Galvanometer and laser radar
By setting up the connecting beam on the MEMS galvano mirror module and enhancing its deformation ability, the fatigue and breakage problem of the torsion shaft during rapid swing or large angle swing is solved, and the reliability and service life of the galvano mirror are improved.
Patent Information
- Application Number
- CN202421521216.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-28
- Publication Date
- 2025-08-05
- Estimated Expiration
- 2034-06-28
AI Technical Summary
When the MEMS galvanometer swings quickly or swings at a large angle, the torsional shaft is prone to fatigue and breakage, and the prior art is difficult to effectively alleviate the problem of stress concentration.
A connecting beam is provided on the mirror module, and a partial force is transmitted through the connecting beam to reduce the stress of the torsional shaft. The connecting beam is designed as a hollow structure to enhance deformation ability and reduce the risk of fatigue and fracture of the torsional shaft.
Through the design of the connecting beam, the stress concentration of the torsion shaft is reduced, the fatigue and fracture risk of the torsion shaft is reduced, and the reliability and service life of the galvanometer are improved.
Smart Images
Figure CN223193118U_ABST
Abstract
Description
Technical Field
[0001] The embodiments of the present application relate to the technical field of MEMS devices, and in particular to a galvanometer and a lidar. Background Technique
[0002] A lidar is a radar system that detects the position, speed, and other characteristic quantities of a target by emitting laser beams. In related technologies, a lidar with a scanning function includes a housing, a transmitting module, a receiving module, and a scanning module. Among them, the transmitting module is used to emit detection light to detect a target object, and the receiving module is used to receive the reflected light formed by the target object reflecting the detection light. The scanning module is disposed on the optical path of the detection light and the reflected light. It is used to receive the detection light emitted by the transmitting module and deflect it outside the lidar, and then form a specific detection field outside the lidar to detect the target object. In addition, the scanning module is also used to receive the reflected light reflected by the target object and deflect it towards the receiving module so that the receiving module can receive the reflected light. Currently, in related technologies, a galvanometer, such as a Micro-Electro-Mechanical System (MEMS) galvanometer, is used as the scanning module. The galvanometer includes a movable mirror module, and the mirror module can swing in one direction or two directions under the action of a driving force, so that the detection light exits at different angles via the mirror module at different times, and thus the detection light can form the above-mentioned detection field outside the lidar.
[0003] Currently, the MEMS galvanometer includes a base, a swingable mirror module, and a torsion shaft. A through groove is formed in the middle of the base. The mirror module is disposed in the through groove and is connected to the base through the torsion shaft, so that the mirror module can swing relative to the base to achieve the above functions. Utility Model Content
[0004] In related technologies, the galvanometer is provided with a base, a mirror module, and a torsion shaft. The torsion shaft is connected to both sides of the mirror module and is connected to the base, so that the mirror module can swing relative to the base around the axis of the torsion shaft. When the mirror module swings rapidly or swings at a large angle, the torsion shaft will be subjected to a large stress, so it is easy to fatigue and break.
[0005] The embodiments of the present application provide a galvanometer and a lidar, which can improve the current situation that when the mirror module swings rapidly or swings at a large angle, the torsion shaft will be subjected to a large stress and is thus prone to fatigue fracture.
[0006] Wherein, the galvanometer includes a base, a reflector module and two first torsion axes. The base is provided with a first through-groove running through along the first direction. The reflector module is arranged in the first through-groove for reflecting a light beam, and at least one end of the reflector module along the second direction is provided with a first groove, and the first groove extends along the third direction so that the reflector module forms a first connecting beam between the first groove and the groove wall of the first through-groove, and the second direction and the third direction are both perpendicular to the first direction, and the third direction intersects with the second direction. Along the second direction, the two first torsion axes are respectively arranged on both sides of the reflector module, one end of the first torsion axis is connected to the reflector module, and the other end extends along the first direction to be connected to the base. Wherein, the first torsion axis located between the first connecting beam and the base along the second direction is connected to the first connecting beam.
[0007] Optionally, the reflector module is not provided with other structures on a side of the first connecting beam facing the corresponding first torsion axis.
[0008] Optionally, the reflector module is provided with a first extension portion on a side of the first connecting beam away from the corresponding first groove, a second groove is formed between the first extension portion and the first connecting beam, and the first extension portion is provided with a first connecting groove for the first torsion axis to pass through.
[0009] The reflector module is provided with a first groove at both ends along the second direction, so as to form a first connecting beam at both ends along the second direction of the reflector module. Each first torsion axis is connected to a corresponding first connecting beam.
[0010] Optionally, the first connecting beam has a first surface and a second surface arranged opposite to each other along the first direction, the first surface and a surface of the reflector module for reflecting the light beam being located on the same side of the base, and one of the first surface and the second surface is provided with a plurality of first grooves spaced apart along the third direction.
[0011] Optionally, the first surface is provided with the first groove, and the second surface is provided with a plurality of second grooves spaced apart along the third direction.
[0012] Optionally, the projections of the first groove and the second groove along the first direction are alternately arranged, and the projection of a first groove along the first direction is completely staggered with the projection of an adjacent second groove along the first direction.
[0013] Optionally, the galvanometer is a two-dimensional galvanometer, and the mirror module includes an inner frame, a mirror, and two second torsion shafts. The inner frame is disposed between the two first torsion shafts and is respectively connected to the two first torsion shafts. The inner frame is provided with a second through groove penetrating along the first direction, and the first connecting beam is disposed on the inner frame. The mirror is disposed in the second through groove and is used for reflecting a light beam. The two second torsion shafts are disposed in the second through groove. Along the fourth direction, the two second torsion shafts are respectively disposed on both sides of the mirror. One end of the second torsion shaft is connected to the mirror, and the other end extends along the fourth direction to be connected to the inner frame. The first direction, the second direction, and the fourth direction are perpendicular to each other in pairs.
