Mask cleaning device

Abstract

The utility model relates to the technical field of cleaning devices, and discloses a mask cleaning device which comprises a soaking box, a cleaning device and a cleaning device. A lifting assembly is arranged in the soaking box, and the lifting assembly comprises a sliding block arranged on the outer side wall of a placing plate; the bottom ends of the vertical rods penetrate through the sliding blocks and are connected with the inner side wall of the soaking box. One end of the threaded rod is inserted into the soaking box and is rotationally connected with the soaking box; the transverse plate is penetrated by the threaded rod and is in threaded connection with the threaded rod; the connecting rod is rotationally arranged at the top of the transverse plate, and the top end is rotationally connected with the placing plate; according to the cleaning device, the lifting assembly drives the transverse plate to move through rotation of the threaded rod so as to drive the connecting rod to rotate, one end of the connecting rod pushes the containing plate to ascend and descend, and compared with an existing device, the range is larger when the containing plate is controlled to ascend and descend, and use is convenient. According to the cleaning device, through the clamping assembly, a spring is used for pulling a pull button to drive a pull rod to push a clamping plate to clamp and fix a mask, and the position of the mask is stabilized.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning devices, in particular to a mask cleaning device. Background Art

[0002] With the rapid development of the modern 3C electronics industry, the processing techniques for producing textured mobile phone backplanes, flat-panel displays, and micro-nanostructures in integrated circuit boards are becoming increasingly critical. Mask exposure is one such technique. The mask used in mask exposure is typically a quartz glass plated with a chrome layer, and the desired pattern is created through an exposure and etching process. Exposure experiments cannot be performed if the mask is dirty, as the dirty marks will be transferred to the photoresist without any reservation. Therefore, cleaning dirty masks is crucial.

[0003] Chinese utility model CN220072615U discloses a mask cleaning device with a lifting cleaning structure. The principle is to rotate the threaded rod to bring two inclined blocks closer together. The inclined blocks will squeeze the support block to move upward, causing the support block to push the placement plate upward to place the mask. When the two inclined blocks move away from each other, the support plate moves downward to sink the mask into the cleaning liquid for immersion.

[0004] However, the existing device's method of squeezing the inclined block during use depends on the height of the inclined block's slope, resulting in a small range of vertical movement of the placement plate. This can result in the placement plate not being fully ejected from the cleaning fluid during actual use. Therefore, a cleaning device with a larger lifting range was designed to address this issue. Utility Model Content

[0005] (1) Technical problems solved

[0006] In view of the shortcomings of the existing technology, the present invention provides a mask cleaning device, which has the advantage of a large up and down movement range of the placement plate for easy use, and solves the problem that the existing device has a small up and down movement range and is not conducive to use.

[0007] (2) Technical solution

[0008] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a mask cleaning device, comprising: an immersion box with a placement plate arranged inside; a lifting assembly is arranged inside the immersion box, and the lifting assembly includes: a slider arranged on the outer wall of the placement plate; the bottom end of the vertical rod passes through the slider and is connected to the inner wall of the immersion box; one end of the threaded rod is inserted into the interior of the immersion box and is rotatably connected to the immersion box; a horizontal plate is penetrated by the threaded rod and is threadedly connected to the threaded rod; a connecting rod is rotatably arranged on the top of the horizontal plate, and the top end is rotatably connected to the placement plate.

[0009] In some embodiments, the lifting assembly further comprises: one end of a cross bar passes through the cross plate, and both ends of the cross bar are connected to the inner side wall of the immersion box.

[0010] In some embodiments, the lifting assembly further includes: a torque disposed at one end of the threaded rod.

[0011] In some embodiments, the lifting assembly further includes: a top plate disposed on the top of the vertical pole.

[0012] In some embodiments, a clamping assembly is provided on the placement plate, and the clamping assembly includes: one end of a pull rod passes through the outer wall of the placement plate; a spring is sleeved on the outer wall of the pull rod; a tension and twisting device is provided on one end of the pull rod and the spring; and a clamp is provided at one end of the pull rod.

[0013] In some embodiments, the clamping assembly further includes: a rubber pad disposed on one side of the clamping plate.

