Wafer storage box

Abstract

The utility model relates to the technical field of wafer storage, in particular to a wafer storage box which comprises a first cover body and a second cover body. The first cover body and the second cover body are buckled to form an accommodating cavity for storing a wafer; an inner box structure is arranged in the containing cavity, a plurality of inserting grooves which are distributed at intervals in the horizontal direction are formed in the two opposite sides of the inner box structure correspondingly, and the inserting grooves in the two sides are in one-to-one correspondence to form a plurality of inserting groove assemblies; the wafer can be inserted into the slot assembly in the vertical direction, and the edges of the two sides of the wafer abut against the slots in the two sides. A pressing structure is arranged in the first cover body, and when the first cover body is buckled on the second cover body, the pressing structure is in contact with the edge of the upper side part of the wafer and enables the wafer to abut against the bottom of the slot assembly. According to the wafer storage box, the wafers can be prevented from shaking in the wafer storage box, pollution to the wafers caused by generated particle chippings is avoided, and safe and reliable storage of the wafers is achieved.

Description

Technical Field

[0001] The present application relates to the field of wafer storage technology, and in particular to a wafer storage box. Background Art

[0002] Currently, wafer storage boxes are used to store wafers, especially for thin wafers. Placing the wafers in a wafer box can reduce the risk of wafer breakage. The existing technology usually stacks the wafers horizontally in a wafer storage box. Due to vibrations generated during transportation, the wafers are not firmly fixed in the wafer storage box and will shake or rotate, which makes it easy for adjacent wafers to rub against each other or for the wafers to rub against the inner wall of the wafer storage box. Long-term friction will produce a large amount of particle debris, thereby contaminating the wafers. In addition, since the wafers are not firmly fixed in the wafer storage box, they are also prone to breakage, which is not conducive to the safe storage of wafers. Utility Model Content

[0003] The purpose of the present application is to provide a wafer storage box, which can prevent wafers from shaking in the wafer storage box, avoid the generation of particle debris to contaminate the wafers, and achieve safe and reliable storage of wafers.

[0004] The embodiment of the present application is implemented as follows:

[0005] An embodiment of the present application provides a wafer storage box, comprising a first cover and a second cover; the first cover and the second cover are buckled together to form a accommodating cavity for storing wafers; an inner box structure is provided in the accommodating cavity, and a plurality of slots arranged at intervals in the horizontal direction are respectively provided on two opposite sides of the inner box structure, and the slots on both sides correspond to each other to form multiple groups of slot assemblies; the wafer can be inserted into the slot assemblies in the vertical direction, and the edges on both sides of the wafer abut against the slots on both sides; a pressing structure is provided in the first cover, and when the first cover is buckled on the second cover, the pressing structure contacts the upper side edge of the wafer and makes the wafer abut against the bottom of the slot assembly; the abutment of the pressing structure and the slot assembly on the wafer is used to prevent the wafer from moving radially.

[0006] As an optional embodiment, the pressing structure includes a plurality of pressing parts arranged at intervals along the circumference of the wafer; an abutment groove is provided on the pressing part, and the edge of the wafer is inserted into the abutment groove and abuts against the bottom of the abutment groove.

[0007] As an optional embodiment, the abutment groove is provided with a guide bevel on one side or both sides of the wafer, and the guide bevel is used to increase the opening of the abutment groove. When the wafer enters the abutment groove, the guide bevel guides the edge of the wafer.

[0008] As an optional embodiment, the pressing structure includes a first V-shaped elastic pressing member and a second V-shaped elastic pressing member arranged axially symmetrically; two pressing parts are provided at both ends of the first V-shaped elastic pressing member, and two pressing parts are provided at both ends of the second V-shaped elastic pressing member.

[0009] As an optional embodiment, the angle between the line connecting the mutually adjacent pressing parts of the first V-shaped elastic pressing member and the second V-shaped elastic pressing member and the center of the wafer is 30-46°.

