Silicon rod conveying mechanism, automatic feeding device and cutting device

Abstract

The utility model discloses a silicon rod conveying mechanism, an automatic feeding device and a cut-off device, the silicon rod conveying mechanism comprises a mounting frame, a plurality of guide rails, a plurality of guide rails and a plurality of guide rails, the conveying rollers are arranged in the direction of the extending plate and rotationally arranged on the extending plate, and a fork arm containing position capable of being matched with an external trolley is formed between every two adjacent conveying rollers; and the conveying roller driving assembly is connected with one end, close to the mounting frame, of each conveying roller. The automatic transfer device can be matched with an external trolley, and silicon single crystal rods borne on the automatic transfer device can be transferred to the conveying rollers through the external trolley, so that the silicon single crystal rods produced by a silicon single crystal rod drawing device can be automatically transferred by directly utilizing the external trolley, and the silicon single crystal rods are automatically conveyed to a cutting machine through the conveying rollers. The silicon single crystal rod transfer device achieves automatic transfer of silicon single crystal rods, manual intervention is not needed in the whole transfer process, the transfer speed is high, and the efficiency is high.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon rod processing equipment, in particular to a silicon rod conveying mechanism, an automatic feeding device and a cutting device. Background Art

[0002] This section merely provides background information related to the present disclosure and may not constitute prior art.

[0003] Silicon wafers used in the production of semiconductor electronic components such as integrated circuits are primarily manufactured by slicing single-crystal silicon ingots grown using the Czochralski method. After crystal pulling, the cylindrical silicon ingots are cut into short ingots of varying lengths to meet specific usage requirements.

[0004] After the silicon ingots are pulled from the single crystal ingot pulling device, they vary in length, with the longest reaching over 7 meters. Their heavy weight makes them difficult to transport manually. While existing conveyor systems can transport the ingots, they also require the ingots to be moved onto the conveyor. However, the conveyor has limitations in its connection with the trolley, making it impossible to automate the transport of the ingots. Utility Model Content

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the defect that the existing conveying device cannot realize the automatic transportation of silicon rods, thereby providing a silicon rod conveying mechanism, an automatic loading device and a cutting device.

[0006] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0007] A silicon rod conveying mechanism, comprising:

[0008] A mounting frame, wherein a plurality of extension plates are arranged at intervals on the side walls of the mounting frame;

[0009] A plurality of conveying rollers are arranged along the extension plate and rotatably mounted on the extension plate, with a fork arm receiving position adapted to an external trolley formed between two adjacent conveying rollers;

[0010] A conveying roller driving assembly is connected to one end of each conveying roller close to the mounting frame.

[0011] To further optimize the technical solution, at least two bearing seats are provided at the top end of the extension plate, and the conveying roller is rotatably provided on the bearing seats.

[0012] To further optimize the technical solution, at least two bearing seats are provided at the top end of the extension plate, and the conveying roller is rotatably provided on the bearing seats.

[0013] To further optimize the technical solution, an annular groove is provided on the circumferential outer wall surface of the conveying roller.

[0014] Further optimizing the technical solution, the conveyor roller drive assembly includes:

[0015] A plurality of pairs of sprockets, each pair of sprockets being coaxially arranged on the conveying rollers, and the sprockets of the conveying rollers being connected in series via chains;

[0016] A conveying roller driving motor, wherein the output shaft end of the conveying roller driving motor is connected to one of the conveying rollers through a linkage component.

[0017] To further optimize the technical solution, the conveyor roller drive assembly further includes:

[0018] A tensioning adjustment structure is provided, wherein the tensioning adjustment structure is suitable for fine-tuning the output end of the conveying roller driving motor.

[0019] An automatic feeding device, comprising:

[0020] Support frame;

[0021] The silicon rod conveying mechanism is arranged on the supporting frame;

[0022] The external trolley includes a fork arm body, a fork arm lifting mechanism and a fork arm moving mechanism. The fork arm body includes at least two spaced apart forks, and the forks correspond to the fork arm accommodating positions. The external trolley is used to receive silicon rods and automatically place the silicon rods on the silicon rod conveying mechanism.

[0023] Further optimizing the technical solution, the support frame includes:

[0024] vertical bracket;

[0025] A plurality of horizontal supports are spaced apart from each other, wherein an external trolley parking area is formed between two adjacent horizontal supports, and the external trolley parking area corresponds to the position of the silicon rod and crystal wire adjustment mechanism.

[0026] To further optimize the technical solution, external trolley limiting structures are respectively provided on the two horizontal supports forming the external trolley parking area, and the limiting structures are used to limit the distance between the external trolley and the vertical supports.

[0027] To further optimize the technical solution, the external trolley limiting structure includes:

[0028] A limiting tube, the limiting tube being vertically arranged on a side surface of the horizontal support;

[0029] An elastic layer is coated on the limiting tube.

