Novel thermal evaporation mechanism for vacuum coating machine

Abstract

The utility model discloses a novel thermal evaporation mechanism for a vacuum coating machine, which relates to the technical field of coating machine components and comprises a container, an opening is arranged at the upper end of the container, a sealing cover is arranged at the upper end of the container, an annular limiting part is fixedly mounted at the bottom of the sealing cover, and the annular limiting part is inserted into the container. A driving mechanism is arranged outside the container, the driving mechanism is connected with the connecting shaft and used for driving the annular supporting plate to turn over, a supporting plate is fixedly installed in the container, a storage groove is fixedly installed in the supporting plate, and a crucible is placed in the storage groove. In the coating process, the first motor drives the connecting shaft to rotate through the synchronous belt mechanism, the annular supporting plate and the substrate on the annular supporting plate rotate around the connecting shaft, and therefore the substrate is driven to be overturned, and it can be ensured that different areas of the substrate are evenly covered with evaporation materials by overturning the substrate.

Description

Technical Field

[0001] The utility model relates to the technical field of coating machine components, in particular to a novel thermal evaporation mechanism for a vacuum coating machine. Background Art

[0002] The thermal evaporation mechanism in a vacuum coating machine is a key device used to evaporate materials through heating in a vacuum environment, depositing them onto substrates to form thin films. The thermal evaporation mechanism primarily consists of an evaporation source, a heating system, a wire feed mechanism, a water-cooled baffle, and a control system. The evaporation source stores and heats the evaporated material, while the heating system provides the heat energy required for evaporation.

[0003] For example, the thermal evaporation mechanism of a vacuum coating machine, disclosed in the prior art as CN221094253U, specifically discloses a thermal evaporation assembly mounted on the vacuum coating machine; a support assembly is provided on the exterior of the thermal evaporation assembly to enhance stability; the support assembly includes a support plate, which is mounted on the bottom of the thermal evaporation assembly, with multiple retainers mounted on top of the support plate, each retainer having a fixed leaf disposed on top of the retainer, and two spaced-apart hinges disposed between the fixed leaf and the retainer. The present invention, through the arrangement of multiple retainers and fixed leaves on the support plate, can support and secure the evaporation assembly, preventing the evaporation assembly from being unstable, twisted, or collapsed due to uneven force.

[0004] The existing thermal evaporation mechanism is based on the principle of physical evaporation. By heating the evaporated material, the material atoms or molecules are deposited on the substrate surface in a vacuum environment to form a thin film. Since the substrate is in a fixed state in the container, the evaporated materials on the upper and lower sides of the substrate are unevenly deposited on the substrate surface. This uneven deposition phenomenon will lead to uneven film thickness, affecting the performance and appearance of the film. For this reason, we propose a new thermal evaporation mechanism for vacuum coating machines. Utility Model Content

[0005] In view of the deficiencies in the prior art, the present invention provides a novel thermal evaporation mechanism for a vacuum coating machine, which solves the problems raised by the above-mentioned background technology.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: a new type of thermal evaporation mechanism for a vacuum coating machine, comprising: a container, an opening at the upper end of the container, a sealing cover at the upper end of the container, an annular limiting portion fixedly installed at the bottom of the sealing cover, and the annular limiting portion is inserted into the container.

[0007] An annular support plate is provided in the container, and connecting shafts are fixedly installed on both sides of the annular support plate, and the connecting shaft is rotatably installed on the container. The annular support plate is made of iron, and a pressure plate is provided on the annular support plate. The pressure plate is annular, and an annular magnet is fixedly installed on the bottom of the pressure plate. The annular magnet is adsorbed on the annular support plate. A driving mechanism is provided outside the container, and the driving mechanism is connected to the connecting shaft and is used to drive the annular support plate to flip. A support plate is fixedly installed in the container, and a storage groove is fixedly installed on the support plate. A crucible is placed in the storage groove, and the outer edge of the crucible is supported on the storage groove. Heat-conducting oil is contained in the storage groove, and a heating wire is fixedly connected to the bottom of the crucible.