[0010] As an optional embodiment, the angle between the pressing parts of the first V-shaped elastic pressing member and the second V-shaped elastic pressing member that are separated from each other and the center of the wafer is 65-85°.

[0011] As an optional embodiment, there are multiple pressing structures and they correspond one-to-one to the slot assemblies; the multiple pressing structures are connected in series through a horizontally extending connecting rod, and assembly spring plates are provided at both ends of the extending direction of the connecting rod; an assembly buckle that cooperates with the assembly spring plate is provided on the first cover body.

[0012] As an optional embodiment, the connecting rod is provided with assembly holes arranged at intervals, and the first cover is provided with plug-in columns connected to the assembly holes in a one-to-one correspondence.

[0013] As an optional embodiment, each slot includes a vertically extending straight plug-in section and an arc support section arranged along the circumference of the wafer; a distance is provided between the ends of the two arc support sections that are close to each other to form a gap at the bottom of the wafer.

[0014] As an optional implementation, a clamping structure is provided on the arc supporting section, and the clamping structure abuts against two opposite side surfaces of the wafer.

[0015] Preferably, the wafer storage box includes a first cover and a second cover; the first cover and the second cover are buckled together to form a storage cavity for storing wafers; an inner box structure is provided in the storage cavity, and a plurality of slots arranged at intervals along the horizontal direction are provided on opposite sides of the inner box structure, and the slots on both sides correspond to each other to form a plurality of slot assemblies; the wafer can be inserted into the slot assembly in the vertical direction, and the edges of the two sides of the wafer abut against the slots on both sides; a pressing structure is provided in the first cover, and when the first cover is buckled on the second cover, the pressing structure contacts the upper side edge of the wafer and abuts the wafer against the bottom of the slot assembly; the abutment of the pressing structure and the slot assembly on the wafer is used to prevent the wafer from moving radially. The pressing structure includes a plurality of pressing parts arranged at intervals along the circumference of the wafer; an abutment groove is provided on the pressing part, and the edge of the wafer is inserted into the abutment groove and abuts against the bottom of the abutment groove.

[0016] The beneficial effects of the embodiments of the present application include:

[0017] An embodiment of the present application provides a wafer storage box, comprising a first cover and a second cover; the first cover and the second cover are fastened together to form a storage chamber for storing wafers. The storage chamber of the embodiment of the present application is provided with an inner box structure, and a plurality of slots spaced horizontally are provided on opposite sides of the inner box structure, with the slots on both sides corresponding to each other to form multiple slot assemblies. The wafers of the embodiment of the present application can be inserted into the slot assemblies in a vertical direction, with the edges of the wafers abutting against the slots on both sides. The embodiment of the present application prevents the wafers from shifting in the left and right directions by the abutment of the slots against the edges of the wafers. A pressing structure is provided within the first cover of the embodiment of the present application. When the first cover is fastened to the second cover, the pressing structure contacts the upper edge of the wafer and abuts the wafer against the bottom of the slot assembly. The pressing structure presses the wafer in the slot assembly, thereby limiting the wafer in the vertical direction and preventing the wafer from shifting in the vertical direction. The combination of the pressing structure and the slot assembly blocks the radial displacement of the wafer, thereby preventing the wafer from shaking in the radial direction. In addition, the pressing structure of the embodiment of the present application abuts against the circumferential sidewalls of the wafer, effectively preventing the wafer from rotating within the inner box structure. Compared to the prior art, the embodiment of the present application can not only effectively prevent radial shaking of the wafer, but also prevent circumferential rotation of the wafer, prevent friction on the wafer, and achieve reliable protection for the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 This is one of the structural diagrams of the wafer storage box according to the embodiment of the present application;

[0020] Figure 2 This is the second structural diagram of the wafer storage box according to the embodiment of the present application;

[0021] Figure 3 This is the third structural diagram of the wafer storage box according to the embodiment of the present application;

[0022] Figure 4 This is the fourth structural diagram of the wafer storage box according to the embodiment of the present application;

[0023] Figure 5 This is the fifth structural diagram of the wafer storage box according to the embodiment of the present application;

[0024] Figure 6This is the sixth structural diagram of the wafer storage box according to the embodiment of the present application;

[0025] Figure 7 This is the seventh structural diagram of the wafer storage box according to the embodiment of the present application;

[0026] Figure 8 This is the eighth structural diagram of the wafer storage box according to the embodiment of the present application;

[0027] Figure 9 This is the ninth structural diagram of the wafer storage box according to an embodiment of the present application.

