embodiment 3 are numbered (2)-(10) in this embodiment, and (1)-(10) are numbered (4)-(11) in this embodiment.

[0286] The advantage of this embodiment is that by connecting the second purge unit and the first vacuum unit to the liquid input unit, the carrier gas input unit, and the mixed gas output unit respectively, the entire pipeline can be purged, improving the cleanliness of the entire pipeline.

[0287] Embodiment 5

[0288] This embodiment relates to the semiconductor process equipment in the present invention.

[0289] A semiconductor process equipment includes a mixed gas concentration detection device 100 as described in Embodiments 1-2; or a mixed gas concentration detection system as described in Embodiments 3-4.

[0290] A semiconductor process equipment further includes a liquid source, a carrier gas source, a power gas source, and a waste liquid treatment device. Among them, the liquid source includes but is not limited to a TCS liquid tank; the carrier gas source includes but is not limited to an H2 tank; the power gas source includes but is not limited to a helium tank; the waste liquid treatment device includes but is not limited to a water purifier.

[0291] The usage method and advantages of this embodiment are the same as those of Embodiments 1-4, and will not be elaborated here.

[0292] Embodiment 6

[0293] This embodiment relates to a specific implementation manner of the mixed gas concentration detection system of the present invention.

[0294] As Figure 8 shown, the mixed gas input unit 110 includes pneumatic diaphragm valves (PV09, PV10), a PC pressure regulator (PC1), a flow controller (MFC1), and a pressure sensor (PT4).

[0295] The concentration analysis unit 120 includes a pneumatic diaphragm valve (PV19), a check valve (CV10), and a mass spectrometer (MS).

[0296] The condensation unit 130 includes a condenser (Cond), a chiller, pneumatic diaphragm valves (PV15, PV16), manual diaphragm valves (MV09, MV10), a check valve (CV09), a pressure sensor (PT5), a cylinder, an electronic balance (EB), and a flow meter (MFM).

[0297] The first purge unit 150 includes pneumatic diaphragm valves (PV11, PV12, PV13, PV14, PV17, PV18), check valves (CV03, CV04, CV05, CV06, CV07, CV08), and a pressure sensor (PT6).

[0298] The liquid input unit 210 includes a manual diaphragm valve (MV02) and a pneumatic diaphragm valve (PV02).

[0299] The carrier gas input unit 220 includes a manual diaphragm valve (MV04), a pneumatic diaphragm valve (PV04), a check valve (CV02), a PC pressure regulator (PC2), a flow controller (MFC2), and a pressure sensor (PT3).

[0300] The gas mixing unit 230 includes a bubbler (TEMPERATURE CONTROLLED VESSEL), manual diaphragm valves (MV05, MV06, MV07, MV08), a level sensor, and a temperature sensor (TEMPERATURESENSOR).

[0301] The mixed gas output unit 240 includes a pneumatic diaphragm valve (PV03), a manual diaphragm valve (MV03), and a pressure sensor (PT0).

[0302] The second purge unit 250 includes a manual diaphragm valve (MV01), pneumatic diaphragm valves (PV01, PV05, PV06, PV07, PV08), and a pressure sensor (PT1).

[0303] The first vacuum unit 260 includes a vacuum pump (VG1), a pressure sensor (PT2), and a safety valve (SV).

[0304] The second vacuum unit 310 includes a vacuum pump (VG2).

[0305] The processing unit 320 includes a scrubber (SCRUBBER).

[0306] Specifically, the TCS concentration detection method of this embodiment is as follows:

[0307] (1) Manually open MV02 and MV05, and turn on PV02 so that the liquid source is connected to the TEMPERATURE CONTROLLED VESSEL through the liquid input element 211, and liquid TCS can be transported to the TEMPERATURE CONTROLLED VESSEL;

[0308] (2) Manually open MV04 and MV07, and turn on PV04 so that the carrier gas source is connected to the TEMPERATURE CONTROLLED VESSEL through the carrier gas input element 221, and carrier gas can be transported to the TEMPERATURE CONTROLLED VESSEL;

[0309] (3) Turn on PC2 and MFC2 to adjust the pressure and flow rate of the carrier gas transported in the carrier gas input element 221;

[0310] (4) Manually open MV06 and MV03, and turn on PV03 so that the TEMPERATURE CONTROLLED VESSEL is connected to the first mixed gas input pipeline element 111 through the second mixed gas output pipeline element 241;

[0311] (5) Turn on PC1 and MFC1 to adjust the pressure and flow rate of the mixed gas transported in the first mixed gas input pipeline element 111, so as to ensure the stability of the mixed gas in the first mixed gas input pipeline element 111;