[0014] Optionally, at least one end of the mirror in the fourth direction is provided with a third groove, and the third groove extends along the fifth direction, so that the mirror forms a second connecting beam located between the third groove and the groove wall of the second through groove. The fifth direction is perpendicular to the first direction and intersects with the fourth direction. The second torsion shaft located between the second connecting beam and the inner frame along the fourth direction is connected to the second connecting beam.
[0015] Optionally, the base includes a base body and a third connecting beam. The base body is provided with the first through groove, and the third connecting beam is disposed in the first through groove. Both ends of the third connecting beam are respectively connected to the base body and divide the first through groove into a first sub-through groove and a second sub-through groove arranged along the second direction. The mirror module is disposed in the first sub-through groove, and the first torsion shaft located between the mirror module and the third connecting beam along the second direction is connected to the third connecting beam.
[0016] Based on the above structure, the galvanometer provided in the present application is provided with a first connecting beam in the mirror module, so that the first connecting beam arranged along the third direction is connected to the first torsion shaft extending along the second direction. Thus, when the mirror module swings rapidly or swings at a large angle, the first torsion shaft is torsionally deformed under force, and part of the force is transmitted to the first connecting beam. The first connecting beam is deformed under force and transmits the remaining force to the mirror module. Thereby reducing the force received by the first torsion shaft to reduce fatigue brittle fracture of the first torsion shaft.
[0017] For the aforementioned lidar, the lidar includes a housing, a transmitting module, a receiving module, and the aforementioned galvanometer. The transmitting module is housed in the housing and is configured to emit detection light for detecting a target object. The receiving module is housed in the housing and is configured to receive the reflected light formed by the detection light reflected by the target object. The galvanometer is configured to receive the detection light and deflect it so that the detection light exits the lidar, and is also configured to receive the reflected light so that the reflected light is directed towards the receiving module.
[0018] Based on the above structure, since the galvanometer can relieve the stress concentration phenomenon on the first torsion shaft, thereby reducing the phenomenon of fatigue fracture of the first torsion shaft, the lidar provided in this application can also solve the above technical problems. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required to be used in the embodiments of the present application. Obviously, the following described drawings are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.
[0020] Figure 1 is a schematic diagram of a galvanometer provided in one embodiment of the present application;
[0021] Figure 2 is of the present application Figure 1 is a schematic cross-sectional view of surface A;
[0022] Figure 3 is of the present application Figure 1 is a schematic cross-sectional view of surface B;
[0023] Figure 4 is a schematic diagram of a partial structure of a galvanometer provided in one embodiment of the present application;
[0024] Figure 5 is a schematic diagram of a galvanometer provided in another embodiment of the present application;
[0025] Figure 6 is of the present application Figure 5 is a schematic cross-sectional view of surface C;
[0026] Figure 7 is of the present application Figure 1 is a schematic cross-sectional view of surface D;
[0027] Figure 8 is a schematic diagram of a partial structure of a galvanometer provided in another embodiment of the present application;
[0028] Figure 9 is a schematic diagram of a galvanometer provided in another embodiment of the present application.
[0029] The attached drawing reference numerals are as follows:
[0030]
[0031] Detailed implementation manners
[0032] For the convenience of understanding the present application, the present application will be described in more detail below in conjunction with the attached drawings and specific embodiments. It should be noted that when an element is described as "fixed to" another element, it can be directly on the other element, or there can be one or more intermediate elements therebetween. When an element is described as "connected to" another element, it can be directly connected to the other element, or there can be one or more intermediate elements therebetween. The terms "vertical", "horizontal", "left", "right" and similar expressions used in this specification are only for the purpose of illustration.
[0033] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by those skilled in the technical field to which this application belongs. The terms used in this specification in the description of this application are only for the purpose of describing specific embodiments and are not used to limit this application. The term "and / or" used in this specification includes any and all combinations of one or more of the related listed items.
[0034] In the related art, a galvanometer is provided with a base, a mirror module and a torsion shaft. The torsion shaft is connected to both sides of the mirror module, and the torsion shaft is connected to the base, so that the mirror module can swing relative to the base around the axis of the torsion shaft. When the mirror module swings rapidly or swings at a large angle, the torsion shaft will be subjected to a large stress, so it is easy to fatigue and break.
[0035] Based on this, the present application provides a galvanometer 1000. Please refer to Figure 1, which shows a schematic diagram of a galvanometer 1000 provided in one embodiment of the present application. The galvanometer 1000 includes a base 100, a mirror module 200, and two first torsion shafts 300. The base 100 is provided with a first through groove 110 penetrating along a first direction F1. The mirror module 200 is disposed in the first through groove 110 for reflecting a light beam. At least one end of the mirror module 200 along a second direction F2 is provided with a first groove 210, and the first groove 210 extends along a third direction F3, so that the mirror module 200 forms a first connecting beam 220 located between the first groove 210 and the groove wall of the first through groove 110; wherein, both the second direction F2 and the third direction F3 are perpendicular to the first direction F1, and the third direction F3 intersects the second direction F2. Along the second direction F2, the two first torsion shafts 300 are respectively disposed on both sides of the mirror module 200. One end of the first torsion shaft 300 is connected to the mirror module 200, and the other end extends along the first direction Fl to be connected to the base 100. Among them, the first torsion shaft 300 located between the first connecting beam 220 and the base 100 along the second direction F2 is connected to the first connecting beam 220.
[0036] The following will specifically describe the specific structures of the above-mentioned base 100, mirror module 200, and first torsion shaft 300 in conjunction with each drawing.
