Optical device and laser light source device

Abstract

The utility model discloses an optical device and a laser light source device. The optical device comprises a base, a first incident reflector assembly, a double-reflection assembly and a first emergent reflector assembly. The double-reflection assembly is provided with a front reflection surface and a rear reflection surface, an input light beam is reflected by the first incident reflector assembly and then sequentially enters the front reflection surface and the spatial light modulator, the spatial light modulator adjusts the input light beam into an output light beam, and the output light beam is emitted to the rear reflection surface; and then the light enters the first emergent reflecting mirror assembly. An input light beam is reflected to a front reflecting surface by using a first incident reflecting mirror assembly and then reflected to a spatial light modulator, the incident input light beam is modulated into an output light beam, the output light beam is emitted to a rear reflecting surface, and the rear reflecting surface reflects the output light beam to a first emergent reflecting mirror assembly. The double-reflection assembly can be arranged adjacent to the spatial light modulator, the input light beam can be reflected from the front reflection surface, the output light beam can also be reflected from the rear reflection surface, separation is easy, and space can be saved.

Description

Technical Field

[0001] The utility model relates to the field of optics, in particular to an optical device and a laser light source device. Background Art

[0002] Femtosecond laser is an extremely short pulse laser technology with a pulse width in the femtosecond range (i.e. 10^-15 seconds) and extremely high power density and spatial resolution. This laser is named for its extremely short pulse width and can perform a variety of micromachining operations such as cold working, drilling, scribing, and cutting.

[0003] A spatial light modulator is commonly used in the optical path of a femtosecond laser. A spatial light modulator is an optical device used to modulate the spatial distribution of light waves. It changes certain parameters of the light field, such as amplitude, phase, and polarization state, by actively controlling liquid crystal molecules.

[0004] Currently, the femtosecond lasers entering and exiting a spatial light modulator (SLM) typically have a certain angle. This requires the femtosecond laser to be at least 1 meter away from the SLM in order to separate the incoming and outgoing light and allow the separated light to be used by subsequent equipment. This often requires the SLM's optical path to occupy a significant amount of space, resulting in wasted space. This is particularly true on optical breadboards, where insufficient space often prevents the SLM from being used. Utility Model Content

[0005] The technical problem to be solved by the present invention is to overcome the above-mentioned defect in the prior art that the optical path of the spatial light modulator occupies a large space, and to provide an optical device and a laser light source device.

[0006] The utility model solves the above technical problems through the following technical solutions:

[0007] An optical device comprises: a base, a first incident reflector assembly, a double reflection assembly and a first exit reflector assembly, wherein the first incident reflector assembly is arranged on the base, and an input light beam is incident on the first incident reflector assembly; the double reflection assembly is arranged on the base, and the double reflection assembly has a front reflection surface and a rear reflection surface, and the input light beam is reflected by the first incident reflector assembly and sequentially incident on the front reflection surface and a spatial light modulator, and the spatial light modulator adjusts the input light beam into an output light beam and projects the output light beam onto the rear reflection surface; the first exit reflector assembly is arranged on the base, and the output light beam is incident on the first exit reflector assembly via the rear reflection surface.

[0008] In this solution, by adopting the above structure, the first input reflector assembly reflects the input beam onto the front reflective surface of the dual reflector assembly. The front reflective surface reflects the input beam to the spatial light modulator, which modulates the input beam into an output beam. The spatial light modulator then transmits the output beam to the rear reflective surface of the dual reflector assembly, which then reflects the output beam to the first output reflector assembly. The dual reflector assembly can be positioned adjacent to the spatial light modulator. The input beam can be reflected from the front reflective surface, and the output beam can also be reflected from the rear reflective surface. This makes it easy to separate the input and output beams, saving space and achieving collimation of the output beam.

[0009] Optionally, the dual reflection assembly includes a triangular reflector, and the side of the triangular reflector facing the first incident reflector assembly is a front reflective surface; the side of the triangular reflector facing the first exit reflector assembly is a rear reflective surface.