[0312] (6) Turn on PV09 and PV19, and transport the mixed gas to the MS through the first mixed gas input pipeline element 111, the second mixed gas input pipeline element 112, and the fourth mixed gas input pipeline element 121;

[0313] (7) The MS can detect the mixed gas, so as to obtain the concentration of TCS gas in the mixed gas and obtain the first concentration information;

[0314] (8) Turn on PV10 and PV15 to connect the first mixed gas input pipeline element 111, the fifth mixed gas input pipeline element 131, and the Cond to each other, so that the mixed gas flows into the Cond, and the Cond condenses the mixed gas to obtain condensed liquid and condensed gas;

[0315] (9) Turn on MV09 and MV10 to connect the Cond, the condensed liquid output pipeline element 134, and the Cylinder to each other, so that the condensed liquid flows into the interior of the Cylinder;

[0316] (10) Open PV16 to connect Cond with the condensate gas output pipeline component 133. The MFM can detect the condensate gas flowing through the condensate gas output pipeline component 133, and thus the total flow rate of the condensate gas can be obtained.

[0317] (11) Open PV17 and PV18 to connect the first purge gas input pipeline component 151, the fourth purge gas input pipeline component 156, the condensate liquid output pipeline component 134, the third purge gas output pipeline component 157, and the SCRUBBER, so as to purge the condensate liquid output pipeline component 134.

[0318] (12) The staff separates the Cylinder from the condensate liquid output pipeline component 134 and places the Cylinder on the EB, so as to obtain the weight of the condensate liquid inside the Cylinder.

[0319] (13) Calculate the second concentration information based on the total flow rate of the condensate gas and the weight of the condensate liquid. By comparing the second concentration information with the first concentration information, it can be determined whether the result detected by the MS is consistent with the actual situation.

[0320] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0321] The above-described embodiments only represent several implementation manners of the present application. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the appended claims.

Claims

1. A mixed gas concentration detection device for detecting the concentration of TCS, characterized in that, Comprising: A mixed gas input unit, which is connected to a mixing device and is used to obtain and transport the mixed gas generated by the mixing device; A concentration analysis unit, which is respectively connected to the mixed gas input unit and a processing device, and is used to perform mass spectrometry analysis on the mixed gas to obtain the first concentration information of the mixed gas; A condensation unit, which is respectively connected to the mixed gas input unit and a processing device, and is used to condense the mixed gas to obtain a condensed gas and a condensed liquid; A detection unit, which is arranged in the condensation unit and is used to measure the condensed gas and the condensed liquid and calculate the second concentration information of the mixed gas to verify the first concentration information.