[0037] For the above-mentioned base 100, the base 100 has an overall thin sheet-like structure, which serves as a setting base structure for the remaining structures in the galvanometer 1000, and is provided with a first through groove 110 penetrating along the illustrated first direction F1; the above-mentioned mirror module 200 is disposed in the first through groove 110. Among them, the first direction F1 is the thickness direction of the base 100.
[0038] For the above-mentioned mirror module 200, it is a structure in the galvanometer 1000 for reflecting detection light and return light. The mirror module 200 has a thin sheet-like structure, and a reflection material layer is provided on one surface of the mirror module 200 as a whole or partially, so as to realize the reflection of detection light and return light. It is worth mentioning that the inner contour of the first through groove 110 can be substantially similar to the outer contour of the mirror module 200, so that the first through groove 110 can surround the mirror module 200 with a smaller aperture, thereby increasing the area of the mirror module 200 and increasing the area where the galvanometer 1000 can reflect light beams.
[0039] Please refer to Figure 2 , which shows the present application Figure 1Schematic cross-sectional view of the A side. Considering that only the first connecting beam 220 is set to be suspended relative to the mirror module 200, the first connecting beam 220 still has relatively high rigidity, and its effect on relieving the stress on the first torsion shaft 300 is limited. In this application, the structure of the first connecting beam 220 is further improved to further strengthen the above effect. Specifically, the first connecting beam 220 has a first surface 221 and a second surface 222 arranged oppositely along the first direction F1. The first surface 221 and the surface of the mirror module 200 for reflecting the light beam are on the same side of the base 100. The first surface 221 is provided with a plurality of first grooves 2211 arranged at intervals along the third direction F3. In this embodiment, the third direction F3 is perpendicular to the above-mentioned first direction F1 and the second direction F2 respectively. Of course, in other embodiments, the third direction F3 may also have a non-90-degree angle with the second direction F2. It should be noted that in this application, "the first surface 221 and the surface of the mirror module 200 for reflecting the light beam are on the same side of the base 100" means that when the galvanometer 1000 is in a non-working state, the surface of the mirror module 200 for reflecting the light beam and the first surface 221 are on the same side of the base 100. In this application, by providing the first grooves 2211 on the first surface 221, the deformation ability of the first connecting beam 220 is further increased, thereby improving the stress-bearing ability of the first connecting beam 220. Since the middle part of the first connecting beam 220 is connected to the first torsion shaft 300, no first grooves 2211 are provided in the middle part of the first connecting beam 22, so as to improve the connection strength between the first connecting beam 220 and the first torsion shaft 300 and prevent fatigue fracture at the connection between the first connecting beam 220 and the first torsion shaft 300. It can be understood that even though this embodiment is described by taking the example of providing the first grooves 2211 on the first surface 221, this application is not limited thereto. In other embodiments of this application, the first grooves 2211 may not be provided on the first surface 221, but the first grooves 2211 may be provided on the second surface 222.
[0040] Please refer to Figure 2 , to further strengthen the ability of the first connecting beam 220 to relieve the stress of the first torsion shaft, in this embodiment, the second surface 222 of the first connecting beam 220 is provided with a plurality of second grooves 2221 arranged at intervals along the above-mentioned third direction F3. In this way, by adding the second grooves 2221, the deformation ability of the first connecting beam 220 can be further improved, thereby further reducing the risk of fatigue fracture of the first torsion shaft 300 due to excessive stress.
[0041] In some embodiments, the projections of the first groove 2211 and the second groove 2221 along the first direction F1 are alternately arranged; for example, the projection of the first groove 2211 along the first direction F1 is completely staggered from the projection of the adjacent second groove 2221 along the first direction F1. This setting aims to achieve grooving on both sides of the first connecting beam 220 to improve the deformation ability, while avoiding excessive removal of materials at the same part of the first connecting beam 220, so as to prevent possible fracture due to too low strength at this place. In some embodiments, along the first direction F1, the sum of the depths of the first groove 2211 and the second groove 2221 is less than the thickness of the first connecting beam 220, so that there is still a material layer between the first groove 2211 and the second groove 2221 in the first connecting beam 220, ensuring the reliability of the self-strength of the first connecting beam 220.
[0042] For the above-mentioned first torsion shaft 300, the first torsion shaft 300 is also arranged in the first through groove 110, and it is the key component for the mirror module 200 to achieve swinging motion. The first torsion shaft 300 extends along the second direction F2, one end of which is connected to the mirror module 200, and the other end extends along the second direction F2 away from the mirror module 200 to be connected to the base 100. The two first torsion shafts 300 are arranged on both sides of the mirror module 200 along the second direction F2 and are collinear; since the first torsion shaft 300 is an elongated component, it can twist or reset around its own axis, so that the mirror module 200 can swing with the first torsion shaft 300 as the rotation axis. At least one first torsion shaft 300 is located between the base 100 and the above-mentioned first connecting beam 220, one end of the first torsion shaft 300 is connected to the base 100, and the other end is connected to the first connecting beam 220.
[0043] In order to balance the forces on the two first torsion shafts 300 on both sides of the mirror module 200 during deflection, a first groove 210 is provided at each end of the mirror module 200 along the second direction F2 to form a first connecting beam 220 at each end of the mirror module 20, along the second direction F2. Each first torsion shaft 300 is correspondingly connected to a first connecting beam 220. In other words, a first connecting beam 220, a first groove 210, the mirror module 200, another first groove 210 and another first connecting beam 220 are arranged in sequence along the second direction F2. Among them, the two first connecting beams 220 on both sides are respectively correspondingly connected to a first torsion shaft 300. By setting the connection structures of the two groups of first torsion shafts 300 and first connecting beams 220, it can be ensured that the two first torsion shafts 300 on both sides can reduce stress concentration, and further reduce the phenomenon that the first torsion shaft 300 is prone to fatigue fracture when the mirror module 200 swings rapidly or at a large angle.
