Evaporation source and evaporation coating equipment

Abstract

The utility model discloses an evaporation source and evaporation coating equipment. The evaporation source comprises a mounting base, a first evaporation assembly and a second evaporation assembly. Wherein the first evaporation assembly is arranged on the mounting seat, the first evaporation assembly comprises a heating part and a first crucible, and the first crucible is mounted on the heating part; the second evaporation assembly is arranged on the mounting base, a heat conduction layer is arranged between the first evaporation assembly and the second evaporation assembly, the second evaporation assembly comprises a second crucible, and the second crucible is used for absorbing heat from the heating part. The evaporation source and the evaporation coating equipment at least can solve the problems that in the prior art, when to-be-coated materials with melting point differences on conducting films need to be heated and evaporated independently through corresponding heating sources, the energy consumption needed by the evaporation source is large, and the coating cost is high.

Description

Technical Field

[0001] The utility model relates to the technical field of thin film processing, in particular to an evaporation source and evaporation coating equipment. Background Art

[0002] Conductive film is a polymer material with a metal coating on its surface. It is widely used in lithium-ion batteries, primarily as a current collector. The coating on the conductive film can be obtained using thermal evaporation and / or magnetron sputtering. Thermal evaporation is sensitive to the melting point of the material being plated. For materials with higher melting points, the evaporation source must provide a higher evaporation temperature. For materials with lower melting points, the evaporation source can simply provide a lower evaporation temperature to achieve thermal evaporation of the corresponding material.

[0003] In some conductive film coating structures, different coating structures or different materials within the same coating layer have varying melting points. For example, the melting point of a copper layer may be higher than that of other functional films deposited on top of it. When a conductive film comprises a coating structure formed by evaporating materials with different melting points, the current evaporation source structure limits the need for separate heating and evaporation of these materials with different melting points. This results in high energy consumption for the evaporation source and high coating costs. Utility Model Content

[0004] The main purpose of the present utility model is to provide an evaporation source and an evaporation coating device, which at least solves the problem in the prior art that when materials to be plated on a conductive film with different melting points need to be heated and evaporated separately using corresponding heating sources, the evaporation source requires large energy consumption and the coating cost is high.

[0005] According to one aspect of the present invention, there is provided an evaporation source, comprising:

[0006] Mounting seat;

[0007] a first evaporation component, the first evaporation component being disposed on the mounting seat, the first evaporation component comprising a heating portion and a first crucible, the first crucible being mounted on the heating portion;

[0008] The second evaporation component is arranged on the mounting seat, a first insulation layer is arranged between the first evaporation component and the second evaporation component, and the second evaporation component includes a second crucible, and the second crucible is used to absorb heat from the heating part.

[0009] Furthermore, the second evaporation component includes a base, the base is provided with a protrusion, and the second crucible is rotatably mounted on the protrusion.

[0010] Furthermore, a first local thinning area is provided on the outer side wall of the second crucible.

[0011] Furthermore, the second evaporation component also includes a heat-conducting tube, which is rotatably arranged on the mounting seat and located outside the first evaporation component. The second crucible is installed in the heat-conducting tube, and at least one of a local thinning area and a local hollow area is provided on the side wall of the heat-conducting tube.

[0012] Furthermore, the heat-conducting tube includes a graphite sleeve, a groove is provided on the graphite sleeve, the second crucible is installed in the groove, and the outer side wall of the second crucible is arranged in contact with the inner side wall of the groove.

[0013] Furthermore, the outer surface of the heat-conducting tube is provided with the local thinning area, and the local thinning area is provided with a protrusion.

[0014] Furthermore, the heat-conducting layer includes at least one of a graphite carbon felt layer and an aluminum silicate fiber layer, and the graphite carbon felt layer is coated on the outer peripheral sides of the first evaporation component and the second evaporation component; or,

[0015] The aluminum silicate fiber layer is disposed on the outer peripheral sides of the first evaporation component and the second evaporation component.

[0016] Furthermore, the heat-conducting tube is arranged on the base, a circular groove is provided on the base, a positioning cylinder is provided at the bottom of the heat-conducting tube, and the heat-conducting tube is rotatably mounted in the circular groove through the positioning cylinder.