2. The mixed gas concentration detection device according to claim 1, wherein The mixed gas input unit includes: A first mixed gas input pipeline element, which is connected to a mixing device and is used to obtain and transport the mixed gas transported by the mixing device; A second mixed gas input pipeline element, which is connected to the first mixed gas input pipeline element and the concentration analysis unit and is used to transport the mixed gas to the concentration analysis unit; A third mixed gas input pipeline element, which is connected to the first mixed gas input pipeline element and the condensation unit and is used to transport the mixed gas to the condensation unit; and / or The mixed gas input unit further includes: A first switch element, which is arranged in the second mixed gas input pipeline element and is used to control the flow of the second mixed gas input pipeline element; and / or The mixed gas input unit further includes: A second switch element, which is arranged in the third mixed gas input pipeline element and is used to control the flow of the third mixed gas input pipeline element; and / or The mixed gas input unit further includes: A first pressure control element, which is arranged in the first mixed gas input pipeline element and is used to adjust the gas pressure inside the first mixed gas input pipeline element; and / or The mixed gas input unit further includes: A first flow control element, which is arranged in the first mixed gas input pipeline element and is used to regulate the gas flow inside the first mixed gas input pipeline element; and / or The mixed gas input unit further includes: A first pressure detection element, which is connected to the first mixed gas input pipeline element and is used to monitor the pressure inside the first mixed gas input pipeline element in real time; and / or The concentration analysis unit includes: A fourth mixed gas input pipeline element, which is connected to the mixed gas input unit and is used to obtain and transport the mixed gas; A first mixed gas output pipeline element, which is connected to the fourth mixed gas input pipeline element and a processing device and is used to transport waste gas; A mass spectrometry detection element, which is respectively connected to the fourth mixed gas input pipeline element and the processing device, and is used for performing mass spectrometry analysis on the mixed gas to obtain the first concentration information of the mixed gas; and / or The concentration analysis unit further includes: A third switching element, which is arranged on the fourth mixed gas input pipeline element and is used for controlling the flow of the fourth mixed gas input pipeline element; and / or The concentration analysis unit further includes: A first one-way element, which is arranged on the first mixed gas output pipeline element and is used for preventing the gas in the first mixed gas output pipeline element from flowing backward; and / or The condensation unit includes: A fifth mixed gas input pipeline element, which is connected to the mixed gas input unit and is used for acquiring and transporting the mixed gas; A condensation element, which is connected to the fifth mixed gas input pipeline element and is used for condensing the mixed gas to obtain condensed gas and condensed liquid; A condensed gas output pipeline element, which is connected to the condensation element and the processing device and is used for transporting the condensed gas; A condensed liquid output pipeline element, which is connected to the condensation element and is used for transporting the condensed liquid; A storage element, which is connected to the condensed liquid output pipeline element and is used for storing the condensed liquid; and / or The condensation unit further includes: A fourth switching element, which is arranged at the air inlet end of the condensation element and is used for controlling the flow between the fifth mixed gas input pipeline element and the condensation element; and / or The condensation unit further includes: A fifth switching element, which is arranged at the air outlet end of the condensation element and is used for controlling the flow between the condensed gas output pipeline element and the condensation element; and / or The condensation unit further includes: A second one-way element, which is arranged on the condensed gas output pipeline element and is used for preventing the gas in the condensed gas output pipeline element from flowing backward; and / or The condensation unit further includes: A sixth switching element, which is arranged at the liquid discharge end of the condensation element and is used for controlling the flow between the condensation element and the condensed liquid output pipeline element; and / or The condensation unit further includes: A seventh switching element, which is arranged on the condensed liquid output pipeline element and is used for controlling the flow of the condensed liquid output pipeline element; and / or The condensation unit further includes: A second pressure detection element, which is arranged on the condensed gas output pipeline element and is used for real-time monitoring of the pressure inside the condensed gas output pipeline element; and / or The detection unit includes: A gas content detection element, which is arranged at the air outlet end of the condensation unit and is used for detecting the content of the condensed gas; A liquid weight detection element, which is arranged at the liquid storage end of the condensation unit and is used for detecting the weight of the condensed liquid.

3. The mixed gas concentration detection device according to any one of claims 1 to 2, characterized in that It further includes: The first purging unit is respectively connected to the condensation unit and the processing device, and is used for purging the pipelines of the condensation unit.

4. The mixed gas concentration detection device according to claim 3, characterized in that, The first purging unit includes: A first purging gas input pipeline element, which is connected to a purging gas source and is used for acquiring and transporting purging gas; A second purging gas input pipeline element, which is respectively connected to the first purging gas input pipeline element and the air intake structure of the condensation unit, and is used for transporting purging gas; A first purging gas output pipeline element, which is respectively connected to the air intake structure of the condensation unit and the processing device, and is used for transporting waste gas; A third purging gas input pipeline element, which is respectively connected to the first purging gas input pipeline element and the exhaust structure of the condensation unit, and is used for transporting purging gas; A second purging gas output pipeline element, which is respectively connected to the exhaust structure of the condensation unit and the processing device, and is used for transporting waste gas; A fourth purging gas input pipeline element, which is respectively connected to the first purging gas input pipeline element and the liquid discharge structure of the condensation unit, and is used for transporting purging gas; A third purging gas output pipeline element, which is respectively connected to the liquid discharge structure of the condensation unit and the processing device, and is used for transporting waste gas; and / or The first purging unit further includes: An eighth switching element, which is arranged on the second purging gas input pipeline element and is used for controlling the flow of the second purging gas input pipeline element; and / or The first purging unit further includes: A third one-way element, which is arranged on the second purging gas input pipeline element and is used for preventing the gas in the first purging gas input pipeline element from flowing backward; and / or The first purging unit further includes: A fourth one-way element, which is arranged on the first purging gas output pipeline element and is used for preventing the gas in the first purging gas output pipeline element from flowing backward; and / or The first purging unit further includes: A ninth switching element, which is arranged on the first purging gas output pipeline element and is used for controlling the flow of the first purging gas output pipeline element; and / or The first purging unit further includes: A tenth switching element, which is arranged on the third purging gas input pipeline element and is used for controlling the flow of the third purging gas input pipeline element; and / or The first purging unit further includes: A fifth one-way element, which is arranged on the third purging gas input pipeline element and is used for preventing the gas in the third purging gas input pipeline element from flowing backward; and / or The first purging unit further includes: A sixth one-way element, which is arranged on the second purging gas output pipeline element and is used for preventing the reverse flow of the second purging gas output pipeline element; and / or The first purging unit further includes: An eleventh switching element, which is arranged on the second purge gas output pipeline element and is used to control the flow of the second purge gas output pipeline element; and / or The first purge unit further includes: A twelfth switching element, which is arranged on the fourth purge gas input pipeline element and is used to control the flow of the fourth purge gas input pipeline element; and / or The first purge unit further includes: A seventh one-way element, which is arranged on the fourth purge gas input pipeline element and is used to prevent the gas in the fourth purge gas input pipeline element from flowing backward; and / or The first purge unit further includes: An eighth one-way element, which is arranged on the third purge gas output pipeline element and is used to prevent the gas in the third purge gas output pipeline element from flowing backward; and / or The first purge unit further includes: A thirteenth switching element, which is arranged on the third purge gas output pipeline element and is used to control the flow of the third purge gas output pipeline element; and / or The first purge unit further includes: A third pressure detection element, which is communicated with the first purge gas input pipeline element and is used to monitor the pressure inside the first purge gas input pipeline element in real time.