[0044] Based on the above structure, the present application provides the following two embodiments:
[0045] Example 1: Please refer to Figure 1 The galvanometer 1000 includes a base 100, a reflector module 200, and two first torsion shafts 300. Two first connecting beams 220 are provided on the reflector module 200. The two first connecting beams 220 are provided on opposite sides of the reflector module 200 along the second direction F2, and both first connecting beams 220 extend along the third direction F3. On one side of the reflector module 200, one end of the first torsion shaft 300 on that side is connected to the base 100, and the other end is connected to the first connecting beam 220 on the same side. No other structure is provided on the side of the first connecting beam 220 on that side facing the corresponding first torsion shaft 300. On the other side of the reflector module 200, one end of the first torsion shaft 300 on that side is connected to another portion of the base 100, and the other end is connected to the first connecting beam 220 on the same side. No other structure is provided on the side of the first connecting beam 220 on that side facing the corresponding first torsion shaft 300. That is, by directly forming two first connecting beams 220 on the edge of the reflector module 200, the stress on the first torsion axis 300 can be transferred to the first connecting beam 220, so that the first connecting beam 220 deforms to absorb energy, that is, the stress on the first torsion axis 300 can be reduced.
[0046] Example 2: Please refer to Figure 4 , which shows a schematic diagram of the local structure of the galvanometer provided in one embodiment of the present application, and combined with Figure 1 In this embodiment, the galvanometer 1000 still includes a base 100, a reflector module 200, and two first torsion shafts 300. Two first connecting beams 220 are provided on the reflector module 200. The two first connecting beams 220 are disposed on opposite sides of the reflector module 200 along the second direction F2, and both first connecting beams 220 extend along the third direction F3. Each first torsion shaft 300 is respectively connected to a first connecting beam 220 and the base 100. The main difference between this embodiment and the galvanometer in the first embodiment described above is that the reflector module 200 has a first extension portion 230 on a side of each first connecting beam 220 facing away from the corresponding first slot 210. A second slot 240 is formed between the first extension portion 230 and the first connecting beam 220. The first extension portion 230 has a first connecting slot 231 through which the first torsion shaft 300 passes. In this embodiment, the first connecting beam 220 is not located at the edge of the reflector module 200, but is located inside the reflector module 200. However, the periphery of the first connecting beam 220 is still hollow, so the first connecting beam 220 can also bear the stress of the first torsion axis 300, reducing the risk of the first torsion axis 300 breaking.
[0047] Combined with one or more of the above embodiments, the galvanometer 1000 in the present application can be a one-dimensional galvanometer 1000 or a two-dimensional galvanometer 1000. When the galvanometer 1000 is a one-dimensional galvanometer 1000, it can be set according to the structure of the galvanometer 1000 in the above text; when the galvanometer 1000 is a two-dimensional galvanometer 1000, the two first connecting beams 220 in the above text are correspondingly connected to the two opposite first torsion shafts 300.
[0048] In some embodiments of the present application, the galvanometer 1000 is a two-dimensional galvanometer 1000. The following further details the specific structure of the galvanometer 1000 in conjunction with the respective drawings.
[0049] Please refer to Figure 5 , which shows a schematic diagram of a galvanometer provided in another embodiment of the present application. The mirror module 200 includes: an inner frame 250, a mirror 260, and two second torsion shafts 270. The inner frame 250 is disposed between the two first torsion shafts 300, and it is provided with the above-mentioned first connecting beam 220 and is connected to the first torsion shaft 300 through the first connecting beam 220. The inner frame 250 is provided with a second through groove 251 penetrating along the first direction F1, and the second through groove 251 is located between the two first torsion shafts 300. The mirror 260 is disposed in the second through groove 251, and the mirror 260 is used to reflect a light beam. The two second torsion shafts 270 are disposed in the second through groove 251. Along the fourth direction F4, the two second torsion shafts 270 are respectively disposed on both sides of the mirror 260. One end of the second torsion shaft 270 is connected to the mirror 260, and the other end extends along the fourth direction F4 to be connected to the inner frame 250. The first direction F1, the second direction F2, and the fourth direction F4 are perpendicular to each other pairwise. By providing the second torsion shaft 270 perpendicular to the second direction F2, the extension directions of the first torsion shaft 300 and the second torsion shaft 270 are perpendicular, realizing the two-way swing of the galvanometer 1000 when it is a two-dimensional galvanometer 1000, thereby increasing the detection field of view of the galvanometer 1000 and improving the use efficiency of the lidar.
[0050] For the above mirror 260, please refer to Figure 5, at least one end of the mirror 260 in the fourth direction F4 is provided with a third groove 262; the third groove 262 extends along the fifth direction F5 shown in the figure, so that the mirror 260 forms a second connecting beam 261 located between the third groove 262 and the groove wall of the second through groove 251. Among them, the fifth direction F5 is perpendicular to the first direction F1 and intersects with the fourth direction F4. The second torsion shaft 270 located between the second connecting beam 261 and the inner frame 250 along the fourth direction F4 is connected to the second connecting beam 261. In some embodiments, the mirror 260 is generally circularly arranged, so the third groove 262 and the second connecting beam 261 are bent. It should be noted that the fifth direction F5 is a direction parallel to the plane where the inner frame 250 is located. When the galvanometer 1000 is in a non-working state, the fifth direction F5 is parallel to the second direction F2.