[0028] icon:

[0029] 100-wafer storage box; 101-first cover; 102-second cover; 103-inner box structure; 104-slot; 105-slot assembly; 106-wafer; 107-pressing structure; 108-pressing portion; 109-abutment groove; 110-guide slope; 111-first V-shaped elastic pressing member; 112-second V-shaped elastic pressing member; 113-connecting rod; 114-assembly spring; 115-assembly buckle; 116-assembly hole; 117-plug-in column; 118-notch. DETAILED DESCRIPTION

[0030] To make the objectives, technical solutions, and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Generally, the components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0031] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present application. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments in the present application without creative work are within the scope of protection of the present application.

[0032] It should be noted that similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings. In addition, the terms "first," "second," "third," etc. are used only to distinguish the descriptions and are not to be understood as indicating or implying relative importance.

[0033] It should also be noted that, in the description of this application, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0034] At present, wafer storage boxes 100 are used to store wafers 106, especially for thin wafers 106. Placing the wafers 106 in the wafer box can reduce the risk of the wafers 106 being broken. The prior art usually stacks the wafers 106 horizontally in the wafer storage box 100. Due to vibrations generated during transportation, the wafers 106 may shake or rotate in the wafer storage box 100 due to insecure fixation, which may easily cause friction between adjacent wafers 106 or friction between the wafers 106 and the inner wall of the wafer storage box 100. Long-term friction will produce a large amount of particle debris, thereby contaminating the wafers. In addition, due to the insecure fixation of the wafers 106 in the wafer storage box 100, the wafers 106 may also be easily broken, which is not conducive to the safe storage of the wafers 106.

[0035] In order to solve the above technical problems, an embodiment of the present application provides a wafer storage box 100.

[0036] Reference Figure 1 、 Figure 2 、 Figure 3 As shown, an embodiment of the present application provides a wafer storage box 100, including a first cover body 101 and a second cover body 102; the first cover body 101 and the second cover body 102 are buckled together to form a accommodating cavity for storing wafers 106; an inner box structure 103 is provided in the accommodating cavity, and the inner box structure 103 is provided with a plurality of slots 104 arranged at intervals in the horizontal direction on two opposite sides, and the slots 104 on both sides correspond to each other one by one to form a plurality of slot assemblies 105.

[0037] Reference Figure 6 As shown, the wafer 106 can be inserted into the slot assembly 105 in the vertical direction, and the edges of the wafer 106 on both sides abut against the slots 104 on both sides; a pressing structure 107 is set in the first cover 101, and when the first cover 101 is buckled on the second cover 102, refer to Figure 8 、 Figure 9 As shown, the pressing structure 107 contacts the upper side edge of the wafer 106 and makes the wafer 106 abut against the bottom of the socket assembly 105; the abutment of the pressing structure 107 and the socket assembly 105 on the wafer 106 is used to prevent the wafer 106 from moving radially.

[0038] The wafer storage box 100 provided in the embodiment of the present application includes a first cover 101 and a second cover 102. The first cover 101 and the second cover 102 engage to form a storage chamber for storing wafers 106. An inner box structure 103 is disposed within the storage chamber in the embodiment of the present application. A plurality of slots 104 are disposed on opposite sides of the inner box structure 103, arranged horizontally and spaced apart. The slots 104 on either side correspond to each other to form a plurality of slot assemblies 105.

