Stripping and hanging device and water electroplating equipment

Abstract

The utility model discloses a stripping and hanging device and water electroplating equipment. And the stripping and hanging device is used for stripping and hanging a copper layer on the circularly moving workpiece from the coating process. The stripping and hanging device comprises a liquid storage mechanism and an ejector. Wherein the liquid storage mechanism comprises a liquid storage tank, and the liquid storage tank is used for storing stripping and hanging liquid; and the jet device is arranged on the side wall of the liquid storage tank and is used for introducing oxygen or air into the surface of the workpiece or the stripping and hanging liquid. The stripping and hanging device and the water electroplating equipment provided by the utility model at least can solve the problem that the oxidation of a copper layer is influenced due to low oxygen content in stripping and hanging liquid when the stripping and hanging liquid is used for stripping and hanging the copper layer on the conductive clamp in the prior art.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical electroplating, in particular to a peeling and hanging device and water electroplating equipment. Background Art

[0002] During the water electroplating process of the conductive film, a plating layer is easily deposited on the supporting conductive clip. The conductive clip needs to be used repeatedly, so the plating layer needs to be completely stripped off.

[0003] Currently, the main methods for removing raised particles or copper spikes from the surface of conductive clips include electrolytic stripping and chemical stripping. Electrolytic stripping is complex and costly, while chemical stripping suffers from severe corrosion of the conductive clip surface by the stripping solution. Furthermore, chemical stripping reduces oxygen content in the stripping solution, limiting oxygen exposure to the metal coating on the conductive clip and slowing oxidation. This results in low stripping efficiency. Utility Model Content

[0004] The main purpose of the utility model is to provide a stripping device and water electroplating equipment, which at least solves the problem in the prior art that when the copper layer on the conductive clip is stripped with a stripping liquid, the oxygen content in the stripping liquid is low, which affects the oxidation of the copper layer.

[0005] According to one aspect of the present invention, a stripping device is provided, which is used to strip the copper layer on a circulating workpiece coming out of a coating process. The stripping device includes:

[0006] A liquid storage mechanism, the liquid storage mechanism comprising a liquid storage tank, the liquid storage tank being used to store the peeling liquid;

[0007] An ejector is provided on the side wall of the liquid storage tank and is used for introducing oxygen or air into the surface of the workpiece or the stripping liquid.

[0008] Furthermore, the ejector includes a main body and a nozzle, the main body is provided with a jet channel and an air inlet channel, the jet channel is arranged to pass through along the axial direction of the main body, the air inlet channel is arranged on the side wall of the main body and is connected to the jet channel, and the air inlet channel is located outside the liquid storage tank, and the nozzle is connected to the inlet end of the jet channel and is located outside the liquid storage tank.

[0009] Furthermore, a ball head is provided at one end of the main body away from the nozzle, and the ejector further comprises an injection section, which is provided with a through hole communicating with the jet channel, and the injection section is rotatably connected to the ball head.

[0010] Furthermore, the jet channel includes a first channel section and a second channel section that are connected in sequence, the cross-sectional area of the first channel section near the end of the second channel section gradually decreases, and the cross-sectional area of the second channel section gradually increases, the nozzle is connected to the first channel section, and the air intake channel is connected to the first channel section.

[0011] Furthermore, the distance between the outlet end of the air inlet channel and the first channel section is greater than the distance between the outlet end of the nozzle and the first channel section.

[0012] Furthermore, a delivery channel is provided on the nozzle, and the cross-sectional area of the delivery channel gradually decreases in a direction approaching the second channel section.

[0013] Furthermore, the workpiece at least includes a conductive clamp, the conductive clamp is provided with a clamping opening, and the outlet of the jet channel is arranged toward the clamping opening.

[0014] Furthermore, the extending direction of the air inlet channel is perpendicular to or inclined to the axial direction of the main body.

[0015] Furthermore, along the direction approaching the first channel section, the outer diameter of at least one end of the nozzle close to the first channel section gradually decreases.

[0016] On the other hand, the utility model also provides a water electroplating device, which includes the above-mentioned peeling and hanging device.