[0030] To further optimize the technical solution, a silicon rod crystal line adjustment mechanism for adjusting the position of the silicon rod crystal line is further provided on the support frame.

[0031] To further optimize the technical solution, the silicon rod and crystal line adjustment mechanism includes:

[0032] Bracket;

[0033] At least two clamping assemblies, each having a clamping position for supporting and clamping a single crystal silicon rod, the clamping assemblies being arranged on the support at intervals, the clamping assemblies and the conveying rollers being arranged alternately at intervals, and a second fork arm accommodating position adapted to an external trolley being formed between adjacent clamping assemblies and the conveying rollers;

[0034] The clamping assembly driving mechanism is connected to each of the clamping assemblies and is suitable for driving each of the clamping assemblies to rotate synchronously.

[0035] To further optimize the technical solution, the silicon rod and crystal line adjustment mechanism is arranged on the support frame through a lifting mechanism.

[0036] Further optimizing the technical solution, the lifting mechanism includes:

[0037] At least two racks, the racks being vertically arranged on the silicon rod and crystal wire adjustment mechanism;

[0038] at least two rack drive assemblies, each of which is disposed on the support frame and meshes with the rack;

[0039] At least two linear guide rails are provided on the support frame and are slidably assembled with the silicon rod and crystal line adjustment mechanism.

[0040] Further optimizing the technical solution, the rack drive assembly includes:

[0041] A lifting drive motor, the lifting drive motor being laterally arranged on the support frame;

[0042] A gear is coaxially connected to one end of the lifting drive motor extending from the support frame, and the gear is meshed with the rack.

[0043] A cutting device, comprising:

[0044] Cutting machine;

[0045] The silicon rod conveying mechanism or the automatic loading device.

[0046] The technical solution of this utility model has the following advantages:

[0047] 1. The present invention provides a silicon rod conveying mechanism in which conveyor rollers are arranged on spaced extension plates, with one end of each conveyor roller being open, and a conveyor roller drive assembly being arranged on the other end of the conveyor roller. This mechanism is thus compatible with an external trolley, and the single crystal silicon rods carried on the external trolley can be transferred to the conveyor rollers via the external trolley. This mechanism allows the external trolley to automatically transfer the single crystal silicon rods produced by the single crystal silicon rod drawing apparatus, and automatically delivers the single crystal silicon rods to the cutting machine via the conveyor rollers. This mechanism achieves automatic transfer of single crystal silicon rods, eliminating the need for human intervention throughout the entire transfer process, resulting in high transfer speed and efficiency.

[0048] 2. The utility model provides an automatic loading device, which cooperates with the silicon rod conveying mechanism and the external trolley to realize the automatic transportation of single crystal silicon rods. The degree of automation is high, and the transportation speed of single crystal silicon rods is improved.

[0049] 3. The present invention provides an automatic loading device in which two horizontal supports forming the external trolley parking area are each provided with an external trolley limiting structure. The limiting structure can limit the distance between the external trolley and the vertical supports, providing a positional guide for the external trolley and facilitating its positioning. If the external trolley is not positioned accurately, it can add a limit between the external trolley and the automatic loading device to reduce the risk of collision between the two.

[0050] 4. The utility model provides an automatic loading device, which supports and clamps the single crystal silicon rod through at least two clamping assemblies arranged at intervals, thereby clamping the single crystal silicon rod after the crystal pulling is completed, and uses the clamping assembly driving mechanism to control the synchronous rotation of each clamping assembly, thereby driving the various positions of the single crystal silicon rod to rotate synchronously, thereby realizing precise adjustment of the crystal line position of the single crystal silicon rod.

[0051] 5. This utility model provides an automatic loading device in which a silicon ingot and wire adjustment mechanism is mounted on a support frame via a lifting mechanism. When a single crystal silicon ingot is transferred from an external trolley to the clamping assembly of the silicon ingot and wire adjustment mechanism, the lifting mechanism drives the adjustment mechanism upward, preventing the conveyor rollers from affecting the adjustment of the wires, thereby enabling precise adjustment of the wires of the single crystal silicon ingot. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0053] Figure 1This is a structural diagram of an automatic feeding device provided by the utility model;

[0054] Figure 2 This is a top view of an automatic loading device provided by the utility model;

[0055] Figure 3 This is a partial structural diagram of a silicon rod conveying mechanism provided by the present invention;

[0056] Figure 4 For this utility model Figure 3 A top view of

[0057] Figure 5 This is a structural diagram of a silicon rod and crystal wire adjustment mechanism in an automatic feeding device provided by the utility model;

[0058] Figure 6 For this utility model Figure 5 Rear view;

[0059] Figure 7 This is a structural diagram of a support frame in an automatic loading device provided by the utility model;

[0060] Figure 8 For this utility model Figure 7 Top view of .

