Evaporation source and evaporation coating equipment

Abstract

The utility model discloses an evaporation source and evaporation coating equipment. The evaporation source comprises an installation support, a first evaporation assembly and a second evaporation assembly. Wherein the mounting bracket comprises a first mounting part and a second mounting part positioned on the outer side of the first mounting part; the first evaporation assembly comprises a heating part and a first crucible, the heating part is mounted on the first mounting part, and the first crucible is mounted on the heating part; the second evaporation assembly comprises a rotating table, a heat insulation part and a second crucible, the rotating table is rotationally arranged on the second mounting part, the second crucible is mounted on the rotating table and used for absorbing heat from the heating part, and at least part of the peripheral side of the second crucible is provided with the heat insulation part. According to the evaporation source and the evaporation coating equipment, the problems that in the prior art, when to-be-coated materials with melting point differences on a conducting film need to be heated and evaporated independently through corresponding heating sources, the energy consumption needed by the evaporation source is large, and the coating cost is high can be solved.

Description

Technical Field

[0001] The utility model relates to the technical field of thin film processing, in particular to an evaporation source and evaporation coating equipment. Background Art

[0002] Conductive film is a polymer material with a metal coating on its surface. It is widely used in lithium-ion batteries, primarily as a current collector. The coating on the conductive film can be obtained using thermal evaporation and / or magnetron sputtering. Thermal evaporation is sensitive to the melting point of the material being plated. For materials with higher melting points, the evaporation source must provide a higher evaporation temperature. For materials with lower melting points, the evaporation source can simply provide a lower evaporation temperature to achieve thermal evaporation of the corresponding material.

[0003] In some conductive film coating structures, different coating structures or different materials within the same coating layer have varying melting points. For example, the melting point of a copper layer may be higher than that of other functional films deposited on top of it. When a conductive film comprises a coating structure formed by evaporating materials with different melting points, the current evaporation source structure limits the need for separate heating and evaporation of these materials with different melting points. This results in high energy consumption for the evaporation source and high coating costs. Utility Model Content

[0004] The main purpose of the present utility model is to provide an evaporation source and an evaporation coating device, which at least solves the problem in the prior art that when materials to be plated on a conductive film with different melting points need to be heated and evaporated separately using corresponding heating sources, the evaporation source requires large energy consumption and the coating cost is high.

[0005] According to one aspect of the present invention, there is provided an evaporation source, comprising:

[0006] A mounting bracket, the mounting bracket comprising a first mounting portion and a second mounting portion located outside the first mounting portion;

[0007] a first evaporation assembly, the first evaporation assembly comprising a heating portion and a first crucible, the heating portion being mounted on the first mounting portion, and the first crucible being mounted on the heating portion;

[0008] The second evaporation component includes a rotating table, an insulating portion, and a second crucible. The rotating table is rotatably arranged on the second mounting portion. The second crucible is mounted on the rotating table to absorb heat from the heating portion. The outer peripheral side of the second crucible is at least partially provided with the insulating portion.

[0009] Furthermore, the heat insulation part includes a graphite block, a semicircular groove is provided on the graphite block, the second crucible is installed in the semicircular groove, and the second crucible includes a first area blocked by the graphite block and a second area exposed outside the graphite block.

[0010] Furthermore, a groove is provided on the rotating table, the heat insulating portion is at least partially provided in the groove, the second crucible is installed in the groove, and the heights of the heat insulating portion and the second crucible are both greater than the depth of the groove.

[0011] Furthermore, the evaporation source further includes a motor, a rotating shaft, a first gear and a second gear;

[0012] The first gear is fixedly sleeved on the output shaft of the motor, and the second gear is fixedly sleeved on the rotating shaft and meshes with the first gear;

[0013] The rotating shaft is fixedly connected to the rotating platform, and the rotating shaft is rotatably connected to the second mounting portion through a bearing.

[0014] Furthermore, the first mounting portion includes a mounting groove, and the second mounting portion includes a mounting platform, and the mounting platform is connected to the top end of the side wall of the mounting groove.