[0010] In this solution, by adopting the above structure, the triangular reflector has a simple structure and can make the optical device more compact.

[0011] Optionally, the dual reflection assembly further includes a fixed seat, a floating seat and a fine-tuning rod, the triangular reflector is arranged on the floating seat, the floating seat is connected to the fixed seat, and the fine-tuning rod is used to adjust the position of the floating seat relative to the fixed seat.

[0012] In this solution, by adopting the above structure, the fine-tuning rod is used to adjust the position of the floating seat relative to the fixed seat, thereby realizing the adjustment of the triangular reflector, which can better adjust the input light beam and the output light beam.

[0013] Optionally, the dual-reflection assembly further includes a horizontal tube, and the horizontal tube is disposed on the floating seat.

[0014] In this solution, by adopting the above structure, the horizontal state of the floating seat is displayed by the level tube, which facilitates the auxiliary adjustment of the position of the triangular reflector.

[0015] Optionally, the dual-reflection assembly further includes a column, a sleeve and a fixing member, the sleeve is arranged on the base, the column is inserted into the sleeve, and the fixing member is used to fix the column relative to the sleeve; the fixing seat is arranged at the upper end of the column.

[0016] In this solution, by adopting the above structure, the column is inserted into the sleeve, which facilitates the rotation and lifting of the column relative to the sleeve. The fixing piece facilitates the fixing of the column, making the double reflector assembly more stable.

[0017] Optionally, the angle between the front reflective surface and the rear reflective surface ranges from 45° to 135°.

[0018] Optionally, the first incident reflector assembly and the first exit reflector assembly are symmetrically arranged relative to the double reflection assembly.

[0019] In this solution, by adopting the above structure and utilizing the symmetrical arrangement of the first incident reflector assembly and the first exit reflector assembly, the collimation of the output light beam is facilitated.

[0020] Optionally, the input light beam incident on the first incident reflector assembly is parallel to the output light beam from the first exit reflector assembly.

[0021] In this solution, by adopting the above structure, it is easy to achieve collimation of the output light beam.

[0022] The optical device further comprises a second incident reflector group, the input beam is incident on the second incident reflector group and then incident on the first incident reflector group;

[0023] And / or, the optical device further includes a second exit reflector assembly, and the output light beam is incident on the first exit reflector assembly and then incident on the second exit reflector assembly.

[0024] In this solution, by adopting the above structure, the second incident reflector group can better adapt to the angle of the incident light beam, and the second output reflector group can better control the angle of the output light beam.

[0025] A laser light source device includes a femtosecond laser generating device, a spatial light modulation device and the optical device as described above. The light beam generated by the femtosecond laser generating device is emitted into the spatial light modulation device through the optical device, and is modulated by the spatial light modulation device and then emitted into the optical device.

[0026] In this solution, by adopting the above structure, the laser light source device utilizes an optical device, which can save space, improve the compactness of the laser light source device, and ensure the collimation of the output light beam.

[0027] On the basis of conforming to the common sense in this field, the above-mentioned preferred conditions can be arbitrarily combined to obtain the preferred embodiments of the present utility model.

[0028] The positive progress effect of this utility model is:

[0029] The utility model utilizes a first incident reflector assembly to reflect an input light beam to the front reflective surface of a dual reflector assembly. The front reflective surface reflects the input light beam to a spatial light modulator. The spatial light modulator modulates the input light beam into an output light beam. The spatial light modulator then projects the output light beam to the rear reflective surface of the dual reflector assembly. The rear reflective surface reflects the output light beam to the first output reflector assembly. The dual reflector assembly can be positioned adjacent to the spatial light modulator. The input light beam can be reflected from the front reflective surface, and the output light beam can also be reflected from the rear reflective surface. The input and output light beams can be easily separated, saving space and enabling collimation of the output light beam. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 Schematic diagram of an optical device in an embodiment of the present invention.

[0031] Figure 2 for Figure 1 Schematic diagram of the optical device from another perspective.

