Height adjustment tool

Abstract

The utility model discloses a tool for height adjustment, which comprises a handle, a screw handle, a screw rod and a screw rod, a moving space is formed in the screw handle, and two ends of the screw handle are respectively provided with a first opening and a second opening; the screw moving part is movably arranged in the screw moving space; a screwdriver head part is formed at one end of the screwdriver, and the screwdriver penetrates through the second opening of the screw and is connected with the screw moving part; the screwdriver sleeve is connected with the screw handle, and the screwdriver movably penetrates through the screwdriver sleeve; and the screw transmission assembly is arranged on the screw handle, and the screw transmission assembly is used for driving the screw moving part to move. Through the application of the utility model, a tool for adjusting a screw and nut combined structure is provided, the tool is particularly suitable for accurately adjusting the height of a cutter ring part on a wafer bearing structure, a user can simultaneously rotate a screw and a nut, and a screwdriver part and a cutter sleeve part can be independently used respectively.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer preparation devices, in particular to a tool for height adjustment. Background Art

[0002] Currently, the production and preparation process of wafers often involves the cleaning of wafers. However, during the specific operation, there is often a problem of incomplete cleaning on the back of the wafer, some of which are chuck marks in the middle and some of which are residues at the edge.

[0003] Specifically, the aforementioned incomplete cleaning problem is primarily caused by inaccurate height of the wafer support structure's knife ring. If it's too high, chuck marks will appear; if it's too low, edge residue will remain. In existing techniques, adjusting the knife ring's height often requires a combination of a screwdriver, wrench, and nut socket.

[0004] The height of the knife ring is typically adjusted using a screw and a nut. The screw is used to adjust the height, and the nut is used to tighten the screw after the height is adjusted. However, precise adjustment is often difficult, especially after the screw is adjusted, the nut may still rotate and cause the height to change when it is tightened. In addition, the nut is often recessed in the knife ring, making it difficult for operators to use the adjustment tool. Utility Model Content

[0005] In response to the problems in the prior art, the purpose of the present invention is to provide a height adjustment tool, which can realize screw adjustment and nut adjustment during the height adjustment process through a single tool, thereby improving the operator's adjustment experience and operating efficiency.

[0006] Specifically, a first aspect of the present invention provides a height adjustment tool, the height adjustment tool comprising: a handle, wherein a movable space is formed in the handle, and a first opening and a second opening are respectively formed at both ends of the handle, wherein the first opening and the second opening are both connected to the movable space;

[0007] a moving member, the moving member being movably disposed in the moving space;

[0008] a screwdriver, wherein one end of the screwdriver is formed with a bit, and the other end of the screwdriver passes through the second opening and is connected to the moving member;

[0009] a tool sheath, one end of which is connected to one end of the handle, and the other end of the screwdriver is movably arranged through the tool sheath;

[0010] A transmission assembly is provided on the handle and is used to drive the movement of the moving part.

[0011] In a possible implementation of the first aspect above, the transmission assembly includes: a screw rod, one end of which is arranged at the first port, a threaded channel is provided on the moving part, and the screw rod and the threaded channel are threadedly matched.

[0012] In a possible implementation of the first aspect above, the transmission assembly further includes: an adjusting member, which is disposed on an outer side of the handle and connected to one end of the screw rod.

[0013] In a possible implementation of the first aspect above, the adjusting member is provided with a plurality of teeth in sequence along the circumferential direction.

[0014] In a possible implementation of the first aspect above, at least one first guide structure is provided on the outside of the moving member, and at least one second guide structure is provided on the inside of the moving space, and the first guide structure and the second guide structure are slidingly fitted along the moving direction of the moving member.

[0015] In a possible implementation of the first aspect above, the first guide structure is a groove structure, the second guide structure is a protrusion structure, and the outer contour of the protrusion structure matches the inner contour of the groove structure.

[0016] In a possible implementation of the first aspect, a limiting opening is formed on the inner side of the other end of the tool sleeve, and the limiting opening is used to be sleeved with a nut.

[0017] In a possible implementation of the first aspect above, the limiting opening has a hexagonal cross-section along the radial direction.

[0018] In a possible implementation of the first aspect above, the other end of the knife sleeve is arranged to expand radially outward.