[0061] Reference numerals:

[0062] 1. Silicon rod conveying mechanism, 11. Bearing seat, 12. Conveyor roller, 13. Conveyor roller drive motor, 131. Driving sprocket, 132. Driven sprocket, 14. Mounting frame, 15. Extension plate, 16. First sprocket, 17. Second sprocket, 19. First chain, 110. Second chain, 111. Third chain;

[0063] 2. Support frame, 21. Vertical bracket, 22. Horizontal bracket, 23. Linear guide rail, 24. External trolley limiting structure, 241. Limiting tube, 25. External trolley parking area;

[0064] 3. Lifting mechanism, 31. Lifting drive motor, 32. Gear, 33. Rack;

[0065] 4. Silicon rod and crystal wire adjustment mechanism, 41. Clamping assembly, 411. First rotating roller, 412. Second rotating roller, 413. Clamping position, 414. Rotating roller bracket, 42. Rotating roller drive motor, 43. First linkage assembly, 431. Rotating roller first chain, 432. First rotating roller drive sprocket, 433. Second rotating roller drive sprocket, 434. First transition sprocket, 435. First drive shaft driven sprocket, 44. First drive shaft, 45. Second linkage assembly, 451. Rotating roller second chain, 452. First drive shaft driving sprocket, 453. Second drive shaft driven sprocket, 454. Second transition sprocket, 46. Second drive shaft, 47. Third linkage assembly, 471. Rotating roller third chain, 472. Drive motor driving sprocket, 473. Second drive shaft driving sprocket, 48. Extension frame, 49. Bracket, 410. Outer cover. DETAILED DESCRIPTION

[0066] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments described herein. Rather, these embodiments are provided to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0067] It should be understood that the terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting. Unless the context clearly indicates otherwise, as used herein, the singular forms "a," "an," and "including" may also be intended to include the plural forms. The terms "comprising," "including," and "having" are inclusive and, therefore, specify the presence of the stated features, elements, and / or components, but do not preclude the presence or addition of one or more other features, elements, components, and / or combinations thereof.

[0068] Although the terms first, second, etc. may be used herein to describe multiple elements, components, regions, layers and / or sections, these elements, components, regions, layers and / or sections should not be limited by these terms. These terms may only be used to distinguish one element, component, region, layer or section from another region, layer or section. Unless the context clearly indicates otherwise, terms such as "first", "second" and other numerical terms do not imply a sequence or order when used herein. In addition, in the description of the present invention, unless otherwise clearly specified and limited, the terms "set" and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For those skilled in the art, the specific meaning of the above terms in the present invention can be understood according to the specific circumstances.

[0069] For ease of description, spatial relative terms can be used in the text to describe the relationship of one element or feature relative to another element or feature as shown in the figure, such as "front", "back", "center", "inside", "longitudinal", "lateral", "side", "vertical", "outside", etc. Such spatial relative terms are intended to include different orientations of the mechanism in use or operation other than the orientation depicted in the figure. For example, if the mechanism in the figure flips, the element described as "below other elements or features" or "below other elements or features" will then be oriented as "above other elements or features" or "above other elements or features". Therefore, the example term "below..." can include both upper and lower orientations. The mechanism can be oriented otherwise (rotated 90 degrees or in other directions) and the spatial relative descriptors used in the text are interpreted accordingly.

[0070] It should be noted that the pulling process of single crystal silicon rods refers to the process of growing single crystal silicon rods from polycrystalline silicon raw materials through a specific method. The truncation process of single crystal silicon rods refers to the process of cutting the long silicon rods after pulling into short silicon rods of different lengths.

[0071] The specific embodiments of the present invention will be described in detail below in conjunction with the silicon rod conveying mechanism of the first aspect of the present invention.

[0072] It should be noted that the silicon rod conveying mechanism of the first aspect of the present invention is only a preferred embodiment of the present invention. The silicon rod conveying mechanism of the present invention can adopt the silicon rod conveying mechanism of the first aspect of the present invention or other structures. For the convenience of explanation, the silicon rod conveying mechanism of the first aspect of the present invention is described in detail below.

[0073] Combine Figure 3 and Figure 4 As shown, this embodiment discloses a silicon rod conveying mechanism, the end of which is suitable for connecting with a cutting machine, and the silicon rod conveying mechanism includes a mounting frame 14, a conveying roller 12 and a conveying roller drive assembly. A plurality of extension plates 15 are arranged at intervals on the side wall of the mounting frame 14. There are a plurality of conveying rollers 12, and the plurality of conveying rollers 12 are arranged along the direction of the extension plate 15 and are rotatably set on the extension plate 15. A fork arm accommodating position adapted to an external trolley is formed between two adjacent conveying rollers 12. The conveying roller drive assembly is connected to one end of each conveying roller 12 close to the mounting frame 14. The conveying roller drive assembly can realize the forward and reverse rotation of the conveying roller 12, completing the transportation function of the silicon rods.