[0017] Furthermore, the mounting seat has a first side wall close to the second evaporation component, and a cooling pipe is provided in the first side wall.

[0018] Furthermore, the heating portion includes a heating electrode, a plurality of heating slots are provided on the heating electrode, the first crucible includes a plurality of first crucibles, and the first crucibles are installed in a one-to-one correspondence with the heating slots;

[0019] The second evaporation components include a plurality of components, and the plurality of second evaporation components are sequentially installed at intervals on the outside of the heating electrode.

[0020] Furthermore, the evaporation source further includes a second thermal insulation layer, which is arranged to cover the outer peripheral side of the first thermal insulation layer.

[0021] Furthermore, the first evaporation component further includes a first insulating layer and a second insulating layer;

[0022] The first insulating layer is disposed on the outer periphery of the heating portion, and the first heat preservation layer is disposed on the outer periphery of the first insulating layer;

[0023] The second insulating layer is disposed to cover the top surfaces of the first evaporation component and the second evaporation component. A plurality of avoidance gaps are disposed on the second insulating layer. The first crucible and the second crucible are disposed through the avoidance gaps.

[0024] On the other hand, the present invention further provides an evaporation coating device, which includes the above-mentioned evaporation source.

[0025] In the present invention, the evaporation source can be used to evaporate materials with different melting points. When different film materials need to be evaporated, the film material with a higher melting point is placed in the first crucible, while the film material with a lower melting point is placed in the second crucible. The film material in the first crucible can be directly heated by the heating unit to evaporate and deposit it on the predetermined base film. The second crucible is located outside the first evaporation assembly and absorbs heat from the heating unit to thermally evaporate the film material with a lower melting point inside it, thereby depositing it on the predetermined base film.

[0026] Compared with the prior art, the evaporation source in the present invention only needs to be equipped with one heating part to evaporate at least two film materials with different melting points, and the evaporation temperature of the low-melting-point film material is easy to adjust, which can effectively reduce the energy consumption of the evaporation source and ultimately achieve the purpose of reducing the coating cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0028] Figure 1 This is a schematic structural diagram of the evaporation source disclosed in an embodiment of the present utility model;

[0029] Figure 2 This is a schematic structural diagram of a heat-conducting tube (provided with a local thinning area) disclosed in an embodiment of the present utility model;

[0030] Figure 3 This is a front view of the heat-conducting tube (provided with a local thinned area) disclosed in an embodiment of the present utility model;

[0031] Figure 4 This is a front view of a protrusion provided on the side wall of the heat-conducting cylinder disclosed in an embodiment of the present utility model;

[0032] Figure 5 This is a top view of the heat-conducting tube and graphite carbon felt disclosed in an embodiment of the present utility model.

[0033] The above drawings include the following reference numerals:

[0034] 10. Mounting seat; 11. First side wall; 20. First evaporation component; 21. Heating portion; 211. Heating electrode; 2111. Heating tank; 22. First crucible; 30. Second evaporation component; 31. Heat-conducting tube; 311. Local thinning area; 312. Groove; 313. Protrusion; 32. Second crucible; 33. Base; 331. Circular groove; 40. First thermal insulation layer; 50. Second thermal insulation layer; 60. First insulating layer; 61. Second insulating layer; 611. Avoidance gap. DETAILED DESCRIPTION

[0035] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0036] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0037] Unless otherwise specifically stated, the relative arrangement of the parts and steps, the numerical expressions and the numerical values set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. The techniques, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the techniques, methods and equipment should be considered as part of the authorization specification. In all examples shown and discussed here, any specific values should be interpreted as being merely exemplary and not as limiting. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar numbers and letters represent similar items in the following figures, and therefore, once an item is defined in one figure, it does not need to be further discussed in subsequent figures.

