Automatic sampling device for sampling bottle

Abstract

The utility model discloses automatic sampling equipment for a sampling bottle, and relates to the technical field of sampling equipment. According to the technical scheme, the automatic sample feeding device is characterized by comprising a workbench, the surface of the workbench is rotationally connected with a sample rotating platform used for containing sample bottles, the automatic sample feeding device further comprises a driving part used for driving the sample rotating platform to rotate, and an automatic sample feeding assembly used for feeding samples is arranged on one side of the workbench; the workbench is also provided with a cleaning assembly for cleaning the automatic sample injection assembly. The utility model aims to provide automatic sampling equipment for a sampling bottle.

Description

Technical Field

[0001] The utility model relates to a sampling device, and more specifically, to an automatic sampling device for sampling bottles. Background Art

[0002] In the process of semiconductor manufacturing, processes such as cutting, grinding, polishing, and cleaning are required for manufacturing semiconductor wafers. Among them, the metal content on the wafer surface is important data for characterizing whether the wafer is qualified.

[0003] In the prior art, when detecting the metal content on the wafer surface, usually two devices, VPD (vapor phase decomposition) and ICP-MS (inductively coupled plasma mass spectrometer), are used. However, generally, the ICP-MS and VPD devices are bound, and the solution containing metal ions directly enters the ICP-MS from the VPD for detection. This binding results in low utilization efficiency of the ICP-MS analysis device. If it is necessary to detect another solution, the solution needs to be manually packed and sealed, and then transported into the ICP-MS for detection. The efficiency of manual packing in the prior art is low, and the packing process will be affected by the external environment, which affects the detection results.

[0004] Therefore, there is an urgent need for a new technical solution to solve the above technical problems. Summary of the Utility Model

[0005] Aiming at the deficiencies of the prior art, the purpose of the utility model is to provide an automatic sampling device for sampling bottles.

[0006] The above technical purpose of the utility model is achieved through the following technical solutions: an automatic sampling device for sampling bottles, including a workbench, a sample rotating platform for placing sample bottles is rotatably connected to the surface of the workbench, and a driving member for driving its rotation is also included. An automatic sampling component for sample injection is arranged on one side of the workbench, and a cleaning component for cleaning the automatic sampling component is also arranged on the workbench.

[0007] By adopting the above technical solutions, after the VPD device finishes sampling the wafer, the liquid sample is introduced into the automatic sampling component, and the sampling bottle is placed on the sample rotating platform. The liquid sample is injected into the sample bottle through the automatic sampling component, thereby completing the automatic sampling work and reducing the manual sampling cost. Loading the bottle cap reduces the risk of contamination. And the offline sample is sent into the ICP-MS (inductively coupled plasma mass spectrometer) for detection, thereby effectively improving the detection range and utilization efficiency of the ICP-MS. After the sampling work is completed, the sampling component can be cleaned by the cleaning component to ensure its cleanliness and extend its service life.

[0008] The utility model is further arranged as: the sample bottle has a bottle cap.

[0009] The present utility model is further configured such that: the automatic sample injection assembly includes a slide table cylinder vertically disposed in the workbench, a motor is fixedly connected to the slide table of the slide table cylinder, an output shaft of the motor is fixedly connected with a connecting rod vertically disposed and extending out of the workbench, a horizontally disposed rotating swing arm is fixedly connected to the top end of the connecting rod, and a vertically downward sample outlet tube is disposed at the end of the rotating swing arm.

[0010] The present utility model is further configured such that: a vertically downward vacuum adsorption tube is disposed at the end of the rotating swing arm, an air extraction tube is disposed in the connecting rod, a through groove communicating the air extraction tube and the vacuum adsorption tube is opened inside the rotating swing arm, and an adsorption tube is connected to the bottom end of the vacuum adsorption tube.

[0011] The present utility model is further configured such that: the sample rotating platform includes a circular bottom plate and a top plate, a space is left between the bottom plate and the top plate and they are fixedly connected by bolts, and a plurality of placement grooves for placing sample bottles are opened on the surface of the top plate.

[0012] The present utility model is further configured such that: a collection plate is disposed on the surface of the workbench below the bottom plate, and a water retaining edge is disposed along the circumferential side of the surface of the collection plate.

[0013] The present utility model is further configured such that: a protective cover is further disposed on the surface of the collection plate, and a movable groove is opened on the protective cover on the movement paths of the sample outlet tube and the vacuum adsorption tube.

[0014] The present utility model is further configured such that: the cleaning assembly includes a DIW water washing circulation module and an acid washing module disposed on one side of the workbench, and both the DIW water washing circulation module and the acid washing module are on the movement path of the sample outlet tube.

[0015] The present utility model is further configured such that: the DIW water washing circulation module includes a water washing box with an open top, a liquid inlet pipe and a liquid outlet pipe are connected to the bottom of the water washing box, and solenoid valves are disposed on both the liquid inlet pipe and the liquid outlet pipe.

[0016] The present utility model is further configured such that: a liquid level sensor is further disposed in the water washing box.