[0015] Furthermore, the heating portion includes a heating electrode, a plurality of heating slots are provided on the heating electrode, the first crucible includes a plurality of first crucibles, and the first crucibles are installed in a one-to-one correspondence with the heating slots;

[0016] The second evaporation components include a plurality of second evaporation components, and the plurality of second evaporation components are arranged at intervals along the outer side of the first installation portion.

[0017] Furthermore, the first evaporation component further includes a first insulating layer and a heat preservation layer, wherein the first insulating layer is provided to cover the outer peripheral side of the heating electrode, and the heat preservation layer is provided to cover the outer peripheral side of the first insulating layer.

[0018] Furthermore, the first evaporation component further includes a second insulating layer, the second insulating layer is provided to cover the top surface of the thermal insulation layer, the second insulating layer is provided with an avoidance gap, and the first crucible is passed through the avoidance gap.

[0019] Furthermore, the thermal insulation layer includes a first thermal insulation layer and a second thermal insulation layer, the first thermal insulation layer is wrapped around the outer peripheral side of the heating part, and the second thermal insulation layer is arranged on the outer peripheral side of the first thermal insulation layer, wherein the first thermal insulation layer is a graphite carbon felt layer, and the second thermal insulation layer is a thermal insulation cotton layer.

[0020] On the other hand, the present invention further provides an evaporation coating device, which includes the above-mentioned evaporation source.

[0021] In the present invention, the evaporation source can be used to deposit materials with different melting points. When different film materials need to be deposited, the film material with a higher melting point is placed in the first crucible, while the film material with a lower melting point is placed in the second crucible. The film material in the first crucible can be directly heated by the heating unit to evaporate and deposit it on the predetermined base film. The second crucible, located outside the first evaporation assembly, absorbs heat from the heating unit to thermally evaporate the film material with a lower melting point within it, depositing it on the predetermined base film.

[0022] In addition, since the second evaporation component in the utility model is provided with a rotating table and a heat-insulating portion, when the rotating table rotates, it can drive the second crucible to rotate. During this process, the heat-insulating portion provided on the outer peripheral side of the rotating table can be rotated to between the heating portion and the second crucible, or it can be rotated to the side of the second crucible away from the heating portion. When the heat-insulating portion is located between the heating portion and the second crucible, the second crucible absorbs less heat from the heating portion; when the heat-insulating portion is located on the side of the second crucible away from the heating portion, the second crucible absorbs more heat from the heating portion. In other words, by providing a rotating table to drive the second crucible and the heat-insulating portion to rotate, the utility model can adjust the amount of heat absorbed by the second crucible from the heating portion, thereby facilitating the adjustment of the heating temperature of the second crucible.

[0023] Compared with the prior art, the evaporation source in the present invention only needs to be equipped with one heating part to evaporate at least two film materials with different melting points, and the evaporation temperature of the low-melting-point film material is easy to adjust, which can effectively reduce the energy consumption of the evaporation source and ultimately achieve the purpose of reducing the coating cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0025] Figure 1 This is a schematic structural diagram of the evaporation source disclosed in an embodiment of the present utility model.

[0026] The above drawings include the following reference numerals:

[0027] 10. Mounting bracket; 11. First mounting portion; 111. Mounting groove; 12. Second mounting portion; 121. Mounting platform; 20. First evaporation component; 21. Heating portion; 211. Heating electrode; 2111. Heating tank; 22. First crucible; 23. First insulating layer; 24. Second insulating layer; 241. Avoidance gap; 25. First thermal insulation layer; 26. Second thermal insulation layer; 30. Second evaporation component; 31. Rotating table; 311. Groove; 32. Thermal insulation portion; 321. Semicircular groove; 33. Second crucible; 331. First region; 332. Second region; 34. Rotating shaft; 35. Output shaft; 36. First gear; 37. Second gear. DETAILED DESCRIPTION

[0028] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0029] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0030] Unless otherwise specifically stated, the relative arrangement of the parts and steps, the numerical expressions and the numerical values set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. The techniques, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the techniques, methods and equipment should be considered as part of the authorization specification. In all examples shown and discussed here, any specific values should be interpreted as being merely exemplary and not as limiting. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar numbers and letters represent similar items in the following figures, and therefore, once an item is defined in one figure, it does not need to be further discussed in subsequent figures.