[0038] As mentioned in the background technology, in the coating structure of a conductive film, different coating structures or different materials in the same coating have certain differences in melting points. When a conductive film has a coating structure formed by evaporating materials with different melting points, due to the structure of the current evaporation source, the materials with different melting points need to be heated and evaporated separately using corresponding heating sources. This results in high energy consumption of the evaporation source and high coating costs. To this end, the present application proposes an evaporation source that can use the heat generated when evaporating a high-melting-point film material to heat a low-melting-point film material, thereby reducing energy consumption and lowering the production cost of the conductive film. The evaporation source of the present application will be described in detail below with reference to the accompanying drawings.

[0039] See also Figures 1 to 5 As shown, according to an embodiment of the present invention, an evaporation source is provided, specifically, the evaporation source includes a mounting base 10 , a first evaporation component 20 , and a second evaporation component 30 .

[0040] In this embodiment, the first evaporation component 20 is arranged on the mounting seat 10, and the first evaporation component 20 includes a heating part 21 and a first crucible 22, and the first crucible 22 is installed on the heating part 21; the second evaporation component 30 is arranged on the mounting seat 10, and a first insulation layer 40 is arranged between the first evaporation component 20 and the second evaporation component 30, and the second evaporation component 30 includes a second crucible 32, and the second crucible 32 is used to absorb heat from the heating part 21.

[0041] In actual use, the evaporation source in this embodiment can be used to evaporate materials with different melting points. When different film materials need to be evaporated, the film material with a relatively high melting point is placed in the first crucible 22, while the film material with a relatively low melting point is placed in the second crucible 32. The film material in the first crucible 22 can be directly heated by the heating unit 21 to evaporate and deposit it on the predetermined base film. The second evaporation component 30 is located outside the first evaporation component 20. The second crucible 32 is provided on the second evaporation component 30. The second crucible 32 can absorb heat from the heating unit 21 to thermally evaporate the film material with a relatively low melting point inside it to deposit it on the predetermined base film.

[0042] Compared with the prior art, the evaporation source in this embodiment only needs to be equipped with a heating part 21 to evaporate at least two film materials with different melting points, and the evaporation temperature of the low-melting-point film material is easy to adjust, which can effectively reduce the energy consumption of the evaporation source and ultimately achieve the purpose of reducing the coating cost.

[0043] Specifically, the mounting base 10 includes a metal shield that provides excellent support and ensures the stability of the first and second evaporation components 20 and 30. The heating portion 21 is used to directly heat the high-melting-point (melting point greater than or equal to 1000°C) film material in the first crucible 22 to evaporate the film material. Optionally, the high-melting-point film material includes copper, etc. The second crucible 32 is used to thermally evaporate the low-melting-point (melting point less than or equal to 800°C) film material. Optionally, the low-melting-point film material includes tin, zinc, etc.

[0044] In this embodiment, the second evaporation assembly includes a base 33 with a raised portion (not shown) disposed thereon. The second crucible 32 is rotatably mounted on the raised portion. The raised portion reduces the contact area between the base 33 and the second crucible 32, thereby regulating the temperature of the second crucible 32. For example, the raised portion can be cylindrical, truncated, or otherwise shaped, as long as the second crucible 32 can rotate on the raised portion.

[0045] Furthermore, a first locally thinned region can be provided on the outer wall of the second crucible 32, which does not penetrate the second crucible 32, to prevent leakage of the film material within the second crucible 32. The first locally thinned region can be configured to be completely thinned or to have a raised structure. During actual operation, the contact between the second crucible 32 and the first insulation layer 40 can be adjusted by rotating the second crucible 32, thereby controlling the temperature within the second crucible 32. For example, when the first locally thinned region contacts the first insulation layer 40, the heat transfer rate increases; when the region without the locally thinned region is moved to the first insulation layer 40, the heat transfer rate decreases.