[0017] In this utility model, an ejector is installed within the liquid reservoir to introduce air or oxygen into the workpiece surface or the stripping solution, increasing the oxygen content within the entire reservoir and promoting the stripping of the copper layer. Specifically, the reaction principle is: 2Cu + O2 → 2CuO, CuO + H2SO4 → CuSO4 + H2O. Oxygen reacts with the copper layer on the workpiece to form copper oxide, which then reacts with sulfuric acid in the stripping solution to produce copper sulfate. The ejector increases the reaction rate between the stripping solution and the copper layer on the workpiece, thereby achieving efficient removal of the copper layer. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0019] Figure 1 This is a schematic diagram of the overall structure of the peeling and hanging device disclosed in an embodiment of the present utility model;

[0020] Figure 2 This is a cross-sectional view of the first ejector in the peeling and hanging device disclosed in an embodiment of the present utility model;

[0021] Figure 3 This is a cross-sectional view of the second type of ejector in the peeling and hanging device disclosed in an embodiment of the present utility model.

[0022] The above drawings include the following reference numerals:

[0023] 10. Liquid storage tank; 40. Workpiece; 41. Clamp; 70. Ejector; 701. Injection section; 71. Main body; 711. Jet channel; 7111. First channel section; 7112. Second channel section; 712. Air inlet channel; 72. Nozzle; 721. Delivery channel; 73. Ball head. DETAILED DESCRIPTION

[0024] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0025] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0026] Unless otherwise specifically stated, the relative arrangement of the parts and steps, the numerical expressions and the numerical values set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. The techniques, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the techniques, methods and equipment should be considered as part of the authorization specification. In all examples shown and discussed here, any specific values should be interpreted as being merely exemplary and not as limiting. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar numbers and letters represent similar items in the following figures, and therefore, once an item is defined in one figure, it does not need to be further discussed in subsequent figures.

[0027] As mentioned in the background, when chemical stripping is used in the prior art, the oxygen content in the stripping solution is low, resulting in less contact between the metal coating on the conductive clip and oxygen, and slow oxidation of the metal coating. This results in low efficiency of stripping the metal coating on the conductive clip by the stripping solution. Therefore, the present invention provides a stripping device and water electroplating equipment. The stripping device is provided with an ejector that can provide oxygen or air to the workpiece surface or the stripping solution, increasing the oxygen content within the entire liquid reservoir, thereby increasing the reaction rate between the stripping solution and the copper layer at the clamping opening of the conductive clip, and facilitating the stripping of the copper layer on the conductive clip by the stripping solution. The stripping device of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0028] See also Figures 1 to 3 As shown, according to an embodiment of the present invention, a stripping device is provided. The stripping device is used to strip the copper layer on a workpiece 40 that is circulated and moves after the coating process. Specifically, the stripping device includes: a liquid storage mechanism and an ejector 70.

[0029] In this embodiment, the liquid storage mechanism includes a liquid storage tank 10 for storing the peeling liquid; an ejector 70 is provided on the side wall of the liquid storage tank 10 for introducing oxygen or air into the surface of the workpiece 40 or the peeling liquid.

[0030] In this embodiment, an ejector 70 is installed within the liquid reservoir 10 to introduce air or oxygen into the surface of the workpiece 40 or into the stripping solution, thereby increasing the oxygen content within the entire liquid reservoir 10 and promoting the stripping of the copper layer. Specifically, the reaction principle is: 2Cu + O2 → 2CuO, CuO + H2SO4 → CuSO4 + H2O. Oxygen reacts with the copper layer on the workpiece 40 to form copper oxide, which then reacts with sulfuric acid in the stripping solution to form copper sulfate. The installation of the ejector 70 within the liquid reservoir 10 increases the reaction rate between the stripping solution and the copper layer on the workpiece 40, thereby achieving efficient removal of the copper layer.

