Large dynamic range radiation temperature measurement system with dodging function

Abstract

The utility model particularly relates to a large dynamic range radiation temperature measurement system with a dodging function, which is used for solving the problem that due to the characteristic of point-to-point imaging in temperature measurement light spots corresponding to sub-beams densely arranged in the space of an optical fiber bundle receiving end, when local positions in the temperature measurement light spots change in the technical process, individual sub-beams are influenced, and the temperature measurement accuracy is influenced. In the prior art, the single-color temperature reading of a detection signal of a corresponding branch or the colorimetric temperature calculation with other sub-light beam signals is far deviated from a real value, so that the anti-interference capability is reduced, and the large dynamic range or colorimetric temperature measurement cannot be realized. The device comprises an optical module, an acquisition module and a calculation module which are connected in sequence, the optical module distributes signal light emitted by the same temperature measurement light spot to multiple paths of photoelectric detectors with different gains or different working wavebands in the acquisition module by using a light splitting technology, so that the dynamic range of measurement is effectively expanded, and the actual technical requirements of the radiation thermodetector in a larger range are met.

Description

Technical Field

[0001] The utility model relates to a radiation temperature measurement system, in particular to a large dynamic range radiation temperature measurement system with a light homogenization function. Background Art

[0002] Radiation temperature measurement is a non-contact method that uses infrared radiation emitted by an object to measure its temperature. Because it doesn't require contact with the object being measured, radiation temperature measurement offers significant advantages in high-temperature, moving, or difficult-to-reach environments. Its high speed and precision have led to its widespread application in industrial manufacturing, particularly semiconductor processing.

[0003] In semiconductor manufacturing, precise temperature control is crucial to ensuring product quality. Traditional contact temperature measurement methods are susceptible to the effects of the process environment and are slow, making them difficult to meet the requirements for high-precision and high-speed temperature measurement. In contrast, radiation temperature measurement technology measures temperature by receiving infrared radiation emitted by the surface of an object, enabling fast and accurate temperature detection.

[0004] However, radiation temperature measurement faces several technical challenges in its application. First, when shorter wavelengths are used for temperature measurement, the dynamic range of the signal light energy is extremely large. The dynamic range of traditional detectors (typically thousands to tens of thousands of times greater) falls far short of the required temperature measurement range. Second, radiation temperature measurement relies on the strength of the received radiation signal to obtain temperature data, making it susceptible to interference from factors such as dust, dirt, and obstructions in the optical path. To eliminate these interfering factors, the industry typically uses the ratio of the signal intensities of two different wavelengths to determine temperature, a method known as colorimetric temperature measurement.

[0005] In practical applications, to achieve temperature measurement with a wide temperature range and colorimetric anti-interference capabilities, it is often necessary to split the signal light emitted by a single spot to be measured into multiple photodetectors with different gains or operating bands. Fiber optic bundle splitting offers significant advantages due to its ease of mechanical arrangement and compact footprint.

[0006] However, due to the point-to-point imaging characteristics of the temperature measurement spot within the densely spaced sub-beams at the receiving end of the fiber bundle, if the local position within the temperature measurement spot changes during the process (such as crystal growth gradually inward from the outer circle of the spot field during crystal growth, or dirt and obstruction in a certain part of the optical path), individual sub-beams will be affected. If the detection signals of these affected branches are used for monochromatic temperature readings or colorimetric temperature calculations with other sub-beam signals, they will deviate significantly from the true value, resulting in a decrease in anti-interference ability and failure to achieve the design goals of large dynamic range or colorimetric temperature measurement. Utility Model Content

[0007] The purpose of the utility model is to solve the problem that due to the point-to-point imaging characteristics of each sub-beam corresponding to the temperature measurement spot that is densely arranged in space at the receiving end of the optical fiber bundle, when the local position in the temperature measurement spot changes during the process, individual sub-beams will be affected, and the detection signal of the corresponding branch will be used for monochromatic temperature reading or colorimetric temperature calculation with other sub-beam signals, which will deviate far from the true value, resulting in a decrease in anti-interference ability and the inability to achieve a large dynamic range or colorimetric temperature measurement. The utility model provides a large dynamic range radiation temperature measurement system with a uniform light function.