[0008] As a further technical solution of the present invention, a plurality of vertical shafts distributed in a circular array are rotatably installed on the outside of the container, and a pressure block is fixedly installed on the upper end of the vertical shaft. The pressure block is located at the upper end of the sealing cover and contacts the sealing cover.

[0009] As a further technical solution of the present invention, the driving mechanism includes a first motor, which is fixedly installed outside the container, and a synchronous belt mechanism is installed between the output shaft and the connecting shaft of the first motor.

[0010] As a further technical solution of the present invention, a mounting bracket is fixedly installed on the bottom of the container, and a plurality of threaded mounting holes are opened on the mounting bracket.

[0011] As a further technical solution of the present invention, a plurality of first rotating shafts distributed in a circular array are rotatably installed in the container, a plurality of blades distributed in a circular array are fixedly installed on the upper ends of the first rotating shafts, a second motor is fixedly installed at the bottom of the container, and the output shaft of the second motor extends into the storage slot.

[0012] As a further technical solution of the present invention, a center wheel is fixedly mounted on the output shaft of the second motor, an external gear is fixedly connected to the first rotating shaft, the external gears are engaged with the center wheel, a stirring member is provided in the storage tank, and the stirring member is fixedly connected to the output shaft of the second motor.

[0013] The utility model provides a new type of thermal evaporation mechanism for vacuum coating machines, which has the following advantages compared with the existing technology:

[0014] This design features a novel thermal evaporation mechanism for a vacuum coating machine. During the coating process, a first motor drives a connecting shaft via a synchronous belt mechanism. This causes the annular support plate and the substrate on it to rotate around the connecting shaft, thereby causing the substrate to flip. This ensures uniform coverage of the evaporated material across different areas of the substrate. This is particularly important for coating large areas, as flipping can avoid uneven film thickness caused by a fixed evaporation source.

[0015] 2. This design employs a novel thermal evaporation mechanism for vacuum coating machines. A second motor drives a stirring element, which mixes the thermal oil in the storage tank, evenly transferring its temperature to the crucible surface. This ensures uniform heating of the crucible and the coating material. This uniform heating results in a more stable evaporation rate during the evaporation process, thereby improving coating efficiency. The center wheel drives the outer gear, which rotates the blades and accelerates the flow of vapor within the container, ensuring uniform vapor distribution throughout the container and more even contact between the substrate and the vapor. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the structure of a thermal evaporation mechanism for a new vacuum coating machine;

[0017] Figure 2 A cross-sectional view of a new type of thermal evaporation mechanism for vacuum coating machines Figure 1 ;

[0018] Figure 3 A cross-sectional view of a new type of thermal evaporation mechanism for vacuum coating machines Figure 2 ;

[0019] Figure 4 A top view of the crucible of a thermal evaporation mechanism used in a new vacuum coating machine.

[0020] In the figure: container 1, sealing cover 2, annular limiting part 3, annular support plate 4, connecting shaft 5, pressing plate 6, annular magnet 7, support plate 8, crucible 9, storage tank 10, heating wire 11, vertical shaft 12, pressing block 13, first motor 14, synchronous belt mechanism 15, mounting frame 16, first rotating shaft 17, blades 18, second motor 19, center wheel 20, external gear 21, stirring member 22. DETAILED DESCRIPTION