[0051] Please refer to Figure 6 , which shows the present application Figure 5Schematic cross-sectional view of the C surface. Considering that only the second connecting beam 261 is set to be suspended from other parts of the mirror 260, the second connecting beam 261 still has relatively high rigidity, and its effect on relieving the stress on the second torsion shaft 270 is limited. Therefore, in this application, the structure of the second connecting beam 261 is further improved to further enhance the above effect. Specifically, for the above-mentioned second connecting beam 261, the second connecting beam 261 has a third surface 2611 and a fourth surface 2612 arranged opposite to each other in the first direction F1. The third surface 2611 and the surface of the mirror 260 for reflecting the light beam are on the same side of the inner frame 250. The third surface 2611 is provided with a plurality of third grooves 2611a arranged at intervals in the fifth direction F5. In this embodiment, the fifth direction F5 is perpendicular to the above-mentioned first direction F1 and the fourth direction F4 respectively. Of course, in other embodiments, the fifth direction F5 may also have a non-90-degree angle with the fourth direction F4. It should be noted that in this application, the statement that "the third surface 2611 and the surface of the mirror 260 for reflecting the light beam are on the same side of the inner frame 250" means that when the galvanometer 1000 is in a non-working state, the surface of the mirror 260 for reflecting the light beam and the third surface 2611 are on the same side of the inner frame 250. By providing the third grooves 2611a on the third surface 2611 in this application, the deformation ability of the second connecting beam 261 is further increased, thereby improving the stress-bearing ability of the second connecting beam 261. Since the middle part of the second connecting beam 261 is connected to the second torsion shaft 270, no third grooves 2611a are provided in the middle part of the second connecting beam 261, so as to improve the connection strength between the second connecting beam 261 and the second torsion shaft 270 and prevent fatigue fracture at the connection between the second connecting beam 261 and the second torsion shaft 270. It can be understood that even though this embodiment is described by taking the example of providing the third grooves 2611a on the third surface 2611, this application is not limited to this. In other embodiments of this application, the third grooves 2611a may not be provided on the third surface 2611, but on the fourth surface 2612.
[0052] Please refer to Figure 6 , to further enhance the stress-bearing capacity of the second connecting beam 261, in this embodiment, the fourth surface 2612 of the second connecting beam 261 is provided with a plurality of fourth grooves 2612a arranged at intervals in the above-mentioned fifth direction F5. In this way, by adding the fourth grooves 2612a, the deformation ability of the second connecting beam 261 can be further improved, thereby further reducing the risk of fatigue fracture of the second torsion shaft 270 due to excessive stress.
[0053] Please refer to Figure 6, in some embodiments, the projections of the third groove 2611a and the fourth groove 2612a along the first direction F1 are alternately arranged; for example, the projection of the third groove 2611a along the first direction F1 is completely staggered from the projection of the adjacent fourth groove 2612a along the first direction F1. This setting aims to achieve grooving on both sides of the second connecting beam 261 to improve the deformation ability, while avoiding excessive material removal at the same part of the second connecting beam 261, so as to prevent fracture at this part due to too low strength. In some embodiments, along the first direction F1, the sum of the depths of the third groove 2611a and the fourth groove 2612a is less than the thickness of the second connecting beam 261, so that there is still a material layer between the third groove 2611a and the fourth groove 2612a in the second connecting beam 261, ensuring the reliability of the strength of the second connecting beam 261 itself.
[0054] For the above-mentioned second torsion shaft 270, the second torsion shaft 270 is also arranged in the second through groove 251, which is a key component for the mirror 260 to swing. The second torsion shaft 270 extends along the above-mentioned fourth direction F4, one end of which is connected to the inner frame 250, and the other end extends away from the inner frame 250 along the fourth direction F4 to the edge connected to the mirror 260. The two second torsion shafts 270 are arranged on both sides of the mirror 260 along the fourth direction F4 and are collinear; since the second torsion shaft 270 is an elongated component, it can twist or reset around its own axis, so that the mirror 260 can swing with the second torsion shaft 270 as the rotation axis. At least one second torsion shaft 270 is located between the inner frame 250 and the above-mentioned second connecting beam 261, one end of the second torsion shaft 270 is connected to the inner frame 250, and the other end is connected to the second connecting beam 261.
[0055] In order to balance the forces on the two second torsion shafts 270 on both sides of the mirror 260 during deflection, a third groove 262 is provided at each end of the mirror 260 along the fourth direction F4 to form a second connecting beam 261 at each end of the mirror 260 along the fourth direction F4. Each second torsion shaft 270 is correspondingly connected to a second connecting beam 261. A second connecting beam 261, a third groove 262, another third groove 262 and another second connecting beam 261 are arranged in sequence along the fourth direction F4. The second connecting beams 261 on both sides are respectively correspondingly connected to a second torsion shaft 270. By setting the connection structures of the two groups of second torsion shafts 270 and second connecting beams 261, the stress concentration on both sides of the second torsion shafts 270 can be reduced, and further, the phenomenon that the second torsion shafts 270 are prone to fatigue fracture when the mirror 260 swings quickly or at a large angle can be reduced.
[0056] Based on the above structure, the present application provides the following two embodiments:
[0057] Embodiment 3: Please refer toFigure 5 The mirror module 200 includes an inner frame 250, a mirror 260, and two second torsion shafts 270. Two second connecting beams 261 are provided on the mirror 260. Along the fourth direction F4, the two second connecting beams 261 are arranged on opposite sides of the mirror 260, and both second connecting beams 261 extend along the fifth direction F5. On one side of the mirror 260, one end of the second torsion shaft 270 on this side is connected to the inner frame 250, and the other end is connected to the second connecting beam 261 on the same side. There is no other structure on the side of the second connecting beam 261 facing the corresponding second torsion shaft 270; on the other side of the mirror 260, one end of the second torsion shaft 270 on this side is connected to another part of the inner frame 250, and the other end is connected to the second connecting beam 261 on the same side. There is no other structure on the side of the second connecting beam 261 facing the corresponding second torsion shaft 270. That is, by directly forming two second connecting beams 261 on the edge of the mirror 260, the stress received by the second torsion shaft 270 can be transmitted to the second connecting beam 261, so that the second connecting beam 261 deforms to absorb energy and reduces the stress received by the second torsion shaft 270.