[0031] See also Figure 2 and Figure 3As shown, the ejector 70 includes a main body 71 and a nozzle 72. The ejector 70 has a simple structure and is easy to manufacture. Specifically, a jet channel 711 and an air inlet channel 712 are provided within the main body 71. The jet channel 711 is provided along the axis of the main body 71, facilitating the entry of the stripping liquid into the ejector 70 and its high-speed ejection. Simultaneously, an air inlet channel 712 is provided on the sidewall of the main body 71. The air inlet channel 712 extends to communicate with the jet channel 711, facilitating the entry of air or oxygen into the ejector 70, thereby increasing the oxygen content within the liquid reservoir 10 and the reaction rate between the stripping liquid and the copper layer on the workpiece 40. It is worth noting that the ejector 70 is mounted on the sidewall of the liquid reservoir 10. To facilitate gas entry, the air inlet channel 712 is located outside the liquid reservoir 10, and the inlet end of the nozzle 72 connected to the jet channel 711 is also located outside the liquid reservoir 10. This arrangement is conducive to the ejector 70 taking in liquid and air from the outside, thereby increasing the mixing of air or oxygen in the ejector 70 with the stripping liquid, thereby facilitating improved stripping of the copper layer on the workpiece 40 .

[0032] Specifically, the operating principle of the ejector 70 is as follows: based on the dynamic characteristics of the fluid, when pressurized fluid enters the nozzle 72 of the ejector 70 and forms a high-speed jet, the velocity of the liquid passing through the jet channel 711 increases, resulting in a decrease in absolute pressure, thereby creating a vacuum within the ejector 70. This vacuum allows the liquid or gas additive to be thoroughly mixed into the water flow. Through the combined action of strong negative pressure and high-speed jet flow, the ejector 70 shears, pulverizes, and emulsifies the air in the gas or liquid, greatly increasing the specific surface area of the bubbles and reducing mass transfer resistance, thereby effectively completing the gas-water mass transfer process and supporting oxygenation of the liquid storage tank 10.

[0033] Further, see Figure 3 As shown, in some ejectors 70, a spherical head 73 is provided at the end of the main body 71 facing away from the nozzle 72. The ejector 70 also includes a spray section 701, which is provided with a through hole communicating with the jet channel 711. The ejection section 701 is rotatably connected to the spherical head 73. This arrangement allows the ejection section 701 to be rotated to different angles according to actual needs during operation, thereby precisely supplying oxygen to the portion of the copper layer on the workpiece 40 to be stripped, further improving the efficiency of the copper stripping process and reducing the time of the stripping process.

[0034] Furthermore, the jet channel 711 includes a first channel section 7111 and a second channel section 7112, which are connected in sequence. The cross-sectional area of the first channel section 7111 gradually decreases at the end near the second channel section 7112. As it moves away from the second channel section 7112, the cross-sectional area of the first channel section 7111 gradually decreases, which helps the stripping liquid ejected from the nozzle 72 maintain a high velocity within the first channel section 7111. The second channel section 7112, connected to the end of the first channel section 7111, gradually increases in cross-sectional area as it moves away from the first channel section 7111, and is also longer. The high velocity of the stripping liquid ejected from the nozzle 72 and the first channel section 7111 gradually increases the cross-sectional area and length of the second channel section 7112, thus providing a buffer for the high-speed fluid ejected from the first channel section 7111 and preventing damage to the ejector 70 caused by excessive pressure. The nozzle 72 is connected to the first channel section 7111. Specifically, one end of the nozzle 72 is inserted into the first channel section 7111, which helps increase the flow rate of the stripping liquid. The air inlet channel 712 provided in the first channel section 7111 is connected to the first channel section 7111, facilitating air entry into the ejector 70 through the air inlet channel 712, mixing with the stripping liquid within the first channel section 7111, and entering the second channel section 7112 through the end of the first channel section 7111. This arrangement improves the flow rate of the stripping liquid, as well as the efficiency and quality of air-water mixing, thereby increasing the oxygen content in the stripping liquid and improving the stripping efficiency of the copper layer.

[0035] Furthermore, the distance between the outlet end of the air inlet channel 712 and the first channel section 7111 is greater than the distance between the outlet end of the nozzle 72 and the first channel section 7111. This arrangement facilitates the formation of a negative pressure state in the first channel section 7111 when the peeling liquid is ejected from the nozzle 72, thereby improving the mixing of the gas and the peeling liquid.