[0039] It should be noted that the inner box structure 103 of the embodiment of the present application can be provided as a separate structural member, or can be integrally formed with the second shell. In other words, a slot 104 and other structures can be formed on the inner wall of the second cover 102.

[0040] Preferably, an independent inner box structure 103 is inserted into the cavity of the second cover 102, and wafers 106 are placed through multiple slot assemblies 105 formed on the inner box structure 103 and arranged at intervals in the horizontal direction. When the wafers 106 are inserted into the slot assemblies 105, there is a gap between two adjacent slot assemblies 105, so there is a gap between adjacent wafers 106, thereby preventing adjacent wafers 106 from contacting each other, and fundamentally eliminating friction and collision between wafers 106.

[0041] In addition, the inner box structure 103 and the second cover 102 can be detachably connected by means of snap connection or bolts.

[0042] The wafer 106 of the present embodiment can be inserted into the slot assembly 105 in a vertical direction, and the edges of the wafer 106 abut against the slots 104 on both sides. The abutment of the slots 104 on the edges of the wafer 106 prevents the wafer 106 from shifting in the left and right directions.

[0043] It should be noted that the embodiment of the present application can insert the socket assembly 105 in a vertical direction. Those skilled in the art can tilt the wafer 106 as needed by appropriately tilting the socket 104 at a certain angle. It should be noted that vertically inserting the wafer 106 can not only maximize the space of the accommodating cavity, but also prevent the contact portion of the wafer 106 and the socket 104 from being subjected to greater pressure, which is conducive to reducing the degree of wear between the edge of the wafer 106 and the socket 104.

[0044] In the embodiment of the present application, a pressing structure 107 is provided within the first cover 101. When the first cover 101 is fastened to the second cover 102, the pressing structure 107 contacts the upper edge of the wafer 106 and causes the wafer 106 to abut against the bottom of the slot assembly 105. By pressing the wafer 106 within the slot assembly 105, the pressing structure 107 limits the vertical position of the wafer 106, preventing the wafer 106 from shifting in the vertical direction. The combination of the pressing structure 107 and the slot assembly 105 blocks the radial displacement of the wafer 106, thereby preventing the wafer 106 from shaking in the radial direction.

[0045] Furthermore, the pressing structure 107 of the embodiment of the present application abuts against the circumferential sidewalls of the wafer 106, effectively preventing the wafer 106 from rotating within the inner box structure 103. Compared to the prior art, the embodiment of the present application not only effectively prevents radial shaking of the wafer 106, but also prevents circumferential rotation of the wafer 106, preventing friction on the wafer 106 and thus reliably protecting the wafer 106.

[0046] Reference Figure 4 As shown, as an optional embodiment, the pressing structure 107 includes a plurality of pressing parts 108 arranged at intervals along the circumference of the wafer 106; an abutment groove 109 is opened on the pressing part 108, and the edge of the wafer 106 is inserted into the abutment groove 109 and abuts against the bottom of the abutment groove 109.

[0047] It should be noted that the pressing structure 107 of the embodiment of the present application has multiple pressing portions 108. For example, there are four pressing portions 108 spaced apart circumferentially around the wafer 106. For example, there are six pressing portions 108 spaced apart circumferentially around the wafer 106.

[0048] The embodiment of the present application can press multiple locations on the edge of the wafer 106 through the provision of the pressing portion 108, thereby limiting the radial movement of the wafer 106 and effectively preventing the wafer 106 from shaking in the radial direction.

[0049] Further, refer to Figure 8 、 Figure 9 As shown, as an optional embodiment, the pressing structure 107 of the embodiment of the present application includes a first V-shaped elastic pressing member 111 and a second V-shaped elastic pressing member 112 axially symmetrically arranged; two pressing portions 108 are provided at both ends of the first V-shaped elastic pressing member 111, and two pressing portions 108 are provided at both ends of the second V-shaped elastic pressing member 112.