[0074] Compared to existing conveying mechanisms, the above-described silicon rod conveying mechanism improves the arrangement of the conveying rollers 12. The conveying rollers 12 are arranged on spaced extension plates 15, with one end of each conveying roller 12 being open, and the conveying roller drive assembly being arranged at the other end of the conveying roller 12. This allows for compatibility with an external trolley, allowing the single crystal silicon rods carried on the trolley to be transferred to each conveying roller 12. This allows the external trolley to be used to automatically transfer the single crystal silicon rods produced by the single crystal silicon rod drawing apparatus, and automatically convey the single crystal silicon rods to the cutting machine via each conveying roller 12. This embodiment realizes the automatic transfer of single crystal silicon rods, which is very convenient. The entire transfer process requires no human intervention, resulting in a high degree of automation.

[0075] It should be noted that the external trolley is an AGV (automatic guided vehicle), and other types of automatic trolleys may also be used, and their specific types are not limited here.

[0076] In some embodiments, at least two bearing seats 11 are provided at the top of the extension plate 15, and the conveying roller 12 is rotatably provided on the bearing seats 11 via bearings. In this embodiment, the conveying roller 12 is rotatably positioned by the bearing seats 11.

[0077] In some embodiments, an annular groove is provided on the circumferential outer wall surface of the conveying roller 12, which provides a holding space for the single crystal silicon rod, prevents the single crystal silicon rod from slipping off the conveying roller 12, and ensures the stability of the transmission of the single crystal silicon rod.

[0078] In some embodiments, the conveyor roller drive assembly includes a first sprocket 16, a second sprocket 17, and a conveyor roller drive motor 13. A plurality of first sprockets 16 and second sprockets 17 are provided, each coaxially disposed on the conveyor roller 12. Each adjacent pair of conveyor rollers 12 are alternately connected by a first chain 19 and a second chain 110. The first chain 19 is connected to the two first sprockets 16, and the second chain 110 is connected to the two second sprockets 17. The conveyor roller drive motor 13 primarily provides driving force for the conveyor roller 12. A driving sprocket 131 is connected to the output shaft end of the conveyor roller drive motor 13. The driving sprocket 131 is connected to a driven sprocket 132 disposed on the conveyor roller 12 via a third chain 111.

[0079] In this embodiment, the conveyor rollers 12 are connected in series via chains to achieve synchronous rotation of the conveyor rollers 12. When the conveyor roller drive motor 13 is running, the conveyor roller drive motor 13 drives the driving sprocket 131 to rotate, which in turn drives one of the conveyor rollers 12 to rotate via the third chain 111. Because the conveyor rollers 12 are connected in series via the chains, all of the conveyor rollers 12 can be driven to rotate synchronously.

[0080] In some embodiments, the mounting frame 14 is used to install and fix the conveying roller drive motor 13 and the bearing seat, providing support and support for the entire silicon rod conveying mechanism.

[0081] In some embodiments, the conveyor roller drive assembly further includes a tension adjustment structure adapted to fine-tune the output of the conveyor roller drive motor 13. As an optional embodiment, during tension adjustment, the position of the conveyor roller drive motor 13 may be adjusted to thereby adjust the chain tension.

[0082] The above silicon rod conveying mechanism specifically conveys the single crystal silicon rods in the following process:

[0083] After the crystal pulling is completed, the single crystal silicon rod is transferred to the external trolley, and the external trolley moves to the loading area of the silicon rod conveying mechanism so that the fork arms on the external trolley are staggered with the conveying rollers 12.

[0084] The fork arm on the external trolley is raised (the height to which the external trolley rises is higher than the top of the conveying roller 12 ), and the fork arm moving mechanism on the external trolley is used to push the fork arm forward.

[0085] Then the external trolley descends. Since the fork arms on the external trolley are staggered with the clamping assemblies 41, the single crystal silicon rods thereon will be supported by the conveying rollers 12 when the fork arms on the external trolley descend, causing the single crystal silicon rods to fall from the external trolley onto the conveying rollers 12, completing the transfer of the silicon rods.

[0086] Finally, the external trolley drives away from the loading area of the silicon rod conveying mechanism, and conveys the single crystal silicon rod to the cutting area through the conveying rollers 12, completing the automatic loading of the single crystal silicon rod.

[0087] The specific embodiments of the present invention are described in detail below in conjunction with the automatic loading device of the second aspect of the present invention.

[0088] It should be noted that the automatic loading device of the second aspect of the present invention is only a preferred embodiment of the present invention. The automatic loading device of the present invention can adopt the automatic loading device of the second aspect of the present invention, or can adopt other structures. For the convenience of explanation, the automatic loading device of the second aspect of the present invention is explained in detail below.