[0046] In other embodiments, Figures 1 to 3 As shown, the second evaporation assembly 30 further includes a heat-conducting tube 31, which is rotatably mounted on the mounting base 10 and positioned outside the first evaporation assembly 20. The second crucible 32 is mounted within the heat-conducting tube 31, and at least one of a locally thinned region 311 and a locally hollowed region is provided on the sidewall of the heat-conducting tube 31. In this embodiment, the heat-conducting tube 31 is rotatably mounted on the mounting base 10 and positioned outside the first evaporation assembly 20, and the second crucible 32 is mounted within the heat-conducting tube 31, while at the same time providing a locally thinned region 311 or a locally hollowed region on the sidewall of the heat-conducting tube 31. In actual use, the heat-conducting tube 31 contacts the first insulation layer 40. Rotating the contact area between the heat-conducting tube 31 and the first insulation layer 40 changes the heat conduction efficiency, thereby achieving temperature control within the second crucible 32 and facilitating thermal evaporation of the low-melting-point film material within the second crucible 32. In this embodiment, the second evaporation component 30 is disposed on one side of the first evaporation component 20 , and the low-melting-point film material in the second evaporation component 30 is thermally evaporated through heat transfer from the first thermal insulation layer 40 .

[0047] Specifically, when the heat-conducting tube 31 rotates, the locally thinned region 311 can be brought into contact with the first insulation layer 40, resulting in a faster heat transfer rate and more heat absorption by the second crucible 32. Alternatively, the side without the locally thinned region 311 can be rotated to contact the first insulation layer 40, resulting in a slower heat transfer rate and less heat absorption by the second crucible 32. In other words, this embodiment adjusts the heating temperature of the second crucible 32 by rotating the heat-conducting tube 31 to change the heat transfer rate between the first insulation layer 40 and the heat-conducting tube 31.

[0048] like Figure 1 and Figure 2 As shown, in this embodiment, the heat-conducting sleeve 31 is preferably configured as a graphite sleeve. Graphite has excellent high-temperature resistance, and its strength increases with increasing temperature, providing excellent thermal insulation and durability. In this embodiment, the graphite sleeve is provided with a groove 312, into which the second crucible 32 is mounted, with the outer wall of the second crucible 32 aligned with the inner wall of the groove 312. This improves the efficiency of heat transfer to the second crucible 32.

[0049] In some embodiments of the present application, the outer surface of the heat-conducting tube 31 may be provided with a locally thinned region 311 or a locally hollowed region. This configuration can improve the heat conduction efficiency between the heat-conducting tube 31 and the first insulation layer 40, thereby facilitating rapid thermal evaporation of the film material in the second crucible 32. Figures 2 to 5 The figure shows a case where a locally thinned area 311 is provided on the outer surface of the heat-conducting tube 31. Specifically, the locally thinned area 311 can be configured to be completely thinned, or it can be configured to be partially thinned to form a protrusion 313 structure. When configured as a protrusion 313, the heat transfer efficiency when the heat-conducting tube 31 contacts the first insulation layer 40 is lower than when the locally thinned area is completely thinned.

[0050] In the present application, the first thermal insulation layer 40 is arranged on the outer peripheral side of the first evaporation component 20 and the second evaporation component 30. For example, the first thermal insulation layer 40 can be made of glass wool, graphite carbon felt, aluminum silicate fiber, thermal insulation wool, rigid polyurethane board, etc. In this embodiment, graphite carbon felt is preferably used as the first thermal insulation layer 40. Graphite carbon felt has the advantages of good thermal insulation performance, high strength, and high temperature resistance. Such a setting can prevent heat loss from the first evaporation component 20 and the second evaporation component 30 and reduce the energy consumption of the evaporation source. It is worth noting that when the first thermal insulation layer 40 is arranged between the first evaporation component 20 and the second evaporation component 30, the first thermal insulation layer 40 can also play a heat transfer role.

[0051] like Figure 1As shown, the bottom of the heat-conducting tube 31 is provided with a base 33, which is provided with a circular groove 331. A positioning cylinder is also provided at the bottom of the heat-conducting tube 31. The positioning cylinder is installed in the circular groove 331, allowing the heat-conducting tube 31 to rotate within the base 33. With this arrangement, during actual production, the contact area with the first insulation layer 40 is changed by rotating the heat-conducting tube 31, thereby changing the heat transfer rate between the first insulation layer 40 and the heat-conducting tube 31, thereby controlling the temperature of the second crucible 32.