[0050] The embodiment of the present application utilizes a first V-shaped elastic pressing member 111 and a second V-shaped elastic pressing member 112 to provide elastic pressure on the upper portion of the wafer 106. The first V-shaped elastic pressing member 111 and the second V-shaped elastic pressing member 112 are provided with two elastic arms, each connected to the pressing portion 108, so that the pressing portion 108 in contact with the wafer 106 can generate an elastic pressing force. This elastic pressing force prevents the wafer 106 from rotating, eliminates friction caused by the wafer 106's rotation, and ensures safe storage of the wafer 106.

[0051] Better, refer to Figure 9 As shown, the angle between the line connecting the mutually adjacent pressing portions 108 of the first V-shaped elastic pressing member 111 and the second V-shaped elastic pressing member 112 and the center of the wafer 106 is 30-46°.

[0052] Better, refer to Figure 9 As shown, the angle between the pressing portions 108 of the first V-shaped elastic pressing member 111 and the second V-shaped elastic pressing member 112 which are separated from each other and the center of the wafer 106 is 65-85°.

[0053] It should be noted that those skilled in the art may adjust the angle as needed, in order to provide elastic pressing support for the edge of the wafer 106 .

[0054] Reference Figure 5 As shown, as an optional embodiment, the abutment groove 109 is provided with a guide bevel 110 on one side or both sides of the wafer 106, and the guide bevel 110 is used to increase the opening of the abutment groove 109. When the wafer 106 enters the abutment groove 109, the guide bevel 110 guides the edge of the wafer 106.

[0055] In the embodiment of the present application, a guiding bevel 110 is provided at the opening of the abutment groove 109. When the first cover body 101 is buckled onto the second cover body 102, the opening of the abutment groove 109 is enlarged by the guiding bevel 110, so that the edge of the wafer 106 can smoothly contact the bottom of the abutment groove 109, which is conducive to achieving precise positioning.

[0056] Reference Figure 4 、 Figure 7 As shown, as an optional embodiment, there are multiple pressing structures 107 and they correspond one-to-one to the slot assemblies 105; the multiple pressing structures 107 are connected in series through a horizontally extending connecting rod 113, and assembly springs 114 are provided at both ends of the extending direction of the connecting rod 113; the first cover body 101 is provided with an assembly buckle 115 that cooperates with the assembly spring 114.

[0057] Furthermore, the connecting rod 113 is provided with assembly holes 116 arranged at intervals, and the first cover 101 is provided with plug-in posts 117 that are connected to the assembly holes 116 in a one-to-one correspondence.

[0058] It should be noted that those skilled in the art may also use other assembly methods to connect the pressing structure 107 to the first cover 101 . The above-mentioned snap-fitting method facilitates quick assembly.

[0059] Reference Figure 3 As shown, as an optional embodiment, each slot 104 includes a vertically extending straight plug-in section and an arc support section arranged circumferentially along the wafer 106; a spacing is provided between the ends of the two arc support sections that are close to each other to form a gap 118 at the lower part of the wafer 106.

[0060] A clamping structure is provided on the arc supporting section, and the clamping structure abuts against two opposite side surfaces of the wafer 106 .

[0061] It should be noted that the bottom of the abutment groove 109 can clamp the upper edge of the wafer 106 to prevent the wafer 106 from shaking along the axis of the wafer 106. The clamping structure can clamp the bottom edge of the wafer 106 to prevent the wafer 106 from shaking along the axis of the wafer 106. Combined with the abutment of the edges on both sides of the wafer 106 by the slot 104; the pressing structure 107 contacts the upper edge of the wafer 106, and the wafer 106 abuts against the bottom of the slot assembly 105. As a whole, the embodiment of the present application realizes stable storage of the wafer 106, prevents the wafer 106 from shaking in the wafer storage box 100, avoids the generation of particle debris to contaminate the wafer 106, and realizes safe and reliable storage of the wafer 106.