[0008] In order to solve the deficiencies of the above-mentioned prior art, the present invention provides the following technical solutions:

[0009] A large dynamic range radiation temperature measurement system with a uniform light function is special in that it comprises an optical module, an acquisition module and a calculation module connected in sequence;

[0010] The optical module includes an optical lens, a light guide element, and a light splitting unit connected to the light guide element, which are sequentially arranged along the optical path. The optical lens is used to focus the optical signal radiated by the target object onto the input end of the light guide element. The two ends of the light splitting unit are respectively a common end and a branch end. The common end is coupled to the output end of the light guide element. The branch end is composed of n optical fiber bundles, where n is greater than or equal to 3, and each optical fiber bundle includes at least one optical fiber.

[0011] The acquisition module includes n photoelectric detectors corresponding to n optical fiber bundles, and the input end of each photoelectric detector is connected to the output end of the corresponding optical fiber bundle, and is used to collect the optical signal output by the corresponding optical fiber bundle and convert it into an electrical signal to input into the calculation module;

[0012] The calculation module is used to calculate the temperature value of the target object through the electrical signals of n photoelectric detectors.

[0013] Furthermore, the invention also includes a filter element arranged at the input end of each photodetector.

[0014] Furthermore, each of the filter elements has the same operating wavelength range.

[0015] Furthermore, the operating wavelength range of at least one of the filter elements is different from the operating wavelength ranges of the other filter elements, and at least two filter elements are in the same wavelength range.

[0016] Furthermore, the light guiding element is an optical fiber or a light guiding column.

[0017] Compared with the prior art, the beneficial effects of the present invention are:

[0018] The utility model discloses a large dynamic range radiation temperature measurement system with a homogenizing function. By using spectroscopic technology, the signal light emitted by the same temperature measurement spot is distributed to multiple photoelectric detectors with different gains (Example 1) or different working bands, thereby effectively expanding the dynamic range of measurement and meeting the actual technical requirements of radiation thermometers within a wider range. In addition, the utility model is also provided with a light guide element. The light signal focused by the optical lens enters the light guide element and is reflected multiple times inside, so that the entering light signal is homogenized (homogenized), which can eliminate the influence of local intensity changes in the light spot, ensure signal uniformity, and reduce measurement errors. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a structural diagram of a first embodiment of a large dynamic range radiation temperature measurement system with a uniform light function according to the present invention.

[0020] The reference numerals are explained as follows: 1-optical lens; 2-light guiding element; 3-spectroscopy unit, 301-optical fiber bundle; 4-collection module, 401-photodetector. DETAILED DESCRIPTION

[0021] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0022] Example 1

[0023] Reference Figure 1 A large dynamic range radiation temperature measurement system with a uniform light function includes an optical module, an acquisition module 4 and a calculation module connected in sequence.

[0024] The optical module includes an optical lens 1, a light guide element 2 and a light splitting unit 3 which are sequentially arranged along the optical path.

[0025] The optical lens 1 is used to focus the light signal radiated by the target object to the input end of the light guide element 2, and adopts a lens with a focal length of 50 mm and an aperture of 24 mm.

[0026] Light guide element 2 utilizes a large-core optical fiber. Multiple reflections within the light guide element evenly distribute the light signal, eliminating errors in individual detectors caused by local variations in the target surface (such as growth variations during crystal growth or contamination along the optical path). Even if local variations within the temperature measurement spot occur, they only affect the average level of overall intensity and have no significant impact on the measurement results of individual detectors.

[0027] The two ends of the optical splitting unit 3 are respectively a common end and a branch end. The common end is coupled to the output end of the light-guiding element 2, and the branch end is composed of n optical fiber bundles 301, n = 3, and the three optical fiber bundles 301 are respectively composed of 1 optical fiber, 5 optical fibers and 13 optical fibers, and the diameter of each optical fiber is 125 μm; the optical splitting unit 3 distributes the homogenized optical signal to the three optical fiber bundles 301 in a ratio of 1:5:13, so that optical signals of different intensities can be transmitted to different photodetectors 401 to achieve full range coverage.

[0028] The acquisition module 4 includes n photodetectors 401, all of which are photodetectors 401 with a filter of 920±30nm; the input ends of the three photodetectors 401 are respectively connected to the output ends of the three optical fiber bundles 301, for collecting the optical signals output by the corresponding optical fiber bundles 301 and converting them into electrical signals for input into the calculation module.

[0029] The calculation module comprehensively processes the signals of the three detectors and uses the colorimetric temperature measurement principle to further eliminate the interference caused by local changes and obtain the accurate temperature value of the target object.

[0030] This embodiment covers the full energy dynamic range by distributing the energy of the three detectors in a ratio of 1:5:13. At the same time, uniform light is used to avoid the different effects of local changes in the temperature measurement spot on the three detection signals, thereby improving the anti-interference capability.