[0031] As mentioned in the background technology, in the coating structure of a conductive film, different coating structures or different materials in the same coating have certain differences in melting points. When a conductive film has a coating structure formed by evaporating materials with different melting points, due to the structure of the current evaporation source, the materials with different melting points need to be heated and evaporated separately using corresponding heating sources. This results in high energy consumption of the evaporation source and high coating costs. To this end, the present application proposes an evaporation source that can use the heat generated when evaporating a high-melting-point film material to heat a low-melting-point film material, thereby reducing energy consumption and lowering the production cost of the conductive film. The evaporation source of the present application will be described in detail below with reference to the accompanying drawings.

[0032] See also Figure 1 As shown, according to an embodiment of the present invention, an evaporation source is provided, which includes a mounting bracket 10 , a first evaporation component 20 , and a second evaporation component 30 .

[0033] In this embodiment, the mounting bracket 10 includes a first mounting portion 11 and a second mounting portion 12 located outside the first mounting portion 11; the first evaporation component 20 includes a heating portion 21 and a first crucible 22, the heating portion 21 is mounted on the first mounting portion 11, and the first crucible 22 is mounted on the heating portion 21; the second evaporation component 30 includes a rotating table 31, an insulating portion 32 and a second crucible 33, the rotating table 31 is rotatably set on the second mounting portion 12, the second crucible 33 is mounted on the rotating table 31 for absorbing heat from the heating portion 21, and the outer peripheral side of the second crucible 33 is at least partially provided with an insulating portion 32.

[0034] In actual use, the evaporation source in this embodiment can be used to evaporate materials with different melting points. When different film materials need to be evaporated, the film material with a higher melting point is placed in the first crucible 22, while the film material with a lower melting point is placed in the second crucible 33. The film material in the first crucible 22 can be directly heated by the heating unit 21 for evaporation and deposition onto the desired base film. The second crucible 33, located outside the first evaporation assembly 20, absorbs heat from the heating unit 21 to thermally evaporate the film material with a lower melting point within it for deposition onto the desired base film.

[0035] Furthermore, because the second evaporation assembly 30 in this embodiment is provided with a rotating platform 31 and a heat insulating portion 32, when the rotating platform 31 rotates, it can drive the second crucible 33 to rotate. During this process, the heat insulating portion 32, located on the outer periphery of the rotating platform 31, can rotate between the heating portion 21 and the second crucible 33, or to the side of the second crucible 33 facing away from the heating portion 21. When the heat insulating portion 32 is located between the heating portion 21 and the second crucible 33, the second crucible 33 absorbs less heat from the heating portion 21; when the heat insulating portion 32 is located on the side of the second crucible 33 facing away from the heating portion 21, the second crucible 33 absorbs more heat from the heating portion 21. In other words, by providing the rotating platform 31 to drive the second crucible 33 and the heat insulating portion 32 to rotate, this embodiment can adjust the amount of heat absorbed by the second crucible 33 from the heating portion 21, thereby facilitating adjustment of the heating temperature of the second crucible 33.

[0036] Compared with the prior art, the evaporation source in this embodiment only needs to be equipped with a heating part 21 to evaporate at least two film materials with different melting points, and the evaporation temperature of the low-melting-point film material is easy to adjust, which can effectively reduce the energy consumption of the evaporation source and ultimately achieve the purpose of reducing the coating cost.