[0052] Furthermore, the mounting base 10 has a first side wall 11 adjacent to the second evaporation component 30. In this embodiment, a cooling pipe (not shown) is preferably provided on the first side wall 11. When the heat-conducting cylinder 31 is rotated to change the contact area with the first insulation layer 40, if the temperature of the second crucible 32 is too high, the second evaporation component 30 can be cooled by adjusting the flow rate of the liquid in the cooling pipe. The liquid has a high thermal conductivity and can carry most of the heat by flowing. For example, the liquid can be water, mineral oil, etc. In this embodiment, the preferred liquid is water, which has a low cost and a good cooling effect.

[0053] In the present application, the heating portion 21 includes a heating electrode 211, and a plurality of heating slots 2111 are provided on the heating electrode 211. Optionally, the number of heating slots 2111 may be 2, 3, 4, 5, etc., and the specific number is selected according to the size of the heating electrode 211 or actual production needs. Correspondingly, the first crucible 22 also includes a plurality of first crucibles 22, and optionally, the number of first crucibles 22 may be 2, 3, 4, 5, etc. The first crucibles 22 are installed one-to-one in the heating slots 2111. In addition, the second evaporation assembly 30 also includes a plurality of first crucibles 22. During actual installation, the first crucibles 22 correspond to the number of heating slots 2111 and are installed one-to-one in the heating slots 2111. In this way, when the evaporation source is actually used, the first crucibles 22 can be installed in different heating slots 2111 as needed to evaporate different quantities of high-melting-point film materials.

[0054] Optionally, the second evaporation assembly 30 also includes multiple ones. For example, the number of the second evaporation assemblies 30 can be 2, 3, 4, 5, 6, etc. And the multiple second evaporation assemblies 30 are installed in sequence and spaced apart on the outside of the heating electrode 211. With such an arrangement, different numbers of low-melting-point film materials can also be evaporated according to different usage requirements. In addition, the multiple first crucibles 22 can be a crucible with a strip-shaped groove structure, and the high-melting-point film material is placed in the groove structure to accommodate the high-melting-point film material. Similarly, the second crucible 32 can also be a crucible with a strip-shaped groove structure, so as to accommodate the low-melting-point film material. The crucible with a strip-shaped structure can accommodate more film materials, and the coating effect on the substrate is more ideal.

[0055] Furthermore, the evaporation source also includes a second insulation layer 50, which is disposed on the outside of the first insulation layer 40 and can further reduce heat loss from the first evaporation component 20 and the second evaporation component 30. Optionally, the second insulation layer 50 can be made of glass wool, graphite carbon felt, aluminum silicate fiber, insulation cotton, rigid polyurethane board, etc. In the present application, the second insulation layer 50 is preferably an insulation cotton layer. Insulation cotton has the characteristics of light weight, high strength, oxidation resistance, low thermal conductivity, good flexibility, corrosion resistance, low heat capacity, and sound insulation, and has a good insulation effect.

[0056] Furthermore, the first evaporation component 20 also includes a first insulating layer 60. The first insulating layer 60 is coated on the outer peripheral side of the heating electrode 211, and the first thermal insulation layer 40 is coated on the outer peripheral side of the first insulating layer 60. In this way, the first insulating layer 60 is used to prevent the electrode from being affected and causing a short circuit or a safety accident. The first thermal insulation layer 40 can be used to slow down the loss of heat from the heating part 21 to the external environment, which can effectively reduce the energy consumption of the evaporation source. It is worth noting that the first insulating layer 60 in the present application must also have high temperature resistance. For example, the first insulating layer 60 can be glass, ceramic, ceramic fiber, polytetrafluoroethylene (PTFE), polyimide, polyetheretherketone (PEEK), etc. In the present application, ceramic is preferably used as the first insulating layer 60. Ceramics have the properties of high hardness, high temperature resistance and low thermal conductivity, which can reduce heat loss on the outer peripheral side of the heating electrode 211 and are not easily damaged during the actual production process, further reducing production costs.