[0021] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0022] See also Figure 1-4The utility model provides a technical solution for a thermal evaporation mechanism for a new vacuum coating machine: a thermal evaporation mechanism for a new vacuum coating machine, comprising: a container 1, an opening is set at the upper end of the container 1, a sealing cover 2 is set at the upper end of the container 1, an annular limiting portion 3 is fixedly installed at the bottom of the sealing cover 2, and the annular limiting portion 3 is inserted into the container 1. An annular support plate 4 is provided in the container 1. Connecting shafts 5 are fixedly mounted on both sides of the annular support plate 4. The connecting shafts 5 are rotatably mounted on the container 1. The annular support plate 4 is made of iron and is provided with a pressure plate 6. The pressure plate 6 is annular and has an annular magnet 7 fixedly mounted on the bottom of the pressure plate 6. The annular magnet 7 is adsorbed on the annular support plate 4. A driving mechanism is provided outside the container 1. The driving mechanism is connected to the connecting shaft 5 and is used to drive the annular support plate 4 to flip. A support plate 8 is fixedly mounted in the container 1. A storage tank 10 is fixedly mounted on the support plate 8. A crucible 9 is placed in the storage tank 10. The outer edge of the crucible 9 is supported on the storage tank 10. The storage tank 10 is filled with heat transfer oil. A heating wire 11 is fixedly connected to the bottom of the crucible 9. A plurality of vertical shafts 12 distributed in a circular array are rotatably mounted on the outside of the container 1. A pressure block 13 is fixedly mounted on the upper end of each vertical shaft 12. The pressure block 13 is located at the upper end of the sealing cover 2 and contacts the sealing cover 2. The drive mechanism includes a first motor 14, which is fixedly mounted outside the container 1. A synchronous belt mechanism 15 is installed between the output shaft of the first motor 14 and the connecting shaft 5. During the coating process, the first motor 14 drives the connecting shaft 5 to rotate via the synchronous belt mechanism 15. The annular support plate 4 and the substrate thereon rotate about the connecting shaft 5, thereby causing the substrate to flip. By flipping the substrate, the deposition material can be evenly covered on different areas of the substrate.

[0023] Among them, such as Figure 3 and Figure 4 As shown, a mounting bracket 16 is fixedly mounted on the bottom of the container 1, and the mounting bracket 16 has multiple threaded mounting holes. Multiple first rotating shafts 17 are rotatably mounted in a circumferential array within the container 1. Each of the first rotating shafts 17 has a plurality of blades 18 fixedly mounted on its upper end. A second motor 19 is fixedly mounted on the bottom of the container 1, and the output shaft of the second motor 19 extends into the storage tank 10. A central gear 20 is fixedly mounted on the output shaft of the second motor 19. External gears 21 are fixedly connected to the first rotating shafts 17, and each of the external gears 21 meshes with the central gear 20. A stirring member 22 is disposed within the storage tank 10 and is fixedly connected to the output shaft of the second motor 19. The stirring member 22 is driven by the second motor 19 to rotate, mixing the heat transfer oil within the storage tank 10, causing the heat transfer oil to uniformly transfer its temperature to the surface of the crucible 9. This ensures uniform heating of the crucible 9 and the coating material. This uniform heating of the coating material results in a more stable evaporation rate during the evaporation process, thereby improving coating efficiency. The outer gear 21 is driven to rotate by the central wheel 20, and the blades 18 rotate and accelerate the flow of the vapor in the container 1, so that the vapor is evenly filled in the container 1, and the contact between the substrate and the vapor is more uniform.

[0024] The working principle of the present utility model is as follows: open the sealing cover 2 and place the substrate on the annular support plate 4, fix the substrate by the pressing plate 6 and the annular magnet 7 is adsorbed on the annular support plate 4, the coating material is placed in the crucible 9, and the oil in the crucible 9 and the storage tank 10 is heated by the heating wire 11. When the coating material is heated to a sufficiently high temperature, its atoms or molecules obtain enough energy to escape from the surface and form vapor. During the coating process, the first motor 14 drives the connecting shaft 5 to rotate through the synchronous belt mechanism 15, and the annular support plate 4 and the substrate thereon rotate around the connecting shaft 5, thereby driving the substrate to flip. By flipping the substrate, it can be ensured that the evaporated material is evenly covered on different areas of the substrate. This is especially important for large-area coating, because flipping can avoid the problem of uneven film thickness caused by the fixed position of the evaporation source.