[0058] Embodiment 4: Please refer to Figure 8 which shows a partial structural schematic diagram of the galvanometer 1000 provided by another embodiment of the present application. In this embodiment, the mirror module 200 still includes an inner frame 250, a mirror 260, and two second torsion shafts 270; two second connecting beams 261 are provided on the mirror 260. Along the fourth direction F4, the two second connecting beams 261 are arranged on opposite sides of the mirror 260, and both second connecting beams 261 extend along the fifth direction F5. The main difference between the galvanometer in this embodiment and the galvanometer in the above Embodiment 3 is that: in this embodiment, on the side of each second connecting beam 261 of the mirror 260 facing away from the corresponding third groove 262, there is a second extension 263. A fourth groove 280 is formed between the second extension 263 and the second connecting beam 261. The second extension 263 is provided with a second through groove 2631 for the second torsion shaft 270 to pass through. In this embodiment, the second connecting beam 261 is not located at the edge position of the mirror 260, but inside the mirror 260. However, the periphery of the second connecting beam 261 is still hollowed out. Therefore, the second connecting beam 261 can also bear the stress of the second torsion shaft 270 and reduce the risk of the second torsion shaft 270 breaking.
[0059] In the embodiments of the present application, in order to further alleviate the phenomenon that the mirror module 200 is prone to fatigue fracture when it swings rapidly or swings at a large angle, the present application further improves the inner frame 250, thereby further improving the stress-bearing capacity of the second torsion beam.
[0060] Please refer to Figure 5, the inner frame 250 further includes a fourth connecting beam 252. The inner frame 250 is provided with a second through groove 251. The fourth connecting beam 252 is disposed in the second through groove 251. The two ends of the fourth connecting beam 252 are respectively connected to the inner frame 250, and divide the second through groove 251 into a third sub-through groove 2511 and a fourth sub-through groove 2512 arranged along the fourth direction F4. The mirror 260 is disposed in the third sub-through groove 2511.
[0061] Please refer to Figure 7 , which shows the D-plane cross-sectional schematic diagram of the present application Figure 1 . Considering that only the fourth connecting beam 252 is set to be suspended relative to the inner frame 250, the fourth connecting beam 252 still has relatively large rigidity, and its effect on relieving the stress on the second torsion shaft 270 is limited. The present application further improves the structure of the fourth connecting beam 252 to further strengthen the above effect. Specifically, for the above-mentioned fourth connecting beam 252, the fourth connecting beam 252 has a seventh surface 2521 and an eighth surface 2522 arranged oppositely along the first direction F1. The seventh surface 2521 and the surface of the mirror 260 for reflecting the light beam are on the same side of the inner frame 250. The seventh surface 2521 is provided with a plurality of seventh grooves 2521a arranged at intervals along the fifth direction F5. It should be noted that in the present application, "the seventh surface 2521 and the surface of the mirror 260 for reflecting the light beam are on the same side of the inner frame 250" means that when the galvanometer 1000 is in a non-working state, the surface of the mirror 260 for reflecting the light beam and the seventh surface 2521 are on the same side of the inner frame 250. The present application sets the seventh grooves 2521a on the seventh surface 2521 to further increase the deformation ability of the fourth connecting beam 252, thereby improving the stress-bearing ability of the fourth connecting beam 252. Since the middle part of the fourth connecting beam 252 is connected to the second torsion shaft 270, the middle part of the fourth connecting beam 252 is not provided with the seventh grooves 2521a, so as to improve the connection strength between the fourth connecting beam 252 and the second torsion shaft 270 and prevent fatigue fracture at the connection between the fourth connecting beam 252 and the second torsion shaft 270. It can be understood that even though this embodiment is described by taking the setting of the seventh grooves 2521a on the seventh surface 2521 as an example, the present application is not limited thereto. In other embodiments of the present application, the seventh grooves 2521a may not be provided on the seventh surface 2521, but on the eighth surface 2522.
[0062] Please refer to Figure 7, to further enhance the ability of the fourth connecting beam 252 to relieve the stress of the second torsion shaft 270, in this embodiment, a plurality of eighth grooves 2522a arranged at intervals along the fifth direction F5 are provided on the eighth surface 2522 of the fourth connecting beam 252. In this way, by adding the eighth grooves 2522a, the deformation ability of the fourth connecting beam 252 can be further improved, thereby further reducing the risk of fatigue fracture of the second torsion shaft 270 due to excessive stress.
[0063] Please refer to Figure 5 , it still needs to be noted that in some combinable embodiments, the fourth connecting beam 252 and the second connecting beam 261 described above are respectively arranged on both sides of the second torsion shaft 270 in the fourth direction F4.
[0064] Please refer to Figure 1 , in the embodiment of the present application, in order to further relieve the phenomenon that when the mirror module 200 swings rapidly or swings at a large angle, the torsion shaft will be subjected to large stress and is therefore prone to fatigue fracture. The present application also improves the base 100, thereby further improving the stress-bearing capacity of the first torsion beam.
[0065] The base 100 includes a base main body 120 and a third connecting beam 130. The base main body 120 is provided with a first through groove 110. The third connecting beam 130 is arranged in the first through groove 110. Both ends of the third connecting beam 130 are respectively connected to the base main body 120 and divide the first through groove 110 into a first sub-through groove 111 and a second sub-through groove 112 arranged along the second direction F2. The mirror module 200 is arranged in the first sub-through groove 111, and a first torsion shaft 300 located between the mirror module 200 and the third connecting beam 130 along the second direction F2 is connected to the third connecting beam 130.