[0032] Figure 3 for Figure 1 Schematic diagram of the fixed base, floating base, and fine-tuning rod in a dual-reflection assembly of an optical device.

[0033] Figure 4 for Figure 1 Schematic diagram of the first incident reflector assembly of the optical device.

[0034] Figure 5 Schematic diagram of a laser light source device according to an embodiment of the present invention.

[0035] Description of reference numerals:

[0036] Optical device 100

[0037] Base 11

[0038] First incident reflector assembly 12

[0039] Second incident reflector assembly 13

[0040] Double reflection component 20

[0041] Front reflective surface 21

[0042] Back reflective surface 22

[0043] Triangular reflector 23

[0044] Fixed seat 24

[0045] Floating seat 25

[0046] Fine-tuning lever 26

[0047] Horizontal pipe 27

[0048] Column 28

[0049] Casing 29

[0050] Fixing 30

[0051] First exit reflector assembly 41

[0052] Second exit reflecting mirror group 42

[0053] Laser light source device 500

[0054] Spatial light modulator 51

[0055] Controller Panel 52

[0056] Input beam 91

[0057] Output beam 92 DETAILED DESCRIPTION

[0058] The present invention will be described more clearly and completely below by way of embodiments in conjunction with the accompanying drawings, but the present invention is not limited to the scope of the embodiments.

[0059] like Figures 1 to 5 As shown, this embodiment includes an optical device 100 and a laser light source device 500 . The laser light source device 500 includes the optical device 100 .

[0060] Combine Figure 1The optical device 100 includes: a base 11, a first incident reflector assembly 12, a double reflection assembly 20 and a first exit reflector assembly 41. The first incident reflector assembly 12 is arranged on the base 11, and the input light beam 91 is incident on the first incident reflector assembly 12; the double reflection assembly 20 is arranged on the base 11, and the double reflection assembly 20 has a front reflection surface 21 and a rear reflection surface 22. After being reflected by the first incident reflector assembly 12, the input light beam 91 is sequentially incident on the front reflection surface 21 and the spatial light modulator 51. The spatial light modulator 51 adjusts the input light beam 91 into an output light beam 92 and emits the output light beam 92 to the rear reflection surface 22; the first exit reflector assembly 41 is arranged on the base 11, and the output light beam 92 is incident on the first exit reflector assembly 41 through the rear reflection surface 22. The first incident reflector assembly 12 is used to reflect the input light beam 91 onto the front reflective surface 21 of the dual reflector assembly 20. The front reflective surface 21 reflects the input light beam 91 onto the spatial light modulator 51. The spatial light modulator 51 modulates the input light beam 91 into an output light beam 92. The spatial light modulator 51 then projects the output light beam 92 onto the rear reflective surface 22 of the dual reflector assembly 20. The rear reflective surface 22 reflects the output light beam 92 onto the first output reflector assembly 41. The dual reflector assembly 20 can be positioned adjacent to the spatial light modulator 51. The input light beam 91 can be reflected from the front reflective surface 21, and the output light beam 92 can also be reflected from the rear reflective surface 22. The input light beam 91 and the output light beam 92 can be easily separated, which can save space and achieve collimation of the output light beam 92.

[0061] The dual reflective assembly 20 can be understood as comprising components capable of providing two or more reflective surfaces. Specifically, it may include a prism, a quadrangular prism, a pentaprism, etc. The prism may specifically be a right-angle prism. As an embodiment, the angle between the front reflective surface 21 and the rear reflective surface 22 ranges from 45° to 135°.

[0062] The front reflective surface 21 and the rear reflective surface 22 are merely for the purpose of distinguishing the optical paths of the input light beam 91 and the output light beam 92 and have no other meaning. The first output reflective mirror assembly 41, the second incident reflective mirror assembly 13, the first output reflective mirror assembly 41, the second output reflective mirror assembly 42, the input light beam 91, and the output light beam 92 are merely for the purpose of distinguishing and have no other meaning.