[0019] In a possible implementation of the first aspect above, the handle includes: a first part and a second part, the first part and the second part are connected in sequence along the axial direction, and both the first part and the second part are provided with an annular groove along the circumferential direction.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] The technical solution provided by the utility model provides a tool for adjusting the screw-nut combination structure, which is particularly suitable for highly precise adjustment of the knife ring part on the wafer supporting structure. The user can turn the screw and nut at the same time, and can also use the screwdriver part and the knife sleeve part independently. The utility model is easy to use, further saves adjustment time, is beneficial to the improvement of the quality and production capacity of the wafer, and has promotional value. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Other features, objects and advantages of the present invention will become more apparent from the detailed description of non-limiting embodiments made with reference to the following drawings.

[0023] Figure 1 According to an embodiment of the present invention, a schematic diagram of a portion of a knife ring suitable for a height adjustment tool is provided.

[0024] Figure 2 According to an embodiment of the present utility model, a schematic diagram of the overall structure of a height adjustment tool is provided.

[0025] Figure 3 According to an embodiment of the present invention, a cross-sectional schematic diagram of a height adjustment tool is provided.

[0026] Figure 4 According to an embodiment of the present utility model, a schematic diagram of the matching of a screw rod of a height adjustment tool is provided.

[0027] Figure 5 According to an embodiment of the present invention, a schematic diagram of a handle of a height adjustment tool is provided.

[0028] In the attached figure:

[0029] 1. Screw; 2. Nut; 3. Wafer bearing structure; 4. Knife ring part; 5. Handle; 6. Moving space; 7. First opening; 8. Second opening; 9. Moving part; 10. Screwdriver; 11. Knife head; 12. Knife sleeve; 13. Screw; 14. Threaded channel; 15. Adjustment part; 16. First guide structure; 17. Second guide structure; 18. Limit opening; 19. First part; 20. Second part; 21. Annular groove. DETAILED DESCRIPTION

[0030] The following describes the embodiments of the present invention through specific examples. Those skilled in the art will readily understand the other advantages and benefits of the present invention from the disclosure herein. The present invention may also be implemented or applied to various different specific embodiments, and the various details of the present invention may be modified or altered based on different perspectives and application systems without departing from the spirit of the present invention. It should be noted that the embodiments and features of the embodiments of the present invention may be combined with each other, unless they conflict.

[0031] The following is a detailed description of the embodiments of the present invention with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention. The present invention can be embodied in many different forms and is not limited to the embodiments described herein.

[0032] In the description of the present invention, reference to terms such as "one embodiment," "some embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, those skilled in the art may combine and integrate different embodiments or examples, and features of different embodiments or examples, as long as they are not mutually inconsistent.

[0033] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include at least one such feature. In the context of this utility model, "plurality" means two or more, unless otherwise specifically defined.

[0034] In order to clearly illustrate the present invention, components not related to the description are omitted, and the same or similar components throughout the specification are given the same reference numerals.

[0035] Throughout this specification, when a device is said to be "connected" to another device, this includes not only "direct connection" but also "indirect connection" with other elements interposed therebetween. Furthermore, when a device is said to "include" a certain component, unless otherwise stated, this does not exclude the inclusion of other components but rather implies that the device may include other components.

[0036] When a device is said to be "on" another device, it may be directly on the other device, but there may also be other devices between it. In contrast, when a device is said to be "directly on" another device, there are no other devices between it.

[0037] Although the terms first, second, etc. are used in some instances herein to represent various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, the first interface and the second interface, etc. are represented. Furthermore, as used in this article, the singular forms "one," "an," and "the" are intended to also include the plural forms, unless there is a contrary indication in the context. It should be further understood that the terms "comprise," "include," and "include" indicate the presence of features, steps, operations, elements, components, items, types, and / or groups, but do not exclude the presence, occurrence, or addition of one or more other features, steps, operations, elements, components, items, types, and / or groups. The terms "or" and "and / or" used herein are interpreted as inclusive, or mean any one or any combination. Therefore, "A, B, or C" or "A, B, and / or C" means "any of the following: A; B; C; A and B; A and C; B and C; A, B, and C." Exceptions to this definition only occur when the combination of elements, functions, steps, or operations is inherently mutually exclusive in some way.

[0038] The technical terms used herein are intended only to refer to specific embodiments and are not intended to limit the present invention. The singular form used herein also includes the plural form, unless the statement explicitly indicates otherwise. The term "comprising" as used in this specification specifies specific features, regions, integers, steps, operations, elements, and / or components, and does not exclude the existence or addition of other features, regions, integers, steps, operations, elements, and / or components.

