Double-track guide die vacuum small turntable

Abstract

The utility model relates to the technical field of semiconductor chip processing, in particular to a double-track guide-mode vacuum small turntable. Comprising a slewing bearing seat, and further comprises a gas distribution disc, a gas inlet pipe, a gas outlet pipe, a gas inlet pipe, a gas outlet pipe, a gas inlet pipe and a gas outlet pipe, and the gas distribution disc is mounted at the top of the slewing bearing seat; a left vacuum bin and a right vacuum bin are concentrically formed in the gas distribution disc; the left vacuum bin air inlet and the right vacuum bin air inlet are formed in the bottoms of the left vacuum bin and the right vacuum bin respectively; the left guide mold vacuum breaking port and the right guide mold vacuum breaking port are respectively formed in the circumferential side wall of the gas distribution disc and are respectively communicated with the left vacuum bin and the right vacuum bin; and the guide mold disc is installed at the top of the air distribution disc through a supporting sleeve, a plurality of left guide molds and a plurality of right guide molds are arranged on the guide mold disc in the circumferential direction in an array mode, and left air holes and right air holes are formed in the left guide molds and the right guide molds correspondingly. According to the utility model, the function of free switching or simultaneous operation of a single track and double tracks is realized, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor chip processing, in particular to a double-track guide mold vacuum small turntable. Background Art

[0002] Currently, semiconductor chip marking and inspection processes require a guide-die vacuum turntable to position and rotate the chips to various workstations. However, most existing guide-die vacuum turntables are single-track structures, which cannot switch between single-track and dual-track guides or use them simultaneously, resulting in low work efficiency. Utility Model Content

[0003] The purpose of the utility model is to provide a double-track guide mold vacuum small turntable, so that the single / double-track guide molds can be freely switched for use or used simultaneously, thereby improving the working efficiency.

[0004] In order to solve the above technical problems, the utility model provides a double-track guide mold vacuum small turntable, including a slewing support seat, and also includes:

[0005] An air distribution plate is installed on the top of the slewing support seat, and a left vacuum chamber and a right vacuum chamber are opened concentrically in the air distribution plate;

[0006] The left vacuum chamber air inlet and the right vacuum chamber air inlet are respectively opened at the bottom of the left vacuum chamber and the right vacuum chamber;

[0007] The left guide die vacuum breaking port and the right guide die vacuum breaking port are respectively opened on the circumferential side wall of the gas distribution plate and are respectively connected to the left vacuum chamber and the right vacuum chamber;

[0008] The guide mold plate is installed on the top of the gas distribution plate through a support sleeve, and a plurality of left guide molds and right guide molds are arranged in a circumferential array on the guide mold plate. The left guide mold and the right guide mold are respectively provided with left air holes and right air holes, and the left air holes and the right air holes are respectively connected to the left vacuum chamber and the right vacuum chamber through air pipes.

[0009] Preferably, the left vacuum chamber and the right vacuum chamber are both annular cavities.

[0010] Preferably, it also includes an L-shaped through hole, and two of the L-shaped through holes are respectively opened at the bottom of the gas distribution plate, so that the left guide mold vacuum breaking port and the right guide mold vacuum breaking port are respectively connected to the left vacuum chamber and the right vacuum chamber.

[0011] Preferably, it also includes an air pipe connecting head, which is respectively installed on the bottom of the left air hole and the right air hole, and the top of the left vacuum chamber and the right vacuum chamber, for connecting with the upper and lower ends of the air pipe.

[0012] Preferably, the number of the left guide molds and the right guide molds arranged circumferentially is eight.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] The utility model opens a left vacuum bin and a right vacuum bin, as well as a left vacuum bin air inlet and a right vacuum bin air inlet concentrically in the above-mentioned air distribution disk, thereby realizing the function of free switching or simultaneous operation of single and double tracks, thereby improving work efficiency; through the setting of the left guide mold vacuum breaking port and the right guide mold vacuum breaking port, it is possible to switch the vacuum adsorption product to the upward blowing product, so as to improve the effect of the suction pen to suck it away quickly and smoothly. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a structural front view of a double-track guide mold vacuum small turntable of the utility model.

[0016] Figure 2 This is a rear view of the structure of a double-track guide mold vacuum small turntable of the utility model.

[0017] Figure 3 This is a bottom view of the structure of the gas distribution plate in the utility model.

[0018] Figure 4 This is a structural exploded view of the gas distribution plate in this utility model.

[0019] In the figure: 1-slewing bearing seat, 2-gas distribution plate, 3-left vacuum chamber, 4-right vacuum chamber, 5-left vacuum chamber air inlet, 6-right vacuum chamber air inlet, 7-left guide mold vacuum breaking port, 8-right guide mold vacuum breaking port, 9-guide mold plate, 91-support sleeve, 10-left guide mold, 11-right guide mold, 12-L-shaped through hole, 13-trachea connector, 14-chip product. DETAILED DESCRIPTION

[0020] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are greatly simplified and not to exact scale, and are intended solely to facilitate and clearly illustrate the embodiments of the present invention.