[0089] Combine Figures 1 to 8As shown, this embodiment discloses an automatic loading device, comprising a support frame 2, a silicon rod conveying mechanism, and an external trolley. The silicon rod conveying mechanism is mounted on the support frame 2, which is fixed to the ground to provide support for the entire structure. The external trolley comprises a fork arm body, a fork arm lifting mechanism, and a fork arm moving mechanism. The fork arm body comprises at least two spaced-apart forks, each connected at one end. The fork arm body is a frame-shaped fork arm, and the forks correspond to the fork arm receiving positions. The external trolley is used to receive the silicon rods and automatically place them onto the silicon rod conveying mechanism 1.

[0090] In this embodiment, the silicon rod conveying mechanism cooperates with the external trolley, and the program setting of the external trolley and the silicon rod conveying mechanism can realize the automatic transportation of the single crystal silicon rods. The degree of automation is high, and the handling speed of the single crystal silicon rods is improved.

[0091] In some embodiments, the support frame 2 includes vertical supports 21 and horizontal supports 22. Multiple horizontal supports 22 are provided, and there is a spacing between them. An external trolley parking area 25 is formed between two adjacent horizontal supports 22. The external trolley parking area 25 corresponds to the position of the silicon ingot and crystal wire adjustment mechanism 4 and provides parking space for an external trolley.

[0092] In some embodiments, each of the two horizontal supports 22 forming the external trolley parking area 25 is provided with an external trolley limiting structure 24. The limiting structure 24 is used to limit the distance between the external trolley and the vertical support 21, providing a positional guide for positioning the external trolley, facilitating positioning of the external trolley, and, if the external trolley is not positioned accurately, adding a limit between the external trolley and the automatic loading device to reduce the risk of collision between the two.

[0093] More specifically, the external trolley's position-limiting structure 24 includes a position-limiting tube 241 and an elastic layer. Position-limiting tube 241 is vertically mounted on the side of the horizontal support 22, effectively limiting the position of the external trolley when it reaches that position. The elastic layer, a non-metallic elastic layer, covers the position-limiting tube 241 and acts as a buffer against the movement of the external trolley.

[0094] In some embodiments, the support frame 2 is further provided with a silicon ingot crystal adjustment mechanism 4 for adjusting the position of the silicon ingot crystal line. The silicon ingot crystal adjustment mechanism 4 includes a bracket 49, a clamping assembly 41, and a clamping assembly drive mechanism. At least two clamping assemblies 41 are provided, each having a clamping position 413 for supporting and clamping the single crystal silicon ingot. Each clamping assembly 41 is arranged on the bracket 49 at intervals. The clamping assemblies 41 and the conveyor rollers 12 are arranged alternately, and a second fork arm accommodating position compatible with an external trolley is formed between adjacent clamping assemblies 41 and conveyor rollers 12. The clamping assembly drive mechanism is connected to each clamping assembly 41 and is suitable for driving each clamping assembly 41 to rotate synchronously.

[0095] In this embodiment, the single crystal silicon rod is supported and clamped by at least two clamping assemblies 41 arranged at intervals, thereby achieving clamping of the single crystal silicon rod after the crystal pulling is completed, and the clamping assembly driving mechanism is used to control the synchronous rotation of each clamping assembly 41, thereby driving the various positions of the single crystal silicon rod to rotate synchronously, thereby achieving precise adjustment of the crystal line position of the single crystal silicon rod.

[0096] In some embodiments, the clamping assembly 41 includes a rotating roller bracket 414, a first rotating roller 411, and a second rotating roller 412. The rotating roller bracket 414 is connected to a side wall of the bracket 49. The first rotating roller 411 is rotatably mounted on the rotating roller bracket 414. The second rotating roller 412 is rotatably mounted on the rotating roller bracket 414. The upper portion of the second rotating roller 412 is spaced apart from the upper portion of the first rotating roller 411 to form a clamping position 413.

[0097] In this embodiment, the second rotating roller 412 rotates in the same direction as the first rotating roller 411, thereby providing a rotational force for the single crystal silicon rod to rotate in one direction, so that the clamped single crystal silicon rod can rotate, thereby achieving crystal line adjustment of the single crystal silicon rod.

[0098] In some embodiments, the clamping assembly driving mechanism includes a rotating roller driving motor 42 and a linkage assembly. The linkage assembly is connected to the output shaft end of the rotating roller driving motor 42, and the linkage assembly is connected to each clamping assembly 41 respectively.