[0037] In this embodiment, the mounting bracket 10 is a metal guard plate that can be deformed and fixedly connected to ensure the stability of the first evaporation component 20 and the second evaporation component 30. The first crucible 22 is installed in the heating part 21, and the heating part 21 is used to heat the high melting point (i.e., melting point greater than or equal to 1000°C) film material in the first crucible 22 to evaporate it, thereby achieving coating on the conductive film. Optionally, the high melting point film material can be metallic copper. The second crucible 33 is used to heat and evaporate the low melting point (i.e., melting point less than or equal to 800°C) film material on the conductive film to evaporate the low melting point film material on the conductive film. Optionally, the low melting point film material includes materials such as tin and zinc. Since there are many types of low melting point film materials and their melting point temperatures are different, it is necessary to control the temperature in the second crucible 33. In the present application, the second crucible 33 is installed on the rotating table 31, and an insulation part 32 is provided on the outer peripheral side of the second crucible 33. In this way, the rotation of the rotating table 31 can drive the second crucible 33 to rotate, absorbing heat from the heating unit 21 and heating the second crucible 33. During actual production and processing, the rotation of the rotating table 31 is controlled according to actual needs to adjust the area of the second crucible 33 receiving heat radiation, thereby achieving temperature control in the second crucible 33 and facilitating the evaporation of the low-melting-point film material in the second crucible 33.

[0038] Specifically, in the present application, the heat insulating portion 32 is configured as a graphite block. Graphite has good high temperature resistance, the melting point of graphite is 3850±50°C, and the strength of graphite increases with increasing temperature, which not only provides a good heat insulation effect, but also has good durability. The graphite block in this embodiment is provided with a semicircular groove 321, and the second crucible 33 is installed in the semicircular groove 321, which can achieve fixation and partial shielding of the second crucible 33. Among them, a portion of the second crucible 33 is shielded by the graphite block, which is the first area 331. When the melting point of the film material in the second crucible 33 is low, the heat insulating portion 32 is driven by the rotating table 31 to be close to the first crucible 22, thereby reducing the area of the second crucible 33 directly exposed to heat radiation. The other part is exposed to the outside of the graphite block, which is the second area 332. When the melting point of the film material in the second crucible 33 is high, the rotary table 31 is rotated to make the second region 332 close to the first crucible 22 , and the second crucible 33 receives heat radiation to quickly evaporate the film material.

[0039] In this embodiment, the second crucible 33 and the insulation portion 32 remain relatively stationary. When the rotating platform 31 rotates, the second crucible 33 and the insulation portion 32 rotate simultaneously. For example, the second crucible 33 and the insulation portion 32 can be fixed by bonding, clamping, welding, etc.

[0040] like Figure 1 As shown, a groove 311 is provided on the rotating table 31 to facilitate the installation of the insulation portion 32 and the second crucible 33. The insulation portion 32 is at least partially disposed within the groove 311, and the second crucible 33 is disposed within the insulation portion 32 and also mounted on the groove 311. This structure is stable and reliable, and facilitates stable support and installation of the second crucible 33. For example, the insulation portion 32 can be fixed within the groove 311 by screws, pins, bolts, adhesive bonding, etc. The specific installation method is selected according to the actual production and processing process and is not specifically limited in this application.

[0041] When the evaporation source is working, the rotating table 31 is controlled to rotate, which can change the area of the second crucible 33 receiving the heat radiation generated by the first crucible 22, so as to facilitate the adjustment of the heating stability of the second crucible 33.

[0042] Furthermore, the height of the heat insulating portion 32 and the second crucible 33 in this embodiment is greater than the depth of the groove 311. This configuration prevents the sidewalls of the groove 311 on the rotating table 31 from blocking the outer surface of the second crucible 33, making it more suitable for the second crucible 33 to receive heat radiation.

[0043] In order to drive the rotating table 31 to rotate, the evaporation source also includes a motor (not shown in the figure), a rotating shaft 34, a first gear 36 and a second gear 37. During actual installation, the first gear 36 is fixedly mounted on the output shaft 35 of the motor, and the second gear 37 is fixedly mounted on the rotating shaft 34 and meshed with the first gear 36. The rotating shaft 34 is passed through the second mounting portion 12 and is rotatably connected to the second mounting portion 12 through a bearing. In this way, when the motor drives the rotating shaft 34 to rotate, it can drive the first gear 36 and the second gear 37, and finally drive the rotating table 31 to rotate through the rotating shaft 34 to change the area of the second crucible 33 receiving heat radiation. Furthermore, in this embodiment, the rotating shaft 34 is rotatably mounted on the second mounting portion 12 through a bearing, which can ensure the smoothness of rotation of the rotating shaft 34 to a certain extent and reduce the energy consumption of the motor.