[0021] like Figures 1 to 4 As shown, the embodiment of the present invention specifically provides a double-track guide mold vacuum small turntable, including a slewing support seat 1, which is connected to an external driving mechanism to realize the slewing function of the slewing support seat 1, and also includes:

[0022] The gas distribution plate 2 is installed on the top of the slewing bearing 1, and the left vacuum chamber 3 and the right vacuum chamber 4 are opened concentrically in the gas distribution plate 2. By setting the left vacuum chamber 3 and the right vacuum chamber 4 separately, single-track and double-track switching or simultaneous operation can be achieved;

[0023] The left vacuum chamber air inlet 5 and the right vacuum chamber air inlet 6 are respectively opened at the bottom of the left vacuum chamber 3 and the right vacuum chamber 4;

[0024] The left guide mold vacuum breaking port 7 and the right guide mold vacuum breaking port 8 are respectively provided on the circumferential side wall of the gas distribution plate 2 and are respectively connected to the left vacuum chamber 3 and the right vacuum chamber 4; by providing the left guide mold vacuum breaking port 7 and the right guide mold vacuum breaking port 8, it is possible to switch from vacuum adsorption of the product to upward blowing of the product, thereby improving the effect of the suction pen in being able to quickly and smoothly suck it away;

[0025] The guide plate 9 is mounted on top of the gas distribution plate 2 via a support sleeve 91. A plurality of left and right guide plates 10, 11 are arranged circumferentially on the guide plate 9. Left and right air holes are defined within the left and right guide plates 10, 11, respectively. These holes are connected to the left and right vacuum chambers 3 and 4, respectively, via air pipes. The chip to be tested can be placed within the left and right guide plates 10, 11, and positioned by vacuum suction on the left and right air holes.

[0026] The left vacuum chamber 3 and the right vacuum chamber 4 are both annular cavities to ensure the stability of the guide mold vacuum adsorption products at each work station.

[0027] It also includes L-shaped through holes 12. Two L-shaped through holes 12 are respectively opened at the bottom of the gas distribution plate 2, so that the left guide mold vacuum breaking port 7 and the right guide mold vacuum breaking port 8 are connected to the left vacuum chamber 3 and the right vacuum chamber 4 respectively.

[0028] It also includes an air pipe connector 13, which is respectively installed at the bottom of the left air hole and the right air hole, and the top of the left vacuum chamber 3 and the right vacuum chamber 4, for connecting with the upper and lower ends of the air pipe.

[0029] The number of the left guide dies 10 and the right guide dies 11 arranged circumferentially is eight.

[0030] It also includes the following workflows:

[0031] When single-track operation is required, when the left guide mold 10 is operating on the single track, the vacuum enters the left vacuum chamber 3 inside the gas distribution disk 2 from the left vacuum chamber air inlet 5; and then is distributed from the left vacuum chamber 3 to the left air holes on several left guide molds 10, so that the chip product 14 is sucked by vacuum inside the left guide mold 10 to prevent the product from flying away during the rotation process. When the product marking and inspection are completed, the product rotates to just below the suction pen, and the left guide mold 10 breaks the vacuum and intakes air through the left guide mold vacuum breaking port 7, so that the product suction inside the left guide mold 10 is changed to blowing the product upward, so that the suction pen can easily take away the product; after the product is taken away, the left guide mold 10 breaks the vacuum and cuts off the air, and the cycle is in sequence; when the right guide mold 11 is operating on the single track, the vacuum enters the right vacuum chamber 4 inside the gas distribution disk 2 from the right vacuum chamber air inlet 6; and then is distributed from the right vacuum chamber 4 of the gas distribution disk 2 to the right air hole on the right guide mold 11, so that the chip product 14 is sucked by vacuum inside the right guide mold 11 to prevent the product from flying away during the rotation process. After the product is taken away, the right guide mold 11 and the left guide mold 10 break the vacuum and cut off the air, and the cycle is in sequence, thereby realizing the function of single and double tracks being able to switch freely or operate simultaneously, thereby improving work efficiency.

[0032] The above description is only a description of the preferred embodiment of the present invention and does not limit the scope of the present invention. Any changes and modifications made by ordinary technicians in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A double-track guide mold vacuum small turntable, comprising a rotary support seat (1), characterized in that: Also includes: An air distribution plate (2) is installed on the top of the slewing support seat (1), and a left vacuum chamber (3) and a right vacuum chamber (4) are cocentrically provided in the air distribution plate (2); The left vacuum chamber air inlet (5) and the right vacuum chamber air inlet (6) are respectively provided at the bottom of the left vacuum chamber (3) and the right vacuum chamber (4); The left guide mold vacuum breaking port (7) and the right guide mold vacuum breaking port (8) are respectively provided on the circumferential side wall of the gas distribution plate (2) and are respectively connected to the left vacuum chamber (3) and the right vacuum chamber (4); A guide mold plate (9) is mounted on the top of the gas distribution plate (2) through a support sleeve (91), and a plurality of left guide molds (10) and right guide molds (11) are arranged in a circumferential array on the guide mold plate (9). A left air hole and a right air hole are respectively opened in the left guide mold (10) and the right guide mold (11), and the left air hole and the right air hole are respectively connected to the left vacuum chamber (3) and the right vacuum chamber (4) through air pipes.

2. A double-track guide mold vacuum small turntable according to claim 1, characterized in that: The left vacuum chamber (3) and the right vacuum chamber (4) are both annular cavities.

3. A double-track guide mold vacuum small turntable according to claim 1, characterized in that: It also includes L-shaped through holes (12), two of which are respectively opened at the bottom of the gas distribution plate (2), so that the left guide mold vacuum breaking port (7) and the right guide mold vacuum breaking port (8) are respectively connected to the left vacuum chamber (3) and the right vacuum chamber (4).

4. A double-track guide mold vacuum small turntable according to claim 1, characterized in that: It also includes an air pipe connector (13), which is respectively installed on the bottom of the left air hole and the right air hole, and the top of the left vacuum chamber (3) and the right vacuum chamber (4), and is used to communicate with the upper and lower ends of the air pipe.

5. A double-track guide mold vacuum small turntable according to any one of claims 1 to 4, characterized in that: The number of the left guide molds (10) and the right guide molds (11) arranged circumferentially is eight.

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