[0057] Furthermore, the second insulating layer 61 is arranged on the top surface of the first evaporation component 20 and the second evaporation component 30, which can effectively prevent the influence of the external environment on the heating electrode 211 and ensure the process effect of the evaporation coating. Optionally, the second insulating layer 61 can be glass, ceramic, ceramic fiber, polytetrafluoroethylene (PTFE), polyimide, polyetheretherketone (PEEK), etc. In this embodiment, ceramic is preferably used as the second insulating layer 61. The thermal conductivity of ceramic is small, which can reduce the heat loss on the surface of the first evaporation component 20 and the second evaporation component 30. In addition, a plurality of avoidance gaps 611 are provided on the second insulating layer 61, and the first crucible 22 and the second crucible 32 are inserted into the corresponding avoidance gaps 611. With such a configuration, the metal vapor generated in the first crucible 22 and the second crucible 32 can respectively coat the corresponding conductive films.

[0058] It can be seen from the above embodiments that the evaporation source of the present utility model can achieve at least the following technical effects:

[0059] (1) The utility model arranges a first evaporation component and a second evaporation component in a mounting seat, and utilizes the heat generated by the first evaporation component to heat the second evaporation component;

[0060] (2) The utility model arranges graphite carbon felt between the first evaporation component and the second evaporation component, and the heat-conducting tube in the second evaporation component is rotatably installed in the circular groove on the base; a local thinning area or a local hollow area is provided on the heat-conducting tube, and the contact area between the heat-conducting tube and the graphite carbon felt is changed by rotation, thereby changing the conduction rate and finally changing the temperature in the second crucible, thereby reducing the energy consumption demand in the coating process and reducing the production cost of the conductive film;

[0061] (3) The utility model provides a cooling pipe on the first side wall of the mounting seat and cools the second crucible in the second evaporation assembly by adjusting the flow rate of the liquid in the cooling pipe;

[0062] (4) The utility model reduces the heat loss of the first evaporation component and the second evaporation component by providing a heat-insulating cotton layer;

[0063] (5) The utility model protects the heating electrode by providing insulating ceramics.

[0064] On the other hand, combined Figures 1 to 5 As shown, the present invention also provides an evaporation coating device. The evaporation coating device includes the above-mentioned evaporation source. Exemplarily, the evaporation coating device can be an electron beam evaporation coating device and a resistance evaporation coating device, which is not specifically required in this application. The principle of evaporation coating is: in a high vacuum environment, the evaporation material sublimates or evaporates into vapor, and the vapor molecules move linearly through the vacuum chamber to reach the surface of the substrate. Since the density of gas molecules in a vacuum environment is extremely low, the vapor molecules can be transmitted with a higher free path, reducing the scattering and collision of gas molecules. On the surface of the substrate, the vapor molecules condense into a solid thin film, completing the coating process.

[0065] In this embodiment, when coating a conductive film, the evaporation coating apparatus utilizes a first evaporation assembly 20 to coat a high-melting-point film material (e.g., copper) with a copper layer. Insulation and heat preservation measures are implemented on the heating section 21 to reduce the influence of the external environment on the heating section 21 and reduce heat loss. A second evaporation assembly 30 is disposed on one side of the first evaporation assembly 20, and a first insulation layer 40 is disposed between the first evaporation assembly 20 and the second evaporation assembly 30. Heat generated by the first evaporation assembly 20 is transferred to the second evaporation assembly 30 via the first insulation layer 40. In actual use, the contact area between the second crucible 32 and the first insulation layer 40, or the contact area between the heat-conducting cylinder 31 and the first insulation layer 40, can be rotated according to the melting point of the film material within the second crucible 32 to adjust the heat transfer efficiency and thereby achieve temperature control of the second crucible 32. With this configuration, the evaporation coating apparatus can achieve thermal evaporation of at least two film materials with different melting points using a single heating section 21, reducing energy consumption and production costs.

[0066] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used herein to describe the spatial positional relationship of a device or feature to other devices or features as shown in the figures. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figures. For example, if the device in the drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0067] In addition, it should be noted that the use of words such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. Unless otherwise stated, the above words have no special meaning and therefore cannot be understood as limiting the scope of protection of this utility model.