[0031] Example 2

[0032] The optical lens 1 is a lens with a focal length of 70 mm and an aperture of 24 mm.

[0033] The branch end of the light splitting unit 3 is composed of n optical fiber bundles 301, where n=4. The four optical fiber bundles 301 are respectively composed of 10 optical fibers, 490 optical fibers, 10 optical fibers, and 490 optical fibers.

[0034] The acquisition module 4 includes n photodetectors 401, which are divided into two groups of photodetectors 401, each group of photodetectors 401 includes a 920±30nm filtered photodetector 401 and a 1550nm±30 filtered photodetector 401; the two 920±30nm filtered photodetectors 401 are respectively connected to the output ends of the fiber bundle 301 composed of 10 optical fibers and the fiber bundle 301 composed of 490 optical fibers, and the two 1550nm±30 filtered photodetectors 401 are respectively connected to the output ends of the fiber bundle 301 composed of 10 optical fibers and the fiber bundle 301 composed of 490 optical fibers.

[0035] The rest of the settings are the same as those in the first embodiment.

[0036] This embodiment uses a 4011:49 energy distribution between two groups of photoelectric detectors to expand the energy dynamic range of the full range of 920nm and 1550nm wavelengths and realize the colorimetric function. At the same time, uniform light is used to avoid the different effects of local changes in the temperature measurement spot on the colorimetric detection signal, thereby improving the anti-interference ability.

[0037] Example 3

[0038] The optical lens 1 is a lens with a focal length of 70 mm and an aperture of 20 mm.

[0039] The light guide element 2 is a sapphire light guide rod.

[0040] The branch end of the light splitting unit 3 is composed of n optical fiber bundles 301, where n=4. The four optical fiber bundles 301 are respectively composed of 10 optical fibers, 10 optical fibers, 10 optical fibers and 970 optical fibers. The diameter of each optical fiber is 9 μm.

[0041] The acquisition module 4 includes n photodetectors 401, including one photodetector 401 with a 1550±30 nm filter, one photodetector 401 with a 920nm±30 filter, and two photodetectors 401 with a 750nm±30 filter. These are connected to the output ends of a fiber bundle 301 consisting of 10 optical fibers, a fiber bundle 301 consisting of 10 optical fibers, a fiber bundle 301 consisting of 10 optical fibers, and a fiber bundle 301 consisting of 970 optical fibers, respectively. Photodetectors 401 with shorter wavelengths (e.g., 750nm and 920nm) are more sensitive to high temperatures, while photodetectors 401 with longer wavelengths (e.g., 1550nm) are more sensitive to low temperatures.

[0042] The rest of the settings are the same as those in the first embodiment.

Claims

1. A wide dynamic range radiation temperature measurement system with a uniform light function, characterized by: It includes an optical module, a collection module (4) and a calculation module connected in sequence; The optical module comprises an optical lens (1), a light guide element (2), and a light splitting unit (3) connected to the light guide element (2) arranged in sequence along an optical path; the optical lens (1) is used to focus a light signal radiated by a target object onto an input end of the light guide element (2); the light splitting unit (3) has a common end and a branch end at both ends, the common end being coupled to the output end of the light guide element (2); the branch end is composed of n optical fiber bundles (301), where n is greater than or equal to 3, and each optical fiber bundle (301) comprises at least one optical fiber; The acquisition module (4) comprises n photoelectric detectors (401) corresponding one-to-one to the n optical fiber bundles (301), the input end of each photoelectric detector (401) being connected to the output end of the corresponding optical fiber bundle (301) and being used for acquiring the optical signal output by the corresponding optical fiber bundle (301) and converting it into an electrical signal to be input into the calculation module; The calculation module is used to calculate the temperature value of the target object through the electrical signals of n photoelectric detectors (401).

2. The wide dynamic range radiation temperature measurement system with light homogenization function according to claim 1, characterized in that: It also includes a filter element arranged at the input end of each photodetector (401).

3. The wide dynamic range radiation temperature measurement system with light homogenization function according to claim 2, characterized in that: The operating wavelength range of each filter element is the same.

4. The wide dynamic range radiation temperature measurement system with light homogenization function according to claim 2, characterized in that: The operating wavelength range of at least one of the filter elements is different from the operating wavelength ranges of the other filter elements, and at least two filter elements are in the same wavelength range.

5. A wide dynamic range radiation temperature measurement system with a uniform light function according to any one of claims 1 to 4, characterized in that: The light guide element (2) adopts an optical fiber or a light guide column.

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