[0014] In some embodiments, a rotating assembly is provided on the immersion box, and the rotating assembly includes: one end of a rotating rod is inserted into the interior of the immersion box and is rotatably connected to the immersion box; fan blades are provided on the outer wall of the rotating rod; a sprocket is provided on the outer wall of the rotating rod and the threaded rod; a chain is provided on the outer wall of the sprocket and engages with the sprocket.

[0015] In some embodiments, the portion of the placement plate that is opposite to the fan blades is not provided with an outer plate.

[0016] (3) Beneficial effects

[0017] Compared with the prior art, the present invention provides a mask cleaning device with the following beneficial effects:

[0018] 1. The cleaning device uses the lifting assembly to drive the horizontal plate to move by rotating the threaded rod, thereby driving the connecting rod to rotate, so that one end of the connecting rod pushes the placement plate to rise and fall. Compared with the existing device, the amplitude of controlling the placement plate to rise and fall is larger and it is easy to use.

[0019] 2. The cleaning device uses a clamping assembly to pull and twist the spring to drive the pull rod to push the clamp to clamp and fix the mask, thereby stabilizing the position of the mask. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the structure of the utility model;

[0021] Figure 2 This is a schematic diagram of the structure inside the soaking box of the utility model;

[0022] Figure 3This is a schematic diagram of the structure of the connection between the connecting rod and the horizontal plate of the utility model;

[0023] Figure 4 This is a schematic diagram of the structure of the interior of the placement plate of the utility model.

[0024] In the figure: 11, soaking box; 12, placement board;

[0025] 2. Lifting assembly; 21. Slider; 22. Vertical rod; 23. Threaded rod; 24. Cross plate; 25. Connecting rod; 26. Cross bar; 27. Twist; 28. Top plate;

[0026] 3. Clamping assembly; 31. Pull rod; 32. Spring; 33. Pull and twist; 34. Clamp; 35. Rubber pad;

[0027] 4. Rotating assembly; 41. Rotating rod; 42. Fan blades; 43. Sprocket; 44. Chain. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0029] It should be noted that all directional indications in the embodiments of the present application are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0030] In this application, unless otherwise specified or limited, the terms "connection" and "fixation" should be understood in a broad sense. For example, "fixation" can mean fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. For those skilled in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0031] In addition, the descriptions of "first", "second", etc. in this application are for descriptive purposes only and should not be understood as indicating or implying their relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between the various embodiments can be combined with each other, but this must be based on the fact that they can be implemented by ordinary technicians in this field. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0032] With the rapid development of the modern 3C electronics industry, the processing techniques for producing textured mobile phone backplanes, flat-panel displays, and micro-nanostructures in integrated circuit boards are becoming increasingly critical. Mask exposure is one such technique. The mask used in mask exposure is typically a quartz glass plated with a chrome layer, and the desired pattern is created through an exposure and etching process. Exposure experiments cannot be performed if the mask is dirty, as the dirty marks will be transferred to the photoresist without any reservation. Therefore, cleaning dirty masks is crucial.

[0033] In the prior art, by rotating a threaded rod to bring two inclined blocks closer together, the inclined blocks squeeze the support block upward, causing the support block to push the placement plate upward to place the mask. When the two inclined blocks move away, the support plate moves downward, submerging the mask in the cleaning solution. However, the existing device's method of squeezing the inclined blocks depends on the height of the inclined blocks, resulting in a small range of vertical movement of the placement plate. In actual use, the placement plate may not be fully ejected from the cleaning solution.

[0034] In order to solve the problems in the related art to a certain extent, the embodiment of the present application provides a mask cleaning device. After the mask is placed on the placement plate 12, the threaded rod 23 is rotated. Because the threaded rod 23 is provided with a reverse thread, and the bottom of the horizontal plate 24 is in contact with the bottom of the immersion box 11 to limit the horizontal plate 24 from rotating, the two horizontal plates 24 will be driven away when the threaded rod 23 is rotated. At this time, the connecting rod 25 at the top of the horizontal plate 24 will pull the placement plate 12 downward. At the same time, the slider 21 on the outer wall of the placement plate slides on the vertical rod 22 to stabilize the moving trajectory of the placement plate 12, sinking the mask into the cleaning liquid for immersion. The cleaning liquid will soak the impurities on the mask and separate it from the mask. Then, you only need to rotate the threaded rod 23 in the opposite direction to make the two horizontal plates 24 close to push the connecting rod 25 to rotate and push the placement plate 12 to move upward, so that the mask can be pushed out of the immersion liquid and then taken out. Rotating the threaded rod 23 also rotates the sprocket 43, which in turn rotates the other sprocket 43 through the chain 44, thereby rotating the rotating rod 41. This in turn rotates the fan blades 42 at one end, accelerating the flow of the cleaning liquid and washing away impurities on the mask surface, thereby enhancing the cleaning effect.