[0066] Please combine Figure 3 , which shows the present application Figure 1Schematic diagram of the B-side cross-section. Considering that only the third connecting beam 130 is set to be suspended relative to the base body 120, the third connecting beam 130 still has relatively large rigidity, and its effect on alleviating the stress on the first torsion shaft 300 is limited. In this application, the structure of the third connecting beam 130 is further improved to further strengthen the above effect. Specifically, for the above-mentioned third connecting beam 130, the third connecting beam 130 has a fifth surface 131 and a sixth surface 132 arranged oppositely along the first direction F1. The fifth surface 131 and the side of the mirror module 200 for reflecting the light beam are on the same side of the inner frame 250. The fifth surface 131 is provided with a plurality of fifth grooves 1311 arranged at intervals along the third direction F3. In this embodiment, the third direction F3 is perpendicular to the above-mentioned first direction F1 and the second direction F2 respectively. Of course, in other embodiments, the third direction F3 may also have a non-90-degree angle with the second direction F2. It should be noted that in this application, "the fifth surface 131 and the side of the mirror module 200 for reflecting the light beam are on the same side of the inner frame 250" means that when the galvanometer 1000 is in a non-working state, the surface of the mirror module 200 for reflecting the light beam and the fifth surface 131 are on the same side of the base body 120. In this application, by providing the fifth grooves 1311 on the fifth surface 131, the deformation ability of the third connecting beam 130 is further increased, so as to improve the stress-bearing ability of the third connecting beam 130. Since the middle part of the third connecting beam 130 is connected to the first torsion shaft 300, the middle part of the third connecting beam 130 is not provided with the fifth grooves 1311, so as to improve the connection strength between the third connecting beam 130 and the first torsion shaft 300 and prevent fatigue fracture at the connection between the third connecting beam 130 and the first torsion shaft 300. It can be understood that even though this embodiment is described by taking the example of providing the fifth grooves 1311 on the fifth surface 131, this application is not limited thereto. In other embodiments of this application, the fifth grooves 1311 may not be provided on the fifth surface 131, but the fifth grooves 1311 may be provided on the sixth surface 132.
[0067] Please review Figure 3 , in order to further strengthen the ability of the third connecting beam 130 to relieve the stress of the first torsion shaft 300, in this embodiment, the sixth surface 132 of the third connecting beam 130 is provided with a plurality of sixth grooves 1321 arranged at intervals along the above-mentioned third direction F3. In this way, by adding the sixth grooves 1321, the deformation ability of the third connecting beam 130 can be further improved, so as to further reduce the risk of fatigue fracture of the first torsion shaft 300 due to excessive stress.
[0068] It should still be noted that in some combinable embodiments, the above-mentioned third connecting beam 130 and the first connecting beam 220 described above are respectively arranged on both sides of the first torsion shaft 300 in the second direction F2.
[0069] Based on one or more of the above embodiments, refer to Figure 9 , which shows a schematic diagram of a galvanometer 1000 provided in another embodiment of the present application. It can be obtained that the present application provides a galvanometer 1000. The galvanometer 1000 includes a base body 120, an inner frame 250, a mirror 260, two first torsion shafts 300 and two second torsion shafts 270. When the galvanometer 1000 is in a non-operating state, a first connecting beam 220 is provided on one side of the inner frame 250 close to the first torsion shaft 300, a second connecting beam 261 is provided on one side of the mirror 260 close to the second torsion shaft 270, a third connecting beam 130 is provided at a position of the base body 120 close to the first torsion shaft 300, and a fourth connecting beam 252 is provided on one side of the inner frame 250 close to the second torsion shaft 270. Among them, the first connecting beam 220 and the third connecting beam 130 are oppositely arranged on both sides of the first torsion shaft 300 along the second direction F2, and the second connecting beam 261 and the fourth connecting beam 252 are oppositely arranged on both sides of the second torsion shaft 270 along the fourth direction F4. In this way, when the torsion shaft is stressed, part of the stress can be borne by the connected connecting beam, thereby reducing the stress value received by the first torsion shaft 300 and / or the second torsion shaft 270, and reducing the risk of fatigue fracture of the first torsion shaft 300 and / or the second torsion shaft 270.
[0070] It can be understood that the galvanometer 1000 provided in the present application includes at least one of the above technical solutions, that is, at least one technical solution of setting the above first connecting beam 220, second connecting beam 261, third connecting beam 130 and fourth connecting beam 252, and the combination of two or more technical solutions. Again, the embodiments of each combination will not be described in detail one by one.
[0071] Secondly, the embodiments of at least partial combination of the above first torsion shaft 300, second torsion shaft 270 and each connecting beam can be combined with Embodiment 1, Embodiment 2, Embodiment 3 and Embodiment 4 provided in this article without interference. Thereby further improving the stress-bearing capacity of the first torsion shaft 300 and / or the second torsion shaft 270, and reducing the fatigue fracture of the first torsion shaft 300 and / or the second torsion shaft 270.
[0072] Based on the same inventive concept, the present application provides a lidar for improving the risk of easy fatigue fracture of the torsion shaft of the galvanometer in the lidar in the related art.
[0073] Specifically, the lidar includes a housing, a transmitting module, a receiving module, and the galvanometer 1000 described in any of the above embodiments. The housing serves as the mounting base of the lidar and can mount, fix, and protect the above structures. The transmitting module is housed in the housing and is used to emit detection light for detecting a target object. The receiving module is housed in the housing and is used to receive the reflected light formed by the detection light reflected by the target object. The galvanometer 1000 is used to receive the detection light and deflect it so that the detection light exits the lidar, and is also used to receive the reflected light so that the reflected light is directed towards the receiving module.