[0017] The utility model has the following beneficial effects: After the VPD device finishes sampling the wafer, the liquid sample is introduced into the automatic sampling component, and the sampling bottle is placed on the sample rotating platform. The liquid sample is injected into the sample bottle through the automatic sampling component, thus completing the automatic sampling work, reducing the manual sampling cost, loading the bottle cap, and reducing the pollution risk. And the offline sample is sent into an ICP-MS (Inductively Coupled Plasma Mass Spectrometer) for detection, thereby effectively improving the detection range and utilization efficiency of the ICP-MS. After the sampling work is completed, the sampling component can be cleaned by the cleaning component to ensure its cleanliness and extend its service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic three-dimensional structure diagram of this embodiment;

[0019] Figure 2 is a schematic internal structure diagram of this embodiment;

[0020] Figure 3 is a partial schematic structure diagram of the automatic sampling component of this embodiment;

[0021] Figure 4 is a schematic structure diagram of the sample rotating platform of this embodiment.

[0022] BRIEF DESCRIPTION OF THE DRAWINGS: 1. Workbench; 2. Sample rotating platform; 3. Slide cylinder; 4. Motor; 5. Connecting rod; 6. Rotating swing arm; 7. Sample outlet pipe; 8. Hose; 9. Vacuum adsorption pipe; 10. Exhaust pipe; 11. Adsorption pipe; 12. Bottom plate; 13. Top plate; 14. Bolt; 15. Placing groove; 16. Collection plate; 17. Water retaining edge; 18. Protective cover; 19. Movable groove; 20. Water washing tank; 21. Liquid inlet pipe; 22. Liquid outlet pipe; 23. Solenoid valve; 24. Liquid level sensor; 25. Pickling tank. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0023] The following further describes the present utility model in detail with reference to the accompanying drawings.

[0024] Among them, the same components are denoted by the same reference numerals. It should be noted that the terms "front", "rear", "left", "right", "up" and "down" used in the following description refer to the directions in the drawings, and the terms "bottom surface" and "top surface", "inner" and "outer" refer to the directions towards or away from the geometric center of a specific component, respectively.

[0025] As shown in the figure, an automatic sampling bottle injection device includes a workbench 1. A sample rotating platform 2 for placing sample bottles is rotatably connected to the surface of the workbench 1. It also includes a driving member for driving its rotation (the driving member is specifically a motor, not shown in the figure). An automatic injection component for injection is arranged on one side of the workbench 1, and a cleaning component for cleaning the automatic injection component is also arranged on the workbench 1.

[0026] After the VPD device finishes sampling the wafer, the liquid sample is introduced into the automatic injection component, and the sampling bottle is placed on the sample rotating platform 2. The liquid sample is injected into the sample bottle through the automatic injection component, thus completing the automatic sampling work and reducing the manual sampling cost. And the sample is sent into an ICP-MS (Inductively Coupled Plasma Mass Spectrometer) for detection, thereby effectively improving its detection range and efficiency. After the sampling work is completed, the sampling component can be cleaned by the cleaning component to ensure its cleanliness and extend its service life.

[0027] The automatic injection component includes a slide cylinder 3 vertically arranged inside the workbench 1. A motor 4 is fixedly connected to the slide of the slide cylinder. The output shaft of the motor 4 is fixedly connected to a connecting rod 5 vertically arranged and extending out of the workbench 1. The top of the connecting rod 5 is fixedly connected to a horizontally arranged rotating swing arm 6. A vertically downward sample outlet tube 7 is arranged at the end of the rotating swing arm 6. A hose 8 is connected to the top of the sample outlet tube 7 and is connected to a pump (not shown in the figure). Under the cooperation of the motor 4 and the slide cylinder 3, the horizontal and height positions of the sample outlet tube 7 are controlled to inject the liquid sample into the corresponding sample bottle.

[0028] A vertically downward vacuum adsorption tube 9 is arranged at the end of the rotating swing arm 6. An air extraction tube 10 is arranged inside the connecting rod 5. The bottom end of the air extraction tube 10 is connected to a hose and is connected to an air extraction pump (not shown in the figure). A through groove communicating the air extraction tube 10 and the vacuum adsorption tube 9 is opened inside the rotating swing arm 6. The bottom end of the vacuum adsorption tube 9 is connected to an adsorption tube 11. By setting a bottle cap on the top of the sample bottle, sample contamination is prevented. Before sampling, under the cooperation of the motor 4 and the slide cylinder 3, the bottom of the adsorption tube 11 is placed on the surface of the bottle cap. Under the action of the air extraction pump, the bottle cap is adsorbed to the bottom of the adsorption block. At the same time, the motor 4 and the slide cylinder 3 continue to work, so that the sample outlet tube 7 extends into the sample bottle and injects the sample into the sample bottle. After the injection is completed, the motor 4 and the slide cylinder 3 control the bottle cap to be placed on the top of the sample bottle again, and the air extraction pump stops working, sealing the sample bottle again.