[0035] The present application is described below with reference to specific embodiments and with reference to the accompanying drawings:

[0036] Combine Figures 1-4 , an embodiment of the present application provides a mask cleaning device, including: an immersion box 11 with a placement plate 12 arranged inside; a lifting assembly 2 is arranged inside the immersion box 11, and the lifting assembly 2 includes: a slider 21 fixedly arranged on the outer wall of the placement plate 12; the bottom end of the vertical rod 22 passes through the slider 21 and is connected to the inner wall of the immersion box 11; one end of the threaded rod 23 is inserted into the interior of the immersion box 11 and is rotatably connected to the immersion box 11; the horizontal plate 24 is penetrated by the threaded rod 23 and is threadedly connected to the threaded rod 23; the connecting rod 25 is rotatably arranged on the top of the horizontal plate 24, and the top end is rotatably connected to the placement plate 12.

[0037] Specifically, the threads on the surface of the threaded rod 23 are designed to be inversely spaced. The principle of immersion cleaning of the mask primarily utilizes the dissolution and physical removal of dirt by chemical solvents, thereby achieving cleaning. This process does not affect the threaded rod 23. The threaded rod 23 is connected to the immersion box 11 using a press-fit bearing, which not only ensures rotation but also provides a seal to prevent water leakage.

[0038] During use, after the mask is placed on the placement plate 12, the threaded rod 23 is rotated. Because the threaded rod 23 is provided with a reverse thread, and the bottom of the horizontal plate 24 fits with the bottom of the immersion box 11 to restrict the horizontal plate 24 from rotating, the two horizontal plates 24 will be driven away when the threaded rod 23 is rotated. At this time, the connecting rod 25 on the top of the horizontal plate 24 will pull the placement plate 12 downward. At the same time, the slider 21 on the outer wall of the placement plate slides on the vertical rod 22 to stabilize the movement trajectory of the placement plate 12, and the mask is sunk into the cleaning liquid for immersion. The cleaning liquid will soak the impurities on the mask and separate it from the mask. Then you only need to rotate the threaded rod 23 in the opposite direction to make the two horizontal plates 24 close together, push the connecting rod 25 to rotate and push the placement plate 12 to move upward, so that the mask can be pushed out of the immersion liquid and then taken out.

[0039] In some embodiments, the lifting assembly 2 further includes: one end of a cross bar 26 passes through the cross plate 24 , and both ends of the cross bar 26 are connected to the inner side wall of the immersion box 11 .

[0040] During use, the design of the cross bar 26 can further stabilize the movement trajectory of the cross board 24, so that the cross board 24 can move stably.

[0041] In some embodiments, the lifting assembly 2 further includes a knob 27 disposed at one end of the threaded rod 23 .

[0042] The design of the knob 27 is convenient for gripping and rotating during use, and the surface of the knob 27 is provided with grooves to increase friction during rotation.

[0043] In some embodiments, the lifting assembly 2 further includes: a top plate 28 disposed on the top of the upright pole 22 .

[0044] The design of the top plate 28 can prevent the slider 21 from falling off the top of the vertical rod 22 when sliding on the vertical rod 22 during use.

[0045] In some embodiments, a clamping assembly 3 is provided on the placement plate 12, and the clamping assembly 3 includes: one end of a pull rod 31 passes through the outer wall of the placement plate 12; a spring 32 is sleeved on the outer wall of the pull rod 31; a pull-twist 33 is provided at one end of the pull rod 31 and the spring 32; and a clamp 34 is provided at one end of the pull rod 31.

[0046] When placing the mask during use, the pull rod 31 can be driven to move by pulling the pull knob 33. One end of the pull rod 31 pulls the clamping plate 34 to move together and the spring 32 is stretched. The mask is placed inside the placement plate 12, the pull knob 33 is released, and the spring 32 is reset. The pull knob 33 is pulled closer to the placement plate 12, and the clamping plate 34 is pushed by the pull rod 31 to clamp the mask.