[0074] Since the lidar includes the above-mentioned galvanometer 1000, the lidar can reduce the stress on the torsion axis of the galvanometer and reduce the risk of fatigue fracture of the torsion axis.
[0075] It should be noted that the "detection light" in this application document means the laser beam emitted by the lidar for detecting a target object, which can be a pulsed beam or a continuous wave beam; the "reflected light" in this application document means the laser beam that is directed towards the lidar formed by the detection light reflected by the target object; the "target object" in this application document means the detection object of the lidar in the surrounding environment, which includes but is not limited to: vehicles, pedestrians, buildings, animals, vegetation, ground, and sky. Next, taking this lidar as a pulsed lidar as an example, the specific structure of the lidar will be described in detail; it can be understood that in other embodiments of this application, the lidar can also be a continuous wave radar or other types of radars, and this application does not limit this.
[0076] It still needs to be noted that the description and drawings of this application give preferred embodiments of this application. However, this application can be implemented in many different forms and is not limited to the embodiments described in this specification. These embodiments are not additional limitations to the content of this application. The purpose of providing these embodiments is to make the understanding of the disclosed content of this application more thorough and comprehensive. Moreover, the above technical features continue to be combined with each other to form various embodiments not listed above, which are all regarded as within the scope described in the specification of this application; further, for those of ordinary skill in the art, improvements or transformations can be made according to the above description, and all such improvements and transformations should fall within the protection scope of the appended claims of this application.
Claims
1. A galvanometer, characterized in that: include: The base is provided with a first through groove extending along a first direction; a reflector module disposed in the first through-slot and configured to reflect the light beam, wherein at least one end of the reflector module along the second direction is provided with a first slot, and the first slot extends along a third direction so that the reflector module forms a first connecting beam between the first slot and a slot wall of the first through-slot, wherein the second direction and the third direction are both perpendicular to the first direction, and the third direction intersects with the second direction; and Two first torsion shafts are respectively provided on both sides of the reflector module along the second direction, one end of the first torsion shaft is connected to the reflector module, and the other end extends along the first direction to be connected to the base; Wherein, the first torsion axis located between the first connecting beam and the base along the second direction is connected to the first connecting beam.
2. The galvanometer according to claim 1, characterized in that The reflector module has no other structure on a side of the first connecting beam facing the corresponding first torsion axis.
3. The galvanometer according to claim 1, wherein: The reflector module is provided with a first extension portion on a side of the first connecting beam away from the corresponding first slot. A second slot is formed between the first extension portion and the first connecting beam. The first extension portion is provided with a first connecting slot for the first torsion axis to pass through.
4. The galvanometer according to claim 1, characterized in that The reflector module is provided with a first groove at both ends along the second direction, so as to form the first connecting beam at both ends along the second direction; Each first torsion axis is correspondingly connected to one of the first connecting beams.
5. The galvanometer according to any one of claims 1 to 4, characterized in that: The first connecting beam has a first surface and a second surface disposed opposite to each other along the first direction, and the first surface and a surface of the reflector module for reflecting the light beam are located on the same side of the base; One of the first surface and the second surface is provided with a plurality of first grooves arranged at intervals along a third direction.
6. The galvanometer according to claim 5, characterized in that: The first surface is provided with the first groove; The second surface is provided with a plurality of second grooves spaced apart along the third direction; The projections of the first grooves and the second grooves along the first direction are alternately arranged; A projection of a first groove along the first direction is completely offset from a projection of an adjacent second groove along the first direction.
7. The galvanometer according to any one of claims 1 to 4, characterized in that: The galvanometer is a two-dimensional galvanometer, and the reflector module includes: an inner frame, disposed between the two first torsion shafts and connected to the two first torsion shafts respectively, the inner frame being provided with a second through slot extending along the first direction, and the first connecting beam being provided on the inner frame; a reflector, disposed in the second through slot, and configured to reflect the light beam; and Two second torsion axes are arranged in the second through groove, along the fourth direction, and the two second torsion axes are respectively arranged on both sides of the reflector, one end of the second torsion axis is connected to the reflector, and the other end extends along the fourth direction to be connected to the inner frame, and the first direction, the second direction and the fourth direction are perpendicular to each other.
8. The galvanometer according to claim 7, characterized in that: The reflector is provided with a third groove at at least one end of the fourth direction, the third groove extending along a fifth direction so that the reflector forms a second connecting beam located between the third groove and a groove wall of the second through groove, the fifth direction being perpendicular to the first direction and intersecting the fourth direction; The second torsion shaft is connected to the second connecting beam and is located between the second connecting beam and the inner frame along the fourth direction.
9. The galvanometer according to claim 1, wherein: The base includes a base body and a third connecting beam, the base body is provided with the first through-slot, the third connecting beam is provided in the first through-slot, both ends of the third connecting beam are respectively connected to the base body, and the first through-slot is divided into a first sub-through-slot and a second sub-through-slot arranged along the second direction; The reflector module is disposed in the first sub-through slot, and a first torsion shaft located between the reflector module and the third connecting beam along the second direction is connected to the third connecting beam.
10. A laser radar, characterized in that: include: case; an emitting module, housed in the housing, for emitting detection light to detect a target object; a receiving module housed in the housing and configured to receive echo light formed by reflection of the detection light from the target object; as well as The galvanometer according to any one of claims 1 to 9, wherein the galvanometer is used to receive the detection light and deflect it so that the detection light is emitted outside the laser radar, and is used to receive the echo light so that the echo light is emitted toward the receiving module.