[0044] Of course, in other embodiments of the present application, a motor, a reduction gearbox and other structures may be provided to drive the rotating table 31 to rotate. As long as they are other variations based on the concept of the present application, they are within the protection scope of the present application.

[0045] See again Figure 1 As shown, the first mounting portion 11 is a mounting recess 111, which facilitates positioning the first evaporation assembly 20, while the second mounting portion 12 includes a mounting platform 121, which is connected to the top of the side wall of the mounting recess 111 to facilitate supporting the second evaporation assembly 30 outside the mounting recess 111. In other words, the height of the mounting platform 121 in this embodiment is higher than the height of the mounting recess 111. With this arrangement, when the evaporation source is operating, the heat released by the heating portion 21 located in the mounting recess 111 is driven upward by the hot metal vapor, making it easier for the second crucible 33 mounted on the mounting platform 121 to absorb the heat, thereby improving the utilization rate of the heat released by the heating portion 21.

[0046] In the present application, the heating portion 21 includes a heating electrode 211, and a plurality of heating slots 2111 are provided on the heating electrode 211. For example, the number of heating slots 2111 may be 2, 3, 4, 5, etc., and the specific number is selected according to the size of the heating electrode 211 or actual production needs. Correspondingly, the first crucible 22 also includes a plurality of first crucibles 22. Optionally, the number of the first crucibles 22 may be 2, 3, 4, 5, etc. During actual installation, the first crucible 22 corresponds to the number of heating slots 2111, and is installed in the heating slots 2111 one-to-one. In this way, when the evaporation source is actually used, the first crucible 22 can be installed in different heating slots 2111 as needed to evaporate different quantities of high-melting-point film materials.

[0047] Optionally, multiple second evaporation assemblies 30 may be provided. For example, the number of second evaporation assemblies 30 may be two, three, four, five, six, or the like. Multiple second evaporation assemblies 30 may be spaced apart along the outer side of the first mounting portion 11. This allows for vapor deposition of varying quantities of low-melting-point film materials according to varying usage requirements.

[0048] like Figure 1 As shown, the first evaporation component 20 also includes a first insulating layer 23 and a thermal insulation layer. The first insulating layer 23 is disposed around the outer periphery of the heating electrode 211, and the thermal insulation layer is disposed around the outer periphery of the first insulating layer 23. With this arrangement, the first insulating layer 23 can be used to prevent the heating electrode 211 from conducting with external conductive structures, thereby preventing short circuits or safety incidents. The thermal insulation layer can be used to slow down heat loss from the heating portion 21, effectively reducing the energy consumption of the evaporation source. It is worth noting that the first insulating layer 23 in this application must be resistant to high temperatures to avoid being affected by the heating temperature of the heating portion 21. Exemplarily, the first insulating layer 23 can be made of glass, ceramic, ceramic fiber, polytetrafluoroethylene (PTFE), polyimide, polyetheretherketone (PEEK), etc. In this application, ceramic is preferably used as the insulating layer. Ceramics have the properties of high hardness, high temperature resistance, and low thermal conductivity, which can reduce heat loss from the outer periphery of the heating electrode 211 and are less susceptible to damage during actual production, further reducing production costs.

[0049] Furthermore, the first evaporation component 20 also includes a second insulating layer 24, which is arranged on the top surface of the thermal insulation layer, effectively avoiding the influence of the external environment on the heating electrode 211, and ensuring the process effect of the evaporation coating. Optionally, the second insulating layer 24 can be glass, ceramic, ceramic fiber, polytetrafluoroethylene (PTFE), polyimide, polyetheretherketone (PEEK), etc. In this embodiment, ceramic is preferably used as the second insulating layer 24. Ceramics can reduce the heat loss on the surface of the first evaporation component 20, and can effectively utilize the waste heat generated by the first crucible 22 to radiate heat to the second crucible 33 to change the temperature of the second crucible 33. In addition, an avoidance notch 241 is provided on the second insulating layer 24, and the first crucible 22 is passed through the avoidance notch 241 to be installed on the heating part 21, so as to facilitate the evaporation of high-melting-point film materials.