[0039] Although not defined otherwise, all terms used herein, including technical and scientific terms, have the same meanings as those generally understood by those skilled in the art to which this invention belongs. Terms defined in commonly used dictionaries are to be interpreted as having meanings consistent with the relevant technical literature and current disclosures, and unless otherwise defined, they should not be overly interpreted as ideal or highly formalized meanings.

[0040] In some embodiments of the present invention, Figure 1 FIG. 1 shows a schematic diagram of a knife ring portion suitable for a height adjustment tool. Figure 1 As shown, the knife ring part 4 suitable for the height adjustment tool is arranged on the wafer supporting structure 3, and its height is limited by the cooperation of the screw 1 and the nut 2. The cooperation between the screw 1 and the hole of the knife ring part 4 can enable the knife ring part 4 to be displaced in the vertical direction.

[0041] In the above embodiment, if Figures 2 to 5 As shown, a preferred embodiment of a height adjustment tool is shown, including: a handle 5, a movable space 6 is formed in the handle 5, and a first opening 7 and a second opening 8 are respectively opened at both ends of the handle 5, and the first opening 7 and the second opening 8 are both connected to the movable space 6; a movable member 9, the movable member 9 is movably arranged in the movable space 6; a screwdriver 10, a tool head 11 is formed at one end of the screwdriver 10, and the other end of the screwdriver 10 passes through the second opening 8 and is connected to the movable member 9; a tool sleeve 12, one end of the tool sleeve 12 is connected to one end of the handle 5, and the other end of the screwdriver 10 is movably arranged through the tool sleeve 12; a transmission assembly, the transmission assembly is arranged on the handle 5, and the transmission assembly is used to drive the movement of the movable member 9. Furthermore, driven by the transmission assembly, the screwdriver 10 can be moved axially relative to the tool sleeve 12, so that the screwdriver 10 or the tool sleeve 12 in a relatively protruding position can be used respectively; the screwdriver 10 is used to screw the screw 1, and the tool sleeve 12 is used to be sleeved on the outside of the nut 2 to form a limit; preferably, after appropriately adjusting the relative positions of the screwdriver 10 and the tool sleeve 12, the two can be matched with the screw 1 and the nut 2 at the same time to drive the synchronous rotation of the screw 1 and the nut 2.

[0042] In a specific implementation of the above embodiment, the transmission assembly further includes a screw rod 13, one end of which is disposed at the first port 7, and a threaded channel 14 is defined in the movable member 9. The screw rod and the threaded channel 14 are threadedly engaged. Furthermore, the movable member 9 is driven to move in the vertical direction by the in-situ rotation of the screw rod 13.

[0043] In a specific implementation of the above embodiment, the transmission assembly further includes: an adjustment member 15, which is disposed outside the handle 5 and is connected to one end of the screw rod 13. Furthermore, the operator can drive the screw rod 13 to rotate by screwing the adjustment member 15.

[0044] In a specific implementation of the above embodiment, further, the adjusting member 15 is preferably an adjusting nut, which is fixed to the upper end of the screw rod 13 .

[0045] In a specific implementation of the above embodiment, the adjusting member 15 is further provided with a plurality of teeth in sequence along the circumference. Furthermore, the provision of the teeth enhances the surface friction of the adjusting member 15 so as to facilitate manual tightening by the operator.

[0046] In a specific implementation of the above embodiment, further, at least one first guide structure 16 is provided on the outer side of the moving part 9, and at least one second guide structure 17 is provided on the inner side of the moving space 6, and the first guide structure 16 and the second guide structure 17 are slidingly matched along the moving direction of the moving part 9.

[0047] In a specific implementation of the above embodiment, further, a plurality of first guide structures 16 and second guide structures 17 may be sequentially provided in the circumferential direction at corresponding positions.

[0048] In a specific implementation of the above embodiment, further, the cooperation between the first guide structure 16 and the second guide structure 17 also provides a limit in the circumferential rotation direction between the movable member 9 and the handle 5, so as to facilitate stable transmission of force without causing relative rotation between the movable member 9 and the handle 5.

[0049] In a specific implementation of the above embodiment, further, the first guide structure 16 is a groove structure, the second guide structure 17 is a protrusion structure, the outer contour of the protrusion structure matches the inner contour of the groove structure, and the protrusion structure can be slidably extended into the groove structure.

[0050] In a specific implementation of the above embodiment, further, the protrusion structure and the groove structure at least extend along the axial direction of the moving space 6 .

[0051] In a specific implementation of the above embodiment, further, a limiting opening 18 is formed on the inner side of the other end of the knife sleeve 12, and the limiting opening 18 is used to be mounted on the nut 2. Furthermore, the inner contour of the limiting opening 18 matches the outer contour of the nut 2.