5. A mixed gas concentration detection system for detecting the concentration of TCS, characterized in that, Comprising: The mixed gas concentration detection device according to any one of claims 1 to 4; A mixing device, which is communicated with the mixed gas concentration detection device and is used to transport mixed gas to the mixed gas concentration detection device; A processing device, which is communicated with the mixed gas concentration detection device and the mixing device and is used to process the tail gas.

6. The mixed gas concentration detection system according to claim 5, characterized in that, The mixing device includes: A liquid input unit, which is respectively communicated with a liquid source and the mixed gas concentration detection device and is used to transport liquid to the mixed gas concentration detection device; A carrier gas input unit, which is respectively communicated with a carrier gas source and the mixed gas concentration detection device and is used to transport carrier gas to the mixed gas concentration detection device; A gas mixing unit, which is respectively communicated with the liquid input unit, the carrier gas input unit and the mixed gas concentration detection device and is used to perform a bubbling reaction on liquid TCS to generate mixed gas; A mixed gas output unit, which is respectively communicated with the gas mixing unit and the mixed gas concentration detection device and is used to transport mixed gas; and / or The processing device includes: A second vacuum unit, which is communicated with the mixed gas concentration detection device and is used to perform vacuum treatment on the mixed gas concentration detection device; A processing unit, which is communicated with the mixed gas concentration detection device and the mixing device and is used to process the waste gas discharged from the mixed gas concentration detection device and the gas mixing unit.

7. The mixed gas concentration detection system according to claim 6, wherein, The liquid input unit includes: A liquid input element, which is respectively communicated with a liquid source and the gas mixing unit and is used to transport liquid to the gas mixing unit; and / or The liquid input unit further includes: A fourteenth switching element disposed on the liquid input element for controlling the flow of the liquid input element; and / or The carrier gas input unit includes: A carrier gas input element that is respectively connected to a carrier gas source and the gas mixing unit for delivering carrier gas to the gas mixing unit; and / or The carrier gas input unit further includes: A fifteenth switching element disposed on the carrier gas input element for controlling the flow of the carrier gas input element; and / or The carrier gas input unit further includes: A ninth one-way element disposed on the carrier gas input element for preventing the gas inside the carrier gas input element from flowing backward; and / or The carrier gas input unit further includes: A second pressure control element disposed on the carrier gas input element for adjusting the pressure inside the carrier gas input element; and / or The carrier gas input unit further includes: A second flow control element disposed on the carrier gas input element for adjusting the flow rate inside the carrier gas input element; and / or The carrier gas input unit further includes: A fourth pressure detection element connected to the carrier gas input element for real-time monitoring of the pressure inside the carrier gas input element; and / or The gas mixing unit includes: A gas mixing element that is respectively connected to the liquid input unit, the carrier gas input unit, and the mixed gas concentration detection device for performing a bubbling reaction on liquid TCS to generate a mixed gas; and / or The gas mixing unit further includes: A sixteenth switching element disposed on the gas mixing element for controlling the flow between the gas mixing element and the liquid input unit, the carrier gas input unit, the mixed gas output unit, and the processing device; and / or The mixed gas output unit includes: A second mixed gas output pipeline element that is respectively connected to the gas mixing unit and the mixed gas concentration detection device for transporting the mixed gas; and / or The mixed gas output unit further includes: A seventeenth switching element disposed on the second mixed gas output pipeline element for controlling the flow of the second mixed gas output pipeline element; and / or The mixed gas output unit further includes: A fifth pressure detection element connected to the second mixed gas output pipeline element for real-time monitoring of the pressure inside the second mixed gas output pipeline element; and / or The second vacuum unit includes: A second vacuum pump element connected to the mixed gas concentration detection device for forming a vacuum negative pressure at the end of the mixed gas concentration detection device; A twenty-fourth gas delivery element that is respectively connected to the concentration analysis unit of the mixed gas concentration detection device and the second vacuum pump element for transporting waste gas; The twenty-fifth gas delivery element, which is respectively connected to the condensation unit of the mixed gas concentration detection device and the twenty-fourth gas delivery element, and is used for delivering exhaust gas; The twenty-sixth gas delivery element, which is respectively connected to the second vacuum pump element and the processing unit, and is used for delivering exhaust gas; and / or The processing unit includes: A processing element, which is respectively connected to the mixed gas concentration detection device and the gas mixing unit, and is used for processing the exhaust gas discharged from the mixed gas concentration detection device and the gas mixing unit.