[0099] The linkage assembly includes a first linkage assembly 43, a first drive shaft 44, and a first drive shaft connecting assembly. At least two first linkage assemblies 43 are provided, each connected to a clamping assembly 41. The first drive shaft 44 passes through each rotating roller bracket 414 and connects to each first linkage assembly 43. The first drive shaft 44 is adapted to drive each first linkage assembly 43 for synchronous operation. The first drive shaft connecting assembly is connected between the first drive shaft 44 and the output shaft of the rotating roller drive motor 42. In this embodiment, when the first drive shaft 44 rotates, it drives each first linkage assembly 43 to rotate, thereby driving the multiple rows of clamping assemblies 41 for synchronous rotation. This avoids the increased equipment manufacturing cost associated with each clamping assembly 41 being driven by a separate rotating roller drive motor 42, and also avoids the asynchronous operation of the clamping assemblies 41 caused by the inconsistent response times of the rotating roller drive motors 42 when each clamping assembly 41 is driven by a separate rotating roller drive motor 42.

[0100] More specifically, the first linkage assembly 43 includes a first rotating roller drive sprocket 432, a second rotating roller drive sprocket 433, a first transition sprocket 434, a first drive shaft driven sprocket 435, and a first rotating roller chain 431. The first rotating roller drive sprocket 432 is coaxially connected to the first rotating roller 411. The second rotating roller drive sprocket 433 is coaxially connected to the second rotating roller 412. At least one first transition sprocket 434 is provided, rotatably mounted on the rotating roller bracket 414. The first drive shaft driven sprocket 435 is coaxially mounted on the first drive shaft 44. The first rotating roller chain 431 is sleeved on the first drive shaft driven sprocket 435, the first rotating roller drive sprocket 432, the second rotating roller drive sprocket 433, and the first transition sprocket 434, so that the first drive shaft 44 is linked to the first drive shaft driven sprocket 435 and the first rotating roller drive sprocket 432, respectively. In this embodiment, when the first driving shaft 44 rotates, it can drive the first rotating roller chain 431 to rotate, and further drive the first rotating roller driving sprocket 432 and the second rotating roller driving sprocket 433 to rotate synchronously.

[0101] When the first rotating roller chain 431 is arranged, if the first rotating roller chain 431 directly passes over the top of the first rotating roller drive sprocket 432 and the second rotating roller drive sprocket 433, it will occupy the space of the clamping position 413, making it impossible for the single crystal silicon rod to pass through this position. To solve this technical problem, in some embodiments, a first transition sprocket 434 is provided below the first rotating roller drive sprocket 432 and the second rotating roller drive sprocket 433. After the first rotating roller chain 431 passes over the top of the first rotating roller drive sprocket 432, it passes under the first transition sprocket 434 and then passes over the top of the second rotating roller drive sprocket 433. This ensures that the first rotating roller chain 431 does not occupy the space of the clamping position 413, and prevents interference between the first rotating roller chain 431 and the clamping position 413.

[0102] In some embodiments, the first drive shaft connection assembly includes an extension frame 48, a second drive shaft 46, a second linkage assembly 45, and a third linkage assembly 47. Two extension frames 48 are provided, and the two extension frames 48 are arranged on the side walls of the bracket 49. Each extension frame 48 corresponds to a rotating roller bracket 414, and the extension frames 48 and the rotating roller bracket 414 are respectively located on either side of the bracket 49. The two ends of the second drive shaft 46 are rotatably mounted on the two extension frames 48. The second linkage assembly 45 is connected between the first drive shaft 44 and the second drive shaft 46. The third linkage assembly 47 is connected between the second drive shaft 46 and the output shaft of the rotating roller drive motor 42.

[0103] More specifically, the second linkage assembly 45 includes a first drive shaft driving sprocket 452, a second drive shaft driven sprocket 453, a second transition sprocket 454, and a second rotating roller chain 451. The first drive shaft driving sprocket 452 is coaxially connected to the first drive shaft 44. The second drive shaft driven sprocket 453 is coaxially connected to the second drive shaft 46. At least one second transition sprocket 454 is provided, and the second transition sprocket 454 is rotatably mounted on the extension frame 48. The second rotating roller chain 451 is sleeved on the first drive shaft driving sprocket 452, the second drive shaft driven sprocket 453, and the second transition sprocket 454, thereby forming a linkage between the first drive shaft 44 and the second drive shaft 46.

[0104] The third linkage assembly 47 includes a rotating roller drive motor drive sprocket 472, a second drive shaft drive sprocket 473, and a rotating roller third chain 471. The rotating roller drive motor drive sprocket 472 is coaxially connected to the output shaft of the rotating roller drive motor 42. The second drive shaft drive sprocket 473 is coaxially connected to the second drive shaft 46. The rotating roller third chain 471 is mounted between the rotating roller drive motor drive sprocket 472 and the second drive shaft drive sprocket 473.