[0068] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. An evaporation source, characterized in that: include: Mounting seat (10); a first evaporation component (20), the first evaporation component (20) being arranged on the mounting seat (10), the first evaporation component (20) comprising a heating portion (21) and a first crucible (22), the first crucible (22) being mounted on the heating portion (21); A second evaporation component (30) is provided on the mounting seat (10), a first heat-insulating layer (40) is provided between the first evaporation component (20) and the second evaporation component (30), and the second evaporation component (30) includes a second crucible (32), and the second crucible (32) is used to absorb heat from the heating portion (21).

2. The evaporation source according to claim 1, characterized in that The second evaporation component (30) comprises a base (33), the base (33) is provided with a protrusion, and the second crucible (32) is rotatably mounted on the protrusion.

3. The evaporation source according to claim 2, characterized in that: A first local thinning area is provided on the outer side wall of the second crucible (32).

4. The evaporation source according to claim 2, characterized in that The second evaporation component (30) further includes a heat-conducting tube (31), which is rotatably arranged on the mounting seat (10) and located outside the first evaporation component (20), and the second crucible (32) is installed in the heat-conducting tube (31), and at least one of a local thinning area (311) and a local hollow area is provided on the side wall of the heat-conducting tube (31).

5. The evaporation source according to claim 4, characterized in that: The heat-conducting tube (31) comprises a graphite sleeve, a groove (312) is provided on the graphite sleeve, the second crucible (32) is installed in the groove (312), and the outer wall of the second crucible (32) is arranged in contact with the inner wall of the groove (312).

6. The evaporation source according to claim 4 or 5, characterized in that: The outer surface of the heat-conducting cylinder (31) is provided with the local thinning area (311), and a protrusion (313) is provided in the local thinning area (311).

7. The evaporation source according to claim 4 or 5, characterized in that: The first thermal insulation layer (40) includes at least one of a graphite carbon felt layer and an aluminum silicate fiber layer, and the graphite carbon felt layer is disposed on the outer peripheral side of the first evaporation component (20) and the second evaporation component (30); or, The aluminum silicate fiber layer is disposed on the outer peripheral sides of the first evaporation component (20) and the second evaporation component (30).

8. The evaporation source according to claim 4, characterized in that The heat-conducting tube (31) is arranged on the base (33), a circular groove (331) is provided on the base (33), a positioning cylinder is provided at the bottom of the heat-conducting tube (31), and the heat-conducting tube (31) is rotatably mounted in the circular groove (331) through the positioning cylinder.

9. The evaporation source according to claim 1, characterized in that: The mounting seat (10) has a first side wall (11) close to the second evaporation component (30), and a cooling pipe is provided in the first side wall (11).

10. The evaporation source according to claim 1, characterized in that The heating portion (21) comprises a heating electrode (211), a plurality of heating grooves (2111) are provided on the heating electrode (211), the first crucible (22) comprises a plurality of first crucibles (22), and the first crucibles (22) are mounted in a one-to-one correspondence with the heating grooves (2111); The second evaporation components (30) include a plurality of them, and the plurality of second evaporation components (30) are sequentially installed at intervals on the outside of the heating electrode (211).

11. The evaporation source according to any one of claims 1 to 5, 8 and 10, characterized in that The evaporation source further comprises a second thermal insulation layer (50), and the second thermal insulation layer (50) is arranged to cover the outer peripheral side of the first thermal insulation layer (40).

12. The evaporation source according to any one of claims 1 to 5, 8 and 10, characterized in that The first evaporation component (20) further includes a first insulating layer (60) and a second insulating layer (61); The first insulating layer (60) is disposed on the outer peripheral side of the heating portion (21), and the first heat-insulating layer (40) is disposed on the outer peripheral side of the first insulating layer (60); The second insulating layer (61) is arranged to cover the top surfaces of the first evaporation component (20) and the second evaporation component (30), and a plurality of avoidance gaps (611) are provided on the second insulating layer (61), and the first crucible (22) and the second crucible (32) are passed through the avoidance gaps (611).

13. An evaporation coating device, characterized in that: The evaporation source comprises the evaporation source according to any one of claims 1 to 12.

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