[0052] In a specific implementation of the above embodiment, further, the radial cross section of the limiting opening 18 is hexagonal.

[0053] The above description is only a preferred embodiment of the present invention and does not limit the implementation manner and protection scope of the present invention.

[0054] The present invention also has the following implementation methods based on the above:

[0055] In a specific implementation of the above embodiment, further, the other end of the knife sleeve 12 is radially expanded outward. Further, the inner diameter of the other end of the knife sleeve 12 is preferably the sum of the inner diameters of the screw 1 and the nut 2.

[0056] In a specific implementation of the above embodiment, further, the handle 5 can be made of plastic material, which is not limited here.

[0057] In a specific implementation of the above embodiment, the handle 5 may further include a first portion 19 and a second portion 20, which are sequentially connected along the axial direction. The first portion 19 and the second portion 20 are both circumferentially defined with an annular groove 21. Furthermore, the annular groove 21 is concave relative to the outer side of the handle 5. The provision of the annular groove 21 facilitates use by the operator and saves material.

[0058] In a specific implementation of the above embodiment, further, the outer sides of the first portion 19 and the second portion 20 may be provided with friction enhancing patterns.

[0059] In a specific implementation of the above embodiment, further, the first portion 19 and the second portion 20 are both arranged in a columnar structure.

[0060] In a specific implementation of the above embodiment, further, the first part 19 and the second part 20 can be detachably connected by snap connection.

[0061] In a specific implementation of the above embodiment, further, a first opening 7 is formed on the first portion 19 , and a second opening 8 is formed on the second portion 20 .

[0062] To sum up, the technical solution provided by the utility model is to set a rotatable calibration device at the base of the slurry conveying swing arm. When the initial calibration value is set, the landing point position of the grinding slurry can be calibrated, checked and adjusted by rotating the calibration device. There is no need to repeatedly set up and use the existing landing point tooling structure, which can be easily implemented and has promotional value.

[0063] The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and the specific implementation of the present invention cannot be considered to be limited to these descriptions. For those skilled in the art of the present invention, without departing from the concept of the present invention, several simple deductions or substitutions can be made, which should be considered to fall within the scope of protection of the present invention.

Claims

1. A height adjustment tool, characterized in that: include: A handle, wherein a movable space is formed in the handle, and a first opening and a second opening are respectively formed at both ends of the handle, and the first opening and the second opening are both connected to the movable space; a moving member, the moving member being movably disposed in the moving space; a screwdriver, wherein one end of the screwdriver is formed with a bit, and the other end of the screwdriver passes through the second opening and is connected to the moving member; a tool sheath, one end of which is connected to one end of the handle, and the other end of the screwdriver is movably arranged through the tool sheath; A transmission assembly is provided on the handle and is used to drive the movement of the moving part.

2. The height adjustment tool according to claim 1, characterized in that: The transmission assembly includes a screw rod, one end of which is arranged at the first port, a threaded channel is provided on the moving part, and the screw rod and the threaded channel are arranged in threaded cooperation.

3. The height adjustment tool according to claim 2, characterized in that: The transmission assembly further includes an adjusting member, which is arranged on the outside of the handle and connected to one end of the screw rod.

4. The height adjustment tool according to claim 3, characterized in that: The adjusting member is provided with a plurality of tooth patterns in sequence along the circumferential direction.

5. The height adjustment tool according to claim 1, wherein: At least one first guide structure is provided on the outer side of the moving member, and at least one second guide structure is provided on the inner side of the moving space. The first guide structure and the second guide structure are provided in a sliding fit along the moving direction of the moving member.

6. The height adjustment tool according to claim 5, characterized in that: The first guide structure is a groove structure, and the second guide structure is a protrusion structure. The outer contour of the protrusion structure matches the inner contour of the groove structure.

7. The height adjustment tool according to claim 1, wherein: A limiting opening is formed on the inner side of the other end of the knife sleeve, and the limiting opening is used to be sleeved with the nut.

8. The height adjustment tool according to claim 7, characterized in that: The radial cross section of the limiting opening is hexagonal.

9. The height adjustment tool according to claim 1, wherein: The other end of the knife sleeve is arranged to expand radially outward.

10. The height adjustment tool according to claim 1, wherein: The handle includes a first part and a second part, wherein the first part and the second part are sequentially connected along the axial direction, and both the first part and the second part are provided with an annular groove along the circumferential direction.

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