[0036] Furthermore, the nozzle 72 is provided with a delivery channel 721, the cross-sectional area of which gradually decreases as it approaches the second channel section 7112. According to Bernoulli's principle, when a liquid passes through a shrinking flow area, its flow velocity increases, and its flow velocity is inversely proportional to the flow area. Designing the nozzle 72 as a contraction with a decreasing cross-sectional area facilitates increasing the flow velocity of the liquid as it is delivered from a predetermined pipeline into the nozzle 72. This also increases the pressure of the liquid as it is ejected from the nozzle 72, creating a negative pressure within the ejector 70 and drawing in air.

[0037] like Figures 1 to 3As shown, the workpiece 40 includes at least a conductive clamp, which is provided with a clamping opening 41. The outlet of the jet channel 711 is positioned toward the clamping opening 41. In this embodiment, the ejector 70 can be positioned in alignment with the workpiece 40 or at any location on the liquid reservoir 10, as long as it increases the oxygen content within the entire stripping liquid. In this embodiment, the ejector 70 is preferably positioned on the sidewall of the liquid reservoir 10, aligned with the clamping opening 41. When the stripping liquid is ejected from the ejector 70, it not only increases the oxygen content within the entire liquid reservoir 10 but also accelerates the flow rate of the stripping liquid at the clamping opening 41, thereby increasing the reaction rate between the stripping liquid and the copper at the clamping opening. Furthermore, during actual operation, bubbles accumulate at the clamping opening 41, forming a bubble layer. Aligning the ejector 70 with the clamping opening 41 can dissipate the bubbles generated and accumulated at the clamping opening 41, further improving the stripping efficiency of the stripping liquid on the copper layer on the conductive clamp. Moreover, due to the impact of the stripping liquid, part of the copper layer on the conductive clip may also fall off.

[0038] See also Figure 1 As shown, the air inlet channel 712 provided on the main body 71 can be connected to the main body 71 vertically or obliquely, as long as it is ensured that the air can smoothly enter the ejection channel 711 inside the ejector 70. Figure 1 The figure shows a case where the air inlet channel 712 is arranged obliquely with respect to the main body 71 . The oblique arrangement is more conducive to smooth entry of gas and improves mixing of gas and stripping liquid in the first channel section 7111 .

[0039] See also Figure 2 As shown, the outer diameter of the nozzle 72, at least at the end closest to the first channel section 7111, gradually decreases as it approaches the first channel section 7111. This gradually decreasing outer diameter of the nozzle 72 facilitates insertion of the nozzle 72 into the first channel section 7111. Furthermore, since the air inlet channel 712 and the first channel section 7111 are connected, gas can enter smoothly. By setting the outer diameter of the nozzle 72 to gradually decrease, a gap exists between the outer wall of the nozzle 72 and the interior of the first channel section 7111, which does not hinder the smooth entry of gas. The presence of this gap further improves the efficiency and quality of gas-water mixing.

[0040] It can be seen from the above embodiments that the peeling and hanging device of the utility model can at least achieve the following technical effects:

[0041] (1) The utility model can increase the oxygen content in the entire liquid storage tank by providing an ejector, thereby increasing the reaction rate between the stripping liquid and the copper layer at the clamping mouth of the conductive clamp;

[0042] (2) The present invention can accelerate the flow rate of the stripping liquid at the clamping opening by arranging the ejector toward the clamping opening of the conductive clamp, thereby increasing the reaction rate between the stripping liquid and the copper at the clamping opening of the conductive clamp;

[0043] (3) The utility model sets the ejector at the clamping mouth of the conductive clamp, which can also disperse the bubbles generated and accumulated by the reaction at the clamping mouth, reduce the bubbles to form a bubble isolation layer at the clamping mouth, and thus improve the reaction rate between the stripping liquid and the copper layer on the conductive clamp.