[0047] In some embodiments, the clamping assembly 3 further includes a rubber pad 35 disposed on one side of the clamping plate 34 .

[0048] During use, the soft material of the rubber pad 35 can prevent damage to the mask when the mask is clamped.

[0049] In some embodiments, a rotating assembly 4 is provided on the immersion box 11, and the rotating assembly 4 includes: one end of a rotating rod 41 is inserted into the interior of the immersion box 11 and is rotatably connected to the immersion box 11; the fan blades 42 are arranged on the outer wall of the rotating rod 41; the sprocket 43 is arranged on the outer wall of the rotating rod 41 and the threaded rod 23; the chain 44 is sleeved on the outer wall of the sprocket 43 and engages with the sprocket 43.

[0050] When the threaded rod 23 is rotated, the sprocket 43 also rotates, which in turn drives the other sprocket 43 to rotate together through the chain 44, thereby rotating the rotating rod 41, which in turn drives the fan blade 42 at one end to accelerate the flow of the cleaning liquid, thereby washing away impurities on the surface of the mask and enhancing the cleaning effect.

[0051] In some embodiments, the portion of the placement plate 12 that faces the fan blades 42 is not provided with an outer plate.

[0052] During use, such a design allows the cleaning liquid to flow from the placement plate 12 and remove impurities that have fallen off the mask during the flow process, thereby increasing the cleaning effect.

[0053] In the description of this specification, the reference terms "one embodiment", "some embodiments", "example", "specific example", "some examples", etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification.

[0054] In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in this field to implement them. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0055] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A mask cleaning device, comprising: A soaking box (11) having a placement plate (12) disposed therein; The invention is characterized in that a lifting assembly (2) is provided inside the soaking box (11), and the lifting assembly (2) comprises: A slider (21) is arranged on the outer side wall of the placement plate (12); A vertical rod (22), the bottom end of which passes through the slider (21) and is connected to the inner wall of the soaking box (11); A threaded rod (23), one end of which is inserted into the interior of the soaking box (11) and is rotatably connected to the soaking box (11); A horizontal plate (24) is penetrated by the threaded rod (23) and is threadedly connected to the threaded rod (23); The connecting rod (25) is rotatably arranged on the top of the horizontal plate (24), and the top end is rotatably connected to the placement plate (12).

2. The mask cleaning device according to claim 1, characterized in that: The lifting assembly (2) further comprises: One end of a cross bar (26) passes through the cross plate (24), and both ends of the cross bar (26) are connected to the inner side wall of the soaking box (11).

3. The mask cleaning device according to claim 1, characterized in that: The lifting assembly (2) further comprises: A twist knob (27) is provided at one end of the threaded rod (23).

4. The mask cleaning device according to claim 1, wherein: The lifting assembly (2) further comprises: A top plate (28) is provided on the top of the vertical pole (22).

5. The mask cleaning device according to claim 1, characterized in that: A clamping assembly (3) is provided on the placement plate (12), and the clamping assembly (3) comprises: A pull rod (31), one end of which passes through the outer wall of the placement plate (12); A spring (32) is sleeved on the outer side wall of the pull rod (31); A pull-twist (33) is provided at one end of the pull rod (31) and the spring (32); A clamping plate (34) is provided at one end of the pull rod (31).

6. The mask cleaning device according to claim 5, characterized in that: The clamping assembly (3) further comprises: A rubber pad (35) is provided on one side of the clamping plate (34).

7. The mask cleaning device according to claim 5, characterized in that: The soaking box (11) is provided with a rotating assembly (4), and the rotating assembly (4) comprises: A rotating rod (41), one end of which is inserted into the interior of the soaking box (11) and is rotatably connected to the soaking box (11); A fan blade (42) is provided on the outer side wall of the rotating rod (41); a sprocket (43) disposed on the outer side walls of the rotating rod (41) and the threaded rod (23); The chain (44) is sleeved on the outer side wall of the sprocket (43) and engages with the sprocket (43).

8. The mask cleaning device according to claim 7, characterized in that: The portion of the placement plate (12) facing the fan blade (42) is not provided with an outer plate.

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