[0025] The second motor 19 drives the agitator 22 to rotate, mixing the thermal oil in the storage tank 10 and evenly transferring its temperature to the surface of the crucible 9. This ensures uniform heating of the crucible 9 and the coating material. This uniform heating of the coating material results in a more stable evaporation rate during the evaporation process, thereby improving coating efficiency. The center gear 20 drives the outer gear 21 to rotate, rotating the blades 18 and accelerating the flow of vapor within the container 1, ensuring that the vapor evenly fills the container 1 and provides more uniform contact between the substrate and the vapor.

[0026] The above description is merely a preferred embodiment of the present invention. It should be noted that those skilled in the art may make various improvements and modifications without departing from the principles of the present invention, and such improvements and modifications should be considered within the scope of protection of the present invention. Structures, devices, and operating methods not specifically described or explained in this invention shall, unless otherwise specified or limited, be implemented in accordance with conventional means in the art.

Claims

1. A new type of thermal evaporation mechanism for vacuum coating machine, characterized in that: include: A container (1), wherein the upper end of the container (1) is open, a sealing cover (2) is provided at the upper end of the container (1), an annular limiting portion (3) is fixedly mounted on the bottom of the sealing cover (2), and the annular limiting portion (3) is inserted into the container (1); An annular support plate (4) is provided in the container (1), and connecting shafts (5) are fixedly installed on both sides of the annular support plate (4). The connecting shafts (5) are rotatably installed on the container (1). The annular support plate (4) is made of iron. A pressure plate (6) is provided on the annular support plate (4). The pressure plate (6) is annular. An annular magnet (7) is fixedly installed on the bottom of the pressure plate (6). The annular magnet (7) is adsorbed on the annular support plate (4). The container (1) is externally provided with A driving mechanism is provided, the driving mechanism is connected to the connecting shaft (5) and is used to drive the annular support plate (4) to flip, a support plate (8) is fixedly installed in the container (1), a storage groove (10) is fixedly installed on the support plate (8), a crucible (9) is placed in the storage groove (10), the outer edge of the crucible (9) is supported on the storage groove (10), the storage groove (10) is filled with heat transfer oil, and a heating wire (11) is fixedly connected to the bottom of the crucible (9).

2. The thermal evaporation mechanism for a new vacuum coating machine according to claim 1, characterized in that: A plurality of vertical shafts (12) distributed in a circumferential array are rotatably mounted on the outside of the container (1), and a pressing block (13) is fixedly mounted on the upper end of each vertical shaft (12). The pressing block (13) is located at the upper end of the sealing cover (2) and contacts the sealing cover (2).

3. The thermal evaporation mechanism for a new vacuum coating machine according to claim 2, characterized in that: The driving mechanism comprises a first motor (14), the first motor (14) being fixedly mounted outside the container (1), and a synchronous belt mechanism (15) being mounted between an output shaft of the first motor (14) and a connecting shaft (5).

4. The novel thermal evaporation mechanism for vacuum coating machine according to claim 3, characterized in that: A mounting frame (16) is fixedly mounted on the bottom of the container (1), and a plurality of threaded mounting holes are provided on the mounting frame (16).

5. The novel thermal evaporation mechanism for vacuum coating machine according to claim 4, characterized in that: A plurality of first rotating shafts (17) distributed in a circumferential array are rotatably mounted in the container (1); a plurality of blades (18) distributed in a circumferential array are fixedly mounted on the upper ends of the first rotating shafts (17); a second motor (19) is fixedly mounted on the bottom of the container (1); and an output shaft of the second motor (19) extends into the storage tank (10).

6. The novel thermal evaporation mechanism for vacuum coating machine according to claim 5, characterized in that: A central wheel (20) is fixedly mounted on the output shaft of the second motor (19), an external gear (21) is fixedly connected to the first rotating shaft (17), and the external gears (21) are meshed with the central wheel (20). A stirring member (22) is provided in the storage tank (10), and the stirring member (22) is fixedly connected to the output shaft of the second motor (19).

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