[0105] In some embodiments, the rotating roller bracket 414 is provided with a housing cavity suitable for accommodating the first linkage assembly 43, and the housing cavity is sealed by the outer cover 410. In this embodiment, the housing cavity provides installation space for the first linkage assembly 43, and after the housing cavity is sealed by the outer cover 410, the first linkage assembly 43 in the housing cavity can be dustproof and protected, thereby extending the service life of the first linkage assembly 43.

[0106] In some embodiments, the silicon ingot crystal line adjustment mechanism 4 is disposed on the support frame 2 via a lifting mechanism 3. In this embodiment, when the single crystal silicon ingot is transferred from the external trolley to the clamping assembly 41 of the silicon ingot crystal line adjustment mechanism 4, the lifting mechanism 3 can drive the silicon ingot crystal line adjustment mechanism 4 to rise, thereby preventing the conveying rollers 12 from affecting the adjustment of the crystal line, thereby accurately adjusting the crystal line of the single crystal silicon ingot.

[0107] In some embodiments, the lifting mechanism 3 includes a rack 33, a rack drive assembly, and linear guides 23. At least two racks 33 are provided, vertically mounted on the silicon ingot and wire adjustment mechanism 4. At least two rack drive assemblies are provided, each mounted on the support frame 2 and meshing with the racks 33. At least two linear guides 23 are provided, mounted on the support frame 2 and slidably mounted on the silicon ingot and wire adjustment mechanism 4, serving as guides for lifting.

[0108] In some embodiments, the rack drive assembly includes a lift drive motor 31 and a gear 32. The lift drive motor 31 is mounted transversely to the support frame 2 and provides the lifting power for the silicon ingot and strand adjustment mechanism 4. The gear 32 is coaxially connected to the end of the lift drive motor 31 extending from the support frame 2 and meshes with the rack 33, which is a helical gear. In this embodiment, when the lift drive motor 31 is activated, it rotates the gear 32, which in turn drives the rack 33 up and down, thereby driving the entire silicon ingot and strand adjustment mechanism 4 up and down, thereby supporting the rotation of the silicon ingots.

[0109] The above-mentioned automatic loading device mainly realizes the purpose of transferring and delivering the long silicon rods at the end of crystal pulling to the cutting area. It can dock with the external trolley device for transporting silicon rods and has the function of rotating silicon rods to adjust the position of the silicon rod crystal line.

[0110] The specific working process of the above-mentioned automatic feeding device is as follows:

[0111] After the crystal pulling is completed, the single crystal silicon rod is transferred to the external trolley, and the external trolley moves to the external trolley parking area 25 so that the fork arm on the external trolley corresponds to the second fork arm accommodation position between the clamping assembly 41 and the conveying roller 12.

[0112] The fork arm on the external trolley is raised by the fork arm lifting mechanism (the height of the external trolley rising is higher than the top of the conveying roller 12, the first rotating roller 411, and the second rotating roller 412), and the fork arm moving mechanism on the external trolley is used to push the fork arm forward.

[0113] Then the external trolley descends. Since the fork arm on the external trolley is positioned relative to the second fork arm, the single crystal silicon rod on it will be supported by the conveying rollers 12 and the clamping assembly 41 when the fork arm on the external trolley descends, so that the single crystal silicon rod falls from the external trolley onto the conveying rollers 12, completing the transfer of the single crystal silicon rod.

[0114] The external trolley moves away from the loading area of the silicon ingot conveyor.

[0115] The lifting mechanism 3 drives the silicon rod crystal line adjustment mechanism 4 to rise, and the silicon rod crystal line adjustment mechanism 4 is used to adjust the crystal line of the single crystal silicon rod so that the position of the crystal line avoids the cutter head of the cutting machine.

[0116] After the silicon rod crystal wire is adjusted, the lifting mechanism 3 drives the silicon rod crystal wire adjustment mechanism 4 to descend, so that the single crystal silicon rod falls onto the conveying roller 12 of the silicon rod conveying mechanism 1 .

[0117] The single crystal silicon rod is conveyed to the cutting area by the conveying roller 12, completing the automatic loading of the single crystal silicon rod.

[0118] The specific embodiments of the present invention are described in detail below in conjunction with the cutting device according to the third aspect of the present invention.

[0119] It should be noted that the cutting device of the third aspect of the present invention is only a preferred embodiment of the present invention. The cutting device of the present invention can adopt the cutting device of the third aspect of the present invention or other structures. For the convenience of explanation, the cutting device of the third aspect of the present invention is explained in detail below.

[0120] This embodiment discloses a cutting device, including a cutting machine and a silicon rod conveying mechanism.

[0121] As an alternative embodiment, the cutting device includes a cutting machine and an automatic feeding device.

[0122] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications derived therefrom remain within the scope of protection of the present invention.