[0063] The base 11 can be understood to include components that can play a supporting role. In this example, the base 11 adopts a split design. In other examples, the base 11 can be an integral body.

[0064] In the field of optics, the input light wave that illuminates the entire device and is modulated is generally referred to as "readout light," while the light wave that exits after passing through spatial light modulator 51 is referred to as "output light." The readout light typically illuminates all pixels of spatial light modulator 51 and receives information transmitted by the write light or write electrical signal, which is then modulated or converted into output light. In this example, the input light wave is input beam 91, and the output light is output beam 92.

[0065] In this example, the dual reflective assembly 20 includes a triangular reflector 23. The side of the triangular reflector 23 facing the first incident reflector assembly 12 is a front reflective surface 21, and the side of the triangular reflector 23 facing the first exit reflector assembly 41 is a rear reflective surface 22. The triangular reflector 23 has a simple structure and can make the optical device 100 more compact. In other examples, two reflectors can also be used to form the dual reflective assembly 20.

[0066] The dual reflector assembly 20 further includes a fixed base 24, a floating base 25, and a fine-tuning rod 26. The triangular reflector 23 is disposed on the floating base 25, which is connected to the fixed base 24. The fine-tuning rod 26 is used to adjust the position of the floating base 25 relative to the fixed base 24. The fine-tuning rod 26 is used to adjust the position of the floating base 25 relative to the fixed base 24, thereby achieving adjustment of the triangular reflector 23, which can better adjust the input light beam 91 and the output light beam 92.

[0067] The dual reflection assembly 20 further includes a horizontal tube 27, which is disposed on the floating seat 25. The horizontal tube 27 is used to display the horizontal state of the floating seat 25, so as to assist in adjusting the position of the triangular reflector 23. Figure 3 The horizontal tube 27 is not shown. The horizontal tube 27 in the double reflection assembly 20 can be combined Figure 4 The setting of the middle horizontal pipe 27.

[0068] The dual reflection assembly 20 also includes a column 28, a sleeve 29 and a fixing member 30. The sleeve 29 is provided on the base 11, the column 28 is inserted into the sleeve 29, and the fixing member 30 is used to fix the column 28 relative to the sleeve 29; the fixing seat 24 is provided at the upper end of the column 28. The column 28 is inserted into the sleeve 29 to facilitate the rotation and lifting of the column 28 relative to the sleeve 29. The fixing member 30 facilitates the fixing of the column 28, making the dual reflection assembly 20 more stable. Figure 4 It can be understood that the dual reflection assembly 20, the first incident reflector assembly 12, the second incident reflector assembly 13, the first exit reflector assembly 41 and the second exit reflector assembly 42 can all include a column 28, a sleeve 29 and a fixing member 30 of similar structure.

[0069] The first incident reflector assembly 12 and the first exit reflector assembly 41 are symmetrically arranged relative to the dual reflector assembly 20. The symmetrical arrangement of the first incident reflector assembly 12 and the first exit reflector assembly 41 facilitates the collimation of the output light beam 92.

[0070] The input light beam 91 incident on the first incident reflector assembly 12 is parallel to the output light beam 92 from the first exit reflector assembly 41 , so as to facilitate the collimation of the output light beam 92 .

[0071] The optical device 100 further includes a second incident reflector assembly 13. The input beam is incident on the second incident reflector assembly and then on the first incident reflector assembly. The second incident reflector assembly 13 can better adapt to the angle of the incident beam.

[0072] The optical device 100 further includes a second output reflector assembly 42. The output light beam 92 is incident on the first output reflector assembly 13 and then incident on the second output reflector assembly 42. The second output reflector assembly 42 can better control the angle of the output light beam 92.

[0073] By utilizing the dual reflective assembly 20, the optical device 100 can separate the input light beam 91 and the output light beam 92 entering and exiting the spatial light modulator 51 along a very short optical path. In a conventional structure using a plane reflector, the optical path length inevitably exceeds one meter. However, the optical device 100 of this embodiment utilizes the dual reflective assembly 20, reducing the optical path length entering and exiting the spatial light modulator 51 to less than 0.1 meters. This significantly saves space and greatly shortens the optical path length of the spatial light modulator 51, enabling alignment of the input light beam 91 and the output light beam 92 so that they are parallel.