[0029] The sample rotating platform 2 includes a circular bottom plate 12 and a top plate 13. There is a space between the bottom plate 12 and the top plate 13, and they are fixedly connected by bolts 14. A plurality of placement grooves 15 for placing sample bottles are formed on the surface of the top plate 13 to place the sample bottles and ensure the stability of the sample bottles. A collection plate 16 is arranged below the bottom plate 12 on the surface of the workbench 1. A water retaining edge 17 is arranged along the circumferential side of the surface of the collection plate 16. When there is excess liquid sample leaking out, it will fall on the surface of the collection plate 16, thus facilitating its recovery and cleaning.

[0030] A protective cover 18 is further arranged on the surface of the collection plate 16. An activity groove 19 is formed on the movement path of the sample outlet pipe 7 and the vacuum adsorption pipe 11911 in the protective cover 18, which further plays a protective role in this working process and prevents the liquid sample from being contaminated during this working process.

[0031] The cleaning assembly includes a DIW water washing circulation module and an acid pickling module arranged on one side of the workbench 1. Both the DIW water washing circulation module and the acid pickling module are located on the movement path of the sample outlet pipe. The sample outlet pipe 7 can suck acid liquid through a pump in the acid pickling module to clean the pipeline and then spit it into the DIW water washing module to discharge the acid. The sample outlet pipe 7 can clean the pollution on its surface in the acid pickling module, and the DIW water washing module can clean the acid residue on the surface of the sample outlet pipe 7 after acid pickling, playing a protective role.

[0032] The DIW water washing circulation module includes a water washing tank 20 with an open top. A liquid inlet pipe 21 and a liquid outlet pipe 22 are connected to the bottom of the water washing tank 20. Solenoid valves 23 are arranged on both the liquid inlet pipe 21 and the liquid outlet pipe 22. A liquid level sensor 24 is further arranged in the water washing tank 20. If the liquid level sensor detects that the liquid level inside is too high, the liquid inlet pipe 21 will be closed to prevent liquid overflow; the acid pickling module includes an acid pickling tank 25.

[0033] The specific embodiments are only explanations of the present invention and not limitations thereto. Those skilled in the art can make modifications to the embodiments without creative contributions according to needs after reading this specification, but as long as they are within the scope of the claims of the present invention, they are protected by the patent law.

Claims

1. An automatic sampling bottle injector, characterized in that: It includes a workbench (1), on the surface of the workbench (1), there is a sample rotating platform (2) rotatably connected for placing sample bottles, and also includes a driving member for driving its rotation. On one side of the workbench (1), there is an automatic sampling component for sample injection, and on the workbench (1), there is also a cleaning component for cleaning the automatic sampling component; The automatic sampling component includes a slide cylinder (3) vertically arranged inside the workbench (1). A motor (4) is fixedly connected to the slide of the slide cylinder (3). The output shaft of the motor (4) is fixedly connected to a connecting rod (5) vertically arranged and extending out of the workbench (1). The top end of the connecting rod (5) is fixedly connected to a horizontally arranged rotating swing arm (6). At the end of the rotating swing arm (6), there is a vertically downward sample discharging tube (7); The cleaning component includes a DIW water washing circulation module and an acid washing module arranged on one side of the workbench (1). Both the DIW water washing circulation module and the acid washing module are located on the movement path of the sample discharging tube (7).

2. The automatic sampling bottle injector according to claim 1, characterized in that: At the end of the rotating swing arm (6), there is a vertically downward vacuum adsorption tube (9). Inside the connecting rod (5), there is an air extraction tube (10). Inside the rotating swing arm (6), there is a through groove connecting the air extraction tube (10) and the vacuum adsorption tube (9). The bottom end of the vacuum adsorption tube (9) is connected with an adsorption tube.

3. The automatic sampling bottle injector according to claim 1, characterized in that: The sample rotating platform (2) includes a circular bottom plate (12) and a top plate (13). There is a space between the bottom plate (12) and the top plate (13), and they are fixedly connected by bolts (14). On the surface of the top plate (13), there are several placement grooves (15) for placing sample bottles.

4. The automatic sampling bottle injector according to claim 3, characterized in that: Below the bottom plate (12) on the surface of the workbench (1), there is a collection plate (16). Along the circumference of the surface of the collection plate (16), there is a water retaining edge (17).

5. The automatic sampling bottle injector according to claim 4, characterized in that: On the surface of the collection plate (16), there is also a protective cover (18). An activity groove (19) is provided on the protective cover (18) along the movement paths of the sample discharging tube (7) and the vacuum adsorption tube (9).

6. The automatic sampling bottle injector according to claim 5, characterized in that: The DIW water washing circulation module includes a water washing box (20) with an open top. The bottom of the water washing box (20) is connected with a liquid inlet pipe (21) and a liquid outlet pipe (22). Solenoid valves (23) are arranged on both the liquid inlet pipe (21) and the liquid outlet pipe (22).

7. The automatic sampling bottle injector according to claim 6, wherein: A liquid level sensor (24) is also arranged inside the water washing box (20).

Images