[0062] The above description is merely a preferred embodiment of the present application and is not intended to limit the present application. Various modifications and variations are possible for those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. A wafer storage box (100), characterized in that: The invention comprises a first cover body (101) and a second cover body (102); the first cover body (101) and the second cover body (102) are buckled together to form a storage cavity for storing a wafer (106); an inner box structure (103) is provided in the storage cavity, and the inner box structure (103) is provided with a plurality of slots (104) arranged at intervals along the horizontal direction on two opposite sides, and the slots (104) on both sides correspond to each other to form a plurality of slot assemblies (105); the wafer (106) can be inserted into the slot assemblies (105) in the vertical direction, and the wafer ( The edges on both sides of the wafer (106) abut against the slots (104) on both sides; a pressing structure (107) is provided in the first cover body (101); when the first cover body (101) is buckled on the second cover body (102), the pressing structure (107) contacts the upper side edge of the wafer (106) and makes the wafer (106) abut against the bottom of the slot assembly (105); the abutment of the pressing structure (107) and the slot assembly (105) against the wafer (106) is used to prevent the wafer (106) from moving radially.

2. The wafer storage box (100) according to claim 1, characterized in that: The pressing structure (107) includes a plurality of pressing parts (108) arranged at intervals along the circumference of the wafer (106); an abutment groove (109) is provided on the pressing part (108), and the edge of the wafer (106) is inserted into the abutment groove (109) and abuts against the bottom of the abutment groove (109).

3. The wafer storage box (100) according to claim 2, characterized in that: The abutment groove (109) is provided with a guiding bevel (110) on one side or both sides of the wafer (106), and the guiding bevel (110) is used to increase the opening of the abutment groove (109). When the wafer (106) enters the abutment groove (109), the guiding bevel (110) guides the edge of the wafer (106).

4. The wafer storage box (100) according to claim 2 or 3, characterized in that: The pressing structure (107) comprises a first V-shaped elastic pressing piece (111) and a second V-shaped elastic pressing piece (112) which are axially symmetrically arranged; two pressing portions (108) are provided at both ends of the first V-shaped elastic pressing piece (111), and two pressing portions (108) are provided at both ends of the second V-shaped elastic pressing piece (112).

5. The wafer storage box (100) according to claim 4, characterized in that: The angle between the pressing parts (108) of the first V-shaped elastic pressing piece (111) and the second V-shaped elastic pressing piece (112) close to each other and the center of the wafer (106) is 30-46 degrees.

6. The wafer storage box (100) according to claim 4, characterized in that: The angle between the pressing parts (108) of the first V-shaped elastic pressing member (111) and the second V-shaped elastic pressing member (112) that are separated from each other and the center of the wafer (106) is 65-85°.

7. The wafer storage box (100) according to any one of claims 1 to 3 and claims 5 to 6, characterized in that: There are multiple pressing structures (107) and they correspond one to one with the slot assemblies (105); the multiple pressing structures (107) are connected in series via a horizontally extending connecting rod (113), and both ends of the connecting rod (113) in the extending direction are provided with assembly springs (114); the first cover body (101) is provided with an assembly buckle (115) that cooperates with the assembly springs (114).

8. The wafer storage box (100) according to claim 7, characterized in that: The connecting rod (113) is provided with assembly holes (116) arranged at intervals, and the first cover (101) is provided with plug-in columns (117) connected to the assembly holes (116) in a one-to-one correspondence.

9. The wafer storage box (100) according to any one of claims 1 to 3 and claims 5 to 6, characterized in that: Each of the slots (104) comprises a vertically extending linear plug-in section and an arcuate supporting section arranged circumferentially along the wafer (106); a distance is provided between the ends of the two arcuate supporting sections that are close to each other, so as to form a notch (118) at the bottom of the wafer (106).

10. The wafer storage box (100) according to claim 9, characterized in that: A clamping structure is provided on the arc supporting section, and the clamping structure abuts against two opposite side surfaces of the wafer (106).

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