[0050] Furthermore, the thermal insulation layer includes a first thermal insulation layer 25 and a second thermal insulation layer 26. The first thermal insulation layer 25 is coated and arranged on the outer peripheral side of the heating part 21. In the present application, it is preferred that the first thermal insulation layer 25 is set as a graphite carbon felt layer. The graphite carbon felt has the advantages of good thermal insulation performance, high strength, and high temperature resistance. The second thermal insulation layer 26 is set on the outer peripheral side of the first thermal insulation layer 25. In the present embodiment, it is preferred that the second thermal insulation layer 26 is set as a thermal insulation cotton layer. Thermal insulation cotton has the characteristics of light weight, high strength, anti-oxidation, low thermal conductivity, good softness, corrosion resistance, small heat capacity and sound insulation, and has good thermal insulation effect and low cost. The first thermal insulation layer 25 and the second thermal insulation layer 26 can effectively prevent the heat generated by the first evaporation component 20 from dissipating, thereby reducing the energy consumption demand of the heating part 21 and reducing the production cost of the conductive film.

[0051] It can be seen from the above embodiments that the evaporation source of the present utility model can achieve at least the following technical effects:

[0052] (1) The utility model arranges a heating electrode in the first mounting portion of the mounting bracket, and coats the outer periphery of the heating electrode with insulating ceramic to prevent the electrode from short-circuiting or causing a safety accident. A graphite carbon felt layer and a thermal insulation cotton layer are sequentially coated on the outer periphery of the insulating ceramic, thereby effectively reducing the heat loss generated by the first crucible and improving the radiation of waste heat to the second crucible.

[0053] (2) The utility model arranges a rotating table, a heat insulating portion and a second crucible on the second mounting portion of the mounting bracket, wherein the heat insulating portion partially shields the second crucible and changes the heat radiation area of the second crucible receiving the heat generated by the first crucible through the rotation of the rotating table, thereby changing the temperature in the second crucible and heating and evaporating the low-melting-point film material; only one heating portion is required to realize the evaporation of two film materials with different melting points, thereby reducing the energy consumption demand and production cost during the coating process.

[0054] On the other hand, combined Figure 1 As shown, the present invention also provides an evaporation coating device. The evaporation coating device includes the above-mentioned evaporation source. Exemplarily, the evaporation coating device can be an electron beam evaporation coating device and a resistance evaporation coating device, which is not specifically required in this application. The principle of evaporation coating is: in a high vacuum environment, the evaporation material sublimates or evaporates into vapor, and the vapor molecules move linearly through the vacuum chamber to reach the surface of the substrate. Since the density of gas molecules in a vacuum environment is extremely low, the vapor molecules can be transmitted with a higher free path, reducing the scattering and collision of gas molecules. On the surface of the substrate, the vapor molecules condense into a solid thin film, completing the coating process.

[0055] In this embodiment, when coating a conductive film, the evaporation coating equipment utilizes a first evaporation component 20 to coat a high-melting-point film material (e.g., copper). When copper coating the conductive film, a double-layer insulation measure is adopted for the heating portion 21 to reduce heat loss. A second evaporation component 30 is provided on one side of the first evaporation component 20, and the second evaporation component 30 is provided higher than the first evaporation component 20. The heat generated by the first evaporation component 20 can be effectively utilized to radiate heat to the second crucible 33 in the second evaporation component 30, thereby evaporating the low-melting-point film material in the second crucible 33. In actual use, the area of the second crucible 33 receiving heat radiation can be changed by rotating the rotating table 31 according to the melting point of the film material in the second crucible 33. With this arrangement, only one heating portion 21 is required in the evaporation coating equipment to perform thermal evaporation on two film materials with different melting points, thereby reducing energy consumption requirements and production costs.