Claims

1. A silicon rod conveying mechanism, characterized in that: include: A mounting frame (14), wherein a plurality of extension plates (15) are spaced apart on the side walls of the mounting frame (14); A plurality of conveying rollers (12), the conveying rollers (12) being arranged along the extension plate (15) and rotatably disposed on the extension plate (15), with a fork arm receiving position adapted to an external trolley being formed between two adjacent conveying rollers (12); A conveying roller drive assembly is connected to one end of each conveying roller (12) close to the mounting frame (14).

2. The silicon rod conveying mechanism according to claim 1, characterized in that: At least two bearing seats (11) are provided at the top end of the extension plate (15), and the conveying roller (12) is rotatably provided on the bearing seats (11).

3. The silicon rod conveying mechanism according to claim 1, characterized in that: An annular groove is provided on the circumferential outer wall surface of the conveying roller (12).

4. The silicon rod conveying mechanism according to any one of claims 1 to 3, characterized in that: The conveyor roller drive assembly includes: A plurality of pairs of sprockets, each pair of sprockets being coaxially arranged on the conveying roller (12), and the sprockets of the conveying rollers (12) being connected in series via chains; A conveying roller driving motor (13), wherein the output shaft end of the conveying roller driving motor (13) is connected to one of the conveying rollers (12) via a linkage assembly.

5. The silicon rod conveying mechanism according to claim 4, characterized in that: The conveyor roller drive assembly further includes: A tensioning adjustment structure is provided, wherein the tensioning adjustment structure is suitable for fine-tuning the output end of the conveying roller driving motor (13).

6. An automatic feeding device, characterized in that: include: Support frame (2); The silicon rod conveying mechanism according to any one of claims 1 to 5, wherein the silicon rod conveying mechanism is arranged on the supporting frame (2); The external trolley includes a fork arm body, a fork arm lifting mechanism and a fork arm moving mechanism. The fork arm body includes at least two spaced apart forks, and the forks correspond to the fork arm accommodating positions. The external trolley is used to receive silicon rods and automatically place the silicon rods on the silicon rod conveying mechanism.

7. The automatic loading device according to claim 6, characterized in that: The support frame (2) comprises: vertical support (21); A plurality of horizontal supports (22) are provided with a spacing therebetween, wherein an external trolley parking area (25) is formed between two adjacent horizontal supports (22).

8. The automatic loading device according to claim 7, characterized in that: The two horizontal supports (22) forming the external trolley parking area (25) are respectively provided with external trolley limiting structures (24), and the limiting structures (24) are used to limit the distance between the external trolley and the vertical supports (21).

9. The automatic loading device according to claim 8, characterized in that: The external trolley limiting structure (24) comprises: A limiting tube (241), the limiting tube (241) being vertically arranged on a side surface of the horizontal support (22); An elastic layer is coated on the limiting tube (241).

10. The automatic loading device according to any one of claims 6 to 9, characterized in that: The support frame (2) is also provided with a silicon rod crystal line adjustment mechanism (4) for adjusting the position of the silicon rod crystal line.

11. The automatic loading device according to claim 10, characterized in that: The silicon rod crystal line adjustment mechanism (4) comprises: Bracket (49); At least two clamping assemblies (41), each of the clamping assemblies (41) having a clamping position (413) for supporting and clamping a single crystal silicon rod, each of the clamping assemblies (41) being arranged at intervals on the bracket (49), the clamping assemblies (41) and the conveying rollers (12) being arranged alternately at intervals, and a second fork arm accommodating position adapted to an external trolley is formed between adjacent clamping assemblies (41) and the conveying rollers (12); A clamping assembly driving mechanism is connected to each of the clamping assemblies (41) and is suitable for driving each of the clamping assemblies (41) to rotate synchronously.

12. The automatic loading device according to claim 10, characterized in that: The silicon rod crystal line adjustment mechanism (4) is arranged on the support frame (2) via a lifting mechanism (3).

13. The automatic loading device according to claim 12, characterized in that: The lifting mechanism (3) comprises: At least two racks (33), the racks (33) being vertically arranged on the silicon rod and crystal line adjustment mechanism (4); at least two rack drive assemblies, each of which is disposed on the support frame (2) and meshes with the rack (33); At least two linear guide rails (23), the linear guide rails (23) being arranged on the support frame (2) and slidingly assembled with the silicon rod and crystal line adjustment mechanism (4).

14. The automatic loading device according to claim 13, characterized in that: The rack drive assembly comprises: a lifting drive motor (31), the lifting drive motor (31) being laterally arranged on the supporting frame (2); A gear (32) is coaxially connected to one end of the lifting drive motor (31) extending from the support frame (2), and the gear (32) is meshed with the rack (33).

15. A cutting device, characterized in that: include: Cutting machine; The silicon rod conveying mechanism according to any one of claims 1 to 5, or the automatic loading device according to any one of claims 6 to 14.

Images