[0044] Combine Figures 1 to 3 As shown, the utility model also provides a water electroplating device, which includes the above-mentioned stripping device. When the conductive film is subjected to water electroplating, the water electroplating device uses the workpiece 40 to clamp the film for electroplating. The workpiece 40 will inevitably come into contact with the plating solution, which will cause the metal ions in the plating solution to be deposited on the surface of the workpiece 40, eventually forming larger protruding particles or copper thorns, and then causing scratches, punctures, and even film breakage to the electroplated film, affecting the final product quality. Installing the above-mentioned stripping device on the water electroplating device can not only realize the stripping of the copper layer on the workpiece 40, but also the recycling of the workpiece 40. Specifically, the ejector 70 is arranged on the side wall of the liquid storage tank 10 and facing the clamp 41 of the conductive clamp, which increases the oxygen content in the liquid storage tank 10 and improves the stripping efficiency of the stripping liquid on the copper layer. In addition, the stripping liquid ejected through the ejector 70 is helpful to disperse the bubble isolation layer formed at the clamping mouth 41, further improving the reaction rate between the stripping liquid and the copper layer, reducing the impact of the workpiece 40 on the quality of the conductive film during the water electroplating process, and improving the quality of the conductive film.

[0045] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used herein to describe the spatial positional relationship of a device or feature to other devices or features as shown in the figures. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figures. For example, if the device in the drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0046] In addition, it should be noted that the use of words such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. Unless otherwise stated, the above words have no special meaning and therefore cannot be understood as limiting the scope of protection of this utility model.

[0047] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A stripping device for stripping a copper layer on a workpiece (40) that is moved in a cycle after a coating process, characterized in that: The peeling and hanging device comprises: A liquid storage mechanism, the liquid storage mechanism comprising a liquid storage tank (10), the liquid storage tank (10) being used to store the peeling liquid; An ejector (70) is provided on the side wall of the liquid storage tank (10) and is used for introducing oxygen or air into the surface of the workpiece (40) or the stripping liquid.

2. The peeling and hanging device according to claim 1, characterized in that: The ejector (70) comprises a main body (71) and a nozzle (72); the main body (71) is provided with a jet channel (711) and an air inlet channel (712); the jet channel (711) is provided along the axial direction of the main body (71); the air inlet channel (712) is provided on the side wall of the main body (71) and communicates with the jet channel (711); the air inlet channel (712) is located outside the liquid storage tank (10); and the nozzle (72) is connected to the inlet end of the jet channel (711) and is located outside the liquid storage tank (10).

3. The peeling and hanging device according to claim 2, characterized in that: A ball head (73) is provided at one end of the main body (71) facing away from the nozzle (72). The ejector (70) further comprises an ejection section (701). The ejection section (701) is provided with a through hole communicating with the ejection channel (711). The ejection section (701) is rotatably connected to the ball head (73).

4. The peeling and hanging device according to claim 2 or 3, characterized in that: The jet channel (711) comprises a first channel section (7111) and a second channel section (7112) which are connected in sequence, wherein the cross-sectional area of the first channel section (7111) close to the end of the second channel section (7112) gradually decreases, and the cross-sectional area of the second channel section (7112) gradually increases, the nozzle (72) is connected to the first channel section (7111), and the air inlet channel (712) is connected to the first channel section (7111).

5. The peeling and hanging device according to claim 4, characterized in that: The distance between the outlet end of the air inlet channel (712) and the first channel section (7111) is greater than the distance between the outlet end of the nozzle (72) and the first channel section (7111).

6. The peeling and hanging device according to claim 4, characterized in that: The nozzle (72) is provided with a delivery channel (721), and the cross-sectional area of the delivery channel (721) gradually decreases in a direction approaching the second channel section (7112).

7. The peeling and hanging device according to claim 2, characterized in that: The workpiece (40) comprises at least a conductive clamp, the conductive clamp is provided with a clamping opening (41), and the outlet of the jet channel (711) is arranged toward the clamping opening (41).

8. The peeling and hanging device according to claim 2, characterized in that: The extending direction of the air inlet channel (712) is perpendicular to or inclined to the axial direction of the main body (71).

9. The peeling and hanging device according to claim 4, characterized in that: Along the direction approaching the first channel section (7111), the outer diameter of the nozzle (72) at least close to one end of the first channel section (7111) gradually decreases.

10. A water electroplating device, characterized in that: The peeling and hanging device comprises the peeling and hanging device according to any one of claims 1 to 9.

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