8. The mixed gas concentration detection system according to any one of claims 6 to 7, characterized in that, The mixing device further includes: A second purging unit, which is respectively connected to a purging gas source, the liquid input unit, the carrier gas input unit, and the mixed gas output unit, and is used for purging the pipelines of the liquid input unit, the carrier gas input unit, and the mixed gas output unit; A first vacuum unit, which is respectively connected to a power gas source, the second purging unit, and the gas mixing unit, and is used for performing vacuum treatment on the overall device.

9. The mixed gas concentration detection system according to claim 8, characterized in that, The second purging unit includes: A fifth purging gas input pipeline element, which is connected to the purging gas source and is used for delivering purging gas; A sixth purging gas input pipeline element, which is respectively connected to the fifth purging gas input pipeline element and the liquid input unit, and is used for delivering purging gas; A seventh purging gas input pipeline element, which is respectively connected to the fifth purging gas input pipeline element and the carrier gas input unit, and is used for delivering purging gas; An eighth purging gas input pipeline element, which is respectively connected to the fifth purging gas input pipeline element and the mixed gas output unit, and is used for delivering purging gas; A fourth purging gas output pipeline element, which is respectively connected to the fifth purging gas input pipeline element and the first vacuum unit, and is used for delivering purging gas; and / or The second purging unit further includes: An eighteenth switching element, which is arranged on the fifth purging gas input pipeline element and is used for controlling the flow of the fifth purging gas input pipeline element; and / or The second purging unit further includes: A tenth one-way element, which is arranged on the fifth purging gas input pipeline element and is used for preventing the gas inside the fifth purging gas input pipeline element from flowing backward; and / or The second purging unit further includes: A nineteenth switching element, which is arranged on the sixth purging gas input pipeline element and is used for controlling the flow of the sixth purging gas input pipeline element; and / or The second purging unit further includes: A twentieth switching element, which is arranged on the seventh purging gas input pipeline element and is used for controlling the flow of the seventh purging gas input pipeline element; and / or The second purging unit further includes: The twenty-first switching element is disposed on the eighth purge gas input pipeline element for controlling the flow of the eighth purge gas input pipeline element; and / or The second purge unit further includes: The twenty-second switching element is disposed on the fourth purge gas output pipeline element for controlling the flow of the fourth purge gas output pipeline element; and / or The second purge unit further includes: The sixth pressure detection element is communicated with the fifth purge gas input pipeline element for real-time monitoring of the pressure inside the fifth purge gas input pipeline element; and / or The first vacuum unit includes: The first vacuum pump element is communicated with the second purge unit for forming a vacuum negative pressure at the end of the second purge unit; The first vacuum pipeline element is respectively communicated with the power gas source and the first vacuum pump element for transporting the power gas; The second vacuum pipeline element is respectively communicated with the first vacuum pump element and the processing device for transporting the waste gas; The third vacuum pipeline element is respectively communicated with the gas mixing unit and the processing device for transporting the waste gas; and / or The first vacuum unit further includes: The pressure relief valve element is disposed on the third vacuum pipeline element for relieving the pressure of the gas mixing unit; and / or The first vacuum unit further includes: The seventh pressure detection element is communicated with the fourth purge gas output pipeline element for real-time monitoring of the pressure inside the fourth purge gas output pipeline element.

10. A semiconductor process system, characterized in that, including: The mixed gas concentration detection device according to any one of claims 1 to 4; or The mixed gas concentration detection system according to any one of claims 5 to 9.

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