[0074] As an implementation manner, the distance between the dual reflection component 20 and the panel of the spatial light modulator 51 can be controlled to be 5 cm-50 cm.

[0075] This embodiment may also include a laser light source device 500, which includes a femtosecond laser generating device, a spatial light modulation device, and the optical device 100 described above. The light beam generated by the femtosecond laser generating device is emitted into the spatial light modulation device via the optical device 100, modulated by the spatial light modulation device, and then emitted into the optical device 100. The laser light source device 500 utilizes the optical device 100, which can save space, improve the compactness of the laser light source device 500, and ensure the collimation of the output light beam 92.

[0076] The femtosecond laser generating device may be understood to include a device capable of generating femtosecond laser, and the spatial light modulation device may be understood to include a device capable of modulating femtosecond laser.

[0077] Although specific embodiments of the present invention have been described above, those skilled in the art will appreciate that these are merely illustrative and that the scope of protection of the present invention is defined by the appended claims. Those skilled in the art may make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, and such changes and modifications are intended to fall within the scope of protection of the present invention.

Claims

1. An optical device, characterized in that: The optical device comprises: base; a first incident reflector assembly, the first incident reflector assembly being arranged on the base, and the input light beam incident on the first incident reflector assembly; a double-reflection assembly, the double-reflection assembly being disposed on the base, the double-reflection assembly having a front reflective surface and a rear reflective surface, wherein an input light beam is reflected by the first incident reflector assembly and sequentially incident on the front reflective surface and a spatial light modulator, the spatial light modulator adjusts the input light beam into an output light beam, and then incidents the output light beam on the rear reflective surface; A first exit reflector assembly is provided on the base, and the output light beam is incident into the first exit reflector assembly through the rear reflective surface.

2. The optical device according to claim 1, wherein The double reflection component includes a triangular reflector, wherein the side of the triangular reflector facing the first incident reflector component is a front reflective surface; and the side of the triangular reflector facing the first exit reflector component is a rear reflective surface.

3. The optical device according to claim 2, wherein The double reflection assembly also includes a fixed seat, a floating seat and a fine-tuning rod. The triangular reflector is arranged on the floating seat, and the floating seat is connected to the fixed seat. The fine-tuning rod is used to adjust the position of the floating seat relative to the fixed seat.

4. The optical device according to claim 3, wherein The double-reflection assembly further includes a horizontal tube, which is arranged on the floating seat.

5. The optical device according to claim 3, wherein The dual-reflection assembly further includes a column, a sleeve and a fixing piece. The sleeve is arranged on the base, the column is inserted into the sleeve, and the fixing piece is used to fix the column relative to the sleeve. The fixing seat is arranged at the upper end of the column.

6. The optical device according to claim 1, wherein The included angle between the front reflective surface and the rear reflective surface is in the range of 45°-135°.

7. The optical device according to claim 1, wherein The first incident reflector assembly and the first exit reflector assembly are symmetrically arranged relative to the double reflection assembly.

8. The optical device according to claim 1, wherein The input light beam incident on the first incident reflector assembly is parallel to the output light beam from the first exit reflector assembly.

9. The optical device according to claim 1, wherein The optical device further comprises a second incident reflector assembly, the input beam is incident upon the second incident reflector assembly and then incident upon the first incident reflector assembly; And / or, the optical device further includes a second exit reflector assembly, and the output light beam is incident on the first exit reflector assembly and then incident on the second exit reflector assembly.

10. A laser light source device, characterized in that: The laser light source device includes a femtosecond laser generating device, a spatial light modulation device and an optical device as described in any one of claims 1 to 9. The light beam generated by the femtosecond laser generating device is emitted into the spatial light modulation device through the optical device, and is modulated by the spatial light modulation device and then emitted into the optical device.

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