[0056] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used herein to describe the spatial positional relationship of a device or feature to other devices or features as shown in the figures. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figures. For example, if the device in the drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0057] In addition, it should be noted that the use of words such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. Unless otherwise stated, the above words have no special meaning and therefore cannot be understood as limiting the scope of protection of this utility model.

[0058] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. An evaporation source, characterized in that: include: A mounting bracket (10), the mounting bracket (10) comprising a first mounting portion (11) and a second mounting portion (12) located outside the first mounting portion (11); A first evaporation component (20), the first evaporation component (20) comprising a heating portion (21) and a first crucible (22), the heating portion (21) being mounted on the first mounting portion (11), and the first crucible (22) being mounted on the heating portion (21); A second evaporation component (30) includes a rotating table (31), a heat insulating portion (32), and a second crucible (33); the rotating table (31) is rotatably mounted on the second mounting portion (12); the second crucible (33) is mounted on the rotating table (31) for absorbing heat from the heating portion (21); and the outer peripheral side of the second crucible (33) is at least partially provided with the heat insulating portion (32).

2. The evaporation source according to claim 1, characterized in that The heat insulating portion (32) includes a graphite block, a semicircular groove (321) is provided on the graphite block, the second crucible (33) is installed in the semicircular groove (321), and the second crucible (33) includes a first area (331) shielded by the graphite block and a second area (332) exposed outside the graphite block.

3. The evaporation source according to claim 2, characterized in that: A groove (311) is provided on the rotating table (31), the heat insulating portion (32) is at least partially provided in the groove (311), the second crucible (33) is installed in the groove (311), and the heights of the heat insulating portion (32) and the second crucible (33) are both greater than the depth of the groove (311).

4. The evaporation source according to claim 1, characterized in that The evaporation source further includes a motor, a rotating shaft (34), a first gear (36) and a second gear (37); The first gear (36) is fixedly sleeved on the output shaft (35) of the motor, and the second gear (37) is fixedly sleeved on the rotating shaft (34) and meshes with the first gear (36); The rotating shaft (34) is fixedly connected to the rotating platform (31), and the rotating shaft (34) is rotatably connected to the second mounting portion (12) via a bearing.

5. The evaporation source according to claim 1, characterized in that The first mounting portion (11) includes a mounting groove (111), and the second mounting portion (12) includes a mounting platform (121), wherein the mounting platform (121) is connected to the top end of a side wall of the mounting groove (111).

6. The evaporation source according to claim 1, characterized in that The heating portion (21) comprises a heating electrode (211), a plurality of heating grooves (2111) are provided on the heating electrode (211), the first crucible (22) comprises a plurality of first crucibles (22), and the first crucibles (22) are mounted in a one-to-one correspondence with the heating grooves (2111); The second evaporation components (30) include a plurality of second evaporation components (30), which are spaced apart along the outer side of the first mounting portion (11).

7. The evaporation source according to claim 6, characterized in that: The first evaporation component (20) further comprises a first insulating layer (23) and a heat preservation layer, wherein the first insulating layer (23) is disposed on the outer peripheral side of the heating electrode (211), and the heat preservation layer is disposed on the outer peripheral side of the first insulating layer (23).

8. The evaporation source according to claim 7, characterized in that: The first evaporation component (20) further comprises a second insulating layer (24), the second insulating layer (24) covering the top surface of the thermal insulation layer, a relief notch (241) being provided on the second insulating layer (24), and the first crucible (22) passing through the relief notch (241).

9. The evaporation source according to claim 7, characterized in that: The thermal insulation layer comprises a first thermal insulation layer (25) and a second thermal insulation layer (26), wherein the first thermal insulation layer (25) is arranged on the outer peripheral side of the heating part (21), and the second thermal insulation layer (26) is arranged on the outer peripheral side of the first thermal insulation layer (25), wherein the first thermal insulation layer (25) is a graphite carbon felt layer, and the second thermal insulation layer (26) is a thermal insulation cotton layer.

10. An evaporation coating device, characterized in that: The evaporation source comprises the evaporation source according to any one of claims 1 to 9.

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